A motion control method and a computer program product

Abstract

The present disclosure provides a motion control method and a computer program product, which relate to the technical field of ultra-precision equipment. The present disclosure relates to controlling a clamping motion component to move to a preset position between a first initial position and a first target position through a first control mode, controlling the clamping motion component to move from the preset position to the first target position through a second control mode to clamp a processed object; controlling a conveying motion component to move to the second target position through the first control mode; wherein the clamping motion component is arranged on the conveying motion component.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of ultra-precision equipment, and more specifically to a motion control method and a computer program product. Background Art

[0002] The motion platform can be used to achieve the clamping of objects and the movement of objects. The motion platform of ultra-precision equipment generally provides a displacement accuracy of nanometers. In some embodiments, the motion platform may include a clamping motion component for clamping and carrying objects, and a transmission motion component for carrying the clamping motion component and the object clamped by it to move as a whole. Among them, the transmission motion component can provide a long-stroke displacement of centimeters or micrometers, and the clamping motion component can achieve nanometer-level clamping accuracy and nanometer-level position adjustment. The control of existing motion components usually adopts a single mode control, which is difficult to adapt to different working conditions and needs. Summary of the invention

[0003] One or more embodiments of the present specification provide a motion control method, which controls motion components through different control modes to improve the adaptability and work efficiency of different motion components, such as clamping motion components and conveying motion components. The motion control method includes: controlling the clamping motion component to move to a preset position between a first initial position and a first target position through a first control mode, and controlling the clamping motion component to move from the preset position to the first target position through a second control mode to clamp the object to be processed; controlling the conveying motion component to move to the second target position through the first control mode; wherein the clamping motion component is arranged on the conveying motion component; the second control mode includes a control mode based on a clamping force feedback signal; taking the position of the clamping motion component when the clamping force feedback signal meets a preset condition as the first target position; and the clamping force feedback signal reflects the clamping force of the clamping motion component.

[0004] According to the motion control method described in some embodiments of this specification, the first control mode includes a first control stage based on a preset waveform and a second control stage based on a position PID loop.

[0005] According to the motion control method described in some embodiments of the present specification, the method of controlling the clamping motion component to move to a preset position between a first initial position and a first target position through a first control mode includes: controlling the clamping motion component to move from the first initial position based on a first preset waveform; when the distance between the current position of the clamping motion component and the preset position does not exceed a first window value: obtaining the first current position information of the clamping motion component; processing the first current position information and the position information corresponding to the preset position through a first position PID loop to obtain a first control signal, and controlling the clamping motion component based on the first control signal to move it to the preset position.

[0006] According to the motion control method described in some embodiments of this specification, the first window value is set based on the measurement accuracy of the first position sensor corresponding to the clamping motion component.

[0007] According to the motion control method described in some embodiments of the present specification, the control of the transmission motion component to move to the second target position through the first control mode includes: controlling the transmission motion component to move from a second initial position based on a second preset waveform; when the distance between the current position of the transmission motion component and the second target position does not exceed a second window value: obtaining the second current position information of the transmission motion component; processing the second current position information and the position information corresponding to the second target position through a second position PID loop to obtain a second control signal, and controlling the transmission motion component based on the second control signal to move it to the second target position.

[0008] According to the motion control method described in some embodiments of this specification, the second window value is set based on the measurement accuracy of the second position sensor corresponding to the transmission motion component.

[0009] According to the motion control method described in some embodiments of the present specification, the motion control method based on the second preset waveform controls the transmission motion component to move from a second initial position, and also includes: obtaining current speed information of the transmission motion component; processing the current speed information and the target speed through a speed PID loop to obtain a frequency value; setting the frequency of the second preset waveform based on the frequency value; and controlling the motion of the transmission motion component based on the second preset waveform after setting the frequency.

[0010] According to the motion control method described in some embodiments of the present specification, the clamping motion component is controlled to move from the preset position to the first target position through the second control mode to clamp the processed object, including: controlling the clamping motion component to move from the preset position based on a third preset waveform; obtaining the clamping force feedback signal; and when it is determined that the clamping force feedback signal satisfies the preset condition, continuously controlling the clamping motion component based on the waveform value corresponding to the third preset waveform at the current moment.

[0011] The motion control method described in some embodiments of the present specification also includes: when the conveying motion component is moving and the clamping motion component does not clamp the processed object: obtaining current position information of the clamping motion component; processing the current position information through a third position PID loop to obtain a third control signal, and controlling the clamping motion component based on the third control signal to maintain it at the current position.

[0012] The motion control method described in some embodiments of the present specification also includes: when the clamping motion component is controlled by the second control mode to move from the preset position to the first target position to clamp the processed object: obtaining the current position information of the transmission motion component; processing the current position information through a fourth position PID loop to obtain a fourth control signal, and controlling the transmission motion component based on the fourth control signal to maintain it at the current position.

[0013] According to the motion control method described in some embodiments of the present specification, the clamping motion component includes two or more clamping inertia motors; the clamping motion component is controlled to move to a preset position between a first initial position and a first target position through a first control mode, and the clamping motion component is controlled to move from the preset position to the first target position through a second control mode to clamp the object to be processed, including: after the two or more clamping inertia motors arrive at the preset position, the two or more clamping inertia motors are controlled to move from the preset position to the first target position through the second control mode to clamp the object to be processed.

[0014] According to the motion control method described in some embodiments of the present specification, the clamping motion component includes two or more clamping inertia motors with parallel motion directions; the clamping motion component is controlled to move to a preset position between a first initial position and a first target position through a first control mode, and the clamping motion component is controlled to move from the preset position to the first target position through a second control mode to clamp the processed object, including: independently controlling the two or more clamping inertia motors through the first control mode respectively; and synchronously controlling the two or more clamping inertia motors through the second control mode.

[0015] According to the motion control method described in some embodiments of the present specification, the transmission motion component includes two or more transmission inertia motors with orthogonal motion directions; controlling the transmission motion component to move to the second target position through the first control mode includes: independently controlling the two or more transmission inertia motors through the first control mode respectively.

[0016] One or more embodiments of the present specification provide a computer program product, including computer instructions or computer codes, which can implement any of the above-mentioned motion control methods when at least part of the computer instructions or the computer codes are executed by a processor.

[0017] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) Through different control modes, the clamping motion components and the conveying motion components are controlled separately to adapt to different working conditions and requirements, improve the adaptability and work efficiency of each motion component, and enable different motion components to have better performance in specific stages; (2) Through the staged control mode, multiple clamping motion components can simultaneously enter the second control mode after ending the first control mode, reducing the movement stroke of multiple clamping motion components in the second control mode stage, so that multiple clamping motion components can achieve the same movement in a short stroke. (3) When the current position of the clamping motion component is far away from the target position, the clamping motion component is driven to move through the preset waveform to quickly approach the target position and adapt to a longer stroke; (4) After the current position of the clamping motion component is close to the target position, the position adjustment is performed at the nanometer level through the position PID loop calculation correction; (5) When the clamping motion component is clamping, it reaches the preset position through the first control mode, and then synchronously controls each clamping motion component through the second control mode, so that each clamping motion component can be quickly in place and can achieve synchronous clamping, so that the edges of the clamped object are The edge can be synchronously subjected to the clamping force provided by the clamping motion component, and has good clamping stability. At the same time, it can reduce the displacement of the clamped object and prevent the eccentricity of the clamped object; (6) The clamping motion component is calculated and corrected through the force PID loop of the second control mode to ensure that multiple clamping motion components are clamped in place; (7) When the transmission motion component is far away from the target position at the current position, it quickly approaches the target position to adapt to a longer stroke; after the transmission motion component is close to the target position at the current position, it is calculated and corrected through the position PID loop to perform nanometer-level position adjustment; (8) The clamping motion component does not clamp the clamped object. (9) During the movement of the conveying motion component, the position of the clamping motion component is maintained by the position PID loop to obtain a stable initial position of the clamping motion component; (10) After the clamping motion component implements clamping, during the movement of the conveying motion component, the clamping state is maintained by the self-locking of the clamping motion component instead of the position PID loop, to avoid the vibration caused by the position PID loop adjusting the clamping motion component due to the influence of acceleration.

