Coating equipment

Abstract

The invention provides coating equipment. The coating equipment comprises a cavity and a power supply module, the cavity comprises a cavity main body and cavity doors arranged on the cavity main body, the cavity main body and the cavity doors are enclosed to form a coating space, each cavity door can rotate relative to the cavity main body to open or close the coating space, and one side, close to the coating space, of each cavity door is used for installing a target material and a cathode connected with the target material. The power supply module is arranged on the cavity main body and is used for being electrically connected with the cathode. The power module is arranged on the cavity main body, so that the distance from the negative electrode to the negative electrode of the power module is reduced, the energy loss and the reaction time on a path are reduced, the weight of the power module can be completely borne by the cavity main body, no extra load is added to the hinge of the cavity door, the abrasion of the hinge is reduced, and the service life of the hinge is prolonged. And the disassembly of the cathode is simpler.

Description

Technical Field

[0001] The present application belongs to the field of film coating technology, and specifically relates to a film coating device. Background Art

[0002] Coating technology is widely used in various fields such as aerospace, new energy vehicles, circuit boards, etc. Among them, high-power pulsed magnetron sputtering technology (HiPIMS) has the advantages of high ionization rate and easy to achieve dense, smooth, large-area uniform high-quality films. However, current high-power pulsed magnetron sputtering coating equipment usually sets the power supply separately in an independent cabinet, and then connects it to the cathode of the target material through a wire. Due to the high discharge frequency and short discharge time of the high-power pulse power supply, the energy loss on the current transmission path is relatively large. Summary of the invention

[0003] In view of this, the present application provides a coating device, which includes:

[0004] A chamber, the chamber comprising a chamber body and a chamber door installed on the chamber body, the chamber body and the chamber door enclose a coating space, each of the chamber doors can rotate relative to the chamber body to open or close the coating space, and a side of the chamber door close to the coating space is used to install a target material and a cathode connected to the target material;

[0005] A power supply module is arranged on the cavity body and is used for electrically connecting the cathode.

[0006] The coating equipment provided in the present application enables the power module to be installed on the cavity body, which first makes the relative position of the power module and the cathode shorter, thereby reducing the wire distance from the power module to the cathode, thereby reducing the energy loss on the transmission path and reducing the reaction time of the current.

[0007] Secondly, the coating equipment provided by the present application sets the heavier power module on the cavity body instead of on the cavity door. While ensuring that the distance from the power module to the cathode is short, the weight of the power module can be fully borne on the cavity body, which will not add additional load to the hinge of the cavity door, and thus will not cause the hinge to wear faster, and the stability of the door opening and closing is better. Moreover, setting the power module on the cavity body provides more space than the cavity door, and the power module capacity has better scalability. And when disassembling the cathode, the cathode can be disassembled by disconnecting the wire connected to the power module, which reduces the difficulty of operation.

[0008] In summary, the present application sets the power module on the cavity body, which not only reduces the distance from the negative pole to the cathode of the power module, and reduces the energy loss and reaction time on the path, but also the weight of the power module can be borne entirely on the cavity body, and will not add additional load to the hinge of the cavity door, thereby reducing the wear of the hinge and making the disassembly of the cathode simpler.

[0009] Wherein, the chamber body includes a top plate and a bottom plate which are arranged opposite to each other, the chamber door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, the coating equipment also includes a cantilever assembly and a connecting piece, the cantilever assembly is fixed to the top plate and can rotate relative to the top plate, the power module is slidably and rotatably connected to the cantilever assembly, one end of the connecting piece is fixed to the power module, and the other end is fixed to the chamber door;

[0010] When the cavity door rotates relative to the cavity body, the power module is driven to rotate synchronously through the connecting piece, and the power module drives the cantilever assembly to rotate relative to the top plate, and the power module also slides and rotates relative to the cantilever assembly.

[0011] Among them, the cantilever assembly includes a boom base, a boom slide rail, a pulley, and a matching piece. The boom base is fixed to the top plate, the boom slide rail is sleeved on the boom base and rotatably connected to the boom base, one end of the pulley is slidably connected to the boom slide rail, and the other end of the pulley is rotatably connected to the matching piece, and the matching piece is fixedly connected to the power module.

[0012] Among them, the boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall facing away from the power module, two side walls, and two bottom walls, the two side walls are bent and connected to the opposite sides of the top wall, each side of the side wall facing away from the top wall is bent and connected to one bottom wall, and the two bottom walls are close to each other and set with a gap, the top wall, the two side walls, and the two bottom walls are surrounded to form a sliding space, one end of the pulley is set in the sliding space, and the other end of the pulley passes through the gap between the two bottom walls and is rotatably connected to the mating piece.

[0013] Wherein, the boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall and a bottom wall arranged opposite to each other, and a partition wall arranged between the top wall and the bottom wall, the top wall is farther away from the power module than the bottom wall, and the top wall, the bottom wall, and the partition wall are arranged to form two separated sliding spaces; the pulley includes a first sub-pulley, a second sub-pulley, and a connecting part, the first sub-pulley is arranged in one of the sliding spaces, and the second sub-pulley is arranged in another of the sliding spaces, one end of the connecting part is connected to the first sub-pulley and the second sub-pulley, and the other end of the connecting part is rotatably connected to the matching piece.

[0014] Wherein, the cantilever assembly further includes a limiter, and the limiter is fixed to the sliding portion, and the cantilever assembly satisfies at least one of the following conditions:

[0015] When the chamber door rotates relative to the chamber body to close the coating space, the pulley abuts against the limiting member;

[0016] When the chamber door rotates relative to the chamber body at a preset angle to open the coating space, the pulley abuts against the limiting member.

[0017] The cavity body includes a top plate and a bottom plate that are arranged opposite to each other, the cavity door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, and the power module is fixed to the top plate.

[0018] Wherein, the coating equipment also includes an electrical connector, one end of which is fixedly connected to the power module, and the other end of which is used to connect to the cathode.

[0019] Among them, the coating equipment also includes an electrical connector, one end of the electrical connector is detachably plugged into the power module, and the other end is connected to the cathode. When the chamber door rotates relative to the chamber body to open the coating space, one end of the electrical connector is separated from the power module; when the chamber door rotates relative to the chamber body to close the coating space, one end of the electrical connector is plugged into the power module.

[0020] Among them, the coating equipment includes multiple power modules and multiple electrical connectors, and the side of the chamber door close to the coating space is used to correspond to multiple targets and multiple cathodes, each cathode is set on one target, one end of each electrical connector is connected to a power module, and the other end is connected to the cathode, and the lengths of the multiple electrical connectors are equal. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the implementation modes of the present application, the drawings required for use in the implementation modes of the present application will be described below.

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of a coating device in one embodiment of the present application.

[0023] Figure 2 for Figure 1 A top view of the coating equipment is shown.

[0024] Figure 3 for Figure 1 A front view of the coating equipment is shown.

[0025] Figure 4 for Figure 1 An exploded view of the coating equipment is shown.

[0026] Figure 5 for Figure 3 A partial enlarged view of the coating equipment shown.

[0027] Figure 6 It is a schematic diagram of the three-dimensional structure of a connecting piece in one embodiment of the present application.

[0028] Figure 7 It is a schematic diagram of the three-dimensional structure of the cantilever assembly in one embodiment of the present application.

