Tail gas emission system of boron diffusion equipment and boron diffusion equipment

Abstract

The invention discloses a tail gas emission system of boron diffusion equipment and the boron diffusion equipment, and belongs to the field of tail gas treatment. The tail gas emission system is provided with a gas inlet and a gas outlet, the gas inlet is suitable for being connected with a gas outlet of a vacuum furnace of the boron diffusion equipment, and the tail gas emission system comprises a condenser and a filter. The condenser comprises a condensing container and a condenser mounted in the condensing container, an inlet of the condensing container is connected with the gas inlet, and the condenser is used for condensing substances to be separated in the tail gas; an inlet of the filter is connected with an outlet of the condensing container and used for filtering at least part of solid particles, and an outlet of the filter is connected with the exhaust port. The service life of the filter element of the filter is prolonged, pollution of B2O3 deposition to the rear-end diaphragm pump and the tail discharge pipe is reduced, the maintenance period of the whole system is prolonged, and the maintenance cost is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of tail gas treatment, and in particular, relates to a tail gas emission system of a boron expansion device and a boron expansion device. Background Art

[0002] During the operation of the boron expansion equipment, the tail gas generated by the vacuum furnace usually contains solid particles, harmful gases and other substances that need to be treated. In order to protect the environment and reduce tail gas pollution, these tail gases need to be effectively treated. Traditional tail gas treatment methods have the problems of poor treatment effect, high energy consumption and complex operation, and need to be improved. Summary of the invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a tail gas emission system and a boron expansion device for a boron expansion device, which is conducive to extending the service life of the filter element of the filter, reducing the pollution of the rear diaphragm pump and the tail exhaust pipe caused by B2O3 deposition, thereby extending the maintenance cycle of the entire system and reducing the maintenance cost.

[0004] In a first aspect, the present application provides an exhaust gas emission system of a boron expansion device, comprising: the exhaust gas emission system has an air inlet and an exhaust port, the air inlet is suitable for being connected to the air outlet of a vacuum furnace of the boron expansion device, and the exhaust gas emission system comprises:

[0005] A condenser, the condenser comprising a condensation container and a condenser mounted on the condensation container, the inlet of the condensation container is connected to the air inlet, and the condenser is used to condense the substances to be separated in the tail gas;

[0006] A filter, wherein the inlet of the filter is connected to the outlet of the condensation container and is used to filter at least part of the solid particles, and the outlet of the filter is connected to the exhaust port.

[0007] According to the exhaust gas emission system of the boron expansion equipment of the present application, a condenser and a filter are set up, and the exhaust gas temperature is first lowered by intervening an external cold source of the condenser, so that most of the B2O3 in the exhaust gas is condensed and crystallized, thereby reducing the harmful components in the exhaust gas, and then secondary filtration is achieved through the filtering effect of the filter to further adsorb the residual B2O3 in the exhaust gas. Placing the filter downstream of the condenser is beneficial to extending the service life of the filter element of the filter, reducing the pollution of the rear-end diaphragm pump and the tail pipe caused by B2O3 deposition, thereby extending the maintenance period of the entire system and reducing maintenance costs.

[0008] According to one embodiment of the present application, the condenser comprises:

[0009] A scraper, mounted on the condensation container;

[0010] A driving mechanism is connected to the device and is used to drive the scraper to move so as to scrape off crystals on the wall of at least one of the condensation container and the condenser.

[0011] In this embodiment, by providing a scraper and a driving mechanism, the outer wall of the condenser tube can be crystallized to achieve self-cleaning, and the system can be operated for a long time.

[0012] According to one embodiment of the present application, the scraper blade includes an avoidance hole, the condenser passes through the avoidance hole, and the inner periphery of the avoidance hole is used to scrape off crystals on the wall surface of the condenser; the outer periphery of the scraper blade is adapted to the inner wall of the condensation container, and the outer periphery of the scraper blade is used to scrape off crystals on the inner wall of the condensation container.

[0013] According to one embodiment of the present application, the condenser includes a condenser tube, which is connected to an external cold source through a medium pipeline, and the condenser tube includes a plurality of sections connected in a bent manner, and the plurality of sections are distributed in the condenser container at intervals.

