Surface gas film groove of high-temperature alloy material sealing element and preparation method of surface gas film groove

Abstract

The invention discloses a preparation method of a gas film groove of a high-temperature alloy material sealing element. The preparation method is specifically implemented according to the following steps that 1, the high-temperature alloy sealing element is placed in a laser processing system; 2, the designed appearance size of the gas film groove is guided into a laser machining system, parameters are set, the surface of the high-temperature alloy sealing element is scanned through nanosecond pulse laser, the high-temperature alloy sealing element is preprocessed, and the microstructure of the gas film groove is obtained; and 3, according to the machining requirement of the high-temperature alloy sealing gas film groove, the technological parameters obtained after pre-machining testing are optimized and corrected again, and the evenly-distributed fish scale-shaped microtexture is obtained. The invention discloses a high-temperature alloy material sealing element gas film groove. According to the method, the influence of thermally induced defects generated in laser processing is greatly reduced, the yield is high, and the problems that in the prior art, the processing technology is complex, the micron-order precision is difficult to control, and the rejection rate is high when the sealing element gas film groove is prepared are solved.

Description

Technical Field

[0001] The invention belongs to the technical field of laser micromachining, and in particular relates to an air film groove of a high-temperature alloy sealing member, and also relates to a method for preparing an air film groove of a high-temperature alloy sealing member. Background Art

[0002] Among many sealing methods, air film sealing technology has become one of the primary sealing forms for high-temperature, high-speed rotating equipment such as aircraft engines due to its non-contact characteristics. Air film sealing technology uses the special flow characteristics of gas in a tiny gap to form a balanced air pressure support between the upper and lower surfaces. By adjusting the air pressure, the pressure on the upper and lower surfaces is balanced to maintain a stable air film gap. Compared with traditional mechanical contact seals, the non-contact design of air film seals avoids mechanical wear and greatly improves the service life and reliability of the system. Due to the rapid change of gas pressure, air film seals can achieve rapid sealing and isolation, which is suitable for occasions that require frequent switching.

[0003] The current air film seal adopts the traditional laser processing method, which is easy to produce heat-induced defects such as recast layer and micro cracks during laser processing. It is difficult to control the precision and it is difficult to meet the requirements of micron-level precision. The air film seal is prone to aging and performance degradation, and the scrap rate is high. The focus of air film sealing technology is still on the system design optimization of air film sealing. There is no standardization and specification system for air film groove process technology. Due to the complexity of its manufacturing process and high precision requirements, the widespread application of this technology is limited. Therefore, high-quality preparation and process system of air film grooves are crucial. Summary of the invention

[0004] The first objective of the present invention is to provide a method for preparing an air film groove of a high-temperature alloy seal, which solves the problems of complex processing technology, difficult control of micron-level precision, and high scrap rate in the prior art of preparing an air film groove of a seal.

[0005] A second object of the present invention is to provide an air film groove of a sealing member made of a high temperature alloy material.

[0006] The first technical solution adopted by the present invention is a method for preparing an air film groove of a high-temperature alloy sealing member, which is specifically implemented according to the following steps:

[0007] Step 1, placing a high temperature alloy seal in a laser processing system;

[0008] Step 2, importing the designed air film groove dimensions into the laser processing system, setting parameters, scanning the surface of the high-temperature alloy seal by nanosecond pulse laser, performing pre-processing of the high-temperature alloy seal, and obtaining the microscopic morphology of the air film groove;

[0009] Step 3: According to the processing requirements of the high-temperature alloy sealing air film groove, the process parameters after the pre-processing test are optimized and corrected again to obtain a uniformly distributed fish-scale micro-texture.

[0010] In step 1, the laser processing system includes a cabinet, a workbench is arranged in the cabinet, an X-axis motion platform, a Y-axis motion platform, and a Z-axis optical path lifting axis are arranged on the workbench, a three-jaw chuck is arranged on the X-axis motion platform, and the high-temperature alloy seal dried after mechanical processing is placed on the three-jaw chuck for fixing, and the three-jaw chuck is used to clamp and fix the high-temperature alloy seal; a laser is arranged on the Z-axis optical path lifting axis, and the Z-axis optical path lifting axis is used to drive the laser to rise and fall; a controller is arranged on the cabinet, and electrical devices and an operation panel are installed, and the operation panel includes an emergency stop button, a power switch, a laser control button, and a drive button. The emergency stop button, the power switch, the laser control button, and the drive button are electrically connected to the controller respectively, and the controller is electrically connected to the laser, the electrical devices, and the power supply respectively, so as to realize the movement control of the high-temperature alloy seal along the X-axis and the Y-axis and the laser control.