[0029] Figure 8 for Figure 7 A schematic cross-sectional view of the cantilever assembly is shown.

[0030] Fig. 9 for Figure 8 A partial enlarged cross-sectional schematic diagram of the pulley and the mating part in the cantilever assembly shown.

[0031] Fig.10 It is a partial three-dimensional structural schematic diagram of the cantilever assembly and the power module when they cooperate in one embodiment of the present application.

[0032] Fig.11 for Figure 7 Another perspective structural schematic diagram of the cantilever assembly is shown.

[0033] Fig.12 for Figure 8 The schematic diagram of the partial enlarged cross section of the boom base and the rotating part of the cantilever assembly shown.

[0034] Fig.13 It is a schematic diagram of the three-dimensional structure of the cantilever assembly in another embodiment of the present application.

[0035] Fig.14 for Fig.13Another perspective structural schematic diagram of the cantilever assembly is shown.

[0036] Fig.15 It is a schematic diagram of the three-dimensional structure of a pulley in one embodiment of the present application.

[0037] Fig.16 It is a schematic diagram of the three-dimensional structure of the cantilever assembly and the limiting member when they cooperate in another embodiment of the present application.

[0038] Fig.17 It is a schematic diagram of the three-dimensional structure of a limiting member in one embodiment of the present application.

[0039] Fig.18 It is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application.

[0040] Fig.19 for Fig.18 A top view of the coating equipment is shown.

[0041] Fig. 20 for Fig.18 A front view of the coating equipment is shown.

[0042] Fig.21 It is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application.

[0043] Fig. 22 for Fig.21 A top view of the coating equipment is shown.

[0044] Fig.23 for Fig.21 A front view of the coating equipment is shown.

[0045] Description of labels:

[0046] Coating equipment-1, chamber-10, chamber body-11, chamber door-12, hinge-120, coating space-13, top plate-14, bottom plate-15, side plate-16, column-17, front door-18, insulation part-19, power module-20, thickening part-21, cantilever assembly-30, cantilever base-31, third step surface-310, cantilever slide rail-32, rotating part-320, first step surface-3201, second step surface-3202, shaft slot-3203, sliding part-321, top wall-3210, bottom wall-3211, side wall-3 212, partition wall-3213, sliding space-322, pulley-33, first sub-pulley-331, second sub-pulley-332, connecting part-333, matching part-34, top cover-340, bottom cover-341, rotating structure-342, limiting part-35, first sub-limiting part-351, second sub-limiting part-352, limiting groove-353, screw-354, fixing plate-355, buffer part-356, reinforcing rib-36, bearing-37, connecting part-40, avoidance groove-41, electrical connecting part-50, cathode-60, molecular pump-70. DETAILED DESCRIPTION

[0047] The following are preferred implementations of the present application. It should be noted that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application, and these improvements and modifications are also considered to be within the scope of protection of the present application.

[0048] Before introducing the technical solutions provided by this application, the technical problems in the related technologies are introduced in detail.

[0049] Coating technology is widely used in aerospace, new energy vehicles, circuit boards, magnetic materials, sensors, silicone rubber, seals, medical devices and other fields. During coating, coating equipment of different specifications and types can be selected according to process requirements. Coating equipment can be mainly divided into: evaporative coating, magnetron sputtering coating, and ion plating according to the coating method. Among them, high-power pulsed magnetron sputtering coating technology (HiPIMS) under the magnetron sputtering coating category is a new physical vapor deposition (PVD) technology. It has a high ionization rate and is easy to achieve dense, smooth, large-area uniform high-quality thin films. It has received great attention in the domestic and foreign markets and academia.

[0050] The power supply of high-power pulsed magnetron sputtering coating equipment uses a pulsed power supply with a rectangular wave voltage instead of a traditional DC power supply for magnetron sputtering deposition, which can effectively suppress the generation of arcs and eliminate the resulting film defects. It also has a series of significant advantages such as increasing the sputtering deposition rate and reducing the deposition temperature.

[0051] However, the current high-power pulsed magnetron sputtering coating machine usually sets the power supply separately in an independent cabinet, and then connects it to the cathode of the target material through a wire, so the current transmission path, that is, the length of the wire, is relatively long. Since the high-power pulse power supply has a high discharge frequency and a short discharge time, the longer wire will cause greater energy loss in the current transmission path and a longer reaction time.

[0052] In addition, the coating equipment usually includes a cavity body and a cavity door. Some coating equipment places the power supply on the cavity door of the coating equipment. Although this reduces the energy loss and reaction time on the path, due to the heavy weight of the high-power power supply module, during the cavity door opening and closing process, the load is entirely borne on the hinge connecting the cavity door and the cavity body. Affected by inertia, the cavity door has poor stability and is prone to accelerated wear of the hinge.

[0053] At the same time, due to the limited space of the cavity door, the space for the power module is limited, and the capacity expansion of the power supply is limited. Moreover, if the power module is installed on the cavity door and the power capacity is to be expanded, a thicker cavity and larger and more hinges are required to support the larger and heavier power module.

[0054] Furthermore, when the power module is installed on the chamber door, if the target material needs to be replaced and the cathode needs to be removed, all the power modules installed on the outside of the chamber door need to be removed before the cathode can be removed, which is a complicated and tedious operation.

[0055] In view of this, in order to solve the above problems, the present application provides a coating device. Please refer to Figure 1-Figure 5 , Figure 1 It is a schematic diagram of the three-dimensional structure of a coating device in one embodiment of the present application. Figure 2 for Figure 1 A top view of the coating equipment is shown.

[0056] Figure 3 for Figure 1 A front view of the coating equipment is shown. Figure 4 for Figure 1 An exploded view of the coating equipment is shown. Figure 5 for Figure 3 A partial enlarged view of the coating equipment shown.

[0057] The coating device 1 provided in this embodiment includes a chamber 10 and a power module 20. The chamber 10 includes a chamber body 11 and a chamber door 12 installed on the chamber body 11. The chamber body 11 and the chamber door 12 enclose a coating space 13. Each of the chamber doors 12 can rotate relative to the chamber body 11 to open or close the coating space 13, and the side of the chamber door 12 close to the coating space 13 is used to install a target material and a cathode 60 connected to the target material. The power module 20 is installed in the chamber body 11 and is used to electrically connect the cathode 60.

[0058] The coating device 1 provided in this embodiment is mainly used for coating. During coating, the target material is usually installed on the inner side of the chamber door 12 of the coating device 1, and then the component to be coated is placed in the coating device 1, and then charged particles are introduced. Under the action of the electric field, the charged particles bombard the target material, causing the target material to sputter and deposit onto the surface of the component, thereby forming a uniform coating layer on the surface of the component, thereby enabling the coated component to obtain better physical properties.

[0059] The coating device 1 provided in this embodiment is a high-power pulsed magnetron sputtering coating device 1. Of course, in other embodiments, the coating device 1 can also be other types of coating devices 1, such as an evaporative coating device 1. This embodiment only schematically illustrates the high-power pulsed magnetron sputtering coating device 1.

