A water-guided laser processing method suitable for small and micro-sized components

Abstract

This invention discloses a water-guided laser processing method suitable for small and micro-sized components. The specific steps of the method include: analyzing and confirming the appropriate protective head, installing the protective head, determining the water jet speed, processing the workpiece, controlling the flow control valve, storing water, and finishing the process. This method is flexible in application, simple to operate, effectively prevents reflected water flow from interfering with the normal processing water jet, and significantly improves the product processing quality.

Description

Technical Field

[0001] This invention relates to the field of laser processing, specifically a water-guided laser processing method suitable for small and micro-sized components. Background Technology

[0002] With the rapid development of the medical, aerospace, and semiconductor fields, the performance requirements for key components are becoming increasingly stringent, prompting improvements in component processing methods and equipment. In the field of component cutting, traditional methods mainly include mechanical cutting and high-pressure water jet cutting. However, these methods suffer from low processing efficiency and low precision. To address these issues, researchers in this field have developed laser cutting equipment, which outperforms traditional cutting methods in terms of processing efficiency, precision, and environmental protection. However, laser cutting can cause some degree of thermal damage to materials. To solve this problem, water-guided laser processing equipment has emerged, offering a highly efficient and pollution-free material removal process.

[0003] Water-guided laser processing technology is a novel composite micro-machining technology that can overcome the disadvantages of traditional laser processing. During laser processing, the flushing and cooling effect of the water medium effectively reduces the heat-affected zone and recasting phenomenon. In existing technologies, the thickness of the water medium significantly affects the laser's absorption, reflection, and refraction, limiting processing efficiency, accuracy, and resolution.

[0004] In existing water-guided laser devices, the water beam is typically perpendicular to the surface being processed, transmitting energy by confining the laser within a small water beam diameter. In this case, the reflected water flow does not negatively affect the normal water beam. However, when the angle between the water beam direction and the surface being processed is very small, and the distance between the outlet and the surface is also short, the reflected water flow severely interferes with the normal water beam transmission. This can result in the reflected water jet scattering the water beam being processed, significantly impacting processing quality and time.

[0005] For example, Chinese patent CN 111098043 A discloses a water-guided laser processing device, including a beam adjustment device, a focusing lens, and a coupling water cavity. The beam adjustment device is used to adjust the position and angle of the laser. The focusing lens is used to focus the laser, after adjustment by the beam adjustment device, into the coupling water cavity. The coupling water cavity is used to transmit the focused laser along the outgoing water column at the outlet of the coupling water cavity, thereby using the laser in the outgoing water column to process the workpiece. The focal point of the laser in the outgoing water column is deviated from the axis of the outgoing water column. Although this water-guided laser processing system is equipped with a feedback sensor, which can collect the position information of the workpiece in real time, determine the cutting accuracy, and ensure precise cutting, this device provides high-pressure gas from the air inlet into the gas chamber. This cannot solve the problem of water flow reflection and refraction caused by the contact between the water jet and the component during actual operation. When the angle between the water jet transmission direction and the surface being processed is very small and the distance between the air outlet and the surface being processed is small, the reflected water flow will seriously interfere with the normal water jet transmission.

[0006] For example, Chinese patent CN 103567636 A discloses a coaxial laser welding head, which consists of a welding head body, a cylindrical reflector assembly, a focusing lens assembly, a compact wide-area supersonic air curtain assembly, a lock nut, a connecting pipe, a coaxial protective nozzle assembly, and a plane reflector assembly. The beam propagation and focusing optical path are designed with the dimensions of relevant components to reflect the incident quasi-parallel light and form a focused beam. Besides mounting the relevant components, the welding head body also provides the necessary compressed air inlet, welding working gas inlet, and cooling water inlet / outlet. The compact wide-area supersonic air curtain assembly forms a supersonic air curtain below the focusing lens assembly to protect the focusing lens from welding fumes and spatter. However, this device also fails to address the reflection and refraction of water flow caused by the contact between the water jet and the components during actual operation. When the angle between the water jet direction and the surface being processed is small, and the distance between the air outlet and the surface is also small, the reflected water flow severely interferes with the normal water jet transmission. Summary of the Invention

[0007] Purpose of the invention: The purpose of this invention is to overcome the shortcomings of the prior art and provide a water-guided laser processing method suitable for small and micro-sized products. This method is flexible in application, simple to operate, effectively prevents reflected water flow from interfering with the normal processing water jet, and significantly improves product processing quality.

