Mask plate assembly

Abstract

The present application discloses a mask plate assembly, including a frame, a mask plate, a transmission mechanism and a pressure mechanism, wherein the frame is provided with a hollow area; the mask plate is movably provided on the frame; and in the length direction of the mask plate, the mask plate includes a plurality of mask units; the transmission mechanism is fixedly connected to the mask plate, and is used to drive the mask plate to move along the length direction to switch the mask unit corresponding to the hollow area; the pressure mechanism is used to press the mask unit corresponding to the hollow area against the frame. Through the above scheme, the storage space occupied by the mask plate is reduced, and the mask plate is pressed by the pressure mechanism to ensure the evaporation accuracy.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a mask plate assembly. Background Art

[0002] With the rapid development of science and technology, display media has become an important part of people's lives. Organic light emitting diode (OLED) display media has excellent color and picture quality due to its self-luminous property. At present, most OLED products use evaporation to prepare the light-emitting layer. The position of the light-emitting material deposited on the substrate is controlled by a mask plate, and a patterned film layer is formed on the substrate to form the required structure. The mask plate is usually a metal mesh fixed on a metal frame.

[0003] However, since different patterns need to be deposited in different film layers, masks with different patterns need to be used in the actual deposition process, resulting in too many masks and taking up a lot of storage space. On the other hand, as the use time increases, the mesh surface of the mask will gradually relax and collapse, resulting in deviations in the deposition pattern. Summary of the invention

[0004] The main technical problem solved by the present application is to provide a mask plate assembly to reduce the storage space occupied by the mask plate and ensure the evaporation accuracy.

[0005] In order to solve the above technical problems, a technical solution adopted in the present application is: providing a mask plate assembly, including a frame, a mask plate, a conveying mechanism and a pressure mechanism, wherein the frame is provided with a hollow area; the mask plate is movably arranged on the frame; and in the length direction of the mask plate, the mask plate includes a plurality of mask units; the conveying mechanism is fixedly connected to the mask plate, and is used to drive the mask plate to move along the length direction to switch the mask unit corresponding to the hollow area; the pressure mechanism is used to press the mask unit corresponding to the hollow area against the frame.

[0006] The beneficial effect of the present application is that, different from the prior art, the mask plate assembly of the present application is movably connected to a mask plate on a frame, and the mask plate has a plurality of mask units with different patterns. When evaporating film layers of different patterns, it is only necessary to drive the mask plate to move on the frame through a conveying mechanism and switch to the hollow area corresponding to the required mask unit, so that the evaporated material can pass through the hollow area and the mask unit to reach the required evaporation position to form the required patterned film layer. Since different mask units share the same frame, one mask plate assembly can be used to complete the evaporation of multiple patterns, which greatly reduces the number of required mask plates, thereby reducing the space occupied by the mask plate. On the other hand, as the use time of the mask plate assembly increases, the mask plate is prone to gradually loosen and collapse, or when switching the mask unit, the mask unit is prone to offset and affect the evaporation accuracy. Pressing the mask plate on the frame by a pressure mechanism can restore the relaxed mask plate to a tensioned state and can fine-tune the position of the mask plate so that the mask unit is aligned with the hollow area to ensure the evaporation accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 It is a structural schematic diagram of an implementation scheme of a mask plate assembly of the present application;

[0008] Figure 2 yes Figure 1 Sectional view along AA direction;

[0009] Figure 3 It is a structural schematic diagram of an implementation scheme of a mask plate of the present application;

[0010] Figure 4 It is a structural schematic diagram of a mask plate assembly according to an embodiment of the present application when a pressure applying mechanism applies pressure;

[0011] Figure 5 yes Figure 4 Cross-sectional view along the BB direction;

[0012] Figure 6 is a structural schematic diagram of another embodiment of the mask plate assembly of the present application;

[0013] Figure 7 It is a structural diagram of a framework implementation method of the present application. DETAILED DESCRIPTION

