Flip mechanism and wafer detection device

Abstract

The present application provides a flip cover mechanism and a wafer detection device, the flip cover mechanism includes a first connecting plate, a second connecting plate and at least one group of hinge structures, the hinge structure includes a first connecting piece, a second connecting piece and a ball bearing assembly, the ball bearing assembly includes a first shaft cover, a spherical connecting part and a second shaft cover arranged in sequence along the axial direction, and the opposite ends of the spherical connecting part are fixedly connected to the first shaft cover and the second shaft cover respectively; the first end of the first connecting piece is fixedly connected to the first connecting plate, the second end of the first connecting piece is connected to the first shaft cover and the second shaft cover, the first end of the second connecting piece is fixedly connected to the second connecting plate, the second end of the second connecting piece is provided with a spherical cavity adapted to the spherical connecting part, the second end of the second connecting piece is sleeved on the outer peripheral side of the spherical connecting part, and is rotatably connected to the spherical connecting part; because the spherical connecting part can drive the second connecting piece to have a certain degree of swing freedom in the left and right directions, the horizontality of the flip cover mechanism in the closed state is improved.

Description

Technical Field

[0001] The present application relates to the technical field of flip cover mechanisms, and in particular to a flip cover mechanism and a wafer detection device. Background Art

[0002] Wafer inspection devices and other devices need to be equipped with a flip cover mechanism. When the flip cover needs to be opened, the left and right sides of the flip cover may be uneven and have a height difference after closing, resulting in the flip cover being uneven when closed, resulting in poor sealing of the entire device. Based on this, how to improve the levelness of the flip cover when closed has become a technical problem that needs to be solved. Summary of the invention

[0003] The present application provides a flip cover mechanism and a wafer detection device for detecting the horizontality in a closed state.

[0004] In a first aspect, an embodiment of the present application provides a flip cover mechanism, comprising:

[0005] a first connecting plate;

[0006] A second connecting plate;

[0007] At least one set of hinge structures, the hinge structure includes a first connecting member, a second connecting member and a ball bearing assembly, the ball bearing assembly includes a first shaft cover, a spherical connecting part and a second shaft cover arranged in sequence along the axial direction, the opposite ends of the spherical connecting part are fixedly connected to the first shaft cover and the second shaft cover respectively; the first end of the first connecting member is fixedly connected to the first connecting plate, the second end of the first connecting member is connected to the first shaft cover and the second shaft cover, the first end of the second connecting member is fixedly connected to the second connecting plate, the second end of the second connecting member is provided with a spherical cavity adapted to the spherical connecting part, the second end of the second connecting member is sleeved on the outer peripheral side of the spherical connecting part, and is rotatably connected to the spherical connecting part.

[0008] The present application provides a flip cover mechanism, which includes a first connecting plate, a second connecting plate and at least one set of hinge structures, wherein the hinge structure includes a first connecting piece, a second connecting piece and a ball bearing assembly, wherein the ball bearing assembly includes a first shaft cover, a spherical connecting portion and a second shaft cover which are sequentially arranged along the axial direction, and the opposite ends of the spherical connecting portion are fixedly connected to the first shaft cover and the second shaft cover respectively; the first end of the first connecting piece is fixedly connected to the first connecting plate, the second end of the first connecting piece is connected to the first shaft cover and the second shaft cover, the first end of the second connecting piece is fixedly connected to the second connecting plate, the second end of the second connecting piece is provided with a spherical cavity adapted to the spherical connecting portion, the second end of the second connecting piece is sleeved on the outer peripheral side of the spherical connecting portion and is rotatably connected to the spherical connecting portion; since the spherical connecting portion can drive the second connecting piece to have a certain degree of swing freedom in the left and right directions, the unevenness of the flip cover mechanism in the closed state is avoided, and the closing sealing of the flip cover mechanism is improved.

[0009] In an optional embodiment, the second end of the first connecting member includes a first extension end and a second extension end that are spaced apart, the second end of the second connecting member includes a third extension end, the third extension end is located between the first extension end and the second extension end, there is a first swing gap between the third extension end and the first extension end, there is a second swing gap between the third extension end and the second extension end, and the hinge structure passes through the first extension end, the third extension end and the second extension end in sequence.

[0010] In an optional embodiment, the ball bearing assembly also includes an intermediate shaft, one end of the intermediate shaft is interconnected with the first shaft cover as a whole, the intermediate shaft passes through the spherical connecting portion, the other end of the intermediate shaft is fixedly connected to the second shaft cover, one end of the first shaft cover away from the intermediate shaft abuts against a side of the first extension end away from the second extension end, and one end of the second shaft cover away from the intermediate shaft abuts against a side of the second extension end away from the first extension end.

[0011] In an optional embodiment, the flip cover mechanism also includes a locking member and an elastic member, the rotating end of the locking member is located on the side of the ball bearing assembly away from the second connecting member and is rotatably connected to the first connecting member, the movable end of the locking member abuts against the bottom of the third extension end and is connected to one end of the elastic member, and the other end of the elastic member is fixedly connected to the ball bearing assembly.

[0012] In an optional embodiment, the outer wall of the third extension end is provided with a locking groove; when the first connecting plate and the second connecting plate are in a flattened state, the locking groove and the ball bearing assembly are both located on the same side of the locking member; when the first connecting plate and the second connecting plate are in an angled state, the third extension end rotates until the groove wall of the locking groove engages with the rotating end of the locking member.

[0013] In an optional embodiment, the flip mechanism further includes a connecting rod, one end of which is passed through the movable end of the locking member, and the other end of the connecting rod is located outside the locking member and connected to one end of the elastic member.

[0014] In an optional embodiment, the movable end of the locking member has a limiting groove, the outer peripheral wall of the movable end of the locking member has an inlet and a limiting opening connected to the inlet, the inlet and the limiting opening are both connected to the limiting groove, and the inlet is located on the side where the ball bearing assembly is located;

[0015] The flip cover mechanism also includes a pulling member, one end of which is a large end, the large end of which is arranged in the limiting groove, the size of which is smaller than or equal to the size of the inlet, the size of which is larger than the size of the limiting opening, and the other end of the pulling member extends out through the limiting opening.

[0016] In an optional embodiment, the first connecting plate is a fixed plate, and the second connecting plate is a rotating cover plate; or, the first connecting plate is a rotating cover plate, and the second connecting plate is a fixed plate;

[0017] A first inclined wall is provided on the side of the rotating cover plate facing the fixed plate, and a second inclined wall is provided on the side of the fixed plate facing the rotating cover plate. The first inclined wall is opposite to and parallel to the second inclined wall, and the top side end of the first inclined wall is close to the fixed plate relative to the bottom side end of the first inclined wall.

[0018] In the second aspect, an embodiment of the present application provides a wafer detection device, including the aforementioned flip-cover mechanism, and the wafer detection device also includes a box body, one of the first connecting plate and the second connecting plate is fixedly connected to the box body, and the other of the first connecting plate and the second connecting plate rotates relative to the box body.

[0019] In an optional embodiment, the wafer inspection device further comprises a sealing strip, the sealing strip is attached to the top surface of the box, and the inner side surface of the rotating cover of the flip mechanism and the top surface of the box are sealed by the sealing strip;

[0020] The wafer inspection device also includes at least three horizontal adjustment components, a part of the horizontal adjustment components is arranged on the box body, and another part of the horizontal adjustment components is arranged on the rotating cover of the flip mechanism. At least three of the horizontal adjustment components are arranged at intervals on at least three sides of the rotating cover, and at least three of the horizontal adjustment components are used to adjust the horizontality of the rotating cover.