[0014] In this embodiment, the layout design of multiple sections of condensing tubes spaced apart and distributed in the condensing container can increase the contact area between the condensing tubes and the gas inside the condensing container, thereby improving the condensation efficiency. At the same time, the multiple sections of spaced apart design can also avoid mutual interference or blockage between the condensing tubes.

[0015] According to one embodiment of the present application, each section of the condenser tube passes through the scraper blade and the top cover of the condensation container, and multiple sections of the condenser tube are connected end to end in sequence, and the connection point is located on the side of the scraper blade away from the top cover or the side of the top cover away from the scraper blade.

[0016] In this embodiment, the upper and lower connections of the multiple sections of the condenser are located outside the stroke of the scraper. The multiple sections of the condenser, except for the connections, can be arranged in parallel and spaced apart to facilitate the scraping of crystals by the scraper, thereby improving the scraping effect and further improving the condensation effect of harmful exhaust gas.

[0017] According to one embodiment of the present application, the inlet of the condensation container is arranged below the side wall of the condensation container.

[0018] According to an embodiment of the present application, the bottom of the condensation container is provided with an opening and is equipped with a collection container.

[0019] In this embodiment, a scraper is used in combination with a condenser tube design. The B2O3 crystals on the outer wall of the condenser tube and the inner wall of the condensation container can be cleaned through a top drive mechanism and collected into a collection container through a designed slope structure, thereby realizing long-term operation of the condenser.

[0020] According to an embodiment of the present application, the collecting container is detachably mounted on the condensing container.

[0021] According to one embodiment of the present application, the tail gas emission system of the boron expansion equipment further includes:

[0022] A cooler, the cooler being suitable for being arranged between the gas outlet of the vacuum furnace of the boron expansion device and the inlet of the condenser;

[0023] And / or, a pump body and a control valve, the inlet of the pump body is connected to the outlet of the filter, the outlet of the pump body is connected to the inlet of the control valve, and the outlet of the control valve is connected to the exhaust port.

[0024] In this embodiment, a multi-stage treatment combining cooling and filtering is adopted. After cooling in a condenser, the waste gas is filtered by a filter element to further reduce the content of particles such as B2O3 in the waste gas, thereby improving the filtering effect and extending the service life of the diaphragm pump diaphragm.

[0025] In a second aspect, the present application provides a boron expansion device, comprising:

[0026] Vacuum furnace;

[0027] The exhaust gas emission system of the boron expansion equipment described in any of the above embodiments, wherein the air inlet of the exhaust gas emission system is connected to the air outlet of the vacuum furnace.

[0028] According to the boron expansion equipment of the present application, a tail gas emission system is provided, and a condenser and a filter are provided in the tail gas emission system. The tail gas temperature is first lowered by the intervention of an external cold source of the condenser, so that most of the B2O3 in the tail gas is condensed and crystallized, thereby reducing the harmful components in the tail gas. Secondary filtration is then achieved through the filtering effect of the filter to further adsorb the residual B2O3 in the tail gas. Placing the filter downstream of the condenser is beneficial to extending the service life of the filter element of the filter, reducing the pollution of the rear-end diaphragm pump and the tail pipe caused by B2O3 deposition, thereby extending the maintenance period of the entire system and reducing maintenance costs.

[0029] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0031] Figure 1 is a schematic diagram of the structure of the exhaust emission system provided in an embodiment of the present application;

[0032] Figure 2 It is one of the structural schematic diagrams of the condenser provided in the embodiment of the present application;

[0033] Figure 3 This is the second structural schematic diagram of the condenser provided in the embodiment of the present application.

[0034] Reference numerals:

[0035] Condenser 1, condensation container 11, condenser 12, condensation pipe 121, scraper 13, drive mechanism 14, collection container 15, filter 2, pump body 3, control valve 4, cooler 5, vacuum furnace 6, tail exhaust pipe 7. DETAILED DESCRIPTION

[0036] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0037] Reference below Figure 1-Figure 3 The exhaust gas emission system of the boron expansion equipment according to the embodiment of the present application is described. The exhaust gas emission system has an air inlet and an exhaust port. The air inlet is suitable for being connected to the air outlet of the vacuum furnace 6 of the boron expansion equipment. The exhaust gas emission system includes: a condenser 1 and a filter 2.

