A hot wire probe assembly method and device

Abstract

The present invention relates to the technical field of flow velocity sensor preparation, and more particularly to a method and device for assembling a hot wire probe. When assembling the hot wire of the hot wire probe, the flat head needle is used to move the metal hot wire between the two needle tips of the probe rod to bend the top of the hot wire, and the tension of the hot wire is controlled by controlling the displacement of the flat head needle. By bringing the heated electric heating wire into contact with the metal needles at the two probe rod needle tips, the heat is conducted to the probe rod needle tips, and the low-temperature silver paste at the needle tips is solidified to realize the connection between the metal hot wire and the probe rod needle tips. During assembly, the temperature is low and the hot wire is not easily damaged, and the connection is stable, reliable, and has a low resistance. The problem of the inability to control the tension of the metal hot wire and the breakage of the hot wire during the welding process when assembling the hot wire of the hot wire probe is solved, which is of great significance to improving the assembly accuracy and reliability of the hot wire.

Description

Technical Field

[0001] The invention belongs to the technical field of flow velocity sensor preparation, and relates to a hot wire probe assembly method and device. Background Art

[0002] Hot wire probe is a commonly used flow velocity measuring instrument with the advantages of continuous measurement, high signal-to-noise ratio, low cost, wide measurement range and high sensitivity. It is widely used in wind tunnel flow field measurement, engine inlet flow field measurement and turbine flow field measurement.

[0003] A standard hot wire probe should be assembled to meet the following requirements: a firm and reliable electrical connection between the metal hot wire and the probe fork rod should be ensured, the metal hot wire should not fall off during operation and the resistance at the connection should be small; the metal hot wire should be properly tensioned. If it is too tight, it will have prestress and reduce the tensile strength. Proper bending of the windward side can increase the working life of the probe under high aerodynamic loads. However, if it is too loose, it will swing with the fluid, increasing the error source.

[0004] The Chinese invention patent “A method and device for welding hot wires of a one-dimensional probe of a hot wire anemometer” with publication number CN 116275763 A, by adjusting the positioning of the movable support, uses spot welding to weld the two ends of the hot wire to the center point of the circular plane at the front end of the probe fork rod, thereby ensuring the welding strength and improving the efficiency of one-dimensional hot wire welding. However, the hot wire needs to be in a straightened state during welding, and the tension of the hot wire cannot be adjusted. After welding, prestress is easily generated in the hot wire, which reduces its tensile strength. When welding thinner nanoscale hot wires, the spot welding process generates a lot of heat, which can easily cause the hot wire to break. In order to meet the assembly requirements of hot wires of different diameters and tensions, a high-precision assembly method and device for hot wire probes that can adjust the tension of the hot wire and ensure reliable connection is needed. Summary of the invention

[0005] The purpose of the present invention is to overcome the defects of the prior art and invent a method and device for assembling a hot wire probe. During assembly, a flat-headed needle is used to move the metal hot wire between the two needle tips of the probe rod to bend the top of the hot wire, and the tension of the hot wire is controlled by controlling the displacement of the flat-headed needle. The heat is conducted to the needle tips of the probe rods by bringing the heated electric heating wire into contact with the metal needles at the two probe rod tips, and the low-temperature silver paste at the needle tips is solidified to realize the connection between the metal hot wire and the needle tips of the probe rods. During assembly, the temperature is low and the hot wire is not easily damaged, and the connection is stable, reliable and has low resistance. The present invention solves the problems of the inability to control the tension of the metal hot wire and the breakage of the hot wire during the welding process when assembling the hot wire of the hot wire probe.

[0006] The technical solution of the present invention:

[0007] A hot wire probe assembly device comprises an electron microscope 1, a hot wire substrate 2, an XYZ-R fine-tuning platform 3, an assembly function module 4 and a hot wire probe rod 5;

[0008] The electron microscope 1 comprises a microscope lens 11, a base plate 12, a fine-adjustment focusing head 13 and a column 14; the column 14 is mounted on the base plate 12 by threads, the fine-adjustment focusing head 13 is fixed on the column 14, and the microscope lens 11 is mounted on the fine-adjustment focusing head 13; the distance between the microscope lens 11 and the substrate 21 is adjusted by adjusting the fine-adjustment focusing head 13 to perform focusing;

[0009] The hot wire substrate 2 comprises a substrate 21 and a metal hot wire 22; the substrate 21 is provided with an array of grooves 211, and the metal hot wire 22 spans the grooves 211;