[0021] A wafer detection device provided by the present application includes a box body and the aforementioned flip cover mechanism, one of the first connecting plate and the second connecting plate is fixedly connected to the box body, and the other of the first connecting plate and the second connecting plate rotates relative to the box body, the flip cover mechanism includes the first connecting plate, the second connecting plate and at least one set of hinge structures, the hinge structure includes a first connecting member, a second connecting member and a ball bearing assembly, the ball bearing assembly includes a first shaft cover, a spherical connecting portion and a second shaft cover arranged in sequence along the axial direction, and the opposite two ends of the spherical connecting portion are fixedly connected to the first shaft cover and the second shaft cover respectively; the first end of the first connecting member is fixedly connected to the first connecting plate, the second end of the first connecting member is connected to the first shaft cover and the second shaft cover, and the first end of the second connecting member is fixedly connected to the second connecting plate, The second end of the second connecting member is provided with a spherical cavity adapted to the spherical connecting portion, and the second end of the second connecting member is sleeved on the outer peripheral side of the spherical connecting portion and is rotatably connected to the spherical connecting portion; since the spherical connecting portion can drive the second connecting member to have a certain degree of swing freedom in the left and right directions, the unevenness of the flip cover mechanism in the closed state is avoided, thereby improving the closing sealing of the wafer detection device; the wafer detection device also includes at least three horizontal adjustment components, a part of the horizontal adjustment component is arranged on the box body, and another part of the horizontal adjustment component is arranged on the rotating cover plate of the flip cover mechanism, and at least three of the horizontal adjustment components are arranged at intervals on at least three sides of the rotating cover plate, and at least three of the horizontal adjustment components are used to adjust the horizontality of the rotating cover plate to improve the horizontal flatness of the flip cover mechanism of the wafer detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments are briefly introduced below.

[0023] Figure 1 is a side view of the flip mechanism of the flip device provided by the embodiment of the present application in a closed state;

[0024] Figure 2 is a side view of the flip mechanism of the flip device provided by the embodiment of the present application in an open state;

[0025] Figure 3is a three-dimensional schematic diagram of a flip mechanism of a flip device provided by an embodiment of the present application in an open state;

[0026] Figure 4 is a three-dimensional schematic diagram of a flip mechanism of a flip device provided by an embodiment of the present application in a closed state;

[0027] Figure 5 is a three-dimensional schematic diagram of a hinge structure provided in an embodiment of the present application;

[0028] Figure 6 This is a three-dimensional exploded schematic diagram of the hinge structure provided in the embodiment of the present application. Figure 1 ;

[0029] Figure 7 This is a three-dimensional exploded schematic diagram of the hinge structure provided in the embodiment of the present application. Figure 2 ;

[0030] Figure 8 This is a three-dimensional exploded schematic diagram of the hinge structure provided in the embodiment of the present application. Figure 3 ;

[0031] Fig. 9 is a partial top view of the hinge structure provided in an embodiment of the present application;

[0032] Fig.10 is a side view of the flip cover mechanism provided by the embodiment of the present application in a closed state;

[0033] Fig.11 yes Fig.10 A partial enlarged schematic diagram of the flip mechanism provided in the middle C area;

[0034] Fig.12 is a side view of the flip mechanism provided in the embodiment of the present application in an open state;

[0035] Fig.13 yes Fig.12 The D area in the middle provides a partial enlarged schematic diagram of the flip mechanism;

[0036] Fig.14 is a three-dimensional schematic diagram of a flip cover mechanism provided in an embodiment of the present application in an open state;

[0037] Fig.15 yes Fig.14 A partial enlarged schematic diagram of the flip mechanism provided in the middle E area;

[0038] Fig.16 It is a three-dimensional schematic diagram of a first connecting member, a ball bearing assembly, a locking member, an elastic member and a pulling member provided in an embodiment of the present application;

[0039] Fig.17Schematic diagram of a three-dimensional exploded view of a first connecting member, a ball bearing assembly, a locking member, an elastic member and a pulling member provided in an embodiment of the present application Figure 1 ;

[0040] Fig.18 Schematic diagram of a three-dimensional exploded view of a first connecting member, a ball bearing assembly, a locking member, an elastic member and a pulling member provided in an embodiment of the present application Figure 2 ;

[0041] Fig.19 yes Figure 3 A partial enlarged schematic diagram of the flip mechanism provided in area A in the middle;

[0042] Fig. 20 yes Figure 4 A partial enlarged schematic diagram of the flip mechanism provided in area B in the middle;

[0043] Fig.21 is a side view of a sealing strip provided between a rotating cover plate and a fixed plate provided in an embodiment of the present application;

[0044] Fig. 22 It is a structural schematic diagram of a rotating cover provided in an embodiment of the present application with a needle clamp and a horizontal adjustment component;

[0045] Fig.23 is a three-dimensional schematic diagram of a level adjustment assembly provided in an embodiment of the present application;

[0046] Fig.24 It is a cross-sectional view of a horizontal adjustment assembly provided in an embodiment of the present application, which is arranged on a rotating cover plate and a fixed plate.

[0047] Description of Figure Numbers:

[0048] Flip cover device 1000; wafer inspection device 1000`; flip cover mechanism 100; horizontal adjustment component 130; first adjustment component 130a; second adjustment component 130b; third adjustment component 130c; fourth adjustment component 130d; box 200; sealing strip 300; first connecting plate 10; fixed plate 10`; second inclined wall 11; second connecting plate 20; rotating cover plate 20`; first corner position 20a; second corner position 20b; third corner position 20c; fourth corner position 20d; first inclined wall 21; hinge structure 30; first connecting member 31; first extension end 311; second extension end 312; second connecting member 32; third extension end 321 ; Break 322; Positioning groove 323; Ball bearing assembly 33; First shaft cover 331; Spherical connecting part 332; Second shaft cover 333; Radial spherical sliding bearing 334; Intermediate shaft 335; Extension shaft 336; Insertion rod 337; First hook part 338; Locking member 41; Rotating end 411; Movable end 412; Limiting groove 413; Inlet 414; Limiting opening 415; Elastic member 42; Connecting rod 43; Second hook part 431; Pulling member 44; Big end 441; Draw rope 442; Width direction X; Length direction Y; Height direction Z; Needle clamp 210; Positioning member 131; Adjusting cylinder 132; Clamping member 133; Bottom member 134; Locking member 135; Through hole 122. DETAILED DESCRIPTION

[0049] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the embodiments described in the present application are only a part of the embodiments, not all of the embodiments. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in this field without creative work belong to the protection scope of the present application.

[0050] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it mutually exclusive, independent, or alternative to other embodiments. It can be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments.

[0051] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example: a component or device including one or more parts is not limited to the one or more parts listed, but optionally includes one or more parts that are not listed but inherent to the exemplified product, or one or more parts that it should have based on the described function.

[0052] The present application provides a flip mechanism 100 that is flat in a closed state and a device having the flip mechanism 100. The device having the flip mechanism 100 includes but is not limited to a flip device 1000 that needs to be provided with a flip cover, such as a wafer inspection device.

[0053] See also Figure 1 and Figure 2 The flip device 1000 includes a flip mechanism 100 and a box body 200. The flip mechanism 100 is rotatably connected to the box body 200.

[0054] See also Figure 3 and Figure 4 The flip cover mechanism 100 includes a first connecting plate 10 , a second connecting plate 20 and at least one set of hinge structures 30 .