[0060] The coating device 1 mainly includes a chamber 10 and a power module 20, wherein the chamber 10 includes a chamber body 11 and a chamber door 12 mounted on the chamber body 11. The coating device 1 includes an external shell, wherein the chamber body 11 is the portion of the external shell excluding the chamber door 12, the front door 18 and other components. The chamber door 12 is a door panel mounted on the chamber body 11, and the chamber door 12 can rotate relative to the chamber body 11 to realize the opening or closing of the chamber door 12.

[0061] When the chamber door 12 is closed, the chamber body 11 and the chamber door 12 can be together enclosed to form a closed coating space 13, and because the chamber door 12 can rotate relative to the chamber body 11, the coating space 13 will also be opened or closed when the chamber door 12 is opened or closed. And the side of the chamber door 12 close to the coating space 13, that is, the side of the chamber door 12 facing the inside of the chamber 10, can be used to fix the cathode 60, and then the target material is installed on the cathode 60, so that the target material is installed on the side of the chamber door 12 close to the coating space 13, that is, the target material is installed on the inner side of the chamber door 12.

[0062] Optionally, since the target material and the cathode 60 are arranged inside the chamber door 12, a through hole can be provided on the chamber door 12 in this embodiment, and a conductive structure such as a copper rod or a wire can be provided in the through hole, one end of the conductive structure is connected to the cathode 60, and the other end is subsequently used to connect the power module 20. Further optionally, an annular insulating member 19 is usually provided between the conductive structure and the inner wall of the through hole so that the conductive structure is insulated from the chamber door 12, that is, by providing the insulating member 19 between the inner wall of the through hole and the conductive structure, the two are separated and insulated from each other, wherein the insulating member 19 includes but is not limited to an annular insulating flange, rubber, etc.

[0063] Optionally, the cavity 10 may be in various shapes such as a cuboid, a prism, etc., and this embodiment is only schematically illustrated using a cuboid. Figure 3 As shown, the chamber body 11 includes a top plate 14, a bottom plate 15, at least one side plate 16, and a plurality of columns 17. In the figure, four columns 17 are respectively arranged at four corners of the top plate 14 and the bottom plate 15 to support the top plate 14 and the bottom plate 15 together, and the top plate 14, the bottom plate 15, the side plate 16, and the chamber door 12 are jointly arranged to form a coating space 13 inside the chamber 10.

[0064] The bottom plate 15 is the bottom surface of the chamber 10, and is used to subsequently install and fix the coating device 1 on the support frame of the coating device 1. The support frame can also be used to place components such as a controller. The top plate 14 is arranged opposite to the bottom plate 15, and is usually arranged on the top of the coating device 1. In other words, Figure 3 The upper plate of the coating device 1 is a top plate 14 , and the lower plate is a bottom plate 15 .

[0065] The column 17 is a component in the cavity 10 for supporting the entire cavity 10, and is disposed between the top plate 14 and the bottom plate 15 and connected to the top plate 14 and the bottom plate 15. The cavity door 12 is rotatably connected to the column 17 through a hinge 120 so that the cavity door 12 is disposed between the top plate 14 and the bottom plate 15.

[0066] One of the side panels 16 of the chamber body 11 is used to mount the molecular pump 70. Figure 3 On the middle left side is a molecular pump 70, which is used to evacuate the coating space 13 to create a vacuum environment. At the same time, a cabinet can be provided outside the molecular pump 70 to accommodate and protect the vacuumed molecular pump 70, and even other components can be provided.

[0067] Further optionally, the chamber 10 has two chamber doors 12 and a front door 18, and the two chamber doors 12 are arranged opposite to each other, that is, Figure 3The coating device 1 shown has a chamber door 12 at the front and rear, a front door 18 at the right, and the side panels 16, the chamber doors 12, and the front door 18 together constitute the side wall 3212 of the chamber 10. The inner sides of the two chamber doors 12 are used to install the target material and the cathode 60, and the front door 18 is used to install other components. The two chamber doors 12 and the front door 18 are rotatably connected to the column 17 through the hinge 120, and each individual door panel can be rotated relative to the chamber body 11 to open or close the coating space 13.

[0068] The power module 20 is usually installed in the chamber body 11, and the negative electrode of the power module 20 is electrically connected to the cathode 60, and the positive electrode of the power module 20 is electrically connected to the chamber door 12. The power module 20 is used to power the entire coating device 1 during the coating process. During coating, the negative electrode of the power module 20 is electrically connected to the cathode 60, and the cathode 60 is directly in contact with the target material to achieve electrical connection, thereby achieving electrical connection between the negative electrode of the power module 20 and the target material. The negative electrode of the power module 20 is electrically connected to the target material, and the positive electrode is electrically connected to the chamber 10, so that an electric field is formed between the chamber 10 and the target material.

[0069] Optionally, the number of power modules 20 is not fixed, and the coating device 1 may have one or more power modules 20. This embodiment is only schematically illustrated with multiple power modules 20. Further optionally, multiple power modules 20 may be arranged in groups. For example, when the number of power modules 20 is six, every three power modules 20 may be grouped together, and the power modules 20 may be divided into two groups. Each group of power modules 20 also has a shell for accommodating multiple power modules 20 on the outside, which is used to protect the power modules 20 and make the multiple power modules 20 a whole.

[0070] In this embodiment, the power module 20 can be installed in the chamber body 11, the negative electrode of the power module 20 is electrically connected to the cathode 60, and the positive electrode is electrically connected to the chamber 10, so that an electric field is formed between the chamber 10 and the target material, and the power module 20 is used to supply power to the entire coating device 1 during the coating process. During coating, the negative electrode of the power module 20 is electrically connected to the cathode 60, and the cathode 60 is directly in contact with the target material to achieve electrical connection, thereby achieving electrical connection between the negative electrode of the power module 20 and the target material.

[0071] As can be seen from the above content, the coating device 1 in the related art sets the power module 20 separately in a cabinet far away from the chamber 10 and then connects it to the cathode 60 through a wire. The wire is long, the energy loss on the path is large, and the reaction time is long. Based on this, the power module 20 can be installed on the chamber body 11 in this embodiment.

[0072] First, compared with the method of installing the power module 20 in a separate cabinet and electrically connecting the cathode 60 through a wire, the coating equipment 1 provided in this embodiment makes the relative position of the power module 20 and the cathode 60 shorter, which can reduce the wire distance from the power module 20 to the cathode 60, thereby reducing the energy loss on the transmission path and reducing the reaction time of the current.

[0073] Secondly, in the related art, some coating equipment 1 chooses to install the power module 20 on the door panel in order to reduce the distance between the cathode 60 and the negative pole of the power supply, but it will cause the hinge 120 to wear faster due to a large load, and limit the expansion of the capacity of the power module 20. In this embodiment, the heavier power module 20 is set on the cavity body 11 instead of on the cavity door 12. While ensuring that the distance from the power module 20 to the cathode 60 is short, the weight of the power module 20 can be fully borne on the cavity body 11, and no additional load will be added to the hinge 120 of the cavity door 12, thereby not causing the hinge 120 to wear faster, and the stability of the door opening and closing is better. Moreover, the power module 20 is set on the cavity body 11, which has a larger space than the cavity door 12, and the capacity of the power module 20 is more expandable. And when disassembling the cathode 60, the wire connected to the power module 20 can be disconnected to disassemble the cathode 60, which reduces the difficulty of operation.