[0008] Technical Solution: To achieve the above objectives, the present invention provides a water-guided laser processing method suitable for small and micro-sized components. The specific steps of this method are as follows:

[0009] Step 1: Analyze and confirm the compatible protective head.

[0010] After receiving the workpiece dimensions manually input, the central control unit analyzes the parts of the workpiece that need to be processed to obtain the distance range between the protective head and the workpiece, and then determines the size of the micro-holes on the protective head based on the distance between the protective head and the workpiece.

[0011] Step 2: Install the protective head

[0012] The appropriate protective head, selected according to the size of the micropores, is fixed below the photo-water coupling device;

[0013] Step 3: Determine the water jet velocity

[0014] When the start button on the central control panel is pressed, the PLC circuit controls the air pump and flow control valve to open simultaneously. The distance sensor measures the distance between the protective head and the workpiece and feeds this data back to the PLC circuit. The PLC circuit determines the minimum water jet length L based on this distance and controls the flow rate of the flow control valve accordingly. The relationship between the minimum water jet length L and the water jet spray speed is as follows:

[0015] ;

[0016] The pressure p of the flow control valve is limited to 400 bar to 150 bar, and the water jet velocity is:

[0017] ;

[0018] Step 4: Machining the workpiece

[0019] After the PLC circuit receives the signals that the flow control valve and the air pump are both turned on, it turns on the photo-water coupling device located above the protective head. The laser emitted by the photo-water coupling device passes through the micro-hole and the air cavity to reach the surface of the workpiece. The air pump inputs compressed air into the air cavity through the vent. The air flow rate of the compressed air in the air cavity is maintained at 0.5L / min~2L / min. Through multiple experiments and comparisons, this parameter can enable the high-speed water column to form a stable gas protective layer, preventing reflected and refracted water flow from interfering with the normal processing water jet.

[0020] Step 5: Control of the flow control valve

[0021] When the spindle of the machine tool used to fix the optical-water coupling device drives the overall structure to rotate, thereby causing the size of the workpiece and the protective head to change or rotate at multiple angles during machining, the distance sensor measures the shortening or lengthening of the distance between the protective head and the workpiece. The distance sensor then sends the measured distance data to the PLC circuit. The PLC circuit calculates the water jet speed based on the distance between the protective head and the workpiece, thereby controlling the pressure of the flow control valve.

[0022] Step Six: Water Storage

[0023] During the workpiece processing, the swirling groove in the arc section collects water mist, and due to gravity, the water mist accumulated in the swirling groove forms water droplets that are collected by the drain hole, thus avoiding the influence of reflected and refracted water droplets on the normal processing water jet.

[0024] Step 7: Finishing Process

[0025] After the workpiece is processed, the PLC circuit sequentially controls the optical-water coupling device, air pump and flow control valve to close. If there are any parts that need to be processed, repeat steps one to six.

[0026] As a further preferred embodiment of the present invention, the protective head includes: a vent hole, a drain hole, a swirl groove, an air chamber, and micropores;

[0027] The micro-hole is connected to the water inlet on the optical-water coupling device. The laser emitted by the optical-water coupling device passes through the micro-hole to process the workpiece. The outside of the laser is covered by a water column sprayed from the micro-hole. The water column can effectively reduce the heat-affected zone and recasting phenomenon through the scouring and cooling effect of the laser. The rotating surface of the protective head is provided with a vent hole, which is connected to the air cavity inside the protective head. The air cavity is coaxially arranged with the micro-hole.

[0028] The protective head has a swirling groove on the arc-shaped cross-section at the end away from the optical-water coupling device, a drainage hole on the swirling groove, and a distance sensor on the swirling groove.

[0029] As a further preferred embodiment of the present invention, the diameter of the water column ejected from the micro-orifice is 80% to 85% of the diameter of the micro-orifice. When the diameter of the water column ejected from the micro-orifice needs to be adjusted and the protective head needs to be replaced according to the workpiece conditions or usage conditions, it is only necessary to remove the protective head from the photo-water coupling device and replace it with a protective head that meets the micro-orifice size requirements.

[0030] As a further preferred embodiment of the present invention, the water inlet is connected to a flow control valve, and the length and stability of the water jet depend on the water pressure and the diameter of the micro-orifice.

[0031] As a further preferred embodiment of the present invention, the cross-section of the micropore is a 30° cone, and the cross-sectional dimension away from the optical-water coupling device is larger than the cross-sectional dimension near the optical-water coupling device. This reduces the resistance to the movement of the water column by decreasing the contact length between the water column and the micropore.

