Vacuum cavity bin door opening and closing device

Abstract

The invention relates to the field of opening and closing of vacuum cavity bin doors, in particular to a vacuum cavity bin door opening and closing device which comprises a rack and a cavity, the cavity is mounted on the rack, a mounting opening is formed in the top wall of the cavity, a sealing door is further rotationally mounted at the position, located at the mounting opening, of the cavity, and an opening and closing mechanism used for driving the sealing door to rotate is mounted on the rack. The opening and closing mechanism comprises a driving assembly, the driving assembly is installed on the rack, the sealing door is connected with the driving assembly, the sealing door is used for sealing the installation opening, the sealing door is used for installing a heater, a maintaining mechanism is installed on the cavity, the maintaining mechanism is connected with the sealing door, and the maintaining mechanism is used for maintaining tight connection of the sealing door and the cavity. The problem that the heater on the bin door is inconvenient to maintain in a traditional mode is solved, and the effect of conveniently maintaining the heater on the bin door can be achieved.

Description

Technical Field

[0001] The present application relates to the field of vacuum chamber door opening and closing, and in particular to a vacuum chamber door opening and closing device. Background Art

[0002] Magnetron sputtering coating equipment is a device that uses physical vapor deposition (PVD) technology to prepare thin films. The vacuum chamber provides a low-pressure environment for the coating of silicon wafers, and a rectangular material port is opened on the side wall in the length direction of each vacuum chamber. A conveying mechanism for conveying materials is installed on each vacuum chamber to facilitate the transfer of the carrier plate containing silicon wafers from one vacuum chamber to another.

[0003] Usually, an installation opening is opened on the top wall of the vacuum chamber, and a door is usually set on the installation opening to close the installation opening. A heater is installed on the side wall of the door close to the installation opening. The temperature inside the vacuum chamber is increased by the heater, so that the vacuum chamber reaches a suitable working temperature.

[0004] In the traditional way, the door is usually installed by hoisting it to the installation port on the vacuum chamber. However, after the door is installed in this way, when the heater needs to be repaired and maintained, the door needs to be moved away from the vacuum chamber by hoisting, which is usually troublesome. Summary of the invention

[0005] In order to facilitate maintenance of the heater on the door, the present application provides a vacuum chamber door opening and closing device.

[0006] The present application provides a vacuum chamber door opening and closing device, which adopts the following technical solution: A vacuum chamber door opening and closing device comprises a frame and a chamber, wherein the chamber is mounted on the frame, a mounting opening is provided on the top wall of the chamber, a closed door is rotatably mounted on the chamber at the mounting opening, an opening and closing mechanism for driving the closed door to rotate is mounted on the frame, the opening and closing mechanism comprises a driving assembly, the driving assembly is mounted on the frame, the closed door is connected to the driving assembly, the closed door is used to close the mounting opening, a heater is mounted on the closed door, a holding mechanism is mounted on the chamber, the holding mechanism is connected to the closed door, and the holding mechanism is used to keep the closed door tightly connected to the chamber.

[0007] By adopting the above technical solution, the cavity is set on the frame, and one end of the closed door is rotatably connected to the cavity, and the closed door is driven to rotate by the driving assembly, so that the closed door closes the installation opening on the cavity, so that the heater on the closed door can heat the vacuum cavity, so that the vacuum cavity reaches the working temperature, and the closed door is tightly connected to the cavity through the holding mechanism, so as to facilitate the maintenance of the vacuum degree in the vacuum cavity. When the heater needs to be maintained, the closed door is released through the holding mechanism, and the closed door is driven to rotate in a direction away from the cavity by the driving assembly, so as to open the installation opening, so as to facilitate the operator to maintain the heater on the closed door, thereby improving the convenience of maintaining the heater.

[0008] In a specific possible implementation scheme, the driving assembly includes an opening and closing cylinder and a support, the support is arranged on the frame at one side of the cavity, the opening and closing cylinder is installed on the closed door, and the output end of the opening and closing cylinder is connected to the support.

[0009] By adopting the above technical solution, the piston rod is driven to retract by the opening and closing cylinder, thereby pulling the closed door, so that the closed door can rotate upward, thereby opening the installation opening, and the piston rod is driven to extend by the opening and closing cylinder, thereby pushing the closed door, so that the closed door can rotate downward, thereby closing the installation opening. In addition, by installing the opening and closing cylinder on the closed door, the space occupied is reduced, and the opening and closing of the closed door is also more labor-saving.