[0014] In order to make the purpose, technical solution and effect of the present application clearer and more specific, the present application is further described in detail with reference to the accompanying drawings and examples. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0015] See also Figure 1 , Figure 1 1 is a schematic diagram of the structure of an embodiment of a mask plate assembly of the present application. The mask plate assembly includes a frame 1, a mask plate 2, a conveying mechanism 3 and a pressing mechanism 4. The frame 1 is provided with a hollow area 11; the mask plate 2 is movably arranged on the frame 1; and in the length direction of the mask plate 2, the mask plate 2 includes a plurality of mask units 21; the conveying mechanism 3 is fixedly connected to the mask plate 2, and is used to drive the mask plate 2 along the length direction ( Figure 1 The mask unit 21 corresponding to the hollow area 11 is moved (as shown by the dashed arrow in the middle) to switch the mask unit 21 corresponding to the hollow area 11; the pressing mechanism 4 is used to press the mask unit 21 corresponding to the hollow area 11 and the frame 1 tightly.

[0016] Specifically, the mask plate assembly of the present application is movably connected to a mask plate 2 on a frame 1, and the mask plate 2 has a plurality of mask units 21 with different patterns distributed in its length direction. When evaporating film layers of different patterns, it is only necessary to drive the mask plate 2 on the frame 1 along the length direction of the mask plate 2 through the conveying mechanism 3, and switch to the hollow area 11 corresponding to the required mask unit 21, so that the evaporated material can pass through the hollow area 11 and the required mask unit 21 to reach the required evaporation position, forming the required patterned film layer. Since different mask units 21 are all located on the same mask plate 2 and share the same frame 1, the evaporation of multiple patterns can be completed using one mask plate assembly, which greatly reduces the number of required mask plates, thereby reducing the space occupied by the mask plates. On the other hand, as the use time of the mask plate assembly increases, the mask plate 2 is prone to gradually loosen and collapse, or when switching the mask unit 21, the mask unit 21 is prone to offset and affect the evaporation accuracy. Pressing the mask plate 2 against the frame 1 by the pressure mechanism 4 can restore the relaxed mask plate 2 to a tensioned state; and the position of the mask plate 2 can be fine-tuned. For example, if the position of the mask unit 21 is biased to the right, the pressure mechanism 4 on the left side of the hollow area 11 applies pressure to the mask unit 21, and there is no pressure mechanism 4 on the right side of the hollow area 11 or the pressure mechanism 4 does not apply force, so that the mask unit 21 is pulled to the left by the pressure mechanism 4, thereby achieving fine-tuning of the position to align with the hollow area 11 and ensuring the evaporation accuracy.

[0017] Optionally, see Figure 3 , Figure 3 2 is a schematic diagram of the structure of an embodiment of the mask plate 2 of the present application. In some embodiments, in the length direction, the mask plate 2 further includes a plurality of connecting units 22, and a mask unit 21 is disposed between two adjacent connecting units 22. Figure 1 As shown, the pressure mechanism 4 is used to apply force toward the frame 1 to the connection units 22 on both sides of the mask unit 21 corresponding to the hollow area 11 , so that the mask unit 21 is pressed tightly against the frame 1 .

[0018] The connecting unit 22 is used to connect two adjacent mask units 21 as a transition zone between the mask units 21. When the pressure mechanism 4 acts on the connecting unit 22, it avoids damage to the surface of the mask unit 21 by the pressure mechanism 4, and allows the two ends of the mask unit 21 to have a margin, which is convenient for fine-tuning the position of the mask plate 2.

[0019] Further, see Figure 1 and Figure 2 , Figure 2 yes Figure 1 In some embodiments, the connection unit 22 includes a through hole 221; the pressure mechanism 4 includes a pressure member 41 and a driving member (not shown in the figure), the driving member is used to drive the pressure member 41 to move through the hole 221 to the side of the mask plate away from the frame 1 after the transmission mechanism 3 drives one of the mask units 21 to correspond to the hollow area 11; and is used to drive the pressure member 41 to move to the side of the mask plate 2 close to the frame 1 (such as the front side of the frame 1) before the transmission mechanism 3 drives the mask plate 2 to move. Figure 2 shown).

