Flushing mechanism and flushing device for porous ceramic vacuum chuck

Abstract

The invention discloses a flushing mechanism and a flushing device for a porous ceramic vacuum chuck, and the flushing mechanism comprises a supporting plate with a mounting hole; the flushing part is provided with a butt joint cavity located in the mounting hole, a pipeline and a high-pressure pump; the porous ceramic vacuum suction cup and the supporting plate are relatively fixed through the pressing assembly; the pressing disc assembly is located over the flushing part and is provided with a pressing disc, a movable strip and a driving element, the pressing disc is provided with a strip-shaped notch formed in the radial direction, the movable strip is arranged on the pressing disc in a sliding mode, a through hole is formed in the movable strip, and the driving element can make the through hole move in the length direction of the strip-shaped notch; the rotating element is positioned above the pressure plate assembly; and the telescopic element is positioned above the rotating element. The flushing medium can only be sprayed out from the through holes of the movable strips, and due to the fact that the area of the through holes relative to the whole porous ceramic plate is small, impurities in the channels corresponding to the through holes can be better flushed out, and the channels, seriously blocked, of the porous ceramic plate can be dredged.

Description

Technical Field

[0001] The invention relates to the field of flushing equipment, in particular to a flushing mechanism and a flushing device for a porous ceramic vacuum suction cup. Background Art

[0002] In the field of semiconductor CMP thinning machines, porous ceramic vacuum chucks are often used, such as Figure 1 and Figure 2 As shown, the porous ceramic vacuum suction cup 1 includes a porous ceramic disk 12 and a substrate 11 (the substrate 11 can be alumina). The substrate 11 is docked and installed with the CMP equipment. The vent 111 at the bottom thereof directly passes through the porous ceramic disk 12. The wafer is placed on the end face of the porous ceramic disk 12, and the vent 111 activates negative pressure. Since the porous ceramic disk 12 has a loose and uniform texture, it can release the negative pressure evenly, thereby adsorbing the wafer.

[0003] After a certain period of use, the porous ceramic vacuum suction cup needs to be rinsed to clean out the impurities in the porous ceramic disc. In the existing cleaning, the high-pressure cleaning medium passes through the porous ceramic disc as a whole. When a channel in the porous ceramic disc is seriously blocked, it is difficult to clean the seriously blocked channel because the high-pressure water vapor is easier to be discharged through the unblocked channel, so the overall cleaning effect is average. Summary of the invention

[0004] In view of the above problems, the present invention proposes a flushing mechanism and a flushing device for a porous ceramic vacuum chuck.

[0005] The technical solution adopted by the present invention is as follows:

[0006] A flushing mechanism for a porous ceramic vacuum chuck, the porous ceramic vacuum chuck comprising a substrate and a porous ceramic disc fixed on the substrate, the first end surface of the porous ceramic disc protruding from the alumina ceramic substrate, the flushing mechanism comprising:

[0007] A support plate having a mounting hole;

[0008] A flushing member, comprising a docking cavity located in the mounting hole, a pipeline communicating with the docking cavity, and a high-pressure pump arranged on the pipeline, wherein the opening of the docking cavity is used for sealingly cooperating with an end of the base body facing away from the first end surface;

[0009] A pressing assembly, fixed to the support plate, for pressing the substrate so that the porous ceramic vacuum chuck and the support plate are relatively fixed;

[0010] A pressure plate assembly is located directly above the flushing part, and the pressure plate assembly comprises a pressure plate, a movable bar and a driving element. The pressure plate has a radially arranged strip notch, and the movable bar is slidably arranged on the pressure plate. The lower end surface of the movable bar is flush with the lower end surface of the pressure plate, and the movable bar has a through hole. The driving element is used to drive the movable bar to move so that the through hole can reciprocate along the length direction of the strip notch;

[0011] A rotating element, located above the pressure plate assembly, and used to drive the pressure plate assembly to rotate;

[0012] The telescopic element is located above the rotating element and is used to drive the rotating element and the pressure plate assembly to move up and down so that the pressure plate and the movable strip are pressed tightly against the first end surface of the porous ceramic disk.

