A method and system for determining abnormal AMC concentration

Abstract

The present invention relates to the field of pollutant detection technology, and specifically discloses a method and system for distinguishing abnormal AMC concentration, the method comprising S100: locating the measurement point in the AMC online monitoring system, and dividing it into several single items, the single items at least including: NH3+NO+NO2, HCL+HF and SO2, using the sampler to collect the real-time readings of the single items; S200: obtaining the charging authority of the distinguishing gas in the measurement point, the distinguishing gas including: standard gas and nitrogen, and activating the charging authority. The present invention can dilute the standard gas by filling nitrogen into the measurement point, and measure the diluted standard gas of different concentrations for multiple times, so as to evaluate the performance of the sampler in different concentration ranges, further improve the reliability of the measurement data, and by calculating the maximum value, the sampler can be purged, and decision support can be provided for the purging, and the residual gas in the measurement point can also be cleared to ensure the authenticity of the measurement data.

Description

Technical Field

[0001] The present invention relates to the technical field of pollutant detection, and in particular to a method and system for determining abnormal AMC concentration. Background Art

[0002] AMC refers to the gas mixture that affects wafer processing during the semiconductor production process. It mainly includes many fine pollutants that affect the production process and reduce the product yield; for example: acidic molecules (such as hydrofluoric acid, hydrochloric acid, phosphoric acid, etc.), alkaline molecules (amines, ammonia) and condensable molecules (ethyl lactate, trimethylol, triethyl phosphate), etc. The presence of these mixed gases will not only affect the characteristics of components, but also cause process residues and even affect the processing accuracy of wafers, reducing the yield.

[0003] In semiconductor production workshops, clean rooms are generally provided, and the air quality requirements of clean rooms are very high, that is, it is necessary to ensure that the concentration of AMC is at a low level in real time; the pre-process of adjusting the concentration of AMC is the process of determining the abnormality of AMC concentration. The more accurate the detection result of AMC concentration, the more accurate the adjustment process. Most of the existing abnormality determination processes of AMC concentration are realized through AMC online monitoring systems. AMC online monitoring systems are composed of acid analysis equipment, alkali analysis equipment, sulfide analysis equipment, organic matter analysis equipment, multi-point samplers and online monitoring software. When measuring concentration, the above-mentioned equipment is easily affected by environmental interference, which in turn affects the authenticity of the measured value. Therefore, "how to reduce environmental interference and improve the authenticity of AMC concentration measurement values" is the technical problem that the present invention needs to solve. Summary of the invention

[0004] The object of the present invention is to provide a method and system for determining abnormal AMC concentration, so as to solve the problem of "how to reduce environmental interference and improve the authenticity of AMC concentration measurement value" raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A method for determining abnormal AMC concentration, the method comprising:

[0007] S100: Locate the measurement points in the AMC online monitoring system and divide them into several single items, wherein the single items at least include: NH3+NO+NO2, HCL+HF and SO2, and use the sampler to collect real-time readings of the single items;

[0008] S200: obtaining the charging authority of the discrimination gas in the measuring point, the discrimination gas includes: standard gas and nitrogen, activating the charging authority, charging a preset volume of standard gas into the measuring point, defining the real-time reading of each single item as a reference value, and selecting a plurality of charging nitrogen volume items in a preset concentration control table, wherein the concentration control table at least includes: charging nitrogen volume items and theoretical values;

[0009] S300: Based on the nitrogen volume item and the charging authority, a corresponding volume of nitrogen is charged into the measuring point, and the real-time reading of each single item is recorded to obtain a measured value, and it is determined whether the reference value, the measured value and the theoretical value are the same;

[0010] If they are the same, the maximum value is traversed from the nitrogen volume item, and the amount of nitrogen required for purging is calculated, and nitrogen is continued to be filled into the measuring point. After the purging is completed, the real-time reading of the single item is read again to determine whether it is "0". If it is not "0", the offset value is determined. If it is "0", the real-time reading is determined as the final reading;

[0011] If they are different, find out the single item where the real-time reading is different from the theoretical value, and determine it as an abnormal single item, trace back the measurement point corresponding to the abnormal single item, obtain the abnormal point, integrate the abnormal single item, abnormal point, and the theoretical value and measurement value corresponding to the abnormal single item, and generate an error analysis report.

