An inertial sensor probe device and a multi-degree-of-freedom detection method

Abstract

The present application belongs to the field of capacitive displacement sensing test, and specifically discloses an inertial sensor probe device and a multi-degree-of-freedom detection method, including a test mass, a capacitor plate and a plate frame, and also includes a signal injection and detection circuit connected to the capacitor plate; the test mass is located in the plate frame, and the capacitor plate is arranged on the surface of the plate frame; the capacitor plate includes multiple groups of capacitor plate pairs, and the multiple groups of capacitor plate pairs are arranged along the x-axis, y-axis and z-axis respectively; the capacitor plate pair is used to detect the displacement transformation of the test mass along any translational degree of freedom of the x-axis, y-axis or z-axis, so as to realize signal sensing, signal feedback and signal injection; the signal injection and detection circuit is used to inject carrier voltage signals of different frequencies into the capacitor plate pair, and obtain the signal generated by the relative displacement between the test mass and the capacitor plate pair. Through the present application, the plate structure can be simplified, the plate symmetry can be improved, and the detection error can be reduced.

Description

Technical Field

[0001] The present application belongs to the field of capacitive displacement sensing testing, and more specifically, relates to an inertial sensor probe device and a multi-degree-of-freedom detection method. Background Art

[0002] The Tianqin Project is a space gravitational wave detection project independently proposed by my country. The space inertial sensor based on capacitive displacement sensing and electrostatic feedback control technology is one of the core payloads of space gravitational wave detection spacecraft. It has the advantages of high precision, symmetrical structure, and simultaneous measurement of six degrees of freedom. The inertial sensor is mainly composed of a mechanical sensitive probe, a capacitive displacement sensing circuit, and an electrostatic feedback control circuit. Among them, the mechanical sensitive probe is mainly composed of a test mass, a plate frame, and a plate. The displacement signal of the test mass can be converted into a voltage signal with the help of a capacitive displacement sensing circuit, and then the motion of the test mass can be controlled through an electrostatic feedback control system. In satellite on-orbit experiments, inertial sensors are mainly used to measure the non-conservative acceleration of the test mass, control its movement along the geodesic, and provide inertial reference for on-orbit experiments. Therefore, there should be no mechanical connection between the test mass and the surrounding plates to minimize the disturbance acting on the test mass. Usually, when designing the layout of the sensor probe plate, the sensitivity and stiffness along the sensitive axis are maximized at the expense of other non-sensitive axes.

[0003] The mechanical sensitive probe in the inertial sensor in the Tianqin Project uses a test mass of regular hexahedral design, and a plate layout scheme of three-axis sensor feedback control plates and two non-sensitive axis injection plates. There are 18 flat electrodes in total, including 12 sensor feedback control plates and 6 injection plates, which are installed on the electrode frame around the six sides of the test mass, forming multiple pairs of flat capacitors with the surface of the test mass. These plates can be divided into sensor feedback control plates for capacitive sensing and electrostatic control and injection plates for carrier injection according to their functions. The main function of the capacitive displacement sensing unit in the inertial sensor is to realize the six-degree-of-freedom motion detection of the test mass, and obtain the displacement information of the test mass and transmit it to the control system.

[0004] However, the current inertial sensor plate layout is relatively complex, and the uneven distribution of the injection plates on each axis results in poor overall symmetry of the plates. In addition, when injecting carrier voltage signals through the injection plates, due to the large number of plates, most of the plate area is required to complete the sensing function, and the area allocated to the injection plates is small, resulting in poor carrier injection efficiency for each degree of freedom, which in turn leads to increased signal transmission noise and poor detection resolution of the inertial sensor. Summary of the invention

[0005] In view of the defects of the prior art, the purpose of the present application is to provide an inertial sensor probe device and a multi-degree-of-freedom detection method, aiming to solve the problems of poor detection resolution of the inertial sensor caused by the complex layout of the current electrode plates, poor overall symmetry of the electrode plates, and poor carrier injection efficiency injected into the electrode plates.

