A three-axis gyroscope

Abstract

The present invention provides a three-axis gyroscope, comprising a driving structure, a first sensitive structure, a second sensitive structure, a third sensitive structure and a plurality of anchoring structures, wherein the driving structure is used to drive the three-axis gyroscope, the first sensitive structure is used to sense the angular velocity in a first direction, the second sensitive structure is used to sense the angular velocity in a second direction, and the third sensitive structure is used to sense the angular velocity in a third direction. The first sensitive structure, the second sensitive structure and the third sensitive structure are independent of each other, and can be mutually decoupled in a first detection mode, a second detection mode and a third detection mode, can effectively avoid the generation of coupling errors, and can be compatible with electrical orthogonal suppression and capacitive mode matching in the first detection mode, the second detection mode or the third detection mode, so as to compensate for the structural performance loss caused by asymmetric processing, reduce orthogonal errors, and improve the detection accuracy and overall performance of the three-axis gyroscope.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a three-axis gyroscope. Background Art

[0002] The MEMS gyroscope of the prior art can detect angular velocity based on the principle of Coriolis force generation. The angular velocity in any direction can be decomposed along the X-axis, Y-axis and Z-axis in the spatial rectangular coordinate system. A three-axis gyroscope refers to a micromechanical gyroscope capable of measuring angular velocity in the X-axis, Y-axis and Z-axis directions. Therefore, the three-axis gyroscope can measure the direction and magnitude of any angular velocity in space. However, due to the mutual coupling of the X, Y, and Z-axis motion modes of the traditional three-axis gyroscope, the output of each detection axis contains a large coupling error, and it is not possible to simultaneously be compatible with electrical orthogonal suppression and capacitive modal matching, that is, the electrical control of a specific axis detection mode will affect the detection modal characteristics of the remaining axes.

[0003] Therefore, it is necessary to provide a three-axis gyroscope to solve the above problems. Summary of the invention

[0004] The purpose of the present invention is to provide a three-axis gyroscope to solve the problem that the X, Y, and Z axis motion modes in the above-mentioned prior art three-axis gyroscope electronic products are coupled with each other, resulting in a large coupling error in the output of each detection axis and being unable to be compatible with both electrical orthogonal suppression and capacitive mode matching.

[0005] The technical solution of the present invention is as follows: The present invention provides a three-axis gyroscope, including a driving structure, a first sensitive structure, a second sensitive structure, a third sensitive structure and a plurality of anchoring structures for fixing the driving structure, the first sensitive structure, the second sensitive structure and the third sensitive structure, the driving structure is used to drive the three-axis gyroscope, the first sensitive structure is used to sense the angular velocity in a first direction, the first sensitive structure is connected to the driving structure through an elastic member, the first sensitive structure includes a first mass block and a second mass block symmetrically arranged along a second direction, the second sensitive structure is used to sense the angular velocity in the second direction, the second sensitive structure is connected to the driving structure through the elastic member The first and second sensing structures are connected with the driving structure through the elastic member, the second sensing structure includes a third mass block and a fourth mass block symmetrically arranged along the second direction, the third sensing structure is used to sense the angular velocity in the third direction, the third sensing structure is connected to the driving structure through the elastic member, the third sensing structure includes a fifth mass block and a sixth mass block symmetrically arranged along the second direction, wherein the first direction, the second direction and the third direction are orthogonal to each other, the three-axis gyroscope has a driving mode, a first detection mode, a second detection mode and a third detection mode; in the driving mode, the driving structure can drive the first mass block and the second mass block to move in the opposite direction along the second direction; the third mass block and the mass block both have an extension direction The driving structure is parallel to the rotation axis of the third direction, and can also drive the third mass block and the fourth mass block to rotate around their respective rotation axes toward the first sensitive structure or the third sensitive structure; the driving structure can also drive the fifth mass block and the sixth mass block to move in the opposite direction along the second direction, wherein, when the third mass block and the fourth mass block rotate toward the fifth mass block and the sixth mass block, the fifth mass block and the sixth mass block move away from each other, the first mass block and the second mass block move toward each other, and the movement directions of the first mass block and the fifth mass block are opposite; in the first detection mode, the driving structure, the second sensitive structure and the third sensitive structure can remain stationary, and the side opposite to the first mass block and the second mass block can flip in the opposite direction toward the third direction, thereby generating a vibration displacement in the third direction; in the second detection mode, the driving structure, the first sensitive structure and the third sensitive structure can remain stationary, and the third mass block and the fourth mass block can flip in the opposite direction along the third direction around their respective rotation axes, thereby generating a vibration displacement in the third direction; in the third detection mode, the driving structure, the first sensitive structure and the second sensitive structure can remain stationary, and the fifth mass block and the sixth mass block can move in the opposite direction along the first direction, thereby generating a vibration displacement in the first direction.

[0006] In a possible design, the first sensitive structure also includes a first guide portion, which is connected to the anchoring structure through the elastic member along the first direction, and is connected to the first mass block or the second mass block respectively through the elastic member along the second direction; in the driving mode, the first guide portion is easily affected by the first mass block and the second mass block to remain stationary, thereby suppressing the first mass block and the second mass block from moving in the same direction along the second direction; in the first detection mode, the first guide portion can be affected by the first mass block and the second mass block to rotate toward the third direction.

[0007] In a possible design, the second sensitive structure also includes a second guide portion, which is connected to the anchoring structure via the elastic member along the first direction, and is respectively connected to the third mass block or the fourth mass block via the elastic member along the second direction. In a driving mode, the second guide portion is easily driven by the third mass block and the fourth mass block to reciprocate along the first direction, thereby suppressing the third mass block and the fourth mass block from rotating in the same direction along the third direction. In a second detection mode, the second guide portion can be driven by the third mass block and the fourth mass block to reciprocate along the third direction.

[0008] In a possible design, the third sensitive structure also includes a third guide portion, the third guide portion has two first guide blocks symmetrically arranged along the first direction and with the second direction as the axis of symmetry, and has two second guide blocks symmetrically arranged along the second direction and with the first direction as the axis of symmetry, the first guide block is connected to the anchoring structure along the second direction through an in-plane guide elastic member, and the opposite sides of the two first guide blocks are respectively connected to the two second guide blocks through elastic members, the second guide block is connected to the anchoring structure along the first direction through the in-plane guide elastic member, and the opposite sides of the two second guide blocks are connected to the adjacent fifth mass block or the sixth mass block through the elastic member, in the driving mode, the second guide block is easily moved in the opposite direction along the second direction by the fifth mass block and the sixth mass block, and the first guide block is easily moved in the opposite direction along the first direction by the second guide block, thereby suppressing the same-direction movement of the fifth mass block and the sixth mass block.

[0009] In a possible design, the third sensitive structure also includes a first detection block and a second detection block symmetrically arranged along the second direction, the first detection block is connected to the anchoring structure through the in-plane guiding elastic member along the second direction, and is connected to the fifth mass block through the elastic member along the first direction, the second detection block is connected to the anchoring structure through the in-plane guiding elastic member along the second direction, and is connected to the sixth mass block through the elastic member along the first direction, in the driving mode, the first detection block and the second detection block remain stationary, and in the third detection mode, the first detection block can move in the same direction as the fifth mass block, and the second detection block can move in the same direction as the sixth mass block.

