Lamp tube heating sealing structure, lamp tube heating device and semiconductor processing equipment

Abstract

The present invention discloses a sealing structure for lamp tube heating, a lamp tube heating device and semiconductor processing equipment, wherein the sealing structure for lamp tube heating comprises: a cavity, provided with a protrusion, the protrusion is provided with a mounting hole, the mounting hole comprises a first inner hole and a second inner hole which are adjacently arranged and have increasing inner diameters; a sleeve, provided in the first inner hole; a lamp tube, the sleeve is sleeved on the outer peripheral side of the lamp tube so that the lamp tube is located in the inner cavity of the sleeve; a sealing member, provided in the second inner hole; a pressing sleeve, the sealing member is pressed between the pressing sleeve, the sleeve and the protrusion, the cavity and the pressing sleeve are provided with a connected second cooling air duct; the first cooling air duct, the inner cavity is a part of the first cooling air duct and is connected to the second cooling air duct. The present invention can not only ensure that the sealing structure realizes effective vacuum sealing, but also make the temperature at the position of the sealing member within its tolerable range, can effectively cool and dissipate the heat of the sealing member, protect the sealing member from being damaged by high temperature, and improve its service life.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a sealing structure for lamp tube heating, a lamp tube heating device and semiconductor processing equipment. Background Art

[0002] Rapid Thermal Processing (RTP) equipment is one of the key equipment in semiconductor device production. It is used to perform rapid thermal processing on semiconductor wafers to obtain semiconductor wafer materials with better performance. This process is usually carried out in a highly vacuum reaction chamber to ensure the purity and stability of the processing environment and avoid the impact of impurities on wafer quality.

[0003] However, in the design and manufacture of rapid thermal processing equipment, the sealing problem in high temperature environment has always been one of the technical difficulties. Especially when the reaction chamber needs to maintain a high vacuum state for precision processing, the requirements for sealing materials and their structures are more stringent. Since general materials have limited tolerance to temperature, and materials with good high temperature resistance, such as metal materials, have high hardness characteristics that limit their application in complex installation structures, and are difficult to be compatible with brittle materials such as quartz, which is particularly disadvantageous in the semiconductor manufacturing process.

[0004] Rubber materials are considered for use in sealing structures due to their good flexibility and compatibility with brittle materials. However, the high temperature resistance of existing rubber materials is generally limited, and the maximum tolerance temperature is usually no more than 300°C, which is much lower than the temperature of the reactants inside the cavity during rapid thermal processing (such as 1200°C). If rubber materials are directly used as sealing structures in rapid thermal processing equipment, the high temperature inside the cavity will cause the material to age and fail rapidly, greatly shortening the service life of the sealing structure. Summary of the invention

[0005] In order to solve the above problems, the present invention provides a sealing structure for lamp tube heating, a lamp tube heating device and semiconductor processing equipment. The present invention can not only ensure that the sealing structure achieves effective vacuum sealing, but also make the temperature at the sealing position within its tolerable range, and can effectively cool and dissipate the heat of the sealing part, protect the sealing part from being damaged by high temperature, and increase its service life.

[0006] In a first aspect, the present invention provides a sealing structure for lamp tube heating, comprising:

[0007] The cavity is provided with a protrusion, the protrusion is provided with a mounting hole, and the mounting hole includes a first inner hole and a second inner hole which are adjacently arranged and have increasing inner diameters;

[0008] a sleeve, disposed in the first inner hole;

[0009] A lamp tube, wherein the sleeve is sleeved on the outer peripheral side of the lamp tube so that the lamp tube is located in the inner cavity of the sleeve;

[0010] A sealing member, disposed in the second inner hole;

[0011] A pressing sleeve, wherein the sealing member is pressed between the pressing sleeve, the sleeve and the protruding portion, and the cavity and the pressing sleeve are provided with a second cooling air duct in communication;

[0012] The first cooling air duct, the inner cavity is a part of the first cooling air duct and is communicated with the second cooling air duct.

[0013] In one embodiment of the present invention, a heat radiation shielding coating is provided on the inner wall of the sleeve close to the sealing element.

[0014] In one embodiment of the present invention, the second cooling air duct includes a first channel arranged in the cavity and / or the protrusion, and a second channel arranged in the pressing sleeve, the first channel, the second channel and the inner cavity are connected, and the first channel is connected to an air intake hole for air intake.