[0012] Furthermore, the S100 includes:

[0013] Creating a collaborative processing framework, integrating the real-time readings into the collaborative processing framework, and inserting a direction, wherein the direction is used to characterize the correlation between single items, and the correlation includes positive correlation and negative correlation;

[0014] The collected real-time readings are synchronized to the AMC online monitoring system.

[0015] Further, the S200 includes:

[0016] The charging authority is issued to the AMC online monitoring system, and a control point is selected from the measurement points;

[0017] After the charging authority is activated, when the real-time reading in the control point is the same as the theoretical value, the charging authority is disabled, and the real-time readings in all items are defined as the reference values;

[0018] It is determined whether the reference value is the same as the theoretical value. If they are different, the measurement point is marked and added to the abnormal point.

[0019] Further, the S200 includes:

[0020] Introducing error factors, the error factors at least include: temperature, humidity and standard gas pressure;

[0021] Compare the real-time reading and theoretical value of the abnormal single item, mark the error factor of each abnormal point, and embed the verification mechanism of the error factor into the abnormal point;

[0022] If the error factor passes the verification mechanism, the abnormal point is deleted.

[0023] Furthermore, the verification mechanism includes: refining the nitrogen filling volume items of two adjacent groups in the concentration control table, formulating a selection strategy, determining the high value and the low value, and using the error factor to correct the abnormal point.

[0024] Further, the S300 includes:

[0025] Query the concentration control table, traverse the nitrogen volume item corresponding to the maximum value, obtain the total amount of nitrogen that needs to be charged, and add a surplus to the total amount of nitrogen that needs to be charged based on a preset purge strategy;

[0026] Based on the current real-time reading, the amount of nitrogen that has been charged is determined, the difference between the total amount of nitrogen that needs to be charged and the amount of nitrogen that has been charged is calculated, and the difference is defined as the amount of nitrogen required for purging.

[0027] Further, the S300 includes:

[0028] After the purge is completed, find the measurement points where the real-time reading is not "0" and determine the offset value;

[0029] Using the offset value, a label is generated and inserted into the single item.

[0030] Furthermore, the method further comprises:

[0031] Based on the offset value, the zero point drift of each abnormal single item is determined, the corresponding relationship between the zero point drift and the error factor is configured, and a compensation curve is drawn;

[0032] The compensation curve is used to correct the real-time reading of the abnormal single item.

[0033] The present invention also provides a system for determining abnormal AMC concentration, the system comprising:

[0034] The acquisition module is used to locate the measurement points in the AMC online monitoring system and divide them into several single items, which at least include: NH3+NO+NO2, HCL+HF and SO2, and use the sampler to collect the real-time readings of the single items;

[0035] A selection module is used to obtain the charging authority of the discrimination gas in the measuring point, the discrimination gas includes: standard gas and nitrogen, activate the charging authority, charge a preset volume of standard gas into the measuring point, define the real-time reading of each single item as a reference value, and select a plurality of charging nitrogen volume items in a preset concentration control table, wherein the concentration control table at least includes: charging nitrogen volume items and theoretical values;

[0036] A judgment module is used to charge a corresponding volume of nitrogen into the measuring point based on the charged nitrogen volume item and the charging authority, and record the real-time reading of each single item to obtain a measured value, and judge whether the reference value, the measured value and the theoretical value are the same;

[0037] If they are the same, the maximum value is traversed from the nitrogen volume item, and the amount of nitrogen required for purging is calculated, and nitrogen is continued to be filled into the measuring point. After the purging is completed, the real-time reading of the single item is read again to determine whether it is "0". If it is not "0", the offset value is determined. If it is "0", the real-time reading is determined as the final reading;

[0038] If they are different, find out the single item where the real-time reading is different from the theoretical value, and determine it as an abnormal single item, trace back the measurement point corresponding to the abnormal single item, obtain the abnormal point, integrate the abnormal single item, abnormal point, and the theoretical value and measurement value corresponding to the abnormal single item, and generate an error analysis report.

[0039] Furthermore, the acquisition module includes:

[0040] An inserting unit, used to create a collaborative processing framework, integrate the real-time reading into the collaborative processing framework, and insert a direction, wherein the direction is used to characterize the correlation between single items, and the correlation includes positive correlation and negative correlation;

[0041] The synchronization unit is used to synchronize the collected real-time readings to the AMC online monitoring system.