[0032] As a further preferred embodiment of the present invention, the air chamber connected to the air pump through the vent is located on the radial outside of the micro-hole. The water column coated with laser is compressed by compressed air, thereby ensuring the stability of the water column jet and forming a stable gas protective layer for the high-speed water jet, preventing the reflected and refracted water flow from interfering with the normal processing water jet.

[0033] As a further preferred embodiment of the present invention, the ratio of the diameter of the air chamber to the diameter of the larger end of the micropore is 1:18 to 1:20, and the compressed air flow rate in the air chamber is maintained at 0.5L / min to 2L / min. This size ratio has been determined through multiple experiments and tests, which can form a stable gas protective layer for the high-speed water column and prevent reflected and refracted water flow from interfering with the normal processing water jet.

[0034] As a further preferred embodiment of the present invention, the end of the vortex channel is provided with a drainage hole. The vortex channel has a depth of 1mm to 1.5mm and a cross-sectional width of 2mm to 3mm, allowing water mist to be adsorbed onto the surface of the vortex channel. Under the action of gravity, the water mist accumulated through the vortex channel forms water droplets, thereby reducing the reflection and refraction of water flow caused by the contact between the water jet and the component.

[0035] As a further preferred embodiment of the present invention, the photo-water coupling device and the protective head are fastened by means of threaded connection, pin connection, or snap-fit ​​connection. For example, the threaded connection is to evenly arrange multiple screws through the threaded holes on the protective head, thereby fixing the protective head and the photo-water coupling device together. Since these connection methods are all existing technologies and are not the inventive points to be protected by this technical solution, they will not be specifically described here.

[0036] As a further preferred embodiment of the present invention, the flow control valve and the air pump are respectively connected to the PLC circuit, and the PLC circuit operates after receiving the signal from the central control console.

[0037] Beneficial effects: The water-guided laser processing method for small and micro-sized components provided by this invention has the following advantages compared with the prior art:

[0038] 1. The protective head is detachably installed below the photo-water coupling device. Different protective heads can be replaced according to different usage scenarios, making the overall structure more adaptable and flexible, and the operation simple.

[0039] 2. By adding an air cavity inside the protective head, a stable gas protective layer can be formed for the high-speed water jet, preventing reflected and refracted water flow from interfering with the normal processing water jet;

[0040] 3. By adding a vortex groove below the protective head, the water mist adsorbed on the surface during processing can be gradually formed into water droplets and discharged through the micropores on both sides, avoiding the influence of reflected and refracted water droplets on the normal processing water jet;

[0041] 4. On a multi-axis gantry milling machine, the spindle drives the entire structure to rotate, thereby realizing multi-angle rotation machining, making the machining scene not limited to various angles and distances, and providing greater flexibility;

[0042] 5. Connect compressed air to the air inlet to reduce the cost of using helium, nitrogen or argon as required by existing technologies. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the structure of the present invention;

[0044] Figure 2 A partial sectional view for protecting the head;

[0045] Figure 3 This is a schematic diagram of the swirl channel. Detailed Implementation

[0046] The present invention will be further explained below with reference to the accompanying drawings.

[0047] As shown in the attached figure, the present invention provides a water-guided laser processing method suitable for small and micro-sized components. The specific steps of the method include: analyzing and confirming the appropriate protective head, installing the protective head, determining the water jet speed, processing the workpiece, controlling the flow control valve, storing water, and finishing the process.

[0048] like Figure 1 As shown, the internal structure of the photo-water coupling device 1 is omitted in the drawing. The water inlet 9 on the photo-water coupling device 1 is connected to the micro-hole 10 on the protective head 2. The laser 6 emitted by the photo-water coupling device 1 passes through the micro-hole 10 to process the workpiece 1. The laser 6 is surrounded by a water column sprayed from the micro-hole 10. Through the flushing and cooling effect of the water column on the laser 6, the heat-affected zone and recasting phenomenon can be effectively reduced. The flow path of the water column is shown in the figure. Figure 1 As shown;

[0049] like Figure 2 As shown, the rotating surface of the protective head 2 is provided with a vent hole 3, which is connected to the air chamber 7 inside the protective head 2. By setting the air chamber 7, a stable gas protective layer can be formed for the high-speed water column, preventing the reflected and refracted water flow from interfering with the normal processing water jet.

[0050] Example 1

[0051] Step 1: After receiving the workpiece dimensions manually input by the central control unit, the distance range between the protective head 2 and the workpiece 11 is obtained by analyzing the parts of the workpiece 11 that need to be processed. Then, the size of the micro-hole 10 on the protective head 2 is determined based on the distance between the protective head 2 and the workpiece 11.