[0020] Before the transmission mechanism 3 drives the mask plate 2 to move, the driving member drives the pressure member 41 to move to the side of the mask plate 2 close to the frame 1, that is, below the mask plate 2, without affecting the subsequent movement of the mask plate 2, avoiding damage to the mask plate 2; after the mask plate 2 completes the switching of the mask unit 21, the driving member drives the pressure member 41 to move through the hole 221 to the side of the mask plate 2 away from the frame 1, that is, above the mask plate 2, so as to facilitate the subsequent pressure member 41 to apply force from above the mask plate 2 to press the mask plate 2. Specifically, the driving member can be a cylinder, a motor, etc., which can drive the pressure member 41 to move along the height direction ( Figure 2 The pressure member 41 is lifted and lowered in the Z direction to move from one side of the mask plate 2 to the other side.

[0021] Further, see Figure 4 and Figure 5 , Figure 4 1 is a schematic structural diagram of a mask plate assembly according to an embodiment of the present application when the pressure applying mechanism 4 applies pressure. Figure 5 yes Figure 4 The driving member (not shown in the figure) is also used to drive the pressure member 41 to move through the hole 221 to the side of the mask plate 2 away from the frame 1, and then drive the pressure member 41 to move along the width direction of the mask plate 2 ( Figure 4 The pressure member 41 is moved in the longitudinal direction (in the Y direction in the figure) and / or in the longitudinal direction (in the X direction in the figure) so that at least part of the orthographic projection of the pressure member 41 on the mask plate 2 is located outside the via hole 221. Optionally, the orthographic projection of the pressure member 41 on the mask plate 2 is entirely located outside the via hole 221.

[0022] After the pressure member 41 passes through the hole 221 and moves (for example, it can rise in the Z direction) to the side of the mask plate 2 away from the frame 1, the pressure member 41 can move in the width direction or length direction of the mask plate 2 to leave the top of the hole 221 and move to the non-hollow part of the connection unit 22 (such as Figure 4 As shown), the driving member can continue to drive the pressure member 41 to approach the mask plate 2 (for example, it can be lowered in the Z direction) to press the mask plate 2; the pressure member 41 can also move along the length direction of the mask plate 2 to leave the via 221 and move to correspond to the non-hollow part of the connecting unit 22. At this time, the driving member can continue to drive the pressure member 41 to descend in the Z direction or approach the mask plate 2 in the width direction to press the mask plate 2 against the frame 1.

[0023] Optionally, in some embodiments, two groups of pressure members 41 may be provided, which are respectively located at the connection units 22 on both sides of the mask unit 21 corresponding to the hollow area 11. The two groups of pressure members 41 may apply different pressures to adjust the position of the mask plate 2 in the length direction. For example, when the pressure on the left side is greater than the pressure on the right side, the mask plate 2 moves to the left to fine-tune the position. As the pressure difference between the two sides gradually increases, the mask plate 2 moves a greater distance.

[0024] Optionally, continue to Figure 1 and Figure 4 In the width direction of the mask plate 2 (the Y direction in the figure), the connection unit 22 includes a plurality of via holes 221 arranged at intervals, and a pressure mechanism 4 is provided corresponding to each via hole 221 .

[0025] By providing a plurality of pressure-applying mechanisms 4, on the one hand, the mask plate 2 is subjected to uniform force, thereby reducing the probability of wrinkles; on the other hand, as the use time increases, the mask plate 2 has a problem of different degrees of slackness at different positions in the width direction. Since each pressure-applying member 41 can be individually controlled by a driving member, the degree of compression and the movement position of the mask plate 2 at different positions in the width direction can be individually adjusted, which is conducive to achieving the optimal tension of the mask plate 2.

[0026] Optionally, the plurality of via holes 221 are arranged at equal intervals along the width direction. The plurality of pressure applying mechanisms 4 can be controlled synchronously, and each pressure applying mechanism 4 can move away from or close to the via hole 221 by moving the same distance.