[0042] Compared with the prior art, the present invention has the following beneficial effects:

[0043] By obtaining charging authority, the sampler can be calibrated to improve measurement accuracy and ensure the stability of the sampler's performance. This also greatly reduces measurement drift and ensures the accuracy of the measurement data. By filling the measurement point with nitrogen, the standard gas can be diluted and the diluted standard gas of different concentrations can be measured multiple times to evaluate the performance of the sampler in different ranges, further improving the reliability of the measurement data. By calculating the maximum value, the sampler can be purged and the amount of nitrogen required for purging can be calculated to remove residual gas in the measurement point and ensure the authenticity of the measurement data. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention.

[0045] Figure 1 A flowchart of a method for determining abnormal AMC concentration provided by an embodiment of the present invention;

[0046] Figure 2 A first sub-flow chart of the method for determining abnormal AMC concentration provided by an embodiment of the present invention;

[0047] Figure 3 A second sub-flow chart of the method for determining abnormal AMC concentration provided by an embodiment of the present invention;

[0048] Figure 4 A third sub-flow chart of the method for determining abnormal AMC concentration provided by an embodiment of the present invention;

[0049] Figure 5 A block diagram of the composition of the AMC concentration abnormality determination system provided by an embodiment of the present invention;

[0050] Figure 6 A block diagram of the composition of the acquisition module in the AMC concentration abnormality determination system provided in an embodiment of the present invention;

[0051] Figure 7 A block diagram of the composition of the selection module in the AMC concentration abnormality determination system provided in an embodiment of the present invention;

[0052] Figure 8 A block diagram of the composition of a judgment module in the AMC concentration abnormality judgment system provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0053] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0054] In Example 1, Figure 1 The implementation process of the method for determining abnormal AMC concentration provided by an embodiment of the present invention is shown and described in detail below:

[0055] S100: Locate the measurement points in the AMC online monitoring system and divide them into several single items, which at least include: NH3+NO+NO2, HCL+HF and SO2, and use the sampler to collect real-time readings of the single items.

[0056] Determine the measurement points in the AMC online monitoring system, where the measurement points are the installation locations of the samplers, and determine several items based on the sampling results. The items are the types of each component in the AMC. The items can be NH3+NO+NO2, or HCL+HF, or SO2, etc. Each component requires specific equipment for detection; for example, an ultraviolet flue gas analyzer that uses chemiluminescence to detect the concentration of NH3+NO+NO2, a laser trace gas analyzer that uses semiconductor laser absorption spectroscopy and Herriott cavity enhancement technology to detect HCL+HF, and an ultraviolet fluorescence sulfur analyzer that uses ultraviolet fluorescence to detect SO2; use the above equipment to determine the real-time reading of each item.

[0057] S200: Obtain the charging authority of the discrimination gas in the measuring point, the discrimination gas includes: standard gas and nitrogen, activate the charging authority, fill a preset volume of standard gas into the measuring point, define the real-time reading of each single item as a reference value, and select several nitrogen filling volume items in a preset concentration control table, wherein the concentration control table at least includes: nitrogen filling volume items and theoretical values.

[0058] In actual work, the air circulation between the sampler and related pipelines and the outside world can be isolated by shutting down the air intake pump and other methods. After the real-time reading is recorded, the standard gas is introduced into the sampler through the preset air intake pipeline through the charging authority. At this time, the real-time reading of the sampler is recorded, and the real-time reading of each single item is determined, and the recorded real-time reading is determined as the reference value. The reference value is compared in the concentration control table to determine whether the reference value is the same as the corresponding theoretical value. If the same, it proves that the sampler is accurate. If there is an error, it is necessary to continue to distinguish. After the judgment is completed, select multiple nitrogen filling volume items to determine the volume of nitrogen that needs to be filled. It should be noted that one nitrogen filling volume item corresponds to multiple theoretical values ​​(the following table gives an example of the concentration control table, not the actual measurement value).