[0011] The electrical devices include servo motors electrically connected to the X-axis motion platform, Y-axis motion platform, three-jaw chuck, and Z-axis optical path lifting axis respectively. The processing position is determined by moving the X-axis motion platform and the Y-axis motion platform, the focal length is determined and positioned by moving the Z-axis optical path lifting axis, and a level ruler is used to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

[0012] Step 2: Start the laser, import the designed air film groove pattern into the controller, set the laser processing parameters, and equip the laser with a rotating shaft. Move the X-axis motion platform and Y-axis motion platform through the controller, and adjust the Z-axis optical path lifting axis to align the high-temperature alloy seal with the axis of the laser's light outlet to achieve the corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform and the Y-axis motion platform, the end face and cylindrical air film groove processing of the high-temperature alloy seal can be achieved.

[0013] The processing parameters of the laser in step 2 are: processing power 4W-8W, scanning speed 700mm / s-900mm / s, pulse width 14ns-30ns, repetition frequency 28kHz-33kHz, processing times 13 times-18 times, and six-way filling processing method with a filling spacing of 8μm-12μm;

[0014] In step 2, a laser confocal microscope is used to measure the roughness, contour size and depth of the air film groove; an electron microscope is used to obtain the microscopic morphology of the air film groove.

[0015] The method of determining the focal length and processing position by moving the processing plane in step 2 is respectively for the end face and cylindrical air film groove processing:

[0016] When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis is adjusted to automatically focus, the optical path is calibrated through red light preview, and the X-axis motion platform and Y-axis motion platform are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

[0017] When processing the cylindrical air film groove of the seal in step 2, rotate the laser scanning galvanometer 90°, move the X-axis motion platform and the Y-axis motion platform, use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and use the laser image measuring instrument to obtain the processing tolerance range and processing level; move the X-axis motion platform and the Y-axis motion platform, and then adjust the equipment graphic offset to obtain the precise processing position.

[0018] In the end face and cylindrical air film groove processing and positioning method in step 2, a defocus amount of -0.02 mm is used.

[0019] The second technical solution adopted by the present invention is that the air film groove of the high-temperature alloy seal has a fish-scale morphology and a uniform micro-texture to ensure the stable distribution and flow of the airflow in the groove. The average depth of the micro-texture is 20μm-25μm, and the roughness range is 3μm-4μm.

[0020] The beneficial effects of the present invention are as follows: the air film groove on the surface of the high-temperature alloy part prepared by the present invention improves the preparation accuracy of the air film groove, improves the durability and reliability of the air film seal in extreme environments, uses laser micromachining technology to achieve micron-level precision control, and reduces the impact of thermal defects caused by laser processing; the preparation process becomes more standardized and efficient, which promotes the continuous optimization of technology. With its excellent processing accuracy and stability, it can be applied to the harsh working environment of aircraft engines, improve the service life and reliability of high-temperature alloy seals of aircraft engines, and realize the innovation and breakthrough of nanosecond laser in the preparation experiment and process of air film groove on the surface of high-temperature alloy materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of the laser processing system used in the present invention;

[0022] Figure 2 It is the design diagram of the cylindrical air film groove in step 2 of embodiment 4 of the present invention;

[0023] Figure 3 It is a design diagram of the end face air film groove in step 2 of embodiment 4 of the present invention;

[0024] Figure 4 Schematic diagram of the high-temperature alloy air film sealing structure prepared in Example 4 of the present invention;

[0025] Figure 5 is an optical microscope image of a high-temperature alloy gas film groove obtained by using different filling methods in Example 4 of the present invention;

[0026] Figure 6 is a confocal scanning microscope image of a high-temperature alloy gas film groove at different repetition frequencies in Example 4 of the present invention;

[0027] Figure 7 is an electron microscope image of a high-temperature alloy gas film sealing groove prepared with increasing repetition frequency in Example 4 of the present invention;

[0028] Figure 8 This is a diagram showing the effect of high-temperature alloy air film sealing processing in Example 4 of the present invention.