[0006] To achieve the above-mentioned purpose, the present application provides an inertial sensor probe device, comprising a test mass, a capacitor plate and a plate frame, and also comprising a signal injection and detection circuit connected to the capacitor plate; the test mass is located in the plate frame, and the capacitor plate is arranged on the surface of the plate frame;

[0007] The capacitor plates include a plurality of capacitor plate pairs, and the plurality of capacitor plate pairs are arranged along the x-axis, the y-axis and the z-axis respectively;

[0008] The pair of capacitor plates is used to detect the displacement transformation of the inspection mass along any translational degree of freedom of the x-axis, y-axis or z-axis to achieve signal sensing, signal feedback and signal injection;

[0009] The signal injection and detection circuit is used to inject carrier voltage signals of different frequencies into the capacitor plate pair to obtain a signal generated by the relative displacement between the inspection mass and the capacitor plate pair.

[0010] The signal injection and detection circuit replaces the role of the injection plate in the prior art, so that carrier signals of different frequencies can be injected into the capacitor plates. By omitting the structural setting of the injection plate, the problem of poor carrier injection efficiency in each degree of freedom due to the large number of plates and the need to occupy most of the plate area to complete the sensing function when injecting the carrier voltage signal is solved, thereby improving the detection resolution of the sensor.

[0011] In some embodiments, each group of the capacitor plate pairs includes two pairs of sub-plate pairs, and the two pairs of sub-plate pairs are respectively arranged along the x-axis, the y-axis or the z-axis;

[0012] A sub-plate arranged along the x-axis, for detecting a displacement signal of the proof mass along the x-axis translational degree of freedom;

[0013] A sub-plate arranged along the y-axis, for detecting a displacement signal of the proof mass along the y-axis translational degree of freedom;

[0014] The sub-plate arranged along the z-axis is used to detect the displacement signal generated by the translational freedom of the inspection mass along the z-axis.

[0015] In some embodiments, the carrier voltage signal includes a first carrier voltage signal, a second carrier voltage signal, and a third carrier voltage signal of three different frequencies, and the first carrier voltage signal, the second carrier voltage signal, and the third carrier voltage signal are carrier voltage signals corresponding to sub-plates arranged along the x-axis, y-axis, and z-axis, respectively.

[0016] In some embodiments, the signal injection and detection circuit includes a main winding coil, an RC filter, a bandpass filter, a multiplier, and an analog-to-digital converter connected in sequence;

[0017] The main winding coil is used to convert the differential capacitance signal into a detectable voltage signal;

[0018] The RC filter is used to input carrier voltage signals of channels of other degrees of freedom other than the current degree of freedom;

[0019] The bandpass filter is used to filter and remove the carrier voltage signals of the channels of other degrees of freedom except the current degree of freedom, and output the target voltage signal required by the current degree of freedom;

[0020] The multiplier is used to multiply the target voltage signal with the demodulated wave signal to demodulate and obtain a low-frequency analog signal;

[0021] The analog-to-digital converter is used to convert the low-frequency analog signal into a digital signal.

[0022] In some embodiments, the multiplier is a phase-sensitive detection multiplier;

[0023] The phase-sensitive detection multiplier is used to use a signal with the same frequency as the carrier voltage signal of the current degree of freedom as a demodulated wave signal, multiply the demodulated wave signal with a target voltage signal, and extract a low-frequency differential capacitance signal to output a low-frequency analog signal.

[0024] In some embodiments, the bandpass filter is a high-Q bandpass filter;

[0025] The high Q value bandpass filter is used to perform frequency selection based on the target voltage signal and the carrier voltage signal, and modulate and demodulate the center frequency to the frequency of the carrier voltage signal corresponding to the current degree of freedom, so as to filter and eliminate the carrier voltage signals of other degree of freedom channels except the current degree of freedom.

[0026] In a second aspect, the present application further provides a multi-degree-of-freedom detection method implemented by the inertial sensor probe device described in any one of the above items, comprising:

[0027] When the proof mass is displaced along any degree of freedom, causing a capacitance change, the differential capacitance signal is converted into a detectable voltage signal;

[0028] Receive carrier voltage signals of other degree of freedom channels other than the current degree of freedom;

[0029] Filtering and removing the carrier voltage signals of the channels of other degrees of freedom except the current degree of freedom to obtain the target voltage signal required by the current degree of freedom;

[0030] Multiplying the target voltage signal with the demodulated wave signal, and demodulating to obtain a low-frequency analog signal;

[0031] The low-frequency analog signal is converted into a digital signal, and a degree of freedom detection result is determined based on the digital signal.

