An evaporation coating device for AF film
By using intermittent production of multiple sets of AF liquid evaporation mechanisms and extrusion mechanisms in the evaporation coating device of AF film, combined with the dropping components of graphite tubes and insulating rings, the problems of manual addition are solved, and the problem of time-consuming and labor-intensive and medicinal materials are retained, and the problem of artificial addition is realized. Accurate quantitative addition and low-cost production improve production efficiency and maintain a vacuum environment.
Patent Information
- Application Number
- CN202411251850.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-09
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2044-09-09
AI Technical Summary
In the evaporation coating process of AF film, manual addition of medicinal materials is time-consuming and labor-intensive, and it is difficult to control the accuracy, resulting in low production efficiency, high cost and waste of raw materials. The high viscosity of medicinal materials can easily cause residues, affecting quantitative addition.
An evaporation coating device including multiple sets of AF liquid evaporation mechanisms and corresponding extrusion mechanisms is designed. Through batch evaporation, the dropping components of graphite tubes and insulating rings are used for precise dosing, and the electrode box and conductive components are combined with the electrode box and the conductive components. Thermal effect evaporates, and the extrusion mechanism performs quantitative addition, reducing residue and maintaining a vacuum environment.
It achieves accurate dosing of drugs, saves time and effort, improves production efficiency, reduces AF liquid loss, reduces costs, and avoids damage to the vacuum environment and residues of the drug liquid.
Smart Images
Figure CN118756099B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of vacuum coating technology, and in particular to an evaporation coating device for AF film. Background Art
[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the coated object (metal, semiconductor or insulator) to form a coating.
[0003] Anti-fouling film (AF film) is a commonly used coating material and is widely used in optoelectronic components such as touch screens and lenses. Anti-fouling film requires expensive AF stock liquid medicinal materials for evaporation coating. Generally, after the AF medicinal materials are evaporated, they need to be manually added to the evaporation source. This method is not only time-consuming and labor-intensive, affecting production efficiency, but also difficult to control the dosing accuracy. In addition, the AF stock liquid medicinal materials have a large viscosity and are easy to remain at the dosing port, which not only causes a waste of raw materials, but is also not conducive to the quantitative addition of medicinal materials. Summary of the invention
[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide an evaporation coating device for AF films which improves production efficiency, accurately adds drugs quantitatively, and reduces costs.
[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:
[0006] An evaporation coating device for AF film comprises a mounting frame, wherein a plurality of groups of AF liquid evaporation mechanisms arranged at intervals are mounted on one side of the mounting frame, and a number of extrusion mechanisms matching the number of AF liquid evaporation mechanisms are mounted on the other side of the mounting frame. The mounting frame is also mounted on the side with a liquid storage device, wherein a liquid outlet end of the liquid storage device is connected to a liquid inlet end of each extrusion mechanism, and a liquid outlet end of each extrusion mechanism is connected to a corresponding AF liquid evaporation mechanism.
[0007] As a further improvement of the above technical solution:
[0008] The AF liquid evaporation mechanism is provided with a drip assembly connected to the liquid outlet end of the liquid squeezing mechanism, the drip assembly includes a graphite tube and an insulating ring, the liquid outlet end of the liquid squeezing mechanism is connected in the graphite tube, and the insulating ring is wrapped around the outer circumference of the graphite tube.
[0009] The mounting frame includes a frame body and a mounting cavity. An electrode box is disposed at the bottom of the frame body. Each of the AF liquid evaporation mechanisms is arranged in the mounting cavity and is electrically connected to the electrode box.
[0010] The installation cavity is provided with a conductive component for installing each AF liquid evaporation mechanism and connecting the electrode box with each AF liquid evaporation mechanism.
[0011] The conductive assembly includes two conductive rods and two conductive plates. The two conductive rods are provided with conductive mounting seats that match the number of AF liquid evaporation mechanisms at intervals in the height direction. Each AF liquid evaporation mechanism is installed on the corresponding two conductive mounting seats. The two conductive plates are respectively connected between the two conductive rods and the electrode box.
[0012] The electrode box is provided with electrode rods corresponding to the two conductive rods. One of the two conductive plates is connected between the lower end of a conductive rod and the corresponding electrode rod, and the other conductive plate is connected between the upper end of the other conductive rod and the corresponding electrode rod.
[0013] The AF liquid evaporation mechanism comprises an evaporation boat, and connecting plates are formed on both sides of the evaporation boat, and the connecting plates are fixedly connected to the conductive mounting seat.
[0014] The liquid dripping assembly comprises a graphite tube and an insulating ring. The liquid outlet end of the liquid squeezing mechanism is connected inside the graphite tube, and the insulating ring is wrapped around the outer periphery of the graphite tube.