[0038] The condenser 1 includes a condensation container 11 and a condenser 12 installed on the condensation container 11. The inlet of the condensation container 11 is connected to the air inlet, and the condenser 12 is used to condense the substances to be separated in the exhaust gas; the inlet of the filter 2 is connected to the outlet of the condensation container 11, which is used to filter at least part of the solid particles, and the outlet of the filter 2 is connected to the exhaust port.

[0039] The exhaust gas emission system of the embodiment of the present application includes a condenser 1 and a filter 2. The exhaust gas emission system receives exhaust gas from the outlet of the vacuum furnace 6 of the boron expansion equipment, condenses the material through the condenser 1, removes solid particles through the filter 2, and finally discharges it to the external environment or the tail exhaust pipe 7.

[0040] The condenser 12 is used to condense harmful gases or vapors such as B2O3 and BCL3 into liquid or solid. The condenser 12 can be condensed by liquid cooling or air cooling. After the high-temperature tail gas is cooled by the condenser 12, the harmful tail gas such as B2O3 and BCL3 contained therein condenses on the outer wall of the condenser 12, thereby achieving the separation of the substances to be separated. The selection of the condenser 12 should take into account the properties of the substances to be separated in the tail gas and the condensation efficiency. The properties of the substances to be separated include boiling point or freezing point, etc.

[0041] The condenser 12 may use a multi-stage condensation or a variable temperature condensation method to better adapt to substances with different boiling points.

[0042] The filter 2 is used to remove solid particles in the tail gas. The filter 2 plays a role of physical adsorption. The filter 2 can filter solid particles in the tail gas, such as B2O3 powder, dust or smoke. The tail gas enters the filter 2 through the pipeline, and the filter 2 filters out the B2O3 powder particles carried by the tail gas. The filtered gas is then discharged into the tail pipe 7 through the pipeline to complete the entire tail gas treatment work.

[0043] In this embodiment, two-stage filtration is adopted. After cooling in the condenser 1, the waste gas is filtered by the filter element of the filter 2 to further reduce the content of particles such as B2O3 in the waste gas, so as to improve the filtration effect and extend the service life of the diaphragm of the diaphragm pump.

[0044] In the related art, conventional cooling liquid bottles and fiber filters are used for the operation of boron expansion equipment. The operating state of the boron expansion equipment depends entirely on whether the tail exhaust of the equipment is blocked. If the tail exhaust is blocked, the pressure in the furnace tube will rise, and the vacuum degree required by the process cannot be guaranteed. In addition, the filter elements of conventional cooling liquid bottles and fiber filters are relatively expensive and consumed quickly, and can only filter larger B2O3 particles, which can easily cause the filtering effect of the original boron expansion tail exhaust to be unsatisfactory, resulting in blockage of the tail exhaust pipe, which needs to be replaced and cleaned regularly (about 10 to 15 days). In addition, the boron expansion equipment is blocked by B2O3, which affects the uptime of the boron expansion equipment, causing the process pressure of the boron expansion equipment to be unstable, the film formation uniformity is poor, and it cannot be used normally. In addition, the diaphragm of the diaphragm pump will reduce its service life due to residual B2O3 deposition. At the same time, the leakage of chlorine and boron oxide in the tail gas will release trace boric acid and hydrogen chloride gas in the air. The above gases are corrosive and polluting, causing the metal parts of the tail exhaust system equipment to rust and corrode, and the electrical aging speed is accelerated. In addition, the leaked gas is seriously harmful to the human body.

[0045] According to the exhaust gas emission system provided in the embodiment of the present application, a condenser 1 and a filter 2 are provided, and the exhaust gas temperature is first lowered by the intervention of an external cold source of the condenser 1, so that most of the B2O3 in the exhaust gas is condensed and crystallized, thereby reducing the harmful components in the exhaust gas, and then secondary filtration is achieved through the filtering effect of the filter 2 to further adsorb the residual B2O3 in the exhaust gas. Placing the filter 2 downstream of the condenser 1 is beneficial to extending the service life of the filter element of the filter 2, reducing the pollution of the rear-end diaphragm pump and the tail pipe 7 caused by B2O3 deposition, thereby extending the maintenance period of the entire system and reducing the maintenance cost.

