A control circuit for a bias power supply current monitoring system

Abstract

The present invention proposes a control circuit of a bias power supply current monitoring system, comprising an input power supply module, a PWM control module, a variable frequency output module, and a feedback loop module. The input power supply module is used to receive and process external power supply, the input end of the input power supply module is connected to the power output terminal, the output end of the input power supply module is connected to the input end of the PWM control module, the PWM control module uses a PWM signal to control the stability of the output voltage, the output end of the PWM control module is connected to the input end of the variable frequency output module, and the output end of the variable frequency output module is connected to the input end of the feedback loop module.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum ion plating, and more specifically to a control circuit of a bias power supply current monitoring system. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a high vacuum degree. There are many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide it into two types: evaporation and sputtering. The substrate to be coated is called the substrate, and the material to be coated is called the target. The substrate and the target are in the same vacuum chamber.

[0003] Evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions. They settle on the surface of the substrate and form a thin film through the film-forming process (scattered points - island structure - vagal structure - layered growth). For sputtering coating, it can be simply understood as bombarding the target material with electrons or high-energy lasers, and sputtering the surface components in the form of atomic groups or ions, and finally depositing on the surface of the substrate, undergoing the film-forming process, and finally forming a thin film.

[0004] Bias power supply is an important component in vacuum arc ion plating and other vacuum physical vapor deposition equipment, providing negative (or positive) bias voltage for the workpiece during the coating process.

[0005] Traditional bias power supplies are difficult to guarantee stable output and are easily damaged when facing power grid fluctuations, overloads, etc. The existing bias power supply current monitoring system only has monitoring equipment, but will not take action after detecting an abnormality, and cannot stop the operation of the program in time.

[0006] Therefore, the present invention provides a control circuit for a bias power supply current monitoring system. Summary of the invention

[0007] In view of this, in order to solve the above problems, the present invention proposes a control circuit of a bias power supply current monitoring system, which can promptly alarm after monitoring power supply current abnormality through signal control, feedback loop adjustment, and temperature protection functions.

[0008] A bias power supply current monitoring system includes an input power supply module, a PWM control module, a variable frequency output module, and a feedback loop module, wherein the input power supply module is used to receive and process external power supply, the input end of the input power supply module is connected to the power output terminal, the output end of the input power supply module is connected to the input end of the PWM control module, the PWM control module uses a PWM signal to control the stability of the output voltage, the output end of the PWM control module is connected to the input end of the variable frequency output module, and the output end of the variable frequency output module is connected to the input end of the feedback loop module.

[0009] Furthermore, the input power module includes a communication module and a protection module, the output end of the protection module is connected to the input end of the communication module, the protection module includes an overcurrent protection module and a temperature protection module, the overcurrent protection module uses a current sensor and a current protector to monitor the output current, and cuts off the power supply when the current exceeds the setting, and the temperature protection module uses a temperature sensor to monitor the circuit temperature to prevent overheating damage.

[0010] Furthermore, the PWM control module includes a PWM signal generation and regulation circuit, and the regulation circuit adjusts the voltage by adjusting the frequency. The higher the frequency, the more stable the output voltage.

[0011] Furthermore, the feedback loop module is used to detect faults in the circuit and provide feedback, thereby providing corresponding alarms or protection measures to achieve closed-loop control of the output voltage.

[0012] A control circuit for a bias power supply current monitoring system, the control circuit comprising a PWM signal generation, a bias switching circuit, an alarm output circuit, and a feedback circuit. The PWM signal generation selects and switches a working circuit to be connected to the input end of the alarm output circuit through the bias switching circuit. The alarm output circuit is used to monitor circuit abnormalities and output them. The feedback circuit is connected to the output end of the alarm output circuit and is used to feedback whether the alarm output circuit outputs normally.

[0013] Furthermore, the PWM signal generation includes a power supply, a temperature protector, a contactor assembly, and a communication interface. The temperature protector is arranged between the power supply and the contactor assembly, the output end of the contactor assembly is connected to the input end of the communication interface, and the output end of the communication interface is connected to the input end of the bias switching circuit. When the temperature protector is working normally, the contacts are in a closed state. When the temperature reaches the action temperature, the contacts are opened to cut off the circuit to play a temperature control role. When the appliance cools to the reset temperature, the contacts automatically close and resume normal working state.

[0014] Furthermore, the contactor assembly includes two groups of contactor switches, one group of contactor switches is in a normally open state, and the other group of contactor switches is in a normally closed state. The double contactor switches are provided to prevent the normally closed contactor switches from opening when there is an erroneous operation, thereby ensuring safety.

