Device and method for improving surface finish and film-base bonding strength of inner wall coating of tube and barrel

Abstract

A device and method for improving the surface finish and film-base bonding strength of the inner wall coating of a tube and barrel component. The present invention aims to solve the problems of poor surface finish and weak film-base bonding strength of the inner wall coating of a tube and barrel component. The device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube and barrel component of the present invention comprises a metal cathode arc source, a magnetic field coil, a baffle, a shielding cover, a shielding baffle, an anode rod, an auxiliary anode, an air intake pipe, a vacuum chamber, a metal cathode arc DC power supply, a pulse bias power supply and an auxiliary anode DC power supply, and the tube and barrel component is placed in the vacuum chamber. The present invention adopts an arc-enhanced glow discharge process to perform high-density plasma etching cleaning and activation on the inner surface of the tube and barrel component, and also provides electron heating in the early stage of coating growth, which can greatly improve the film-base bonding strength. In addition, a shielding cover is installed at the pipe mouth facing the metal cathode arc source, which can effectively prevent the film-forming material on the outer wall of the pipe mouth from being sputtered back into the pipe for deposition, thereby improving the roughness and finish of the coating surface.

Description

Technical Field

[0001] The invention relates to a device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube component, and a method for depositing the inner surface coating of a tube component by using the device. Background Art

[0002] Tube fittings have been widely used in many fields such as national defense, military, energy production, machinery manufacturing, and chemical industry. In engineering use, tubular parts are an important liquid and gas transportation component, which undertakes the functions of medium containment, material transportation / storage, etc., such as gun barrels, fuel supply pipelines, chemical pipelines, internal combustion engine cylinder liners, oil pump barrels, oil pipelines, building water supply and urban drinking water pipelines, etc. During use, the inner wall of the tube fitting is in direct contact with the contents (gas, liquid, etc.), which is very easy to corrode and wear on the inner surface, and eventually lead to pipe wall rupture and leakage of contents, causing serious economic losses and safety problems. Improving the wear resistance and corrosion resistance of the tube fittings themselves can reduce the damage to the inner wall of the tube fittings to a certain extent, but for more demanding service conditions (such as acid, high salt, high temperature, etc.), the above problems can no longer be fundamentally solved based on the composition regulation of the tubular parts themselves. In recent years, the inner wall coating technology of pipes has attracted more and more attention, and pipe fittings coated with inner wall coatings have also been widely used in various industries.

[0003] Compared with the outer surface of components, the inner surface coating technology of pipe fittings faces greater challenges: (1) The inner surface space is small and inconvenient to operate, so it is impossible to directly use coating technology or equipment based on the outer surface; (2) The inner surface is not easy to analyze and test, and it is difficult to intuitively judge the quality of the coating; (3) The amount of treatment medium used per unit time is relatively small, and the inner surface coating effect may not be good; (4) The treatment medium is unevenly distributed inside the pipe fitting, making it difficult to ensure the uniformity of the coating.

[0004] Therefore, researchers have developed many inner surface coating technologies for tubes and barrels to meet different needs. Among them, physical vapor deposition (PVD) is a common surface coating preparation technology. Currently, the PVD technologies used for inner surface coating of tubes mainly include sputtering and ion plating. Compared with magnetron sputtering, ion plating greatly improves the particle energy of the film layer, which not only improves the bonding strength of the film substrate, but also reduces the generation of defects on the inner wall of the film. Based on the principle of arc ion inner surface coating technology, plasma enters the inner cavity of the tube from the tube mouth and realizes the deposition of thin film on the inner surface of the tube. When plasma diffuses in a long tube, it is easy to accumulate, deposit and form a film at the entrance due to the divergence of plasma flow. At present, the main problems of arc ion inner surface coating technology are: there is a large difference in film thickness along the length of the tube; the inner surface of the tube is not sufficiently sputtered and cleaned in the early stage, and the bonding strength of the film substrate is weak; in addition, the film-forming material on the outer wall of the tube entrance is easy to be reversely sputtered into the tube for deposition, which has an adverse effect on the quality of the film layer, such as: there are more granular substances and roughness on the surface of the inner wall coating of the tube. Summary of the invention

[0005] The present invention aims to solve the problems of poor surface finish and weak film-base bonding strength of the inner wall coating of a tube component, and to provide a device and method for improving the surface finish and film-base bonding strength of the inner wall coating of a tube component.