[0013] When the flushing mechanism of the present application is working, the base and the docking cavity of the flushing part are sealed and connected through the clamping assembly, so that the flushing medium through the pipeline can flush the porous ceramic disk under the action of the high-pressure pump; the pressure plate of the present application is used to press on the first end face (upper end face) of the porous ceramic disk, so that when flushing, due to the obstruction of the pressure plate, the flushing medium can only be sprayed out from the through hole of the movable bar, because the through hole is relatively small in area relative to the entire porous ceramic disk, it can better flush out the impurities in the channel corresponding to the through hole; the movable bar can be driven to move by the driving element, and then the through hole can be reciprocated along the length direction of the strip notch, so that one cleaning can be completed radially, and then the rotating element is rotated to a set angle, and then the through hole can be moved at least once along the length direction of the strip notch, and the cleaning of another area can be completed. When the pressure plate rotates 360°, the entire cleaning can be completed. This cleaning method of the present application has a good cleaning effect, especially for clearing the channels of the porous ceramic disk that are severely blocked.

[0014] In actual use, a specific flushing method is:

[0015] Placing the porous ceramic vacuum chuck on the support plate so that the end of the substrate facing away from the first end surface is aligned with the docking cavity, and then fixing the porous ceramic vacuum chuck and the support plate relative to each other by a clamping assembly;

[0016] Perform preliminary flushing, the flushing medium (water, water vapor mixture or cleaning liquid, etc.) input into the pipeline enters the docking cavity after being pressurized by the high-pressure pump, enters the porous ceramic disk after passing through the substrate, and is discharged from the first end surface of the porous ceramic disk;

[0017] The telescopic element drives the rotating element and the pressure plate assembly to move downward, so that the pressure plate and the movable strip are pressed tightly against the first end surface of the porous ceramic plate;

[0018] Clean point by point. The flushing medium input through the pipeline enters the docking cavity after being pressurized by the high-pressure pump, passes through the substrate and then enters the porous ceramic disk and is ejected from the through hole of the movable bar. The driving element drives the movable bar to move so that the through hole can move along the length direction of the strip notch, completing at least one radial cleaning. Then, the rotating element is rotated to a set angle, and the through hole is moved along the length direction of the strip notch at least once. After completion, the above operation is repeated until the disk rotates 360°.

[0019] In one embodiment of the present invention, the clamping assembly includes:

[0020] A pressing plate, the pressing plate having an arc-shaped pressing portion, the arc-shaped pressing portion is used to press the upper end surface of the substrate, when the pressing plate cooperates with the porous ceramic vacuum suction cup, the upper end surface of the arc-shaped pressing portion is lower than the first end surface of the porous ceramic disk, or the upper end surface of the arc-shaped pressing portion is flush with the first end surface of the porous ceramic disk;

[0021] The fastener is used to fix the pressing plate and the supporting plate.

[0022] The design of the arc-shaped pressing portion can increase the contact area with the substrate and better fix the substrate. The upper end surface of the arc-shaped pressing portion is lower than the first end surface of the porous ceramic disk, or the upper end surface of the arc-shaped pressing portion is flush with the first end surface of the porous ceramic disk, so that the movable bar can be prevented from interfering with the arc-shaped pressing portion during cleaning.

[0023] In one embodiment of the present invention, the pressing plate has a countersunk hole, the fastener is a hexagon socket screw, and the pressing plate is fixed to the supporting plate by the hexagon socket screw passing through the countersunk hole.

[0024] This arrangement can prevent the movable strip from interfering with the fastener during cleaning.

[0025] In one embodiment of the present invention, the porous ceramic disk and the base form a circular step, and the arc-shaped pressing portion is adapted to the circular step.

[0026] The combination of the arc-shaped pressing part and the circular step facilitates quick positioning and faster installation.

[0027] In one embodiment of the present invention, the strip-shaped notch passes through the center of the pressure plate.

[0028] In one embodiment of the present invention, the strip-shaped notch includes two oppositely arranged side walls and a connecting wall connecting the two side walls, the pressure plate further includes a radially arranged strip-shaped slide groove, one end of the slide groove extends to the edge of the pressure plate, and the other end extends to the connecting wall of the strip-shaped notch, and the direction of the slide groove is the same as the length direction of the strip-shaped notch; the first end of the movable strip is located at the strip-shaped notch, the through hole is located at the strip-shaped notch, and the second end of the movable strip passes through the slide groove and is located on the outside of the pressure plate;

[0029] The part of the movable bar away from the slide slot has a rack structure;

[0030] The driving element includes a driving motor fixed relatively to the pressure plate and a driving gear driven by the driving motor. The driving gear is meshed with the rack structure. When the driving motor rotates, it can drive the movable bar to move back and forth.