[0029] In the figure, 1. Laser, 2. Z-axis optical path lifting axis, 3. Emergency stop button, 4. Power switch, 5. Laser control button, 6. Drive button, 7. Controller, 8. Three-jaw chuck, 9. X-axis motion platform, 10. Y-axis motion platform. DETAILED DESCRIPTION

[0030] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] The method for preparing the air film groove of the high-temperature alloy seal of the present invention is specifically implemented according to the following steps:

[0032] Step 1, placing a high temperature alloy seal in a laser processing system;

[0033] The structure of the laser processing system, such as Figure 1 As shown, it includes a cabinet, a workbench is arranged in the cabinet, an X-axis motion platform 9, a Y-axis motion platform 10, and a Z-axis optical path lifting shaft 2 are arranged on the workbench, a three-jaw chuck 8 is arranged on the X-axis motion platform 9, and the high-temperature alloy seal that has been dried after machining is placed on the three-jaw chuck 8 for fixing, and the three-jaw chuck 8 is used to clamp and fix the high-temperature alloy seal; a laser 1 is arranged on the Z-axis optical path lifting shaft 2, and the Z-axis optical path lifting shaft 2 is used to drive the laser 1 to rise and fall; a controller 7 is arranged on the cabinet, and electrical devices and an operation panel are installed, and the operation panel includes an emergency stop button 3, a power switch 4, a laser control button 5, and a drive button 6. The emergency stop button 3, the power switch 4, the laser control button 5, and the drive button 6 are electrically connected to the controller 7, and the controller 7 is electrically connected to the laser 1, the electrical devices, and the power supply, so as to realize the movement control of the high-temperature alloy seal along the X-axis and the Y-axis and the control of the laser 1. The laser control button 5 is electrically connected to the laser 1, and the power switch 4 is connected to the power supply.

[0034] The electrical devices include servo motors electrically connected to the X-axis motion platform 9, the Y-axis motion platform 10, the three-jaw chuck 8, and the Z-axis optical path lifting axis 2 respectively. Each servo motor is electrically connected to the corresponding drive button 6 and the emergency stop button 3. The processing position is determined by moving the X-axis motion platform 9 and the Y-axis motion platform 10, the focal length is determined and positioned by moving the Z-axis optical path lifting axis 2, and a level ruler is used to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

[0035] Step 2, importing the designed air film groove dimensions into the laser processing system, setting parameters, scanning the surface of the high-temperature alloy seal by nanosecond pulse laser, performing pre-processing of the high-temperature alloy seal, and obtaining the microscopic morphology of the air film groove;

[0036] Start the laser 1, import the designed air film groove pattern into the controller 7, set the processing parameters of the laser 1, and equip the laser 1 with a rotating shaft. Move the X-axis motion platform 9 and the Y-axis motion platform 10 through the controller 7, and adjust the Z-axis optical path lifting axis 2, so that the high-temperature alloy seal is aligned with the axis of the light outlet of the laser 1 to achieve the corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform 9 and the Y-axis motion platform 10, the end face and cylindrical air film groove processing of the high-temperature alloy seal can be realized.

[0037] The processing parameters of laser 1 are: processing power 4W-8W, scanning speed 700mm / s-900mm / s, pulse width 14ns-30ns, repetition frequency 28kHz-33kHz, processing times 13-18 times, six-way filling processing method with a filling spacing of 8μm-12μm; laser confocal microscope was used to measure the roughness, contour size and depth of the air film groove; electron microscope was used to obtain the microscopic morphology of the air film groove. Among them, excessive processing power will cause the heat affected zone around the micro texture to diffuse, and the high fluctuation of the micro texture pit wall structure will affect the quality of high temperature alloy air film sealing; while reducing the processing power will greatly reduce the processing efficiency; the change of pulse width is similar to the processing power, and the change of repetition frequency will significantly change the distribution law of micro texture.