[0010] The XYZ-R fine-tuning platform 3 includes a Z-axis rotation platform 31, a Y-axis displacement platform 32, a Z-axis displacement platform 33 and an X-axis displacement platform 34; the X-axis displacement platform 34 is located at the bottom layer and serves as a horizontal foundation; the Y-axis displacement platform 32 is perpendicular to the X-axis and is installed on the X-axis displacement platform 34; the Z-axis displacement platform 33 is perpendicular to the XY-axis plane and is installed on the Y-axis displacement platform 32; the Z-axis rotation platform 31 is installed at the top of the Z-axis displacement platform 33; the XYZ-R fine-tuning platform 3 is installed on the bottom plate 12 by bolts; during assembly, the hot wire substrate 2 is fixed on the table of the XYZ-R fine-tuning platform 3;

[0011] The assembly function module 4 includes a silver paste dipping and tension adjustment module 41, a support 42, a heat conduction curing silver paste module 43, a function module mounting plate 44 and a probe fixing module 45; the silver paste dipping and tension adjustment module 41, the heat conduction curing silver paste module 43 and the probe fixing module 45 are installed on the function module mounting plate 44; the function module mounting plate 44 is installed on the bottom plate 12 through two supports 42;

[0012] The hot wire probe rod 5 comprises a bent metal needle 51 and a probe fixing block 52 . A positioning plane 521 is provided on the surface of the probe fixing block 52 . The bent metal needle 51 is located at the front end of the probe fixing block 52 . During assembly, the hot wire probe rod 5 is mounted on the probe fixing module 45 .

[0013] Furthermore, the probe fixing module 45 includes a probe clamping rod fixing block 451, a limit block 452, a locking bolt 453, a probe clamping rod 454 and a probe locking bolt 455; the probe fixing module 45 has two workstations, workstation 1 is a probe insertion and removal workstation, and workstation 2 is a hot wire assembly workstation; workstation 1 is responsible for accurately positioning and fixing the unassembled hot wire probe rod 5 to the probe clamping rod 454, and during installation, the plane positioning surface 4542 contacts the positioning plane 521 of the hot wire probe rod 5, and the end face limit surface 4541 contacts the rear end face 5211 of the probe; workstation 2 is responsible for moving the hot wire probe rod 5 to the assembly position and fixing it; the probe clamping rod fixing block 451 has a fixed block rotating shaft 4511 at the lower part, and a functional module mounting plate rotating hole 441 is provided on the functional module mounting plate 44, the fixed block rotating shaft 4511 cooperates with the functional module mounting plate rotating hole 441, and the fixed block rotating shaft 4511 is in the functional module mounting plate. The mounting plate rotates in the rotating hole 441 to complete the conversion between station 1 and station 2; the probe clamping rod fixing block 451 has a station 1 limit surface 4513 and a station 2 limit surface 4512, and the limit block 452 has a limit block end surface 4521. When the probe clamping rod fixing block 451 rotates until the limit block end surface 4521 contacts the station 1 limit surface 4513, it is the station 1 position, and when the probe clamping rod fixing block 451 rotates until the limit block end surface 4521 contacts the station 2 limit surface When the limit surface 4512 is in contact, it is the position of station 2; the locking bolt 453 has an external thread, which cooperates with the internal thread on the probe clamping rod fixing block 451. When the locking bolt 453 is loosened, the fixing block rotating shaft 4511 rotates in the functional module mounting plate rotating hole 441. When the probe clamping rod fixing block 451 rotates to the limit position of station 1 or station 2, the locking bolt 453 is locked to fix the probe clamping rod 454 and the hot wire probe rod 5 at the predetermined position.

[0014] Furthermore, the silver paste dipping and tension adjustment module 41 includes a micro-displacement platform 411, a flat-head needle clamping rod fixing block 412, a flat-head needle clamping rod 413, a silver paste coating block 414, a flat-head needle 415 and a silver paste coating block positioning hole 4131; the silver paste coating block 414 is positioned and installed on the flat-head needle clamping rod 413 through the silver paste coating block positioning hole 4131, and the low-temperature curing silver paste 6 is placed on the front end inclined surface of the silver paste coating block 414, and the micro-displacement platform 411 drives the low-temperature curing silver paste 6 to move toward the hot wire probe rod 5, and the low-temperature curing Silver paste 6 is coated on the tips of the two bent metal needles 51 of the hot wire probe rod 5; after the silver paste is coated, the silver paste coating block 414 is removed from the flat head needle clamping rod 413; after adjusting the XYZ-R fine-tuning platform 3 to make the metal hot wire 22 on the hot wire base 2 contact with the trace silver paste 61 on the tips of the two bent metal needles 51, the micro-displacement platform 411 is adjusted to drive the flat head needle 415 to move toward the metal hot wire 22 between the tips of the two bent metal needles 51, and bend the metal hot wire 22, and the tension of the hot wire is controlled by controlling the displacement of the flat head needle 415.