[0018] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] This specification will be further explained by way of exemplary embodiments, which will be described in detail by way of the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0020] Figure 1 It is a schematic diagram of a motion platform involved in the motion control method shown in some embodiments of this specification.

[0021] Figure 2 It is an exploded schematic diagram of a motion platform involved in the motion control method shown in some embodiments of this specification.

[0022] Figure 3 It is a schematic diagram of an application scenario of the motion control method shown in some embodiments of this specification.

[0023] Figure 4 It is a main flow chart of the motion control method shown in some embodiments of this specification.

[0024] Figure 5 is a flowchart of step 100 of a motion control method according to some embodiments of the present specification.

[0025] Figure 6 is a flowchart of step 110 of the motion control method according to some embodiments of the present specification.

[0026] Figure 7 It is a schematic diagram of sawtooth wave control and position PID loop control in the first control mode of the motion control method shown in some embodiments of this specification.

[0027] Figure 8 is a schematic diagram of a force PID loop in the second control mode of the motion control method shown in some embodiments of the present specification.

[0028] Fig. 9 is a flow chart of step 200 of a motion control method according to some embodiments of the present specification.

[0029] Fig.10 Schematic diagram of a speed PID loop of a motion control method according to some embodiments of the present specification.

[0030] Markings in the figure: 11 first platform; 12 second platform; 2 clamping platform; 21 clamping motor; 211 clamping mover; 31 X-axis transmission motor; 311 X-axis stator; 312 X-axis mover; 32 Y-axis transmission motor; 321 Y-axis stator; 322 Y-axis mover; 41 clamping component; 100 application scenario; 110 data measurement device; 120 storage device; 130 drive; 140 computing device; 150 motion component; 160 network. DETAILED DESCRIPTION

[0031] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the contents described below are some examples or embodiments of this specification. For ordinary technicians in this field, without paying creative work, the technical solutions or means disclosed in this specification can also be applied to other scenarios based on these technical contents.

[0032] It should be understood that the "system", "device", "equipment", "part" and / or "piece", "unit" and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0033] Unless otherwise specified, technical terms used in this specification to describe components, elements, etc. do not refer to the singular, but may also include the plural. Generally speaking, terms such as "include", "comprise", etc. only indicate that the steps, elements, or components that have been clearly identified are included, and these steps, elements, and components do not constitute an exclusive list, such as the method or device described may also include other steps or components.

[0034] In the description of this specification, it should be understood that the description of orientation, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise clearly defined, the terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0035] Flowcharts are used in this specification to illustrate the operation steps performed by the device or system of the relevant embodiments, but unless otherwise specified, the order used to describe these steps should not be understood as a limitation on the order in which the steps are performed. A person of ordinary skill in the art can adjust the order in which these steps are performed based on the knowledge and information conveyed by the embodiments of this specification, and the adjustment includes but is not limited to swapping the order, merging multiple steps, and splitting a certain step.

[0036] In some embodiments, the motion platform includes a clamping motion component and a transmission motion component, wherein the clamping motion component is used to clamp an object and adjust the clamping position of the object, and the transmission motion component is used to move the clamping motion component. In some embodiments, in the ultra-precision motion platform, the stroke of the clamping motion component can be at the centimeter level, and its displacement accuracy can reach the nanometer level; the stroke of the transmission motion component can range from a few centimeters to tens of centimeters, and its displacement accuracy can reach the micrometer level or even the nanometer level.

[0037] For example, see Figure 1 , Figure 2 As shown, the transport motion assembly may include a first platform 11 and a second platform 12 capable of providing motion in two directions. The motion directions provided by the first platform 11 and the second platform 12 may be orthogonal or non-orthogonal. Figure 1 An embodiment in which the movement directions of the first platform 11 and the second platform 12 are orthogonal is shown. In other embodiments, the conveying motion component may also include a redundant third platform, a fourth platform, or even more platforms. In other embodiments, the movement directions of the first platform and the redundant third platform and the fourth platform may be parallel or non-parallel; the movement directions of the second platform and the redundant third platform and the fourth platform may be parallel or non-parallel. In other embodiments, the conveying motion platform may also include only a first platform or a second platform in a single direction. In some embodiments, the conveying motion component may also include a conveying motor for driving the first platform 11 or the second platform 12.

[0038] In some embodiments, see Figure 1 , Figure 2 As shown, the motion platform includes a clamping platform 2, and the clamping platform 2 is driven to move by transmitting motion components such as the first platform 11 and the second platform 12. The clamping platform 2 can have multiple clamping motion components, and the clamping motion components can include a clamping motor 21 for providing object clamping and object displacement. Exemplarily, the clamping motor can be an inertial motor, a piezoelectric motor, a piezoelectric inertial motor, or other motors that can provide linear motion or implement clamping. Figure 1 In the illustrated embodiment, a plurality of clamping motors 21 are included for providing displacement in a single direction. In other embodiments, a plurality of clamping motors may also be used to provide displacement in multiple directions, or even in all directions within a plane. Figure 1 In the illustrated embodiment, a plurality of clamping motors 21 are included, wherein a plurality of clamping motors 21 provide displacement in one direction, for example Figure 1 The four clamping motors 21 on the left and right sides of the clamping platform 2 shown in FIG. 2 provide displacement in the X-axis direction; another plurality of clamping motors 21 provide displacement in another direction, for example Figure 1 The four clamping motors 21 on the upper and lower sides of the clamping platform 2 shown in the figure provide displacement in the Y-axis direction. In some embodiments, the specific number of the clamping motors can be two or more than two, and the specific number of the clamping motors can be an odd number or an even number. In other embodiments, the number of the clamping motors can also be one, and at the same time, the clamping platform is arranged with a limiting structure in one or more directions other than the clamping motor, and the limiting structure can be a gear bar, a baffle, etc. The clamping motor and the limiting structure on the opposite side can cooperate with each other to achieve clamping of the object. In some embodiments, two clamping motors can be arranged opposite to each other. In other embodiments, multiple clamping motors can be arranged opposite to each other in pairs.

[0039] In one or more embodiments of this specification, see Figure 1 , Figure 2 As shown, the conveying motion assembly includes an X-axis conveying motor 31 disposed between the first platform 11 and the second platform 12 and arranged along the X-axis direction, an X-axis stator 311 of the X-axis conveying motor 31 is connected to the upper surface of the first platform 11, and an X-axis mover 312 of the X-axis conveying motor 31 is connected to the lower surface of the second platform 12. In one or more embodiments of the present specification, the conveying motion assembly includes a Y-axis conveying motor 32 disposed between the second platform 12 and the clamping platform 2 and arranged along the Y-axis direction, a Y-axis stator 321 of the Y-axis conveying motor 32 is connected to the upper surface of the second platform 12, and a Y-axis mover 322 of the Y-axis conveying motor 32 is connected to the lower surface of the clamping platform 2.

[0040] In some embodiments, the X-axis transmission motor 31 and the Y-axis transmission motor 32 are long-stroke inertial motors. In some embodiments, the X-axis transmission motor 31 and the Y-axis transmission motor 32 include a stator and a mover that moves linearly on the stator. In some specific embodiments, the movable displacement is 10 to 30 cm, for example, 12 to 28 cm. The above-mentioned movable displacement refers to the travel range of the transmission motor, and the above-mentioned small-range movement refers to the range within which the transmission motor can be controlled to perform a displacement with higher precision. For example, the travel range of the transmission motor is 10 cm, and the transmission motor can be controlled to perform a micron-level displacement within a range of 2 cm therein.