[0046] In some embodiments, Figure 2 and Figure 3 As shown, the condenser 1 includes: a scraper 13 and a driving mechanism 14; the scraper 13 is installed in the condensation container 11; the driving mechanism 14 is connected to drive the scraper 13 to move to scrape off crystals on the wall of at least one of the condensation container 11 and the condenser 12.

[0047] When the scraper blade 13 is in contact with the inner wall surface of the condensation container 11, the scraper blade 13 can scrape off the crystals on the inner wall surface of the condensation container 11; when the scraper blade 13 is in contact with the outer wall surface of the condenser 12, the scraper blade 13 can scrape off the crystals on the outer wall surface of the condenser 12; when the scraper blade 13 is in contact with both the inner wall surface of the condensation container 11 and the outer wall surface of the condenser 12, the scraper blade 13 can scrape off the crystals on the inner and outer walls of the condensation container 11 and the condenser 12 at the same time.

[0048] The scraper 13 can be a plate-like structure, a ring-like structure or other special-shaped structures. The wall surface of the scraper 13 conforms to and fits closely with at least part of the inner wall surface of the condensation container 11 and / or at least part of the outer wall surface of the condenser 12 to scrape off at least part of the crystals on the inner wall surface of the condensation container 11 and / or the outer wall surface of the condenser 12.

[0049] In this embodiment, by providing the scraper 13 and the driving mechanism 14, the outer wall of the condenser 121 can be crystallized to achieve self-cleaning, and the system can be operated for a long time.

[0050] In some embodiments, Figure 2 As shown, the scraper 13 includes an avoidance hole, the condenser 12 passes through the avoidance hole, and the inner periphery of the avoidance hole is used to scrape off crystals on the wall surface of the condenser 12; the outer periphery of the scraper 13 is adapted to the inner wall of the condensation container 11, and the outer periphery of the scraper 13 is used to scrape off crystals on the inner wall of the condensation container 11.

[0051] Among them, the aperture and hole shape of the avoidance hole are adapted to the outer wall of the condenser 12 to scrape off the crystals on the wall surface of the condenser 12; the outer periphery of the scraper 13 is adapted to the size and shape of the inner wall of the condensation container 11 to scrape off the crystals on the inner wall of the condensation container 11.

[0052] In some embodiments, a first elastic portion is provided in the area where the avoidance hole contacts the wall of the condenser 12 to adapt to slight deformation of the condenser 12 under temperature changes, while being able to improve the scraping effect on crystals; a second elastic portion is provided in the area where the periphery of the scraper 13 contacts the inner wall of the condensation container 11 to adapt to slight deformation of the condensation container 11 under temperature changes, while being able to improve the scraping effect on crystals.

[0053] In some embodiments, Figure 2 As shown, the condenser 12 includes a condenser tube 121 , which is connected to an external cold source via a medium pipeline. The condenser tube 121 includes a plurality of sections connected in a bent manner, and the plurality of sections are spaced apart and distributed in the condenser container 11 .

[0054] The condenser 121 is used to transfer heat from the gas or steam to an external cold source. The cooling medium flows in the condenser 121, absorbs the heat on the condenser 121, and takes it away, thereby realizing the condensation process.

[0055] The layout design of multiple sections of condensing tubes 121 spaced apart and distributed in the condensing container 11 can increase the contact area between the condensing tubes 121 and the gas inside the condensing container 11, thereby improving the condensation efficiency. At the same time, the multiple sections of the spaced apart design can also avoid mutual interference or blockage between the condensing tubes 121.

[0056] In some embodiments, Figure 2 As shown, each section of the condenser tube 121 passes through the scraper blade 13 and the top cover of the condensation container 11, and multiple sections of the condenser tube 121 are connected end to end in sequence, and the connection point is located on the side of the scraper blade 13 away from the top cover or the side of the top cover away from the scraper blade 13.

[0057] The scraper blade 13 is provided with a plurality of avoidance holes, and the plurality of condensation tubes 121 pass through the plurality of avoidance holes in a one-to-one correspondence, so that the outer wall of each condensation tube 121 is scraped through the inner wall of the avoidance hole of the scraper blade 13, thereby increasing the scraping area.

[0058] It should be noted that the multiple sections of condenser tubes 121 are connected end to end in sequence, and the connection of the multiple sections of condenser tubes 121 usually forms a bent section for easy connection. The other parts of the multiple sections of condenser tubes 121 except the connection can be arranged in parallel and at intervals.