[0074] In summary, the present embodiment sets the power module 20 on the cavity body 11, which not only reduces the distance from the negative pole of the power module 20 to the cathode 60, and reduces the energy loss and reaction time on the path, but also the weight of the power module 20 can be fully borne by the cavity body 11, and will not add additional load to the hinge 120 of the cavity door 12, thereby reducing the wear of the hinge 120 and making the disassembly of the cathode 60 simpler.

[0075] Please refer to Figure 1-Figure 6 , Figure 6 Schematic diagram of the three-dimensional structure of the connector in one embodiment of the present application. In this embodiment, the chamber body 11 includes a top plate 14 and a bottom plate 15 arranged opposite to each other, the chamber door 12 is arranged between the top plate 14 and the bottom plate 15, the bottom plate 15 is used to be arranged on a support frame, the coating device 1 also includes a cantilever assembly 30 and a connector 40, the cantilever assembly 30 is fixed to the top plate 14 and can rotate relative to the top plate 14, the power module 20 is slidably and rotatably connected to the cantilever assembly 30, one end of the connector 40 is fixed to the power module 20, and the other end is fixed to the chamber door 12.

[0076] When the cavity door 12 rotates relative to the cavity body 11, the power module 20 is driven to rotate synchronously through the connecting piece 40, and the power module 20 drives the cantilever assembly 30 to rotate relative to the top plate 14, and the power module 20 also slides and rotates relative to the cantilever assembly 30.

[0077] It can be seen from the above that the chamber body 11 has a top plate 14 and a bottom plate 15, and the chamber door 12 is installed on the column 17 between the top plate 14 and the bottom plate 15. In this embodiment, the coating device 1 also includes a cantilever assembly 30 and a connector 40. The cantilever assembly 30 is a component used to bear the weight of the power module 20 and suspend the power module 20 above the chamber 10. The setting of the cantilever assembly 30 allows various movements between the power module 20 and the cantilever assembly 30, and between the cantilever assembly 30 and the top plate 14. The connector 40 is used to connect the power module 20 and the chamber door 12 to connect the power module 20 and the chamber door 12 into one.

[0078] One end of the cantilever assembly 30 is fixed to the top plate 14, i.e., the top of the cavity body 11, and the cantilever assembly 30 can rotate relative to the top plate 14, i.e., the cantilever assembly 30 and the top plate 14 are rotatably connected, for example, the rotatable fit can be achieved through bearings or gears, etc. Normally, the top plate 14 is fixed, and the cantilever assembly 30 can rotate relative to the top plate 14.

[0079] The other end of the cantilever assembly 30 is connected to the power module 20, and the power module 20 can rotate and slide relative to the cantilever assembly 30, that is, the power module 20 can slide in the length direction of the cantilever assembly 30, and can rotate relative to the cantilever assembly 30. One end of the cantilever assembly 30 is connected to the top plate 14, and the other end is connected to the power module 20, that is, the cantilever assembly 30 suspends the power module 20 on the top of the cavity 10, so that the power module 20 is arranged above the cavity 10. Optionally, there is a gap between the power module 20 suspended by the cantilever assembly 30 and the cavity 10, and under the premise of ensuring that the power module 20 is close to the cathode 60, the power module 20 and the cavity 10 are not in contact, and the power module 20 will not rub against the top plate 14 when rotating. Optionally, the cantilever assembly 30 can be fixed to the top plate 14 of the cavity 10 and the adjacent cabinet at the same time, so that the cavity 10 and the cabinet jointly bear the weight of the power module 20, thereby enhancing the stability of the cantilever assembly 30.

[0080] One end of the connecting piece 40 is fixed to the power module 20, and the other end is fixed to the chamber door 12, so that when the chamber door 12 is opened and closed, the power module 20 is stationary relative to the chamber door 12, that is, when the chamber door 12 is opened and closed, the power module 20 moves synchronously with the chamber door 12, and the power module 20 does not move relative to the chamber door 12.

[0081] Optionally, the connecting member 40 is an L-shaped structure, one side of the L-shape is fixed to the outside of the cavity door 12 by screws, and the other side of the L-shape directly contacts the power module 20 and is fixed to the power module 20 .

[0082] Optionally, since the chamber door 12 has a through hole, the conductive circuit passes through the through hole to connect the negative electrode of the power module 20 and the cathode 60, so the connector 40 is fixed to one side of the chamber door 12 and has an avoidance groove 41 for avoiding the conductive circuit, so that the connector 40 will not hinder the electrical connection between the negative electrode of the power module 20 and the cathode 60.

[0083] Optionally, when the power module 20 is suspended on the top of the cavity 10 by the cantilever assembly 30, the connection mode between the power module 20 and the cathode 60, i.e., the conductive line between the power module 20 and the cathode 60, includes but is not limited to a hard connection by a plug, a hard connection by a copper sheet, a soft connection by a wire, etc. Wherein, when the connection mode is a copper sheet, the width of the copper sheet needs to be greater than the width of the electrode sheet of the negative electrode of the power supply. The copper sheet and the negative electrode of the power module 20 are fixedly connected by screws, so that the two become a separable integral structure, and there are also insulating components on the outside of the copper sheet to prevent electric shock during operation.

[0084] In this embodiment, the power module 20 is arranged above the cavity 10 and connected through the cantilever assembly 30, so that the distance between the negative electrode of the power module 20 and the cathode 60 is short, the energy loss on the path is small, and the reaction time is fast. At the same time, the power module 20 is connected and fixed to the top of the cavity 10 through the cantilever assembly 30, so that the weight of the power module 20 is entirely borne by the cantilever assembly 30, and then the cantilever assembly 30 transfers the load to the cavity 10, which does not increase the burden of the hinge 120 of the cavity door 12. The power module 20 and the cavity door 12 are connected by the connecting piece 40, so that the power module 20 moves synchronously when the cavity door 12 is opened and closed, and the power module 20 can slide and rotate in the length direction of the cantilever assembly 30. Even if the rotation axes of the cantilever assembly 30 and the cavity door 12 are different, it can ensure that the power module 20 is stationary relative to the cavity door 12 when the cavity door 12 is opened and closed.

[0085] Please refer to Figure 1 , Figure 7-Figure 10 , Figure 7 It is a schematic diagram of the three-dimensional structure of the cantilever assembly in one embodiment of the present application. Figure 8 for Figure 7 A schematic cross-sectional view of the cantilever assembly is shown. Fig. 9 for Figure 8 A partial enlarged cross-sectional schematic diagram of the pulley and the mating part in the cantilever assembly shown. Fig.10 It is a partial three-dimensional structural schematic diagram of the cantilever assembly and the power module when they cooperate in one embodiment of the present application.

[0086] In this embodiment, the cantilever assembly 30 includes a boom base 31, a boom slide rail 32, a pulley 33, and a matching piece 34. The boom base 31 is fixed to the top plate 14, the boom slide rail 32 is sleeved on the boom base 31 and rotatably connected to the boom base 31, one end of the pulley 33 is slidably connected to the boom slide rail 32, and the other end of the pulley 33 is rotatably connected to the matching piece 34, and the matching piece 34 is fixedly connected to the power module 20.