[0010] In a possible design, the third sensitive structure also includes two third detection blocks, two fourth detection blocks and two coupling levers which are symmetrically arranged along the first direction and with the second direction as the symmetry axis, and the third detection block and the fourth detection block are symmetrically arranged one by one along the second direction and with the first direction as the symmetry axis. Along the first direction, one end of the two third detection blocks is connected to the fifth mass block through the elastic member, and the other end is connected to the coupling lever through the elastic member. One end of the two fourth detection blocks is connected to the sixth mass block through the elastic member, and the other end is connected to the coupling lever through the elastic member. Along the second direction, the two third detection blocks and the two fourth detection blocks are connected to the anchoring structure through the in-plane guide elastic member along the second direction. In the driving mode, the third detection block and the fourth detection block remain stationary. In the third detection mode, the two third detection blocks can move in the same direction with the fifth mass block, the two fourth detection blocks can move in the same direction with the sixth mass block, and the coupling lever can be driven by the third detection block and the fourth detection block to rotate in the same direction around its rotation axis.

[0011] In one possible design, the three-axis gyroscope also includes a first transducer, a second transducer and a third transducer. Along the third direction, the first transducer and the first sensitive structure are spaced apart to form a capacitor for detecting the vibration displacement of the first sensitive structure along the third direction, or for suppressing the orthogonal error of the first detection mode, or for matching the frequency of the driving mode with the first detection mode. Along the third direction, the second transducer and the second sensitive structure are spaced apart to form a capacitor for detecting the vibration displacement of the second sensitive structure along the third direction, or for suppressing the orthogonal error of the second detection mode, or for matching the frequency of the driving mode with the second detection mode. In a plane perpendicular to the third direction, the third transducer and the third sensitive structure are located in the same plane and the third transducer and the third sensitive structure are spaced apart to form a capacitor for detecting the vibration displacement of the third sensitive structure along the first direction, or for suppressing the orthogonal error of the third detection mode, or for matching the frequency of the driving mode with the third detection mode.

[0012] In a possible design, the driving structure includes a first driving part, a driving arm and a third driving part, and the driving arm is formed with a second driving part; the first driving part and the third driving part are respectively connected to the two ends of the driving arm, and are respectively located on both sides of the second driving part, the first driving part is connected to the first sensitive structure through an elastic part, the second driving part is connected to the second sensitive structure through an elastic part, and the third driving part is connected to the third sensitive structure through an elastic part, the first driving part and the third driving part are connected to the anchoring structure through an in-plane guiding elastic part along the first direction, and the first driving part and the third driving part can drive the second driving part to rotate through the elastic part during the movement of the first driving part and the third driving part along the second direction.

[0013] In a possible design, the driving structure further includes a driving electrode, wherein the driving electrode is mounted on the first driving part and the second driving part, and the driving electrode is spaced apart from the first driving part and / or the third driving part to form a driving capacitor.

[0014] In a possible design, the second sensitive structure further includes a rotation guide elastic member, the third mass block and the fourth mass block are provided with a hole structure, and the rotation guide elastic member is installed in the hole structure.

[0015] The beneficial effects of the present invention are as follows: the three-axis gyroscope of the present invention has a simple structure and high detection sensitivity, the first sensitive structure, the second sensitive structure and the third sensitive structure are independent of each other, and can be decoupled from each other in the first detection mode, the second detection mode and the third detection mode without interfering with each other, and can effectively avoid the first sensitive structure, the second sensitive structure and the third sensitive structure from coupling to produce a large coupling error when detecting angular velocities in different directions, thereby improving the detection accuracy of the three-axis gyroscope; on the other hand, the three-axis gyroscope of this structure can be compatible with electrical orthogonal suppression and capacitive mode matching in the first detection mode, the second detection mode or the third detection mode, thereby compensating for the structural performance loss caused by processing asymmetry, thereby reducing the orthogonal error and improving the detection accuracy and overall performance of the three-axis gyroscope.

[0016] It should be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of a three-axis gyroscope provided by the present invention in one embodiment;

[0018] Figure 2 for Figure 1 Schematic diagram of the structure of the three-axis gyroscope in the driving mode;

[0019] Figure 3 for Figure 1 The structural diagram of the three-axis gyroscope in the first detection mode;

[0020] Figure 4 for Figure 3 A cross-sectional view of the first sensitive structure along the AA direction;

[0021] Figure 5 for Figure 1 The structural diagram of the three-axis gyroscope in the second detection mode;

[0022] Figure 6 for Figure 5 A cross-sectional view of the second sensitive structure along the BB direction;

[0023] Figure 7 for Figure 1 A schematic diagram of the structure of the three-axis gyroscope in the third detection mode;

[0024] Figure 8 A schematic structural diagram of another embodiment of the three-axis gyroscope provided by the present invention;

[0025] Fig. 9 for Figure 8 Schematic diagram of the structure of the three-axis gyroscope in the driving mode;

[0026] Fig.10 for Figure 8 The structural diagram of the three-axis gyroscope in the first detection mode;

[0027] Fig.11 for Fig.10 A cross-sectional view of the first sensitive structure along the CC direction;

[0028] Fig.12 for Figure 8 The structural diagram of the three-axis gyroscope in the second detection mode;

[0029] Fig.13 for Fig.12 A cross-sectional view of the second sensitive structure along the DD direction;

[0030] Fig.14 for Figure 8 A schematic diagram of the structure of the three-axis gyroscope in the third detection mode;

[0031] Fig.15 A schematic structural diagram of a three-axis gyroscope provided by the present invention in yet another embodiment;

[0032] Fig.16 for Fig.15 Schematic diagram of the structure of the three-axis gyroscope in the driving mode;

[0033] Fig.17 for Fig.15 Schematic diagram of the structure of the three-axis gyroscope in the third detection mode. Reference numerals: 1 - first sensitive structure;

[0034] 11- first mass block;

[0035] 12- second mass block;

[0036] 13- first guide portion;

[0037] 14-connecting part;

[0038] 15-first transducer; 2-second sensitive structure;

[0039] 21- the third mass block;

[0040] 22- fourth mass block;

[0041] 23- second guide portion;

[0042] 24- Second transducer

[0043] 25-rotation guide elastic member;

[0044] 26-hole structure;

[0045] 3- The third sensitive structure;

[0046] 31- fifth mass;

[0047] 311 - first recessed portion; 32 - sixth mass block;

[0048] 321 - second recessed portion; 33 - third guide portion;

[0049] 331-first guide block;

[0050] 332-second guide block;

[0051] 333-driving member;

[0052] 34-first detection block;

[0053] 35-second detection block;

[0054] 36-third detection block;

[0055] 37- fourth detection block;

[0056] 38-coupling lever;

[0057] 39- third transducer;

[0058] 4- Anchoring structure;

[0059] 5- Driving structure;

[0060] 51- first driving unit;

[0061] 52-driving arm;

[0062] 521- second driving unit;

[0063] 53- third driving unit;

[0064] 54- driving electrode;

[0065] 6- elastic member;

[0066] 7- In-plane guiding elastic member;

[0067] 10-fixing parts;

[0068] X-first direction;

[0069] Y-second direction;

[0070] Z - third direction.

[0071] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application. DETAILED DESCRIPTION

[0072] The present invention will be further described below in conjunction with the accompanying drawings and implementation modes.