[0059] The connection of the multi-section condenser pipe 121 has the following two connection positions:

[0060] First, the connection of the multi-section condenser 121 is arranged on the side of the top cover away from the scraper 13, and the connection of the condenser 121 is located outside the stroke of the scraper 13. Therefore, the connection is located outside the condensation container 11 and no crystallization will occur. The multi-section condenser 121 located in the condensation container 11 can be arranged in parallel to facilitate the scraping of crystals by the scraper 13.

[0061] Secondly, the connection of the multi-section condenser 121 is arranged on the side of the scraper 13 away from the top cover, that is, the connection is located in the area close to the bottom of the condensation container 11. The connection is located outside the stroke of the scraper 13 to facilitate the scraper 13 to scrape off the crystals.

[0062] In this embodiment, the upper and lower connections of the multi-section condenser 121 are located outside the stroke of the scraper 13. The multi-section condenser 121 can be arranged in parallel and at intervals except for the connections to facilitate the scraping of crystals by the scraper 13, thereby improving the scraping effect and further improving the condensation effect of harmful exhaust gas.

[0063] In some embodiments, Figure 2 As shown, the inlet of the condensation container 11 is arranged below the side wall of the condensation container 11 .

[0064] Among them, the exhaust gas enters the bottom of the condensation container 11 through the pipeline, and the exhaust gas is discharged into the condensation container 11 from bottom to top. A connected condensation pipe 121 is provided inside the cooling tower. When the exhaust gas flows, it needs to pass through the gap of the condensation pipe 121 and flow into the filter 2 from the upper part of the condensation container 11.

[0065] In this embodiment, the inlet of the condensation container 11 is arranged below the side wall of the condensation container 11, which can increase the contact time and release area between the exhaust gas and the condensation tube 121, increase the condensation effect, and thus improve the purification effect of the exhaust gas.

[0066] In some embodiments, an annular air duct is provided at the bottom of the condensation container 11, the inlet of the annular air duct is connected to the outlet of the vacuum furnace 6 of the boron expansion equipment, the annular air duct extends around the circumference of the condensation container 11, and the annular air duct is provided with multiple outlets, and the multiple outlets are spaced apart and distributed around the extension direction of the annular air duct.

[0067] In this embodiment, the exhaust gas is discharged into the condensation container 11 from the outlet of the annular air duct, and the exhaust gas can flow out evenly from the bottom of the condensation container 11 from bottom to top. The exhaust gas needs to pass through the gap of the condensation tube 121 so that harmful exhaust gases such as B2O3 and BCL3 contained in the exhaust gas can condense on the outer wall of the condensation tube 121.

[0068] In some embodiments, Figure 2 As shown, the bottom of the condensation container 11 is provided with an opening and a collecting container 15 is installed thereon.

[0069] In this embodiment, the collecting container 15 can be a container such as the collecting container 15. When harmful exhaust gases such as B2O3 and BCL3 contained in the exhaust gas condense to the outer wall of the condenser 121, the driving mechanism 14 drives the scraper 13 to scrape off the crystalline powder on the outer wall of the condenser 121 and the inner wall of the condensation container 11. The crystalline powder falls from the bottom opening of the condensation container 11 and is collected in the collecting container 15. The maintenance personnel only need to regularly clean the B2O3 and other crystals in the collecting container 15.

[0070] In some embodiments, a guide surface is disposed at the bottom of the condensation container 11 . The guide surface is conical and inclined so that the crystallized powder falling on the guide surface can slide along the guide surface into the collection container 15 .

[0071] In this embodiment, a scraper 13 is used in combination with the condenser 121. The B2O3 crystals on the outer wall of the condenser 121 and the inner wall of the condensation container 11 can be cleaned through the top driving mechanism 14 and collected into the collection container 15 through the designed slope structure, thereby realizing long-term operation of the condenser 1.

[0072] It should be noted that the melting point of B2O3 is 557°C and the boiling point of BCL3 is 12.5°C. B2O3 and BCL3, as the main harmful components of the exhaust gas, are condensed on the outer wall of the condenser 12 after being cooled by a cooling medium, and then enriched in the collection container 15 through the scraper 13. After the exhaust gas is cooled, the situation of the tail diaphragm pump diaphragm being burned due to the high temperature of the exhaust gas caused by the boron expansion can be effectively reduced.