[0038] The method of determining the focal length and processing position by moving the processing plane is respectively for end face and cylindrical air film groove processing:

[0039] When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis 2 is adjusted for automatic focusing, the optical path is calibrated through red light preview, and the X-axis motion platform 9 and the Y-axis motion platform 10 are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

[0040] When processing the cylindrical air film groove of the seal, rotate the laser scanning galvanometer 90°, move the X-axis motion platform 9 and the Y-axis motion platform 10, use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and use a laser image measuring instrument to obtain the processing tolerance range and processing level; move the X-axis motion platform 9 and the Y-axis motion platform 10, and then adjust the equipment graphic offset to obtain the precise processing position.

[0041] In the end face and cylindrical air film groove processing positioning method, in order to improve the processing efficiency while ensuring the processing accuracy, the defocus amount is -0.02mm.

[0042] Step 3: According to the processing requirements of the high-temperature alloy sealing air film groove, the process parameters after the pre-processing test are optimized and corrected again to obtain a uniformly distributed fish-scale micro-texture.

[0043] The air film groove of the high-temperature alloy seal of the present invention has a fish-scale morphology and a uniform micro-texture, thereby ensuring the stable distribution and flow of the airflow in the groove. The average depth of the micro-texture is 20 μm-25 μm, and the roughness range is 3 μm-4 μm.

[0044] Example 1

[0045] The method for preparing the air film groove of the high-temperature alloy seal of the present invention is specifically implemented according to the following steps:

[0046] Step 1, place the dried high-temperature alloy seal after machining on the three-jaw chuck 8 and fix it, determine the processing position by moving the X-axis motion platform 9 and the Y-axis motion platform 10, move the Z-axis optical path lifting axis 2 to determine the focal length and position, and use a level ruler to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

[0047] Step 2, start the laser 1, import the designed air film groove dimension drawing into the controller 7, set the processing parameters of the laser 1, and the laser 1 is equipped with a rotating shaft. Move the X-axis motion platform 9 and the Y-axis motion platform 10 through the controller 7, and adjust the Z-axis optical path lifting axis 2 so that the high-temperature alloy seal is aligned with the axis of the light outlet of the laser 1 to achieve the corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform 9 and the Y-axis motion platform 10, the end face and cylindrical air film groove of the high-temperature alloy seal can be processed.

[0048] The processing parameters of laser 1 are: processing power 4W, scanning speed 700mm / s, pulse width 14ns, repetition frequency 28kHz, processing times 13 times, and six-way filling processing method with a filling spacing of 8μm; a laser confocal microscope is used to measure the roughness, contour size and depth of the air film groove; an electron microscope is used to obtain the microscopic morphology of the air film groove.

[0049] The method of determining the focal length and processing position by moving the processing plane is respectively for end face and cylindrical air film groove processing:

[0050] When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis 2 is adjusted for automatic focusing, the optical path is calibrated through red light preview, and the X-axis motion platform 9 and the Y-axis motion platform 10 are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

[0051] When processing the cylindrical air film groove of the seal, rotate the laser scanning galvanometer 90°, move the X-axis motion platform 9 and the Y-axis motion platform 10, use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and use a laser image measuring instrument to obtain the processing tolerance range and processing level; move the X-axis motion platform 9 and the Y-axis motion platform 10, and then adjust the equipment graphic offset to obtain the precise processing position.

[0052] In the end face and cylindrical air film groove processing positioning method, in order to improve the processing efficiency while ensuring the processing accuracy, the defocus amount is -0.02mm.

[0053] Step 3: According to the processing requirements of the high-temperature alloy sealing air film groove, the process parameters after the pre-processing test are optimized and corrected again to obtain a uniformly distributed fish-scale micro-texture.

[0054] The air film groove of the high-temperature alloy sealing member of the present invention has a fish-scale morphology and a uniform micro-texture, thereby ensuring the stable distribution and flow of the airflow in the groove. The average depth of the micro-texture is 20 μm and the roughness is 3 μm.