[0015] In one embodiment of the present invention, the press sleeve includes a first annular portion and a second annular portion which are adjacently arranged and have decreasing inner diameters, the first annular portion is sleeved on the outer peripheral side of the sleeve and abuts against the seal, and the second annular portion is used to axially limit the sleeve; a plurality of second channels are circumferentially arranged on the second annular portion.

[0016] In one embodiment of the present invention, the mounting hole also includes a third inner hole arranged adjacent to the second inner hole, the third inner hole is a tapered hole with an inner diameter decreasing toward the second inner hole, the seal is installed in the second inner hole through the third inner hole; the first channel is connected to the second channel through the third inner hole.

[0017] In one embodiment of the present invention, the mounting hole further comprises a connecting inner hole arranged adjacent to the third inner hole, a rotating sleeve is detachably connected to the connecting inner hole, and the rotating sleeve abuts against the pressing sleeve.

[0018] In one embodiment of the present invention, the port of the sleeve is open, one end of which is the air inlet of the first cooling air duct, and the other end is the air outlet of the first cooling air duct, so that the inner cavity becomes a part of the first cooling air duct.

[0019] In one embodiment of the present invention, it also includes cooling water channels arranged in the cavity, and the cooling water channels are arranged vertically and horizontally to form a plurality of branches.

[0020] In a second aspect, the present invention provides a lamp tube heating device, comprising the sealing structure for lamp tube heating.

[0021] In a third aspect, the present invention provides semiconductor processing equipment, including the sealing structure for lamp tube heating or the lamp tube heating device.

[0022] Beneficial effects of the present invention:

[0023] The sealing structure, lamp tube heating device and semiconductor processing equipment provided by the present invention can ensure that the sealing structure realizes effective vacuum sealing, and can make the temperature at the position of the seal within its tolerable range, and can effectively cool and dissipate the heat of the seal, ensuring that the seal is not damaged by high temperature. First, the present invention is provided with a thermal radiation shielding coating on the inner wall of the sleeve near the seal, and the thermal radiation shielding coating can block and reflect part of the infrared light thermal radiation emitted by the lamp tube, thereby reducing the energy of the thermal radiation reaching the seal, reducing the thermal radiation suffered by the seal, thereby reducing the temperature of the seal, and protecting the seal from being damaged by high temperature; secondly, the cavity and the pressing sleeve in contact with the seal of the present invention are made of materials with high thermal conductivity, and cooperate to reduce the temperature of the contact surface to increase the amount of heat conduction, conduct the heat of the seal as soon as possible, and improve its cooling and heat dissipation effect. Specifically, the present invention presses the seal between the pressing sleeve, the sleeve and the protrusion, and sets two cooling air ducts: the first cooling air duct and the second cooling air duct. For the first cooling air duct: the present invention covers the lamp tube with a sleeve, so that the lamp tube is located in the inner cavity of the sleeve, and cooling gas is introduced into the inner cavity to form a first cooling air duct to quickly cool the sleeve, the lamp tube and the seal, thereby improving the cooling rate, avoiding damage caused by overheating of the lamp tube, protecting the seal from damage by high temperature, and thus ensuring the high vacuum sealing function of the seal, greatly increasing the service life of the equipment and production safety; For the second cooling air duct: the present invention opens a plurality of second channels in the circumference of the pressing sleeve, and cooperates with the first channel set in the cavity and / or the protrusion to form a second cooling air duct, and the low-temperature compressed air flows through the pressing sleeve through the first channel, the third inner hole, and a plurality of second channels of the second cooling air duct in turn, thereby taking away the heat of the pressing sleeve, achieving effective cooling of the pressing sleeve, and then reducing the temperature of the contact surface between the pressing sleeve and the seal, achieving further cooling of the seal, and improving the cooling and heat dissipation effect of the seal. In addition, the compression sleeve can be made of metal material, which has good thermal conductivity. In conjunction with the second cooling air duct, the temperature of the contact surface between the compression sleeve and the seal can be quickly reduced, further improving the cooling and heat dissipation effect of the seal. Secondly, the present invention sets cooling water channels in the cavity that are distributed in a vertical and horizontal cross-linked manner. The cooling water flows in several branches in the cooling water channels, which can quickly dissipate heat and reduce the temperature of the cavity. In conjunction with the metal material selected for the cavity, continuous cooling and heat dissipation can be achieved, and the temperature of the two contact surfaces between the seal and the protrusion can be quickly reduced, further improving the cooling and heat dissipation effect of the seal. Finally, the spiral assembly and compression method of the rotating sleeve provided by the present invention occupies little space and can ensure the tight arrangement of the lamp tubes. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional diagram of a sealing structure for heating a lamp tube provided in an embodiment of the present invention.