[0015] Furthermore, the heat conduction curing silver paste module 43 includes a heating wire clamping rod fixing block 431, a heating wire clamping rod 432, a heating wire 433, a pitch adjustment bolt 434, a sliding block limit plate 435, a sliding groove 436, a spring 437, a sliding block 438 and a pitch rotation axis 439; the sliding block 438 is installed in the sliding groove 436, and when the sliding block 438 slides to the position of the sliding block limit plate 435, the heating wire 433 is located above the two bent metal needles 51 of the hot wire probe rod 5; the heating wire clamping rod fixing block 431, the heating wire 433, the pitch adjustment bolt 434, the sliding block limit plate 435, the sliding groove 436, the spring 437, the sliding block 438 and the pitch rotation axis 439; the sliding block 438 is installed in the sliding groove 436, and when the sliding block 438 slides to the position of the sliding block limit plate 435, the heating wire 433 is located above the two bent metal needles 51 of the hot wire probe rod 5; The block 431 is connected to the sliding block 438 through the pitch axis 439, and the rear end is tightened by the spring 437; the pitch adjustment bolt 434 is rotated to push the heating wire clamping rod fixing block 431 to rotate around the pitch axis 439, and the heating wire 433 is driven to descend through the heating wire clamping rod 432 to contact the two bent metal needles 51; the heating wire 433 is heated after being energized, and the heat is transferred to the needle tip through the bent metal needle 51, solidifying the trace silver paste 61 at the needle tip, and fixing the metal heating wire 22 between the needle tips of the two bent metal needles 51.

[0016] A hot-wire probe assembly method, which is implemented by the hot-wire probe assembly device, comprises the following steps:

[0017] Step 1: Hot wire probe rod installation and tip coating with silver paste:

[0018] Install the hot wire base 2 on the XYZ-R fine-tuning platform 3 and fix it, rotate the probe fixing module 45 to the station 1, install the hot wire probe rod 5 on the probe clamping rod 454 and lock it, rotate the probe fixing module 45 to the station 2 and lock it by the locking bolt 453, place the low-temperature curing silver paste 6 on the front end inclined surface of the silver paste coating block 414, adjust the micro-displacement platform 411, apply the low-temperature curing silver paste 6 on the needle tips of the two bent metal needles 51 of the hot wire probe rod 5, and remove the silver paste coating block 414.

[0019] Step 2: Pick up the hot wire and adjust the hot wire tension:

[0020] Adjust the XYZ-R fine-tuning platform 3 to make the metal hot wire 22 on the hot wire base 2 contact with the trace silver paste 61 on the needle tips of the two bent metal needles 51, adjust the micro-displacement platform 411, drive the flat-head needle 415 to move toward the metal hot wire 22 between the needle tips of the two bent metal needles 51, bend the top of the metal hot wire 22, and control the tension of the hot wire by controlling the displacement of the flat-head needle 415.

[0021] Step 3: Cure the silver paste to fix the hot wire and complete the hot wire probe assembly:

[0022] When the sliding block 438 is slid to the position of the sliding block limit plate 435, the pitch adjustment bolt 434 is rotated to push the electric heating wire clamping rod fixing block 431 to rotate around the pitch rotation axis 439, and the electric heating wire 433 is driven to descend through the electric heating wire clamping rod 432, and contacts with the two bent metal needles 51. The electric heating wire 433 generates heat after being energized, and the heat is transferred to the needle tip through the bent metal needle 51, solidifying the trace silver paste 61 at the needle tip, and fixing the metal hot wire 22 between the needle tips of the two bent metal needles 51. After the assembly is completed, the electric heating wire 433 is raised, the sliding block 438 is withdrawn, the micro-displacement platform 411 is adjusted to withdraw the flat head needle 415, the XYZ-R fine-tuning platform 3 is adjusted to move the hot wire base 2 away from the hot wire probe rod 5, the probe fixing module 45 is rotated to the station 2, and the hot wire probe with the hot wire assembled is removed.