[0087] In this embodiment, the boom assembly 30 can be divided into a boom base 31, a boom slide rail 32, a pulley 33, and a matching piece 34. The boom base 31 is the part that fixes the boom assembly 30 to the top plate 14, the boom slide rail 32 is used to rotatably connect the boom base 31 and provide a sliding path for the pulley 33, the pulley 33 is used to slide in the track of the boom slide rail 32, and the matching piece 34 is used to connect the pulley 33 and rotatably connect the power module 20.

[0088] The boom base 31 is fixed on the top plate 14 and is the foundation for the cantilever assembly 30 to be installed. Optionally, the boom base 31 can be indirectly fixedly connected to the top plate 14 through the boom base 31 fixing plate 355. One end of the boom slide rail 32 is sleeved on the boom base 31 and is rotatably connected to the boom base 31, so that the boom slide rail 32 can rotate relative to the boom base 31. One end of the pulley 33 is connected to the boom slide rail 32 and can slide on the boom slide rail 32. The other end of the pulley 33 is connected to the matching piece 34, which is fixed on the power module 20. The matching piece 34 has a rotating structure 342, so that the power module 20 can rotate relative to the pulley 33. Optionally, the rotating structure 342 of the matching piece 34 is a bearing.

[0089] Optionally, when the boom base 31 and the boom slide rail 32 are connected through a bearing 37 to enable the boom slide rail 32 to rotate relative to the boom base 31, the bearing 37 has an axle clip on one side close to the boom base and on the other side close to the boom slide rail 32 to clamp the bearing 37 so that the bearing 37 does not fall off, thereby preventing the boom base 31 and the boom slide rail 32 from separating and falling off.

[0090] Optionally, the fitting 34 is divided into a top cover 340, a bottom cover 341 and a rotating structure 342, the bottom cover 341 is used to contact the power module 20 and carry the rotating structure 342, the top cover 340 is pressed on the bottom cover 341, and the rotating structure 342 is fixed between the top cover 340 and the bottom cover 341. Similarly, when the rotating structure 342 of the fitting 34 is a bearing, the bearing is fixed to the top of the power module 20 through the top cover 340 and the bottom cover 341 of the fitting 34, and the side of the bearing away from the power module 20, that is, the top of the bearing has a shaft clamp to ensure that the bearing does not fall off.

[0091] Optionally, the cantilever assembly 30 also includes a reinforcing rib 36 for reinforcing the strength of the cantilever assembly 30. The reinforcing rib 36 is arranged in the angle between the boom base 31 and the boom slide rail 32 to assist the boom base 31 in supporting the boom slide rail 32. For example, the reinforcing rib 36 is a right-angled trapezoid. The boom slide rail 32 can be divided into a rotating part 320 perpendicular to the top plate 14 and sleeved on the boom base 31, and a sliding part 321 parallel to the bottom plate 15 and having a sliding space 322. One of the right-angled sides of the reinforcing rib 36 is fixed to the rotating part 320, and the other adjacent right-angled side is fixed to the sliding part 321, so that a stable structure is provided between the boom base 31 and the boom slide rail 32, so that the boom slide rail 32 can withstand a larger weight, thereby making the cantilever assembly 30 not easy to bend and deform.

[0092] Optionally, when the power module 20 is suspended on the top of the cavity 10 by the cantilever assembly 30, the outer shell on the side where the power module 20 is connected to the mating piece 34, i.e., the top of the power module 20, has a structure that increases the structural strength. For example, the top outer shell of the power module 20 has an I-shaped thickened portion 21, which increases the structural strength of the power module 20 and makes the top outer shell of the power module 20 less likely to deform.

[0093] Through the mutual cooperation of the boom base 31, the boom slide rail 32, the pulley 33, and the matching part 34, the power module 20 connected to the cantilever assembly 30 can slide on the cantilever assembly 30 during the process of opening and closing the chamber door 12, and can also rotate relative to the cantilever assembly 30. In the process of the power module 20 following the movement of the chamber door 12, it is ensured that the relative position of the power module 20 and the chamber door 12 can remain unchanged.

[0094] It can be known from the above content that the cantilever assembly 30 includes a boom slide rail 32. The present application provides two structures of the boom slide rail 32, which will be described in detail below.

[0095] Please refer to Figure 6 , Fig.11 , Fig.12 , Fig.11 for Figure 7 Another perspective structural schematic diagram of the cantilever assembly is shown. Fig.12 for Figure 8The schematic diagram of the partial enlarged cross section of the boom base and the rotating part of the cantilever assembly shown. In this embodiment, the boom slide rail 32 includes a rotating portion 320 and a sliding portion 321, the rotating portion 320 is sleeved on the boom base 31 and rotatably connected to the boom base 31, the sliding portion 321 includes a top wall 3210 away from the power module 20, two side walls 3212, and two bottom walls 3211, the two side walls 3212 are bent and connected to opposite sides of the top wall 3210, each side of the side wall 3212 away from the top wall 3210 is bent and connected to one bottom wall 3211, and the two bottom walls 3211 are close to each other and set with a gap, the top wall 3210, the two side walls 3212, and the two bottom walls 3211 are surrounded to form a sliding space 322, one end of the pulley 33 is set in the sliding space 322, and the other end of the pulley 33 passes through the gap between the two bottom walls 3211 and is rotatably connected to the matching piece 34.

[0096] In the first embodiment, the boom slide rail 32 can be divided into a rotating portion 320 and a sliding portion 321. The rotating portion 320 is sleeved on the boom base 31 to realize the rotation of the boom slide rail 32 relative to the top plate 14. The sliding portion 321 is fixed to one end of the rotating portion 320 away from the top plate 14, and has a sliding space 322 that can accommodate the pulley 33. The sliding portion 321 has a top wall 3210 away from the power module 20, two side walls 3212, and two bottom walls 3211. The two side walls 3212 are bent and connected to the opposite sides of the top wall 3210, and each side wall 3212 is also bent into two bottom walls 3211 on the side away from the top wall 3210. The two bottom walls 3211 are close to each other but there is a gap between the two bottom walls 3211. The top wall 3210, the two side walls 3212, and the two bottom walls 3211 are together arranged to form a sliding space 322 for the pulley 33 to slide, and the sliding space 322 has an opening at the bottom. One end of the pulley 33 is arranged in the sliding space 322 and the other end of the pulley 33 passes through the gap between the bottom walls 3211, that is, the opening at the bottom, to pass through the sliding space 322 and be connected to the matching piece 34.

[0097] In this embodiment, the top wall 3210, the two side walls 3212, and the two bottom walls 3211 are collectively enclosed to form a sliding space 322 so that the pulley 33 can slide in the sliding space 322, that is, the pulley 33 can slide in the length direction of the cantilever assembly 30, and then the power module 20 connected to the pulley 33 through the matching piece 34 can slide in the length direction of the cantilever assembly 30. At the same time, the top wall 3210, the side walls 3212, and the bottom wall 3211 are collectively enclosed to form a relatively closed sliding space 322, so that the pulley 33 receives less interference when sliding, and slides more smoothly.

[0098] Optionally, the portion where the rotating portion 320 is connected to the boom base 31 has two groups of bearings 37 , each group of bearings 37 includes two bearings 37 , and the two groups of bearings 37 are spaced apart along their axial direction to make the rotation between the rotating portion 320 and the boom base 31 more stable.