[0025] Figure 2A cross-sectional view of a sealing structure for heating a lamp tube provided by an embodiment of the present invention.

[0026] Figure 3 for Figure 2 A partial enlarged view of middle A.

[0027] Figure 4 for Figure 3 Schematic diagram of the structure of the mounting holes.

[0028] Figure 5 This is a schematic diagram of the assembly of the seal, the pressing sleeve, and the rotating sleeve provided in an embodiment of the present invention.

[0029] Figure 6 A cross-sectional view of a compression sleeve provided in an embodiment of the present invention.

[0030] Figure 7 This is a schematic diagram of the structure of the cooling water channel inside the cavity provided by an embodiment of the present invention.

[0031] In the figure: 1. cavity; 11. air inlet; 2. raised portion; 21. mounting hole; 211. first inner hole; 212. second inner hole; 213. third inner hole; 214. connecting inner hole; 22. first cooling air duct; 3. cooling water channel; 31. branch channel; 32. plugging piece; 4. sleeve; 41. inner cavity; 5. sealing piece; 6. lamp tube; 7. pressing sleeve; 71. first annular portion; 72. second annular portion; 8. rotating sleeve; 81. through hole; 9. second cooling air duct; 91. first channel; 92. second channel; 10. thermal radiation shielding coating. DETAILED DESCRIPTION

[0032] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] The embodiments of the present application provide a sealing structure for lamp tube heating, a lamp tube heating device and semiconductor processing equipment. The lamp tube heating device can heat the reaction chamber in the semiconductor processing technology. The sealing structure for lamp tube heating can be used in the reaction chamber of RTP equipment, and can also be used in the reaction chamber of semiconductor processing equipment such as ALD equipment, CVD equipment and PVD equipment, and can also be used in reaction chambers that need to be heated in other processes.

[0036] Please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 The present application provides a sealing structure for lamp tube heating, which in some embodiments includes a cavity 1, wherein the cavity 1 is provided with a raised portion 2 for installing a sleeve 4, a seal 5, a lamp tube 6, a pressing sleeve 7 and a rotating sleeve 8.

[0037] The raised portion 2 provided in this embodiment of the present application may be a ring-shaped structure, and the sleeve 4 and the lamp tube 6 located in the sleeve 4 are installed in the ring-shaped raised portion 2. For example, the raised portion 2 may be integrally formed with the cavity 1, or fixedly connected to the cavity 1, which is not specifically limited.

[0038] In some embodiments, the raised portion 2 is provided with a plurality of mounting holes 21 arranged in parallel, and the mounting holes 21 include a first inner hole 211, a second inner hole 212, a third inner hole 213 and a connecting inner hole 214 which are arranged adjacent to each other in the axial direction, wherein the inner diameters of the first inner hole 211, the second inner hole 212 and the third inner hole 213 increase progressively.

[0039] In this embodiment, the inner wall of the mounting hole 21 is axially arranged into a stepped structure. The first inner hole 211 corresponds to the mounting sleeve 4, which is used to radially fix the sleeve 4 and shield the heat radiation of the seal 5; the second inner hole 212 corresponds to the mounting seal 5, which is used to place the seal 5 to achieve the sealing between the outer wall of the sleeve 4 and the protrusion 2; the third inner hole 213 is used for the insertion of the pressing sleeve 7; and the connecting inner hole 214 corresponds to the mounting of the rotating sleeve 8.

[0040] In some embodiments, the sleeve 4 is disposed in the first inner hole 211 , and the sleeve 4 is sleeved on the outer circumference of the lamp tube 6 , so that the lamp tube 6 is located in the inner cavity 41 of the sleeve 4 .

[0041] Optionally, the sleeve 4 can be made of a quartz tube, and the lamp 6 can be made of a halogen lamp. The halogen lamp provides a heating source. The halogen lamp is placed in the quartz tube. The quartz tube has a high transmittance and will not affect the transmission of infrared thermal radiation energy. It can allow more radiant heat energy from the halogen lamp to pass through and irradiate the wafer to heat it. Both ends of the quartz tube can be sealed by a seal 5 to isolate the atmospheric environment inside the quartz tube from the vacuum environment outside the quartz tube.