[0032] In some embodiments, determining the degree of freedom detection result based on the digital signal includes:

[0033] The digital signal is input into a signal analysis system, a power spectrum is generated based on the digital signal, and analysis is performed based on the power spectrum to obtain the degree of freedom detection result.

[0034] In a third aspect, the present application provides an electronic device comprising: at least one memory for storing programs; and at least one processor for executing the programs stored in the memory. When the program stored in the memory is executed, the processor is used to execute the method described in the first aspect or any possible implementation of the first aspect.

[0035] In a fourth aspect, the present application provides a computer-readable storage medium, which stores a computer program. When the computer program runs on a processor, the processor executes the method described in the first aspect or any possible implementation of the first aspect.

[0036] In a fifth aspect, the present application provides a computer program product. When the computer program product runs on a processor, the processor executes the method described in the first aspect or any possible implementation of the first aspect.

[0037] It can be understood that the beneficial effects of the second to fifth aspects mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here.

[0038] In general, the above technical solutions conceived by this application have the following beneficial effects compared with the prior art:

[0039] (1) By arranging multiple groups of capacitor plate pairs in the x-axis, y-axis and z-axis directions respectively, the plate design in each axial direction is simplified and the complexity of the plate layout is reduced. By using symmetrically arranged capacitor plate pairs in each axial direction, the capacitor plate pairs in each axis are exactly the same in geometric structure, ensuring the symmetry of the overall structure and allowing the capacitance on each pair of capacitor plates to be evenly distributed.

[0040] (2) Two pairs of capacitor plates are arranged in each axial direction, that is, two sets of capacitor plates are arranged in the x-axis, y-axis and z-axis directions respectively. This layout requires only 12 plates for the entire probe device, giving the overall design a better symmetry advantage, and thus enabling displacement signals to be detected by at least two pairs of capacitor plates in each axial direction, thereby fully covering the translational degrees of freedom of the inspection mass.

[0041] (3) The signal injection and detection circuit replaces the role of the injection plate in the prior art, so that carrier signals of different frequencies can be injected into the capacitor plates. By omitting the structural setting of the injection plate, the problem of poor carrier injection efficiency in each degree of freedom due to the large number of plates and the need to occupy most of the plate area to complete the sensing function when injecting the carrier voltage signal is solved, thereby improving the detection resolution of the sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is one of the structural schematic diagrams of the inertial sensor probe device provided in the embodiment of the present application;

[0043] Figure 2 This is the second structural schematic diagram of the inertial sensor probe device provided in the embodiment of the present application;

[0044] Figure 3 It is a flowchart of a multi-degree-of-freedom detection method provided in an embodiment of the present application;

[0045] Figure 4 It is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application.

[0046] Figure numerals: 1 is the inspection mass; 2 is the capacitor plate, there are 12 plates in total, namely 2-1 to 2-12; 3 is the optical measurement interface; 4 is the locking and release interface; 5 is the signal injection and detection circuit, 5-1 is the first signal injection and detection unit along the y-axis degree of freedom, 5-2 is the second signal injection and detection unit along the x-axis degree of freedom, 5-3 is the third signal injection and detection unit along the z-axis degree of freedom, 5-4 to 5-6 are three carrier voltage signals of different frequencies. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0048] The term "and / or" in this article is a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. The symbol " / " in this article indicates that the associated objects are in an or relationship, for example, A / B means A or B.

[0049] The terms "first" and "second" in the specification and claims herein are used to distinguish different objects rather than to describe a specific order of the objects. For example, a first response message and a second response message are used to distinguish different response messages rather than to describe a specific order of the response messages.

[0050] In the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0051] In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more than two. For example, multiple processing units refer to two or more processing units, etc.; multiple elements refer to two or more elements, etc.