[0041] In some embodiments, the clamping motor 21 is a short-stroke inertia motor, and in some specific embodiments, its movable displacement is 0.5 to 3 cm, for example, 1 to 2 cm. The above movable displacement refers to the stroke range of the clamping motor, and the above small-range movement refers to the clamping motor being able to perform a more precise and higher displacement by control within the given range of the small-range movement. For example, the stroke range of the clamping motor is 2 cm, and the clamping motor can be controlled to perform nanometer-level displacement within a range of 500 nm therein.

[0042] In some embodiments, see Figure 1 , Figure 2 As shown, the clamping motor 21 has a clamping member 41, and the clamping member 41 has a clamping end, wherein the clamping member 41 is fixedly connected to the clamping motor 21, such as a clamping mover 211 of the clamping motor, and the clamping end of the clamping member 41 protrudes from the clamping motor 21. In some embodiments, the clamping end is flexible and / or elastic. In other embodiments, the clamping end is rigid.

[0043] In some of the above-mentioned embodiments, the X-axis transfer motor 31 and the Y-axis transfer motor 32 provide long-stroke displacement, and the plurality of clamping motors 21 provide nanometer-level clamping accuracy.

[0044] The existing motion component control usually adopts a single mode control, such as a single open-loop signal control, which is difficult to adapt to different working conditions and requirements. In addition, the displacement accuracy or clamping accuracy is difficult to reach the nanometer level standard by only controlling the transmission motor or clamping motor to move in place through a single open-loop signal.

[0045] The motion control method provided in one or more embodiments of the present specification controls the clamping motion component to move to a certain position through the first control mode, controls the clamping component to implement and ensure the clamping effect through the second control mode, and controls the conveying motion component to move to a certain position through the first control mode. The motion components are controlled separately through different control modes, so that different motion components can adapt to different working conditions and requirements, so that each motion component has better performance at a specific stage, for example, the conveying motion component can move to a certain position faster, and for example, the clamping motion component can have nanometer-level precision during the clamping process.

[0046] Figure 3 is a schematic diagram of an exemplary application scenario of the motion control method shown in some embodiments of this specification, referring to Figure 3As shown, in some embodiments, the application scenario 100 of the motion control method may include a data measuring device 110, a storage device 120, a driver 130, a computing device 140, a motion component 150, and a network 160. In some embodiments, the computing device 140 and / or the driver 130 are used to implement the motion control method of some embodiments provided in this specification, and the motion component 150 is used to work according to the motion control method. In some embodiments, the motion component 150 is a transmission motion component or a clamping motion component, such as an X-axis transmission motor 31, a Y-axis transmission motor 32, or a clamping motor 21. The various components in the application scenario 100 can be connected in a variety of ways. For example, the data measuring device 110 can be connected to the storage device 120 and / or the computing device 140 through the network 160, or it can be directly connected to the storage device 120 and / or the computing device 140. For another example, the computing device 140 can be directly connected to the driver 130 or connected through the network 160. For another example, the computing device 140 may be connected to the storage device 120 and / or the driver 130 via the network 160, or directly connected to the storage device 120 and / or the driver 130. In some embodiments, the computing device 140 and the driver 130 are used to implement the motion control method of some embodiments of this specification.

[0047] The motion control method provided in one or more embodiments of the present specification controls the clamping motion component to move into place through a first control mode, controls the clamping component to implement and ensure the clamping effect through a second control mode, and controls the conveying motion component to move into place through the first control mode.

[0048] Figure 4 is a main flow chart of the motion control method shown in some embodiments of this specification. In one or more embodiments of this specification, Figure 4 The main process shown can be implemented by a controller or a processor. Figure 4 As shown, the motion control method may include the following steps.

[0049] Step 100: Control the clamping motion component to approach the object to be processed, and further clamp the object to be processed.

[0050] Step 200: Control the conveying motion component to carry the clamping motion component and the object to be processed to move to the processing position.

[0051] Step 300: Control the clamping motion component to separate from the object being processed.

[0052] In one or more embodiments of this specification, see Figure 5 As shown, step 100 includes step 110 and step 120 .

[0053] In one or more embodiments of the present specification, step 110: control the clamping motion assembly to move to a preset position between the first initial position and the first target position through the first control mode. For example, control the clamping motor 21 to move to a preset position between the first initial position and the first target position through the first control mode. Exemplarily, the clamping mover 211 of the clamping motor 21 can be controlled through the first control mode to carry the clamping member 41 fixed on the clamping mover 211, so that the clamping end of the clamping member 41 moves to a preset position between the first initial position and the first target position.

[0054] In one or more embodiments of the present specification, step 120: control the clamping motion assembly to move from the preset position to the first target position through the second control mode to clamp the object to be processed. For example, the clamping end of the clamping member 41 is controlled to move from the preset position to the first target position capable of actually clamping the object to be processed through the second control mode, and the object to be processed is clamped by the clamping end. Exemplarily, the clamping is achieved by a plurality of clamping ends abutting against the object to be processed.

[0055] For step 110, in some embodiments, see Figure 6 As shown, the first control mode includes step 112 and step 114, wherein step 112 is a first control stage based on a preset waveform, and step 114 is a second control stage based on a position PID loop.

[0056] In the first control stage of step 112, the clamping motion assembly is driven based on a preset waveform. Figure 7 As shown on the left side, for example, each time a complete preset waveform is generated, the clamping motion component moves forward one step each time according to the complete preset waveform.

[0057] In the second control stage of step 114, the gripper motion assembly is driven based on the position PID loop. Figure 7 As shown on the right, for example, the clamping motion component feeds back position information each time after operation, and then drives the clamping motion component to operate based on the position information, forming a position closed-loop control.

[0058] In one or more embodiments of the present specification, the first control stage of step 112 specifically includes: controlling the clamping motion component to move from a first initial position based on a first preset waveform.

[0059] In some embodiments, see Figure 7As shown on the left, the first preset waveform of the first control stage of step 112 can be a triangular wave or a sawtooth wave, and the first control stage of step 112 can specifically be a sawtooth wave open-loop control stage. Specifically, in the first control stage of step 112, a complete sawtooth wave is generated each time, and the clamping motion component, such as the clamping inertia motor, moves forward one step each time according to the complete sawtooth wave, for example, 1 to 2 μm each time. Exemplarily, for the clamping inertia motor, a short-stroke sawtooth wave with a frequency of 1 kHz can be used for control so that the clamping inertia motor moves 1000 1 to 2 μm per second. In other embodiments, short-stroke sawtooth waves with frequencies such as 500 Hz and 1.2 kHz can also be used to control the clamping inertia motor. The frequency of the sawtooth wave can be adjusted according to actual needs to adjust the moving speed of the clamping end of the clamping member of the clamping motion component, such as the clamping inertia motor.

[0060] In one or more embodiments of the present specification, the second control stage of step 114 specifically includes: when the distance between the current position of the clamping motion component and the preset position does not exceed the first window value: obtaining the current position information of the clamping motion component; processing the current position information and the position information corresponding to the preset position through the first position PID loop to obtain a first control signal, and controlling the clamping motion component based on the first control signal to move it to the preset position.