[0099] Further optionally, if Fig.12 As shown, the inner surface of the rotating part 320 has a first step surface 3201 and a second step surface 3202, the first step surface 3201 abuts against the lower surface of the bearing 37 away from the top plate 14, that is, the lower surface of the upper bearing 37, and the second step surface 3202 abuts against the upper surface of the bearing 37 close to the top plate 14, that is, the upper surface of the lower bearing 37, and at the same time, both sides of the rotating part 320 also have shaft clamping grooves 3203 for installing shaft clamps, so that the shaft clamps are fixedly clamped in the shaft clamping grooves 3203. The boom base 31 has a third step surface 310, and the third step surface 310 abuts against the lower surface of the bearing 37 close to the top plate 14, that is, the lower surface of the lower bearing 37. Through the structural coordination of the rotating part 320 and the boom base 31 and the use of the shaft clamp, the bearing 37 is fixed between the boom base 31 and the rotating part 320 and will not fall off.

[0100] Please refer to Figure 13-Figure 15 , Fig.13 It is a schematic diagram of the three-dimensional structure of the cantilever assembly in another embodiment of the present application. Fig.14 for Fig.13 Another perspective structural schematic diagram of the cantilever assembly is shown. Fig.15 Schematic diagram of the three-dimensional structure of the pulley in one embodiment of the present application. In this embodiment, the boom slide rail 32 includes a rotating portion 320 and a sliding portion 321. The rotating portion 320 is sleeved on the boom base 31 and rotatably connected to the boom base 31. The sliding portion 321 includes a top wall 3210 and a bottom wall 3211 that are arranged opposite to each other, and a partition wall 3213 arranged between the top wall 3210 and the bottom wall 3211. The top wall 3210 is farther away from the power module 20 than the bottom wall 3211. The top wall 3210, the bottom wall 3211, The partition wall 3213 is arranged to form two separated sliding spaces 322; the pulley 33 includes a first sub-pulley 331, a second sub-pulley 332, and a connecting portion 333, the first sub-pulley 331 is arranged in one of the sliding spaces 322, the second sub-pulley 332 is arranged in another of the sliding spaces 322, one end of the connecting portion 333 connects the first sub-pulley 331 and the second sub-pulley 332, and the other end of the connecting portion 333 is rotatably connected to the matching piece 34.

[0101] In the second embodiment, the boom slide rail 32 can be divided into a rotating portion 320 and a sliding portion 321. The rotating portion 320 is sleeved on the boom base 31 to realize the rotation of the boom slide rail 32 relative to the top plate 14. The sliding portion 321 is fixed to the end of the rotating portion 320 away from the top plate 14 and has a sliding space 322 for accommodating the pulley 33. The sliding portion 321 can also include a top and a bottom wall 3211 arranged opposite to each other, and a partition wall 3213 arranged between the top wall 3210 and the bottom wall 3211, that is, Fig.14 The top of the cantilever assembly 30 is a top wall 3210, the bottom is a bottom wall 3211, and the middle is a partition wall 3213. The top wall 3210, the bottom wall 3211, and the partition wall 3213 are combined to form an I-shape, enclosing two separated sliding spaces 322. The pulley 33 includes a first sub-pulley 331, a second sub-pulley 332, and a connecting portion 333. The first sub-pulley 331 is arranged in one of the sliding spaces 322, and the second sub-pulley 332 is arranged in the other sliding space 322. The connecting portion 333 is U-shaped, and the two upper ends of the U-shape are connected to the first sub-pulley 331 and the second sub-pulley 332, and the bottom of the U-shape is connected to the matching piece 34.

[0102] In this embodiment, the top wall 3210, the partition wall 3213, and the bottom wall 3211 are used to enclose two sliding spaces 322 so that the pulley 33 can slide in the sliding space 322, that is, the pulley 33 can slide in the length direction of the cantilever assembly 30, and then the power module 20 connected to the pulley 33 through the matching piece 34 can slide in the length direction of the cantilever assembly 30. At the same time, the top wall 3210, the partition wall 3213, and the bottom wall 3211 are in an I-shape, which enhances the structural strength of the cantilever assembly 30 and makes the cantilever assembly 30 have a stronger load-bearing capacity.

[0103] Please refer to Figure 16-Figure 17 , Fig.16 It is a schematic diagram of the three-dimensional structure of the cantilever assembly and the limiting member when they cooperate in another embodiment of the present application. Fig.17 Schematic diagram of the three-dimensional structure of a limiter in one embodiment of the present application. In this embodiment, the cantilever assembly 30 further includes a limiter 35, and the limiter 35 is fixed to the sliding portion 321. The cantilever assembly 30 satisfies at least one of the following conditions: when the chamber door 12 rotates relative to the chamber body 11 to close the coating space 13, the pulley 33 abuts against the limiter 35. When the chamber door 12 rotates relative to the chamber body 11 by a preset angle to open the coating space 13, the pulley 33 abuts against the limiter 35.

[0104] In this embodiment, the cantilever assembly 30 further includes a stopper 35, which is a component for limiting the position of the pulley 33. The stopper 35 is fixed to the sliding portion 321 of the arm slide rail 32 in the cantilever assembly 30. The stopper 35 can be arranged on the side of the sliding portion 321 close to the rotating portion 320, so that when the chamber door 12 is closed, that is, when the power module 20 slides toward the rotating portion 320, the pulley 33 connected to the power module 20 can be abutted against the stopper 35. Alternatively, the stopper 35 can be arranged on the side of the sliding portion 321 away from the rotating portion 320, so that when the chamber door 12 is opened to a preset angle, that is, when the power module 20 slides in a direction away from the rotating portion 320, the pulley 33 connected to the power module 20 can be abutted against the stopper 35. Of course, the stopper 35 can also be arranged on both sides of the sliding portion 321 at the same time, so that the power module 20 can be abutted against the stopper 35 when it is close to the rotating portion 320 or away from the rotating portion 320.

[0105] Optionally, the side of the stopper 35 that contacts the pulley 33 further has a buffer portion 356 for buffering the impact force when the pulley 33 contacts the stopper 35, so that the stopper 35 and the pulley 33 are not easily damaged.

[0106] By setting the limiter 35, the pulley 33 can only slide within the predetermined range of the cantilever assembly 30, so that the pulley 33 is not easy to slide out of the cantilever assembly 30. At the same time, since the pulley 33 is connected to the power module 20, and the power module 20 is connected to the chamber door 12, the sliding range of the pulley 33 is limited, and the opening and closing angle of the chamber door 12 is also limited, so that the chamber door 12 is not easy to hit the cabinet when it is opened, thereby preventing the chamber door 12 or the cabinet from being damaged.

[0107] Optionally, it can be known from the above contents that the sliding part 321 of the boom slide rail 32 has two structures, and therefore the stopper 35 also has two structures. In the first embodiment, the top wall 3210, two side walls 3212, and two bottom walls 3211 of the sliding part 321 are collectively arranged to form a sliding space 322 with an opening at the bottom. On this basis, the stopper 35 can be directly placed in the sliding space 322 and fixed by screws, so that the stopper 35 is fixed in the sliding space 322, thereby limiting the position of the pulley 33.

