Device for vacuum sealing furnace door

Abstract

The invention discloses a device for sealing a vacuum furnace door, comprising a horizontally movable module, a quartz tube, a stainless steel furnace door, two spindle furnace door support rods and two silicon carbide rods. A horizontal slide groove is provided on the front of the horizontally movable module, a nut connecting seat is slidably connected inside the horizontal slide groove, a supporting base plate is fixedly installed at the bottom of the nut connecting seat, a supporting pad is fixedly installed at the middle of the top of the supporting base plate, linear bearings are fixedly installed at the four corners of the top of the supporting pad, and two opposite linear bearings are movably connected with the corresponding spindle furnace door support rods. In the invention, a quartz tube sleeve is sleeved outside the silicon carbide rod to prevent impurities from entering the workpiece, the quartz tube sleeve leads out of the stainless steel furnace door, and is sealed with a sealing bellows through a sealing ring, a nylon clamp is used to clamp the quartz sleeve to prevent the quartz sleeve from being pressed into the vacuum chamber by the atmosphere, and an aluminum sleeve and a spring work together to press the stainless steel furnace door at the lower side of the sealing bellows to prevent the stainless steel furnace door from tilting.

Description

Technical Field

[0001] The invention relates to a device for sealing a furnace door, in particular to a device for vacuum sealing a furnace door, and belongs to the technical field of semiconductor vacuum annealing furnaces. Background Art

[0002] Vacuum annealing furnace is mainly suitable for stainless steel deep drawing parts such as plumbing equipment, water expansion parts, pins, medical equipment, stainless steel nails, stainless steel screws, riveted parts, stainless steel bearings, watch cases, watch straps, knives, micro shafts, self-drilling and self-drilling, tableware and other stainless steel products under the control of protective atmosphere for continuous bright annealing, solution treatment, demagnetization and stainless steel quenching treatment.

[0003] During the use of the vacuum annealing furnace, the sealing of the furnace door is extremely important. How to ensure the sealing of the furnace door is the key to ensuring the quality of semiconductors. However, most of the existing devices for sealing the furnace door cannot prevent the atmospheric pressure from entering the vacuum chamber, resulting in reduced sealing. In addition, due to the insufficient purity of the silicon carbide rod, impurities are precipitated at high temperatures, which can easily affect the semiconductor process. For this reason, we provide devices for vacuum sealing the furnace door. Summary of the invention

[0004] The object of the present invention is to provide a device for vacuum sealing a furnace door to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical scheme: a device for vacuum sealing a furnace door, comprising a horizontal moving module, a quartz tube, a stainless steel furnace door, two spindle furnace door support rods and two silicon carbide rods, a horizontal slide groove is provided on the front of the horizontal moving module, a nut connecting seat is slidably connected inside the horizontal slide groove, a supporting base plate is fixedly installed at the bottom of the nut connecting seat, a supporting pad is fixedly installed at the middle of the top of the supporting base plate, linear bearings are fixedly installed at the four corners of the top of the supporting pad, and two opposite linear bearings are fixedly installed at the bottom of the nut connecting seat. The two mandrel furnace door support rods are movably connected to the corresponding mandrel furnace door support rods, one end of the two mandrel furnace door support rods are connected to the stainless steel furnace door through a pressing block, the stainless steel furnace door is connected to the quartz tube flange, and horizontal adjustment top screws are installed at the four corners of the top of the support base plate. The two opposite horizontal adjustment top screws are movably connected to the corresponding silicon carbide rods, the middle parts of the two silicon carbide rods are fixedly connected with nylon clamps, one end of the two nylon clamps are connected with sealing bellows, and one end of the two sealing bellows are connected to the stainless steel furnace door through a sealing ring.

[0006] As a preferred technical solution of the present invention, one end of the two silicon carbide rods extends to the inside of the quartz tube and is connected to a quartz sleeve, and the two quartz sleeves extend to corresponding nylon clamps respectively and are connected to the sealing bellows through a sealing ring.

[0007] As a preferred technical solution of the present invention, a servo motor is fixedly installed at the bottom end of the horizontal moving module, and a synchronous belt is connected to the output end of the servo motor. The synchronous belt is transmission-connected to the transmission screw inside the horizontal moving module, and the transmission screw inside the horizontal moving module is transmission-connected to the nut connecting seat.

[0008] As a preferred technical solution of the present invention, the other ends of the two nylon clamps are connected to springs, and one ends of the two springs are connected to aluminum sleeves.