[0052] Next, the technical solutions provided in the embodiments of the present application are introduced.

[0053] Reference Figure 1 , Figure 1 In the figure, the x-axis, y-axis and z-axis are represented by red, blue and green respectively. The present application provides an inertial sensor probe device, including a test mass 1, a capacitor plate 2 and a plate frame, and also includes a signal injection and detection circuit 5 connected to the capacitor plate 2, the signal injection and detection circuit 5 includes a first signal injection and detection unit 5-1, a second signal injection and detection unit 5-2 and a third signal injection and detection unit 5-3 corresponding to the y-axis, x-axis and z-axis; an optical measurement interface 3 and a locking and release interface 4 (not shown in the figure) are provided on the capacitor plate. Among them, the optical measurement interface is used to measure the sensor by optical methods, which can achieve high-precision measurement and monitoring. The locking and release interface is used to fix the position of the sensor to prevent displacement or shaking during use, thereby ensuring the accuracy and stability of the measurement.

[0054] The inspection mass 1 is located in the plate frame, and the capacitor plate is arranged on the surface of the plate frame;

[0055] The capacitor plates include a plurality of capacitor plate pairs, and the plurality of capacitor plate pairs are arranged along the x-axis, the y-axis and the z-axis respectively;

[0056] The pair of capacitor plates is used to detect the displacement transformation of the inspection mass along any translational degree of freedom of the x-axis, y-axis or z-axis to achieve signal sensing, signal feedback and signal injection;

[0057] The signal injection and detection circuit is used to inject carrier voltage signals of different frequencies into the capacitor plate pair to obtain a signal generated by the relative displacement between the inspection mass and the capacitor plate pair.

[0058] Specifically, in this embodiment, the capacitor plate pairs are arranged along the x-axis, y-axis and z-axis, which means that there is at least one pair of capacitor plates in each axial direction for detecting displacement in the corresponding axial direction.

[0059] X-axis capacitor plate pair: detects the displacement of the test mass on the x-axis.

[0060] Y-axis capacitor plate pair: detects the displacement of the test mass on the y-axis.

[0061] Z-axis capacitor plate pair: detects the displacement of the test mass on the z-axis.

[0062] When the test mass moves along a certain axis, the spacing between the corresponding capacitor plate pairs will change, which causes the capacitance value to change. For example, if the test mass moves along the positive x-axis, the capacitance value of the capacitor plate pair close to the positive displacement may increase, while the capacitance value of the other pair of capacitor plates may decrease. By detecting these changes in capacitance values, the specific displacement of the test mass can be inferred.

[0063] The displacement of the test mass causes the spacing between the capacitor plates on the corresponding axis to change, causing the capacitance value to change. The signal injection and detection circuit obtains the change in capacitance value by injecting a carrier voltage signal. These changes in capacitance value are detected by the signal injection and detection circuit and converted into electrical signals. The electrical signals are processed by the signal injection and detection circuit and converted into digital signals, indicating the specific displacement of the test mass.

[0064] Further, refer to Figure 2 , each group of the capacitor plate pairs includes two pairs of sub-plate pairs, and the two pairs of sub-plate pairs are respectively arranged along the x-axis, the y-axis or the z-axis;

[0065] A sub-plate arranged along the x-axis, for detecting a displacement signal of the proof mass along the x-axis translational degree of freedom;

[0066] A sub-plate arranged along the y-axis, for detecting a displacement signal of the proof mass along the y-axis translational degree of freedom;

[0067] The sub-plate arranged along the z-axis is used to detect the displacement signal generated by the translational freedom of the inspection mass along the z-axis.

[0068] The figure shows a three-dimensional design diagram of the inspection mass using a mechanical sensitive probe and a layout of 12 plates, as well as a signal injection and detection unit for three translational degrees of freedom, xyz. While retaining the design dimensions of the inspection mass, optical measurement interface, locking and release interface, and charge management interface, the design feature of this embodiment after the plate layout is optimized is that no additional decomposition area on any axis is considered as an injection plate area, and two pairs of flat plate capacitors are distributed perpendicular to each other along each axial plane, and each pair of plates is used for the three functions of sensing, feedback, and injection at the same time. In short, the probe has only 12 plates, which gives the overall design a better symmetry advantage.

