Method for loading and unloading filmless half-cut wafer, loading and unloading device and dicing machine

Abstract

The present application provides a loading and unloading method, loading and unloading device and dicing machine for filmless half-cut wafers, and relates to the technical field of dicing machines. According to the loading and unloading method provided by the present application, on the one hand, a loading and unloading device with integrated loading and pushing back functions is used to perform loading and unloading operations on the sheet material, so that the loading and unloading method is simplified; on the other hand, a buffering force is applied to the sheet material during the process of the loading and unloading device pushing the half-cut sheet material, and the direction of the buffering force, the sheet material and the loading and unloading device are set on the same straight line, so as to avoid the loading and unloading device applying a torque to the sheet material that may be stuck due to the buffering force when buffering the half-cut sheet material, which causes the sheet material to rotate or flip, and then causes the sheet material to break. In this way, through the loading and unloading method provided according to the embodiment of the present application, the loading and unloading method effectively protects the half-cut sheet material.

Description

Technical Field

[0001] The present application relates to the field of dicing machines, and in particular to a loading and unloading method, a loading and unloading device and a dicing machine for film-free half-cut wafers. Background Art

[0002] In the cutting process of filmless wafers, since no film is used, after the sheet is half-cut, the sheet is prone to breakage during the sheet transportation process, so it is necessary to improve the loading and unloading actions and corresponding mechanisms. Summary of the invention

[0003] In view of this, the present application provides a loading and unloading method, a loading and unloading device and a dicing machine for filmless half-cut wafers, with the aim of solving the above technical problems to a certain extent.

[0004] In a first aspect, the present application provides a method for loading and unloading a film-free half-cut wafer, the method comprising:

[0005] Using a loading and unloading device to drag the sheet material from a loading position to a predetermined distance to a predetermined position, and at the predetermined position, supporting and calibrating the sheet material from bottom to top;

[0006] Adjusting the loading and unloading device to a transporting position relative to the sheet material, and using the loading and unloading device at the transporting position to transport the calibrated sheet material to a cutting position, and performing a half-cutting operation on the sheet material at the cutting position;

[0007] Adjust the loading and unloading device to the transporting position, use the loading and unloading device to transport the half-cut sheet to the predetermined position, and support and calibrate the half-cut sheet from bottom to top;

[0008] Adjust the loading and unloading device to one side of the sheet material, and use the loading and unloading device to push the half-cut sheet material to return the half-cut sheet material to the loading position;

[0009] Wherein, in the process of the loading and unloading device pushing the half-cut sheet material, a buffering force is applied to the sheet material, and the direction of the buffering force, the sheet material and the loading and unloading device are on the same straight line.

[0010] In a second aspect, the present application provides a loading and unloading device, the loading and unloading device comprising:

[0011] A transport mechanism, the transport mechanism is used to transport the sheet from the loading position to the predetermined position for calibration, and to transport the sheet to the cutting position for half-cutting, and the transport mechanism is also used to transport the half-cut sheet back to the predetermined position for calibration;

[0012] A push-back mechanism is arranged on one side of the transport mechanism in the horizontal direction, and is used to push the half-cut sheet back to the loading position;

[0013] The push-back mechanism includes a buffer member and a push-back member which are arranged adjacent to each other in a horizontal direction, the push-back member is used to abut against the sheet material, and the buffer member is configured to apply a buffer force toward the sheet material to the push-back member.

[0014] Preferably, the buffer member further comprises a through hole, and the push-back member is arranged in the through hole to penetrate the buffer member;

[0015] wherein the buffer member is configured to be compressed by the push-back member to apply the buffer force to the push-back member, the push-back member comprises a first end and a second end opposite to each other in the horizontal direction, the first end is used to abut against the sheet material, and the buffer member is configured to expose the second end to the outside of the through hole when compressed;

[0016] Wherein, the push-back mechanism also includes a first detection component, which is arranged on the outside of the push-back component, and the first detection component is configured to generate a first detection signal when the second end is exposed to the outside of the through hole at a predetermined length, and the push-back mechanism is configured to stop the push-back action on the half-cut sheet in response to the first detection signal.

[0017] Preferably, the push-back member also includes a first section, a second section and a third section connected in sequence along the horizontal direction, the first section has the first end, the third section has the second end, the diameters of the first section and the third section are smaller than the diameter of the second section, and the buffer member is sleeved on the outside of the third section.

[0018] Preferably, the push-back mechanism further comprises a clamping assembly, the clamping assembly comprising: a first clamping member and a second clamping member, the first clamping member and the second clamping member are arranged adjacent to each other in a vertical direction, the first clamping member and the second clamping member are configured to be able to approach each other to clamp the sheet material, and move away from each other to release the sheet material;

[0019] Among them, the clamping assembly also includes a driving member, which is configured to drive the first clamping member and the second clamping member to move in a vertical direction, so as to provide the first clamping member and the second clamping member with a clamping position lower than the conveying mechanism for clamping the sheet material, and provide a storage position not lower than the conveying mechanism.

[0020] Preferably, the push-back mechanism further comprises a clamping assembly, the clamping assembly comprising: a first clamping member and a second clamping member, the first clamping member and the second clamping member are arranged adjacent to each other in a vertical direction, the first clamping member and the second clamping member are configured to be able to approach each other to clamp the sheet material, and move away from each other to release the sheet material;

[0021] The buffer member is disposed inside one of the first clamping member and the second clamping member, and a portion of the push-back member is disposed inside one of the first clamping member and the second clamping member.

[0022] In a third aspect, the present application provides a dicing machine, which includes the loading and unloading device as described above.

[0023] Preferably, the dicing machine further comprises a calibration table, which is used to calibrate and support the sheet material at a predetermined position;

[0024] Wherein, the dicing machine further comprises a second detection component, and a second detection component is arranged on a side of the calibration platform close to the loading position, and the second detection component is used to detect the sheet material to generate a zero point signal;

[0025] The transport mechanism is configured to pull the sheet to the predetermined position based on the zero point signal and the length of the sheet.

[0026] Preferably, the dicing machine further comprises a calibration table, which is used to calibrate and support the sheet material at a predetermined position;

[0027] Wherein, the calibration platform includes a supporting structure for supporting the sheet material, and the dicing machine also includes a third detection component, which is arranged close to the supporting structure and is used to detect the presence or absence of the sheet material.