[0055] One of the first connecting plate 10 and the second connecting plate 20 is a relatively fixed structure, and the other is a relatively rotating structure. Optionally, the first connecting plate 10 is fixedly connected to the box body 200 or the first connecting plate 10 is a part of the box body 200, and the second connecting plate 20 is fixedly connected to the flip mechanism 100 or the second connecting plate 20 is a part of the flip mechanism 100. The following embodiments take this implementation as an example. Optionally, the second connecting plate 20 is fixedly connected to the box body 200 or the second connecting plate 20 is a part of the box body 200, and the first connecting plate 10 is fixedly connected to the flip mechanism 100 or the first connecting plate 10 is a part of the flip mechanism 100. In other words, one of the first connecting plate 10 and the second connecting plate 20 is fixedly connected to the box body 200. The other of the first connecting plate 10 and the second connecting plate 20 rotates relative to the box body 200.

[0056] See also Figure 3 and Figure 4 The first connecting plate 10 and the second connecting plate 20 are arranged in sequence along the length direction Y in a flattened state.

[0057] See also Figure 3 and Figure 4 The hinge structure 30 is connected between the first connecting plate 10 and the second connecting plate 20 .

[0058] The present application does not specifically limit the number of hinge structures 30. Optionally, the number of hinge structures 30 includes but is not limited to 1, 2, 3, 4, etc.

[0059] When the number of the hinge structure 30 is one, the flip mechanism 100 further includes another hinge assembly, the structure of which may be different from the hinge structure 30 and may be a hinge in general technology. The hinge structure 30 and the hinge assembly are spaced apart in the width direction X.

[0060] The more the number of hinge structures 30 is, the more stable the flip mechanism 100 is in rotation. However, the more the number of hinge structures 30 is, the higher the cost is and the stability in the width direction X may be affected.

[0061] See also Figure 3 and Figure 4 In this embodiment, the number of hinge structures 30 is two for example. The two hinge structures 30 are arranged at intervals along the width direction X. The two hinge structures 30 are both close to the edge position of the flip mechanism 100 in the width direction X.

[0062] The specific structure of a hinge structure 30 is described below by way of example with reference to the accompanying drawings.

[0063] See also Figures 5 to 8 The hinge structure 30 includes a first connecting member 31, a second connecting member 32 and a ball bearing assembly 33. The first connecting member 31, the ball bearing assembly 33 and the second connecting member 32 are sequentially arranged and connected along the length direction Y.

[0064] See also Figure 8 The ball bearing assembly 33 includes a first shaft cover 331, a spherical connecting portion 332 and a second shaft cover 333 which are sequentially arranged along the axial direction. The axial direction refers to the aforementioned width direction X. The width direction X is perpendicular to the length direction Y.

[0065] See also Figure 6 , the opposite ends of the spherical connection part 332 are fixedly connected to the first shaft cover 331 and the second shaft cover 333 respectively. The distance between the first shaft cover 331 and the second shaft cover 333 is relatively fixed, which will be described in detail later. The spherical connection part 332 is arranged between the first shaft cover 331 and the second shaft cover 333, and can rotate in any direction. At least most of the structure of the spherical connection part 332 is spherical. Optionally, the spherical connection part 332 has a spherical surface. The spherical surface can be a complete spherical surface or a spherical surface with both ends along the axial direction removed. In this embodiment, the spherical connection part 332 with both ends along the axial direction removed is used as an example for illustration.

[0066] Optional, see Figure 6 The first shaft cover 331 and the second shaft cover 333 are respectively fixedly connected to two ends of the spherical connecting portion 332 along the axial direction.

[0067] The first end of the first connecting member 31 is fixedly connected to the first connecting plate 10. The fixed connection described in the present application includes but is not limited to one-piece molding or screw fixed connection. The first end of the first connecting member 31 is roughly a rectangular block in the width direction X and the length direction Y. The first end of the first connecting member 31 is interconnected with the second end of the first connecting member 31 as a whole.

[0068] See also Figure 7 The second end of the first connecting member 31 is connected to the first shaft cover 331 and the second shaft cover 333. The first end and the second end of the first connecting member 31 are arranged along the length direction Y. The first end of the first connecting member 31 can be fixed to the first connecting plate 10 along the height direction Z by screws.

[0069] See also Figure 7 , a part of the second end of the first connecting member 31 is fixedly connected to the first shaft cover 331, and another part of the second end of the first connecting member 31 is fixedly connected to the second shaft cover 333. The ball bearing assembly 33 is fixedly connected to the second end of the first connecting member 31 by screws along the width direction X. The ball bearing assembly 33 and the second end of the first connecting member 31 are clamped and limited to each other in the width direction X.

[0070] See also Figure 7 The first end of the second connecting member 32 is fixedly connected to the second connecting plate 20. The fixed connection described in the present application includes but is not limited to integral molding or screw fixed connection.

[0071] See also Figure 7 The second end of the second connecting member 32 is provided with a spherical cavity adapted to the spherical connecting portion 332. The spherical cavity is conformal to most of the spherical surface of the spherical connecting portion 332, so that the second end of the second connecting member 32 can limit the spherical connecting portion 332.

[0072] See also Figure 7 The second end of the second connecting member 32 is sleeved on the outer peripheral side of the spherical connecting portion 332 and is rotatably connected to the spherical connecting portion 332 .

[0073] A small portion of the spherical surface is exposed outside the spherical cavity at both ends of the spherical connection part 332. The rotation between the second end of the second connection member 32 and the spherical connection part 332 is not only a rotation around the width direction X, but also includes that the second connection member 32 can also have a certain degree of freedom of swinging toward the width direction X (left and right).

[0074] The central axis of the spherical cavity at the second end of the second connecting member 32 may be collinear or non-collinear with the central axis of the ball bearing assembly 33. In other words, the hinge structure 30 provided by the present application can allow the central axis of the spherical cavity at the second end of the second connecting member 32 to be non-collinear with the central axis of the ball bearing assembly 33, has a strong tolerance, and reduces the control of the processing accuracy and assembly accuracy of the flip mechanism 100.

[0075] In this embodiment, two hinge structures 30 are arranged at intervals along the width direction X. At this time, the number of the first connecting member 31, the second connecting member 32, and the ball bearing assembly 33 is 2. The two second connecting members 32 are arranged at intervals along the width direction X. The two first connecting members 31 are arranged at intervals along the width direction X.

[0076] The flip cover mechanism 100 provided in this embodiment allows the axial direction of the second connecting member 32 and the axial direction of the ball bearing assembly 33 to have a certain degree of yaw freedom, thereby promoting the central axes of the two second connecting members 32 to be in line with each other.

[0077] After a general hinge assembly connects the first connecting member 31 and the second connecting member 32, the hinge assembly can support the first connecting member 31 and the second connecting member 32 to rotate around the axis. However, when the axes of the hinge assemblies on the left and right sides of the flip mechanism 100 are not colinear, the flip mechanism 100 may become stuck in rotation or one side may not be completely closed during the closing process, and the flip device 100 may have poor sealing.

[0078] In the present application, when the axial directions of the hinge structures 30 on the left and right sides of the flip mechanism 100 are not collinear, for example, the axial direction of the hinge structure 30 on one side is parallel to the width direction X, and the axial direction of the hinge structure 30 on the other side has a certain angle with the width direction X, and is tilted upward at a smaller angle toward the outside. Based on this, the upper side of the second end of the second connecting member 32 of the hinge structure 30 on the other side can be swung toward the outside relative to the spherical connecting portion 332, and at the same time, the lower side of the second end of the second connecting member 32 of the hinge structure 30 can be swung toward the inside relative to the spherical connecting portion 332, even when the axial directions of the two ball bearing assemblies 33 on the two sides of the flip mechanism 100 in the width direction X are not collinear, it is ensured that the axial directions of the second connecting members 32 on the two sides of the flip mechanism 100 in the width direction X are collinear.