[0055] Example 2

[0056] The method for preparing the air film groove of the high-temperature alloy seal of the present invention is specifically implemented according to the following steps:

[0057] Step 1, place the dried high-temperature alloy seal after machining on the three-jaw chuck 8 and fix it, determine the processing position by moving the X-axis motion platform 9 and the Y-axis motion platform 10, move the Z-axis optical path lifting axis 2 to determine the focal length and position, and use a level ruler to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

[0058] Step 2, importing the designed air film groove dimensions into the laser processing system, setting parameters, scanning the surface of the high-temperature alloy seal by nanosecond pulse laser, performing pre-processing of the high-temperature alloy seal, and obtaining the microscopic morphology of the air film groove;

[0059] Start the laser 1, import the designed air film groove pattern into the controller 7, set the processing parameters of the laser 1, and equip the laser 1 with a rotating shaft. Move the X-axis motion platform 9 and the Y-axis motion platform 10 through the controller 7, and adjust the Z-axis optical path lifting axis 2, so that the high-temperature alloy seal is aligned with the axis of the light outlet of the laser 1 to achieve the corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform 9 and the Y-axis motion platform 10, the end face and cylindrical air film groove processing of the high-temperature alloy seal can be realized.

[0060] The processing parameters of laser 1 are: processing power 8W, scanning speed 900mm / s, pulse width 30ns, repetition frequency 33kHz, processing times 18 times, and six-way filling processing method with a filling spacing of 12μm; a laser confocal microscope is used to measure the roughness, contour size and depth of the air film groove; an electron microscope is used to obtain the microscopic morphology of the air film groove.

[0061] The method of determining the focal length and processing position by moving the processing plane is respectively for end face and cylindrical air film groove processing:

[0062] When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis 2 is adjusted for automatic focusing, the optical path is calibrated through red light preview, and the X-axis motion platform 9 and the Y-axis motion platform 10 are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

[0063] When processing the cylindrical air film groove of the seal, rotate the laser scanning galvanometer 90°, move the X-axis motion platform 9 and the Y-axis motion platform 10, use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and use a laser image measuring instrument to obtain the processing tolerance range and processing level; move the X-axis motion platform 9 and the Y-axis motion platform 10, and then adjust the equipment graphic offset to obtain the precise processing position.

[0064] In the end face and cylindrical air film groove processing positioning method, in order to improve the processing efficiency while ensuring the processing accuracy, the defocus amount is -0.02mm.

[0065] Step 3: According to the processing requirements of the high-temperature alloy sealing air film groove, the process parameters after the pre-processing test are optimized and corrected again to obtain a uniformly distributed fish-scale micro-texture.

[0066] The air film groove of the high-temperature alloy sealing member of the present invention has a fish-scale morphology and a uniform micro-texture, thereby ensuring the stable distribution and flow of the airflow in the groove. The average depth of the micro-texture is 25 μm and the roughness is 4 μm.

[0067] Example 3

[0068] The method for preparing the air film groove of the high-temperature alloy seal of the present invention is specifically implemented according to the following steps:

[0069] Step 1, place the dried high-temperature alloy seal after machining on the three-jaw chuck 8 and fix it, determine the processing position by moving the X-axis motion platform 9 and the Y-axis motion platform 10, move the Z-axis optical path lifting axis 2 to determine the focal length and position, and use a level ruler to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

[0070] Step 2, importing the designed air film groove dimensions into the laser processing system, setting parameters, scanning the surface of the high-temperature alloy seal by nanosecond pulse laser, performing pre-processing of the high-temperature alloy seal, and obtaining the microscopic morphology of the air film groove;

[0071] Start the laser 1, import the designed air film groove pattern into the controller 7, set the processing parameters of the laser 1, and equip the laser 1 with a rotating shaft. Move the X-axis motion platform 9 and the Y-axis motion platform 10 through the controller 7, and adjust the Z-axis optical path lifting axis 2, so that the high-temperature alloy seal is aligned with the axis of the light outlet of the laser 1 to achieve the corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform 9 and the Y-axis motion platform 10, the end face and cylindrical air film groove processing of the high-temperature alloy seal can be realized.