[0028] Preferably, the dicing machine further comprises a calibration table, which is used to calibrate and support the sheet material at a predetermined position;

[0029] The calibration table includes a first guide rail and a second guide rail arranged side by side for calibrating the sheet material, and the dicing machine also includes a fourth detection component, the fourth detection component is arranged close to one of the first guide rail and the second guide rail, and the fourth detection component is used to detect the front and back of the sheet material;

[0030] The dicing machine further includes a fifth detection component, which is located between the first guide rail and the second guide rail, and is used to detect the height of the loading and unloading device.

[0031] Preferably, the dicing machine further comprises a calibration table, which is used to calibrate and support the sheet material at a predetermined position;

[0032] Wherein, the calibration platform comprises a first guide rail and a second guide rail arranged side by side for calibrating the sheet;

[0033] The dicing machine further includes a clamping mechanism, which includes a clamping plate disposed between the first guide rail and the second guide rail, and the clamping plate can be raised and lowered to support the sheet material from below the sheet material.

[0034] According to the loading and unloading method provided by the present application, on the one hand, the loading and unloading operation is performed on the sheet material by the loading and unloading device with integrated loading and pushing back functions, so that the loading and unloading method is simplified. On the other hand, by applying a buffering force to the sheet material during the process of the loading and unloading device pushing the half-cut sheet material, the direction of the buffering force, the sheet material and the loading and unloading device are set on the same straight line, so as to avoid the loading and unloading device applying a torque to the sheet material that may be stuck due to the buffering force when the half-cut sheet material is buffered, causing the sheet material to rotate or flip, and then causing the sheet material to break. In this way, through the loading and unloading method provided according to the embodiment of the present application, the loading and unloading method effectively protects the half-cut sheet material.

[0035] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 A schematic diagram showing a three-dimensional diagram of a partial structure of a dicing machine provided according to an embodiment of the present application;

[0038] Figure 2 A schematic diagram showing another three-dimensional diagram of a partial structure of a dicing machine provided according to an embodiment of the present application;

[0039] Figure 3 A schematic diagram showing another three-dimensional diagram of a partial structure of a dicing machine provided according to an embodiment of the present application;

[0040] Figure 4 A schematic diagram showing another three-dimensional diagram of a partial structure of a dicing machine provided according to an embodiment of the present application;

[0041] Figure 5 Shows Figure 4 Schematic diagram of the enlarged view at A in the middle;

[0042] Figure 6 A schematic diagram showing a three-dimensional diagram of a second clamping member of a loading and unloading device provided according to an embodiment of the present application;

[0043] Figure 7 A schematic diagram showing a plan view of a second clamping member of a loading and unloading device provided according to an embodiment of the present application;

[0044] Figure 8 Shows Figure 7 Schematic diagram of the cross-sectional view of section BB.

[0045] Reference numerals:

[0046] 100-transport mechanism; 200-push-back mechanism; 210-first stage cylinder; 220-second stage cylinder; 230-first clamping member; 240-second clamping member; 241-accommodating chamber; 250-push-back member; 251-first stage; 252-second stage; 253-third stage; 260-buffer member; 270-first detection member;

[0047] 300 - calibration table; 310 - calibration guide rail; 320 - top tightening plate; 330 - second detection component; 340 - third detection component; 350 - fourth detection component; 360 - fifth detection component; 500 - sheet material. DETAILED DESCRIPTION

[0048] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0049] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0050] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0051] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0052] According to a first aspect of an embodiment of the present application, a method for loading and unloading a film-free half-cut wafer is provided. Figures 1 to 8 The specific steps of the method for loading and unloading filmless half-cut wafers are specifically described.

[0053] According to the method for loading and unloading a film-free half-cut wafer provided in an embodiment of the present application, the method for loading and unloading a film-free half-cut wafer comprises the following steps:

[0054] The sheet material 500 is dragged from the loading position to the predetermined position by the loading and unloading device, and the sheet material 500 is supported and calibrated from bottom to top at the predetermined position;

[0055] The loading and unloading device is adjusted to a transporting position relative to the sheet material 500 , and the calibrated sheet material 500 is transported to the cutting position by using the loading and unloading device at the transporting position, and a half-cutting operation is performed on the sheet material 500 at the cutting position.

[0056] In the embodiment, the loading and unloading device plays the role of transferring the sheet material 500 for calibration and transferring the sheet material 500 for cutting during the loading and cutting process of the sheet material 500. Specifically, the loading and unloading device transfers the sheet material 500 to a predetermined position for support and calibration by dragging the sheet material 500, and transfers the calibrated sheet material 500 at a transfer position relative to the sheet material 500, so as to transfer the sheet material 500 to the cutting position for cutting. In other words, the loading and unloading device integrates the two functions of dragging the sheet material 500 and transferring the sheet material 500.

[0057] The loading and unloading device is adjusted to the transporting position, and the half-cut sheet material 500 is transported to a predetermined position by the loading and unloading device, and the half-cut sheet material 500 is supported and calibrated from bottom to top.

[0058] After the sheet 500 is half-cut, it is necessary to perform unloading operation on the sheet 500, that is, to transport the half-cut sheet 500 back to the loading position. Therefore, it is still necessary to calibrate the half-cut sheet 500 to ensure that the sheet 500 returns to the previous loading position in an accurate posture to complete unloading.

[0059] The loading and unloading device is adjusted to one side of the sheet material 500 , and the half-cut sheet material 500 is pushed by the loading and unloading device to return the half-cut sheet material 500 to the loading position.

[0060] In the process of the loading and unloading device pushing the half-cut sheet 500, a buffer force is applied to the sheet 500, and the direction of the buffer force, the sheet 500 and the loading and unloading device are on the same straight line.

[0061] Thus, according to the loading and unloading method provided by the embodiment of the present application, on the one hand, the loading and unloading device with integrated loading and pushing back functions performs loading and unloading operations on the sheet material 500, so that the loading and unloading method is simplified; on the other hand, in the process of the loading and unloading device pushing the half-cut sheet material 500, a buffering force is applied to the sheet material 500, and the direction of the buffering force, the sheet material 500, and the loading and unloading device are set on the same straight line, so as to avoid the loading and unloading device applying a torque to the sheet material 500 that may be stuck due to the buffering force when the half-cut sheet material 500 is buffered, which causes the sheet material 500 to rotate or flip, and then causes the sheet material 500 to break. In this way, through the loading and unloading method provided by the embodiment of the present application, the loading and unloading method effectively protects the half-cut sheet material 500.