[0015] The liquid squeezing mechanism includes a mounting seat, an injection pump and two solenoid valves. The mounting seat is fixedly mounted on the back side of the mounting cavity. The injection pump and the two solenoid valves are fixedly mounted on the mounting seat. The liquid inlet end of one of the two solenoid valves is connected to the liquid outlet end of the liquid storage device, and its liquid outlet end is connected to the liquid inlet end of the injection pump. The liquid inlet end of the other solenoid valve is connected to the liquid outlet end of the injection pump, and its liquid outlet end is connected to the graphite tube.
[0016] The liquid storage device comprises a supporting frame and a liquid medicine bottle. The supporting frame is fixedly mounted on the back side of the installation cavity. The liquid medicine bottle is arranged in the supporting frame and is respectively connected to the liquid inlet end of the corresponding solenoid valve.
[0017] A baffle is arranged in the installation cavity.
[0018] A plurality of mounting platforms for mounting baffles are arranged on the cavity wall in the mounting cavity, and the baffles are detachably connected to the mounting platforms.
[0019] Compared with the prior art, the advantages of the present invention are:
[0020] The evaporation coating device for AF film of the present invention performs intermittent evaporation production by arranging multiple groups of AF liquid evaporation mechanisms and corresponding liquid squeezing mechanisms. Compared with manual addition of medicinal materials, the quantitative addition of medicines is accurate, time-saving and labor-saving, continuous production is achieved, and production efficiency is improved. In addition, liquid squeezing and adding are performed through the liquid squeezing mechanism, which reduces the residual AF liquid at the liquid outlet, reduces the loss of AF liquid, reduces the cost, and the vacuum environment of the vacuum chamber will not be destroyed during the addition process, which avoids the AF liquid from clogging the liquid outlet of the liquid squeezing mechanism after contacting with the air. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1It is a schematic diagram (stereoscopic diagram) of the overall structure of the present invention.
[0022] Figure 2 yes Figure 1 Enlarged view of point A in the middle.
[0023] Figure 3 yes Figure 1 Enlarged view of point B in the middle.
[0024] Figure 4 It is a schematic diagram of the overall structure of the present invention (rear view).
[0025] Figure 5 It is a cross-sectional view (top view) of the present invention.
[0026] The symbols in the figure represent:
[0027] 1. Mounting frame; 11. Frame body; 12. Mounting cavity; 121. Baffle; 122. Mounting table; 2. AF liquid evaporation mechanism; 21. Evaporation boat; 211. Connecting plate; 212. Dropping assembly; 2121. Graphite tube; 2122. Insulating ring; 3. Liquid squeezing mechanism; 31. Mounting seat; 32. Injection pump; 33. Solenoid valve; 4. Liquid storage device; 41. Carrying frame; 42. Liquid bottle; 5. Electrode box; 51. Electrode rod; 6. Conductive assembly; 61. Conductive rod; 611. Conductive mounting seat; 62. Conductive plate. DETAILED DESCRIPTION
[0028] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0029] like Figures 1 to 5 As shown, the evaporation coating device for AF film of this embodiment comprises a mounting frame 1, a plurality of groups of AF liquid evaporation mechanisms 2 arranged at intervals are mounted on one side of the mounting frame 1, a number of squeezing mechanisms 3 matching the number of AF liquid evaporation mechanisms 2 are mounted on the other side of the mounting frame 1, and a liquid storage device 4 is also mounted on the mounting frame 1 on this side, the liquid outlet of the liquid storage device 4 is connected to the liquid inlet of each squeezing mechanism 3, and the liquid outlet of each squeezing mechanism 3 is connected to the corresponding AF liquid evaporation mechanism 2. When in use, the evaporation coating device is mounted in a vacuum chamber to coat the workpiece, and intermittent evaporation production is performed by setting a plurality of groups of AF liquid evaporation mechanisms 2 and corresponding squeezing mechanisms 3. Compared with manual addition of medicinal materials, the quantitative addition of medicines is accurate, time-saving and labor-saving, continuous production is realized, and production efficiency is improved. In addition, the squeezing mechanism 3 is used to add liquid, which reduces the residue of AF liquid at the liquid outlet, reduces the loss of AF liquid, and reduces costs. In addition, the vacuum environment of the vacuum chamber will not be destroyed during the addition process, and the AF liquid will not be blocked by the liquid outlet of the squeezing mechanism 3 after contacting with air.