[0031] In one embodiment of the present invention, the side wall of the strip-shaped notch has an anti-slip groove, and the side wall of the movable strip has an anti-slip sliding block that cooperates with the anti-slip groove.

[0032] In one embodiment of the present invention, the rotating element is a motor component.

[0033] In one embodiment of the present invention, the telescopic element is an electric push rod or a cylinder.

[0034] The present application also discloses a flushing device, comprising the flushing mechanism for the porous ceramic vacuum chuck as described above.

[0035] The beneficial effects of the present invention are as follows: when the flushing mechanism of the present application is working, the base and the docking cavity of the flushing part are sealed and connected through the clamping assembly, so that the flushing medium through the pipeline can flush the porous ceramic disk under the action of the high-pressure pump; the pressure plate of the present application is used to press on the first end face (upper end face) of the porous ceramic disk, so that when flushing, due to the obstruction of the pressure plate, the flushing medium can only be sprayed out from the through hole of the movable bar, because the through hole is relatively small in area relative to the entire porous ceramic disk, it can better flush out the impurities in the channel corresponding to the through hole; the movable bar can be driven to move by the driving element, so that the through hole can move back and forth along the length direction of the strip notch, so that one cleaning can be completed radially, and then the rotating element is rotated to a set angle, so that the through hole can move at least once along the length direction of the strip notch, and the cleaning of another area can be completed. When the pressure plate rotates 360°, the entire cleaning can be completed. This cleaning method of the present application has a good cleaning effect, especially for clearing the channels of the porous ceramic disk that are seriously blocked. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 is a schematic diagram of a porous ceramic vacuum chuck;

[0037] Figure 2 It is a schematic diagram of the porous ceramic vacuum chuck from another angle;

[0038] Figure 3 is a schematic diagram of the flushing mechanism;

[0039] Figure 4 is a schematic diagram of a porous ceramic vacuum suction cup installed on a flushing mechanism;

[0040] Figure 5 yes Figure 4 The enlarged view of point A in the middle;

[0041] Figure 6 is a schematic diagram of the pressure plate assembly after it moves downward and contacts the porous ceramic plate;

[0042] Figure 7 This is a schematic diagram after the activity bar moves a certain distance;

[0043] Figure 8 It is a schematic diagram after the pressure plate is rotated to a certain angle;

[0044] Fig. 9 It is a partial schematic diagram of the pressure plate;

[0045] Fig.10 is a schematic diagram of the activity bar.

[0046] The reference numerals in the figures are:

[0047] 1. Porous ceramic vacuum suction cup; 11. Base; 111. Vent hole; 12. Porous ceramic disc; 121. First end face; 13. Circular step; 2. Support plate; 21. Mounting hole; 3. Flushing piece; 31. Docking chamber; 32. Pipeline; 33. High-pressure pump; 4. Clamping assembly; 41. Pressing plate; 411. Arc-shaped pressing part; 412. Countersunk hole; 42. Fastener; 5. Pressure plate assembly; 51. Pressure plate; 511. Strip notch; 5111. Connecting wall; 5112. Anti-slip groove; 512. Slide groove; 52. Movable strip; 521. Through hole; 522. Anti-slip slider; 523. Rack structure; 53. Driving element; 531. Driving motor; 532. Driving gear; 6. Rotating element; 7. Telescopic element. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0049] In the description of this application, it should be noted that the terms "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0050] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0051] The present invention is described in detail below in conjunction with the accompanying drawings.