[0006] The device for improving the surface finish of the inner wall coating of a tube component and the bonding strength of a film substrate of the present invention comprises a metal cathode arc source, a magnetic field coil, a baffle, a shielding cover, a shielding baffle, a tube component, an anode rod, an auxiliary anode, an air inlet pipe, a vacuum chamber, a metal cathode arc DC power supply, a pulse bias power supply and an auxiliary anode DC power supply;

[0007] A shielding baffle is vertically arranged in the vacuum chamber, and the vacuum chamber is divided into a first chamber and a second chamber by the shielding baffle. A through hole is opened on the shielding baffle. A shielding cover is arranged on the front end of the tube member, and the shielding cover is plugged into the through hole of the shielding baffle. The tube member is located in the second chamber, and an auxiliary anode is arranged at the rear of the rear end of the tube member, and an anode rod is penetrated inside the tube member.

[0008] A metal cathode arc source, a baffle and an air inlet pipe are arranged in the first chamber, the front end of the tube member is located directly behind the metal cathode arc source, a baffle is arranged between the front end of the tube member and the metal cathode arc source, and the baffle is located directly behind the metal cathode arc source, and a magnetic field coil is installed on the periphery of the metal cathode arc source;

[0009] The negative electrode of the metal cathode arc DC power supply is electrically connected to the metal cathode arc source, and the positive electrode of the metal cathode arc DC power supply is grounded; the positive electrode of the auxiliary anode DC power supply is electrically connected to the auxiliary anode, and the negative electrode of the auxiliary anode DC power supply is grounded; one electrode of the pulse bias power supply is electrically connected to the outer wall of the tube member, and the other electrode of the pulse bias power supply is electrically connected to the anode rod.

[0010] The method for depositing coating on the inner surface of a tube component by using a device for improving the surface finish and film-base bonding strength of the coating on the inner wall of a tube component is implemented according to the following steps:

[0011] 1. Pre-treatment:

[0012] The tube is placed in anhydrous ethanol for ultrasonic cleaning, and after drying, is installed into the through hole of the shielding baffle;

[0013] 2. Arc enhanced glow discharge plasma etching and cleaning:

[0014] The vacuum chamber pressure is pumped to a predetermined value, and then high-purity Ar is introduced into the vacuum chamber through an air inlet pipe, and the pressure is controlled at 0.8-1.0 Pa. The baffle shields the metal cathode arc source, and the metal cathode arc DC power supply, pulse bias power supply and auxiliary anode DC power supply are turned on at the same time, and the inner surface of the tube is cleaned by arc-enhanced glow discharge plasma etching;

[0015] The current of the DC power supply for controlling the metal cathode arc is 30 to 250A; the negative bias voltage of the pulse bias power supply is 0 to -500V, and the duty cycle is 1 to 100%; the current of the auxiliary anode DC power supply is 30 to 250A;

[0016] 3. Metal ion bombardment:

[0017] The air pressure in the vacuum chamber is kept constant, the baffle is controlled (adjusted) so as not to block the metal cathode arc source, and then the magnetic field coil power supply is turned on, and the current of the magnetic field coil power supply is controlled to be 0.2-2.0A; the current of the metal cathode arc DC power supply is adjusted to be 30-250A, the current of the auxiliary anode DC power supply is adjusted to be 30-250A, the voltage of the pulse bias power supply is adjusted to be -900-1100V, the duty cycle is adjusted to be 10-60%, and the metal ions are bombarded for 5-15 minutes under high bias voltage to obtain a tube after metal ion bombardment;

[0018] 4. Coating deposition:

[0019] The working gas is introduced into the vacuum chamber through the air inlet pipe, and the air pressure of the vacuum chamber is controlled to be 0.3-0.8 Pa, the current of the metal cathode arc DC power supply is adjusted to be 50-250A, the current of the magnetic field coil power supply is adjusted to be 0.2-2.0A, the current of the auxiliary anode DC power supply is adjusted to be 30-250A, the voltage of the pulse bias power supply is 0--300V, and the duty cycle is 1-100%, and the coating is deposited on the inner surface of the tube component to form a coating on the inner wall of the tube component;

[0020] 5. Cooling:

[0021] The vacuum chamber is cooled, and the tube is taken out from the vacuum chamber to complete the coating deposition on the inner surface of the tube.