[0061] In some embodiments, see Figure 7As shown on the right, the second control stage of step 114 is based on the position PID loop. In some embodiments, the current position of the clamping motion component can be obtained by the first position sensor, and compared with the preset position. When the distance between the two does not exceed the first window value, the second control stage begins. Specifically, in the second control stage of step 114, the current position of the clamping motor can be obtained, and the difference between the current position and the preset position of the clamping motor can be obtained. The first control parameter can be obtained by PID calculation, and the first control signal can be obtained according to the first control parameter (for example, the first control parameter can be converted into the first control signal by the driver 130). The clamping motor is driven to run based on the first control signal, and the current position of the clamping motor after running is determined. The difference between the current position and the preset position of the clamping motor after running is obtained, and then the second control parameter is obtained by PID calculation, and the second control signal is obtained according to the second control parameter. The clamping motor is driven to run based on the second control signal, and this cycle is repeated several times until the clamping motor is driven to move to the preset position. Exemplarily, for the clamping inertia motor, it can be determined whether the difference between the current position and the preset position of the clamping end of the clamping member 41 of the clamping inertia motor is greater than 500nm. For example, the current position of the clamping end of the clamping member 41 of the clamping inertia motor is measured, and the difference between the current position and the preset position of the clamping end of the clamping member 41 of the clamping inertia motor is 200nm, which is less than the first window value of 500nm. The difference of 200nm is used as an input parameter, and a first voltage value (which can be understood as the first control parameter is a voltage value) is obtained through PID calculation. The first voltage value is converted into an electrical signal (i.e., a first control signal) suitable for the clamping inertia motor through a driver, and output to the clamping inertia motor to drive the clamping inertia motor to run; multiple cycles are performed in this way until the difference between the current position and the preset position of the clamping end of the clamping member 41 of the clamping inertia motor after running is close to 0nm, and the clamping inertia motor moves to its position. In the above embodiment, the voltage regulation in the second control stage of step 114 based on the position PID loop is relatively accurate and is not affected by the sawtooth wave grid by grid, so the voltage can be adjusted at will.

[0062] In some embodiments, the parameters involved in the PID control calculation include proportion (P), integral (I), and differential (D), among which the proportion (P) acts according to the size of the deviation and plays a role in stabilizing the adjusted parameter in automatic adjustment; the integral (I) acts according to whether the deviation exists and plays a role in eliminating the residual in automatic adjustment; the differential (D) acts according to the speed of the deviation change and plays a role in leading adjustment in automatic adjustment. By adjusting K in PID control p , K i , K dThese three parameters can realize effective control of different systems. In one or more of the above embodiments, some of the three parameters in the PID control can be set to 0, such as K d Set to 0, then PID calculation can be simplified to PI control.

[0063] In some embodiments, in the second control stage of step 114, the preset position may be a preset clamping position of the clamping motion assembly. In some embodiments, the preset position is a position where the clamping end of the clamping mechanism for clamping the inertial motor just contacts the silicon wafer in theoretical design. After reaching the preset position, the clamping end needs to further move toward the substrate material, such as the silicon wafer, and exert a certain clamping force on the silicon wafer to reach the actual clamping position, which is the first target position mentioned above.

[0064] In the process of the motion platform clamping the silicon wafer, the clamping motion component first reaches the preset position to achieve pre-clamping, and then further reaches the first target position to achieve actual clamping. The clamping motion component is controlled by the sawtooth wave of the first preset waveform to quickly approach the preset position. When its distance from the preset position does not exceed the first window value, the position PID loop controls the clamping motion component to accurately reach the preset position. In some embodiments, the first control signal provided by the position PID loop is a calculated voltage signal.

[0065] In some embodiments, the first window value may be 100 nm to 1000 nm, for example, 200 nm to 800 nm, and for example, 300 nm to 600 nm. In some embodiments, the first window value may be 500 nm, and illustratively, the first window value may also be 200 nm, 250 nm, 300 nm, 655 nm, 780 nm, and 800 nm.

[0066] In one or more embodiments of the present specification, the first window value is set based on the measurement accuracy of the first position sensor corresponding to the clamping motion component, wherein the first position sensor is used to output the position information of the clamping motion component. Specifically, in some embodiments, the first position sensor is a grating ruler, and the first window value is 10 to 100 times the grating ruler accuracy, for example, 20 to 90 times the grating ruler accuracy, and another example is 40 to 60 times the grating ruler accuracy. In some embodiments, the first window value can be 50 times the grating ruler accuracy. Exemplarily, the first window value can also be 16 times, 20 times, 25 times, 33 times, 45 times, 60 times, 70 times, 80 times, 92 times, 100 times the grating ruler accuracy.

[0067] In some embodiments, the grating scale accuracy of the clamping platform 2 is 5 nm. In some embodiments, the grating scale accuracy of the first platform 11 and the second platform 12 is 5 nm or 10 nm.

[0068] In the above-mentioned embodiment, the first control stage is used to provide a faster motor operation mode so that the clamping inertia motor can quickly approach the preset position; the second control stage is used to provide a higher precision motor operation mode so that the clamping inertia motor can accurately reach the preset position. The first control stage and the second control stage of the first control mode enable the clamping inertia motor to reach the preset position relatively faster and more accurately.

[0069] For step 120, after the first control mode is ended, one or more clamping motion components simultaneously enter the second control mode, and one or more clamping motion components are controlled in the second control mode to achieve clamping. Since the clamping motion component has moved most of the stroke (i.e., from the first initial position to the preset position) during the first control mode, for example, the clamping motion component has moved 6 cm or 8 cm, the distance that the clamping motion component needs to move to achieve actual clamping (i.e., from the preset position to the first target position) during the second control mode is extremely small, for example, the clamping motion component only needs to move 300 nm or 100 nm, so multiple clamping motion components can achieve a better synchronized and more precise clamping action within the extremely short stroke from the preset position to the first target position.

[0070] See also Figure 5 , Figure 8 As shown, in one or more embodiments of the present specification, the second control mode includes a control mode based on a clamping force feedback signal; the position of the clamping motion component when the clamping force feedback signal meets a preset condition is used as the first target position.

[0071] Wherein, the clamping force feedback signal reflects the clamping force provided by the clamping motion component. In some embodiments, the preset condition includes a preset threshold value of the clamping force, or a threshold force. When the clamping force reflected by the clamping force feedback signal reaches the preset threshold value, it is considered that the clamping force feedback signal meets the preset condition. In some embodiments, the preset condition includes a preset threshold range of the clamping force, or a threshold force range. When the clamping force reflected by the clamping force feedback signal falls within the preset threshold range, it is considered that the clamping force feedback signal meets the preset condition. Specifically, the preset threshold value or the preset threshold range is configured so that when the clamping force reaches the value, the clamping motion component can stably clamp an object such as a substrate material, such as a silicon wafer. In some embodiments, under a test environment, a clamping motion component such as a clamping inertial motor is used to clamp an object such as a silicon wafer, and a transmission motion component such as a first platform and a second platform is driven to move. During the movement of the transmission motion component, the clamping force of the clamping inertial motor is adjusted to make the silicon wafer stable and non-vibrating. The clamping force is set to a preset threshold value, or a preset threshold range is set based on the clamping force.

[0072] For step 120, in one or more embodiments of the present specification, the clamping motion component is controlled to move from a preset position to a first target position through a second control mode to clamp the object to be processed, specifically including: controlling the clamping motion component to move from a preset position based on a third preset waveform; obtaining a clamping force feedback signal; and when it is determined that the clamping force feedback signal meets a preset condition, continuously controlling the clamping motion component based on the waveform value corresponding to the third preset waveform at the current moment.

[0073] In some embodiments, the force applied by the clamping motion assembly to the object is adjusted by the force PID loop, that is, the position of the clamping motion assembly is adjusted at the same time.

[0074] In the process of the motion platform clamping the silicon wafer, the clamping motion component first reaches the preset position to achieve pre-clamping, and then further reaches the first target position to achieve actual clamping. The clamping motion component is controlled to move from the preset position by a third preset waveform, such as a fixed triangular wave, so that the clamping end of the clamping member of the clamping motion component, such as the clamping inertia motor, applies a clamping force to the silicon wafer, and the value of the clamping force is obtained, thereby obtaining a clamping force feedback signal; the value of the clamping force is compared with a preset threshold value, and when the value of the clamping force is not less than the preset threshold value, it is considered that the clamping force feedback signal meets the preset condition, and the actual clamping is achieved, and then the clamping inertia motor is controlled to self-lock to achieve the maintenance of the actual clamping.