[0023] The beneficial effects of the present invention are as follows: Compared with the prior art, the hot wire probe assembly method and device proposed in the present invention utilizes the flat head needle to move the metal hot wire between the two needle tips of the probe rod to bend the top of the hot wire when assembling the hot wire of the hot wire probe, and controls the tension of the hot wire by controlling the displacement of the flat head needle. The heating wire is brought into contact with the two bent metal needles, so that the heat is conducted to the needle tip of the probe rod, and the low-temperature silver paste at the needle tip is solidified to realize the connection between the metal hot wire and the probe rod. The temperature is low during assembly and it is not easy to damage the hot wire, and the connection is stable, reliable and has low resistance. It solves the problems of the inability to control the tension of the metal hot wire and the easy breakage of the hot wire during the welding process when assembling the hot wire of the hot wire probe, which is of great significance to improving the accuracy and reliability of hot wire assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is the overall structure diagram of the hot wire probe assembly device;

[0025] Figure 2 This is an electron microscope structure diagram;

[0026] Figure 3 This is the hot wire base structure diagram;

[0027] Figure 4 This is the structural diagram of the XYZ-R fine-tuning platform;

[0028] Figure 5 Assemble the functional module structure diagram for the hot wire;

[0029] Figure 6 This is the structural diagram of the probe fixing module station 1;

[0030] Figure 7 This is the structural diagram of the probe fixing module station 2;

[0031] Figure 8 This is a cross-sectional view of the probe fixing module in the direction of A;

[0032] Fig. 9This is a cross-sectional view of the probe fixing module taken along the direction of B;

[0033] Fig.10 This is a cross-sectional view of the probe fixing module taken along the direction of C;

[0034] Fig.11 This is a cross-sectional view of the probe fixing module in the direction of D;

[0035] Fig.12 This is the structural diagram of the silver paste dipping and tension adjustment module;

[0036] Fig.13 This is the structure diagram of the heat conduction curing silver paste module;

[0037] Fig.14 This is the E-direction view of the heat conduction curing silver paste module;

[0038] Fig.15 This is the hot wire probe rod structure diagram;

[0039] Fig.16 This is a schematic diagram of step 1 of the hot wire probe assembly method;

[0040] Fig.17 This is a schematic diagram of step 2 of the hot wire probe assembly method;

[0041] Fig.18 This is a schematic diagram of step 3 of the hot wire probe assembly method;

[0042] Fig.19 This is the effect diagram of hot wire assembly of hot wire probe;

[0043] Fig. 20 This is a picture of the assembled hot wire probe;

[0044] In the figure: 1. electron microscope; 2. hot wire substrate; 3. XYZ-R fine-tuning platform; 4. assembly function module; 5. hot wire probe rod; 6. low-temperature curing silver paste; 11. microscope lens; 12. bottom plate; 13. fine-tuning focusing head; 14. column; 21. substrate; 22. metal hot wire; 211. groove; 31. Z-axis rotation platform; 32. Y-axis displacement platform; 33. Z-axis displacement platform; 34. X-axis displacement platform; 41. silver paste dipping and tension adjustment module; 42. pillar; 43. heat conduction curing silver paste module; 44. functional module mounting plate; 45. probe fixing module; 411. micro-displacement platform; 412. flat head needle clamping rod fixing block; 413. flat head needle clamping rod; 414. silver paste coating block; 415. flat head needle; 4131. silver paste coating block positioning Hole; 431, heating wire clamping rod fixing block; 432, heating wire clamping rod; 433, heating wire; 434, pitch adjustment bolt; 435, sliding block limiter; 436, sliding groove; 437, spring; 438, sliding block; 439, pitch rotation axis; 451, probe clamping rod fixing block; 452, limit block; 453, locking bolt; 454, probe clamping rod; 455, probe locking bolt; 4541, end face limit surface; 5211, probe rear end face; 4542, plane positioning surface; 441, functional module mounting plate rotation hole; 4511, fixed block rotation axis; 4512, station 2 limit surface; 4513, station 1 limit surface; 4521, limit block end face; 51, bent metal needle; 52, probe fixing block; 521, positioning plane; 61, trace silver paste. DETAILED DESCRIPTION

[0045] The specific implementation of the present invention is described in detail below in conjunction with the technical scheme and the accompanying drawings.

[0046] like Figure 1 As shown, the hot wire probe assembly device includes an electron microscope 1, a hot wire substrate 2, an XYZ-R fine-tuning platform 3, an assembly function module 4 and a hot wire probe rod 5, the lens of the electron microscope 1 is located at the top, the XYZ-R fine-tuning platform 3 and the assembly function module 4 are installed on the bottom plate of the electron microscope 1, the hot wire substrate 2 is fixed on the table of the XYZ-R fine-tuning platform 3, and the hot wire probe rod 5 is installed on the assembly function module 4;

[0047] like Figure 2 As shown, the electron microscope 1 includes a microscope lens 11, a base plate 12, a fine-adjustment focusing head 13 and a column 14; the column 14 is installed on the base plate 12 by threads, the fine-adjustment focusing head 13 is fixed on the column 14, and the microscope lens 11 is installed on the fine-adjustment focusing head 13; the distance between the microscope lens 11 and the substrate is adjusted by adjusting the fine-adjustment focusing head 13 to perform focusing;