[0022] The device and method for improving the surface finish and film-base bonding strength of the inner wall coating of a tube and barrel of the present invention include the following beneficial effects:

[0023] (1) Arc enhanced glow discharge technology is used to perform high-density plasma etching and cleaning on the inner surface of the tube, which is equivalent to atomic-level micro-sandblasting on the inner surface of the tube. It can effectively remove the inner surface oxide layer and impurities, activate the inner surface of the tube, and produce electronic heating in the early stage of coating growth, which can greatly improve the film-base bonding strength.

[0024] (2) The inner surface of the tube is bombarded with high-bias metal ions to activate the surface, enhance the mutual diffusion of deposited atoms and substrate atoms, and perform high-energy ion etching and cleaning. Compressive stress can be introduced at the membrane-substrate interface, and a "pseudo-diffusion layer" interface can be formed through physical mixing, which is beneficial to improving the bonding strength between the coating and the substrate.

[0025] (3) Installing a shielding cover at the tube mouth facing the metal cathode arc source can effectively prevent the film-forming material on the outer wall of the tube mouth from sputtering back into the tube for deposition, thereby improving the roughness and smoothness of the coating surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic structural diagram of a device for improving the surface finish of the coating on the inner wall of a tube and a bonding strength of a film substrate according to the present invention;

[0027] Figure 2 The surface morphology of the inner wall coating of the tube member prepared without a shielding cover at the tube mouth for the application example control experiment;

[0028] Figure 3 The surface morphology of the inner wall coating of the tube member prepared by adding a shielding cover to the tube mouth of the application example;

[0029] Figure 4 The Rockwell indentation morphology of the inner wall coating surface of the tube part prepared without a shielding cover at the tube mouth in the application example control experiment;

[0030] Figure 5 This is the Rockwell indentation morphology of the coating surface on the inner wall of a tube component prepared by adding a shielding cover to the tube mouth in the application example. DETAILED DESCRIPTION

[0031] Specific implementation method 1: The device for improving the surface finish of the inner wall coating of a tube member and the film-base bonding strength in this implementation method comprises a metal cathode arc source 1, a magnetic field coil 2, a baffle 3, a shielding cover 4, a shielding baffle 6, a tube member 7, an anode rod 8, an auxiliary anode 9, an air inlet pipe 10, a vacuum chamber 11, a metal cathode arc DC power supply 12, a pulse bias power supply 13 and an auxiliary anode DC power supply 14;

[0032] A shielding baffle 6 is vertically arranged in the vacuum chamber 11, and the vacuum chamber 11 is divided into a first chamber and a second chamber by the shielding baffle 6. A through hole is opened on the shielding baffle 6. A shielding cover 4 is arranged on the front end of the tube member 7, and the shielding cover 4 is plugged into the through hole of the shielding baffle 6. The tube member 7 is located in the second chamber, and an auxiliary anode 9 is arranged at the rear of the rear end of the tube member 7. An anode rod 8 is penetrated inside the tube member 7.

[0033] A metal cathode arc source 1, a baffle 3 and an air inlet pipe 10 are arranged in the first chamber, a front end of the tube member 7 is located directly behind the metal cathode arc source 1, a baffle 3 is arranged between the front end of the tube member 7 and the metal cathode arc source 1, and the baffle 3 is located directly behind the metal cathode arc source 1, and a magnetic field coil 2 is installed on the periphery of the metal cathode arc source 1;

[0034] The negative pole of the metal cathode arc DC power supply 12 is electrically connected to the metal cathode arc source 1, and the positive pole of the metal cathode arc DC power supply 12 is grounded; the positive pole of the auxiliary anode DC power supply 14 is electrically connected to the auxiliary anode 9, and the negative pole of the auxiliary anode DC power supply 14 is grounded; one electrode of the pulse bias power supply 13 is electrically connected to the outer wall of the tube member 7, and the other electrode of the pulse bias power supply 13 is electrically connected to the anode rod 8.

[0035] Specific embodiment 2: This embodiment is different from specific embodiment 1 in that the metal cathode arc source 1, arc source front baffle 3, shielding cover 4, tube member 7, in-tube anode rod 8 and auxiliary anode 9 are coaxially arranged.

[0036] Specific embodiment three: This embodiment is different from specific embodiment one or two in that an insulator 5 is provided between the shielding cover 4 and the shielding baffle 6 , and the material of the insulator 5 is alumina ceramic.

[0037] Specific embodiment 4: The difference between this embodiment and specific embodiments 1 to 3 is that the baffle 3 and the shielding baffle 6 are both made of 304 stainless steel.