[0015] Furthermore, the alarm output circuit uses the power supply through the output control of Q0.6 of the module RMIO.

[0016] Furthermore, the feedback circuit confirms that the alarm output circuit is connected to the power supply through I1.4 of the module RMIO.

[0017] Furthermore, the alarm output circuit is connected in parallel with a feedback circuit, the alarm output circuit is provided with an alarm switch and a feedback device, the feedback circuit is provided with a feedback switch, and the feedback device is electrically connected to the feedback switch.

[0018] Beneficial effects of the present invention: The present invention proposes a control circuit of a bias power supply current monitoring system, comprising an input power supply module, a PWM control module, a frequency conversion output module, and a feedback loop module, characterized in that: the input power supply module is used to receive and process external power supply, the input end of the input power supply module is connected to the power output terminal, the output end of the input power supply module is connected to the input end of the PWM control module, the PWM control module uses a PWM signal to control the stability of the output voltage, the output end of the PWM control module is connected to the input end of the frequency conversion output module, and the output end of the frequency conversion output module is connected to the input end of the feedback loop module, which can effectively improve the stability and reliability of the power supply, prevent circuit overload and overheating, and extend the service life of the power supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a module diagram of the bias power supply current monitoring system of the present invention.

[0020] Figure 2 It is a control circuit diagram of the bias power supply current monitoring system of the present invention.

[0021] Figure 3 It is a control circuit diagram of the bias power supply current monitoring system of the present invention.

[0022] Figure 4 It is a control circuit diagram of the bias power supply current monitoring system of the present invention. DETAILED DESCRIPTION

[0023] The following examples are described to assist the understanding of the present application, and the examples are not and should not be interpreted in any way as limiting the scope of protection of the present application.

[0024] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as separate functional units (which may include sub-units), but those skilled in the art will recognize that various components or portions thereof may be divided into separate components or may be integrated together (including within a single system or component).

[0025] At the same time, the connections between components or systems are not intended to be limited to direct connections, rather, the data between these components may be modified, reformatted, or otherwise changed by intermediate components. In addition, additional or fewer connections may be used. It should also be noted that the terms "coupled," "connected," or "input" should be understood to include direct connections, indirect connections through one or more intermediate devices, and wireless connections.

[0026] Embodiment 1:

[0027] like Figure 1 As shown, it is a module diagram of the bias power supply current monitoring system of the present invention; Figure 2 As shown in FIG. 1 , it is a control circuit diagram of the bias power supply current monitoring system of the present invention; Figure 3 As shown in FIG. 1 , it is a control circuit diagram of the bias power supply current monitoring system of the present invention; Figure 4 FIG. 1 is a control circuit diagram of the bias power supply current monitoring system of the present invention.

[0028] A bias power supply current monitoring system includes an input power supply module, a PWM control module, a variable frequency output module, and a feedback loop module, wherein the input power supply module is used to receive and process external power supply, the input end of the input power supply module is connected to the power output terminal, the output end of the input power supply module is connected to the input end of the PWM control module, the PWM control module uses a PWM signal to control the stability of the output voltage, the output end of the PWM control module is connected to the input end of the variable frequency output module, and the output end of the variable frequency output module is connected to the input end of the feedback loop module.

[0029] The input power module includes a communication module and a protection module. The output end of the protection module is connected to the input end of the communication module. The protection module includes an overcurrent protection module and a temperature protection module. The overcurrent protection module uses a current sensor and a current protector to monitor the output current and cuts off the power supply when the current exceeds the setting. The temperature protection module uses a temperature sensor to monitor the circuit temperature to prevent overheating damage.

[0030] The PWM control module includes a PWM signal generation and regulation circuit. The regulation circuit adjusts the voltage by adjusting the frequency. The higher the frequency, the more stable the output voltage.

[0031] The feedback loop module is used to detect faults in the circuit and provide feedback, thereby providing corresponding alarms or protection measures to achieve closed-loop control of the output voltage.

[0032] A control circuit for a bias power supply current monitoring system, the control circuit comprising a PWM signal generation, a bias switching circuit, an alarm output circuit, and a feedback circuit. The PWM signal generation selects and switches a working circuit to be connected to the input end of the alarm output circuit through the bias switching circuit. The alarm output circuit is used to monitor circuit abnormalities and output them. The feedback circuit is connected to the output end of the alarm output circuit and is used to feedback whether the alarm output circuit outputs normally.