[0073] In some embodiments, the collecting container 15 is detachably mounted on the condensing container 11 .

[0074] The collecting container 15 is detachably connected to the bottom opening of the condensing container 11, so that the maintenance personnel can remove the collecting container 15 to clean the crystallized powder in the collecting container 15. Exemplarily, the collecting container 15 and the bottom opening of the condensing container 11 can be threaded, plug-in or screw-on.

[0075] In this embodiment, by providing the scraper 13 and the collection container 15, the crystallization of the outer wall of the condenser tube 121 can achieve self-cleaning and powder collection, and can realize long-term operation of the system.

[0076] In some embodiments, Figure 1 As shown, the tail gas emission system of the boron expansion equipment further includes: a cooler 5, which is suitable for being arranged between the gas outlet of the vacuum furnace 6 of the boron expansion equipment and the inlet of the condenser 1.

[0077] The tail gas first enters the cooler 5, where it is initially cooled and condensed from bottom to top. Under the influence of its own gravity, the tail gas crystallizes and deposits the oversized B2O3 particles to the bottom of the cooler 5 to achieve preliminary treatment.

[0078] Exemplarily, the cooler 5 may be a bottle container.

[0079] In this embodiment, a multi-stage treatment combining cooling and filtering is adopted. After cooling by the condenser 1, the exhaust gas is filtered by the filter element of the filter 2 to further reduce the content of particles such as B2O3 in the exhaust gas, so as to improve the filtering effect and extend the service life of the diaphragm of the diaphragm pump.

[0080] In some embodiments, Figure 1 As shown, the tail gas emission system of the boron expansion equipment also includes: a pump body 3 and a control valve 4, the inlet of the pump body 3 is connected to the outlet of the filter 2, the outlet of the pump body 3 is connected to the inlet of the control valve 4, and the outlet of the control valve 4 is connected to the exhaust port.

[0081] The control valve 4 may be a vacuum valve, and the pump body 3 may be a diaphragm pump to accelerate the exhaust gas flow rate of the exhaust gas emission system and improve the filtering efficiency. The gas discharged from the filter 2 passes through the pump body 3 and the control valve 4 and enters the exhaust pipe 7.

[0082] The complete working process of the tail gas emission system of the boron expansion equipment provided in this embodiment is described below:

[0083] The tail gas of the boron expansion system is first cooled and condensed from bottom to top in the cooler 5, and under the influence of its own gravity, the super-large particles of B2O3 are crystallized and deposited at the bottom of the cooler 5 to achieve preliminary treatment, and then enters the annular airway at the bottom of the condenser 1 through the pipeline and flows out from bottom to top through the opening of the annular airway. The condensation container 11 is provided with a connecting condenser pipe 121, and each condenser pipe 121 is connected end to end and is vertically distributed in the condenser 1 in a ring shape. When the tail gas flows, it needs to pass through the gap between the condenser pipes 121 and flow into the filter 2 from the upper part of the condenser 1 to condense. Tube 121 is connected to an external cold source, and a compression pump is used to realize continuous circulation of the cold source in the condenser 121 to ensure that the temperature of the condenser 121 is always maintained at a low value. After the high-temperature exhaust gas is cooled, harmful exhaust gases such as B2O3 and BCL3 contained therein condense onto the outer wall of the condenser 121. At this time, the upper driving mechanism 14 drives the scraper 13 to scrape off the crystalline powder on the outer wall of the condenser 121 and the inner wall of the condensation container 11 and collect it into the collection container 15. The maintenance personnel only need to clean the B2O3 and other crystals in the collection container 15 regularly.

[0084] The exhaust gas cooled by the condenser 1 is filtered by the filter element of the filter 2 and then passes through the control valve 4 to the pump body 3, and the exhaust gas is discharged into the exhaust pipe 7 to complete the entire exhaust gas treatment work.

[0085] like Figure 1 As shown, an embodiment of the present application also provides a boron expansion device, including: a vacuum furnace 6 and an exhaust gas emission system of the boron expansion device of any of the above embodiments, wherein the air inlet of the exhaust gas emission system is connected to the air outlet of the vacuum furnace 6.