[0052] like Figures 1 to 10 As shown, a flushing mechanism for a porous ceramic vacuum chuck, the porous ceramic vacuum chuck 1 comprises a substrate 11 and a porous ceramic disc 12 fixed on the substrate 11, the first end surface 121 of the porous ceramic disc 12 protrudes from the alumina ceramic substrate 11, and the flushing mechanism comprises:

[0053] A support plate 2 having a mounting hole 21;

[0054] The flushing member 3 comprises a docking cavity 31 located in the mounting hole 21, a pipe 32 communicating with the docking cavity 31, and a high-pressure pump 33 disposed on the pipe 32, wherein the opening of the docking cavity 31 is used for sealingly cooperating with an end of the base body 11 facing away from the first end surface 121;

[0055] The pressing assembly 4 is fixed to the support plate 2 and is used to press the substrate 11 so that the porous ceramic vacuum chuck 1 and the support plate 2 are relatively fixed;

[0056] The pressure plate assembly 5 is located directly above the flushing part 3. The pressure plate assembly 5 comprises a pressure plate 51, a movable bar 52 and a driving element 53. The pressure plate 51 has a radially arranged strip notch 511. The movable bar 52 is slidably arranged on the pressure plate 51. The lower end surface of the movable bar 52 is flush with the lower end surface of the pressure plate 51. The movable bar 52 has a through hole 521. The driving element 53 is used to drive the movable bar 52 to move so that the through hole 521 can reciprocate along the length direction of the strip notch 511.

[0057] The rotating element 6 is located above the pressure plate assembly 5 and is used to drive the pressure plate assembly 5 to rotate;

[0058] The telescopic element 7 is located above the rotating element 6 and is used to drive the rotating element 6 and the pressure plate assembly 5 to move up and down, so that the pressure plate 51 and the movable bar 52 are pressed against the first end surface 121 of the porous ceramic disk 12.

[0059] When the flushing mechanism of the present application is working, the base 11 is sealedly connected to the docking cavity 31 of the flushing member 3 through the clamping component 4, so that the flushing medium passing through the pipeline 32 can flush the porous ceramic disk 12 under the action of the high-pressure pump 33; the pressure plate 51 of the present application is used to press on the first end surface 121 (upper end surface) of the porous ceramic disk 12, so that when flushing, due to the obstruction of the pressure plate 51, the flushing medium can only be sprayed out from the through hole 521 of the movable bar 52. Because the through hole 521 is relatively small in area relative to the entire porous ceramic disk 12, it can better flush out impurities in the channel corresponding to the through hole 521; the driving element 53 can drive the movable bar 52 to move, so that the through hole 521 can reciprocate along the length direction of the strip notch 511 (see Figure 6 and 7 ), so that a cleaning can be completed in the radial direction, and then the rotating element 6 is rotated to a set angle (see Figure 7 and 8 ), and then the through hole 521 can move at least once along the length direction of the strip-shaped notch 511, so as to complete the cleaning of another area, and the entire cleaning can be completed after the pressure plate 51 rotates 360°. This cleaning method of the present application has a good cleaning effect, especially for clearing the passages of the porous ceramic disc 12 that are seriously blocked.

[0060] In actual use, a specific flushing method is:

[0061] Place the porous ceramic vacuum chuck 1 on the support plate 2, align the end of the substrate 11 facing away from the first end surface 121 with the docking cavity 31, and then fix the porous ceramic vacuum chuck 1 and the support plate 2 relatively by the clamping assembly 4;

[0062] Perform preliminary flushing, where the flushing medium (water, water vapor mixture or cleaning liquid, etc.) is input into the pipeline 32 and enters the docking cavity 31 after being pressurized by the high-pressure pump 33, passes through the substrate 11, enters the porous ceramic disk 12, and is discharged from the first end surface 121 of the porous ceramic disk 12;

[0063] The telescopic element 7 drives the rotating element 6 and the pressure plate assembly 5 to move downward, so that the pressure plate 51 and the movable bar 52 are pressed tightly against the first end surface 121 of the porous ceramic plate 12;

[0064] Clean point by point, the flushing medium input into the pipeline 32 enters the docking cavity 31 after being pressurized by the high-pressure pump 33, passes through the base 11 and enters the porous ceramic disk 12, and then is ejected from the through hole 521 of the movable bar 52. The driving element 53 drives the movable bar 52 to move, so that the through hole 521 can move along the length direction of the strip notch 511, completing at least one radial cleaning, and then rotates the set angle by the rotating element 6, and then the through hole 521 moves along the length direction of the strip notch 511 at least once, and after completion, repeat the above operation until the disk rotates 360°.