[0038] Specific embodiment 5: This embodiment is different from any one of specific embodiments 1 to 4 in that an exhaust port 15 is opened on the second chamber.

[0039] Specific embodiment 6: This embodiment is different from specific embodiments 1 to 5 in that the length of the shielding cover 4 extending from the front end of the tube member 7 is 10 to 20 mm.

[0040] Specific implementation method seven: In this implementation method, the method for depositing the coating on the inner surface of a tube member using a device for improving the surface finish of the coating on the inner wall of the tube member and the bonding strength of the film substrate is implemented according to the following steps:

[0041] 1. Pre-treatment:

[0042] The tube member 7 is placed in anhydrous ethanol for ultrasonic cleaning, and after drying, is installed into the through hole of the shielding baffle 6;

[0043] 2. Arc enhanced glow discharge plasma etching and cleaning:

[0044] The pressure of the vacuum chamber 11 is evacuated to a predetermined value, and then high-purity Ar is introduced into the vacuum chamber 11 through the air inlet pipe 10, and the pressure is controlled at 0.8-1.0 Pa. The baffle 3 shields the metal cathode arc source 1, and the metal cathode arc DC power supply 12, the pulse bias power supply 13 and the auxiliary anode DC power supply 14 are turned on at the same time, and the inner surface of the tube member 7 is cleaned by arc-enhanced glow discharge plasma etching;

[0045] The current of the metal cathode arc DC power supply 12 is 30 to 250A; the negative bias voltage of the pulse bias power supply 13 is 0 to -500V, and the duty cycle is 1 to 100%; the current of the auxiliary anode DC power supply 14 is 30 to 250A;

[0046] 3. Metal ion bombardment:

[0047] Keep the air pressure in the vacuum chamber 11 unchanged, control (adjust) the baffle 3 not to block the metal cathode arc source 1, then turn on the power supply of the magnetic field coil 2, and control the current of the power supply of the magnetic field coil 2 to be 0.2-2.0A; adjust the current of the metal cathode arc DC power supply 12 to 30-250A, the current of the auxiliary anode DC power supply 14 to 30-250A, the voltage of the pulse bias power supply 13 to -900-1100V, the duty cycle to 10-60%, and bombard with metal ions for 5-15 minutes under high bias voltage to obtain the tube member 7 after metal ion bombardment;

[0048] 4. Coating deposition:

[0049] The working gas is introduced into the vacuum chamber 11 through the air inlet pipe 10, and the air pressure of the vacuum chamber 11 is controlled to be 0.3-0.8 Pa, the current of the metal cathode arc DC power supply 12 is adjusted to be 50-250A, the current of the magnetic field coil 2 power supply is adjusted to be 0.2-2.0A, the current of the auxiliary anode DC power supply 14 is adjusted to be 30-250A, the voltage of the pulse bias power supply 13 is 0--300V, the duty cycle is 1-100%, and the coating is deposited on the inner surface of the tube member, and the coating is formed on the inner wall of the tube member;

[0050] 5. Cooling:

[0051] The vacuum chamber 11 is cooled, and the tube member 7 is taken out from the vacuum chamber 11 to complete the coating deposition on the inner surface of the tube member.

[0052] Specific embodiment eight: This embodiment differs from specific embodiment seven in that in step two, the vacuum is evacuated to a vacuum degree of less than 3×10 -3 Pa.

[0053] Specific embodiment 9: This embodiment is different from specific embodiment 7 or 8 in that the metal cathode arc source 1 is a Cr metal target or a Ti metal target.

[0054] Specific implementation method ten: The difference between this implementation method and any one of specific implementation methods seven to nine is that in step three, the current of the power supply of the magnetic field coil 2 is controlled to be 0.2-0.8A; the current of the metal cathode arc DC power supply 12 is adjusted to be 40-80A, the current of the auxiliary anode DC power supply 14 is adjusted to be 30-50A, the voltage of the pulse bias power supply 13 is -900--1000V, and the duty cycle is 20-40%.

[0055] Specific embodiment eleven: The difference between this embodiment and specific embodiments seven to ten is that the time for depositing the coating on the inner surface of the tube in step four is 60 to 300 minutes.

[0056] Specific embodiment 12: This embodiment is different from the specific embodiments 7 to 11 in that the working gas in step 4 is high-purity Ar or high-purity N 2 .