[0079] The present application provides a flip cover mechanism 100, which includes a first connecting plate 10, a second connecting plate 20 and at least one set of hinge structures 30. The hinge structure 30 includes a first connecting member 31, a second connecting member 32 and a ball bearing assembly 33. The ball bearing assembly 33 includes a first shaft cover 331, a spherical connecting portion 332 and a second shaft cover 333 arranged in sequence along the axial direction. The opposite ends of the spherical connecting portion 332 are fixedly connected to the first shaft cover 331 and the second shaft cover 333 respectively; the first end of the first connecting member 31 is fixedly connected to the first connecting plate 10, and the The second end is connected to the first shaft cover 331 and the second shaft cover 333, the first end of the second connecting member 32 is fixedly connected to the second connecting plate 20, the second end of the second connecting member 32 is provided with a spherical cavity adapted to the spherical connecting portion 332, the second end of the second connecting member 32 is sleeved on the outer peripheral side of the spherical connecting portion 332, and is rotatably connected to the spherical connecting portion 332; since the spherical connecting portion 332 can drive the second connecting member 32 to have a certain degree of swing freedom in the left and right directions, the unevenness of the flip cover mechanism 100 in the closed state is avoided, and the closing sealing of the flip cover mechanism 100 is improved.

[0080] Optional, see Figure 6 The second end of the first connecting member 31 includes a first extending end 311 and a second extending end 312 which are spaced apart along the width direction X.

[0081] The first extension end 311 and the second extension end 312 both extend from the first end of the first connecting member 31 along the length direction Y. The first extension end 311 is block-shaped with relatively large dimensions in the length direction Y and the height direction Z. The dimension of the first extension end 311 in the width direction X is smaller than the dimensions in other directions. The structure of the second extension end 312 is the same as that of the first extension end 311.

[0082] See also Figure 6 , the second end of the second connecting member 32 includes a third extension end 321. Further, the second end of the second connecting member 32 is the third extension end 321. The third extension end 321 is a block-shaped with relatively large dimensions in the length direction Y and the height direction Z. The dimension of the third extension end 321 in the width direction X is smaller than the dimensions in other directions.

[0083] Optionally, the third extension end 321 has a spherical cavity. The inner wall of the spherical cavity of the third extension end 321 is a partial spherical surface. Wherein, both ends of the spherical cavity of the third extension end 321 along the axial direction are openings.

[0084] The present application designs the structure of the third extension end 321 so that the third extension end 321 can accommodate the spherical connection part 332 and can rotate around the axial direction of the spherical connection part 332 and deflect along the spherical surface of the spherical connection part 332 in the width direction X and other directions.

[0085] For optional reference, see Figure 8 The third extension end 321 has a cylindrical cavity, and a radial spherical sliding bearing 334 is provided between the third extension end 321 and the spherical connection portion 332. The third extension end 321 is sleeved on the outer side of the radial spherical sliding bearing 334, and the radial spherical sliding bearing 334 is provided on the spherical connection portion 332. The cylindrical cavity in the third extension end 321 accommodates the radial spherical sliding bearing 334.

[0086] Optionally, the radial spherical sliding bearing 334 and the spherical connecting portion 332 are fixed to each other in the circumferential direction, the third extension end 321 and the radial spherical sliding bearing 334 can move relative to each other in the circumferential direction, and the third extension end 321 and the radial spherical sliding bearing 334 together swing around the spherical surface of the spherical connecting portion 332 .

[0087] Optionally, the radial spherical sliding bearing 334 is interconnected with the third extension end 321 as a whole. The radial spherical sliding bearing 334 rotates around the spherical connection part 332 and deflects around the spherical surface of the spherical connection part 332 together with the third extension end 321 .

[0088] See also Figure 6 and Figure 8 , the third extension end 321 is an unclosed end. In other words, the third extension end 321 is provided with a break 322 in the radial direction connecting the spherical cavity with the outside. Optionally, the break 322 can be provided at the bottom of the spherical cavity. The size of the break 322 is adjustable to install the spherical connection part 332 into the spherical cavity. After the spherical connection part 332 is installed into the spherical cavity, the solid structure parts on both sides of the break 322 are fixed by screws to limit the spherical connection part 332 in the spherical cavity, and the axial ends of the spherical connection part 332 slightly protrude from the spherical cavity.

[0089] The third extension end 321 is located between the first extension end 311 and the second extension end 312. The third extension end 321 with the assembled spherical connection part 332 is arranged between the first extension end 311 and the second extension end 312, wherein the axial ends of the spherical connection part 332 can abut against the first extension end 311 and the second extension end 312 respectively.

[0090] The first extension end 311 , the second extension end 312 and the third extension end 321 of the second connection member 31 provided in this embodiment are alternately arranged to increase the number of structural members connected to the ball bearing assembly 33 , thereby increasing the connection strength between the first connection member 31 and the second connection member 32 .

[0091] See also Fig. 9 The two axial ends of the spherical connection part 332 slightly protrude from the spherical cavity, and the two axial ends of the spherical connection part 332 are respectively connected to the first extension end 311 and the second extension end 312, and a first swing gap H1 is provided between the third extension end 321 and the first extension end 311. A second swing gap H2 is provided between the third extension end 321 and the second extension end 312. In this way, the third extension end 321 can swing around the spherical surface of the spherical connection part 332 toward the side where the first extension end 311 is located or the side where the second extension end 312 is located, wherein the swing direction can be any direction around the spherical surface, thereby ensuring that the axial directions of the second connection members 32 on both sides of the width direction X of the flip cover mechanism 100 are collinear, avoiding the flip cover mechanism 100 from being uneven in the closed state, and improving the closed sealing performance of the flip cover mechanism 100.

[0092] See also Figure 6 The ball bearing assembly 33 sequentially passes through the first extension end 311, the third extension end 321 and the second extension end 312, and fixes the first extension end 311, the third extension end 321 and the second extension end 312 along the width direction X. Specifically, the end of the first shaft cover 331 away from the second shaft cover 333 has a step surface for limiting and abutting the side of the first extension end 311 away from the second extension end 312, and the end of the second shaft cover 333 away from the first shaft cover 331 has a step surface for limiting and abutting the side of the second extension end 312 away from the first extension end 311. By fixing the first shaft cover 331 and the second shaft cover 333 to each other, the first extension end 311, the third extension end 321 and the second extension end 312 are fixed together.

[0093] Optional, see Figure 8 The ball bearing assembly 33 also includes an intermediate shaft 335 .

[0094] See also Figure 8 One end of the intermediate shaft 335 is interconnected with the first shaft cover 331 as a whole, the middle section of the intermediate shaft 335 passes through the spherical connecting portion 332, and the other end of the intermediate shaft 335 is fixedly connected to the second shaft cover 333.

[0095] One end of the first shaft cover 331 away from the intermediate shaft 335 abuts against a side of the first extension end 311 away from the second extension end 312 . One end of the second shaft cover 333 away from the intermediate shaft 335 abuts against a side of the second extension end 312 away from the first extension end 311 .

[0096] See also Figure 8The end of the first shaft cover 331 away from the intermediate shaft 335 is an extended end extending outward in the circumferential direction, the first extended end 311 penetrates from the other end of the intermediate shaft 335, and the extended end of the first shaft cover 331 away from the intermediate shaft 335 abuts against the side of the first extended end 311 away from the second extended end 312.

[0097] See also Figure 8 The spherical connecting part 332 is a hollow structure. The middle section of the intermediate shaft 335 passes through the spherical connecting part 332. The third extension end 321 is sleeved on the outer side of the spherical connecting part 332.