[0048] like Figure 3As shown, the hot wire substrate 2 includes a substrate 21 and a metal hot wire 22; the substrate 21 has an array of grooves 211, and the metal hot wire 22 spans the grooves 211;

[0049] like Figure 4 As shown, the XYZ-R fine-tuning platform 3 includes a Z-axis rotation platform 31, a Y-axis displacement platform 32, a Z-axis displacement platform 33 and an X-axis displacement platform 34; the XYZ-R fine-tuning platform 3 is mounted on the bottom plate 12 by bolts; during assembly, the hot wire base 2 is fixed on the table of the XYZ-R fine-tuning platform 3, and the metal hot wire 22 to be assembled is moved to a predetermined position by adjusting the movement and rotation of each axis;

[0050] like Figure 5 As shown, the assembly function module 4 includes a silver paste dipping and tension adjustment module 41, a support 42, a heat conduction curing silver paste module 43, a function module mounting plate 44 and a probe fixing module 45; the silver paste dipping and tension adjustment module 41, the heat conduction curing silver paste module 43 and the probe fixing module 45 are installed on the function module mounting plate 44; the function module mounting plate 44 is installed on the base plate 12 through two supports 42;

[0051] like Fig.15 As shown, the hot-wire probe rod 5 includes a bent metal needle 51 and a probe fixing block 52 , and a positioning plane 521 is provided on the surface of the probe fixing block 52 ; during assembly, the hot-wire probe rod 5 is mounted on the probe fixing module 45 .

[0052] like Figure 6 and Figure 7 As shown, the probe fixing module 45 includes a probe clamping rod fixing block 451, a limit block 452, a locking bolt 453, a probe clamping rod 454 and a probe locking bolt 455. Figure 8 , Fig. 9 , Fig.10 , Fig.11As shown, the probe fixing module 45 has two stations, station 1 is the probe insertion and removal station, and station 2 is the hot wire assembly station; station 1 is responsible for accurately positioning and fixing the unassembled probe 5 to the probe clamping rod 454. During installation, the plane positioning surface 4542 contacts the positioning plane 521 of the probe 5, and the end surface limit surface 4541 contacts the rear end surface 5211 of the probe; station 2 is responsible for moving the probe to the assembly position and fixing it; the lower part of the probe clamping rod fixing block 451 is provided with a fixing block rotating shaft 4511, and the functional module mounting plate 44 is provided with a functional module mounting plate rotating hole 441, the fixing block rotating shaft 4511 cooperates with the functional module mounting plate rotating hole 441, and the fixing block rotating shaft 4511 can rotate in the functional module mounting plate rotating hole 441 to complete the station conversion; the probe clamping rod fixing block 451 is provided with a fixing block rotating shaft 4511 There is a limit surface 4513 for station 1 and a limit surface 4512 for station 2, and a limit block end surface 4521 on the limit block 452. When the probe clamping rod fixing block 451 rotates until the limit block end surface 4521 contacts with the limit surface 4513 for station 1, it is in the position of station 1; when the probe clamping rod fixing block 451 rotates until the limit block end surface 4521 contacts with the limit surface 4512 for station 2, it is in the position of station 2; there is an external thread on the locking bolt 453, which cooperates with the internal thread on the probe clamping rod fixing block 451. When the locking bolt 453 is loosened, the fixing block rotating shaft 4511 can rotate in the rotating hole 441 of the functional module mounting plate. When the probe clamping rod fixing block 451 rotates to the limit position of station 1 or station 2, the locking bolt 453 is locked to fix the probe clamping rod 454 and the hot wire probe rod 5 at the predetermined station.

[0053] like Fig.12 As shown, the silver paste dipping and tension adjustment module 41 includes a micro-displacement platform 411, a flat-head needle clamping rod fixing block 412, a flat-head needle clamping rod 413, a silver paste coating block 414, a flat-head needle 415 and a silver paste coating block positioning hole 4131; the silver paste coating block 414 is positioned and installed on the flat-head needle clamping rod 413 through the silver paste coating block positioning hole 4131, and the low-temperature curing silver paste 6 is placed on the front end inclined surface of the silver paste coating block 414, and the micro-displacement platform 411 drives the low-temperature curing silver paste 6 to move toward the hot wire probe rod 5, so as to apply the low-temperature curing silver paste 6 is coated on the tips of the two bent metal needles 51 of the hot wire probe rod 5; after the silver paste is coated, the silver paste coating block 414 is removed from the flat head needle clamping rod 413; after adjusting the XYZ-R fine-tuning platform 3 to make the metal hot wire 22 on the hot wire base 2 contact with the trace silver paste 61 on the tips of the two bent metal needles 51, adjust the micro-displacement platform 411 to drive the flat head needle 415 to move toward the metal hot wire 22 between the tips of the two bent metal needles 51, bend the metal hot wire 22, and control the tension of the hot wire by controlling the displacement of the flat head needle 415.