[0062] Before the present application was proposed, some prior arts also considered buffering the half-cut sheet 500 when pushing back the sheet 500. In specific practice, a buffer element is usually configured for the push-back structure when cutting the material, and the buffer element is usually arranged side by side with the push-back structure, or arranged at a certain angle. In the specific buffering process, the buffer element usually applies a pulling force to the push-back structure, so that the push-back structure can overcome the pulling force under the action of the reaction force of the sheet 500, and relatively smoothly move in a direction away from the sheet 500 to buffer the sheet 500.

[0063] However, as mentioned in the above description, when the sheet 500 is stuck during the push-back process, the sheet 500 usually does not move or moves intermittently during the stuck process. The "intermittent movement" referred to here is a process in which the sheet 500 switches between multiple different stuck positions, which is essentially a kind of movement. Taking the state of the sheet 500 when stuck as an example, when stuck, the sheet 500 remains motionless or almost remains motionless. At this time, the buffer element arranged side by side and at an angle with the push-back structure exerts a moment on the sheet 500 due to the obstruction caused by the sheet 500 remaining motionless, with the position of the sheet 500 being stuck as the moment center and the distance from the moment center to the line of action of the pulling force applied by the buffer element as the force arm. The moment will cause the sheet 500 to rotate, flip, or perform a combined rotation of rotation and flipping with the stuck position as the center, thereby causing the sheet 500 to break during this rotation process.

[0064] Another problem with this torque is that it sometimes makes it difficult for the entire dicing machine system to respond in time. Because in the existing loading and unloading methods and the corresponding dicing machines, the confirmation of the stuck of the sheet 500 is often based on the time the sheet 500 stays, that is, when the stay time exceeds a certain time threshold, it is determined that the sheet 500 is stuck, thereby triggering an alarm. However, from the time the sheet 500 starts to get stuck to the time threshold being met, the sheet 500 may break at any time. In other words, the sheet 500 may have broken after getting stuck, and the alarm of the stuck sheet 500 has not been triggered.

[0065] In the prior art, the buffer element and the push-back structure are mostly arranged side by side or at an angle, in the hope that the buffer element can occupy less space in the horizontal direction, thereby reducing the horizontal dimension. However, it is precisely for this purpose that the sheet material 500 still gets stuck and broken in the above manner in the existing loading and unloading method, and such breaking is almost unavoidable.

[0066] Therefore, according to the loading and unloading method provided in the embodiment of the present application, with the technical effect produced by the above scheme, the above-mentioned torque that causes the sheet 500 to rotate is avoided as much as possible, thereby avoiding the sheet 500 from being broken due to the torque as much as possible.

[0067] According to a second aspect of the embodiment of the present application, a loading and unloading device is provided. Figures 1 to 8 The structure and working principle of the loading and unloading device are described in detail. In an embodiment, the loading and unloading device can be used to perform the loading and unloading method of the film-free half-cut wafer as described above.

[0068] According to the loading and unloading device provided in the embodiment of the present application, the device includes a conveying mechanism 100 and a push-back mechanism 200. In the embodiment, the conveying mechanism 100 is used to convey the sheet material 500 from the loading position to the predetermined position for calibration, and to convey the sheet material 500 to the cutting position for half-cutting. The conveying mechanism 100 is also used to convey the half-cut sheet material 500 back to the predetermined position for calibration.

[0069] In the embodiment, the push-back mechanism 200 is disposed on one side of the transport mechanism 100 in the horizontal direction, and is used to push the half-cut sheet 500 back to the loading position. The push-back mechanism 200 includes a buffer member 260 and a push-back member 250 arranged adjacent to each other in the horizontal direction, the push-back member 250 is used to abut against the sheet 500, and the buffer member 260 is configured to apply a buffer force toward the sheet 500 to the push-back member 250.

[0070] Thus, the loading and unloading device provided in the embodiment of the present application is similar to the loading and unloading method mentioned above. On the one hand, the loading and unloading device with integrated loading and pushing back functions performs loading and unloading operations on the sheet material 500, so that the loading and unloading process is simplified. On the other hand, in the process of pushing the half-cut sheet material 500 by the loading and unloading device, a buffering force is applied to the sheet material 500, and the buffering member 260 and the pushing back member 250 are arranged adjacent to each other in the horizontal direction, so that the direction of the buffering force, the sheet material 500 and the loading and unloading device are arranged on the same straight line, thereby avoiding the loading and unloading device from applying a torque to the sheet material 500 that may be stuck due to the buffering force when the half-cut sheet material 500 is buffered, causing the sheet material 500 to rotate or flip, and then causing the sheet material 500 to break. In this way, the loading and unloading device provided in the embodiment of the present application effectively protects the half-cut sheet material 500.

[0071] In the embodiment, as an example, the buffer member 260 may be a spring. The push-back member 250 may extend in the horizontal direction, for example. The buffer member 260 as a spring may also extend in the horizontal direction. When the spring is compressed by the push-back member 250, the elastic force applied by the spring to the push-back member 250 is the buffer force. As can be seen from the description here, the buffer force can prevent the push-back member 250 from generating a large impact on the half-cut sheet 500.

[0072] In the embodiment, as an example, the buffer member 260 as a spring may be provided on the side of the push-back member 250 away from the sheet material 500; alternatively, in other examples, the buffer member 260 as a spring may also be sleeved on the outside of the push-back member 250, and the push-back member 250 may be formed into a positioning structure such as a step structure, so that one end of the spring close to the sheet material 500 is positioned on the push-back member 250. The specific forms of the buffer member 260 and the push-back member 250 will be explained in the subsequent description.

[0073] In the embodiment, in the above loading and unloading method and loading and unloading device, the loading and unloading device and the conveying mechanism 100 described are located above the sheet 500 relative to the conveying position of the sheet 500. Taking the specific conveying mechanism 100 as an example, the conveying position above the sheet 500 means that the conveying mechanism 100 needs to be moved above the sheet 500. Here, the conveying mechanism 100 can be, for example, a robot with a suction cup at the bottom in the prior art, and its specific structure will not be repeated here.