[0042] For example, the sleeve 4 may be a regular circular structure. Designing the quartz sleeve 4 as a regular circular structure can not only simplify the sealing structure, but also achieve a good sealing effect due to the high surface finish of the quartz sleeve 4.

[0043] In some embodiments, the sealing member 5 is disposed in the second inner hole 212 , and the sealing member 5 is sleeved on the outer peripheral side of the sleeve 4 .

[0044] Since the sleeve 4 and the raised portion 2 need to be sealed to isolate the atmospheric environment inside the sleeve 4 from the vacuum environment outside the sleeve 4, thereby forming a vacuum space. In this embodiment, the seal 5 is sleeved on the outer circumference of both ends of the sleeve 4 and placed in the second inner hole 212 of the raised portion 2 to seal the gap between the outer wall of the sleeve 4 and the inner wall of the raised portion 2, thereby achieving sealing between the sleeve 4 and the raised portion 2. Exemplarily, an O-ring can be selected as the seal 5.

[0045] In some embodiments, it also includes a pressing sleeve 7 that abuts against the sealing member 5, and the pressing sleeve 7 presses the sealing member 5 between the pressing sleeve 7, the sleeve 4 and the protruding portion 2. Since the inner diameters of the first inner hole 211 and the second inner hole 212 are gradually increased, the protruding portion 2 at the first inner hole 211 is a protruding structure, and the second inner hole 212 is a countersunk structure. The countersunk structure cooperates with the protruding structure and the pressing sleeve 7 to form a rectangular space, so that the sealing member 5 is located in the rectangular space formed between the pressing sleeve 7, the sleeve 4 and the protruding portion 2. In addition, the protruding structure of the protruding portion 2 at the first inner hole 211 can, on the one hand, support and fix the sleeve 4, and on the other hand, can shield the sealing member 5 from heat radiation, thereby preventing the sealing member 5 from being directly damaged by the high temperature of the heat radiation.

[0046] In this embodiment, in order to ensure the effectiveness of the sealing of the sealing member 5, the sealing member 5 is arranged in the rectangular space formed between the pressing sleeve 7, the sleeve 4 and the raised portion 2; and the sealing member 5 is located in the rectangular space, and the heat conduction contact surfaces around it are: one side is the sleeve 4, two sides are the raised portion 2 of the cavity 1, and one side is the pressing sleeve 7. Therefore, by reducing the temperature of the sleeve 4, the raised portion 2, and the pressing sleeve 7 in contact with the sealing member 5, the sealing member 5 can be effectively cooled and heat dissipated, and the sealing member 5 can be prevented from being damaged by high temperature. In addition, in order to facilitate the installation and removal of the sealing member 5, the pressing sleeve 7 on one side of the rectangular space is designed as a movable and detachable structure.

[0047] Furthermore, in order to prevent the lamp tube 6 from being overheated and burned and frequently damaged and to extend the service life of the device, it is necessary to cool down and dissipate heat for the lamp tube 6. In order to ensure effective heat dissipation of the lamp tube 6, the embodiment of the present application uses a sleeve 4 to cover the lamp tube 6, so that the lamp tube 6 is located in the inner cavity 41 of the sleeve 4, and cooling gas is introduced into the inner cavity 41, thereby achieving cooling and heat dissipation of the lamp tube 6.

[0048] The present application realizes rapid cooling and temperature reduction of the sleeve 4, the lamp tube 6 and the seal 5 by setting the first cooling air duct 22 of the first cooling channel. Specifically, the port of the sleeve 4 is open, one end of which is the air inlet of the first cooling air duct 22, and the other end is the air outlet of the first cooling air duct 22, so that the inner cavity 41 becomes a part of the first cooling air duct 22. The first cooling air duct 22 is passed with cooling gas, and the cooling gas flows through the entire sleeve 4 and surrounds the lamp tube 6, so that the lamp tube 6 can be cooled, the temperature of the lamp tube 6 is reduced, and the service life of the lamp tube 6 is extended; at the same time, the temperature of the sleeve 4 and the temperature of the seals 5 set at both ends when the sleeve 4 is installed in the cavity 1 can also be reduced, thereby extending the service life of the sleeve 4 and the seal 5, and the cooling effect is good, the cooling rate is high, and the sleeve 4 and the lamp tube 6 can be quickly cooled. The seal 5 can prevent the heat of the lamp tube 6 from overflowing and dissipating.