[0054] like Fig.13 , Fig.14As shown, the heat conduction curing silver paste module 43 includes a heating wire clamping rod fixing block 431, a heating wire clamping rod 432, a heating wire 433, a pitch adjustment bolt 434, a sliding block limit plate 435, a sliding groove 436, a spring 437, a sliding block 438 and a pitch rotation axis 439; the sliding block 438 is installed in the sliding groove 436, and when the sliding block 438 slides to the position of the sliding block limit plate 435, the heating wire 433 is located above the two bent metal needles 51 of the hot wire probe rod 5; the heating wire clamping rod fixing block 431 is connected to the sliding block 438 through a pitch axis 439, and the rear end is tightened by a spring 437; the pitch adjustment bolt 434 is rotated to push the heating wire clamping rod fixing block 431 to rotate around the pitch axis 439, and the heating wire 433 is driven to descend through the heating wire clamping rod 432 to contact the two bent metal needles 51; the heating wire 433 is heated after being energized, and the heat is transferred to the needle tip through the bent metal needle 51, solidifying the trace silver paste 61 at the needle tip, and fixing the metal heating wire 22 between the needle tips of the two bent metal needles 51.

[0055] A specific embodiment takes the assembly of nano hot wire probe as an example.

[0056] The steps include:

[0057] Step 1: Hot wire probe rod installation and tip coating with silver paste:

[0058] The hot wire substrate 2 is mounted on the XYZ-R fine-tuning platform 3 and fixed, the probe fixing module 45 is rotated to the station 1, the hot wire probe rod 5 is mounted on the probe clamping rod 454 and locked, and the probe fixing module 45 is rotated to the station 2 and locked by the locking bolt 453, as shown in FIG. Fig.16 As shown, place the low-temperature curing silver paste 6 on the front end inclined surface of the silver paste coating block 414, adjust the micro-displacement platform 411, apply the low-temperature curing silver paste 6 on the needle tips of the two bent metal needles 51 of the hot wire probe rod 5, and remove the silver paste coating block 414.

[0059] Step 2: Pick up the hot wire and adjust the hot wire tension:

[0060] like Fig.17 As shown, the XYZ-R fine-tuning platform 3 is adjusted to make the metal hot wire 22 on the hot wire base 2 contact with the trace amount of silver paste 61 on the needle tips of the two bent metal needles 51, and the micro-displacement platform 411 is adjusted to drive the flat-head needle 415 to move toward the metal hot wire 22 between the needle tips of the two bent metal needles 51 to bend the top of the metal hot wire 22. The tension of the hot wire is controlled by controlling the displacement of the flat-head needle 415.

[0061] Step 3: Cure the silver paste to fix the hot wire and complete the hot wire probe assembly:

[0062] like Fig.18As shown, when the sliding block 438 is slid to the position of the sliding block limit plate 435, the pitch adjustment bolt 434 is rotated to push the electric heating wire clamping rod fixing block 431 to rotate around the pitch rotation axis 439, and the electric heating wire 433 is driven to descend through the electric heating wire clamping rod 432 to contact the two bent metal needles 51. The electric heating wire 433 generates heat after being energized, and the heat is transferred to the needle tip through the bent metal needle 51, solidifying the trace silver paste 61 at the needle tip, and fixing the metal hot wire 22 between the needle tips of the two bent metal needles 51. The hot wire assembly effect diagram is shown in FIG. Fig.19 After the assembly is completed, the electric heating wire 433 is raised, the sliding block 438 is withdrawn, the micro-displacement platform 411 is adjusted to withdraw the flat head needle 415, the XYZ-R fine adjustment platform 3 is adjusted to move the hot wire base 2 away from the hot wire probe rod 5, the probe fixing module 45 is rotated to the station 2, and the hot wire probe with the hot wire assembled is removed. The assembled nano hot wire probe is as shown in FIG. Fig. 20 shown.