[0027] Optionally, continue to Figure 1 and Figure 4 The pressure member 41 is strip-shaped and extends along the width direction (Y direction in the figure) of the mask plate 2 to expand the pressure range in the width direction and reduce the probability of the mask plate 2 being warped or wrinkled.

[0028] Furthermore, when the pressure member 41 applies force to the mask plate 2 , at least part of the outer surface of the pressure member 41 close to the mask plate 2 is an outwardly convex arc surface, so that the pressure member 41 forms a line contact with the outer surface of the mask plate 2 to reduce damage to the mask plate 2 .

[0029] Further, see Figure 2 and Figure 5 The pressure member 41 is a cylinder, which is convenient for preparation. Of course, in other embodiments, the pressure member 41 can also be a strip structure with an elliptical cross section.

[0030] Furthermore, the pressure mechanism 4 also includes a bearing (not shown in the figure), the bearing is sleeved on the cylindrical pressure member 41, the bearing is connected to the driving member, and the driving member drives the pressure member 41 to move by driving the bearing.

[0031] Optionally, continue to Figure 2 and Figure 5 A recessed portion 14 is provided on the side of the frame 1 facing the mask plate 2. When the mask unit 21 is provided corresponding to the hollow area, at least part of the positive projection of the connecting units 22 on both sides of the mask unit 21 on the frame 1 is located in the recessed portion 14. The pressing mechanism 4 is used to apply a force toward the recessed portion 14 to the connecting units 22 so that the mask unit 21 is pressed against the frame 1.

[0032] The recessed portion 14 provides a moving space for the pressure mechanism 4 to move closer to the frame 1 for pressure application, and also provides a space for the pressure mechanism 4 to make it easier for the pressure mechanism 4 to be stored in the recessed portion 14 (such as when the mask unit 21 is switched). Figure 2 As shown), the influence on the movement of the mask plate 2 is reduced.

[0033] In some embodiments, see Figure 6 , Figure 6 A recess 14 is formed on the upper surface of the frame 1, and the pressure member 41 moves through the hole 221 to the side of the mask plate 2 connecting unit 22 away from the frame 1 (i.e. Figure 6 After the pressure member 41 is moved along the width direction or the length direction of the mask plate 2 to leave the via hole 221, and moves to the non-hollowed portion corresponding to the connection unit 22, the driving member can continue to drive the pressure member 41 to move downward along the Z direction to press the mask plate 2. The present application does not limit the shape of the recessed portion 14.

[0034] Optionally, see Figure 5 and Figure 7 , Figure 71 is a schematic diagram of the structure of an embodiment of the frame 1 of the present application. The frame 1 includes an upper frame 12 and a lower frame 13 connected to each other, the orthographic projection of the upper frame 12 on the lower frame 13 is located inside the lower frame 13, a recess 14 is formed between the outer side of the upper frame 12 in the length direction (X direction in the figure) and the lower frame 13, and a hollow area 11 runs through the upper frame 12 and the lower frame 13.

[0035] The upper frame 12 is used to support the mask unit 21 for evaporation, and the length of the lower frame 13 is larger than that of the upper frame 12, which is convenient for forming the recessed portion 14 for accommodating the pressure mechanism 4 or providing a pressure space for the pressure mechanism 4, and convenient for setting the conveying mechanism 3 on the lower frame 13. Specifically, the upper frame 12 and the lower frame 13 can both be rectangular frames, and a hollow area can also be formed on the lower frame 13 corresponding to the recessed portion 14. At this time, the mask plate 2 can extend from the hollow area to the lower frame 13 and cover the upper surface of the upper frame 12, and then extend from the hollow area on the other side into the lower frame 13.

[0036] Furthermore, two recessed portions 14 are provided, respectively provided on both sides of the upper frame 12 , and the two recessed portions 14 can respectively correspond to the two connecting units 22 on both sides of the mask unit 21 corresponding to the hollow area after the switching is completed.