[0049] Therefore, the present application can realize rapid cooling and temperature reduction of the sleeve 4, the lamp tube 6 and the seal 5 through the first cooling air duct 22, thereby improving the cooling rate, avoiding damage caused by overheating of the lamp tube 6, protecting the seal 5 from high temperature damage, and thus ensuring the high vacuum sealing function of the seal 5, greatly increasing the service life of the equipment and production safety. For example, the cooling gas can be natural wind.

[0050] In some embodiments, the cavity 1 and the press sleeve 7 are provided with a connected second cooling air duct 9, and the inner cavity 41 is connected to the second cooling air duct 9. Specifically, the second cooling air duct 9 includes a first channel 91 provided in the cavity 1 and / or the protrusion 2, and a second channel 92 provided in the press sleeve 7, the first channel 91, the second channel 92 and the inner cavity 41 are connected, the first channel 91 is connected to the air inlet hole 11 for air intake, and the first channel 91 is connected to the second channel 92 through the third inner hole 213.

[0051] In this embodiment, the second cooling air duct 9 of the second cooling channel is provided to further improve the cooling and heat dissipation effect on the seal 5. Specifically, a plurality of second channels 92 are provided in the circumference of the pressing sleeve 7, and the second cooling air duct 9 is formed in cooperation with the first channel 91 provided in the cavity 1 and / or the protrusion 2. Compressed air is introduced into the air inlet 11, and the low-temperature compressed air flows through the pressing sleeve 7 in sequence through the first channel 91, the third inner hole 213, and a plurality of second channels 92 of the second cooling air duct 9, thereby taking away the heat of the pressing sleeve 7, achieving effective cooling of the pressing sleeve 7, and further reducing the temperature of the contact surface between the pressing sleeve 7 and the seal 5, achieving further cooling of the seal 5, improving the cooling and heat dissipation effect of the seal 5, protecting the seal 5 from damage by high temperature, extending the service life of the seal 5, and ensuring the high vacuum sealing function of the seal 5. Since the inner cavity 41 is connected to the second cooling air duct 9 , the compressed air flows through the pressing sleeve 7 , converges with the cooling gas in the first cooling air duct 22 , and finally flows through the inner cavity 41 and is discharged together with the cooling gas in the first cooling air duct 22 .

[0052] Optionally, the pressing sleeve 7 can be made of metal material, which has good thermal conductivity and can quickly reduce the temperature of the contact surface between the pressing sleeve 7 and the seal 5 in conjunction with the second cooling air duct 9, further improving the cooling and heat dissipation effect of the seal 5.

[0053] In some embodiments, the inner wall of the sleeve 4 close to the seal 5 is provided with a thermal radiation shielding coating 10 .

[0054] In this embodiment, a thermal radiation shielding coating 10 is provided within a length range of the inner wall of the sleeve 4 close to the seal 5. The thermal radiation shielding coating 10 can block and reflect part of the infrared thermal radiation emitted by the lamp tube 6, thereby reducing the energy of the thermal radiation reaching the seal 5, reducing the thermal radiation suffered by the seal 5, further reducing the temperature of the seal 5, and protecting the seal 5 from high temperature damage. Exemplarily, the thermal radiation shielding coating 10 can be formed by white plating the inner wall of the sleeve 4, or by gold plating the inner wall of the sleeve 4, and there is no specific limitation on this; it should be noted that the thermal radiation shielding coating 10 formed by gold plating has a better shielding effect, but the cost is extremely high.

[0055] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 In some embodiments, the pressing sleeve 7 includes a first annular portion 71 and a second annular portion 72 which are adjacently arranged and have decreasing inner diameters. The first annular portion 71 is sleeved on the outer peripheral side of the sleeve 4 and abuts against the sealing member 5. The second annular portion 72 is used to axially limit the sleeve 4. A plurality of second channels 92 are circumferentially arranged on the second annular portion 72.