[0059]

[0060] S300: Based on the nitrogen volume item and the charging authority, a corresponding volume of nitrogen is charged into the measuring point, and the real-time reading of each single item is recorded to obtain a measured value, and it is determined whether the reference value, the measured value and the theoretical value are the same;

[0061] If they are the same, traverse the maximum value from the nitrogen volume item and calculate the amount of nitrogen required for purging, continue to fill nitrogen into the measuring point, and after the purging is completed, read the real-time reading of the single item again to determine whether it is "0". If it is not "0", determine the offset value. If it is "0", determine the real-time reading as the final reading.

[0062] If they are different, find out the single item where the real-time reading is different from the theoretical value, and determine it as an abnormal single item, trace back the measurement point corresponding to the abnormal single item, obtain the abnormal point, integrate the abnormal single item, abnormal point, and the theoretical value and measurement value corresponding to the abnormal single item, and generate an error analysis report.

[0063] Select two nitrogen filling volume items of 4.5 and 9, fill 4.5cm3 and 9cm3 of nitrogen into the measuring points, record the real-time reading of each single item in the sampler at this time, record it as the measured value, and judge whether the measured value is the same as the theoretical value in the concentration control table; in addition, after the standard gas is filled into the measuring point, it is also necessary to judge whether the real-time reading of the single item at this time (that is, the reference value) is the same as the theoretical value.

[0064] If they are the same, it can be preliminarily determined that the sampler is accurate. At this time, find out the maximum value of the nitrogen volume item in the concentration control table, and calculate the amount of nitrogen required to purge the measuring point based on this maximum value; and fill the measuring point with the corresponding volume of nitrogen to purge the measuring point. When the purge is completed, read the real-time reading of the single item again. If the real-time reading is "0", it means that the measured AMC concentration result is correct. If the real-time reading is not "0", it means that there is a zero drift. The offset value can be used to correct the real-time reading of the single item. Of course, the final result after correction is not necessarily an accurate value, and it needs to be further checked with diluted standard gas multiple times.

[0065] If they are different, it means that the measurement result of AMC concentration is wrong. At this time, the real-time reading of the measurement point is compared with the concentration control table, and the single item that is different from the real-time reading and the theoretical value is found. This single item is defined as an abnormal single item, and the corresponding measurement point is also the abnormal point, where the abnormal point is the measurement point of the sampler error. Then, the abnormal point, abnormal single item and measurement value are integrated to generate an error analysis report, and the error analysis report is sent to the preset terminal, where the preset terminal can be the management personnel terminal.

[0066] In Example 2, Figure 2 The implementation process of the method for determining abnormal AMC concentration provided by an embodiment of the present invention is shown. S100 is described in detail below:

[0067] S101: Create a collaborative processing framework, integrate the real-time reading into the collaborative processing framework, and insert a direction, wherein the direction is used to characterize the correlation between single items, and the correlation includes positive correlation and negative correlation.

[0068] Create a collaborative processing architecture, which is a distributed computing framework that monitors all measurement points through samplers and can also correct each other in real time.

[0069] Integrate real-time readings into a collaborative processing framework and insert pointers, which are the relationships between each individual item.

[0070] For example, a certain production equipment acts as a pollution source. During the wafer processing process, it will produce two by-product pollution gases. Due to the production characteristics, the two by-products will inhibit each other. That is, if the output of one by-product is high, the other must be lower. In other words, there is a negative correlation between the two. If the real-time readings of the corresponding two items are both high, it means that there may be errors in the real-time readings.

[0071] S102: Synchronize the collected real-time readings to the AMC online monitoring system.

[0072] After the real-time readings are collected, they are synchronized to the AMC online monitoring system.

[0073] In Example 3, Figure 3 The implementation process of the method for determining abnormal AMC concentration provided by an embodiment of the present invention is shown, and S200 is described in detail below, as follows:

[0074] S201: Sending the charging authority to the AMC online monitoring system, and selecting a control point from the measurement points.

[0075] The charging authority is issued to the AMC online monitoring system, and at the same time, samplers with higher accuracy and stability are found, and the corresponding measurement points are determined as control points, where the number of control points is at least one.

[0076] S202: After the charging authority is activated, when the real-time reading in the control point is the same as the theoretical value, the charging authority is disabled, and the real-time readings in all items are defined as reference values.

[0077] After filling the measuring point with standard gas, when the real-time reading in the control point is the same as the theoretical value, stop filling the measuring point with standard gas; at this time, the real-time reading in the single item is determined as the reference value.