[0037] Optionally, continue to Figure 2 and Figure 5 The conveying mechanism 3 includes two rotating shafts 31, which are respectively connected to the two ends of the mask plate 2 in the length direction, and the mask plate 2 can be wound on the rotating shafts 31. Specifically, one of the rotating shafts 31 rewinds the mask plate 2 by rotating, and the other rotating shaft 31 loosens the mask plate 2 by rotating in the same direction. The two rotating shafts 31 can also adjust the tension of the mask plate 2 by rotating in the opposite direction.

[0038] Optionally, the rotating shaft 31 is arranged in the frame 1 to reduce space occupation. Figure 2 , Figure 5 As shown, the rotating shaft 31 and the mask plate 2 are both mounted on the frame 1 for easy movement and transportation. Further, the rotating shaft 31 can be arranged in the lower frame 13 corresponding to the recessed portion 14 (such as Figure 2 and Figure 5 shown).

[0039] Of course, in other embodiments, the rotating shaft 31 may also be arranged outside the frame 1, such as Figure 6 shown.

[0040] The above are only implementation methods of the present application, and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A mask plate assembly, characterized in that: include: A frame, provided with a hollow area; A mask plate is movably arranged on the frame; and in the length direction of the mask plate, the mask plate includes a plurality of mask units and a plurality of connection units, one mask unit is arranged between two adjacent connection units, and in the width direction of the mask plate, the connection unit includes a plurality of via holes arranged at intervals, and a pressure mechanism is arranged corresponding to each via hole; A conveying mechanism, fixedly connected to the mask plate, for driving the mask plate to move along the length direction to switch the required mask unit to correspond to the hollow area, so that the evaporated material can pass through the hollow area and the required mask unit to reach the required evaporation position; The pressure mechanism is used to apply a force toward the frame to the connection units on both sides of the mask unit corresponding to the hollow area, so that the mask unit is pressed against the frame; the pressure mechanism includes a pressure member and a driving member, and the driving member is used to drive the pressure member to move to the side of the mask plate away from the frame through the via hole after the transmission mechanism drives one of the mask units to correspond to the hollow area; thereafter, the driving member drives the pressure member to move along the width direction and / or length direction of the mask plate, so that at least part of the orthographic projection of the pressure member on the mask plate is located outside the via hole; Each of the pressure applying members is individually controlled by the driving member, so as to individually adjust the pressing degree and the moving position of the mask plate at different positions in the width direction.

2. The mask assembly according to claim 1, characterized in that: The plurality of via holes are arranged at equal intervals along the width direction.

3. The mask assembly according to claim 1, characterized in that: The pressure member is strip-shaped and extends along the width direction of the mask plate.

4. The mask assembly according to claim 3, characterized in that: The outer surface of the pressure member is an outwardly convex arc surface.

5. The mask assembly according to claim 3, characterized in that: The pressure-applying member is a cylinder.

6. The mask assembly according to claim 1, characterized in that: A recessed portion is provided on one side of the frame facing the mask plate. When the mask unit is provided corresponding to the hollow area, at least part of the connection units on both sides of the mask unit are projected onto the frame in the recessed portion. The pressure mechanism is used to apply a force to the connection unit toward the recessed portion so that the mask unit is pressed against the frame.

7. The mask assembly according to claim 6, characterized in that: The frame comprises an upper frame body and a lower frame body connected to each other, wherein the orthographic projection of the upper frame body is located in the lower frame body, the recessed portion is formed between the outer side of the upper frame body in the length direction and the lower frame body, and the hollow area runs through the upper frame body and the lower frame body.

8. The mask assembly according to claim 7, characterized in that: There are two recessed parts in total, which are respectively arranged on both sides of the upper frame.

9. The mask assembly according to claim 6, characterized in that: The frame is provided with a groove to form the recessed portion.

10. The mask assembly according to claim 1, characterized in that: The transmission mechanism comprises two rotating shafts respectively connected to two ends of the mask plate in the length direction, and the mask plate can be wound on the rotating shafts.

11. The mask assembly according to claim 10, characterized in that: The rotating shaft is arranged in the frame.

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