[0065] like Figure 3 As shown, in this embodiment, the pressing assembly 4 includes:

[0066] A pressing plate 41, wherein the pressing plate 41 has an arc-shaped pressing portion 411, and the arc-shaped pressing portion 411 is used to press the upper end surface of the substrate 11. When the pressing plate 41 cooperates with the porous ceramic vacuum chuck 1, the upper end surface of the arc-shaped pressing portion 411 is lower than the first end surface 121 of the porous ceramic disc 12, or the upper end surface of the arc-shaped pressing portion 411 is flush with the first end surface 121 of the porous ceramic disc 12;

[0067] The fastener 42 is used to fix the pressing plate 41 and the supporting plate 2 .

[0068] The design of the arc-shaped pressing portion 411 can increase the contact area with the substrate 11, and can better fix the substrate 11. The upper end surface of the arc-shaped pressing portion 411 is lower than the first end surface 121 of the porous ceramic disk 12, or the upper end surface of the arc-shaped pressing portion 411 is flush with the first end surface 121 of the porous ceramic disk 12, so that the movable bar 52 can be prevented from interfering with the arc-shaped pressing portion 411 during cleaning.

[0069] like Figure 3 As shown, in this embodiment, the pressing plate 41 has a countersunk hole 412, and the fastener 42 is a hexagon socket screw. The pressing plate 41 is fixed to the support plate 2 by the hexagon socket screw passing through the countersunk hole 412. This arrangement can prevent the movable bar 52 from interfering with the fastener 42 during cleaning.

[0070] like Figure 3 As shown, in this embodiment, the porous ceramic disc 12 and the base 11 form a circular step 13, and the arc-shaped pressing portion 411 is adapted to the circular step 13. The matching form of the arc-shaped pressing portion 411 and the circular step 13 is convenient for quick positioning and faster installation.

[0071] In this embodiment, the strip-shaped notch 511 passes through the center of the pressing plate 51 .

[0072] like Figure 4 , 5As shown in Figures 9 and 10 , in this embodiment, the strip-shaped notch 511 includes two oppositely arranged side walls and a connecting wall 5111 connecting the two side walls. The pressure plate 51 also has a radially arranged strip-shaped slide groove 512. One end of the slide groove 512 extends to the edge of the pressure plate 51, and the other end extends to the connecting wall 5111 of the strip-shaped notch 511. The direction of the slide groove 512 is the same as the length direction of the strip-shaped notch 511. The first end of the movable bar 52 is located at the strip-shaped notch 511, and the through hole 521 is located at the strip-shaped notch 511. The second end of the movable bar 52 passes through the slide groove 512 and is located on the outside of the pressure plate 51.

[0073] like Figure 5 and 10 As shown, the portion of the movable bar 52 away from the slide slot 512 has a rack structure 523;

[0074] like Figure 5 As shown, the driving element 53 includes a driving motor 531 fixed relative to the pressure plate 51 and a driving gear 532 driven by the driving motor 531. The driving gear 532 is meshed with the rack structure 523. When the driving motor 531 rotates, it can drive the movable bar 52 to move back and forth.

[0075] like Figure 5 and 9 As shown, in this embodiment, the side wall of the strip-shaped notch 511 has an anti-slip groove 5112 , and the side wall of the movable bar 52 has an anti-slip slider 522 that cooperates with the anti-slip groove 5112 .

[0076] In this embodiment, the rotating element 6 is a motor component.

[0077] In this embodiment, the telescopic element 7 is an electric push rod or a cylinder.

[0078] In actual use, the flushing mechanism of this embodiment can also perform forward and reverse flushing.

[0079] At this time, the pressure pump is used as a vacuum pump, and a liquid outlet head is installed on the movable bar 52. The liquid outlet head is aligned with the through hole 521 and can spray the cleaning medium into the through hole 521), that is, reverse flushing can be performed at this time.

[0080] The above description is only a preferred embodiment of the present invention, and does not limit the patent protection scope of the present invention. Any equivalent structural transformation made by using the contents of the present invention and the drawings, directly or indirectly used in other related technical fields, is also included in the protection scope of the present invention.