[0098] See also Figure 8 , the second extension end 312 is arranged on the side of the third extension end 321 away from the first extension end 311. One end of the second shaft cover 333 facing the first shaft cover 331 passes through the through hole arranged at the second extension end 312. One end of the second shaft cover 333 away from the first shaft cover 331 is an extended end extending outward in the circumferential direction, and the extended end of the second shaft cover 333 away from the intermediate shaft 335 abuts against the side of the second extension end 312 away from the first extension end 311. The first shaft cover 331 and the intermediate shaft 335 are fixed axially by screws to fix the first extension end 311, the third extension end 321, the second extension end 312, and the ball bearing assembly 33 in the axial direction.

[0099] For details, please refer to Figures 10 to 13 The flip cover mechanism 100 further includes a locking member 41 and an elastic member 42 .

[0100] See also Figures 10 to 13 The rotating end 411 of the locking member 41 is located at a side of the ball bearing assembly 33 away from the second connecting member 32 and is rotationally connected to the first connecting member 31 .

[0101] Further, the orthographic projection of the locking member 41 in the height direction Z is located between the first extension end 311 and the second extension end 312. The rotating end 411 of the locking member 41 is rotatably connected to the position where the first end and the second end of the first connecting member 31 are connected.

[0102] The rotating end 411 of the locking member 41 is connected between the first extending end 311 and the second extending end 312 via a rotating shaft arranged in the width direction X.

[0103] See also Figures 10 to 13 The movable end 412 of the locking member 41 abuts against the bottom of the third extending end 321 and is connected to one end of the elastic member 42 , and the other end of the elastic member 42 is fixedly connected to the ball bearing assembly 33 .

[0104] Optionally, the elastic member 42 includes but is not limited to a spring.

[0105] Optional, see Figures 10 to 13 An extension shaft 336 extends from one end of the intermediate shaft 335 away from the first shaft cover 331 , and the extension shaft 336 passes through the second shaft cover 333 and partially exposes the second shaft cover 333 .

[0106] See also Fig.14 and Fig.15 The extension shaft 336 is provided with an axially arranged insertion rod 337, one end of the insertion rod 337 is fixed to the extension shaft 336, and the other end of the insertion rod 337 extends out of the extension shaft 336 and forms a first hook portion 338. The other end of the elastic member 42 is hung on the first hook portion 338.

[0107] The present application designs the flip mechanism 100 to also include a locking member 41 and an elastic member 42. The rotating end 411 of the locking member 41 is rotatably connected to the first connecting member 31. The elastic tension provided by the elastic member 42 causes the movable end 412 of the locking member 41 to abut against the bottom of the third extending end 321.

[0108] During the opening and closing process of the flip mechanism 100, the third extension end 321 rotates relative to the first extension end 311, the second extension end 312, the locking member 41, etc., and the position where the outer peripheral wall of the third extension end 321 abuts against the movable end 412 of the locking member 41 changes with the opening and closing angle of the flip mechanism 100.

[0109] See also Fig.11 , Fig.13 and Fig.15 The outer peripheral wall of the third extension end 321 is provided with a locking groove 323.

[0110] See also Fig.11 When the first connecting plate 10 and the second connecting plate 20 are in a flattened state, the flip cover mechanism 100 covers the box body 200, and the movable end 412 of the locking member 41 abuts against the first position on the outer peripheral wall of the third extension end 321, and the locking groove 323 is located on the side of the first position away from the second connecting plate 20.

[0111] See also Fig.13 and Fig.15 When the first connecting plate 10 and the second connecting plate 20 are at an angle, the movable end 412 of the locking member 41 abuts against the wall of the locking groove 323, so that the flip mechanism 100 can be maintained at the current angle to maintain the open cover state.

[0112] The present application does not specifically limit the angle between the first connecting plate 10 and the second connecting plate 20 when the movable end 412 of the locking member 41 abuts against the groove wall of the locking groove 323. Optionally, the angle between the first connecting plate 10 and the second connecting plate 20 includes but is not limited to 0°~90°. Further optionally, the angle between the first connecting plate 10 and the second connecting plate 20 includes but is not limited to 10°~60°. Further optionally, the angle between the first connecting plate 10 and the second connecting plate 20 includes but is not limited to 10°~45°. For example, the angle between the first connecting plate 10 and the second connecting plate 20 includes but is not limited to 10°, 15°, 20°, 25°, 30°, 35°, 40°, 45°, 50°, 55°, 60°, etc. If the angle between the first connecting plate 10 and the second connecting plate 20 is too small, the cover opening space is too small, and the needle card cannot be placed (taking the flip cover device 1000 as a wafer detection device as an example), etc. If the angle between the first connecting plate 10 and the second connecting plate 20 is too large, the hinge structure 30 needs to bear a larger supporting force, which may damage the hinge structure 30 .

[0113] In this embodiment, a locking groove 323 is provided on the outer wall of the third extension end 321 , and a locking member 41 and an elastic member 42 are provided in combination to design the position of the locking groove 323 , so that the first connecting plate 10 and the second connecting plate 20 can be automatically kept in the open state.

[0114] The present application does not specifically limit the number of the positioning grooves 323. Optionally, the outer peripheral wall of the third extension end 321 is sequentially provided with a plurality of positioning grooves 323. The plurality of positioning grooves 323 respectively maintain different opening angles, for example, 10°, 15°, 20°, 25°, 30°, 35°, 40°, 45°, etc.

[0115] Furthermore, a second locking groove can be provided on the outer peripheral wall of the third extension end 321, and when the first connecting plate 10 and the second connecting plate 20 are in a flattened state, the movable end 412 of the locking member 41 abuts against the groove wall of the second locking groove, so that the flip cover mechanism 100 can be maintained in the closed and locked state.

[0116] Optional, see Figures 15 to 18 The flip cover mechanism 100 further includes a connecting rod 43. The connecting rod 43 is arranged along the width direction X.

[0117] See also Figures 15 to 18, one end of the connecting rod 43 is inserted through the movable end 412 of the locking member 41, and the other end of the connecting rod 43 is located outside the locking member 41 and connected to one end of the elastic member 42. Optionally, one end of the connecting rod 43 is fixed to the movable end 412 of the locking member 41. The other end of the connecting rod 43 extends out of the locking member 41 and forms a second hook portion 431. One end of the elastic member 42 is hung on the second hook portion 431.

[0118] In this embodiment, the locking member 41, the connecting rod 43 and the elastic member 42 are designed to cooperate with each other. One end of the connecting rod 43 is inserted into the movable end 412 of the locking member 41, and the other end of the connecting rod 43 is located outside the locking member 41 and connected to one end of the elastic member 42, so that the movable end 412 of the locking member 41 can abut against the bottom of the third extension end 321 under the elastic pulling force of the elastic member 42, so that when the flip mechanism 100 is rotated to a preset angle, the locking member 41 abuts against the locking groove 323 of the third extension end 321 under the elastic pulling force of the elastic member 42, and even if the external force of the flip mechanism 100 is removed, the flip mechanism 100 can maintain its opening angle under the abutment between the locking member 41 and the third extension end 321.

[0119] The present embodiment also has the following structural design, so that the flip mechanism 100 can switch from the cover-opening locking state to the free rotation state: Optionally, the locking member 41 is rotated to move the movable end 412 of the locking member 41 out of the locking slot 323 .

[0120] Optional, see Figures 15 to 18 , the flip cover mechanism 100 further includes a pulling member 44. The pulling member 44 is connected to the locking member 41, and is used to drive the locking member 41 to rotate, thereby moving the movable end 412 of the locking member 41 out of the locking groove 323. At this time, the third extension end 321 is not restricted by the locking member 41, so the second connecting plate 20 can rotate freely, and the flip cover mechanism 100 is in a free rotation state.

[0121] Optionally, the pulling member 44 is connected to the movable end 412 of the locking member 41 . This connection position makes the pulling process of the pulling member 44 more labor-saving.