[0010] In a specific feasible implementation scheme, the opening and closing mechanism also includes a buffer assembly, which includes a rotating sleeve, a push rod, a locking piece and an unlocking piece. The rotating sleeve is rotatably mounted on a support, and the push rod is mounted on the piston rod of the opening and closing cylinder along the axial direction of the piston rod of the opening and closing cylinder, and one end of the push rod passes through the rotating sleeve and extends in a direction away from the closing cylinder, and the end of the push rod away from the closing cylinder is used to be connected to a retaining mechanism, and a limiting plate for resisting the rotating sleeve is installed on the side wall of the end of the push rod away from the closing cylinder, and the limiting plate is located on the side of the rotating sleeve away from the closing cylinder, the locking piece is installed on the push rod, and the rotating sleeve is located between the limiting plate and the locking piece, and the locking piece is used to limit the end of the rotating sleeve away from the limiting plate, and the unlocking piece is installed on the frame, and the unlocking piece is connected to the locking piece.

[0011] By adopting the above technical solution, when the opening and closing cylinder drives the piston rod to extend, the locking member limits the rotating sleeve, thereby limiting the push rod in the axial direction, so that the opening and closing cylinder can drive the closed door to rotate downward, thereby facilitating the closing of the installation opening. When the closed door closes the installation opening, the unlocking member drives the locking member to release the limit on the rotating sleeve, so that the opening and closing cylinder can continue to drive the piston rod to extend outward, thereby driving the holding mechanism to operate, thereby pressing the closed door against the cavity, thereby facilitating the improvement of the airtightness of the cavity.

[0012] In a specific feasible implementation scheme, the locking member includes a locking block and a locking spring, a locking groove is provided on the side wall of the push rod, the axis of the locking groove is perpendicular to the axis of the push rod, the locking block is slidably installed in the locking groove, and one end of the locking block extends out of the locking groove, and the side wall of the locking block at the end outside the locking groove is used to interfere with the side wall of the end of the rotating sleeve, the locking spring is installed in the locking groove, and one end of the locking spring is connected to the bottom wall of the locking groove, and the other end is connected to one end of the locking block located in the locking groove.

[0013] By adopting the above technical solution, the locking groove is extended outward from the locking block to limit one end of the rotating sleeve, thereby limiting the push rod in its axial direction, so that the opening and closing cylinder can smoothly drive the closing door to close the installation opening.

[0014] In a specific possible implementation manner, the unlocking member includes an unlocking block, the unlocking block is mounted on a support, and the unlocking block is used to abut against an end of the locking block located outside the locking groove.

[0015] By adopting the above technical solution, when the closing door closes the installation opening, the locking block resists the unlocking block, so that the locking block is pushed into the locking groove through the unlocking block, so that the locking block releases the limit on the rotating sleeve, allowing the push rod to slide relative to the rotating sleeve, thereby driving the retaining mechanism to operate.

[0016] In a specific possible implementation scheme, the holding mechanism includes a linkage assembly and a clamping assembly, the clamping assembly includes a clamping block, a driving rod and a reset member, the clamping block is rotatably mounted on the top wall of the cavity near the mounting opening, and one end of the clamping block is used to clamp the top wall of the closed door, the driving rod is slidably mounted on the top wall of the cavity near the clamping block, and one end of the driving rod is connected to an end of the clamping block away from the mounting opening, the reset member is mounted on the driving rod, and the reset member is also connected to the cavity, the linkage assembly is mounted on the cavity, and the linkage assembly is connected to the driving rod, and the linkage assembly is also connected to the buffer assembly.

[0017] By adopting the above technical solution, when the closed door closes the installation opening, the linkage assembly is pushed by the opening and closing mechanism, so that the linkage assembly drives the driving rod to move, and the driving rod drives the clamping block to rotate, so that one end of the clamping block is pressed against the top wall of the closed door, thereby pressing the closed door against the cavity, so as to facilitate maintaining the tightness of the connection between the closed door and the cavity, reducing the vibration generated by the mechanism for transporting materials installed on the cavity when transporting materials, thereby reducing the gap between the closed door and the cavity due to the vibration of the cavity, thereby facilitating maintaining the airtightness of the cavity.

[0018] In a specific possible implementation scheme, the reset member includes a reset spring, a support plate is installed on the frame near the clamping block, the drive rod is slidably installed on the support plate, and the drive rod is connected to the clamping block through the support plate, a baffle is provided at one end of the drive rod away from the clamping block, the baffle is connected to the linkage assembly, the reset spring is installed on the drive rod, and one end of the reset spring is in contact with the side wall of the baffle, and the other end is in contact with the side wall of the support plate.

[0019] By adopting the above technical solution, when the linkage assembly drives the driving rod to move, the baffle at the end of the driving rod compresses the reset spring, so that when the driving rod needs to be reset, it can be reset under the action of the elastic force of the reset spring.

[0020] In a specific feasible implementation scheme, the linkage assembly includes a control member, an elastic member and a connecting member, the control member includes a control plate, the control plate is installed on the cavity along a direction perpendicular to the rotating axis of the closed door, and the control plate is located on the side of the driving rod away from the mounting port, a control groove for sliding the end of the driving rod is provided on the side wall of the control plate, the bottom wall of the control groove is connected to the side wall of the control plate by a slope, the elastic member is installed on the control plate, and the elastic member is connected to the frame, the connecting member is installed on the frame, and the connecting member is connected to the control plate, and the connecting member is also connected to the buffer assembly.