Claims

1. A flushing mechanism for a porous ceramic vacuum chuck, characterized in that: The porous ceramic vacuum chuck comprises a substrate and a porous ceramic disc fixed on the substrate, wherein a first end surface of the porous ceramic disc protrudes from the alumina ceramic substrate, and the flushing mechanism comprises: A support plate having a mounting hole; A flushing member, comprising a docking cavity located in the mounting hole, a pipeline communicating with the docking cavity, and a high-pressure pump arranged on the pipeline, wherein the opening of the docking cavity is used for sealingly cooperating with an end of the base body facing away from the first end surface; A pressing assembly, fixed to the support plate, for pressing the substrate so that the porous ceramic vacuum chuck and the support plate are relatively fixed; A pressure plate assembly is located directly above the flushing part, and the pressure plate assembly comprises a pressure plate, a movable bar and a driving element. The pressure plate has a radially arranged strip notch, and the movable bar is slidably arranged on the pressure plate. The lower end surface of the movable bar is flush with the lower end surface of the pressure plate, and the movable bar has a through hole. The driving element is used to drive the movable bar to move so that the through hole can reciprocate along the length direction of the strip notch; A rotating element, located above the pressure plate assembly, and used to drive the pressure plate assembly to rotate; The telescopic element is located above the rotating element and is used to drive the rotating element and the pressure plate assembly to move up and down so that the pressure plate and the movable strip are pressed tightly against the first end surface of the porous ceramic disk.

2. The flushing mechanism for a porous ceramic vacuum chuck according to claim 1, characterized in that: The clamping assembly comprises: A pressing plate, the pressing plate having an arc-shaped pressing portion, the arc-shaped pressing portion is used to press the upper end surface of the substrate, when the pressing plate cooperates with the porous ceramic vacuum suction cup, the upper end surface of the arc-shaped pressing portion is lower than the first end surface of the porous ceramic disk, or the upper end surface of the arc-shaped pressing portion is flush with the first end surface of the porous ceramic disk; The fastener is used to fix the pressing plate and the supporting plate.

3. The flushing mechanism for a porous ceramic vacuum chuck according to claim 2, characterized in that: The pressing plate has a countersunk hole, the fastener is a hexagon socket screw, and the pressing plate is fixed to the supporting plate by the hexagon socket screw passing through the countersunk hole.

4. The flushing mechanism for a porous ceramic vacuum chuck according to claim 2, characterized in that: The porous ceramic disc and the base form a circular step, and the arc-shaped pressing portion is adapted to the circular step.

5. The flushing mechanism for a porous ceramic vacuum chuck according to claim 1, characterized in that: The strip-shaped notch passes through the center of the pressure plate.

6. The flushing mechanism for a porous ceramic vacuum chuck according to claim 5, characterized in that: The strip-shaped notch includes two oppositely arranged side walls and a connecting wall connecting the two side walls, the pressure plate also has a radially arranged strip-shaped slide groove, one end of the slide groove extends to the edge of the pressure plate, and the other end extends to the connecting wall of the strip-shaped notch, and the direction of the slide groove is the same as the length direction of the strip-shaped notch; the first end of the movable strip is located in the strip-shaped notch, the through hole is located at the strip-shaped notch, and the second end of the movable strip passes through the slide groove and is located on the outside of the pressure plate; The part of the movable bar away from the slide slot has a rack structure; The driving element includes a driving motor fixed relatively to the pressure plate and a driving gear driven by the driving motor. The driving gear is meshed with the rack structure. When the driving motor rotates, it can drive the movable bar to move back and forth.

7. The flushing mechanism for a porous ceramic vacuum chuck according to claim 6, characterized in that: The side wall of the strip-shaped notch is provided with an anti-slip groove, and the side wall of the movable strip is provided with an anti-slip sliding block matched with the anti-slip groove.

8. The flushing mechanism for a porous ceramic vacuum chuck according to claim 1, characterized in that: The rotating element is a motor assembly.

9. The flushing mechanism for a porous ceramic vacuum chuck according to claim 1, characterized in that: The telescopic element is an electric push rod or a cylinder.

10. A flushing device, characterized in that: The invention comprises a flushing mechanism for a porous ceramic vacuum chuck as described in any one of claims 1 to 9.

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