[0078] S203: Determine whether the reference value is the same as the theoretical value. If they are different, mark the measurement point and add it to the abnormal point.

[0079] After the standard gas is filled, determine whether the reference value is the same as the theoretical value. If they are the same, it means that the real-time reading of the single item is correct and the sampler has a high accuracy. Otherwise, if they are different, it means that the real-time reading of the single item is wrong and the sampler has a poor accuracy.

[0080] In Example 4, Figure 3 The implementation process of the method for determining abnormal AMC concentration provided by an embodiment of the present invention is shown, and S200 is described in detail below, as follows:

[0081] S204: Introducing error factors, where the error factors include at least: temperature, humidity, and standard gas pressure.

[0082] The reason for the poor accuracy of the sampler may be the presence of error factors introduced into the single item, where the error factors may be temperature, humidity, pressure, etc.

[0083] S205: Compare the real-time reading of the abnormal item with the theoretical value, mark the error factor of each abnormal point, and embed a verification mechanism of the error factor into the abnormal point.

[0084] By comparing the real-time readings of abnormal items with the theoretical values ​​in the concentration control table, the error factors that affect the accuracy of the sampler are determined. The verification mechanism is the specific method of determining the error factors from the real-time readings.

[0085] S206: If the error factor passes the verification mechanism, the abnormal point is deleted.

[0086] If the error factor can be used to calibrate the real-time reading to the real reading, the abnormal point will be deleted, where the real reading can be measured by other similar equipment.

[0087] The implementation process of the method for determining abnormal AMC concentration provided by the embodiment of the present invention is as follows:

[0088] The verification mechanism includes: refining the nitrogen volume items of two adjacent groups in the concentration control table, formulating a selection strategy, determining the high value and the low value, and using the error factor to correct the abnormal point.

[0089] The nitrogen volume items of two adjacent groups in the concentration control table are refined; for example, the nitrogen volume items can be 3.5, 4.2 and 6.2, etc. The advantage of this is that the detection results of the sampler can be further refined and the sampler can be accurately judged. Using the selection strategy, two nitrogen volume items with a long distance are selected in the concentration control table, and the high value and the low value are determined; for example, two nitrogen volume items 1 and 9 are selected in the concentration control table, and 9 is the high value and 1 is the low value. The advantage of this is that the correction range can be expanded to ensure that the sampler can read accurately in multiple ranges. After determining the high value and the low value, the real-time reading of the abnormal point is corrected by using the error factor to determine whether the corrected reading is the same as the theoretical value corresponding to the high value and the low value. If the same, the abnormal point is deleted. In other words, although the real-time reading of the sampler is not the real reading, the real reading can be calculated through data compensation.

[0090] In Example 5, Figure 4 The implementation process of the method for determining abnormal AMC concentration provided by an embodiment of the present invention is shown, and S300 is described in detail below, as follows:

[0091] S301: query the concentration control table, traverse the nitrogen volume items corresponding to the maximum value, obtain the total amount of nitrogen that needs to be charged, and add a surplus to the total amount of nitrogen that needs to be charged based on a preset purge strategy.

[0092] Find the maximum value of the nitrogen volume item in the concentration control table, and determine this maximum value as the total amount of nitrogen that needs to be filled; the preset purge strategy is to continue to fill the same amount of nitrogen as the remaining volume after the total amount of nitrogen corresponding to the maximum value is filled into the measuring point, so as to purge the measuring point and the sampler.

[0093] After calculating the total amount of nitrogen that needs to be charged, add the remainder to it, and use the sum of the two as the total amount of nitrogen required for purging.

[0094] S302: Based on the current real-time reading, determine the amount of nitrogen that has been charged, calculate the difference between the total amount of nitrogen that needs to be charged and the amount of nitrogen that has been charged, and define the difference as the amount of nitrogen required for purging.

[0095] Based on the real-time reading of a single item, the amount of nitrogen that has been charged is determined. The amount of nitrogen required for purging is calculated by subtracting the amount of nitrogen that has been charged from the sum of the total amount of nitrogen that needs to be charged and the remaining amount. In other words, this volume of nitrogen needs to be charged to complete the purging.