[0057] The purity of the working gas in this embodiment is higher than 99.9%.

[0058] Embodiment 1: The device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube member in this embodiment comprises a metal cathode arc source 1, a magnetic field coil 2, a baffle 3, a shielding cover 4, an insulator 5, a shielding baffle 6, a tube member 7, an anode rod 8, an auxiliary anode 9, an air inlet pipe 10, a vacuum chamber 11, a metal cathode arc DC power supply 12, a pulse bias power supply 13 and an auxiliary anode DC power supply 14;

[0059] A shielding baffle 6 is vertically arranged in the vacuum chamber 11, and the vacuum chamber 11 is divided into a first chamber and a second chamber by the shielding baffle 6. A through hole is opened on the shielding baffle 6. A shielding cover 4 is arranged on the front end of the tube member 7, and the shielding cover 4 is plugged into the through hole of the shielding baffle 6. An insulator 5 is arranged between the shielding cover 4 and the shielding baffle 6. The tube member 7 is located in the second chamber, and an auxiliary anode 9 is arranged at the rear of the rear end of the tube member 7. An anode rod 8 is penetrated inside the tube member 7.

[0060] A metal cathode arc source 1, a baffle 3 and an air inlet pipe 10 are arranged in the first chamber, a front end of the tube member 7 is located directly behind the metal cathode arc source 1, a baffle 3 is arranged between the front end of the tube member 7 and the metal cathode arc source 1, and the baffle 3 is located directly behind the metal cathode arc source 1, and a magnetic field coil 2 is installed on the periphery of the metal cathode arc source 1;

[0061] The negative pole of the metal cathode arc DC power supply 12 is electrically connected to the metal cathode arc source 1, and the positive pole of the metal cathode arc DC power supply 12 is grounded; the positive pole of the auxiliary anode DC power supply 14 is electrically connected to the auxiliary anode 9, and the negative pole of the auxiliary anode DC power supply 14 is grounded; one electrode of the pulse bias power supply 13 is electrically connected to the outer wall of the tube member 7, and the other electrode of the pulse bias power supply 13 is electrically connected to the anode rod 8.

[0062] In this embodiment, the shielding cover 4 is composed of two sections of tube bodies with different diameters, and the tube body section with a larger diameter is plugged into the front end of the tube member 7 .

[0063] Application Example: The method for depositing a coating on the inner surface of a tube using the device of Example 1 is implemented according to the following steps:

[0064] 1. Pre-treatment:

[0065] The Φ40×120mm tube member 7 is placed in anhydrous ethanol for ultrasonic cleaning, and then installed in the through hole of the shielding baffle 6 after drying; the shielding cover 4 extends from the front end of the tube member 7 by 15mm, the inner diameter of the extension section of the shielding cover 4 is the same as the inner diameter of the tube member 7, the distance from the front end of the shielding cover 4 to the metal cathode arc source 1 is 10cm, and the distance from the auxiliary anode 9 to the rear end of the tube member 7 is 60mm;

[0066] 2. Arc enhanced glow discharge plasma etching and cleaning:

[0067] The vacuum chamber 11 is evacuated to a vacuum degree of less than 3×10 -3 Pa, and then high-purity Ar with a flow rate of 215 sccm is introduced into the vacuum chamber 11 through the air inlet pipe 10, and the gas pressure is adjusted to 0.9 Pa. The baffle 3 shields the metal cathode arc source 1, and the metal cathode arc DC power supply 12, the pulse bias power supply 13 and the auxiliary anode DC power supply 14 are turned on at the same time, and the inner surface of the tube member 7 is cleaned by arc-enhanced glow discharge plasma etching for 30 minutes;

[0068] The current of the metal cathode arc DC power supply 12 is 100A; the negative bias voltage of the pulse bias power supply 13 is -400V, and the duty cycle is 60%; the current of the auxiliary anode DC power supply 14 is 30A;

[0069] 3. Metal ion bombardment:

[0070] The air pressure in the vacuum chamber 11 is kept constant, and the baffle knob is rotated to control the baffle 3 not to block the metal cathode arc source 1. The metal cathode arc source 1 adopts a Ti metal target with a purity of 99.50%. Then, the power supply of the magnetic field coil 2 is turned on, and the arc spot on the target surface is constrained by the magnetic field generated by the magnetic field coil 2 (the magnetic field strength is 120Gs), and the plasma is focused to push the plasma into the tube 7. The current of the power supply of the magnetic field coil 2 is controlled to be 0.4A; the current of the metal cathode arc DC power supply 12 is adjusted to 50A, the current of the auxiliary anode DC power supply 14 is adjusted to 30A, the voltage of the pulse bias power supply 13 is adjusted to -950V, and the duty cycle is adjusted to 40%. The metal ions are bombarded for 10 minutes under high bias voltage to obtain the tube 7 after metal ion bombardment;