[0072] The processing parameters of laser 1 are: processing power 5W, scanning speed 750mm / s, pulse width 20ns, repetition frequency 29kHz, processing times 17 times, and a six-way filling processing method with a filling spacing of 9μm; a laser confocal microscope is used to measure the roughness, contour size and depth of the air film groove; an electron microscope is used to obtain the microscopic morphology of the air film groove.

[0073] The method of determining the focal length and processing position by moving the processing plane is respectively for end face and cylindrical air film groove processing:

[0074] When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis 2 is adjusted for automatic focusing, the optical path is calibrated through red light preview, and the X-axis motion platform 9 and the Y-axis motion platform 10 are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

[0075] When processing the cylindrical air film groove of the seal, rotate the laser scanning galvanometer 90°, move the X-axis motion platform 9 and the Y-axis motion platform 10, use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and use a laser image measuring instrument to obtain the processing tolerance range and processing level; move the X-axis motion platform 9 and the Y-axis motion platform 10, and then adjust the equipment graphic offset to obtain the precise processing position.

[0076] In the end face and cylindrical air film groove processing positioning method, in order to improve the processing efficiency while ensuring the processing accuracy, the defocus amount is -0.02mm.

[0077] Step 3: According to the processing requirements of the high-temperature alloy sealing air film groove, the process parameters after the pre-processing test are optimized and corrected again to obtain a uniformly distributed fish-scale micro-texture.

[0078] The air film groove of the high-temperature alloy sealing member of the present invention has a fish-scale morphology and a uniform micro-texture, thereby ensuring the stable distribution and flow of the airflow in the groove. The average depth of the micro-texture is 22 μm and the roughness is 3 μm.

[0079] Example 4

[0080] The method for preparing the air film groove of the high-temperature alloy seal of the present invention is specifically implemented according to the following steps:

[0081] Step 1, place the dried high-temperature alloy seal after machining on the three-jaw chuck 8 and fix it, determine the processing position by moving the X-axis motion platform 9 and the Y-axis motion platform 10, move the Z-axis optical path lifting axis 2 to determine the focal length and position, and use a level ruler to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

[0082] Step 2: Import the designed air film groove dimensions into the laser processing system, set the parameters, scan the surface of the high-temperature alloy seal with a nanosecond pulse laser, perform pre-processing of the high-temperature alloy seal, and obtain the microscopic morphology of the air film groove, such as Figure 4 As shown, the air film grooves are evenly distributed along the circumference of the ring. The air film grooves are connected to the inner ring, which can effectively guide the airflow to flow in the sealing groove. When the airflow flows along the arc groove, it will generate inner pressure to form a stable air film, which greatly reduces the friction force on the sealing surface and improves the sealing performance and service life of the high-temperature alloy air film seal.

[0083] Start the laser 1, and import the designed end face and cylindrical air film groove graphics into the controller 7, such as Figure 2 and Figure 3 As shown, the processing parameters of the laser 1 are set. The laser 1 is equipped with a rotating shaft. The X-axis motion platform 9 and the Y-axis motion platform 10 are moved by the controller 7, and the Z-axis optical path lifting axis 2 is adjusted, so that the high-temperature alloy seal is aligned with the axis of the light outlet of the laser 1 to achieve the corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform 9 and the Y-axis motion platform 10, the end face of the high-temperature alloy seal and the cylindrical air film groove processing are realized.

[0084] The processing parameters of laser 1 are: processing power 5.6W, scanning speed 800mm / s, pulse width 20ns, repetition frequency 30kHz, and processing times 14 times. The optical microscope pictures of the high-temperature alloy gas film grooves obtained by different filling methods in this embodiment are as follows: Figure 5 As shown, Figure 5 (a) Through one-way filling, Figure 5 (b) Through cross filling, Figure 5 (c) Through four-way filling, Figure 5 (d) The six-way filling process is used to fill the gap of 10μm; the surface roughness measured by the contact roughness meter is: 0.380μm for one-way filling, 1.151μm for cross filling, 0.601μm for four-way filling, and 0.301μm for six-way filling. The multi-directional filling method effectively increases the number of internal micro-textures, and forms some micro-guide grooves inside the air film groove, which effectively guides the airflow and reduces the pressure. In addition, the micro-texture leads to the formation of vortices, which resists external interference and protects the air film.