[0073] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0074] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0075] It should be noted that the directional words such as "upper", "lower", "left", and "right" described in the embodiments of the present application are described at the angles shown in the accompanying drawings and should not be understood as limiting the embodiments of the present application. In addition, in the context, it is also necessary to understand that when it is mentioned that an element is connected to another element "upper" or "lower", it can not only be directly connected to another element "upper" or "lower", but also indirectly connected to another element "upper" or "lower" through an intermediate element.

[0076] The present invention provides a three-axis gyroscope, such as Figure 1 to Figure 7 As shown, it includes a driving structure 5, a first sensitive structure 1, a second sensitive structure 2, a third sensitive structure 3 and a plurality of anchoring structures 4 for fixing the driving structure 5, the first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3. The driving structure 5 is used to drive a three-axis gyroscope. The first sensitive structure 1 is used to sense the angular velocity in the first direction X. The first sensitive structure 1 is connected to the driving structure 5 through an elastic member 6. The first sensitive structure 1 includes a first mass block 11 and a second mass block 12 symmetrically arranged along the second direction Y. The second sensitive structure 2 is used to sense the angular velocity in the second direction Y. The second sensitive structure 2 is connected to the driving structure 5 through an elastic member 6. The second sensitive structure 2 includes a third mass block 21 and a fourth mass block 22 symmetrically arranged along the second direction Y. The third sensitive structure 3 is used to sense the angular velocity in the third direction Z. The third sensitive structure 3 is connected to the driving structure 5 through an elastic member 6. The third sensitive structure 3 includes a fifth mass block 31 and a sixth mass block 32 symmetrically arranged along the second direction Y.

[0077] The first direction X, the second direction Y and the third direction Z are orthogonal to each other, and the three-axis gyroscope has a driving mode, a first detection mode, a second detection mode and a third detection mode.

[0078] In such Figure 2 In the driving mode shown, the driving structure 5 can drive the first mass block 11 and the second mass block 12 of the first sensitive structure 1 to reciprocate in opposite directions along the second direction Y through the elastic member 6, so that a differential linear motion is formed between the first mass block 11 and the second mass block 12, and the third mass block 21 and the fourth mass block 22 both have a rotation axis extending in a direction parallel to the third direction Z. The driving structure 5 can also drive the third mass block 21 and the fourth mass block 22 of the second sensitive structure 2 to rotate in the opposite direction toward the first sensitive structure 1 or the third sensitive structure 3 around their respective rotation axes through the elastic member 6, so that the third mass block 21 A differential rotational motion is formed between the fifth mass block 31 and the fourth mass block 22. At the same time, the driving structure 5 can also drive the fifth mass block 31 and the sixth mass block 32 of the third sensitive structure 3 to reciprocate in opposite directions along the second direction Y through the elastic member 6, so that a differential linear motion is formed between the fifth mass block 31 and the sixth mass block 32, wherein, when the third mass block 21 and the fourth mass block 22 rotate toward the fifth mass block and the sixth mass block, the fifth mass block and the sixth mass block move away from each other, the first mass block and the second mass block approach each other, and the movement directions of the first mass block 11 and the fifth mass block 31 are opposite.

[0079] When the three-axis gyroscope receives an angular velocity in the first direction X, the second direction Y or the third direction Z imposed by the outside, according to the Coriolis principle, the first sensitive structure 1, the second sensitive structure 2 or the third sensitive structure 3 generates a Coriolis force due to the angular velocity, and the Coriolis force forces the first sensitive structure 1, the second sensitive structure 2 or the third sensitive structure 3 of the three-axis gyroscope to generate a vibration perpendicular to its motion direction in the driving mode, so that the three-axis gyroscope is in the first detection mode, the second detection mode or the third detection mode. By detecting the vibration displacement of the first sensitive structure 1, the second sensitive structure 2 or the third sensitive structure 3, and transmitting the detection structure to the computing system (not shown in the figure), the computing system calculates the angular velocity applied to the three-axis gyroscope based on the received data.

[0080] Specifically, when the three-axis gyroscope is subjected to an angular velocity along the first direction X, the three-axis gyroscope is in a state as follows: Figure 3 and Figure 4 In the first detection mode shown in FIG. 1 , the driving structure 5, the second sensitive structure 2 and the third sensitive structure 3 can remain stationary. The first sensitive structure 1 is affected by the angular velocity along the first direction X to generate a Coriolis force along the third direction Z. The direction of the Coriolis force at a certain moment is as follows: Figure 3 and Figure 4As shown in the direction of the middle arrow, the Coriolis force forces the opposite side of the first mass block 11 and the second mass block 12 to flip in the opposite direction toward the third direction Z, so that a differential rotational motion is formed between the first mass block 11 and the second mass block 12, thereby generating a vibration displacement in the third direction Z. The angular velocity along the first direction X can be obtained by detecting the vibration displacement of the first mass block 11 and the second mass block in the third direction.

[0081] When the three-axis gyroscope is subjected to an angular velocity along the second direction Y, the three-axis gyroscope is in a state as follows: Figure 5 and Figure 6 In the second detection mode shown in FIG. 1 , the driving structure 5, the first sensitive structure 1 and the third sensitive structure 3 can remain stationary. The second sensitive structure 2 is affected by the angular velocity along the second direction Y to generate a Coriolis force along the third direction Z. The direction of the Coriolis force at a certain moment is as follows: Figure 5 and Figure 6 As shown in the direction of the arrow in , the Coriolis force will force the third mass block 21 and the fourth mass block 22 to flip in the opposite direction around their respective rotation axes along the third direction Z, so that a differential rotational motion is formed between the third mass block 21 and the fourth mass block 22, thereby generating a vibration displacement in the third direction Z. The angular velocity along the second direction Y can be obtained by detecting the vibration displacement of the third mass block 21 and the fourth mass block 22 along the third direction.

[0082] When the three-axis gyroscope is subjected to an angular velocity along the third direction Z, the three-axis gyroscope is in the following state: Figure 7 In the third detection mode shown in FIG. 1 , the driving structure 5, the first sensitive structure 1 and the second sensitive structure 2 can remain stationary. The third sensitive structure 3 is affected by the angular velocity along the third direction Z to generate a Coriolis force along the first direction X. The direction of the Coriolis force at a certain moment is as follows: Figure 7 As shown in the direction of the middle arrow, the Coriolis force forces the fifth mass block 31 and the sixth mass block 32 to reciprocate in opposite directions along the first direction X, so that a differential linear motion is formed between the fifth mass block 31 and the sixth mass block 32, thereby generating a vibration displacement in the first direction X. By detecting the displacement in the first direction X, the angle in the second direction Y can be obtained.

[0083] Therefore, the three-axis gyroscope of the present invention has a simple structure and high detection sensitivity. The first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3 are independent of each other and can be decoupled from each other in the first detection mode, the second detection mode and the third detection mode without interfering with each other. The first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3 can be effectively prevented from coupling and generating a large coupling error when detecting angular velocities in different directions, thereby improving the detection accuracy of the three-axis gyroscope. On the other hand, the three-axis gyroscope of this structure can be compatible with electrical orthogonal suppression and capacitive mode matching in the first detection mode, the second detection mode or the third detection mode, thereby compensating for the structural performance loss caused by processing asymmetry, thereby reducing the orthogonal error and improving the detection accuracy and overall performance of the three-axis gyroscope.