[0075] The clamping inertia motor is continuously controlled by maintaining the waveform value corresponding to the third preset waveform at the current moment to achieve self-locking of the clamping inertia motor, thereby achieving the maintenance of the clamping position and the clamping force. In some embodiments, the current moment may be the moment when actual clamping is achieved, the moment when the clamping force feedback signal meets the preset conditions, or the moment when the clamping force value is not less than the preset threshold.

[0076] In some embodiments, a force sensor may be arranged at the clamping end of the clamping member that clamps the inertial motor to obtain a clamping force feedback signal.

[0077] In the force PID loop provided in some embodiments, for example, the clamping inertia motor moves forward one step according to a complete triangle wave to obtain the value of the clamping force. The value of the clamping force is compared with a preset threshold value. If the value of the clamping force is less than the preset threshold value, the loop is performed. If the value of the clamping force is not less than the preset threshold value, the current waveform value of the triangle wave is maintained to maintain the current position of the clamping inertia motor.

[0078] In the force PID loop provided in some embodiments, the current clamping force of the clamping motor can be obtained, and the difference between the current clamping force of the clamping motor and a preset threshold value can be obtained. A third control parameter (such as a third voltage value) can be obtained through PID calculation. A third control signal (such as an electrical signal adapted to the clamping motor obtained by converting the third voltage value through the driver 130) is obtained according to the third control parameter. The clamping motor is driven to operate based on the third control signal, and the current clamping force of the clamping motor after operation is determined to obtain the difference between the current clamping force of the clamping motor after operation and the preset threshold value. A fourth control parameter (such as a fourth voltage value) can be obtained through PID calculation again. A fourth control signal (such as an electrical signal adapted to the clamping motor obtained by converting the fourth voltage value through the driver 130) is obtained according to the fourth control parameter. The clamping motor is driven to operate based on the fourth control signal. The closed loop is cycled several times until the current clamping force of the clamping motor is close to the preset threshold value, or until the current clamping force of the clamping motor falls within the design range near the preset threshold value, or until the current clamping force of the clamping motor falls within the preset threshold range. At this time, the current control signal is maintained to maintain the current position of the clamping inertia motor.

[0079] Similar to the control of the position PID loop, the three parameters K in the control of the force PID loop in one or more of the above embodiments are p , K i , K d The part in can be set to 0, such as K d Set to 0, then PID calculation can be simplified to PI control.

[0080] In step 110, the combination of sawtooth wave open-loop control and position PID closed-loop control can determine whether the clamping inertia motor is in place, but it is difficult to determine the specific clamping situation. In other words, controlling the clamping inertia motor only by position information cannot actually avoid the influence of other factors, such as the deviation between the actual operation and the preset clamping position due to vibration, deformation, the shape of the clamped object or other environmental factors.

[0081] In the embodiments of the above-mentioned steps 110 and 120, by using a combination of a position PID loop and a force PID loop, it is possible to determine whether clamping is performed (for example, whether the first target position in the clamped state is reached) by force feedback rather than by determining whether clamping is performed in place by position feedback alone.

[0082] In step 110, the clamping accuracy of the combination of sawtooth wave open-loop control and position PID closed-loop control ultimately depends on the position closed-loop, that is, whether the clamping inertia motor is in place is used to determine whether the clamping is complete. Due to the error of the silicon wafer, environmental factors, deformation or wear of the clamping end, etc., there may be deviations in the first target position each time the silicon wafer is loaded, so the first target position of the clamping inertia motor needs to be adjusted each time it is loaded. However, since the clamping inertia motors are distributed on both sides and may have multiple or even multiple pairs, there is redundant control of multiple clamping inertia motors, and the first target positions of the clamping inertia motors on both sides will interfere with each other, so it is impossible to implement synchronous adjustment for all the clamping inertia motors. At this time, it is necessary to adjust the first target position of the clamping end of each clamping inertia motor separately and independently, resulting in a very slow overall adjustment process of the clamping stability using the position PID loop alone.

[0083] When judging whether the adjustment is in place through the force PID loop in step 120, there is no need to consider the specific position of the first target position in space (for example, the position obtained based on the edge of the clamped object measured by the grating ruler), nor is there any need to consider that the clamping inertia motor needs to run several complete preset waveforms before reaching the first target position. It is only necessary to consider whether the clamping force reaches the preset threshold. The clamping force value can only be obtained after the clamping inertia motors on both sides are in actual contact with the substrate material, such as a silicon wafer. The clamping force feedback signals driving the clamping inertia motors meet the preset conditions (for example, the clamping force values ​​provided by all clamping inertia motors are not less than the preset threshold), and it can be considered that all the clamping inertia motors are in a clamped state and have reached the first target position. Therefore, the overall adjustment process of the clamping stability using the force PID loop is faster than using the position PID loop alone.

[0084] On the other hand, if the position PID loop in step 110 is used alone to adjust the clamping position of the clamping inertia motor, the clamping inertia motor may exceed the in-place position during the adjustment process, pushing the silicon wafer off; or several clamping inertia motors clamp the silicon wafer, while another clamping inertia motor produces virtual clamping. If the force PID loop in step 120 is used to adjust the clamping position of the clamping inertia motor, it can ensure that all motors apply clamping force to the silicon wafer, avoiding the virtual clamping situation; and because the clamping force feedback signal of each clamping inertia motor meets the preset conditions, the clamping inertia motor will not exceed the in-place position.

[0085] In the embodiment of step 100 described above, a technical solution combining sawtooth wave open-loop control (step 112), position PID closed-loop control (step 114) and force PID closed-loop control (step 120) is adopted. After the clamping inertia motor reaches the preset position, the force PID closed-loop control is used to enable the multiple clamping inertia motors to contact the substrate material such as a silicon wafer as synchronously as possible, so that the multiple clamping inertia motors can obtain force feedback as synchronously as possible, and the multiple clamping inertia motors can be synchronously controlled, which can avoid excessive pushing or virtual clamping of a clamping inertia motor. In this embodiment, in the stage of the first control mode, there is no synchronization requirement for the control method of the multiple clamping inertia motors. They can adopt synchronous control or asynchronous control, and only need to reach the preset position, thereby reducing the control difficulty and reducing the possibility of other factors interfering with motion control. After reaching the preset position, the multiple clamping inertia motors simultaneously perform clamping control of the second control mode. Due to the extremely short stroke from the preset position to the first target position, the multiple clamping inertia motors simultaneously move in the clamping direction and are in place synchronously. The multi-axis linkage and synchronization are good, which prevents the occurrence of clamping eccentricity and ensures accurate positioning.

[0086] In one or more embodiments of the present specification, step 200: control the conveying motion component to move the clamping motion component and the processed object to the processed position. For example, the conveying motion component is controlled to move to the second target position through the first control mode. Exemplarily, the X-axis conveying inertial motor 31 and the Y-axis conveying inertial motor 32 are controlled through the first control mode, so that the X-axis mover 312 of the X-axis conveying inertial motor 31 and the Y-axis mover 322 of the Y-axis conveying inertial motor 32 move individually or in coordination, so that the Y-axis mover 322 of the Y-axis conveying inertial motor 32 and the clamping platform 2 arrive at the second target position.

[0087] In one or more embodiments of this specification, see Fig. 9 As shown, step 200 includes step 210 and step 220 .

[0088] In one or more embodiments of the present specification, step 210: control the transmission motion component to start moving from the second initial position based on the second preset waveform. Step 220: when the distance between the current position of the transmission motion component and the second target position does not exceed the second window value: obtain the current position information of the transmission motion component; process the current position information and the position information corresponding to the second target position through the second position PID loop to obtain a second control signal, and control the transmission motion component based on the second control signal to move it to the second target position.