[0085] This embodiment is based on high repetition rate nanosecond pulse laser scanning, and compares the micro-texture changes of the high-temperature alloy gas film groove by different repetition frequencies, such as Figure 6 The following is a confocal scanning microscope image of a high-temperature alloy gas film groove. Figure 6 The repetition frequency of (a) is 10kHz, Figure 6 (b) has a repetition frequency of 20kHz, Figure 6 (c) has a repetition frequency of 30kHz, Figure 6 (d) has a repetition frequency of 40kHz, Figure 6 (e) has a repetition frequency of 50kHz, Figure 6 The repetition frequency of (f) is 60kHz. Adjusting the parameters of the repetition frequency has a significant effect on the micro-texture changes of the high-temperature alloy air film groove, thereby achieving efficient, precise and flexible micro-nano processing and controlling the performance of high-temperature air film sealing.

[0086] The method of determining the focal length and processing position by moving the processing plane is respectively for end face and cylindrical air film groove processing:

[0087] When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis 2 is adjusted for automatic focusing, the optical path is calibrated through red light preview, and the X-axis motion platform 9 and the Y-axis motion platform 10 are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

[0088] When processing the cylindrical air film groove of the seal, rotate the laser scanning galvanometer 90°, move the X-axis motion platform 9 and the Y-axis motion platform 10, use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and use a laser image measuring instrument to obtain the processing tolerance range and processing level; move the X-axis motion platform 9 and the Y-axis motion platform 10, and then adjust the equipment graphic offset to obtain the precise processing position.

[0089] In the end face and cylindrical air film groove processing positioning method, in order to improve the processing efficiency while ensuring the processing accuracy, the defocus amount is -0.02mm.

[0090] Step 3, according to the processing requirements of the high-temperature alloy sealing gas film groove, the process parameters after pre-processing test are optimized and corrected again to obtain a uniformly distributed fish scale micro texture. The electron microscope image of the high-temperature alloy gas film sealing groove is as follows: Figure 7 As shown in the figure, the microstructure of the air film groove is further characterized by a microscope. The surface after laser processing shows a fish scale morphology. With the increase of repetition frequency, the surface pulse ablation pit wall structure becomes more distinct. The average depth of the micro texture is 20-25μm, and the roughness range is 3-4μm, which meets the design accuracy.

[0091] The high temperature alloy gas film sealing processing effect of the present invention is shown in the figure, Figure 8 As shown, Figure 8 (a) is a diagram showing the processing effect of the end face air film groove. Figure 8 (b) is a display of the processing effect of the cylindrical air film groove. The surface of the high-temperature alloy air film seal is scanned by nanosecond laser, and it is observed that the contour of the processed area is clear, and there are no heat-induced defects such as heat-affected zone and recast layer, thus achieving controllable preparation of the high-temperature alloy air film sealing groove.

Claims

1. A method for preparing an air film groove of a high-temperature alloy seal, characterized in that: Follow the steps below to implement it: Step 1, placing a high temperature alloy seal in a laser processing system; Step 2, importing the designed air film groove dimensions into the laser processing system, setting parameters, scanning the surface of the high-temperature alloy seal by nanosecond pulse laser, performing pre-processing of the high-temperature alloy seal, and obtaining the microscopic morphology of the air film groove; Step 3: According to the processing requirements of the high-temperature alloy sealing air film groove, the process parameters after the pre-processing test are optimized and corrected again to obtain a uniformly distributed fish-scale micro-texture.

2. The method for preparing an air film groove of a high temperature alloy seal according to claim 1, characterized in that: In step 1, the laser processing system comprises a cabinet, a workbench is arranged in the cabinet, an X-axis motion platform (9), a Y-axis motion platform (10), and a Z-axis optical path lifting shaft (2) are arranged on the workbench, a three-jaw chuck (8) is arranged on the X-axis motion platform (9), a high-temperature alloy seal that has been dried after mechanical processing is placed on the three-jaw chuck (8) and fixed, and the three-jaw chuck (8) is used to clamp and fix the high-temperature alloy seal; a laser (1) is arranged on the Z-axis optical path lifting shaft (2), and the Z-axis optical path lifting shaft (2) is used to drive the laser (1) Lifting; a controller (7) is arranged on the cabinet, and electrical components and an operation panel are installed; the operation panel comprises an emergency stop button (3), a power switch (4), a laser control button (5), and a drive button (6); the emergency stop button (3), the power switch (4), the laser control button (5), and the drive button (6) are respectively electrically connected to the controller (7); the controller (7) is respectively electrically connected to the laser (1), the electrical components, and the power supply, so as to realize the movement control of the high-temperature alloy seal along the X-axis and the Y-axis and the control of the laser (1).