[0084] In addition, the gyroscope of the present invention is symmetrically arranged in the second direction Y, and the movements of the first sensitive structure 1, the second sensitive structure 2, and the third sensitive structure 3 in the driving mode, the first detection mode, the second detection mode, and the third detection mode are all differential movements, which can effectively improve the movement stability of the three-axis gyroscope, facilitate differential detection, and can effectively immunize against the influence of common-mode interference such as acceleration and impact, thereby further improving the overall performance of the three-axis gyroscope.

[0085] In a specific embodiment, Figure 2 to Figure 4 As shown, the first mass block 11 and the second mass block 12 are connected by an elastic member 6, so that the first mass block 11 and the second mass block 12 can be coupled to each other. Figure 2 In the driving mode shown in FIG. 1 , the elastic member 6 between the first mass block 11 and the second mass block 12 can generate deformation along the second direction Y as the driving structure 5 drives the first mass block 11 and the second mass block 12 to move along the second direction Y, so that a reciprocating differential linear motion can be formed between the first mass block 11 and the second mass block 12. Figure 3 and Figure 4 In the first detection mode, the elastic member 6 can be deformed when the first mass block 11 and the second mass block 12 are subjected to the Coriolis force and produce reverse flipping motion, so that the first mass block 11 and the second mass block 12 can pull each other, thereby being able to perform differential rotational motion in a plane perpendicular to the first direction X, thereby facilitating differential detection and improving the motion stability of the first mass block 11 and the second mass block 12.

[0086] In another specific embodiment, Figure 8 to Figure 11 As shown, the first sensitive structure 1 may further include a first guide portion 13, which is connected to the anchoring structure 4 along the first direction X through the elastic member 6, and is connected to the first mass block 11 or the second mass block 12 along the second direction Y through the elastic member 6 respectively.

[0087] In the driving mode, the first guide portion 13 is easily affected by the first mass block 11 and the second mass block 12 to remain stationary, thereby suppressing the first mass block 11 and the second mass block 12 from moving in the second direction Y in the same direction.

[0088] In such Fig.10 and Fig.11 In the first detection mode, the first guide portion 13 can be pulled by the first mass block 11 and the second mass block 12 to rotate toward the third direction Z. At a certain moment, the force direction of the first guide portion 13 is as follows: Fig. 9 , Fig.10 and Fig.11 Indicated by the direction of the arrow.

[0089] In this embodiment, the elastic member 6 is a structure that can rotate around the first direction X and is not easily deformed toward the first direction X, the second direction Y or the third direction Z. The first guide portion 13 is connected to the anchoring structure 4 at both ends along the first direction X through the elastic member 6, so that the first guide portion 13 can rotate in a plane perpendicular to the first direction X and can prevent the first guide portion 13 from moving along the second direction Y.

[0090] In such Fig. 9 In the driving mode shown, the two ends of the first guide portion 13 along the second direction Y will not be displaced with the movement of the first mass block 11 or the second mass block 12, so that the first mass block 11 and the second mass block 12 make differential linear motion towards or away from the first guide portion 13 at the same time under the drive structure 5, thereby reducing the motion interference between the first mass block 11 and the second mass block 12, and avoiding the first mass block 11 and the second mass block 12 from being interfered with by each other or the interference of the drive structure 5 in the driving mode to produce the same direction motion and other movements that put the three-axis gyroscope in a parasitic mode. And in the case of Fig.10 and Fig.11 In the first detection mode, the first guide portion 13 can increase the displacement difference between the first mass block 11 and the second mass block 12 in the third direction Z, which is more convenient for differential detection and improves the detection accuracy of the three-axis gyroscope.

[0091] Therefore, the setting of the first guide portion 13 can suppress the first mass block 11 and the second mass block 12 from producing the same-direction movement in the second direction Y, increase the frequency difference between the driving mode and the parasitic mode, reduce the output of the first sensitive structure 1 to the same-direction interference such as linear impact and vibration, and effectively improve the quality factor of the three-axis gyroscope in the driving mode.

[0092] In a specific embodiment, Figure 2 , Figure 5 and Figure 6 As shown, the third mass block 21 and the fourth mass block 22 are connected by an elastic member 6, so that the third mass block 21 and the fourth mass block 22 can be coupled to each other. Figure 2 In the driving mode shown in FIG. 1 , the elastic member 6 between the third mass block 21 and the fourth mass block 22 can be deformed with the rotation of the third mass block 21 and the fourth mass block 22, so that the third mass block 21 and the fourth mass block 22 can form a differential rotational motion in a plane perpendicular to the first direction X. Figure 5 and Figure 6 In the second detection mode shown, the elastic member 6 can be deformed when the third mass block 21 and the fourth mass block 22 are subjected to the Coriolis force to produce a reverse flipping motion, so that the third mass block 21 and the fourth mass block 22 can pull each other, thereby being able to perform differential rotational motion in a plane perpendicular to the first direction X, thereby facilitating differential detection and improving the motion stability of the third mass block 21 and the fourth mass block 22.

[0093] In another specific embodiment, Fig. 9 , Fig.12 and Fig.13 As shown, the second sensitive structure 2 may further include a second guide portion 23, which is connected to the anchor structure 4 along the first direction X through the elastic member 6, and is connected to the third mass block 21 or the fourth mass block 22 along the second direction Y through the elastic member 6 respectively.

[0094] In the driving mode, the second guide portion 23 is easily pulled by the third mass block 21 and the fourth mass block 22 to reciprocate along the first direction X, thereby inhibiting the third mass block 21 and the fourth mass block 22 from rotating in the same direction along the third direction Z.

[0095] In the second detection mode, the second guide portion 23 can be driven by the third mass block 21 and the fourth mass block 22 to reciprocate along the third direction Z. At a certain moment, the force direction of the second guide portion 23 is as follows: Fig. 9 , Fig.12 and Fig.13 Indicated by the direction of the arrow.

[0096] In this embodiment, the elastic member 6 is a structure capable of deforming along the first direction X and rotating toward the third direction Z. Both ends of the second guide portion 23 along the first direction X are connected to the anchoring structure 4 through the elastic member 6 .

[0097] In such Fig. 9In the driving mode shown, the two ends of the second guide portion 23 along the second direction Y can generate reciprocating motion along the first direction X under the pull of the third mass block 21 and the fourth mass block 22. At the same time, the second guide portion 23 can also guide the third mass block 21 and the fourth mass block 22 to rotate toward the same side, so that the third mass block 21 and the fourth mass block 22 have different rotation directions (such as the third mass block 21 rotates clockwise and the fourth mass block 22 rotates counterclockwise) to form a differential rotation motion, thereby preventing the third mass block 21 and the fourth mass block 22 from rotating in the same direction under the driving mode due to the interference of the driving structure 5, so that the three-axis gyroscope is in a parasitic mode. And in the case of Fig.12 and Fig.13 In the second detection mode shown, the second guide portion 23 can increase the displacement difference between the third mass block 21 and the fourth mass block 22 in the third direction Z, making it easier to implement differential detection and improving the detection accuracy of the three-axis gyroscope.

[0098] Therefore, the setting of the second guide portion 23 can suppress the third mass block 21 and the fourth mass block 22 from rotating in the same direction in a plane perpendicular to the third direction Z, increase the frequency difference between the driving mode and the parasitic mode, reduce the output of the second sensitive structure 2 for the same-direction interference such as linear impact and vibration, and effectively improve the quality factor of the three-axis gyroscope in the driving mode.