[0009] As a preferred technical solution of the present invention, a rectangular spring is fixedly installed in the middle of the two spindle furnace door support rods.

[0010] As a preferred technical solution of the present invention, left and right adjustment blocks are fixedly installed at the corners of the supporting base plate.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] 1. The device for vacuum sealing furnace door of the present invention is provided with linear bearings, stainless steel furnace door, spindle furnace door support rod, rectangular spring, aluminum sleeve, spring, nylon clamp, sealing bellows, pressing block and quartz sleeve. The silicon carbide rod has a large bearing capacity and can withstand high temperature. A quartz tube sleeve is sleeved outside the silicon carbide rod to prevent impurities from entering the workpiece. The quartz tube sleeve leads out of the stainless steel furnace door and is sealed with the sealing bellows through a sealing ring. The nylon clamp is used to clamp the quartz sleeve to prevent the quartz sleeve from being pressed into the vacuum chamber by the atmosphere. The aluminum sleeve and the spring work together to press the stainless steel furnace door on the lower side of the sealing bellows to prevent the stainless steel furnace door from tilting. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the present invention;

[0014] Figure 2 For the present invention Figure 1 A schematic diagram of a local enlarged structure;

[0015] Figure 3 For the present invention Figure 1 Schematic diagram of the planar structure;

[0016] Figure 4 This is a schematic diagram of the cross-sectional structure of the silicon carbide rod of the present invention.

[0017] In the figure: 1. Horizontal moving module; 2. Quartz tube; 3. Horizontal slide; 4. Nut connecting seat; 5. Support base plate; 6. Support pad; 7. Linear bearing; 8. Horizontal adjustment screw; 9. Stainless steel furnace door; 10. Left and right adjustment blocks; 11. Mandrel furnace door support rod; 12. Rectangular spring; 13. Aluminum sleeve; 14. Spring; 15. Nylon clamp block; 16. Sealing bellows; 17. Silicon carbide rod; 18. Pressure block; 19. Servo motor; 20. Synchronous belt; 21. Sealing ring; 22. Quartz sleeve. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] See also Figure 1-4 , the present invention provides a technical solution for a device for vacuum sealing a furnace door:

[0020] according to Figure 1-4 As shown, it includes a horizontal moving module 1, a quartz tube 2, a stainless steel furnace door 9, two spindle furnace door support rods 11 and two silicon carbide rods 17. A horizontal slide groove 3 is provided on the front of the horizontal moving module 1. A nut connecting seat 4 is slidably connected inside the horizontal slide groove 3. A supporting base plate 5 is fixedly installed at the bottom of the nut connecting seat 4. A supporting pad 6 is fixedly installed at the middle of the top of the supporting base plate 5. Linear bearings 7 are fixedly installed at the four corners of the top of the supporting pad 6. The two opposite linear bearings 7 are movably connected to the corresponding spindle furnace door support rods 11. One end of the two spindle furnace door support rods 11 are connected to the stainless steel furnace door 9 through a pressing block 18, the stainless steel furnace door 9 is flange-connected to the quartz tube 2, and horizontal adjustment top screws 8 are installed at the four corners of the top of the support base plate 5. The two opposite horizontal adjustment top screws 8 are movably connected to the corresponding silicon carbide rods 17, and the middle parts of the two silicon carbide rods 17 are fixedly connected with nylon clamps 15, one end of the two nylon clamps 15 is connected to a sealing bellows 16, and one end of the two sealing bellows 16 is connected to the stainless steel furnace door 9 through a sealing ring 21.

[0021] according to Figure 1 and Figure 2As shown, one end of the two silicon carbide rods 17 extends to the interior of the quartz tube 2 and is connected to a quartz sleeve 22. The two quartz sleeves 22 extend to the corresponding nylon clamps 15 respectively and are connected to the sealing bellows 16 through a sealing ring 21 to prevent impurities from entering the processed workpiece. A servo motor 19 is fixedly installed at the bottom end of the horizontal moving module 1. A synchronous belt 20 is connected to the output end of the servo motor 19. The synchronous belt 20 is connected to the transmission screw inside the horizontal moving module 1. The transmission screw inside the horizontal moving module 1 is connected to the nut connecting seat 4 for convenient and stable horizontal movement. The other end of the two nylon clamps 15 is connected to a spring 14. One end of the two springs 14 is connected to an aluminum sleeve 13, which has a certain protective effect and uses the rebound force of the spring 14 for limiting. A rectangular spring 12 is fixedly installed in the middle of the two spindle furnace door support rods 11, and left and right adjustment blocks 10 are fixedly installed at the corners of the support base plate 5 for adjusting the left and right positions.