[0122] For further optional information, see Figures 15 to 18 , the movable end 412 of the locking member 41 has a limiting groove 413. The outer peripheral wall of the movable end 412 of the locking member 41 has an inlet 414 and a limiting opening 415 connected to the inlet 414. The inlet 414 and the limiting opening 415 are both connected to the limiting groove 413. The inlet 414 is located on the side where the ball bearing assembly 33 is located. The inlet 414 is provided on the top surface of the movable end 412 of the locking member 41. The limiting opening 415 extends from the top surface of the movable end 412 and the side surface of the movable end 412 to the bottom surface of the movable end 412.

[0123] The inlet 414 and the limiting groove 413 are connected to form a limiting chamber. The inlet 414 can be regarded as an opening formed on the top surface of the limiting chamber. The size of the limiting opening 415 is smaller than the radial size of the limiting chamber. The limiting opening 415 can be regarded as a narrow slit.

[0124] See also Figures 15 to 18 One end of the pulling member 44 is a large end 441. The large end 441 of the pulling member 44 is disposed in the limiting groove 413. The size of the large end 441 of the pulling member 44 is smaller than or equal to the size of the inlet 414. The size of the large end 441 of the pulling member 44 is larger than the size of the limiting opening 415, and the other end of the pulling member 44 extends out through the limiting opening 415.

[0125] The large end 441 of the pulling member 44 enters the limiting chamber from the inlet 414, and the other end of the pulling member 44 moves along the limiting opening 415 to the bottom of the movable end 412 of the locking member 41, so that the large end 441 of the pulling member 44 and the adjacent portion are in a vertical state, so that when pulling, the pulling member 44 applies a downward pulling force to the movable end 412 of the locking member 41. Of course, in other embodiments, the extension direction of the large end 441 of the pulling member 44 and the adjacent portion may also have a certain angle with the height direction Z, for example, the extension direction of the large end 441 of the pulling member 44 and the adjacent portion is perpendicular to the extension direction of the locking member 41, so that when pulling, the pulling member 44 applies a pulling force to the movable end 412 of the locking member 41 with a higher efficiency and more labor-saving.

[0126] Optional, see Figures 15 to 18 One end of the pulling member 44 is a large end 441, and the other part of the pulling member 44 is a pull rope 442. The pull rope 442 passes through the limiting opening 415 and extends to the operating part of the outer surface of the box body 200. When the supporting force is applied to the second connecting plate 20, when the pulling member 44 is pulled at the operating part of the outer surface of the box body 200, the pulling member 44 drives the locking member 41 to rotate downward, so that the movable end 412 of the locking member 41 rotates out of the locking groove 323. At this time, the second connecting plate 20 can rotate freely.

[0127] Optionally, the large end 441 of the pulling member 44 may be a spherical end, and the limiting chamber may be a cylindrical chamber. This embodiment can facilitate the pulling member 44 to rotate 180° in the cylindrical chamber, and can also facilitate the large end 441 of the pulling member 44 to adjust the position, so that the large end 441 of the pulling member 44 and the surrounding part extend in a preset direction (for example, the height direction Z), which is convenient for applying pulling force and labor-saving operation.

[0128] The pull cord 442 is made of a rigid material so as to improve the structural strength of the pull cord 442 itself and improve the operational reliability of unlocking the flip cover mechanism 100 from the open cover locking state.

[0129] Optionally, the pull rope 442 includes but is not limited to a steel wire rope.

[0130] In an alternative embodiment, see Figure 3 and Figure 4 The first connecting plate 10 is a fixed plate 10 ′ and the second connecting plate 20 is a rotating cover plate 20 ′. The fixed plate 10 ′ is fixed relative to the box body 200 , and the rotating cover plate 20 ′ can rotate relative to the box body 200 .

[0131] In another optional embodiment, the first connecting plate 10 is a rotating cover plate 20 ′ and the second connecting plate 20 is a fixed plate 10 ′. The fixed plate 10 ′ is fixed relative to the box body 200 , and the rotating cover plate 20 ′ can rotate relative to the box body 200 .

[0132] In specific applications, the sealing of the flip cover device 1000 has a great influence on its performance. For example, the flip cover device 1000 is used as a wafer detection device 1000`, and the wafer detection device 1000` is a detection device for detecting wafers. In the wafer detection device 1000`, the sample to be detected is often automatically transferred to the sample chamber by a robotic arm to detect the sample to be detected. When it is necessary to manually place the sample to be detected in the sample chamber, it is often necessary to open the flip cover of the wafer detection device 1000` to facilitate the operator to place the sample into the sample chamber. However, after the flip cover of the wafer detection device 1000` is opened, the cover is not tightly closed, which may easily lead to dust entering, affecting the detection results or when the sample reaction / detection may occur in a low temperature environment, it is easy to cause frost and other problems, affecting the detection effect.

[0133] Based on this, the embodiment of the present application also provides the following implementation to improve the sealing performance of the flip mechanism 100.

[0134] See also Figure 3 , Figure 4 , Fig.19 and Fig. 20, a first inclined wall 21 is provided on the side of the rotating cover plate 20' facing the fixed plate 10'. A second inclined wall 11 is provided on the side of the fixed plate 10' facing the rotating cover plate 20'. The first inclined wall 21 and the second inclined wall 11 are arranged opposite and parallel to each other. Further, a small assembly gap is provided between the first inclined wall 21 and the second inclined wall 11. The top side end of the first inclined wall 21 is closer to the fixed plate 10' relative to the bottom side end of the first inclined wall 21. The top side end of the second inclined wall 11 is further away from the rotating cover plate 20' relative to the bottom side end of the second inclined wall 11.

[0135] The top side end of the first inclined wall 21 is a side of the rotating cover plate 20 ′ with a higher height in the direction Z. The bottom side end of the first inclined wall 21 is a side of the rotating cover plate 20 ′ with a lower height in the direction Z.

[0136] The present application does not impose any specific limitation on the inclination angle of the first inclined wall 21. For example, the angle between the first inclined wall 21 and the height direction Z is between 0° and 60°.

[0137] Compared with setting a first vertical wall on the side of the rotating cover plate 20' facing the fixed plate 10' and setting a second vertical wall on the side of the fixed plate 10' facing the rotating cover plate 20', in order to ensure that the fixed plate 10' does not interfere with the rotation of the rotating cover plate 20', it is necessary to set a larger avoidance space between the first vertical wall and the second vertical wall. Setting a larger avoidance space may result in poor sealing between the rotating cover plate 20' and the box body 200.

[0138] In the embodiment of the present application, a first inclined wall 21 is provided on the side of the rotating cover plate 20' facing the fixed plate 10'. A second inclined wall 11 is provided on the side of the fixed plate 10' facing the rotating cover plate 20'. The first inclined wall 21 and the second inclined wall 11 are arranged opposite and parallel to each other. While the rotating cover plate 20' can rotate relative to the fixed plate 10', when the rotating cover plate 20' is in the covering state, the gap between the first inclined wall 21 and the second inclined wall 11 of the rotating cover plate 20' is small, and there is no need to set an avoidance space, thereby increasing the sealing between the rotating cover plate 20' and the box body 200.

[0139] See also Fig.21, the wafer inspection device 1000' further includes a sealing strip 300. The sealing strip 300 is attached to the top surface of the box body 200. The inner side surface of the rotating cover plate 20' of the flip mechanism 100 and the top surface of the box body 200 are sealed by the sealing strip 300. The sealing strip 300 is attached to the gap between the top surface of the box body 200 and the inner side surface of the rotating cover plate 20' of the flip mechanism 100. Of course, the sealing strip 300 can also extend out of the gap between the top surface of the box body 200 and the inner side surface of the rotating cover plate 20' of the flip mechanism 100.