[0056] In this embodiment, the inner diameter of the first annular portion 71 of the press sleeve 7 is larger than the outer diameter of the sleeve 4. The first annular portion 71 of the press sleeve 7 is sleeved on the sleeve 4 and the end surface of the first annular portion 71 is in close contact with the seal 5, pressing the seal 5 into the second inner hole 212. The inner diameter of the second annular portion 72 is smaller than the outer diameter of the sleeve 4, so that the second annular portion 72 axially limits the sleeve 4. Among them, a plurality of second channels 92 are circumferentially arranged on the second annular portion 72.

[0057] In some embodiments, a rotating sleeve 8 is detachably connected to the connecting inner hole 214 , and the rotating sleeve 8 abuts against the pressing sleeve 7 .

[0058] Optionally, the connecting inner hole 214 is set as an internal threaded hole, and the rotating sleeve 8 is provided with an external thread matching the connecting inner hole 214. The rotating sleeve 8 and the connecting inner hole 214 are connected by threads, and the end face of the rotating sleeve 8 contacts the second annular portion 72 of the pressing sleeve 7 and squeezes the pressing sleeve 7.

[0059] Furthermore, the rotating sleeve 8 is provided with a plurality of through holes 81 along the circumferential direction. The external threaded portion of the rotating sleeve 8 is used for rotational feeding, and the through holes 81 are used for inserting shaft tools to form a lever force and rotate to realize the rotational feeding of the rotating sleeve 8, so that the rotating sleeve 8 squeezes the pressing sleeve 7, and then the pressing sleeve 7 presses the seal 5 into the rectangular space. After rotating a certain angle, the position of the through holes 81 is changed and the rotation continues, so as to realize the continuous rotational feeding of the rotating sleeve 8.

[0060] If the rotating sleeve 8 is directly applied to the seal 5, the sealing member 5 will be scratched when the rotating sleeve 8 rotates. Therefore, in this embodiment of the present application, a pressing sleeve 7 is added between the rotating sleeve 8 and the sealing member 5. On the one hand, the pressing sleeve 7 isolates the rotational motion and protects the sealing member 5 from scratches; on the other hand, the protruding first annular portion 71 of the pressing sleeve 7 contacts the sealing member 5, which can push the sealing member 5 into a deeper position, thereby ensuring stable and reliable sealing.

[0061] Furthermore, the seal 5 is installed between the sleeve 4 and the raised portion 2 of the cavity 1, and elastic deformation is required to ensure a fully fitting sealing effect. In order to achieve this elastic deformation, the seal 5 needs to be squeezed in with force, and an extrusion assembly method of a pressure plate and screws can be used, but it occupies a large space and cannot achieve a tight arrangement of the lamp tubes 6. Therefore, the spiral assembly and compression method of the rotating sleeve 8 provided in the present application occupies a small space and can ensure a tight arrangement of the lamp tubes 6.

[0062] Further, the third inner hole 213 is a tapered hole with an inner diameter decreasing toward the second inner hole 212, and the seal 5 is installed in the second inner hole 212 through the third inner hole 213. When installing the seal 5, the seal 5 can be fully stretched when passing through the tapered hole, thereby ensuring that the seal 5 is evenly distributed, and further ensuring that the seal 5 is evenly pressed in.

[0063] Please refer to Figure 1 and Figure 7 , and also includes a cooling water channel 3 arranged in the cavity 1, and the cooling water channel 3 is arranged vertically and horizontally to form a plurality of branch channels 31.

[0064] In this embodiment, the cooling water channel 3 is cross-linked in the cavity 1 to form a plurality of branches 31, which can increase the cooling area. The cooling water flows in the plurality of branches 31 in the cooling water channel 3, which can quickly dissipate heat, reduce the temperature of the cavity 1, ensure the safety of the equipment, and extend the service life of the equipment. In addition, the cooling water channel 3 of this structure cools more evenly, and can also make the equipment structure more compact, which is convenient for arranging the remaining structures. Optionally, the cavity 1 is made of metal material, which has good thermal conductivity. It can achieve continuous cooling and heat dissipation in conjunction with the cooling water channel 3, and can quickly reduce the temperature of the two contact surfaces between the seal 5 and the protrusion 2, further improving the cooling and heat dissipation effect of the seal 5.

[0065] Preferably, since the cooling water channel 3 is a deep hole structure and is arranged in the cavity 1, the end of the cooling water channel 3 is a through structure and can be formed by drilling, which is convenient to process and can also avoid the problem of weld leakage caused by the welded structure. A plug 32 is installed at the end of the cooling water channel 3 to seal the cooling water inside the water channel, which is convenient for maintenance and replacement.