[0099] In a specific embodiment, Figure 2 and Figure 7 As shown, the fifth mass block 31 and the sixth mass block 32 are connected by an elastic member 6, so that the fifth mass block 31 and the sixth mass block 32 can be coupled to each other. Figure 2 In the driving mode shown in FIG. 1 , the elastic member 6 between the fifth mass block 31 and the sixth mass block 32 can generate deformation along the second direction Y as the driving structure 5 drives the fifth mass block 31 and the sixth mass block 32 to move along the second direction Y, so that a reciprocating differential linear motion can be formed between the fifth mass block 31 and the sixth mass block 32. Figure 7 In the three detection modes shown, the elastic member 6 can be deformed when the fifth mass block 31 and the sixth mass block 32 are subjected to the Coriolis force and move along the first direction X, so that the fifth mass block 31 and the sixth mass block 32 can pull each other, thereby generating differential linear motion in the first direction X, which facilitates differential detection and improves the movement stability of the fifth mass block 31 and the sixth mass block 32.

[0100] In another specific embodiment, Fig. 9 and Fig.14As shown, the third sensitive structure 3 may also include a third guide portion 33, the third guide portion 33 is symmetrically arranged with two first guide blocks 331 along the first direction X and with the second direction Y as the symmetry axis, and is symmetrically arranged with two second guide blocks 332 along the second direction Y and with the first direction X as the symmetry axis, the first guide block 331 is connected to the anchoring structure 4 along the second direction Y through an in-plane guide elastic member 7, and the opposite sides of the two first guide blocks 331 are respectively connected to the two second guide blocks 332 through an elastic member 6, the second guide block 332 is connected to the anchoring structure 4 along the first direction X through the in-plane guide elastic member 7, and the opposite sides of the two second guide blocks 332 are connected to the adjacent fifth mass block 31 or sixth mass block 32 through an elastic member 6.

[0101] In such Fig. 9 In the driving mode shown in FIG. 1 , the second guide block 332 is easily moved in the opposite direction along the second direction Y by the fifth mass block 31 and the sixth mass block 32, and the first guide block 331 is easily moved in the opposite direction along the first direction X by the second guide block 332, thereby suppressing the same-direction movement of the fifth mass block 31 and the sixth mass block 32. The force direction of the third guide portion 33 at a certain moment is as follows: Fig. 9 and Fig.14 Indicated by the direction of the arrow.

[0102] In this embodiment, the first guide block 331 is connected to the anchor structure 4 along the second direction Y through the in-plane guide elastic member 7, so that the first guide block 331 can move linearly along the first direction X and can prevent the first guide block 331 from moving along the second direction Y. The second guide block 332 is connected to the anchor structure 4 along the first direction X through the in-plane guide elastic member 7, so that the second guide block 332 can move linearly along the second direction Y and can prevent the second guide block 332 from moving along the first direction.

[0103] In such Fig. 9 In the driving mode shown, the two second guide blocks 332 move in the same direction with the fifth mass block 31 or the sixth mass block 32 connected thereto, and the two first guide blocks 331 are pulled closer to or farther from each other by the elastic member 6, so that the fifth mass block 31 and the sixth mass block 32 can make differential linear motion in the second direction Y and in opposite directions under the drive of the driving structure 5, thereby reducing the motion interference between the fifth mass block 31 and the sixth mass block 32, and avoiding the fifth mass block 31 and the sixth mass block 32 from being interfered with each other or disturbed by the driving structure 5 under the driving mode to produce the same direction motion and other motions that put the three-axis gyroscope in a parasitic mode. And in the case as Fig.14In the third detection mode shown, the third guide portion 33 can remain stationary, reducing the coupling error of the third sensitive structure 3 in different modes, and can further reduce the motion interference between the fifth mass block 31 and the sixth mass block 32, making it easier to achieve differential detection and improving the detection accuracy of the three-axis gyroscope.

[0104] Therefore, the setting of the third guide portion 33 can suppress the fifth mass block 31 and the sixth mass block 32 from producing unidirectional movement in the second direction Y, increase the frequency difference between the driving mode and the parasitic mode, reduce the output of the third sensitive structure 3 for unidirectional interference such as linear impact and vibration, and effectively improve the quality factor of the three-axis gyroscope in the driving mode.

[0105] Among them, Fig. 9 and Fig.14 As shown in the specific embodiment, the two second guide blocks 332 can be respectively provided with a driving member 333 for driving the second guide block 332 to further suppress the same-direction movement of the fifth mass block 31 and the sixth mass block 32. Of course, the secondary driving member 333 may not be provided, and there is no limitation here.

[0106] It should be noted that the three-axis gyroscope in the present invention may have one or more of the first guide portion 13, the second guide portion 23 and / or the third guide portion 33, etc., or may not have any guide portion, and there is no limitation here.

[0107] In a specific embodiment, Figure 1 to Figure 14 As shown, the third sensitive structure 3 also includes a first detection block 34 and a second detection block 35 symmetrically arranged along the second direction Y. The first detection block 34 is connected to the anchoring structure 4 along the second direction Y through the in-plane guiding elastic member 7, and is connected to the fifth mass block 31 along the first direction X through the elastic member 6. The second detection block 35 is connected to the anchoring structure 4 along the second direction Y through the in-plane guiding elastic member 7, and is connected to the sixth mass block 32 along the first direction X through the elastic member 6.

[0108] In such Figure 2 and Fig. 9 In the driving mode shown, the first detection mass 34 and the second detection mass 35 remain stationary.

[0109] In such Figure 7 and Fig.14 In the third detection mode, the first detection block 34 can move in the same direction as the fifth mass block 31, and the second detection block 35 can move in the same direction as the sixth mass block 32.

[0110] In this embodiment, the first detection block 34 and the second detection block 35 are connected to the anchoring structure 4 along the second direction Y through the in-plane guiding elastic member 7, so that the first detection block 34 and the second detection block 35 can move linearly along the first direction X, and can prevent the first detection block 34 and the second detection block 35 from moving along the second direction Y.

[0111] Therefore, in Figure 2 and Fig. 9 In the driving mode shown, the first detection block 34 and the second detection block 35 can remain stationary. Figure 7 and Fig.14 In the third detection mode, the first detection block 34 can slide in the same direction as the fifth mass block 31 along the first direction X, and the second detection block 35 can slide in the same direction as the sixth mass block 32 along the first direction X, so that differential linear motion is formed between the first detection block 34 and the second detection block 35. By detecting the vibration displacement of the first detection block 34 and the second detection block 35 in the first direction X, the angular velocity along the third direction Z can be obtained. The vibration frequency of the first detection block 34 and the second detection block 35 is the same as the motion frequency of the fifth mass block 31 and the sixth mass block 32, and the volume is smaller, which is easier to measure. At the same time, this structure can reduce the coupling error between the first detection block 34 and the second detection block 35 in different modes, and improve the detection accuracy of the three-axis gyroscope.

[0112] The first detection block 34 and the second detection block 35 can be respectively arranged on the outside of the fifth mass block 31 and the sixth mass block 32, or can be arranged on the outside of the fifth mass block 31 and the sixth mass block 32. Figure 7 to Figure 14 The inner sides of the fifth mass block 31 and the sixth mass block 32 shown in the specific embodiment are not limited here.