[0069] In some embodiments, the carrier voltage signal includes a first carrier voltage signal, a second carrier voltage signal, and a third carrier voltage signal of three different frequencies, and the first carrier voltage signal, the second carrier voltage signal, and the third carrier voltage signal are carrier voltage signals corresponding to sub-plates arranged along the x-axis, y-axis, and z-axis, respectively.

[0070] Specifically, when multi-DOF capacitive displacement sensing is performed, a carrier frequency division method is used, that is, the carriers used to modulate the capacitance difference signals detected on the three translational degrees of freedom yxz are three high-frequency carrier voltage signals of different frequencies, namely 5-4, 5-5 and 5-6. The carrier voltage signals required for modulation of the other two degrees of freedom are injected by adding an RC filter to the ground line of the main winding of the differential transformer bridge circuit of each degree of freedom capacitive displacement sensing channel, as shown in the figure, in the main winding L in the second signal injection and detection unit 5-2 on the x-axis. r1 , L r2 An RC filter (composed of capacitor Ca3 and resistor) is added symmetrically to the ground line to inject the carrier voltage signals 5-4 and 5-6 of the yz degree of freedom. Finally, the three injected voltage signals of different frequencies are coupled to the test mass from the plates in three directions, that is, the surface potential of the test mass is composed of the superposition of three signals of different frequencies.

[0071] Further, the signal injection and detection circuit includes a main winding coil, an RC filter, a bandpass filter, a multiplier and an analog-to-digital converter connected in sequence;

[0072] The main winding coil is used to convert the differential capacitance signal into a detectable voltage signal;

[0073] The RC filter is used to input carrier voltage signals of channels of other degrees of freedom other than the current degree of freedom;

[0074] The bandpass filter is used to filter and remove the carrier voltage signals of the channels of other degrees of freedom except the current degree of freedom, and output the target voltage signal required by the current degree of freedom;

[0075] The multiplier is used to multiply the target voltage signal with the demodulated wave signal to demodulate and obtain a low-frequency analog signal;

[0076] The analog-to-digital converter is used to convert the low-frequency analog signal into a digital signal.

[0077] Optionally, the multiplier is a phase-sensitive detection multiplier;

[0078] The phase-sensitive detection multiplier is used to use a signal with the same frequency as the carrier voltage signal of the current degree of freedom as a demodulated wave signal, multiply the demodulated wave signal with a target voltage signal, and extract a low-frequency differential capacitance signal to output a low-frequency analog signal.

[0079] Optionally, the bandpass filter is a high-Q value bandpass filter;

[0080] The high Q value bandpass filter is used to perform frequency selection based on the target voltage signal and the carrier voltage signal, and modulate and demodulate the center frequency to the frequency of the carrier voltage signal corresponding to the current degree of freedom, so as to filter and eliminate the carrier voltage signals of other degree of freedom channels except the current degree of freedom.

[0081] Furthermore, this embodiment takes the displacement signal of the inspection mass 1 along the x translational freedom degree as an example, and needs to be combined with the second signal injection and detection unit 5-2, and the pair of parallel plates of the inspection mass 1 and the x-axis are a pair of differential capacitors formed by 2-1 and 2-4 in the figure, and at this time, the pair of plates plays a sensing detection role. At the same time, each pair of parallel plates of the y and z axes is used to inject the carrier voltage signal 5-5 required by the x channel. Conversely, when detecting other degrees of freedom, the x-plane plate plays an injection role.