[0108] In the second embodiment, the top wall 3210, the bottom wall 3211, and the partition wall 3213 of the sliding portion 321 are combined to form an I-shape, enclosing two separated sliding spaces 322. On this basis, the limiter 35 can be a split structure, including a first sub-limiter 351 and a second sub-limiter 352. A portion of the first sub-limiter 351 is arranged in one sliding space 322, and a portion of the second sub-limiter 352 is arranged in another sliding space 322. The first sub-limiter 351 and the second sub-limiter 352 have a limiting groove 353 near the bottom wall 3211 so that the first sub-limiter 351 and the second sub-limiter 352 can be stuck on the bottom wall 3211 and will not move up and down. At the same time, there are screw holes below the limiting grooves 353 of the first sub-limiting member 351 and the second sub-limiting member 352, and the first sub-limiting member 351 and the second sub-limiting member 352 are connected together through the screw rod 354, so that the first sub-limiting member 351 and the second sub-limiting member 352 become a whole, so that the two will not move in the horizontal direction. In addition, there is a fixing plate 355 above the limiting groove 353 that is horizontal to the bottom wall 3211, and the fixing plate 355 has screw holes, and the limiting member 35 can be fixed to the bottom wall 3211 by screws, so that it will not slide in the length direction of the sliding part 321.

[0109] Please refer to Figure 18-Figure 20 , Fig.18 It is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application. Fig.19 for Fig.18 A top view of the coating equipment is shown. Fig. 20 for Fig.18 In this embodiment, the chamber body 11 includes a top plate 14 and a bottom plate 15 arranged opposite to each other, the chamber door 12 is arranged between the top plate 14 and the bottom plate 15, the bottom plate 15 is used to be arranged on a support frame, and the power module 20 is fixed to the top plate 14.

[0110] In addition to the above-mentioned method of suspending the power module 20 on the top of the chamber 10 through the cantilever assembly 30, the present embodiment can also directly set the power module 20 on the top of the chamber 10, that is, on the top plate 14 of the chamber body 11, so that the weight of the power module 20 is directly loaded on the chamber body 11. By directly setting the power module 20 on the top of the chamber 10, the overall structure of the coating device 1 is simplified, that is, the installation steps of the power module 20 are simplified, and the difficulty of operation is reduced.

[0111] Please refer again Figure 18-Figure 20 In this embodiment, the coating device 1 further includes an electrical connector 50 , one end of which is fixedly connected to the power module 20 , and the other end of which is connected to the cathode 60 .

[0112] On the premise that the power module 20 is directly arranged on the top of the cavity 10, this embodiment can connect the negative electrode of the power supply and the cathode 60 through the electrical connector 50, so as to realize the electrical connection between the negative electrode of the power supply and the cathode 60. Optionally, the electrical connector 50 is a cable, one end of the cable is connected to the negative electrode of the power supply, and the other end is connected to the cathode 60. When the cavity door 12 is opened, the cable is soft and can be deformed, and the cable is not disconnected, that is, the negative electrode of the power supply and the cathode 60 can also be electrically connected when the cavity door 12 is opened. In addition, due to the setting of the cabinet, the opening angle of the cavity door 12 is limited to prevent the cavity door 12 from opening too large and causing the cable to be torn off.

[0113] Further optionally, a drag chain can be provided outside the cable so that the cable can only bend in a direction away from the cavity door 12, so that when the cavity door 12 is closed, the cable will not bend toward the cavity door 12 under the action of gravity, and the cable will not be clamped between the cavity door 12 and the cavity body 11.

[0114] In this embodiment, a flexible electrical connector 50 is arranged between the negative pole of the power module 20 and the cathode 60, so that the negative pole of the power module 20 is always connected to the cathode 60 and will not be disconnected when the chamber door 12 is opened and closed, avoiding the need to disconnect the power module 20 and the cathode 60 when opening the chamber door 12, thereby reducing the difficulty of operation.

[0115] Please refer to Figure 21-23 , Fig.21 It is a schematic diagram of the three-dimensional structure of a coating device in another embodiment of the present application. Fig. 22 for Fig.21 A top view of the coating equipment is shown. Fig.23 for Fig.21 A front view of the coating equipment is shown.

[0116] In this embodiment, the coating device 1 also includes an electrical connector 50, one end of which is detachably plugged into the power module 20, and the other end is connected to the cathode 60. When the chamber door 12 rotates relative to the chamber body 11 to open the coating space 13, one end of the electrical connector 50 is separated from the power module 20. When the chamber door 12 rotates relative to the chamber body 11 to close the coating space 13, one end of the electrical connector 50 is plugged into the power module 20.

[0117] Under the premise that the power module 20 is directly arranged on the top of the cavity 10, the present embodiment can connect the negative electrode of the power supply with the cathode 60 through the electrical connector 50, thereby realizing the electrical connection between the negative electrode of the power supply and the cathode 60. One end of the electrical connector 50 is detachably plugged into the power module 20, and the other end is connected to the cathode 60 and fixed to the cathode 60 or the insulating member 19. When the cavity door 12 is rotated open, as shown in FIG. Fig.21The top of the electrical connection is separated from the power module 20 , and the power module 20 is electrically disconnected from the cathode 60 . When the chamber door 12 is rotated closed, the electrical connector 50 is plugged into the power module 20 , so that the power module 20 is electrically connected to the cathode 60 .

[0118] Optionally, the insertion hole on the power module 20 for inserting the electrical connector 50 is wider than the electrical connector 50 , so that the electrical connector 50 can be stably inserted into the power module 20 .

[0119] In the present embodiment, by setting the plug-in electrical connector 50, the power module 20 is completely separated from the chamber door 12 when the chamber door 12 is opened, that is, the electrical connection between the power module 20 and the cathode 60 is disconnected; when the chamber door 12 is closed, the electrical connector 50 is plugged into the power module 20 to realize the electrical connection between the power module 20 and the cathode 60, that is, the connection and disconnection of the power module 20 and the cathode 60 are automatically realized by the switch of the chamber door 12, thereby avoiding the need to manually disconnect the power module 20 and the cathode 60 when opening the chamber door 12, thereby reducing the difficulty of operation.

[0120] Please refer again Figure 1-Figure 4 In this embodiment, the coating equipment 1 includes a plurality of the power modules 20 and a plurality of the electrical connectors 50. The side of the chamber door 12 close to the coating space 13 is used to correspond to a plurality of the targets and a plurality of the cathodes 60. Each cathode 60 is arranged on a target. One end of each electrical connector 50 is connected to a power module 20, and the other end is connected to the cathode 60. The lengths of the plurality of electrical connectors 50 are equal.

[0121] On the basis of setting the power module 20 at the top of the cavity 10, the present embodiment may also include multiple power modules 20 and multiple electrical connectors 50. Simultaneously, a plurality of targets and a plurality of cathodes 60 are provided correspondingly on the side of the cavity door 12 close to the coating space 13. Each cathode 60 is provided with a target. Each electrical connector 50 connects a power module 20 and a cathode 60, and the length of each electrical connector 50 is equal.

[0122] Optionally, multiple power modules 20 are spaced apart and have separate structures, with the negative pole of each power module 20 facing the cathode 60 in the cavity door 12 below it, so that the distance between the negative pole of each power module 20 and the corresponding cathode 60 is shorter, thereby reducing energy loss on the transmission path. At the same time, the separately arranged power modules 20 facilitate disassembly and maintenance of a single power module 20.