[0140] The material of the sealing strip 300 includes but is not limited to rubber, plastic, or silicone, etc. Furthermore, the sealing strip 300 has stable performance and less deformation at high and low temperatures, so that the sealing strip 300 also has good sealing performance when the wafer detection device 1000' is used for low temperature detection or high temperature detection.

[0141] In the field of wafer detection technology, the test signal of the test machine is transmitted to the sample to be tested through the probe card on the rotating cover plate 20', and the probe card further transmits the response signal of the sample to be tested back to the test machine to detect the performance of the sample to be tested. When the probe card contacts the sample to be tested, the horizontality of the probe card is very important. If the probe card is tilted, the probes on the probe card may not contact well with the sample to be tested, thereby affecting the accuracy of the test. In addition, if the probe card is tilted, the probes of the probe card may be damaged during the test due to uneven force, increasing the cost of repairing or replacing the probe card, and increasing the risk of some probes on the probe card piercing the sample to be tested.

[0142] See also Fig. 22 , the wafer inspection device 1000' also includes at least three level adjustment components 130. A portion of the level adjustment component 130 is disposed on the box body 200. Another portion of the level adjustment component 130 is disposed on the rotating cover 20' of the flip mechanism 100. At least three of the level adjustment components 130 are spaced apart on at least three sides of the rotating cover 20'. At least three of the level adjustment components 130 are used to adjust the level of the rotating cover 20' so that the rotating cover 20' remains level, thereby improving the level of the probe card and improving the test accuracy of the test machine.

[0143] Optionally, the number of the horizontal adjustment components 130 is three, which are respectively defined as the first adjustment component 130a, the second adjustment component 130b, and the third adjustment component 130c. The first adjustment component 130a, the second adjustment component 130b, and the third adjustment component 130c are respectively arranged at three corner positions of the rotating cover 20', such as the first corner position 20a, the second corner position 20b, and the third corner position 20c. The first adjustment component 130a is used to adjust the height of the first corner position 20a of the rotating cover 20' to be consistent with the height of the fourth corner position 20d. The second adjustment component 130b is used to adjust the height of the second corner position 20b of the rotating cover 20' to be consistent with the height of the fourth corner position 20d. The third adjustment component 130c is used to adjust the height of the third corner position 20c of the rotating cover 20' to be consistent with the height of the fourth corner position 20d, so that the heights of the first corner position 20a, the second corner position 20b, the third corner position 20c, and the fourth corner position 20d of the rotating cover 20' are consistent, and the rotating cover 20' is in a horizontal state.

[0144] Optional, see Fig. 22 There are four horizontal adjustment components 130, which are respectively defined as a first adjustment component 130a, a second adjustment component 130b, a third adjustment component 130c, and a fourth adjustment component 130d. The first adjustment component 130a, the second adjustment component 130b, the third adjustment component 130c, and the fourth adjustment component 130d are respectively arranged at four corner positions of the rotating cover plate 20', such as the first corner position 20a, the second corner position 20b, the third corner position 20c, and the fourth corner position 20d. The first adjusting component 130a is used to adjust the height of the first corner position 20a of the rotating cover 20`, the second adjusting component 130b is used to adjust the height of the second corner position 20b of the rotating cover 20`, the third adjusting component 130c is used to adjust the height of the third corner position 20c of the rotating cover 20`, and the fourth adjusting component 130d is used to adjust the height of the fourth corner position 20d of the rotating cover 20`, so that the heights of the first corner position 20a, the second corner position 20b, the third corner position 20c, and the fourth corner position 20d of the rotating cover 20` are consistent, that is, the rotating cover 20` is in a horizontal state.

[0145] Optional, see Fig. 22 The wafer inspection device 1000` also includes a camera (not shown) and a controller (not shown), the controller is electrically connected to the camera; the camera is arranged in the box 200 and can be slidably connected to the box 200, and the camera is used to obtain image information of the needle card 210 under the control of the controller to obtain position information of the needle card 210; the controller is used to obtain whether the rotating cover 20` is in a horizontal state according to the position information.

[0146] Specifically, the camera can be slidably connected to the box 200 to scan the surroundings of the needle card 210 and capture the image information of the needle card 210. Along the arrangement direction of the needle card 210 and the camera, if the needle card 210 is placed at an angle, different positions on the needle card 210 are at different distances from the camera, which will result in different depths of field of different positions of the needle card 210 in the image information obtained by the camera, thereby obtaining the position information of the needle card 210 and then obtaining whether the rotating cover 20' is horizontal. The controller can process the position information obtained by the camera and adjust the multiple horizontal adjustment components 130 so that the rotating cover 20' and the needle card 210 are both in a horizontal state. Furthermore, when the needle card 210 is used to detect the sample to be detected, the needle tip of the needle card 210 can be flush with the side of the sample to be detected facing the needle card 210, so that the needle card 210 is in good contact with the sample to be detected, thereby improving the accuracy of the wafer detection device 1000' in detecting the sample to be detected. In addition, it can also prevent the needle card 210 from being bent and damaged due to uneven force, or part of the needle tip on the needle card 210 directly piercing the sample to be detected and damaging the sample to be detected, thereby extending the service life of the needle card 210, reducing the cost of repairing or replacing the needle card 210, and improving the safety performance of the wafer detection device 1000' in detecting the sample to be detected.

[0147] See also Fig.23 and Fig.24 Optionally, the horizontal adjustment component 130 includes a positioning member 131, an adjustment cylinder 132, a holding member 133, a bottom member 134 and a locking member 135. The rotating cover 20' has a penetration hole 122; the adjustment cylinder 132 can be rotatably penetrated in the penetration hole 122, the holding member 133 is sleeved on the adjustment cylinder 132 and is located on the side of the rotating cover 20' away from the box body 200, the positioning member 131 is arranged on the side of the rotating cover 20' facing the box body 200, the positioning member 131 is sleeved on the outer periphery of the adjustment cylinder 132 and is connected to the adjustment cylinder 13 2 is threadedly connected, the bottom member 134 is arranged on the side of the box body 200 facing the rotating cover plate 20' and abuts against the adjusting cylinder 132; when the adjusting cylinder 132 rotates relative to the positioning member 131, the relative position of the positioning member 131 and the adjusting cylinder 132 can be adjusted, and then the relative height of the positioning member 131 can be adjusted, thereby driving the rotating cover plate 20' to move in a direction away from or close to the box body 200; the locking member 135 is sequentially penetrated through the adjusting cylinder 132 and the bottom member 134, so that the rotating cover plate 20' is detachably connected to the box body 200.

[0148] It can be understood that along the preset direction, the clamping member 133, the rotating cover plate 20' and the positioning member 131 are arranged in sequence.