[0113] Specifically, Figure 7 to Figure 14 As shown in the specific embodiment, when the first detection block 34 and the fifth detection block 35 are respectively arranged on the inner sides of the fifth mass block 31 and the sixth mass block 32, the fifth mass block 31 can be provided with a first recessed portion 311, and the sixth mass block 32 can be provided with a second recessed portion 321, so that the first detection block 34 is installed in the first recessed portion 311, and the second detection block 35 is installed in the second recessed portion 321.

[0114] In another specific embodiment, Figure 15 to Figure 17As shown, the third sensitive structure 3 also includes two third detection blocks 36, two fourth detection blocks 37 and two coupling levers 38 which are symmetrically arranged along the first direction X and with the second direction Y as the symmetry axis, and the third detection blocks 36 and the fourth detection blocks 37 are symmetrically arranged one by one along the second direction Y and with the first direction X as the symmetry axis. Along the first direction X, one end of the two third detection blocks 36 is connected to the fifth mass block 31 through the elastic member 6, and the other end is connected to the coupling lever 38 through the elastic member 6. One end of the two fourth detection blocks 37 is connected to the sixth mass block 32 through the elastic member 6, and the other end is connected to the coupling lever 38 through the elastic member 6. Along the second direction Y, the two third detection blocks 36 and the two fourth detection blocks 37 are connected to the anchoring structure 4 along the second direction Y through the in-plane guiding elastic member 7.

[0115] In such Fig.16 In the driving mode shown, the third detection module 36 and the fourth detection module 37 remain stationary.

[0116] In such Fig.17 In the third detection mode shown, the two third detection blocks 36 can move in the same direction as the fifth mass block 31, the two fourth detection blocks 37 can move in the same direction as the sixth mass block 32, and the coupling lever 38 can be driven by the third detection blocks 36 and the fourth detection blocks 37 to rotate in the same direction around its rotation axis.

[0117] In this embodiment, the two third detection blocks 36 are independent of each other, the two fourth detection blocks 37 are independent of each other, the coupling lever 38 simultaneously couples the independent third detection blocks 36 and the fourth detection blocks 37, and the fifth mass block 31, the third detection block 36, the coupling lever 38, the fourth detection block 37, and the sixth mass block 32 are connected in sequence along the circumferential direction through the elastic member 6, so that their movements are interrelated.

[0118] In such Fig.16 In the driving mode shown, the third detection block 36 and the fourth detection block 37 and the coupling lever can remain stationary. Fig.17 In the third detection mode shown, the two third detection blocks 36, the two fourth detection blocks 37, and the two coupling levers 38 move under the influence of the fifth mass block 31 and the sixth mass block 32, and the two third detection blocks 36, the two fourth detection blocks 37, and the two coupling levers 38 have the same movement frequency as the fifth mass block 31 and the sixth mass block 32, and the two coupling levers 38 have the same phase, and the third detection block 36 and the fourth detection block 37 have opposite phases, which can effectively improve the symmetry of the differential signal of the third sensitive structure 3 in the third detection mode, reduce the influence of common-mode interference, and further improve the detection accuracy of the three-axis gyroscope.

[0119] The centers of the two coupling levers 38 can be fixed by the fixing member 10, so that the coupling levers 38 can rotate around their rotation axes, thereby facilitating the associated movement between the components of the third sensitive structure 3 and improving the structural stability of the three-axis gyroscope.

[0120] In a specific embodiment, Figure 1 , Figure 8 and Fig.15 As shown, the first sensitive structure 1 further includes an elastic member 6 , and connecting portions 14 are further provided at both ends of the first sensitive structure 1 along the second direction Y, and the connecting portions 14 are fixed to the anchoring structure 4 through the elastic member 6 .

[0121] In this embodiment, the elastic member 6 is a structure capable of generating deformation along the first direction X and also capable of generating rotation toward the third direction Z, so as to facilitate the first sensitive structure 1 to be Figure 2 , Fig. 9 and Fig.16 In the driving mode shown, differential linear motion is generated along the second direction Y, which is also convenient for realizing the first sensitive structure 1 in the following manner: Figure 3 , Figure 4 , Fig.10 and Fig.11 In the first detection mode shown, the opposite side of the first mass block 11 and the second mass block 12 can flip in the third direction Z, so that a differential rotational motion is formed between the first mass block 11 and the second mass block 12, thereby generating a vibration displacement in the third direction Z, thereby facilitating differential detection, and the structure is simple, which can reduce the structural complexity of the three-axis gyroscope.

[0122] In a specific embodiment, Figure 1 , Figure 8 and Fig.15 As shown, the three-axis gyroscope further includes a first transducer 15 , a second transducer 24 and a third transducer 39 .

[0123] like Figure 4 and Fig.11 As shown, along the third direction Z, the first transducer 15 and the first sensitive structure 1 are spaced apart to form a capacitor for detecting the vibration displacement of the first sensitive structure 1 along the third direction Z, or for suppressing the orthogonal error of the first detection mode, or for matching the frequency of the driving mode and the first detection mode.

[0124] like Figure 6 and Fig.13 As shown, along the third direction Z, the second transducer 24 and the second sensitive structure 2 are spaced apart to form a capacitor for detecting the vibration displacement of the second sensitive structure 2 along the third direction Z, or for suppressing the orthogonal error of the second detection mode, or for matching the frequency of the driving mode and the second detection mode.

[0125] like Figure 7 , Fig.14 and Fig.17 As shown, in a plane perpendicular to the third direction Z, the third transducer 39 and the third sensitive structure 3 are located in the same plane and the third transducer 39 and the third sensitive structure 3 are spaced apart to form a capacitor for detecting the vibration displacement of the third sensitive structure 3 along the first direction X, or for suppressing the orthogonal error of the third detection mode, or for matching the frequency of the driving mode and the third detection mode.

[0126] In this embodiment, along the third direction Z, the first transducer 15 is located above or below the first sensitive structure 1 and has a gap, and the second transducer 24 is located above or below the second sensitive structure 2 and has a gap, which can increase the layout area of ​​the first transducer 15 and the second transducer 24, and can effectively improve the electromechanical coupling coefficient of the three-axis gyroscope detection, so as to facilitate the detection of the vibration displacement of the first sensitive structure 1 and the second sensitive structure 2 along the third direction Z, thereby improving the detection sensitivity of the three-axis gyroscope and further reducing the detection error. The third transducer 39 is located in the same plane as the third sensitive structure, which is convenient for detecting the vibration displacement of the third sensitive structure 3 along the first direction X, reducing the detection error and improving the detection accuracy of the three-axis gyroscope.

[0127] The transducers of the first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3 of the three-axis gyroscope in the present invention are independent of each other, which is convenient for realizing electrical orthogonal suppression, reducing the orthogonal error of the first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3 in the detection mode, and improving the detection accuracy of the three-axis gyroscope.

[0128] like Figure 4 and Fig.11 As shown, a capacitance is formed between the first transducer 15 and the first sensitive structure 1, as shown in FIG. Figure 6 and 13 As shown, a capacitance is formed between the second transducer 24 and the second sensitive structure 2, as shown in FIG. Figure 7 , Fig.14 and Fig.17 As shown, a capacitance is formed between the third transducer 39 and the third sensitive structure 3 .