[0089] For step 210 and step 220, the first control mode for controlling the transmission motion component is similar to the first control mode for controlling the clamping motion component, so it is not repeated. The second preset waveform can be the sawtooth wave mentioned above, the second target position is the position required for the transmission motion component to reach, and the second position PID loop is the position PID loop mentioned above.

[0090] For example, for the transmission motion component, such as the X-axis transmission inertial motor 31 or the Y-axis transmission inertial motor 32, a long-stroke sawtooth wave with a frequency of 4kHz is used for control, so that the X-axis transmission inertial motor 31 or the Y-axis transmission inertial motor 32 moves 4000 1-2μm per second. In other embodiments, a long-stroke sawtooth wave with a frequency of 3kHz, 5.5kHz, etc. can also be used to control the X-axis transmission inertial motor 31 or the Y-axis transmission inertial motor 32. In other embodiments, a high-frequency long-stroke sawtooth wave of more than 10kHz can also be used to control the X-axis transmission inertial motor 31 or the Y-axis transmission inertial motor 32.

[0091] Taking the X-axis transmission inertia motor and the Y-axis transmission inertia motor as examples, the formula of their position PID loop is as follows.

[0092] .

[0093] V out Indicates the final output voltage result value (0~65535).

[0094] Q is the preset voltage constant, Q can be set to 30000.

[0095] K p Represents the proportional coefficient in PID, with a reference range of (0.3, 3).

[0096] PE is the position difference between the second target position and the current position.

[0097] K i Indicates the integral proportional coefficient in PID, with a reference range of (50, 500).

[0098] PE Inc Represents the cumulative position error, which is the sum of the PE values.

[0099] dt represents the unit time constant. The reference quantity is related to the response frequency and the reference number is 1ms.

[0100] In some embodiments, the formula of the position PID loop of the X-axis transmission inertial motor and the Y-axis transmission inertial motor is also applicable to the first position PID loop for controlling the movement of the clamping motion component such as the clamping inertial motor. Specifically, in the formula of the position PID loop of the clamping motion component such as the clamping inertial motor, the preset voltage constant, K p , Ki Adjust according to actual needs, PE is the position difference between the first target position and the current position.

[0101] In some embodiments, after the clamping motion component of the motion platform, such as the clamping platform, clamps the silicon wafer, the transport motion component, such as the first platform or the second platform, moves the silicon wafer to the exposure position and adjusts the position of the exposure area of ​​the silicon wafer during the exposure process. In some embodiments, the exposure position or the position that the exposure area needs to reach during the exposure process can be selected as the second target position.

[0102] In one or more embodiments of the present specification, the second window value is set based on the measurement accuracy of the second position sensor corresponding to the transmission motion component. Specifically, in some embodiments, the second window value can be 50nm~1000nm, for example, 100nm~800nm, and another example is 250~650nm. In some embodiments, the second window value can be 500nm. For example, the second window value can also be 55nm, 120nm, 200nm, 250nm, 300nm, 655nm, 780nm, 800nm, 980nm. In some embodiments, the second position sensor is a grating ruler, and the second window value is 10~100 times the grating ruler accuracy, for example, 20~90 times the grating ruler accuracy, and another example is 40~60 times the grating ruler accuracy. In some embodiments, the second window value can be 50 times the grating ruler accuracy. For example, the second window value can also be 16 times, 20 times, 25 times, 33 times, 45 times, 60 times, 70 times, 80 times, 92 times, 100 times the grating ruler accuracy.

[0103] In some embodiments, the grating scale accuracy of the first platform and the second platform is 5nm or 10nm.

[0104] In one or more embodiments of this specification, see Fig.10 As shown, step 210 may also include: obtaining the current speed information of the transmission motion component; processing the current speed information and the target speed through a speed PID loop to obtain a frequency value; setting the frequency of a second preset waveform based on the frequency value; and controlling the movement of the transmission motion component based on the second preset waveform after the frequency is set.

[0105] In the process of the conveying motion components such as the first platform 11, the second platform 12 or the X-axis conveying inertial motor 31 and the Y-axis conveying inertial motor 32 of the first platform 11 and the second platform 12 moving from the second initial position to the second target position, a high uniform speed requirement is required. Therefore, a speed PID loop is added to make the current speed of the conveying inertial motor close to the target speed, thereby achieving a stable speed.

[0106] The current speed information includes the current speed of the transmission motion component. In some embodiments, the current speed information also includes the current acceleration of the transmission motion component.

[0107] In some embodiments, specifically, a preset frequency is used to drive the transmission inertia motor to generate displacement, the position information change of the transmission inertia motor is obtained within the first time, the current speed and current acceleration of the transmission inertia motor are calculated, and the motor waveform frequency is adjusted through a speed PID loop, so that the current speed of the transmission inertia motor is close to the target speed.

[0108] In some embodiments, more specifically, the target speed is determined to be 1 mm / s and the target acceleration is determined to be 1 mm / s. 2 The preset frequency is 200Hz, driving the transmission inertia motor to generate displacement, obtaining the position information change of the transmission inertia motor in the first time, and calculating the current speed of the transmission inertia motor to be 0.2mm / s. The motor waveform frequency is adjusted through the speed PID loop, and the motor waveform frequency is increased to 600Hz. The position information change of the transmission inertia motor is obtained in the second time, and the current speed of the transmission inertia motor is calculated to be 0.5mm / s. The cycle is repeated until the current speed of the transmission inertia motor reaches 1mm / s, which is equal to the target speed.

[0109] In some embodiments, similarly, during deceleration, the target speed is determined to be 0.2 mm / s and the target acceleration is determined to be 1 mm / s. 2 . The position information change of the transmission inertia motor is obtained within the third time, and the current speed of the transmission inertia motor is calculated to be 1 mm / s. The motor waveform frequency is adjusted through the speed PID loop to reduce the motor waveform frequency to 600 Hz. The position information change of the transmission inertia motor is obtained within the fourth time, and the current speed of the transmission inertia motor is calculated to be 0.5 mm / s. The cycle is repeated until the current speed of the transmission inertia motor reaches 0.2 mm / s, which is equal to the target speed.

[0110] In the above embodiment, the position information change of the transmission inertia motor is obtained by the grating ruler. In some embodiments, the average speed of the transmission inertia motor within the time range is calculated by the position information change and the time taken for the position information change to occur. In some embodiments, the position change of the transmission inertia motor is obtained within a unit time to calculate the current speed of the transmission inertia motor. In some embodiments, the acceleration of the transmission inertia motor is calculated by the difference between the current speed of the transmission inertia motor and the time taken for the speed difference to occur.

[0111] In the above embodiment, during the acceleration or deceleration process, the current acceleration of the transmission inertia motor is maintained at the target acceleration through the speed PID loop; during the uniform speed process, the current speed of the transmission inertia motor is maintained at the target speed through the speed PID loop. This reduces the momentum generated by the acceleration of the first platform and the second platform transmitted to the clamping platform. Through speed control, the disturbance and acceleration effects of the first platform and the second platform on the clamping platform can be effectively reduced.

[0112] Taking the X-axis transmission inertia motor 31 and the Y-axis transmission inertia motor 32 as examples, the formula of the speed PID loop is as follows.

[0113] .

[0114] f out Refers to the output waveform frequency, which directly affects the motor speed.

[0115] M represents the preset frequency constant, and M can be set to 200.

[0116] K p Represents the proportional coefficient in PID, with a reference range of (0.1, 4).

[0117] PE is the difference between the current speed and the target speed.

[0118] K i Indicates the integral proportional coefficient in PID, with a reference range of (1, 30).

[0119] dt is the unit time constant, and the reference value is 200us.

[0120] In the above-described embodiment, the speed PID loop makes the current speed of the transfer inertia motor approach the target speed, thereby achieving a stable speed.