[0074] According to the loading and unloading device provided in the embodiment of the present application, the buffer member 260 may further include a through hole, and the push-back member 250 may be inserted into the through hole to penetrate the buffer member 260. As mentioned in the above description, the buffer member 260 may be, for example, a spring such as a coil spring, which naturally has a through hole for the push-back member 250 to penetrate. In addition, the buffer member 260 may also be a gasket-like structure or a block-like structure formed of an elastic material such as silicone, and then a through hole for the push-back member 250 to penetrate is opened on the basis of this structure.

[0075] In an embodiment, the buffer member 260 is configured to be compressed by the push-back member 250 to apply a buffering force to the push-back member 250. The push-back member 250 may include a first end and a second end opposite to each other in a horizontal direction. The first end can be used to abut the sheet material 500. The buffer member 260 can be configured to expose the second end to the outside of the through hole when compressed.

[0076] Further, in an embodiment, the push-back mechanism 200 may also include a first detection member 270, which may be disposed on the outside of the push-back member 250, and the first detection member 270 may be configured to generate a first detection signal when the second end is exposed to the outside of the through hole at a predetermined length, and the push-back mechanism 200 may be configured to stop the push-back action on the half-cut sheet 500 in response to the first detection signal.

[0077] In the embodiment, the above arrangement of the buffer member 260, the push-back member 250 and the first detection member 270 has multiple advantages. Specifically, the buffer member 260 provides buffer force in a compressed manner, which is different from the pulling force solution adopted in most solutions in the prior art. Providing pulling force as buffer force requires the existing buffer element to stretch, that is, further extend on the basis of the original length, so it is inevitable that it will still occupy space in the horizontal direction.

[0078] The buffer member 260 provided according to the embodiment of the present application provides the buffer force by means of compression action, which further shrinks on the basis of the original length. Therefore, although the buffer member 260 and the push-back member 250 are adjacent in the horizontal direction, this shrinkage compensates for the increase in horizontal size that may be caused by such adjacent arrangement.

[0079] Next, a through hole is provided on the buffer member 260 for the push-back member 250 to pass through, so that the size in the horizontal direction occupied by the push-back member 250 is reused by at least part of the buffer member 260. Here, the reason why "at least part" of the buffer member 260 is called is related to the actual arrangement of the buffer member 260. For example, when the buffer member 260 is completely set on the outside of the push-back member 250, the size in the horizontal direction occupied by the buffer member 260 is completely the size occupied by the push-back member 250. In this arrangement, the buffer member 260 is of course still adjacent to the push-back member 250 in the horizontal direction, but the buffer member 260 does not increase the size in the horizontal direction occupied by the push-back mechanism 200.

[0080] In addition, in other examples, a portion of the buffer member 260 is mounted on the outside of the push-back member 250, so that the portion of the buffer member 260 that exceeds the push-back member 250 increases the horizontal dimension of the push-back mechanism 200. In this example, the buffer member 260 reuses a portion of the dimension occupied by the push-back member 250 in the horizontal direction, which is exactly the portion of the buffer member 260 that is mounted outside the push-back member 250.

[0081] In addition, since the buffer member 260 is fitted with the push back member 250, when the push back member 250 may swing, the contact between the outer side of the push back member 250 and the inner side of the buffer member 260 is a surface contact with a relatively large contact area. This surface contact ensures the stability of the push back member 250. Compared with the arrangement in which the buffer element is only arranged on one side of the push back component, the loading and unloading device provided in the embodiment of the present application ensures that the push back member 250 will not easily tilt at a large angle or have a tendency to tilt at a large angle.

[0082] According to the loading and unloading device provided in the embodiment of the present application, the push-back member 250 may also include a first section 251, a second section 252 and a third section 253 connected in sequence along the horizontal direction, the first section 251 may have a first end of the push-back member 250, the third section 253 may have a second end of the push-back member 250, the diameters of the first section 251 and the third section 253 may be smaller than the diameter of the second section 252, and the buffer member 260 may be sleeved on the outside of the third section 253.

[0083] In the embodiment, as an example, the push-back member 250 can be formed as a substantially stepped shaft, that is, a stepped shaft having the structure described above. In the embodiment, the second section 252, that is, the middle section of the stepped shaft of such a structure is thicker, while the first section 251 and the second section 252 located on both sides of the second section 252 in the horizontal direction are thinner. In turn, a shoulder is formed between the first section 251 and the second section 252, and between the second section 252 and the third section 253, wherein the shoulder formed by the second section 252 and the third section 253 can be abutted by the buffer member 260, thereby positioning the buffer member 260. In the embodiment, the buffer member 260 also uses the shoulder to apply a buffering force to the push-back member 250. In addition, the push-back member 250 can use the aforementioned first section 251 to push back the sheet 500.

[0084] According to the loading and unloading device of the present application, the push-back mechanism 200 further includes a clamping assembly, which includes: a first clamping member 230 and a second clamping member 240, which are arranged adjacent to each other in the vertical direction, and the first clamping member 230 and the second clamping member 240 are configured to be able to approach each other to clamp the sheet material 500, and to move away from each other to release the sheet material 500. In the embodiment, the push-back mechanism 200 uses the clamping assembly to clamp the sheet material 500 to drag the sheet material 500 from the loading position to the predetermined position for support and calibration.

[0085] In an embodiment, the clamping assembly may further include a driving member, which may be configured to drive the first clamping member 230 and the second clamping member 240 to move in a vertical direction to provide the first clamping member 230 and the second clamping member 240 with a clamping position lower than the conveying mechanism 100 for clamping the sheet material 500, and a storage position not lower than the conveying mechanism 100.

[0086] In an embodiment, the first clamping member 230 and the second clamping member 240 are driven by a driving member. When it is necessary to drag the sheet material 500, the first clamping member 230 and the second clamping member 240 are driven below the conveying mechanism 100, thereby facilitating the dragging of the sheet material 500. When the conveying mechanism 100 is required to convey the sheet material 500, the driving member can drive the first clamping member 230 and the second clamping member 240 to rise to a storage position not lower than the conveying mechanism 100, thereby avoiding the first clamping member 230 and the second clamping member 240 from interfering with the conveying process.