[0096] In Example 6, Figure 4 The implementation process of the method for determining abnormal AMC concentration provided by an embodiment of the present invention is shown, and S300 is described in detail below, as follows:

[0097] S303: After the purge is completed, find out the measurement points whose real-time readings are not "0" and determine the offset value.

[0098] When the purge is completed, find out the measuring points whose real-time readings are not "0". If the real-time reading of a measuring point is not "0", the corresponding real-time reading is determined as the offset value, which is the amount of zero point drift.

[0099] S304: Generate a label using the offset value, and insert the label into the item.

[0100] Using this offset value, generate a label and insert it into the corresponding item.

[0101] In Example 7, different from Example 1, in this embodiment of the present invention, the method further includes:

[0102] Based on the offset value, the zero point drift of each abnormal single item is determined, the corresponding relationship between the zero point drift and the error factor is configured, and a compensation curve is drawn;

[0103] The compensation curve is used to correct the real-time reading of the abnormal single item.

[0104] Determine the zero drift of each abnormal item, and determine the corresponding relationship between the zero drift and the error factor; in actual production, most of the zero drift phenomena are caused by the error factor. At the same time, draw a compensation curve, where the compensation curve is the relationship between the error factor and the zero drift. Traverse the compensation curve and correct the real-time readings in the abnormal items.

[0105] In actual production, standard gas is often used to calibrate the AMC online monitoring system to determine whether the sampler and monitoring results are accurate. After the preliminary judgment is completed, nitrogen is filled into the measuring points in the AMC online monitoring system to dilute the standard gas inside, and then the accuracy of the monitoring results is judged again, thereby calibrating multiple intervals within the measuring range; then the system exhaust is opened, and nitrogen is continued to be filled to purge the AMC online monitoring system. After the purge is completed, it is determined whether there is a zero drift phenomenon. If the real-time reading of the AMC online monitoring system is accurate, the real-time reading is determined as the final result.

[0106] Figure 5 The structure block diagram of the AMC concentration abnormality discrimination system provided by an embodiment of the present invention is shown. The AMC concentration abnormality discrimination system 1 includes:

[0107] The acquisition module 11 is used to locate the measurement points in the AMC online monitoring system and divide them into several items, which include at least NH3+NO+NO2, HCL+HF and Amines, and collect the real-time readings of the items;

[0108] The selection module 12 is used to obtain the charging authority of the discrimination gas in the measuring point, the discrimination gas includes: standard gas and nitrogen, activate the charging authority, charge a preset amount of standard gas into the measuring point, define the real-time reading of each single item as a reference value, and select a plurality of charging nitrogen volume items in a preset concentration control table, wherein the concentration control table at least includes: charging nitrogen volume items and theoretical values;

[0109] The judgment module 13 is used to charge the corresponding volume of nitrogen into the measuring point based on the charging nitrogen volume item and the charging authority, and record the real-time reading of each single item to obtain the measured value, and judge whether the reference value, the measured value and the theoretical value are the same;

[0110] If they are the same, find the minimum value from the nitrogen volume item, calculate the amount of nitrogen required for purging, continue to fill the measuring point with nitrogen, and after the purging is completed, read the real-time reading of the single item again to determine whether it is "0". If it is not "0", determine the offset value. If it is "0", determine the real-time reading as the final reading;

[0111] If they are different, find out the single item where the real-time reading is different from the theoretical value, and determine it as an abnormal single item, trace back the measurement point corresponding to the abnormal single item, obtain the abnormal point, integrate the abnormal single item, abnormal point, and the theoretical value and measurement value corresponding to the abnormal single item, and generate an error analysis report.

[0112] Figure 6 The structure block diagram of the AMC concentration abnormality discrimination system provided by the embodiment of the present invention is shown, and the acquisition module 11 includes:

[0113] An inserting unit 111 is used to create a collaborative processing framework, integrate the real-time reading into the collaborative processing framework, and insert a direction, wherein the direction is used to represent the correlation between single items, and the correlation includes positive correlation and negative correlation;

[0114] The synchronization unit 112 is used to synchronize the collected real-time readings to the AMC online monitoring system.