[0121] It should be noted that after the clamping motion component of the motion platform, such as the clamping platform, clamps the silicon wafer, the clamping motion component of the motion platform closes the position PID loop, and only clamps and holds the silicon wafer through the self-locking force of the inertial motor of the clamping motion component. The self-locking characteristics of the inertial motor reduce or offset the vibration effect of the transport motion components, such as the first platform and the second platform, on the silicon wafer. At the same time, the first platform and the second platform control their own movement speed through the speed PID loop, so that the overall movement process is in a low acceleration state, reducing the impact of acceleration on the clamping platform. In this state, the position of the exposure area of ​​the silicon wafer is adjusted during the exposure process.

[0122] It should be noted that after the clamping motion component clamps the silicon wafer, if the clamping motion component continues to use the force PID loop during the movement of the conveying motion component, at least the following problems will arise. For example, since the clamping end of the clamping motion component is not completely rigid or is relatively flexible, there is acceleration during the movement of the conveying motion component. When acceleration occurs, the clamping motion component will generate displacement from the current position (i.e., the first target position) due to the deformation of the clamping end caused by the acceleration and the motor drive mechanism transmitting the acceleration force to the motor mover. For example, if there is an acceleration to the right, the entire silicon wafer will move to the right, and the clamping motion component on the right side will be subject to an increase in the force to the right, resulting in a displacement to the right, while the force to the right provided by the clamping motion component on the left side will decrease. At this time, based on the adjustment of the force PID loop, the clamping motion component on the right side, such as the clamping inertia motor, will compensate the voltage. At this time, the output of the clamping inertia motor on the left side will decrease or not output, and the output of the clamping inertia motor on the right side will increase. Based on the adjustment of the clamping inertia motors on both sides by the force PID loop, the silicon wafer will move to the left and deviate from the target position. At this time, the clamping inertia motor on the left side will also react to this and output to the right, eventually forming the clamping inertia motors on the left and right sides to push against each other, making the silicon wafer unstable and causing the entire clamping platform to vibrate. Therefore, for the retention of the silicon wafer after clamping, this embodiment adopts the self-locking method of the clamping inertia motor instead of the force PID loop.

[0123] In one or more embodiments of the present specification, step 300: control the clamping motion component to separate from the object to be processed. Exemplarily, the clamping end of the clamping member on the clamping inertial motor on the clamping platform is controlled to move from the first target position to a third target position between the first initial position and the first target position. For example, the clamping motion component, such as the mover of the clamping inertial motor, moves away from the clamped object, such as a silicon wafer, to achieve the release of the silicon wafer.

[0124] In one or more embodiments of the present specification, before the clamping motion component implements clamping, it is also necessary to move the clamping motion component to a suitable position through the transmission motion component. During this movement, the clamping motion component is in a no-load state. At this time, the clamping motion component is easily affected by the vibration generated by the displacement, causing its position in the no-load state to be in an uncertain state, affecting the initial position during the clamping process. In order to solve this problem, when the transmission motion component moves and the clamping motion component does not clamp the object to be processed: obtain the current position information of the clamping motion component; process the current position information through the third position PID loop to obtain a third control signal, and control the clamping motion component based on the third control signal to maintain it in the current position. Among them, the third position PID loop can refer to the aforementioned second position PID loop.

[0125] Specifically, when multiple clamping motion components of the clamping platform, such as the clamping inertia motor, are separated from the processed object and are in an unloaded state, and when the conveying motion component moves, the clamping inertia motor is stably maintained at the current position. Exemplarily, when the first platform 11 and the second platform 12 in the conveying motion component move, the clamping motor 21 on the clamping platform 2 is in a PID closed loop state, and a small correction is performed through PI calculation to stably maintain a position when the clamping motor 21 is released.

[0126] For example, when multiple clamping inertia motors of the clamping platform are separated from the processed object, for each clamping inertia motor, it is assumed that it is in the first current position. During the movement of the transmitting inertia motor, the clamping inertia motor is displaced due to the movement or vibration of the clamping platform. It is assumed that the clamping inertia motor is offset from the first current position that should be maintained to the second current position after being vibrated. The current voltage information is obtained, the second current position information is obtained, and the difference between the second current position information and the first current position information is obtained. The PI calculation is performed through the third position PID loop to obtain the voltage change. The transmitting inertia motor is driven to operate according to the current voltage information and the voltage change to return to the first current position.

[0127] In one or more embodiments of the present specification, when the clamping motion component is clamping, if the transmission motion component moves synchronously, mutual interference is likely to occur, causing the displacement accuracy of the clamping motion component and the transmission motion component to decrease. In order to solve this problem, when the clamping motion component is controlled to move from a preset position to a first target position to clamp the object to be processed by the second control mode: the current position information of the transmission motion component is obtained; the current position information is processed by the fourth position PID loop to obtain a fourth control signal, and the transmission motion component is controlled based on the fourth control signal to maintain it at the current position. Among them, the fourth position PID loop can refer to the aforementioned first position PID loop or second position PID loop.

[0128] Specifically, when the multiple clamping inertia motors of the clamping platform move, the transmission inertia motor is stably maintained at the current position to prevent the movement of the transmission inertia motor from interfering with the clamping work of the clamping inertia motor.

[0129] For example, during the movement of the clamping inertia motor, the transmitting inertia motor is displaced due to the movement or vibration of the clamping platform. It is assumed that the transmitting inertia motor is offset from the first current position that should be maintained to the second current position after being vibrated, and its current voltage information is obtained, and its second current position information is obtained. The difference between the second current position information and the first current position information is obtained, and PI calculation is performed through the fourth position PID loop to obtain the voltage change. The transmitting inertia motor is driven to operate according to the current voltage information and the voltage change, so that it returns to the first current position.

[0130] In one or more embodiments of the present specification, the clamping motion assembly includes more than two clamping inertia motors. In some embodiments, it includes more than two clamping inertia motors arranged in parallel. For example, it includes two inertia motors arranged in parallel, the two clamping inertia motors are respectively located on both sides of the clamping platform, and the two clamping inertia motors are located on the same axis. For another example, it includes four parallel clamping inertia motors arranged in parallel, wherein two clamping inertia motors are located on one side of the clamping platform, and the other two clamping inertia motors are located on the other side of the clamping platform, and the clamping inertia motors on both sides of the clamping platform are opposite to each other and are respectively located on two axes. In some embodiments, it includes more than two clamping inertia motors arranged in parallel, wherein the more than two clamping inertia motors are all located on the same side of the clamping platform, and a baffle is correspondingly provided on the other side of the clamping platform.

[0131] In some embodiments, the first control mode can be used to control more than two clamping inertia motors to move to a preset position between a first initial position and a first target position. After the two or more clamping inertia motors reach the preset position, the second control mode can be used to control more than two clamping inertia motors to move from the preset position to the first target position to clamp the object to be processed. Exemplarily, the clamping motion assembly includes four clamping inertia motors. The four clamping inertia motors are first controlled synchronously or asynchronously through the first control mode to move to preset positions between their respective first initial positions and their respective first target positions. After the four clamping inertia motors reach their respective preset positions, the four clamping inertia motors are then controlled synchronously or asynchronously through the second control mode to move from their respective preset positions to their respective first target positions. Among them, synchronization can be understood as sending control signals to all clamping inertia motors at the same time so that all clamping inertia motors run synchronously; or it can be understood as sending control signals with a preset relationship to multiple clamping inertia motors (such as control signals corresponding to different clamping inertia motors can have a preset phase difference, or the phase difference between different control signals does not exceed a set threshold) so that all clamping inertia motors can run synchronously.

[0132] In some embodiments, two or more clamping inertia motors can be independently controlled by the first control mode, and two or more clamping inertia motors can be synchronously controlled by the second control mode. In some embodiments, the computing device 140 can instruct the driver 130 to send control signals to all clamping inertia motors at the same time, so that all clamping inertia motors run synchronously. In some embodiments, the computing device 140 can instruct the driver 130 to send control signals with a preset relationship to multiple clamping inertia motors (such as control signals corresponding to different clamping inertia motors can have a preset phase difference, or the phase difference between different control signals does not exceed a set threshold), so that all clamping inertia motors can run synchronously. Since all clamping inertia motors run and act synchronously, all clamping inertia motors can basically contact the edge of the clamped object synchronously, preventing the clamped object from moving due to the relationship between the forces on both sides. The synchronous output of all clamping inertia motors also provides better clamping stability.