[0087] In an embodiment, the first clamping member 230 and the second clamping member 240 may both be a clamping claw structure, such as a plate-shaped clamping claw structure or a fork-shaped clamping claw structure. The first clamping member 230 and the second clamping member 240 may be driven by a cylinder to perform a separation and combination action, for example, the first clamping member 230 is arranged above the second clamping member 240, and then the first clamping member 230 is fixed to the cylinder body of the cylinder by a fastener such as a screw, and the second clamping member 240 is fixed to the piston rod of the cylinder by a fastener such as a screw.

[0088] Thus, when the piston rod of the cylinder is extended, the cylinder can drive the second clamping member 240 located below to move away from the first clamping member 230, so that the second clamping member 240 and the first clamping member 230 are separated from each other to provide a space between the two for the sheet material 500 to enter, and then the piston rod of the cylinder contracts, the second clamping member 240 approaches the first clamping member 230 again, and finally jointly clamps the sheet material 500 that enters between the two.

[0089] In an embodiment, the driving member may be, for example, another cylinder, the piston rod of which may be directly connected to the cylinder body of the cylinder, thereby driving the cylinder to rise and fall, so as to drive the first clamping member 230 and the second clamping member 240 to rise and fall as a whole.

[0090] In an embodiment, the other cylinder mentioned in the above description can be installed on the transport mechanism 100 via an "L"-shaped mounting member. Therefore, in essence, the other cylinder mentioned in the above description is a first-stage cylinder 210 of the clamping assembly, and the driving member of the cylinder is a second-stage cylinder 220 of the clamping assembly.

[0091] According to the loading and unloading device provided in the embodiment of the present application, the buffer member 260 and the push-back member 250 can be arranged inside one of the first clamping member 230 and the second clamping member 240, and part of the push-back member 250 can be arranged inside one of the first clamping member 230 and the second clamping member 240.

[0092] In this way, according to the loading and unloading device provided in the embodiment of the present application, the buffer member 260 and the push-back member 250 are arranged inside one of the first clamping member 230 and the second clamping member 240, so that the buffer member 260 and the push-back member 250 jointly reuse the horizontal dimension already occupied by one of the first clamping member 230 and the second clamping member 240, thereby further reducing the dimension occupied by the push-back mechanism 200 in the horizontal direction.

[0093] In an embodiment, the buffer member 260 and the push-back member 250 may be, for example, disposed within the second clamping member 240 located within the first clamping member 230. As an example, in an embodiment, the second clamping member 240 may have two parts that are butted against each other in a horizontal direction, and when the two parts are separated, the push-back member 250 and the buffer member 260 may be loaded into the interior of the second clamping member 240.

[0094] In the embodiment, the second clamping member 240 has a cavity 241 that runs through the second clamping member 240 in the horizontal direction. In the embodiment, the interior of the cavity 241 may also be in a stepped shape similar to the shape of the push-back member 250, that is, the middle section of the cavity 241 has a larger inner diameter, and the two sections of the cavity 241 located on both sides of the middle section in the horizontal direction have smaller inner diameters.

[0095] In the embodiment, the inner diameters of the two sections on both sides of the cavity 241 may be the same as the outer diameters of the first section 251 and the third section 253 of the push-back member 250, or slightly larger than the outer diameters of the first section 251 and the third section 253, but the inner diameters of the two sections on both sides of the cavity 241 are smaller than the outer diameter of the second section 252 of the push-back member 250. Therefore, when the push-back member 250 is disposed in the cavity 241, the push-back member 250 is equivalent to using the abutment of the two shoulders formed in the cavity 241 with the shaft shoulders on both sides of the push-back member 250 to prevent the push-back member 250 from falling out of the cavity 241.

[0096] In an embodiment, the middle section of the cavity 241 may be longer than the middle section of the pushback member 250, so that the pushback member 250 has space to slide inside the cavity 241. In an embodiment, as an example, the total stroke that the pushback member 250 can slide relative to the cavity 241 is the sum of the distance between the shoulder on one side of the pushback member 250 and the shoulder in the cavity 241 on the corresponding side, and the distance between the shoulder on the other side of the pushback member 250 and the shoulder in the cavity 241 on the corresponding side.

[0097] In an embodiment, the overall length of the push-back member 250 is greater than the length of the cavity 241, so the push-back member 250 may present a situation where at least one end of one side is exposed outside the second clamping member 240. As an example, the buffer member 260 as a spring is interposed between the shoulder of the side where the third section 253 of the push-back member 250 is located and the shoulder of the cavity 241 on that side. In an embodiment, the spring may be pre-compressed, so that the shoulder of the side where the first section 251 of the push-back member 250 is located is in contact with the shoulder of the cavity 241 on that side when the push-back member 250 does not apply a push-back force to the sheet 500.

[0098] On the basis of the pre-compressed spring, the first section 251 of the push-back member 250 can be more exposed to the outside of the second clamping member 240, and the second section 252 of the push-back member 250 can be less or even not exposed to the outside of the second clamping member 240. For example, the second section 252 of the push-back member 250 is not exposed to the outside of the second clamping member 240 in this case, which is conducive to further reducing the horizontal space occupied by the push-back mechanism 200.

[0099] In the embodiment, when the first end of the push-back member 250 exposed outside the second clamping member 240 abuts against the sheet material 500 to push back the sheet material 500, the push-back member 250 applies a horizontal push-back force to the sheet material 500 as the transport mechanism 100 drives the push-back mechanism 200 to move in the horizontal direction, and the sheet material 500 applies a reaction force to the push-back member 250. This reaction force drives the push-back member 250 to move to a side away from the sheet material 500 with a magnitude that overcomes the elastic force of the pre-compressed spring. This movement causes the first section 251 of the push-back member 250 to retract into the cavity 241, and the further compressed spring absorbs energy, thereby forming a buffer for the sheet material 500.

[0100] In the embodiment, when the push-back member 250 is in the above buffering posture for the sheet material 500, the third section 253, that is, the second end of the push-back member 250 can continue to be located in the cavity 241, or can be slightly extended to the outside of the second clamping member 240. At this time, the extended second end of the push-back member 250 is still configured to be unable to be detected by the first detection member 270.

[0101] In the embodiment, when the sheet 500 is stuck, the sheet 500 stops moving while the push-back member 250 continues to move, and as the distance between the push-back member 250 and the sheet 500 continues to shorten, the spring is continuously compressed, and the length of the second end of the push-back member 250 extending outside the second clamping member 240 continues to increase until the second end is detected by the first detection member 270. At this time, the first detection member 270 sends a first detection signal to the controller of the dicing machine, and the controller of the dicing machine controls the transport mechanism 100 to stop moving, thereby stopping the push-back operation.