[0052] Step 2: Fix the appropriate protective head 2, selected according to the size of the micro-hole 10, to the bottom of the photo-water coupling device 1 by means of threaded connection;

[0053] Step 3: Press the start button on the central control panel. The PLC circuit controls the air pump and flow control valve 9 to open simultaneously. The distance sensor measures the distance between the protective head 2 and the workpiece 11 and feeds the data back to the PLC circuit. The PLC circuit uses the distance measured by the distance sensor as the minimum length L of the water jet and controls the flow rate of the flow control valve 9 based on the minimum length L of the water jet. The relationship between the minimum length L of the water jet and the water jet spray speed is as follows:

[0054] ;

[0055] The minimum length L of the water jet limits the water column velocity, the pressure p limited by the flow control valve 9 is 400 bar, and the water jet velocity is:

[0056] ;

[0057] Substituting the relevant data into the formula, we can see that when the distance between the protective head 2 and the workpiece 11 is 50mm, the protective head 2 and the workpiece 11 are in a perpendicular state, and the water jet speed is 275m / s.

[0058] Step 4: After the PLC circuit receives the signal that the flow control valve 9 and the air pump are both turned on, the optical-water coupling device 1 located above the protective head 2 is turned on. The laser 6 emitted by the optical-water coupling device 1 passes through the micro-hole 10 and the air cavity 7 in sequence to reach the surface of the workpiece 11. The air pump inputs compressed air into the air cavity 7 through the vent 3. The compressed air flow rate in the air cavity 7 is maintained at 0.5L / min, so that the high-speed water column forms a stable gas protective layer to prevent the reflected and refracted water flow from interfering with the normal processing water jet.

[0059] Step 5: When the spindle of the machine tool used to fix the optical-water coupling device 1 drives the overall structure to rotate, thereby causing the size of the workpiece 11 and the protective head 2 to change or rotate at multiple angles, the distance sensor detects that the distance between the protective head 2 and the workpiece 11 has shortened or lengthened. The distance sensor then sends the measured distance data to the PLC circuit. The PLC circuit calculates the water jet speed based on the distance between the protective head 2 and the workpiece 11, thereby controlling the pressure of the flow control valve 9.

[0060] Step Six: During the machining of workpiece 11, the swirling groove 5 within the arc-shaped cross-section collects water mist. Due to gravity, the accumulated water mist in the swirling groove 5 forms water droplets, which are then collected by the drain hole 4. This prevents reflected and refracted water droplets from affecting the normal machining water jets. Figure 3 As shown;

[0061] Step 7: After workpiece 11 is processed, the PLC circuit sequentially controls the optical-water coupling device 1, the air pump and the flow control valve 9 to close. If there are any parts that need to be processed, repeat steps 1 to 6.

[0062] Example 2

[0063] Step 1: After receiving the workpiece dimensions manually input by the central control unit, the distance range between the protective head 2 and the workpiece 11 is obtained by analyzing the parts of the workpiece 11 that need to be processed. Then, the size of the micro-hole 10 on the protective head 2 is determined based on the distance between the protective head 2 and the workpiece 11.

[0064] Step 2: Fix the appropriate protective head 2, selected according to the size of the micro-hole 10, to the bottom of the photo-water coupling device 1 by means of pin connection or snap connection;

[0065] Step 3: Press the start button on the central control panel. The PLC circuit controls the air pump and flow control valve 9 to open simultaneously. The distance sensor measures the distance between the protective head 2 and the workpiece 11 and feeds the data back to the PLC circuit. The PLC circuit uses the distance measured by the distance sensor as the minimum length L of the water jet and controls the flow rate of the flow control valve 9 based on the minimum length L of the water jet. The relationship between the minimum length L of the water jet and the water jet spray speed is as follows:

[0066] ;

[0067] The minimum length L of the water jet limits the water column velocity, the pressure p limited by the flow control valve 9 is 400 bar, and the water jet velocity is:

[0068] ;

[0069] Substituting the relevant data into the formula, we can see that when the distance between the protective head 2 and the workpiece 11 is 80mm, the tilt angle between the protective head 2 and the workpiece 11 is 60°, and the water jet speed is 385m / s.