Claims

1. A hot wire probe assembly device, characterized in that: The hot wire probe assembly device comprises an electron microscope (1), a hot wire substrate (2), an XYZ-R fine-tuning platform (3), an assembly function module (4) and a hot wire probe rod (5); The electron microscope (1) comprises a microscope lens (11), a base plate (12), a fine-adjustment focusing head (13) and a column (14); the column (14) is mounted on the base plate (12) by means of threads, the fine-adjustment focusing head (13) is fixed on the column (14), and the microscope lens (11) is mounted on the fine-adjustment focusing head (13); The distance between the microscope lens (11) and the substrate (21) is adjusted by adjusting the fine-tuning focusing head (13) to achieve focusing; The hot wire substrate (2) comprises a substrate (21) and a metal hot wire (22); an array of grooves (211) are provided on the substrate (21), and the metal hot wire (22) spans over the grooves (211); The XYZ-R fine-tuning platform (3) comprises a Z-axis rotation platform (31), a Y-axis displacement platform (32), a Z-axis displacement platform (33) and an X-axis displacement platform (34); the X-axis displacement platform (34) is located at the bottom layer and serves as a horizontal foundation; the Y-axis displacement platform (32) is perpendicular to the X-axis and is installed on the X-axis displacement platform (34); the Z-axis displacement platform (33) is perpendicular to the XY-axis plane and is installed on the Y-axis displacement platform (32); the Z-axis rotation platform (31) is installed at the top of the Z-axis displacement platform (33); the XYZ-R fine-tuning platform (3) is installed on the bottom plate (12) by means of bolts; during assembly, the hot wire base (2) is fixed on the table top of the XYZ-R fine-tuning platform (3); The assembly function module (4) comprises a silver paste dipping and tension adjustment module (41), a support (42), a heat conduction curing silver paste module (43), a function module mounting plate (44) and a probe fixing module (45); the silver paste dipping and tension adjustment module (41), the heat conduction curing silver paste module (43) and the probe fixing module (45) are mounted on the function module mounting plate (44); the function module mounting plate (44) is mounted on the base plate (12) via two supports (42); The hot wire probe rod (5) comprises a bent metal needle (51) and a probe fixing block (52); a positioning plane (521) is provided on the surface of the probe fixing block (52); the bent metal needle (51) is located at the front end of the probe fixing block (52); during assembly, the hot wire probe rod (5) is mounted on the probe fixing module (45); The silver paste dipping and tension adjustment module (41) comprises a micro-displacement platform (411), a flat-head needle clamping rod fixing block (412), a flat-head needle clamping rod (413), a silver paste coating block (414), a flat-head needle (415) and a silver paste coating block positioning hole (4131); the silver paste coating block (414) is positioned and installed on the flat-head needle clamping rod (413) through the silver paste coating block positioning hole (4131), and the low-temperature solidified silver paste (6) is placed on the front end inclined surface of the silver paste coating block (414), and the micro-displacement platform (411) drives the low-temperature solidified silver paste (6) to move toward the hot wire probe rod (5), and the low-temperature solidified silver paste (6) is coated on the needle tips of the two bent metal needles (51) of the hot wire probe rod (5); after the silver paste coating is completed, the silver paste coating block (414) is removed from the flat-head needle clamping rod (413); After adjusting the XYZ-R fine-tuning platform (3) so that the metal hot wire (22) on the hot wire base (2) contacts the trace amount of silver paste (61) on the needle tips of the two bent metal needles (51), the micro-displacement platform (411) is adjusted to drive the flat-head needle (415) to move toward the metal hot wire (22) between the needle tips of the two bent metal needles (51) to bend the top of the metal hot wire (22), and the tension of the hot wire is controlled by controlling the displacement of the flat-head needle (415).

2. The hot wire probe assembly device according to claim 1, characterized in that: The probe fixing module (45) comprises a probe clamping rod fixing block (451), a limiting block (452), a locking bolt (453), a probe clamping rod (454) and a probe locking bolt (455); the probe fixing module (45) has two workstations, workstation 1 is a probe insertion and removal workstation, and workstation 2 is a hot wire assembly workstation; workstation 1 is responsible for accurately positioning and fixing the unassembled hot wire probe rod (5) to the probe clamping rod (454), and during installation, the plane positioning surface (4542) contacts the positioning plane (521) of the hot wire probe rod (5), and the end surface limiting surface (4541) contacts the rear end surface (5211) of the probe; workstation 2 is responsible for moving the hot wire probe rod (5) to the assembly position and fixing it; the lower part of the probe clamping rod fixing block (451) is provided with a fixing block rotating shaft (4511), and the functional module mounting plate (44) is provided with a functional module mounting plate rotating hole (441), The fixed block rotating shaft (4511) cooperates with the functional module mounting plate rotating hole (441), and the fixed block rotating shaft (4511) rotates in the functional module mounting plate rotating hole (441) to complete the conversion between station 1 and station 2; the probe clamping rod fixed block (451) has a station 1 limit surface (4513) and a station 2 limit surface (4512), and the limit block (452) has a limit block end surface (4521). When the probe clamping rod is fixed When the block (451) is rotated until the end face (4521) of the limit block contacts the limit face (4513) of station 1, it is in the position of station 1. When the probe clamping rod fixing block (451) is rotated until the end face (4521) of the limit block contacts the limit face (4512) of station 2, it is in the position of station 2. The locking bolt (453) has an external thread that matches the internal thread on the probe clamping rod fixing block (451). When the locking bolt (453) is loosened, The fixed block rotation shaft (4511) rotates in the functional module mounting plate rotation hole (441). When the probe clamping rod fixed block (451) rotates to the limit position of station 1 or station 2, the locking bolt (453) is locked. The probe clamping rod (454) and the hot wire probe rod (5) are fixed at a predetermined position.