[0102] In the embodiment, as mentioned in the above description, the first detection signal indicates that the sheet 500 is stuck, that is, the first detection signal is actually a signal indicating that the sheet 500 is stuck.

[0103] In the embodiment, since the push-back member 250 is still moving toward the sheet 500 and continuously compressing the spring during the period from when the sheet 500 starts to get stuck to when the first detection signal is generated, the spring further absorbs energy to buffer the push-back member 250 to prevent the push-back member 250 from damaging the sheet 500. On the other hand, the spring and the push-back member 250 are on the same horizontal line and will not apply the torque mentioned in the above description to the sheet 500. Therefore, the sheet 500 is always in a relatively safe state during this period. Once the first detection signal is generated, the controller immediately stops the push-back operation in response to the first detection signal, thereby effectively preventing the sheet 500 from breaking.

[0104] In the embodiment, the cooperation of the push-back member 250, the second clamping member 240, the spring and the first detection member 270 is particularly effective. Because according to the loading and unloading device provided in the embodiment of the present application, the size occupied by the push-back member 250 in the horizontal direction is fully utilized. First, the size occupied by the push-back member 250 in the horizontal direction overlaps with the size already occupied by the second clamping member 240 to a large extent, thereby realizing the reuse of the size occupied by the second clamping member 240. Next, for the push-back member 250 and the buffer member 260, the push-back member 250 and the buffer member 260 are in a through-set relationship, and one of the two is reused in size for the other. Furthermore, from a functional point of view, the role of the push-back member 250 is not only to push back the sheet material 500, but also to trigger the alarm signal when the sheet material 500 is stuck, realizing that the two functions of pushing back the sheet material 500 and triggering the alarm are integrated in the same push-back member 250.

[0105] In an embodiment, as an example, the first detection member 270 may be, for example, a photoelectric sensor, which may be blocked by the extended push-back member 250 , thereby generating the first detection signal mentioned in the above description.

[0106] In the embodiment, as an example, the push-back member 250 can be formed as a push rod, which is essentially a rod-shaped structure in the form of a stepped shaft. In the embodiment, a plurality of push-back members 250 can be arranged at intervals along a direction perpendicular to the push-back direction of the sheet 500. In this way, the plurality of push-back members 250 can form more contact positions with the sheet 500, so that when the sheet 500 is stuck, it is not easy to apply torque to the sheet 500 due to a single contact point, resulting in possible fragmentation of the sheet 500.

[0107] In the embodiment, as an example, the number of the push-back members 250 can be, for example, three, and the distances between adjacent push-back members 250 can be the same. The positions of the first ends and the second ends of all the push-back members 250 in the second direction can be the same. In this way, the first ends of all the push-back members 250 can contact the right side of the sheet 500 at the same time, thereby preventing the sheet 500 from being subjected to uneven force and torque.

[0108] In an embodiment, as mentioned in the above description, the second clamping member 240 may have two parts along the horizontal direction. After the two parts are separated, the cavity 241 is also divided into two parts, that is, a part of the cavity 241 is located in one of the two parts, and the other part of the cavity 241 is located in the other of the two parts. The two parts can be connected in a detachable manner, such as by screws. In an embodiment, as an example, a hole for screwing a bolt is provided between adjacent push-back members 250. This improves the compactness of the second clamping member 240 on the one hand, and on the other hand, when machining the cavity 241 of the second clamping member 240, the processing of the hole for screwing the bolt can be completed at one time, thereby improving the processing efficiency.

[0109] According to a third aspect of an embodiment of the present application, a dicing machine is provided. The dicing machine may include the loading and unloading device as described above, and also include the above beneficial effects, which will not be repeated here.

[0110] According to the dicing machine provided in the embodiment of the present application, the dicing machine may further include a calibration table 300, which may be used to calibrate and support the sheet material 500 at a predetermined position. On this basis, the dicing machine may further include a second detection member 330, and a second detection member 330 may be provided on one side of the calibration table 300 close to the loading position, and the second detection member 330 may be used to detect the sheet material 500 to generate a zero point signal.

[0111] In an embodiment, the transport mechanism 100 is configured to pull the sheet 500 to a predetermined position based on the zero-point signal and the length of the sheet 500 .

[0112] In an embodiment, the loading position may be the position where the material box is located. Specifically, the purpose of loading is to drag the sheet material 500 from the material box to a predetermined position. At the predetermined position, the sheet material 500 is supported by the upward movement of the top clamping plate 320. Specifically, the calibration table 300 may adopt an existing structure, which has the top clamping plate 320 mentioned above.

[0113] In order to facilitate the description here and the subsequent description, the structure of the calibration table 300 will be briefly described here. In the embodiment, the calibration table 300 includes a table plate, two calibration rails 310 arranged side by side above the table plate (the two calibration rails 310 are extended along the above-mentioned horizontal direction), and a tightening plate 320 between the two calibration rails 310. In the embodiment, the two calibration rails 310 each have a groove extending along the above-mentioned horizontal direction on one side facing the other rail, and the groove is used to accommodate one side edge of the sheet 500, so that the two opposite edges of the sheet 500 can respectively enter the respective grooves of the two calibration rails 310, so that the sheet 500 can be calibrated between the two calibration rails 310.

[0114] In an embodiment, the top plate 320 is raised and lowered between the two calibration rails 310. After the two side edges of the sheet 500 are accommodated by the two calibration rails 310, the top plate 320 can rise to support the sheet 500 from below, so that the sheet 500 can be sucked by the suction cup of the conveying mechanism 100 and transported to the cutting position for cutting. In an embodiment, the top plate 320 can be driven to rise and fall by a cylinder, and the cylinder can be arranged below the table. In addition, in an embodiment, the two calibration rails 310 can also move closer to and farther from each other. Nuts can be set on both calibration rails 310, and then a lead screw can be set in conjunction with these nuts. The lead screw is driven by a motor to rotate, so that the two calibration rails 310 move closer to and farther from each other to adjust the distance between the calibration rails 310. In an embodiment, the lead screw, nut and motor can all be arranged on the lower side of the table.