[0070] Step 4: After the PLC circuit receives the signal that the flow control valve 9 and the air pump are both turned on, the optical-water coupling device 1 located above the protective head 2 is turned on. The laser 6 emitted by the optical-water coupling device 1 passes through the micro-hole 10 and the air cavity 7 in sequence to reach the surface of the workpiece 11. The air pump inputs compressed air into the air cavity 7 through the vent 3. The compressed air flow rate in the air cavity 7 is maintained at 0.5L / min~2L / min, so that the high-speed water column forms a stable gas protective layer to prevent the reflected and refracted water flow from interfering with the normal processing water jet.

[0071] Step 5: When the spindle of the machine tool used to fix the optical-water coupling device 1 drives the overall structure to rotate, thereby causing the size of the workpiece 11 and the protective head 2 to change or rotate at multiple angles, the distance sensor detects that the distance between the protective head 2 and the workpiece 11 has shortened or lengthened. The distance sensor then sends the measured distance data to the PLC circuit. The PLC circuit calculates the water jet speed based on the distance between the protective head 2 and the workpiece 11, thereby controlling the pressure of the flow control valve 9.

[0072] Step Six: During the machining of workpiece 11, the swirling groove 5 within the arc-shaped cross-section collects water mist. Due to gravity, the accumulated water mist in the swirling groove 5 forms water droplets, which are then collected by the drain hole 4. This prevents reflected and refracted water droplets from affecting the normal machining water jets. Figure 3 As shown;

[0073] Step 7: After workpiece 11 is processed, the PLC circuit sequentially controls the optical-water coupling device 1, the air pump and the flow control valve 9 to close. If there are any parts that need to be processed, repeat steps 1 to 6.

[0074] Example 3

[0075] Step 1: After receiving the workpiece dimensions manually input by the central control unit, the distance range between the protective head 2 and the workpiece 11 is obtained by analyzing the parts of the workpiece 11 that need to be processed. Then, the size of the micro-hole 10 on the protective head 2 is determined based on the distance between the protective head 2 and the workpiece 11.

[0076] Step 2: Fix the appropriate protective head 2, selected according to the size of the micro-hole 10, to the bottom of the photo-water coupling device 1 by means of threaded connection, pin connection or snap-fit ​​connection;

[0077] Step 3: Press the start button on the central control panel. The PLC circuit controls the air pump and flow control valve 9 to open simultaneously. The distance sensor measures the distance between the protective head 2 and the workpiece 11 and feeds the data back to the PLC circuit. The PLC circuit uses the distance measured by the distance sensor as the minimum length L of the water jet and controls the flow rate of the flow control valve 9 based on the minimum length L of the water jet. The relationship between the minimum length L of the water jet and the water jet spray speed is as follows:

[0078] ;

[0079] The minimum length L of the water jet limits the water column velocity, the pressure p limited by the flow control valve 9 is 400 bar, and the water jet velocity is:

[0080] ;

[0081] Substituting the relevant data into the formula, we can see that when the distance between the protective head 2 and the workpiece 11 is 100mm, the water jet velocity is 442m / s at a tilt angle of 90° between the protective head 2 and the workpiece 11.

[0082] Step 4: After the PLC circuit receives the signal that the flow control valve 9 and the air pump are both turned on, the optical-water coupling device 1 located above the protective head 2 is turned on. The laser 6 emitted by the optical-water coupling device 1 passes through the micro-hole 10 and the air cavity 7 in sequence to reach the surface of the workpiece 11. The air pump inputs compressed air into the air cavity 7 through the vent 3. The compressed air flow rate in the air cavity 7 is maintained at 0.5L / min~2L / min, so that the high-speed water column forms a stable gas protective layer to prevent the reflected and refracted water flow from interfering with the normal processing water jet.

[0083] Step 5: When the spindle of the machine tool used to fix the optical-water coupling device 1 drives the overall structure to rotate, thereby causing the size of the workpiece 11 and the protective head 2 to change or rotate at multiple angles, the distance sensor detects that the distance between the protective head 2 and the workpiece 11 has shortened or lengthened. The distance sensor then sends the measured distance data to the PLC circuit. The PLC circuit calculates the water jet speed based on the distance between the protective head 2 and the workpiece 11, thereby controlling the pressure of the flow control valve 9.

[0084] Step Six: During the machining of workpiece 11, the swirling groove 5 within the arc-shaped cross-section collects water mist. Due to gravity, the accumulated water mist in the swirling groove 5 forms water droplets, which are then collected by the drain hole 4. This prevents reflected and refracted water droplets from affecting the normal machining water jets. Figure 3 As shown;

[0085] Step 7: After workpiece 11 is processed, the PLC circuit sequentially controls the optical-water coupling device 1, the air pump and the flow control valve 9 to close. If there are any parts that need to be processed, repeat steps 1 to 6.