[0071] 4. Coating deposition:

[0072] High-purity N with a flow rate of 450 sccm is introduced into the vacuum chamber 11 through the inlet pipe 10. 2 , and control the air pressure of the vacuum chamber 11 to 0.5Pa, adjust the current of the metal cathode arc DC power supply 12 to 80A, the current of the magnetic field coil 2 power supply to 0.4A, the current of the auxiliary anode DC power supply 14 to 30A, the voltage of the pulse bias power supply 13 to -60V, the duty cycle to 50%, and deposit the coating on the inner surface of the tube for 120min, so that a TiN coating is formed on the inner wall of the tube;

[0073] 5. Cooling:

[0074] The vacuum chamber 11 is cooled by the furnace cooling water circulation system. When the workpiece is cooled to below 70° C. in the vacuum state, the tube member 7 can be taken out, and the coating deposition on the inner surface of the tube member is completed.

[0075] Characterization and performance testing of coatings deposited on the inner surface of tubes and pipes:

[0076] (1) The surface morphology of the deposited coating on the inner wall of the tube was observed using a scanning electron microscope. Figure 2 and Figure 3 The surface morphologies of the inner wall coating of the tube parts prepared with and without a shielding cover on the tube mouth.

[0077] (2) The Rockwell (HRC) indentation method was used to test the bonding strength between the coating and the substrate, and the Rockwell indentation morphology of the coating surface was observed using an optical microscope. Figure 4 and Figure 5 The Rockwell indentation morphologies of the inner wall coating surface of the tube component prepared with and without a shielding cover on the tube mouth.

[0078] Comparing the surface finish and membrane-base bonding strength of the inner wall coating prepared without a shielding cover and with a shielding cover at the pipe mouth of the pipe fitting, it is shown that the inner wall coating prepared with a shielding cover at the pipe mouth of the pipe fitting has good surface finish and high membrane-base bonding strength.

[0079] In summary, the present invention adopts a device and method for improving the surface finish and film-base bonding strength of the inner wall coating of a tube component, and a coating with good surface finish and high film-base bonding strength can be prepared on the inner wall of the tube component.

Claims

1. A device for improving the surface finish of the inner wall coating of a tube and tube and the bonding strength of the film base, characterized in that The device comprises a metal cathode arc source (1), a magnetic field coil (2), a baffle (3), a shielding cover (4), a shielding baffle (6), a tube member (7), an anode rod (8), an auxiliary anode (9), an air inlet pipe (10), a vacuum chamber (11), a metal cathode arc DC power supply (12), a pulse bias power supply (13) and an auxiliary anode DC power supply (14); A shielding baffle (6) is vertically arranged in the vacuum chamber (11), and the vacuum chamber (11) is divided into a first chamber and a second chamber by the shielding baffle (6). A through hole is opened on the shielding baffle (6), and a shielding cover (4) is arranged on the front end of the tube member (7). The shielding cover (4) extends from the front end of the tube member (7) by a length of 10 to 20 mm. The shielding cover (4) is plugged into the through hole of the shielding baffle (6), and the tube member (7) is located in the second chamber. An auxiliary anode (9) is arranged at the rear of the rear end of the tube member (7), and an anode rod (8) is inserted into the interior of the tube member (7); A metal cathode arc source (1), a baffle (3) and an air inlet pipe (10) are provided in the first chamber, a front end of the tube member (7) is located directly behind the metal cathode arc source (1), a baffle (3) is provided between the front end of the tube member (7) and the metal cathode arc source (1), and the baffle (3) is located directly behind the metal cathode arc source (1), and a magnetic field coil (2) is installed on the periphery of the metal cathode arc source (1); The negative electrode of the metal cathode arc DC power supply (12) is electrically connected to the metal cathode arc source (1), and the positive electrode of the metal cathode arc DC power supply (12) is grounded; the positive electrode of the auxiliary anode DC power supply (14) is electrically connected to the auxiliary anode (9), and the negative electrode of the auxiliary anode DC power supply (14) is grounded; one electrode of the pulse bias power supply (13) is electrically connected to the outer wall of the tube member (7), and the other electrode of the pulse bias power supply (13) is electrically connected to the anode rod (8).