[0129] In this embodiment, Figure 4 and Fig.11In the first detection mode shown, the first sensitive structure 1 is sensitive to the angular velocity along the first direction X, the first mass block 11 and the second mass block 12 are displaced along the third direction Z by the Coriolis force, and the first transducer device 15 arranged above or below the first mass block 11 and the second mass block 12 along the third direction Z is sensitive to the change in the distance between the first mass block 11 and the second mass block 12, so that the capacitance of the first transducer device 15 will change accordingly, and the magnitude of the angular velocity along the first direction X can be obtained by detecting the change in the capacitance.

[0130] In such Figure 6 and 13 In the second detection mode shown, the second sensitive structure 2 is sensitive to the angular velocity along the second direction Y, the third mass block 21 and the fourth mass block 22 are affected by the Coriolis force and are displaced along the third direction Z, and the second transducer 24 arranged above or below the third mass block 21 and the fourth mass block 22 along the third direction Z is sensitive to the change in the distance between the third mass block 21 and the fourth mass block 22, so that the capacitance of the second transducer 24 will change accordingly, and the magnitude of the angular velocity along the second direction Y can be obtained by detecting the change in the capacitance.

[0131] In such Figure 7 , Fig.14 and Fig.17 In the third detection mode shown, the third sensitive structure 3 is sensitive to the angular velocity along the third direction Z, and the fifth mass block 31 and the sixth mass block 32 are acted upon by the Coriolis force and are displaced along the first direction X, so that the fifth mass block 31 drives the first detection block 34 or the third detection block 36 to be displaced along the first direction X, and the sixth mass block 32 drives the second detection block 35 or the fourth detection block 37 to be displaced along the first direction X, and the third transducer 39 is sensitive to the change in the distance from the first detection block 34, the second detection block 35, the third detection block 36 or the fourth detection block 37, so that the capacitance of the third transducer 39 will change accordingly, and the magnitude of the angular velocity along the third direction Z can be obtained by detecting the change in the capacitance.

[0132] Therefore, the capacitor facilitates the realization of capacitance mode matching for the first sensitive structure 1 , the second sensitive structure 2 , and the third sensitive structure 3 , further improving the detection accuracy and stability of the three-axis gyroscope.

[0133] In a specific embodiment, Figure 1 , Figure 8 and Fig.15As shown, the driving structure 5 includes a first driving part 51, a driving arm 52 and a third driving part 53, and a second driving part 521 is formed on the driving arm 52; the first driving part 51 and the third driving part 53 are respectively connected to the two ends of the driving arm 52, and are respectively located on both sides of the second driving part 521, the first driving part 51 is connected to the first sensitive structure 1 through an elastic member 6, the second driving part 521 is connected to the second sensitive structure 2 through an elastic member 6, and the third driving part 53 is connected to the third sensitive structure 3 through an elastic member 6, and the first driving part 51 and the third driving part 53 are connected to the anchoring structure 4 along the first direction X through an in-plane guiding elastic member 7, as shown in FIG. Figure 2 , Fig. 9 and Fig.16 As shown, when the first driving part 51 and the third driving part 53 slide along the second direction Y, the second driving part 521 can be driven to rotate through the elastic member 6 .

[0134] In this embodiment, the first driving part 51, the second driving part 521 and the third driving part 53 in the driving structure 5 are symmetrical along the second direction Y, the movements of the first driving part 51, the second driving part 521 and the third driving part 53 are related to each other and have the same frequency, and the symmetrical parts of the first driving part 51, the second driving part 521 and the third driving part 53 along the second direction Y have opposite phases, which can effectively improve the three-axis gyroscope in the case of Figure 2 , Fig. 9 and Fig.16 The symmetry of the differential signal under the driving mode shown reduces the influence of common mode interference. On the other hand, the driving structure 5 has a simple structure and can be stationary in the first detection mode, the second detection mode or the third detection mode, which facilitates the mutual decoupling of the first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3 in the first detection mode, the second detection mode or the third detection mode, avoids the generation of large coupling errors, and improves the detection accuracy of the three-axis gyroscope.

[0135] In a specific embodiment, Figure 1 , Figure 8 and Fig.15 As shown, the driving structure 5 further includes a driving electrode 54 , which is installed on the first driving part 51 and the second driving part 521 , and the driving electrode 54 is spaced apart from the first driving part 51 and / or the third driving part 53 to form a driving capacitor.

[0136] In this embodiment, when the three-axis gyroscope is started, the driving capacitance of the driving electrode 54 changes, so that the first driving unit 51 and the second driving unit 521 can drive the first sensitive structure 1 and the third sensitive structure 3 to move along the second direction Y. At the same time, the first driving unit 51 and the second driving unit 521 can drive the third driving unit 35 to drive the second sensitive structure 2 to rotate, so that the three-axis gyroscope is in a state as shown in FIG. Figure 2 , Fig. 9 and Fig.16 Therefore, this structure is convenient for controlling the motion of the first sensitive structure 1, the second sensitive structure 2 and the third sensitive structure 3, and can simplify the structure of the driving structure 5, thereby simplifying the structure of the three-axis gyroscope and saving the installation space of the three-axis gyroscope.

[0137] The driving arm 52 can be fixed by the fixing member 10 so that the driving arm 52 can rotate around the fixing member 10, thereby facilitating the associated movement among the first driving part 51, the second driving part 521 and the third driving part 53, thereby improving the stability of the three-axis gyroscope.

[0138] In a specific embodiment, Figure 1 , Figure 8 and Fig.15 As shown, the second sensitive structure 2 further includes a rotation guide elastic member 25 , the third mass block 21 and the fourth mass block 22 are provided with a hole structure 26 , and the rotation guide elastic member 25 is installed in the hole structure 26 .

[0139] In this embodiment, the axis of the rotation guide elastic member 25 is fixed. Figure 2 , Fig. 9 and Fig.16 In the driving mode shown in FIG. 1 , the rotation guide elastic member 25 can guide the third mass block 21 and the fourth mass block 22 to rotate around the axis of the rotation guide elastic member 25 in a plane perpendicular to the third direction Z. Figure 6 and Fig.13 In the second detection mode shown, both ends of the rotation guide elastic member 25 along the second direction Y can rotate with the third mass block 21 or the fourth mass block 22 in a plane perpendicular to the first direction X. Therefore, the provision of the rotation guide elastic member 25 improves the stability of the rotation of the third mass block 21 and the fourth mass block 22, thereby improving the stability of the three-axis gyroscope.

[0140] The above description is only an implementation mode of the present invention. It should be pointed out that, for ordinary technicians in this field, improvements can be made without departing from the creative concept of the present invention, but these all belong to the protection scope of the present invention.