[0022] When used specifically, the device for vacuum sealing the furnace door of the present invention feeds the reaction workpiece into the quartz tube by means of the horizontally movable module 1, the flanges of the stainless steel furnace door 9 and the quartz tube 2 are pressed tightly, and sealed by the sealing ring provided therewith, the mandrel furnace door support rod 11 is used to support the stainless steel furnace door 9, the mandrel furnace door support rod 11 can slide on the linear bearing 7, the rectangular spring 12 contracts, the stainless steel furnace door 9 is pressed tightly by the elastic force, the support pad 6 is fixed on the support base plate 5, and is used to bear the weight of the entire workpiece and the stainless steel furnace door 9, the silicon carbide rod 17 bears the weight of the entire workpiece, the silicon carbide rod 17 has a large bearing capacity and can withstand high temperatures, a layer of quartz tube sleeve 22 is sleeved outside the silicon carbide rod 17 to prevent impurities from entering the workpiece, the quartz tube sleeve 22 leads out of the stainless steel furnace door 9, and is sealed with the sealing bellows 16 through the sealing ring 21, and the nylon clamp 15 is used to clamp the quartz sleeve 22 to prevent the quartz sleeve 22 from being pressed into the vacuum chamber by the atmosphere. The aluminum sleeve 13 and the spring 14 work together to press the stainless steel furnace door 9 at the lower side of the sealing bellows 16 to prevent the stainless steel furnace door 9 from tilting.

[0023] In the description of the present invention, it is necessary to understand that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] In the present invention, unless otherwise clearly stipulated and limited, for example, it can be a fixed connection, a detachable connection, or an integrated one; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for vacuum sealing a furnace door, comprising a horizontal moving module (1), a quartz tube (2), a stainless steel furnace door (9), two mandrel furnace door support rods (11) and two silicon carbide rods (17), characterized in that: The front of the horizontal moving module (1) is provided with a horizontal slide groove (3), the interior of the horizontal slide groove (3) is slidably connected with a nut connection seat (4), the bottom of the nut connection seat (4) is fixedly installed with a support base plate (5), the middle of the top of the support base plate (5) is fixedly installed with a support pad (6), the four corners of the top of the support pad (6) are fixedly installed with linear bearings (7), the two opposite linear bearings (7) are movably connected with the corresponding spindle furnace door support rods (11), and one end of the two spindle furnace door support rods (11) is connected by a pressure block (18). ) is connected to a stainless steel furnace door (9), the stainless steel furnace door (9) is flange-connected to a quartz tube (2), four corners of the top of the support base plate (5) are installed with horizontal adjustment screws (8), two opposite horizontal adjustment screws (8) are movably connected to corresponding silicon carbide rods (17), the middle parts of the two silicon carbide rods (17) are fixedly connected with nylon clamps (15), one end of the two nylon clamps (15) is connected with a sealing bellows (16), and one end of the two sealing bellows (16) is connected to the stainless steel furnace door (9) through a sealing ring (21); One end of the two silicon carbide rods (17) extends to the interior of the quartz tube (2) and is connected to a quartz sleeve (22); the two quartz sleeves (22) respectively extend to corresponding nylon clamps (15) and are connected to the sealing bellows (16) through a sealing ring; The other ends of the two nylon clamping blocks (15) are connected to a spring (14), and one end of the two springs (14) is connected to an aluminum sleeve (13).

2. The device for vacuum sealing a furnace door according to claim 1, characterized in that: A servo motor (19) is fixedly mounted at the bottom end of the horizontal moving module (1); the output end of the servo motor (19) is connected to a synchronous belt (20); the synchronous belt (20) is transmission-connected to a transmission screw inside the horizontal moving module (1); and the transmission screw inside the horizontal moving module (1) is transmission-connected to a nut connecting seat (4).

3. The device for vacuum sealing a furnace door according to claim 1, characterized in that: A rectangular spring (12) is fixedly installed in the middle of the two spindle furnace door support rods (11).

4. The device for vacuum sealing a furnace door according to claim 1, characterized in that: Left and right adjustment blocks (10) are fixedly mounted at the corners of the supporting base plate (5).

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