[0030] In this embodiment, the AF liquid evaporation mechanism 2 is provided with a drip assembly 212 connected to the liquid outlet end of the liquid squeezing mechanism 3, and the drip assembly 212 includes a graphite tube 2121 and an insulating ring 2122. The liquid outlet end of the liquid squeezing mechanism 3 is connected to the inside of the graphite tube 2121, and the insulating ring 2122 is wrapped around the outer periphery of the graphite tube 2121. In this structure, the AF liquid enters the AF liquid evaporation mechanism from the liquid outlet end of the liquid squeezing mechanism 3 through the drip assembly 212. By providing the graphite tube 2121, the solid-liquid interface tension between the AF liquid and the liquid outlet end is reduced, and the AF liquid is prevented from remaining at the liquid outlet end, thereby improving the quantitative addition accuracy of the AF liquid, further reducing the loss of the AF liquid and reducing the cost. The insulating ring 2122 is provided to insulate and protect the graphite tube 2121.
[0031] In this embodiment, the mounting frame 1 includes a frame body 11 and a mounting cavity 12. An electrode box 5 is provided at the bottom of the frame body 11. Each AF liquid evaporation mechanism 2 is arranged in the mounting cavity 12 and is electrically connected to the electrode box 5. The mounting cavity 12 is provided to facilitate the accommodation and installation of each AF liquid evaporation mechanism 2.
[0032] In this embodiment, a conductive component 6 for installing each AF liquid evaporation mechanism 2 and connecting the electrode box 5 with each AF liquid evaporation mechanism 2 is provided in the installation cavity 12. In this structure, the conductive component 6 plays a role in installing each AF liquid evaporation mechanism 2 while playing a conductive role.
[0033] In this embodiment, the conductive assembly 6 includes two conductive rods 61 and two conductive plates 62. The conductive mounting seats 611 matching the number of the AF liquid evaporation mechanisms 2 are arranged at intervals in the height direction on the two conductive rods 61. Each AF liquid evaporation mechanism 2 is mounted on the corresponding two conductive mounting seats 611. The two conductive plates 62 are respectively connected between the two conductive rods 61 and the electrode box 5. In this structure, the electrode box 5 and the conductive rods 61 are connected through the conductive plates 62, and the AF liquid evaporation mechanism 2 is installed through the conductive mounting seats 611, so that the current passes through the AF evaporation mechanism 2 to generate a thermal effect, and the AF liquid in the AF evaporation mechanism 2 is heated and evaporated.
[0034] In this embodiment, the electrode box 5 is provided with electrode rods 51 corresponding to the two conductive rods 61, one of the two conductive plates 62 is connected between the lower end of one conductive rod 61 and the corresponding electrode rod 51, and the other conductive plate 62 is connected between the upper end of the other conductive rod 61 and the corresponding electrode rod 51. In this structure, one electrode rod 51 is connected to the lower end of the conductive rod 61 through the conductive plate 62, and after power is turned on, the resistance of the AF liquid evaporation mechanism 2 on the conductive rod 61 gradually increases along the current direction, while the other electrode rod 51 is connected to the upper end of the other conductive rod 61 through the conductive plate 62, and after power is turned on, the resistance of the AF liquid evaporation mechanism 2 on the conductive rod 61 gradually decreases along the current direction. This arrangement allows the resistance of each AF liquid evaporation mechanism 2 installed on the two conductive rods 61 to remain consistent, ensuring uniform evaporation coating.
[0035] In this embodiment, the AF liquid evaporation mechanism 2 includes an evaporation boat 21, and connecting plates 211 are formed on both sides of the evaporation boat 21, and the connecting plates 211 are fixedly connected to the conductive mounting seat 611. In this structure, the evaporation boat 21 is a molybdenum boat, and connecting plates 211 are set at both ends of the molybdenum boat to connect with the conductive mounting seat 611, which is easy to operate.
[0036] In this embodiment, the liquid squeezing mechanism 3 includes a mounting seat 31, an injection pump 32 and two electromagnetic valves 33. The mounting seat 31 is fixedly mounted on the back side of the mounting cavity 12. The injection pump 32 and the two electromagnetic valves 33 are fixedly mounted on the mounting seat 31. The liquid inlet end of one of the two electromagnetic valves 33 is connected to the liquid outlet end of the liquid storage device 4, and its liquid outlet end is connected to the liquid inlet end of the injection pump 32. The liquid inlet end of the other electromagnetic valve 33 is connected to the liquid outlet end of the injection pump 32, and its liquid outlet end is connected to the graphite tube 2121. In this structure, the AF liquid in the liquid storage device 4 is extracted by the injection pump 32 and pumped into the AF liquid evaporation mechanism 2. The injection pump 32 controls the extraction and pumping amount of the AF liquid, and the medicine is added by pumping to ensure the liquid addition accuracy. The electromagnetic valves 33 are set at the liquid inlet end and the liquid outlet end of the injection pump 32 to switch the extraction and pumping of the AF liquid.
[0037] In this embodiment, the liquid storage device 4 includes a support frame 41 and a liquid medicine bottle 42. The support frame 41 is fixed on the back side of the installation cavity 12. The liquid medicine bottle 42 is arranged in the support frame 41 and is respectively connected to the liquid inlet end of the corresponding solenoid valve 33. The structure is simple and easy to implement.