3. The method for preparing an air film groove of a high temperature alloy seal according to claim 2, characterized in that: The electrical device comprises a servo motor which is electrically connected to the X-axis motion platform (9), the Y-axis motion platform (10), the three-jaw chuck 8, and the Z-axis optical path lifting shaft (2) respectively. The processing position is determined by moving the X-axis motion platform (9) and the Y-axis motion platform (10), the focal length is determined and positioned by moving the Z-axis optical path lifting shaft (2), and a level ruler is used to adjust the laser scanning galvanometer to keep it parallel to the processing plane.

4. The method for preparing an air film groove of a high temperature alloy seal according to claim 3, characterized in that: Step 2 starts the laser (1), imports the designed air film groove pattern into the controller (7), sets the processing parameters of the laser (1), and is equipped with a rotating shaft on the laser (1). The controller (7) moves the X-axis motion platform (9) and the Y-axis motion platform (10), and adjusts the Z-axis optical path lifting shaft (2) so that the high-temperature alloy seal is aligned with the axis of the light outlet of the laser (1) to achieve a corresponding focal length. By adjusting the rotating shaft and the X-axis motion platform (9) and the Y-axis motion platform (10), the end face and cylindrical air film groove processing of the high-temperature alloy seal is achieved.

5. The method for preparing an air film groove of a high temperature alloy seal according to claim 4, characterized in that: The processing parameters of the laser (1) in step 2 are: processing power 4W-8W, scanning speed 700mm / s-900mm / s, pulse width 14ns-30ns, repetition frequency 28kHz-33kHz, processing times 13 times-18 times, and a six-way filling processing method with a filling spacing of 8μm-12μm.

6. The method for preparing an air film groove of a high temperature alloy seal according to claim 5, characterized in that: In step 2, a laser confocal microscope is used to measure the roughness, contour size and depth of the air film groove; an electron microscope is used to obtain the microscopic morphology of the air film groove.

7. The method for preparing an air film groove of a high temperature alloy seal according to claim 6, characterized in that: The method of determining the focal length and processing position by moving the processing plane in step 2 is respectively for the end face and cylindrical air film groove processing: When processing the air film groove on the end face of the seal, the Z-axis optical path lifting axis 2 is adjusted for automatic focusing, the optical path is calibrated through red light preview, and the X-axis motion platform (9) and the Y-axis motion platform (10) are moved to ensure that the high-temperature alloy seal is aligned with the optical path.

8. The method for preparing an air film groove of a high temperature alloy seal according to claim 7, characterized in that: When processing the cylindrical air film groove of the seal in step 2, rotate the laser scanning galvanometer 90°, move the X-axis motion platform (9) and the Y-axis motion platform (10), use an infrared rangefinder to determine the focal length, and then etch along the cylindrical surface, and obtain the processing tolerance range and processing levelness through a laser image measuring instrument; move the X-axis motion platform (9) and the Y-axis motion platform (10), and then adjust the equipment graphic offset to obtain a precise processing position.

9. The method for preparing an air film groove of a high temperature alloy seal according to claim 8, characterized in that: In the end face and cylindrical air film groove processing and positioning method in step 2, a defocus amount of -0.02 mm is used.

10. A high-temperature alloy material seal air film groove, using the high-temperature alloy material seal air film groove preparation method according to claim 9, characterized in that: The air film groove of the high-temperature alloy seal has a fish-scale morphology and a uniform micro-texture, which ensures the stable distribution and flow of the airflow in the groove. The average depth of the micro-texture is 20μm-25μm, and the roughness range is 3μm-4μm.

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