[0115] Figure 7 The structure diagram of the AMC concentration abnormality discrimination system provided by the embodiment of the present invention is shown, and the selection module 12 includes:

[0116] A selection unit 121 is used to send the charging authority to the AMC online monitoring system and select a control point from the measurement points;

[0117] A definition unit 122, configured to disable the charging authority and define the real-time readings in all items as reference values ​​when the real-time reading in the control point is the same as the theoretical value after the charging authority is activated;

[0118] The marking unit 123 is used to determine whether the reference value is the same as the theoretical value. If they are different, the measurement point is marked and added to the abnormal point;

[0119] An introduction unit 124 is used to introduce error factors, wherein the error factors include at least: temperature, humidity and standard gas pressure;

[0120] The embedding unit 125 is used to compare the real-time reading of the abnormal single item with the theoretical value, calculate the error factor of each abnormal point, and embed the verification mechanism of the error factor into the abnormal point;

[0121] The deletion unit 126 is used to delete the abnormal point after the error factor passes the verification mechanism.

[0122] Figure 8 The structure block diagram of the AMC concentration abnormality determination system provided by the embodiment of the present invention is shown, and the determination module 13 includes:

[0123] The adding unit 131 is used to query the concentration control table, traverse the charging nitrogen volume item corresponding to the minimum value, obtain the total amount of nitrogen that needs to be charged, and add the remainder to the total amount of nitrogen that needs to be charged based on a preset purge strategy;

[0124] The determination unit 132 is used to determine the amount of nitrogen that has been charged according to the current real-time reading, calculate the difference between the total amount of nitrogen that needs to be charged and the amount of nitrogen that has been charged, and define the difference as the amount of nitrogen required for purging;

[0125] An offset unit 133 is used to find out the measurement points whose real-time readings are not "0" after the purge is completed, and determine the offset value;

[0126] The generating unit 134 is configured to generate a label using the offset value and insert the label into the item.

[0127] The acquisition module 11 is mainly used to complete step S100, the selection module 12 is mainly used to complete step S200, and the judgment module 13 is mainly used to complete step S300;

[0128] The inserting unit 111 is mainly used to complete step S101, and the synchronizing unit 112 is mainly used to complete step S102;

[0129] The selection unit 121 is mainly used to complete step S201, the definition unit 122 is mainly used to complete step S202, the marking unit 123 is mainly used to complete step S203, the introduction unit 124 is mainly used to complete step S204, the embedding unit 125 is mainly used to complete step S205, and the deletion unit 126 is mainly used to complete step S206;

[0130] The adding unit 131 is mainly used to complete step S301, the determining unit 132 is mainly used to complete step S302, the offset unit 133 is mainly used to complete step S303, and the generating unit 134 is mainly used to complete step S304.

[0131] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A method for determining abnormal AMC concentration, characterized in that: The method comprises: S100: Locate the measurement points in the AMC online monitoring system and divide them into several single items, which at least include: NH3+NO+NO2, HCL+HF and SO2, and use a sampler to collect real-time readings of the single items; S200: obtaining the charging authority of the discrimination gas in the measuring point, the discrimination gas includes: standard gas and nitrogen, activating the charging authority, charging a preset volume of standard gas into the measuring point, defining the real-time reading of each single item as a reference value, and selecting a plurality of charging nitrogen volume items in a preset concentration control table, wherein the concentration control table at least includes: charging nitrogen volume items and theoretical values; S300: Based on the nitrogen volume item and the charging authority, a corresponding volume of nitrogen is charged into the measuring point, and the real-time reading of each single item is recorded to obtain a measured value, and it is determined whether the reference value, the measured value and the theoretical value are the same; If they are the same, the maximum value is traversed from the nitrogen volume item, and the amount of nitrogen required for purging is calculated, and nitrogen is continued to be filled into the measuring point. After the purging is completed, the real-time reading of the single item is read again to determine whether it is "0". If it is not "0", the offset value is determined. If it is "0", the real-time reading is determined as the final reading; If they are different, find out the single item where the real-time reading is different from the theoretical value, and determine it as an abnormal single item, trace back the measurement point corresponding to the abnormal single item, obtain the abnormal point, integrate the abnormal single item, abnormal point, and the theoretical value and measurement value corresponding to the abnormal single item, and generate an error analysis report.

2. The method for determining abnormal AMC concentration according to claim 1, characterized in that: The S100 includes: Creating a collaborative processing framework, integrating the real-time readings into the collaborative processing framework, and inserting a direction, wherein the direction is used to characterize the correlation between single items, and the correlation includes positive correlation and negative correlation; The collected real-time readings are synchronized to the AMC online monitoring system.