[0086] According to the boron expansion equipment provided in the embodiment of the present application, an exhaust gas emission system is set up, and a condenser 1 and a filter 2 are set up in the exhaust gas emission system. The exhaust gas temperature is first lowered by the intervention of an external cold source of the condenser 1, so that most of the B2O3 in the exhaust gas is condensed and crystallized, thereby reducing the harmful components in the exhaust gas, and then secondary filtration is achieved through the filtering effect of the filter 2 to further adsorb the residual B2O3 in the exhaust gas. Placing the filter 2 downstream of the condenser 1 is beneficial to extending the service life of the filter element of the filter 2, reducing the pollution of the rear-end diaphragm pump and the tail pipe caused by B2O3 deposition, thereby extending the maintenance period of the entire system and reducing the maintenance cost.

[0087] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0088] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0089] In the description of this application, "first feature" or "second feature" may include one or more of the features.

[0090] In the description of the present application, “plurality” means two or more.

[0091] In the description of the present application, a first feature being “on” or “under” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact with each other but are in contact with each other via another feature therebetween.

[0092] In the description of the present application, “above”, “over” and “above” a first feature to a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0093] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0094] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. An exhaust gas emission system for a boron expansion device, characterized in that: The tail gas emission system has an air inlet and an air outlet, wherein the air inlet is suitable for being connected to the air outlet of the vacuum furnace of the boron expansion device, and the tail gas emission system comprises: A condenser, the condenser comprising a condensation container and a condenser mounted on the condensation container, the inlet of the condensation container is connected to the air inlet, and the condenser is used to condense the substances to be separated in the tail gas; A filter, wherein the inlet of the filter is connected to the outlet of the condensation container and is used to filter at least part of the solid particles, and the outlet of the filter is connected to the exhaust port.

2. The tail gas emission system of the boron expansion equipment according to claim 1, characterized in that: The condenser comprises: A scraper, mounted on the condensation container; A driving mechanism is connected to the device and is used to drive the scraper to move so as to scrape off crystals on the wall of at least one of the condensation container and the condenser.

3. The tail gas emission system of the boron expansion equipment according to claim 2, characterized in that: The scraper includes an avoidance hole, the condenser passes through the avoidance hole, and the inner periphery of the avoidance hole is used to scrape off crystals on the wall surface of the condenser; the outer periphery of the scraper is adapted to the inner wall of the condensation container, and the outer periphery of the scraper is used to scrape off crystals on the inner wall of the condensation container.

4. The tail gas emission system of the boron expansion equipment according to claim 2, characterized in that: The condenser comprises a condenser tube, which is connected to an external cold source through a medium pipeline. The condenser tube comprises a plurality of sections connected in a bent manner, and the plurality of sections are spaced apart and distributed in the condenser container.

5. The tail gas emission system of the boron expansion equipment according to claim 4, characterized in that: Each section of the condenser tube passes through the scraper blade and the top cover of the condensation container, and multiple sections of the condenser tube are connected end to end in sequence, and the connection point is located on the side of the scraper blade away from the top cover or the side of the top cover away from the scraper blade.

6. The tail gas emission system of the boron expansion equipment according to claim 1, characterized in that: The inlet of the condensation container is arranged below the side wall of the condensation container.

7. The tail gas emission system of the boron expansion equipment according to claim 1, characterized in that: The bottom of the condensation container is provided with an opening and is equipped with a collecting container.

8. The tail gas emission system of the boron expansion equipment according to claim 7, characterized in that: The collecting container is detachably mounted on the condensing container.

9. The tail gas emission system of the boron expansion equipment according to any one of claims 1 to 8, characterized in that: Also includes: A cooler, the cooler being suitable for being arranged between the gas outlet of the vacuum furnace of the boron expansion device and the inlet of the condenser; And / or, a pump body and a control valve, the inlet of the pump body is connected to the outlet of the filter, the outlet of the pump body is connected to the inlet of the control valve, and the outlet of the control valve is connected to the exhaust port.

10. A boron expansion device, characterized in that: include: Vacuum furnace; The exhaust gas emission system of the boron expansion equipment according to any one of claims 1 to 9, wherein the air inlet of the exhaust gas emission system is connected to the air outlet of the vacuum furnace.

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