[0133] In one or more embodiments of the present specification, the transmission motion component includes more than two transmission inertial motors with orthogonal motion directions. For example, it includes an X-axis transmission inertial motor and a Y-axis transmission inertial motor orthogonal to the X-axis. For another example, it includes two X-axis transmission inertial motors and a Y-axis transmission inertial motor orthogonal to the X-axis. In some embodiments, more X-axis transmission inertial motors and Y-axis transmission inertial motors may be arranged.

[0134] In the above embodiment, two or more transmission inertia motors are independently controlled through the first control mode.

[0135] In one or more embodiments of the present specification, a host computer for issuing instructions may also be included, such as a PC, PLC, etc. Exemplarily, the host computer issues instructions through RS485 to communicate to control the controller. After receiving the instructions, the controller performs the aforementioned voltage output. While outputting the voltage, the controller also receives signals from position sensors such as photoelectric sensors and grating rulers to obtain position information of a transmission motion component such as a transmission inertial motor, or a clamping motion component such as a clamping inertial motor, and performs closed-loop control on the transmission inertial motor and the clamping inertial motor.

[0136] In one or more embodiments of the present specification, a computer program product is also provided, including computer instructions or computer codes, which can implement the above-mentioned motion control method when at least part of the computer instructions or computer codes are executed by a processor. In some embodiments, the computer program product may only involve computer instructions or computer codes, which may be carried by a storage medium or a processing device. In other embodiments, the computer program product may also be a storage medium or a processing device containing the aforementioned computer instructions or computer codes. The processing device may include one or more processors, and a storage medium.

[0137] In some embodiments, the processor may be a combination of one or more of the following processors: a central processing unit (CPU), an application specific integrated circuit (ASIC), an application specific instruction set processor (ASIP), a graphics processing unit (GPU), a physical processing unit (PPU), a digital signal processor (DSP), a field programmable gate array (FPGA), a programmable logic device (PLD), a programmable logic controller (PLC), a reduced instruction set computer (RISC), and a microprocessor.

[0138] In some embodiments, the storage medium may include a combination of one or more of the following: a mass storage, a removable storage, a volatile read-write memory, and a read-only memory (ROM). Exemplary mass storage may include a magnetic disk, an optical disk, a solid-state hard disk, and the like. Exemplary removable storage may include a flash disk, a floppy disk, an optical disk, a memory card, a compressed hard disk, a magnetic tape, and the like. Exemplary volatile read-write memory may include a random access memory (RAM). Exemplary random access memory may include a dynamic random access memory (DRAM), a double data rate synchronous dynamic random access memory (DDRSDRAM), a static random access memory (SRAM), a thyristor random access memory (T-RAM), and a zero capacitance memory (Z-RAM), and the like. Exemplary read-only memory may include a masked read-only memory (MROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), a compact disk read-only memory (CD-ROM), and a digital multifunction hard disk read-only memory, and the like.

[0139] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are taught in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A motion control method, characterized in that: include: Controlling the clamping motion component to move to a preset position between a first initial position and a first target position through a first control mode, and controlling the clamping motion component to move from the preset position to the first target position through a second control mode to clamp the object to be processed; Control the conveying motion component to move to a second target position through the first control mode; Wherein, the clamping motion component is arranged on the conveying motion component; The first control mode includes a first control stage based on a preset waveform and a second control stage based on a position PID loop; The second control mode includes a control mode based on a clamping force feedback signal; the position of the clamping motion component when the clamping force feedback signal meets a preset condition is used as the first target position; the clamping force feedback signal reflects the clamping force of the clamping motion component; The controlling the clamping motion component to move to a preset position between a first initial position and a first target position through a first control mode includes: controlling the clamping motion component to move from the first initial position based on a first preset waveform; when the distance between the current position of the clamping motion component and the preset position does not exceed a first window value: obtaining the current position information of the clamping motion component; processing the current position information and the position information corresponding to the preset position through a first position PID loop to obtain a first control signal, and controlling the clamping motion component based on the first control signal to move it to the preset position; The first window value is set based on a measurement accuracy of a first position sensor corresponding to the clamping motion assembly.

2. The method according to claim 1, characterized in that The controlling the conveying motion component to move to the second target position through the first control mode includes: Controlling the conveying motion component to move from a second initial position based on a second preset waveform; When the distance between the current position of the transmission motion component and the second target position does not exceed the second window value: obtain the current position information of the transmission motion component; process the current position information and the position information corresponding to the second target position through the second position PID loop to obtain a second control signal, and control the transmission motion component based on the second control signal to move it to the second target position.

3. The method according to claim 2, characterized in that The second window value is set based on a measurement accuracy of a second position sensor corresponding to the transmission motion component.

4. The method according to claim 2, characterized in that: The controlling the conveying motion component to move from the second initial position based on the second preset waveform further includes: Obtaining current speed information of the transmission motion component; Processing the current speed information and the target speed through a speed PID loop to obtain a frequency value; Setting the frequency of the second preset waveform based on the frequency value; The movement of the transmission motion component is controlled based on the second preset waveform after the frequency is set.

5. The method according to claim 1, characterized in that The controlling the clamping motion component to move from the preset position to the first target position through the second control mode to clamp the object to be processed includes: Controlling the clamping motion component to move from the preset position based on a third preset waveform; Acquiring the clamping force feedback signal; When it is determined that the clamping force feedback signal satisfies the preset condition, the clamping motion component is continuously controlled based on the waveform value corresponding to the third preset waveform at the current moment.

6. The method according to claim 1, characterized in that Also includes: When the conveying motion component is moving and the clamping motion component does not clamp the object to be processed: obtaining current position information of the clamping motion component; The current position information is processed through a third position PID loop to obtain a third control signal, and the clamping motion component is controlled based on the third control signal to maintain it at the current position.

7. The method according to claim 1, characterized in that Also includes: When the clamping motion component is controlled to move from the preset position to the first target position to clamp the object to be processed by the second control mode: obtaining current position information of the conveying motion component; The current position information is processed by a fourth position PID loop to obtain a fourth control signal, and the transport motion component is controlled based on the fourth control signal to maintain the transport motion component at the current position.

8. The method according to claim 1, characterized in that The clamping motion assembly includes more than two clamping inertia motors; The method of controlling the clamping motion component to move to a preset position between a first initial position and a first target position by a first control mode, and controlling the clamping motion component to move from the preset position to the first target position by a second control mode to clamp the object to be processed comprises: After the two or more clamping inertia motors arrive at the preset position, the two or more clamping inertia motors are controlled by the second control mode to move from the preset position to the first target position to clamp the object to be processed.

9. The method according to claim 1 or 8, characterized in that: The clamping motion assembly includes more than two clamping inertia motors; The method of controlling the clamping motion component to move to a preset position between a first initial position and a first target position by a first control mode, and controlling the clamping motion component to move from the preset position to the first target position by a second control mode to clamp the object to be processed comprises: The two or more clamping inertia motors are independently controlled by the first control mode respectively; The two or more clamping inertia motors are synchronously controlled through the second control mode.

10. The method according to claim 1, characterized in that The transmission motion assembly includes two or more transmission inertial motors with orthogonal motion directions; The controlling the conveying motion component to move to the second target position through the first control mode includes: The two or more transmission inertia motors are independently controlled through the first control mode.

11. A computer program product, comprising computer instructions or computer codes, which, when at least part of the computer instructions or the computer codes are executed by a processor, can implement the method according to any one of claims 1 to 10.

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