Claims

1. A three-axis gyroscope, characterized in that: include: A driving structure, wherein the driving structure is used to drive the three-axis gyroscope; A first sensitive structure, used for sensing an angular velocity in a first direction, wherein the first sensitive structure is connected to the driving structure via an elastic member, and the first sensitive structure comprises a first mass block and a second mass block symmetrically arranged along a second direction; a second sensitive structure, used for sensing an angular velocity in a second direction, the second sensitive structure being connected to the driving structure via the elastic member, and the second sensitive structure comprising a third mass block and a fourth mass block symmetrically arranged along the second direction; A third sensitive structure, used for sensing the angular velocity in the third direction, the third sensitive structure is connected to the driving structure through the elastic member, and the third sensitive structure comprises a fifth mass block and a sixth mass block symmetrically arranged along the second direction; A plurality of anchoring structures for fixing the driving structure, the first sensitive structure, the second sensitive structure, and the third sensitive structure; Wherein, the first direction, the second direction and the third direction are orthogonal to each other, and the three-axis gyroscope has a driving mode, a first detection mode, a second detection mode and a third detection mode; In the driving mode, the driving structure can drive the first mass block and the second mass block to move in the opposite direction along the second direction; the third mass block and the fourth mass block both have a rotation axis extending in a direction parallel to the third direction, and the driving structure can also drive the third mass block and the fourth mass block to rotate in the opposite direction toward the first sensitive structure or the third sensitive structure around their respective rotation axes; the driving structure can also drive the fifth mass block and the sixth mass block to move in the opposite direction along the second direction; Wherein, when the third mass block and the fourth mass block rotate toward the fifth mass block and the sixth mass block, the fifth mass block and the sixth mass block move away from each other, the first mass block and the second mass block move toward each other, and the movement directions of the first mass block and the fifth mass block are opposite; In the first detection mode, the driving structure, the second sensitive structure and the third sensitive structure can remain stationary, and the opposite side of the first mass block and the second mass block can flip in the third direction to generate a vibration displacement in the third direction; In the second detection mode, the driving structure, the first sensitive structure and the third sensitive structure can remain stationary, and the third mass block and the fourth mass block can flip around their respective rotation axes in the third direction to generate vibration displacement in the third direction; In the third detection mode, the driving structure, the first sensitive structure and the second sensitive structure can remain stationary, and the fifth mass block and the sixth mass block can move in opposite directions along the first direction to generate vibration displacement in the first direction.

2. The three-axis gyroscope according to claim 1, characterized in that: The first sensitive structure further includes a first guide portion, the first guide portion is connected to the anchor structure through the elastic member along the first direction, and the first guide portion is connected to the first mass block or the second mass block through the elastic member along the second direction; In the driving mode, the first guide portion is easily affected by the first mass block and the second mass block to remain stationary, thereby suppressing the first mass block and the second mass block from moving in the same direction along the second direction; In the first detection mode, the first guide portion can be driven by the first mass block and the second mass block to rotate toward the third direction.

3. The three-axis gyroscope according to claim 1, characterized in that: The second sensitive structure further includes a second guide portion, the second guide portion is connected to the anchor structure through the elastic member along the first direction, and the second guide portion is connected to the third mass block or the fourth mass block through the elastic member along the second direction; In the driving mode, the second guide portion is easily driven by the third mass block and the fourth mass block to reciprocate along the first direction, thereby inhibiting the third mass block and the fourth mass block from rotating in the same direction along the third direction; In the second detection mode, the second guide portion can be driven by the third mass block and the fourth mass block to reciprocate along the third direction.

4. The three-axis gyroscope according to claim 1, characterized in that: The third sensitive structure further comprises a third guide portion, wherein the third guide portion is symmetrically provided with two first guide blocks along the first direction with the second direction as the symmetry axis, and is symmetrically provided with two second guide blocks along the second direction with the first direction as the symmetry axis; The first guide block is connected to the anchor structure along the second direction through an in-plane guide elastic member, and opposite sides of the two first guide blocks are respectively connected to the two second guide blocks through elastic members; The second guide block is connected to the anchor structure along the first direction through the in-plane guide elastic member, and the opposite sides of the two second guide blocks are connected to the adjacent fifth mass block or the sixth mass block through the elastic member; In the driving mode, the second guide block is easily moved in the opposite direction along the second direction by the influence of the fifth mass block and the sixth mass block, and the first guide block is easily moved in the opposite direction along the first direction by the influence of the second guide block, thereby suppressing the same-direction movement of the fifth mass block and the sixth mass block.

5. The three-axis gyroscope according to claim 1 or 4, characterized in that: The third sensitive structure further comprises a first detection block and a second detection block symmetrically arranged along the second direction, the first detection block being connected to the anchor structure through an in-plane guiding elastic member along the second direction, and being connected to the fifth mass block through the elastic member along the first direction; The second detection block is connected to the anchor structure through the in-plane guiding elastic member along the second direction, and is connected to the sixth mass block through the elastic member along the first direction; In the driving mode, the first detection block and the second detection block remain stationary; In the third detection mode, the first detection block can move in the same direction as the fifth mass block, and the second detection block can move in the same direction as the sixth mass block.

6. The three-axis gyroscope according to claim 4, characterized in that: The third sensitive structure further comprises two third detection blocks, two fourth detection blocks and two coupling levers which are symmetrically arranged along the first direction and with the second direction as the symmetry axis, and the third detection blocks and the fourth detection blocks are symmetrically arranged one by one along the second direction and with the first direction as the symmetry axis; Along the first direction, one end of the two third detection blocks is connected to the fifth mass block through an elastic member, and the other end is connected to the coupling lever through an elastic member; one end of the two fourth detection blocks is connected to the sixth mass block through an elastic member, and the other end is connected to the coupling lever through an elastic member; Along the second direction, the two third detection blocks and the two fourth detection blocks are connected to the anchoring structure through the in-plane guide elastic member along the second direction; In the driving mode, the third detection block and the fourth detection block remain stationary; In the third detection mode, the two third detection blocks can move in the same direction as the fifth mass block, the two fourth detection blocks can move in the same direction as the sixth mass block, and the coupling lever can be driven by the third detection block and the fourth detection block to rotate in the same direction around its rotation axis.

7. The three-axis gyroscope according to claim 1, characterized in that: The three-axis gyroscope further includes a first transducer device, a second transducer device and a third transducer device; Along the third direction, the first transducer device and the first sensitive structure are spaced apart to form a capacitor for detecting the vibration displacement of the first sensitive structure along the third direction, or for suppressing the orthogonal error of the first detection mode, or for matching the frequency of the driving mode and the first detection mode; Along the third direction, the second transducer device and the second sensitive structure are spaced apart to form a capacitor for detecting the vibration displacement of the second sensitive structure along the third direction (Z), or for suppressing the orthogonal error of the second detection mode, or for matching the frequency of the driving mode and the second detection mode; In a plane perpendicular to the third direction, the third transducer and the third sensitive structure are located in the same plane and are spaced apart to form a capacitor for detecting the vibration displacement of the third sensitive structure along the first direction, or for suppressing the orthogonal error of the third detection mode, or for matching the frequency of the driving mode and the third detection mode.

8. The three-axis gyroscope according to claim 1, characterized in that: The driving structure includes a first driving part, a driving arm and a third driving part, and the driving arm is formed with a second driving part; the first driving part and the third driving part are respectively connected to two ends of the driving arm and are respectively located on two sides of the second driving part; The first driving part is connected to the first sensitive structure through an elastic member, the second driving part is connected to the second sensitive structure through an elastic member, and the third driving part is connected to the third sensitive structure through an elastic member; The first driving part and the third driving part are connected to the anchoring structure along the first direction through an in-plane guiding elastic member, and the first driving part and the third driving part can drive the second driving part to rotate through the elastic member during movement along the second direction.

9. The three-axis gyroscope according to claim 8, characterized in that: The driving structure further includes a driving electrode, and the driving electrode is mounted on the first driving part and the second driving part; The driving electrode is spaced apart from the first driving unit and / or the third driving unit to form a driving capacitor.

10. The three-axis gyroscope according to claim 1, characterized in that: The second sensitive structure further includes a rotation guiding elastic member, the third mass block and the fourth mass block are provided with a hole structure, and the rotation guiding elastic member is located in the hole structure.

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