[0086] The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A water-guided laser processing method suitable for small and micro-sized components, characterized in that: The specific steps of this method are as follows: Step 1: Analyze and confirm the compatible protective head. After receiving the workpiece dimensions manually input, the central control unit analyzes the parts of the workpiece (11) that need to be processed to obtain the distance range between the protective head (2) and the workpiece (11). Then, based on the distance between the protective head (2) and the workpiece (11), the size of the micro-hole (10) on the protective head (2) is determined. The protective head (2) includes: a vent (3), a drain (4), a vortex groove (5), an air chamber (7), and a micro-hole (10). The micropore (10) is connected to the water inlet (8) provided on the photo-water coupling device (1). The rotating surface of the protective head (2) is provided with a vent (3). The vent (3) is connected to the air cavity (7) inside the protective head (2). The air cavity (7) is coaxially arranged with the micropore (10). The protective head (2) has a swirling groove (5) on the arc-shaped cross section away from the optical-water coupling device (1), and a drain hole (4) is provided on the swirling groove (5). A distance sensor is provided on the swirling groove (5). Step 2: Install the protective head The appropriate protective head (2) selected according to the size of the micropore (10) is fixed below the photo-water coupling device (1); Step 3: Determine the water jet velocity Turn on the start button on the central control panel. The PLC circuit controls the air pump and flow control valve (9) to open simultaneously. The distance between the protective head (2) and the workpiece (11) is measured by the distance sensor and the data is fed back to the PLC circuit. The PLC circuit determines the shortest length L of the water jet based on the distance measured by the distance sensor. The flow rate of the flow control valve (9) is controlled by the shortest length L of the water jet. The unit of the shortest length L of the water jet is mm, and the unit of the water jet velocity v is m / s. The relationship between the shortest length L of the water jet and the water jet velocity v is: ; The unit of the pressure p is bar. The pressure p of the flow control valve (9) is 400 bar to 150 bar. The water jet velocity is: ; Step 4: Machining the workpiece After the PLC circuit receives the signal that the flow control valve (9) and the air pump are both turned on, the optical-water coupling device (1) located above the protective head (2) is turned on. The laser (6) emitted by the optical-water coupling device (1) passes through the micro-hole (10) and the air cavity (7) to reach the surface of the workpiece (11). The air pump inputs compressed air into the air cavity (7) through the vent (3). The compressed air flow rate in the air cavity (7) is maintained at 0.5L / min~2L / min. Step 5: Control of the flow control valve When the spindle of the machine tool used to fix the optical-water coupling device (1) drives the overall structure to rotate, thereby causing the size of the workpiece (11) and the protective head (2) to change or rotate at multiple angles, the distance sensor measures that the distance between the protective head (2) and the workpiece (11) is shortened or lengthened. The distance sensor then sends the measured distance data to the PLC circuit. The PLC circuit calculates the water jet speed based on the distance between the protective head (2) and the workpiece (11) to control the pressure of the flow control valve (9). Step Six: Water Storage During the processing of workpiece (11), the swirling groove (5) in the arc-shaped section collects water mist and, due to gravity, the water mist accumulated in the swirling groove (5) forms water droplets which are collected by the drain hole (4). Step 7: Finishing Process After the workpiece (11) is processed, the PLC circuit controls the optical-water coupling device (1), air pump and flow control valve (9) to close in sequence. If there are parts that need to be processed, repeat steps one to six.

2. The water-guided laser processing method suitable for small and micro-sized components according to claim 1, characterized in that: The water inlet (8) is connected to the flow control valve (9).

3. The water-guided laser processing method suitable for small and micro-sized components according to claim 1, characterized in that: The cross-section of the micropore (10) is a 30° cone, and the cross-sectional size away from the optical-water coupling device (1) is larger than the cross-sectional size close to the optical-water coupling device (1).

4. The water-guided laser processing method suitable for small and micro-sized components according to claim 1, characterized in that: In step four, the laser (6) emitted by the optical-water coupling device (1) passes through the micro-hole (10) to process the workpiece (11), and the outside of the laser (6) is covered with a water column sprayed from the micro-hole (10).

5. The water-guided laser processing method suitable for small and micro-sized components according to claim 1, characterized in that: The optical-water coupling device (1) and the protective head (2) are fastened by threaded connection, pin connection and snap-fit ​​connection.

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