[0038] In this embodiment, a baffle 121 is provided in the installation cavity 12. In this structure, the baffle 121 is provided to shield the installation cavity 12 to prevent AF gaseous atoms from condensing on the installation cavity 12 during evaporation coating.
[0039] In this embodiment, a plurality of mounting platforms 122 for mounting baffles 121 are arranged on the cavity wall in the mounting cavity 12, and the baffles 121 are detachably connected to the mounting platforms 122. In this structure, the baffles 121 are detachably connected to the mounting platforms 122, which facilitates the disassembly, cleaning and replacement of the baffles 121.
[0040] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.
Claims
1. An evaporation coating device for AF film, Features: The invention comprises a mounting frame (1), wherein a plurality of groups of AF liquid evaporation mechanisms (2) arranged at intervals are mounted on one side of the mounting frame (1), and a number of squeezing mechanisms (3) matching the number of the AF liquid evaporation mechanisms (2) are mounted on the other side of the mounting frame (1). A liquid storage device (4) is also mounted on the mounting frame (1) on the side, wherein the liquid outlet of the liquid storage device (4) is connected to the liquid inlet of each squeezing mechanism (3), and the liquid outlet of each squeezing mechanism (3) is connected to the corresponding AF liquid evaporation mechanism (2). The mounting frame (1) comprises a frame body (11) and a mounting cavity (12), wherein an electrode box (5) is arranged at the bottom of the frame body (11), wherein each AF liquid evaporation mechanism (2) is arranged in the mounting cavity (12) and is electrically connected to the electrode box (5), and wherein a device for mounting each AF liquid evaporation mechanism (2) and connecting the electrode box (5) is arranged in the mounting cavity (12). A conductive component (6) connected to each AF liquid evaporation mechanism (2), the conductive component (6) comprising two conductive rods (61) and two conductive plates (62), the two conductive rods (61) being arranged at intervals in the height direction with conductive mounting seats (611) matching the number of the AF liquid evaporation mechanisms (2), each AF liquid evaporation mechanism (2) being mounted on the corresponding two conductive mounting seats (611), the two conductive plates (62) being respectively connected between the two conductive rods (61) and an electrode box (5), the electrode box (5) being provided with electrode rods (51) corresponding to the two conductive rods (61), one of the two conductive plates (62) being connected between the lower end of one conductive rod (61) and the corresponding electrode rod (51), and the other conductive plate (62) being connected between the upper end of the other conductive rod (61) and the corresponding electrode rod (51).
2. The evaporation coating device for AF film according to claim 1, Features: The AF liquid evaporation mechanism (2) is provided with a liquid dripping assembly (212) connected to the liquid outlet end of the liquid squeezing mechanism (3); the liquid dripping assembly (212) comprises a graphite tube (2121) and an insulating ring (2122); the liquid outlet end of the liquid squeezing mechanism (3) is connected inside the graphite tube (2121), and the insulating ring (2122) is wrapped around the outer circumference of the graphite tube (2121).
3. The evaporation coating device for AF film according to claim 2, Features: The AF liquid evaporation mechanism (2) comprises an evaporation boat (21), and connecting plates (211) are formed on both sides of the evaporation boat (21), and the connecting plates (211) are fixedly connected to the conductive mounting seat (611).
4. The evaporation coating device for AF film according to claim 3, Features: The liquid squeezing mechanism (3) comprises a mounting seat (31), an injection pump (32) and two solenoid valves (33); the mounting seat (31) is fixedly mounted on the back side of the mounting cavity (12); the injection pump (32) and the two solenoid valves (33) are fixedly mounted on the mounting seat (31); the liquid inlet end of one of the two solenoid valves (33) is connected to the liquid outlet end of the liquid storage device (4), and the liquid outlet end thereof is connected to the liquid inlet end of the injection pump (32); the liquid inlet end of the other solenoid valve (33) is connected to the liquid outlet end of the injection pump (32), and the liquid outlet end thereof is connected to the graphite tube (2121).
5. The evaporation coating device for AF film according to claim 4, Features: The liquid storage device (4) comprises a support frame (41) and a liquid medicine bottle (42); the support frame (41) is fixedly mounted on the back side of the mounting cavity (12); the liquid medicine bottle (42) is arranged in the support frame (41) and is respectively connected to the liquid inlet end of the corresponding solenoid valve (33).
6. The evaporation coating device for AF film according to any one of claims 1 to 5, Features: A baffle (121) is arranged in the installation cavity (12).
7. The evaporation coating device for AF film according to claim 6, Features: A plurality of mounting platforms (122) for mounting baffles (121) are arranged on the cavity wall of the mounting cavity (12), and the baffles (121) are detachably connected to the mounting platforms (122).