[0082] When the test mass is displaced along the x degree of freedom, the capacitance changes, and the three-frequency high-frequency carrier voltage superposition signal on the test mass modulates the low-frequency differential capacitance signal onto the differential transformer bridge. The front-end circuit (pre-amplifier) ​​converts the differential capacitance signal into a detectable voltage signal, and then passes through a specially designed stable high-Q bandpass filter with a center frequency of the carrier 5-5 used to modulate and demodulate the x degree of freedom displacement signal. The carrier frequency signals 5-4 and 5-6 required for the two other degrees of freedom are fully filtered out, which can improve the signal-to-noise ratio of the front-end circuit and reduce interference from other frequency components. The signal with the same frequency as the x degree of freedom carrier 5-5 is input into the phase-sensitive detection multiplier (lock-in) as the demodulation wave to extract the low-frequency differential capacitance signal. In this way, the movement information of the test mass relative to the electrode can be obtained through the ADC acquisition system.

[0083] Reference Figure 3 The present application also provides a multi-degree-of-freedom detection method implemented by the inertial sensor probe device described in any one of the above items, comprising:

[0084] S301. When the inspection mass is displaced along any degree of freedom and causes a capacitance change, the differential capacitance signal is converted into a detectable voltage signal;

[0085] S302. Receive carrier voltage signals of other degree of freedom channels other than the current degree of freedom;

[0086] S303. Filter and remove the carrier voltage signals of the channels of other degrees of freedom except the current degree of freedom to obtain the target voltage signal required by the current degree of freedom;

[0087] S304. Multiplying the target voltage signal by the demodulated wave signal, and demodulating to obtain a low-frequency analog signal;

[0088] S305. Convert the low-frequency analog signal into a digital signal, and determine the degree of freedom detection result based on the digital signal.

[0089] In some embodiments, determining the degree of freedom detection result based on the digital signal includes:

[0090] The digital signal is input into a signal analysis system, a power spectrum is generated based on the digital signal, and analysis is performed based on the power spectrum to obtain the degree of freedom detection result.

[0091] Reference Figure 4Based on the method in the above embodiment, the embodiment of the present application provides an electronic device, which may include: a processor (processor) 410, a communication interface (Communications Interface) 420, a memory (memory) 430 and a communication bus 440, wherein the processor 410, the communication interface 420, and the memory 430 communicate with each other through the communication bus 440. The processor 410 can call the logic instructions in the memory 430 to execute the method in the above embodiment.

[0092] In addition, the logic instructions in the above-mentioned memory 430 can be implemented in the form of software functional units and can be stored in a computer-readable storage medium when sold or used as an independent product. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application.

[0093] Based on the method in the above embodiment, an embodiment of the present application provides a computer-readable storage medium, which stores a computer program. When the computer program runs on a processor, the processor executes the method in the above embodiment.

[0094] Based on the method in the above embodiment, an embodiment of the present application provides a computer program product. When the computer program product runs on a processor, the processor executes the method in the above embodiment.

[0095] It is understandable that the processor in the embodiment of the present application can be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application specific integrated circuits (ASIC), field programmable gate arrays (FPGA) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. The general-purpose processor can be a microprocessor or any conventional processor.

[0096] The method steps in the embodiments of the present application can be implemented by hardware or by a processor executing software instructions. The software instructions can be composed of corresponding software modules, and the software modules can be stored in random access memory (RAM), flash memory, read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), registers, hard disks, mobile hard disks, CD-ROMs, or any other form of storage medium known in the art. An exemplary storage medium is coupled to a processor so that the processor can read information from the storage medium and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and the storage medium can be located in an ASIC.

[0097] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium or transmitted through the computer-readable storage medium. The computer instructions may be transmitted from a website site, a computer, a server or a data center to another website site, a computer, a server or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or a data center that includes one or more available media integrated. The available medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)), etc.

[0098] It should be understood that the various numerical numbers involved in the embodiments of the present application are only used for the convenience of description and are not used to limit the scope of the embodiments of the present application.