[0149] In this embodiment, the adjusting cylinder 132 is rotatably inserted into the insertion hole 122, and the relative position of the adjusting cylinder 132 and the rotating cover plate 20' is adjustable. The positioning member 131 is sleeved on the outer circumference of the adjusting cylinder 132 and is threadedly connected to the adjusting cylinder 132. The positioning member 131 is also arranged on the side of the rotating cover plate 20' facing the box body 200. When the adjusting cylinder 132 is threadedly connected to the positioning member 131, the relative position of the adjusting cylinder 132 and the rotating cover plate 20' can be adjusted. When the adjusting cylinder 132 moves relative to the positioning member 131 toward a direction close to the box body 200, the bottom member 134 abuts against the adjusting cylinder 132, so that the rotating cover plate 20' moves toward a direction away from the box body 200; when the adjusting cylinder 132 moves relative to the positioning member 131 toward a direction away from the box body 200, the bottom member 134 abuts against the adjusting cylinder 132, so that the rotating cover plate 20' moves toward a direction close to the box body 200, thereby roughly adjusting the relative position of the rotating cover plate 20' and the box body 200. Among them, the clamping member 133 and the positioning member 131 are arranged on opposite sides of the rotating cover 20', and the clamping member 133 and the positioning member 131 cooperate with each other to prevent the adjusting cylinder 132 from twisting, so as to fix the relative position of the adjusting cylinder 132 and the rotating cover 20', and then fix the relative position of the rotating cover 20' and the box body 200, thereby improving the structural stability of the flip mechanism 100. Further, the locking member 135 is sequentially penetrated through the adjusting tube 132 and the bottom member 134. Specifically, along the first direction, the adjusting tube 132 has a third through hole, the third through hole penetrates two opposite surfaces of the adjusting tube 132, the bottom member 134 has a fourth through hole, the fourth through hole penetrates one side of the bottom member 134, the locking member 135 is sequentially penetrated through the third through hole and the fourth through hole, the locking member 135 connects the rotating cover plate 20' and the box body 200 to connect the rotating cover plate 20' and the box body 200 into an integrated structure. When the locking member 135 is disengaged from the fourth through hole of the bottom member 134, the rotating cover plate 20' and the box body 200 can be separated, which improves the convenience of disassembling and connecting the rotating cover plate 20' and the box body 200, and improves the performance of the flip mechanism 100.

[0150] It can be understood that the adjusting cylinder 132 has an external thread, the positioning member 131 has an internal thread, and the external thread of the adjusting cylinder 132 is threadedly connected with the internal thread of the positioning member 131 to adjust the relative position of the positioning member 131 and the adjusting cylinder 132 .

[0151] It can be understood that the through hole 122 has an internal thread, and the external thread of the adjustment cylinder 132 is threadedly connected to the internal thread of the through hole 122 to achieve adjustment of the relative position of the adjustment cylinder 132 and the rotating cover plate 20 ′.

[0152] The flip mechanism 100 provided in the present application is provided with a ball bearing assembly 33. The design of the ball bearing assembly 33 increases the degree of freedom of rotation. The ball bearing assembly 33 has a certain tolerance and will not get stuck when the rotating cover plate 20' is not level. The rotating cover plate 20' is leveled by adjusting the horizontal fine-tuning structure to increase the flatness of the flip mechanism 100. The locking member 41, the elastic member 42, and the pulling member 44 are designed to cooperate so that the flip mechanism 100 can be locked in place when opened at a certain angle. The matching edge between the rotating cover plate 20' and the fixed seat is designed as an inclined edge to reduce rotation interference and sealing gap. Sealing strips 300 are provided on the edges of the rotating seat and the flip cover, and sealing strips 300 are provided on the edges of the fixed seat and the machine to increase the sealing performance.

[0153] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present application, and these improvements and modifications are also regarded as the scope of protection of the present application.

Claims

1. A flip cover mechanism, characterized in that: include: a first connecting plate; A second connecting plate; and At least one set of hinge structures, the hinge structure includes a first connector, a second connector and a ball bearing assembly; the second end of the first connector includes a first extension end and a second extension end that are spaced apart, the second end of the second connector includes a third extension end, the third extension end is located between the first extension end and the second extension end, a first swing gap is provided between the third extension end and the first extension end, and a second swing gap is provided between the third extension end and the second extension end, the ball bearing assembly sequentially passes through the first extension end, the third extension end and the second extension end, the ball bearing assembly includes a first shaft cover, a spherical connecting portion and a second shaft cover that are sequentially provided along the axial direction, and opposite ends of the spherical connecting portion are fixedly connected to the first shaft cover and the second shaft cover respectively; the first end of the first connector is fixedly connected to the first connecting plate, the second end of the first connector is connected to the first shaft cover and the second shaft cover, the first end of the second connector is fixedly connected to the second connecting plate, the second end of the second connector is provided with a spherical cavity that matches the spherical connecting portion, and the second end of the second connector is sleeved on the outer peripheral side of the spherical connecting portion and is rotatably connected to the spherical connecting portion.

2. The flip cover mechanism according to claim 1, characterized in that: The ball bearing assembly also includes an intermediate shaft, one end of which is interconnected with the first shaft cover as a whole, the intermediate shaft passes through the spherical connecting portion, and the other end of the intermediate shaft is fixedly connected to the second shaft cover, one end of the first shaft cover away from the intermediate shaft abuts against a side of the first extension end away from the second extension end, and one end of the second shaft cover away from the intermediate shaft abuts against a side of the second extension end away from the first extension end.

3. The flip cover mechanism according to claim 1, characterized in that: The flip cover mechanism also includes a locking member and an elastic member. The rotating end of the locking member is located on the side of the ball bearing assembly away from the second connecting member and is rotatably connected to the first connecting member. The movable end of the locking member abuts against the bottom of the third extension end and is connected to one end of the elastic member. The other end of the elastic member is fixedly connected to the ball bearing assembly.

4. The flip cover mechanism according to claim 3, characterized in that: The outer peripheral wall of the third extension end is provided with a locking groove; when the first connecting plate and the second connecting plate are in a flattened state, the movable end of the locking member abuts against the target position on the outer peripheral wall of the third extension end, and the locking groove is located on the side of the target position away from the second connecting plate; when the first connecting plate and the second connecting plate are in an angled state, the movable end of the locking member abuts against the groove wall of the locking groove.

5. The flip cover mechanism according to claim 4, characterized in that: The flip cover mechanism further comprises a connecting rod, one end of which is passed through the movable end of the locking member, and the other end of the connecting rod is located outside the locking member and connected to one end of the elastic member.

6. The flip cover mechanism according to claim 3, characterized in that: The movable end of the locking member has a limiting groove, the outer peripheral wall of the movable end of the locking member has an inlet and a limiting opening connected to the inlet, the inlet and the limiting opening are both connected to the limiting groove, and the inlet is located at the side where the ball bearing assembly is located; The flip cover mechanism also includes a pulling member, one end of which is a large end, the large end of which is arranged in the limiting groove, the size of which is smaller than or equal to the size of the inlet, the size of which is larger than the size of the limiting opening, and the other end of the pulling member extends out through the limiting opening.

7. The flip cover mechanism according to any one of claims 1 to 6, characterized in that: The first connecting plate is a fixed plate, and the second connecting plate is a rotating cover plate; or the first connecting plate is a rotating cover plate, and the second connecting plate is a fixed plate; A first inclined wall is provided on the side of the rotating cover plate facing the fixed plate, and a second inclined wall is provided on the side of the fixed plate facing the rotating cover plate. The first inclined wall is opposite to and parallel to the second inclined wall, and the top side end of the first inclined wall is close to the fixed plate relative to the bottom side end of the first inclined wall.

8. A wafer inspection device, characterized in that: Including the flip cover mechanism as described in any one of claims 1 to 7, the wafer detection device also includes a box body, one of the first connecting plate and the second connecting plate is fixedly connected to the box body, and the other of the first connecting plate and the second connecting plate rotates relative to the box body.

9. The wafer inspection device according to claim 8, characterized in that: The wafer inspection device further comprises a sealing strip, which is attached to the top surface of the box body, and the inner side surface of the rotating cover of the flip mechanism and the top surface of the box body are sealed by the sealing strip; The wafer inspection device also includes at least three horizontal adjustment components, a part of the horizontal adjustment components is arranged on the box body, and another part of the horizontal adjustment components is arranged on the rotating cover of the flip mechanism. At least three of the horizontal adjustment components are arranged at intervals on at least three sides of the rotating cover, and at least three of the horizontal adjustment components are used to adjust the horizontality of the rotating cover.

Images