[0033] The PWM signal generation includes a power supply, a temperature protector, a contactor assembly, and a communication interface. The temperature protector is arranged between the power supply and the contactor assembly. The output end of the contactor assembly is connected to the input end of the communication interface. The output end of the communication interface is connected to the input end of the bias switching circuit. When the temperature protector is working normally, the contacts are in a closed state. When the temperature reaches the action temperature, the contacts are opened to cut off the circuit to play a temperature control role. When the appliance cools to the reset temperature, the contacts are automatically closed to restore the normal working state.

[0034] The contactor assembly includes two groups of contactor switches, one group of which is in a normally open state, and the other group of which is in a normally closed state. The double contactor switches are provided to prevent the normally closed contactor switches from opening when there is an erroneous operation, thereby ensuring safety.

[0035] The alarm output circuit uses the power supply through the output control of Q0.6 of the module RMIO, and the feedback circuit confirms that the alarm output circuit is connected to the power supply through I1.4 of the module RMIO.

[0036] The alarm output circuit is connected in parallel with the feedback circuit. The alarm output circuit is provided with an alarm switch and a feedback device. The feedback circuit is provided with a feedback switch. The feedback device is electrically connected with the feedback switch.

[0037] Beneficial effects of the present invention: The present invention proposes a control circuit of a bias power supply current monitoring system, comprising an input power supply module, a PWM control module, a frequency conversion output module, and a feedback loop module, wherein the input power supply module is used to receive and process external power supply, the input end of the input power supply module is connected to the power output terminal, the output end of the input power supply module is connected to the input end of the PWM control module, the PWM control module uses a PWM signal to control the stability of the output voltage, the output end of the PWM control module is connected to the input end of the frequency conversion output module, and the output end of the frequency conversion output module is connected to the input end of the feedback loop module, which can effectively improve the stability and reliability of the power supply, prevent circuit overload and overheating, and extend the service life of the power supply.

[0038] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A control circuit of a bias power supply current monitoring system, the monitoring system comprising an input power supply module, a PWM control module, a variable frequency output module, and a feedback loop module, wherein the input power supply module is used to receive and process external power supply, the input end of the input power supply module is connected to the power output terminal, the output end of the input power supply module is connected to the input end of the PWM control module, the PWM control module uses a PWM signal to control the stability of the output voltage, the output end of the PWM control module is connected to the input end of the variable frequency output module, and the output end of the variable frequency output module is connected to the input end of the feedback loop module, characterized in that: The control circuit includes PWM signal generation, bias switching circuit, alarm output circuit, and feedback circuit. The PWM signal generation selects and switches a working circuit to be connected to the input end of the alarm output circuit through the bias switching circuit. The alarm output circuit is used to monitor circuit abnormalities and output. The feedback circuit is connected to the output end of the alarm output circuit to feedback whether the alarm output circuit outputs normally. The PWM signal generation includes a power supply, a temperature protector, a contactor assembly, and a communication interface. The temperature protector is arranged between the power supply and the contactor assembly. The output end of the contactor assembly is connected to the input end of the communication interface. The output end of the communication interface is connected to the input end of the bias switching circuit. When the temperature protector is working normally, the contacts are in a closed state. When the temperature reaches the action temperature, the contacts are opened to cut off the circuit to play a temperature control role. When the electrical appliance cools to the reset temperature, the contacts are automatically closed to restore the normal working state.

2. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The input power module includes a communication module and a protection module. The output end of the protection module is connected to the input end of the communication module. The protection module includes an overcurrent protection module and a temperature protection module. The overcurrent protection module uses a current sensor and a current protector to monitor the output current and cuts off the power supply when the current exceeds the setting. The temperature protection module uses a temperature sensor to monitor the circuit temperature to prevent overheating damage.

3. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The PWM control module includes a PWM signal generation and regulation circuit. The regulation circuit adjusts the voltage by adjusting the frequency. The higher the frequency, the more stable the output voltage.

4. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The feedback loop module is used to detect faults in the circuit and provide feedback, thereby providing corresponding alarms or protection measures to achieve closed-loop control of the output voltage.

5. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The contactor assembly includes two groups of contactor switches, one group of which is in a normally open state, and the other group of which is in a normally closed state. The double contactor switches are provided to prevent the normally closed contactor switches from opening when there is an erroneous operation, thereby ensuring safety.

6. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The alarm output circuit uses the power supply through the output control of Q0.6 of the module RMIO.

7. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The feedback circuit confirms that the alarm output circuit is connected to the power supply through I1.4 of the module RMIO.

8. The control circuit of the bias power supply current monitoring system as claimed in claim 1, characterized in that: The alarm output circuit is connected in parallel with the feedback circuit. The alarm output circuit is provided with an alarm switch and a feedback device. The feedback circuit is provided with a feedback switch. The feedback device is electrically connected with the feedback switch.

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