[0066] Furthermore, the present application also provides a lamp tube heating device, comprising the above-mentioned lamp tube heating sealing structure; the lamp tube heating device can heat the reaction chamber in the semiconductor processing technology.

[0067] In addition, the present application also provides a semiconductor processing equipment, including the above-mentioned lamp tube heating sealing structure or lamp tube heating device.

[0068] To sum up, the sealing structure, lamp tube heating device and semiconductor processing equipment for lamp tube heating provided in the present application can not only ensure that the sealing structure achieves effective vacuum sealing, but also make the temperature at the sealing position within its tolerable range, and can effectively cool and dissipate the heat of the seal, protect the seal from damage by high temperature, and increase its service life.

[0069] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A sealing structure for lamp tube heating, characterized in that: include: The cavity (1) is provided with a protruding portion (2), the protruding portion (2) is provided with a mounting hole (21), and the mounting hole (21) comprises a first inner hole (211) and a second inner hole (212) which are adjacently arranged and have increasing inner diameters; A sleeve (4) disposed in the first inner hole (211); A lamp tube (6), wherein the sleeve (4) is sleeved on the outer peripheral side of the lamp tube (6), so that the lamp tube (6) is located in the inner cavity (41) of the sleeve (4); A sealing member (5) disposed in the second inner hole (212); A pressing sleeve (7), wherein the sealing member (5) is pressed between the pressing sleeve (7), the sleeve (4) and the raised portion (2), and the cavity (1) and the pressing sleeve (7) are provided with a second cooling air duct (9) in communication; A first cooling air duct (22), wherein the inner cavity (41) is a part of the first cooling air duct (22) and is in communication with the second cooling air duct (9); The inner wall of the sleeve (4) close to the sealing member (5) is provided with a heat radiation shielding coating (10); The second cooling air duct (9) comprises a first channel (91) provided on the cavity (1) and / or the raised portion (2), and a second channel (92) provided on the pressing sleeve (7); the first channel (91), the second channel (92) and the inner cavity (41) are connected; the first channel (91) is connected to an air intake hole (11) for air intake.

2. The sealing structure for lamp tube heating according to claim 1, characterized in that: The compression sleeve (7) comprises a first annular portion (71) and a second annular portion (72) which are arranged adjacent to each other and have decreasing inner diameters, the first annular portion (71) being sleeved on the outer circumference of the sleeve (4) and abutting against the sealing member (5), and the second annular portion (72) being used for axially limiting the sleeve (4); a plurality of second channels (92) are circumferentially arranged on the second annular portion (72).

3. The sealing structure for lamp tube heating according to claim 1, characterized in that: The mounting hole (21) further comprises a third inner hole (213) arranged adjacent to the second inner hole (212); the third inner hole (213) is a tapered hole whose inner diameter decreases toward the second inner hole (212); the sealing member (5) is installed in the second inner hole (212) through the third inner hole (213); and the first channel (91) is connected to the second channel (92) through the third inner hole (213).

4. The sealing structure for lamp tube heating according to claim 3, characterized in that: The mounting hole (21) further comprises a connecting inner hole (214) arranged adjacent to the third inner hole (213), a rotating sleeve (8) being detachably connected to the connecting inner hole (214), and the rotating sleeve (8) abuts against the pressing sleeve (7).

5. The sealing structure for lamp tube heating according to claim 1, characterized in that: The port of the sleeve (4) is open, one end of which is the air inlet of the first cooling air duct (22), and the other end of which is the air outlet of the first cooling air duct (22), so that the inner cavity (41) becomes a part of the first cooling air duct (22).

6. The sealing structure for lamp tube heating according to any one of claims 1 to 5, characterized in that: It also includes a cooling water channel (3) arranged in the cavity (1), wherein the cooling water channel (3) is arranged vertically and horizontally to form a plurality of branch channels (31).

7. A lamp tube heating device, characterized in that: A sealing structure for heating a lamp tube comprising the sealing structure as claimed in any one of claims 1 to 6.

8. Semiconductor processing equipment, characterized in that It comprises the sealing structure for lamp tube heating as described in any one of claims 1 to 6 or the lamp tube heating device as described in claim 7.

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