2. The device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 1, characterized in that The metal cathode arc source (1), the arc source front baffle (3), the shielding cover (4), the tube member (7), the anode rod (8) in the tube and the auxiliary anode (9) are coaxially arranged.

3. The device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 1, characterized in that An insulator (5) is arranged between the shielding cover (4) and the shielding baffle (6), and the material of the insulator (5) is alumina ceramic.

4. The device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 1, characterized in that An exhaust port (15) is provided on the second chamber.

5. A method for depositing coating on the inner surface of a tube using the device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube as claimed in claim 1, characterized in that The coating deposition method is implemented according to the following steps:

1. Pre-treatment: The tube member (7) is placed in anhydrous ethanol for ultrasonic cleaning, and after drying, is installed in the through hole of the shielding baffle (6); 2. Arc enhanced glow discharge plasma etching and cleaning: The air pressure of the vacuum chamber (11) is evacuated to a predetermined value, and then high-purity Ar is introduced into the vacuum chamber (11) through an air inlet pipe (10), and the air pressure is controlled at 0.8 to 1.0 Pa. The baffle (3) shields the metal cathode arc source (1), and at the same time, the metal cathode arc DC power supply (12), the pulse bias power supply (13) and the auxiliary anode DC power supply (14) are turned on to perform arc-enhanced glow discharge plasma etching and cleaning on the inner surface of the tube member (7); The current of the metal cathode arc DC power supply (12) is controlled to be 30 to 250A; the negative bias voltage of the pulse bias power supply (13) is 0 to -500V, and the duty cycle is 1 to 100%; the current of the auxiliary anode DC power supply (14) is 30 to 250A; 3. Metal ion bombardment: The air pressure in the vacuum chamber (11) is kept constant, the baffle (3) is controlled not to block the metal cathode arc source (1), and then the power supply of the magnetic field coil (2) is turned on, and the current of the power supply of the magnetic field coil (2) is controlled to be 0.2-2.0A; the current of the metal cathode arc DC power supply (12) is adjusted to be 30-250A, the current of the auxiliary anode DC power supply (14) is adjusted to be 30-250A, the voltage of the pulse bias power supply (13) is adjusted to be -900-1100V, the duty cycle is adjusted to be 10-60%, and the metal ion bombardment is carried out for 5-15 minutes under high bias voltage to obtain the tube member (7) after metal ion bombardment; 4. Coating deposition: A working gas is introduced into the vacuum chamber (11) through an air inlet pipe (10), and the air pressure of the vacuum chamber (11) is controlled to be 0.3-0.8 Pa, the current of the metal cathode arc DC power supply (12) is adjusted to be 50-250A, the current of the magnetic field coil (2) power supply is adjusted to be 0.2-2.0A, the current of the auxiliary anode DC power supply (14) is adjusted to be 30-250A, the voltage of the pulse bias power supply (13) is adjusted to be 0--300V, and the duty cycle is adjusted to be 1-100%, and a coating is deposited on the inner surface of the tube component, so that a coating is formed on the inner wall of the tube component; 5. Cooling: The vacuum chamber (11) is cooled, and the tube member (7) is taken out from the vacuum chamber (11), thereby completing the coating deposition on the inner surface of the tube member.

6. The method for depositing coating on the inner surface of a tube using the device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 5, characterized in that The metal cathode arc source (1) is a Cr metal target or a Ti metal target.

7. The method for depositing coating on the inner surface of a tube using the device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 5, characterized in that In step 3, the current of the power supply of the magnetic field coil (2) is controlled to be 0.2-0.8A; The current of the metal cathode arc DC power supply (12) is adjusted to 40-80A, the current of the auxiliary anode DC power supply (14) is adjusted to 30-50A, the voltage of the pulse bias power supply (13) is adjusted to -900-1000V, and the duty cycle is adjusted to 20-40%.

8. The method for depositing coating on the inner surface of a tube using the device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 5, characterized in that In step 4, the time for coating deposition on the inner surface of the tube is 60 to 300 minutes.

9. The method for depositing coating on the inner surface of a tube using the device for improving the surface finish and film-base bonding strength of the inner wall coating of a tube according to claim 5, characterized in that In step 4, the working gas is high-purity Ar or high-purity N2.

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