[0115] In the embodiment, the clamping plate 320 realizes the lifting and positioning of the sheet material 500 and assists the conveying mechanism to firmly absorb the sheet material 500. The sheet material 500 after being cut in half is supported by the clamping plate 320, and the two calibration guide rails 310 can realize the accurate positioning of the sheet material 500 to prevent the sheet material 500 from being crushed.

[0116] In an embodiment, in order to facilitate the movement of the calibration rail 310, a slide rail may be provided between the calibration rail 310 and the upper surface of the table, and the slide rail may extend in a direction perpendicular to the extension direction of the rail, that is, in the same direction as the extension direction of the lead screw. In an embodiment, a slider adapted to the slide rail may be provided below each calibration rail 310, so that the calibration rail 310 can move along the slide rail.

[0117] In an embodiment, the loading position of the sheet material 500 is the position of the material box where the sheet material 500 is located, and the material box also plays the role of receiving the half-cut sheet material 500. In an embodiment, the material box is on one side of the calibration table 300 in the horizontal direction. In an embodiment, the second detection member 330 can be arranged on the upper side of the table of the calibration table 300. Specifically, the second detection member 330 can be arranged close to one of the two calibration rails 310, and the second detection member 330 can be located on the inner side of one end of the calibration rail 310 close to the material box.

[0118] In the embodiment, the position of the sheet 500 when the second detection member 330 detects the sheet 500 is used as the zero position of the sheet 500. Based on the zero position of the sheet 500 and the length of the sheet 500, the clamping assembly can drag the sheet 500 into place. In the embodiment, the second detection member 330 can be a photoelectric sensor, and the second detection member 330 can generate a zero signal by the sheet 500 blocking the photoelectric sensor.

[0119] According to the dicing machine provided in the embodiment of the present application, the dicing machine may further include a third detection member 340, which may be disposed close to the support structure, that is, the top plate 320, and may be used to detect the presence or absence of the sheet material 500. As an example, the third detection member 340 may also be, for example, a photoelectric sensor, and the shielding of the third detection member 340 by the sheet material 500 causes the third detection member 340 to generate a signal indicating the presence of the sheet material 500, and conversely, the failure of the sheet material 500 to shield the third detection member 340 causes the third detection member 340 to generate a signal indicating the absence of the sheet material 500.

[0120] According to the dicing machine provided in the embodiment of the present application, the dicing machine may further include a fourth detection member 350 . The fourth detection member 350 may be disposed close to one of the first guide rail and the second guide rail. The fourth detection member 350 is used to detect the front and back of the sheet 500 .

[0121] In an embodiment, the fourth detection member 350 can determine the front and back of the sheet 500 by detecting the hole features pre-opened on the sheet 500. For example, when the sheet 500 is facing up, the hole features it has may not block the fourth detection member 350, and when the sheet 500 is facing up, the hole features it has are not in the original position, which causes the fourth detection member 350 to be blocked. At this time, the fourth detection member 350 can generate a signal that the sheet 500 is placed upside down. In other words, if the placement worker puts the sheet 500 into the material box in the wrong way, the sheet 500 is opened in an asymmetric way. When the sheet 500 is at the predetermined position of the calibration table 300, if the sheet 500 is placed upside down, the sensor cannot detect the signal, and the detection signal can only be triggered when the placement direction is correct.

[0122] According to the dicing machine provided in the embodiment of the present application, the dicing machine may further include a fifth detection member 360, which may be located between the first guide rail and the second guide rail, and may be used to detect the height of the loading and unloading device. In the embodiment, the fifth detection member 360 may include two opposing sensors that are opposite to each other in another horizontal direction perpendicular to the moving direction of the sheet 500 (that is, the horizontal direction mentioned above), and once the loading and unloading device is blocked between the two opposing sensors, the height of the loading and unloading device is the height at which the fifth detection member 360 is currently located.

[0123] According to the loading and unloading device provided in the embodiment of the present application, the working process of the loading and unloading device will be briefly described below.

[0124] During the loading stage, the two calibration guide rails 310 move to the appropriate position, the conveying mechanism 100 moves to the left to the front of the sheet material 500, the first-stage cylinder 210 of the conveying mechanism 100 extends, and the second-stage cylinder 220 extends to drive the two clamping components to open. After the two clamping components are opened, they continue to move to the left, so that the sheet material 500 is between the two clamping components. The two clamping components are closed by the second-stage cylinder 220, and the conveying mechanism 100 moves to the right to drag the sheet material 500 toward the calibration table 300.

[0125] Next, in the loading stage, one end of the sheet 500 first passes through the zero point detection sensor (i.e., the second detection member 330) and the position of the transport mechanism 100 at this moment is recorded in the control system of the dicing machine. The transport mechanism 100 continues to pull the sheet 500, and the pulling distance is set in the control system according to the specifications of the sheet 500 and the position of the front and back detection sensor (i.e., the fourth detection member 350) of the sheet 500. When the sheet 500 reaches the predetermined position, if the detection signal of the front and back detection sensor is triggered, it is confirmed that the sheet 500 is placed upright, then the two clamping members are released, the transport mechanism 100 moves to the right for a distance, and the two cylinders on the transport mechanism 100 retract to drive the two clamping members to move upward as a whole. The tightening cylinder of the calibration table 300 extends out of the tightening plate 320 to hold the sheet 500, and the transport mechanism 100 is lifted upward by its own lead screw. Then the transport mechanism 100 moves horizontally to the top of the sheet 500 and then moves downward, and the sheet 500 is adsorbed by the suction cup. During the process from when the sheet 500 is pulled to the predetermined position until the sheet 500 is sucked and carried away, the sheet 500 presence detection sensor keeps working and outputting signals to ensure that the sheet 500 does not fall but is in the correct position.

[0126] During the push-back stage, the conveying mechanism 100 moves to the horizontal working position where it adsorbs the sheet material 500 during the loading stage, the tightening cylinder pushes the tightening plate 320 to extend, and the conveying mechanism 100 moves downward in the vertical direction to place the sheet material 500 on the tightening plate 320. The two calibration guide rails 310 move to clamp the sheet material 500 in the track groove, and the suction cup releases the vacuum pressure to place the sheet material 500 on the calibration table 300. The conveying mechanism 100 moves upward and then to the right, and then a section of the cylinder 210 of the conveying mechanism 100 extends out, and the conveying mechanism 100 moves downward until the push-back member 250 (essentially a pin structure) at the front end of the conveying mechanism 100 is in the same plane as the sheet material 500, and then the conveying mechanism 100 moves to the left to push the sheet material 500 toward the material box. In the push-back stage, if the sheet 500 detection sensor signal is triggered for a certain period of time, it means that the sheet 500 has no effective movement, that is, the push-back ejector pin and the sheet 500 are not in the same plane, and thus the sheet 500 cannot be effectively pushed, which will trigger an alarm.