[0123] In this embodiment, by setting up multiple power modules 20 and multiple cathodes 60, and making the length of each electrical connector 50 connecting the power module 20 and the cathode 60 equal, the components are coated with multiple targets at the same time, so that the coating efficiency of the coating equipment 1 is higher. At the same time, the consistent lengths of the multiple electrical connectors 50 make the effect of each electrical connector 50 on the output power basically consistent, thereby ensuring the stability of the operation of each power module 20.

[0124] Optionally, as can be seen from the above content, the power module 20 and the cathode 60 can be connected by a soft electrical connector 50 such as a cable. Since the cable is not disconnected when the chamber door 12 is opened, when there are multiple power modules 20, the electrical connector 50 close to the hinge 120 of the chamber door 12 is shorter than the electrical connector 50 away from the hinge 120. In order to ensure that each electrical connector 50 is the same length, the shorter electrical connector 50 can be appropriately extended so that the shorter electrical connector 50 is extended to the same length as the longest electrical connector 50 to ensure that the length of the electrical connector 50 is consistent.

[0125] When the power module 20 and the cathode 60 are connected by plugging, the lengths of the multiple electrical connectors 50 corresponding to the multiple power modules 20 are the same. At this time, since the electrical connector 50 close to the hinge 120 will be plugged into the power module 20 first, the chamber door 12 needs to be completely closed to achieve the connection between all the power modules 20 and the cathode 60. Therefore, the coating is usually performed after the chamber door 12 is completely closed.

[0126] When the power module 20 is suspended on the top of the cavity 10 by a cantilever, the length of the electrical connector 50 near the middle of the cavity door 12 is the shortest. Therefore, the shorter electrical connector 50 can be bent appropriately so that its length after bending is the same as that of the other electrical connectors 50, thereby achieving consistent length of the electrical connectors 50.

[0127] Optionally, the door 12 can be bent into multiple planes, such as Figure 1 As shown, the chamber door 12 can be bent into three planes, that is, the inner surface of the chamber door 12 is also bent into three planes, a cathode 60 is installed on each plane, a target is installed on each cathode 60, and each target is at an equal distance from the coated component. Using multiple targets in an arc shape to coat the components at the same time makes the coating more uniform and the effect better.

[0128] Further optionally, the coating device 1 has a plurality of chamber doors 12 bent into a plurality of planes, for example Figure 4 As shown, two chamber doors 12 bent into three planes are arranged opposite to each other, so that there are three targets on each chamber door 12. The six targets on the two chamber doors 12 surround the coated parts in a ring shape, so that the coating device 1 can coat more evenly and efficiently.

[0129] In the description of the present application, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0130] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0131] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be connected, detachably connected, or integrated. It can be mechanically connected or electrically connected. It can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0132] The above describes the contents provided by the implementation methods of the present application in detail, and describes and illustrates the principles and implementation methods of the present application. These descriptions are only used to help understand the method and its core ideas of the present application. However, the contents of this specification should not be construed as limiting the present application, and those skilled in the art may make various changes and modifications to the present application without departing from the spirit and scope of the present application. These modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents.

Claims

1. A coating device, characterized in that: The coating equipment comprises: A chamber, the chamber comprising a chamber body and a chamber door installed on the chamber body, the chamber body and the chamber door enclose a coating space, each of the chamber doors can rotate relative to the chamber body to open or close the coating space, and a side of the chamber door close to the coating space is used to install a target material and a cathode connected to the target material; A power supply module is arranged on the cavity body and is used for electrically connecting the cathode.

2. The coating device according to claim 1, characterized in that: The chamber body includes a top plate and a bottom plate that are arranged opposite to each other, the chamber door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, the coating device also includes a cantilever assembly and a connecting piece, the cantilever assembly is fixed to the top plate and can rotate relative to the top plate, the power module is slidably and rotatably connected to the cantilever assembly, one end of the connecting piece is fixed to the power module, and the other end is fixed to the chamber door; When the cavity door rotates relative to the cavity body, the power module is driven to rotate synchronously through the connecting piece, and the power module drives the cantilever assembly to rotate relative to the top plate, and the power module also slides and rotates relative to the cantilever assembly.

3. The coating device according to claim 2, characterized in that: The cantilever assembly includes a boom base, a boom slide rail, a pulley, and a matching piece. The boom base is fixed to the top plate, the boom slide rail is sleeved on the boom base and rotatably connected to the boom base, one end of the pulley is slidably connected to the boom slide rail, and the other end of the pulley is rotatably connected to the matching piece, and the matching piece is fixedly connected to the power module.

4. The coating device according to claim 3, characterized in that: The boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall facing away from the power module, two side walls, and two bottom walls, the two side walls are bent and connected to opposite sides of the top wall, each side of the side wall facing away from the top wall is bent and connected to one bottom wall, and the two bottom walls are close to each other and set with a gap, the top wall, the two side walls, and the two bottom walls are surrounded to form a sliding space, one end of the pulley is set in the sliding space, and the other end of the pulley passes through the gap between the two bottom walls and is rotatably connected to the matching piece.

5. The coating device according to claim 3, characterized in that: The boom slide rail includes a rotating part and a sliding part, the rotating part is sleeved on the boom base and rotatably connected to the boom base, the sliding part includes a top wall and a bottom wall arranged opposite to each other, and a partition wall arranged between the top wall and the bottom wall, the top wall is farther away from the power module than the bottom wall, and the top wall, the bottom wall, and the partition wall are arranged to form two separated sliding spaces; the pulley includes a first sub-pulley, a second sub-pulley, and a connecting part, the first sub-pulley is arranged in one of the sliding spaces, and the second sub-pulley is arranged in another of the sliding spaces, one end of the connecting part connects the first sub-pulley and the second sub-pulley, and the other end of the connecting part is rotatably connected to the matching piece.

6. The coating device according to claim 4 or 5, characterized in that: The cantilever assembly further includes a limiter, which is fixed to the sliding portion, and the cantilever assembly satisfies at least one of the following conditions: When the chamber door rotates relative to the chamber body to close the coating space, the pulley abuts against the limiting member; When the chamber door rotates relative to the chamber body at a preset angle to open the coating space, the pulley abuts against the limiting member.

7. The coating device according to claim 1, characterized in that: The cavity body includes a top plate and a bottom plate that are arranged opposite to each other, the cavity door is arranged between the top plate and the bottom plate, the bottom plate is used to be arranged on a support frame, and the power module is fixed to the top plate.

8. The coating device according to claim 7, characterized in that: The coating device also includes an electrical connector, one end of which is fixedly connected to the power module, and the other end of which is used to connect to the cathode.

9. The coating device according to claim 7, characterized in that: The coating equipment also includes an electrical connector, one end of which is detachably plugged into the power module, and the other end is connected to the cathode. When the chamber door rotates relative to the chamber body to open the coating space, one end of the electrical connector is separated from the power module, and when the chamber door rotates relative to the chamber body to close the coating space, one end of the electrical connector is plugged into the power module.

10. The coating device according to claim 1, characterized in that: The coating equipment includes multiple power modules and multiple electrical connectors. The side of the chamber door close to the coating space is used to correspond to multiple targets and multiple cathodes. Each cathode is set on one target. One end of each electrical connector is connected to a power module, and the other end is connected to the cathode. The lengths of the multiple electrical connectors are equal.

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