[0099] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. An inertial sensor probe device, comprising a proof mass, a capacitor plate and a plate frame, characterized in that: It also includes a signal injection and detection circuit connected to the capacitor plate; the inspection mass is located in the plate frame, and the capacitor plate is arranged on the surface of the plate frame; the capacitor plate includes a plurality of groups of capacitor plate pairs, and the plurality of groups of capacitor plate pairs are arranged along the x-axis, the y-axis and the z-axis respectively; The pair of capacitor plates is used to detect the displacement transformation of the inspection mass along any translational degree of freedom of the x-axis, y-axis or z-axis to achieve signal sensing, signal feedback and signal injection; The signal injection and detection circuit is used to inject carrier voltage signals of different frequencies into the capacitor plate pair to obtain a signal generated by the relative displacement between the inspection mass and the capacitor plate pair; The signal injection and detection circuit comprises a main winding coil, an RC filter, a bandpass filter, a multiplier and an analog-to-digital converter connected in sequence; The main winding coil is used to convert the differential capacitance signal into a detectable voltage signal; The RC filter is used to input carrier voltage signals of channels of other degrees of freedom other than the current degree of freedom; The bandpass filter is used to filter and remove the carrier voltage signals of the channels of other degrees of freedom except the current degree of freedom, and output the target voltage signal required by the current degree of freedom; The multiplier is used to multiply the target voltage signal with the demodulated wave signal to demodulate and obtain a low-frequency analog signal; The analog-to-digital converter is used to convert the low-frequency analog signal into a digital signal.

2. The inertial sensor probe device according to claim 1, characterized in that: Each group of the capacitor plate pairs includes two pairs of sub-plate pairs, and the two pairs of sub-plate pairs are respectively arranged along the x-axis, the y-axis or the z-axis; A sub-plate arranged along the x-axis, for detecting a displacement signal of the proof mass along the x-axis translational degree of freedom; A sub-plate arranged along the y-axis, for detecting a displacement signal of the proof mass along the y-axis translational degree of freedom; The sub-plate arranged along the z-axis is used to detect the displacement signal generated by the translational freedom of the inspection mass along the z-axis.

3. The inertial sensor probe device according to claim 1, characterized in that: The carrier voltage signal includes a first carrier voltage signal, a second carrier voltage signal and a third carrier voltage signal of three different frequencies, and the first carrier voltage signal, the second carrier voltage signal and the third carrier voltage signal are carrier voltage signals corresponding to the sub-plates arranged along the x-axis, the y-axis and the z-axis respectively.

4. The inertial sensor probe device according to claim 1, characterized in that: The multiplier is a phase-sensitive detection multiplier; The phase-sensitive detection multiplier is used to use a signal with the same frequency as the carrier voltage signal of the current degree of freedom as a demodulated wave signal, multiply the demodulated wave signal with a target voltage signal, and extract a low-frequency differential capacitance signal to output a low-frequency analog signal.

5. The inertial sensor probe device according to claim 1, characterized in that: The bandpass filter is a high-Q bandpass filter; The high Q value bandpass filter is used to perform frequency selection based on the target voltage signal and the carrier voltage signal, and modulate and demodulate the center frequency to the frequency of the carrier voltage signal corresponding to the current degree of freedom, so as to filter and eliminate the carrier voltage signals of other degree of freedom channels except the current degree of freedom.

6. A multi-degree-of-freedom detection method implemented by the inertial sensor probe device according to any one of claims 1 to 5, characterized in that: include: When the proof mass is displaced along any degree of freedom, causing a capacitance change, the differential capacitance signal is converted into a detectable voltage signal; Receive carrier voltage signals of other degree of freedom channels other than the current degree of freedom; Filtering and removing the carrier voltage signals of the channels of other degrees of freedom except the current degree of freedom to obtain the target voltage signal required by the current degree of freedom; Multiplying the target voltage signal with the demodulated wave signal, and demodulating to obtain a low-frequency analog signal; The low-frequency analog signal is converted into a digital signal, and a degree of freedom detection result is determined based on the digital signal.

7. The multi-degree-of-freedom detection method according to claim 6, characterized in that: The step of determining the degree of freedom detection result based on the digital signal comprises: The digital signal is input into a signal analysis system, a power spectrum is generated based on the digital signal, and analysis is performed based on the power spectrum to obtain the degree of freedom detection result.

8. An electronic device, characterized in that: include: at least one memory for storing a computer program; At least one processor is used to execute the program stored in the memory, and when the program stored in the memory is executed, the processor is used to execute the method according to claim 6 or 7.

9. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed on a processor, the processor is caused to execute the method according to claim 6 or 7.

Images