[0127] In an embodiment, a sensor for detecting the presence or absence of the sheet material 500 can be arranged adjacent to the clamping plate 320, and the sensor can be adjusted by the height between the thread and the installation position thereof. Thus, during the equipment installation phase, the height of the clamping cylinder and the sensor under the clamping plate 320 can be adjusted to ensure that the clamping mechanism and the track of the calibration table 300 are in the same plane and the sheet material 500 can trigger the detection signal of the sensor.

[0128] A through-beam detection sensor is installed on the calibration rail 310. Before the transport mechanism 100 pushes back, the transport mechanism 100 moves downward. When the two clamping members trigger the through-beam detection sensor signal, the system will record the height position of the transport mechanism 100 at this moment, and then the transport mechanism 100 will be lifted up by a certain distance, which is the sum of the distance from the sensor to the sheet 500 plus the distance from the lower surface of the two clamping members to the center of the push-back member 250. Because these two distances are fixed, it can be ensured that the push-back member 250 is exactly in the same plane as the sheet 500.

[0129] The above are only preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. All equivalent structural changes made by using the contents of the present application specification and drawings under the innovative concept of the present application, or directly / indirectly applied in other related technical fields are included in the protection scope of the present application.

Claims

1. A loading and unloading device, characterized in that: The loading and unloading device comprises: A transport mechanism, the transport mechanism is used to transport the sheet from the loading position to the predetermined position for calibration, and to transport the sheet to the cutting position for half-cutting, and the transport mechanism is also used to transport the half-cut sheet back to the predetermined position for calibration; A push-back mechanism is arranged on one side of the transport mechanism in the horizontal direction, and is used to push the half-cut sheet back to the loading position; The push-back mechanism comprises a buffer member and a push-back member arranged adjacent to each other in a horizontal direction, the push-back member is used to abut against the sheet material, and the buffer member is configured to apply a buffer force toward the sheet material to the push-back member; The buffer component further includes a through hole, and the push-back component is arranged in the through hole to penetrate the buffer component; wherein the buffer member is configured to be compressed by the push-back member to apply the buffer force to the push-back member, the push-back member comprises a first end and a second end opposite to each other in the horizontal direction, the first end is used to abut against the sheet material, and the buffer member is configured to expose the second end to the outside of the through hole when compressed; Wherein, the push-back mechanism also includes a first detection component, which is arranged on the outside of the push-back component, and the first detection component is configured to generate a first detection signal when the second end is exposed to the outside of the through hole at a predetermined length, and the push-back mechanism is configured to stop the push-back action on the half-cut sheet in response to the first detection signal.

2. The loading and unloading device according to claim 1, characterized in that: The push-back member also includes a first section, a second section and a third section connected in sequence along a horizontal direction, the first section has the first end, the third section has the second end, the diameters of the first section and the third section are smaller than the diameter of the second section, and the buffer member is sleeved on the outside of the third section.

3. The loading and unloading device according to claim 1, characterized in that: The push-back mechanism further includes a clamping assembly, the clamping assembly including: a first clamping member and a second clamping member, the first clamping member and the second clamping member are disposed adjacent to each other in a vertical direction, the first clamping member and the second clamping member are configured to be able to approach each other to clamp the sheet material, and to move away from each other to release the sheet material; Among them, the clamping assembly also includes a driving member, which is configured to drive the first clamping member and the second clamping member to move in a vertical direction, so as to provide the first clamping member and the second clamping member with a clamping position lower than the conveying mechanism for clamping the sheet material, and provide a storage position not lower than the conveying mechanism.

4. The loading and unloading device according to claim 1, characterized in that: The push-back mechanism further includes a clamping assembly, the clamping assembly including: a first clamping member and a second clamping member, the first clamping member and the second clamping member are disposed adjacent to each other in a vertical direction, the first clamping member and the second clamping member are configured to be able to approach each other to clamp the sheet material, and to move away from each other to release the sheet material; The buffer member is disposed inside one of the first clamping member and the second clamping member, and a portion of the push-back member is disposed inside one of the first clamping member and the second clamping member.

5. A dicing machine, characterized in that: The dicing machine comprises a loading and unloading device as claimed in any one of claims 1 to 4.

6. The dicing machine according to claim 5, characterized in that: The dicing machine also includes a calibration table, which is used to calibrate and support the sheet material at a predetermined position; Wherein, the dicing machine further comprises a second detection component, and a second detection component is arranged on a side of the calibration platform close to the loading position, and the second detection component is used to detect the sheet material to generate a zero point signal; The transport mechanism is configured to pull the sheet to the predetermined position based on the zero point signal and the length of the sheet.

7. The dicing machine according to claim 5, characterized in that: The dicing machine also includes a calibration table, which is used to calibrate and support the sheet material at a predetermined position; Wherein, the calibration platform includes a supporting structure for supporting the sheet material, and the dicing machine also includes a third detection component, which is arranged close to the supporting structure and is used to detect the presence or absence of the sheet material.

8. The dicing machine according to claim 5, characterized in that: The dicing machine also includes a calibration table, which is used to calibrate and support the sheet material at a predetermined position; The calibration table includes a first guide rail and a second guide rail arranged side by side for calibrating the sheet material, and the dicing machine also includes a fourth detection component, the fourth detection component is arranged close to one of the first guide rail and the second guide rail, and the fourth detection component is used to detect the front and back of the sheet material; The dicing machine further includes a fifth detection component, which is located between the first guide rail and the second guide rail, and is used to detect the height of the loading and unloading device.

9. The dicing machine according to claim 5, characterized in that: The dicing machine also includes a calibration table, which is used to calibrate and support the sheet material at a predetermined position; Wherein, the calibration platform comprises a first guide rail and a second guide rail arranged side by side for calibrating the sheet; The dicing machine further includes a clamping mechanism, which includes a clamping plate disposed between the first guide rail and the second guide rail, and the clamping plate can be raised and lowered to support the sheet material from below the sheet material.

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