3. The method for determining abnormal AMC concentration according to claim 2, characterized in that: The S200 includes: The charging authority is issued to the AMC online monitoring system, and a control point is selected from the measurement points; After the charging authority is activated, when the real-time reading in the control point is the same as the theoretical value, the charging authority is disabled, and the real-time readings in all items are defined as the reference values; It is determined whether the reference value is the same as the theoretical value. If they are different, the measurement point is marked and added to the abnormal point.

4. The method for determining abnormal AMC concentration according to claim 3, characterized in that: The S200 includes: Introducing error factors, the error factors at least include: temperature, humidity and standard gas pressure; Compare the real-time reading and theoretical value of the abnormal single item, mark the error factor of each abnormal point, and embed the verification mechanism of the error factor into the abnormal point; If the error factor passes the verification mechanism, the abnormal point is deleted.

5. The method for determining abnormal AMC concentration according to claim 4, characterized in that: The verification mechanism includes: refining the nitrogen volume items of two adjacent groups in the concentration control table, formulating a selection strategy, determining the high value and the low value, and using the error factor to correct the abnormal point.

6. The method for determining abnormal AMC concentration according to claim 5, characterized in that: The S300 includes: Query the concentration control table, traverse the nitrogen volume item corresponding to the maximum value, obtain the total amount of nitrogen that needs to be charged, and add a surplus to the total amount of nitrogen that needs to be charged based on a preset purge strategy; Based on the current real-time reading, the amount of nitrogen that has been charged is determined, the difference between the total amount of nitrogen that needs to be charged and the amount of nitrogen that has been charged is calculated, and the difference is defined as the amount of nitrogen required for purging.

7. The method for determining abnormal AMC concentration according to claim 1, characterized in that: The S300 includes: After the purge is completed, find the measurement points where the real-time reading is not "0" and determine the offset value; Using the offset value, a label is generated and inserted into the single item.

8. The method for determining abnormal AMC concentration according to claim 4, characterized in that: The method further comprises: Determine the zero point drift of each abnormal single item, configure the corresponding relationship between the zero point drift and the error factor, and draw a compensation curve; The compensation curve is used to correct the real-time reading of the abnormal single item.

9. A system for determining abnormal AMC concentration, characterized in that: The system comprises: The acquisition module is used to locate the measurement points in the AMC online monitoring system and divide them into several single items, which include at least NH3+NO+NO2, HCL+HF and SO2, and use a sampler to collect real-time readings of the single items; A selection module is used to obtain the charging authority of the discrimination gas in the measuring point, the discrimination gas includes: standard gas and nitrogen, activate the charging authority, charge a preset volume of standard gas into the measuring point, define the real-time reading of each single item as a reference value, and select a plurality of charging nitrogen volume items in a preset concentration control table, wherein the concentration control table at least includes: charging nitrogen volume items and theoretical values; A judgment module is used to charge a corresponding volume of nitrogen into the measuring point based on the charged nitrogen volume item and the charging authority, and record the real-time reading of each single item to obtain a measured value, and judge whether the reference value, the measured value and the theoretical value are the same; If they are the same, the maximum value is traversed from the nitrogen volume item, and the amount of nitrogen required for purging is calculated, and nitrogen is continued to be filled into the measuring point. After the purging is completed, the real-time reading of the single item is read again to determine whether it is "0". If it is not "0", the offset value is determined. If it is "0", the real-time reading is determined as the final reading; If they are different, find out the single item where the real-time reading is different from the theoretical value, and determine it as an abnormal single item, trace back the measurement point corresponding to the abnormal single item, obtain the abnormal point, integrate the abnormal single item, abnormal point, and the theoretical value and measurement value corresponding to the abnormal single item, and generate an error analysis report.

10. The AMC concentration abnormality determination system according to claim 9, characterized in that: The acquisition module comprises: An inserting unit, used to create a collaborative processing framework, integrate the real-time reading into the collaborative processing framework, and insert a direction, wherein the direction is used to characterize the correlation between single items, and the correlation includes positive correlation and negative correlation; The synchronization unit is used to synchronize the collected real-time readings to the AMC online monitoring system.

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