3. The hot wire probe assembly device according to claim 2, characterized in that: The heat conduction curing silver paste module (43) comprises a heating wire clamping rod fixing block (431), a heating wire clamping rod (432), a heating wire (433), a pitch adjustment bolt (434), a sliding block limiting plate (435), a sliding groove (436), a spring (437), a sliding block (438) and a pitch rotation axis (439); the sliding block (438) is installed in the sliding groove (436), and when the sliding block (438) slides to the position of the sliding block limiting plate (435), the heating wire (433) is located above the two bent metal needles (51) of the hot wire probe rod (5); the heating wire clamping rod fixing block The electric heating wire (433) is connected to the sliding block (438) via a pitch rotation axis (439), and the rear end is tightened by a spring (437); the pitch adjustment bolt (434) is rotated to push the electric heating wire clamping rod fixing block (431) to rotate around the pitch rotation axis (439), and the electric heating wire (433) is driven to descend through the electric heating wire clamping rod (432) to contact the two bent metal needles (51); the electric heating wire (433) is heated after being energized, and the heat is transferred to the needle tip through the bent metal needle (51), thereby solidifying a trace amount of silver paste (61) at the needle tip, and fixing the metal heating wire (22) between the needle tips of the two bent metal needles (51).

4. A hot wire probe assembly method, characterized in that: The hot-wire probe assembly method is implemented by the hot-wire probe assembly device according to claim 3, and comprises the following steps: Step 1: Hot wire probe rod installation and tip coating with silver paste The hot wire substrate (2) is mounted on the XYZ-R fine-tuning platform (3) and fixed, the probe fixing module (45) is rotated to station 1, the hot wire probe rod (5) is mounted on the probe clamping rod (454) and locked, the probe fixing module (45) is rotated to station 2 and locked by the locking bolt (453), the low-temperature curing silver paste (6) is placed on the front end inclined surface of the silver paste coating block (414), the micro-displacement platform (411) is adjusted, the low-temperature curing silver paste (6) is coated on the needle tips of the two bent metal needles (51) of the hot wire probe rod (5), and the silver paste coating block (414) is removed; Step 2: Pick up the hot wire and adjust the hot wire tension Adjust the XYZ-R fine-tuning platform (3) to make the metal hot wire (22) on the hot wire base (2) contact with the trace amount of silver paste (61) on the needle tips of the two bent metal needles (51), adjust the micro-displacement platform (411), drive the flat-head needle (415) to move toward the metal hot wire (22) between the needle tips of the two bent metal needles (51), bend the top of the metal hot wire (22), and control the tension of the hot wire by controlling the displacement of the flat-head needle (415); Step 3: Cure the silver paste to fix the hot wire and complete the hot wire probe assembly When the sliding block (438) is slid to the position of the sliding block limit plate (435), the pitch adjustment bolt (434) is rotated to push the electric heating wire clamping rod fixing block (431) to rotate around the pitch rotation axis (439), and the electric heating wire (433) is driven to descend through the electric heating wire clamping rod (432) to contact the two bent metal needles (51). After the electric heating wire (433) is energized, it generates heat, and the heat is transferred to the needle tip through the bent metal needle (51), so that the trace amount of silver paste ( 61) is solidified, and the metal hot wire (22) is fixed between the needle tips of the two bent metal needles (51); after the assembly is completed, the electric heating wire (433) is raised, the sliding block (438) is withdrawn, the micro-displacement platform (411) is adjusted to withdraw the flat head needle (415), the XYZ-R fine-tuning platform (3) is adjusted to move the hot wire base (2) away from the hot wire probe rod (5), the probe fixing module (45) is rotated to the workstation 2, and the hot wire probe with the hot wire assembled is removed.

Images