[0021] By adopting the above technical solution, when the linkage assembly is actuated, the opening and closing mechanism drives the connecting piece to move, thereby driving the control plate to move in a direction away from the cavity, so that the baffle at the end of the driving rod slides from the control groove of the control plate to the side wall of the control plate, thereby causing the driving rod to move in the direction of the clamping block, thereby driving the clamping block to rotate, so that the clamping block can clamp the closed door.

[0022] In a specific possible implementation manner, the elastic member comprises a tension spring, one end of the tension spring is connected to the cavity, and the other end of the tension spring is connected to the control board.

[0023] By adopting the above technical solution, when the control board is driven away from the cavity by the connecting piece, the control board drives the tension spring to stretch, so that when the closed door needs to be opened later, the tension spring can drive the control board to reset, thereby driving the clamping block to loosen the closed door through the driving rod.

[0024] In a specific possible implementation scheme, the connecting member includes a connecting frame, which is slidably mounted on the frame in a horizontal direction, and the lower end of the connecting frame is connected to one end of the control board, and the upper end of the connecting frame is used to connect to the buffer assembly.

[0025] By adopting the above technical solution, when the installation opening is closed with a closed door, the opening and closing mechanism drives the connecting frame to move, thereby driving the control board to move, so that the control board drives the driving rod to move, thereby driving the clamping block to clamp the closed door.

[0026] In summary, the present application includes at least one of the following beneficial effects: 1. The present application provides an opening and closing mechanism to facilitate the opening and closing of the closed door through the opening and closing mechanism, thereby eliminating the need to transport the closed door by hoisting, thereby facilitating the maintenance of the heater installed on the closed door.

[0027] 2. The present application provides a retaining mechanism to facilitate keeping the closed door tightly connected to the cavity through the retaining mechanism, thereby facilitating maintaining the airtightness of the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the vacuum chamber door opening and closing device of the present application.

[0029] Figure 2 It is a schematic diagram of the structure of the cavity in the embodiment of the present application.

[0030] Figure 3 It is a schematic diagram of the installation of the buffer component in the embodiment of the present application.

[0031] Figure 4 It is a schematic diagram of the limiting plate and the locking block limiting the rotating sleeve in the embodiment of the present application.

[0032] Figure 5 It is a schematic diagram of the structure of the connecting member in the embodiment of the present application.

[0033] Figure 6 It is a structural diagram of the linkage component in the embodiment of the present application.

[0034] Figure 7 It is an exploded view of the clamping assembly in the embodiment of the present application.

[0035] Figure 8 It is a schematic diagram of the closed door when it is opened in the embodiment of the present application.

[0036] Description of reference numerals: 1. Frame; 2. Cavity; 21. Mounting port; 22. Feed port; 3. Opening and closing mechanism; 32. Driving assembly; 321. Opening and closing cylinder; 322. Support; 33. Buffer assembly; 331. Rotating sleeve; 332. Push rod; 333. Limiting plate; 334. Locking block; 335. Locking spring; 336. Unlocking block; 4. Holding mechanism; 41. Clamping assembly; 411. Clamping block; 4111. Driving groove; 412. Driving rod; 413. Sliding rod; 414. Baffle; 415. Support plate; 416. Reset spring; 42. Linkage assembly; 421. Control board; 4211. Control groove; 422. Connecting plate; 423. Tension spring; 424. Connecting frame; 5. Closed door. DETAILED DESCRIPTION

[0037] The present application is further described in detail below in conjunction with the accompanying drawings.

[0038] The present application embodiment discloses a vacuum chamber door opening and closing device, referring to Figure 1 and Figure 2 , including a frame 1 and a cavity 2, the cavity 2 is fixedly installed on the frame 1, and a feeding port 22 is opened on the side wall of the cavity 2, the feeding port 22 runs through the side wall of the cavity 2, and a mounting port 21 is also opened on the top wall of the cavity 2, and a closed door 5 is also installed on the cavity 2 at the mounting port 21, one end of the closed door 5 is rotatably connected to one end of the cavity 2, and a heater (not shown in the figure) is installed on the side wall of the closed door 5 close to the mounting port 21, an opening and closing mechanism 3 for driving the closed door 5 to close the mounting port 21 is installed on the frame 1, and a holding mechanism 4 for keeping the closed door 5 tightly connected to the mounting port 21 is installed on the cavity 2, and the holding mechanism 4 is connected to the opening and closing mechanism 3.

[0039] Reference Figure 1 The opening and closing mechanism 3 includes a driving assembly 32 and a buffer assembly 33. The driving assembly 32 includes an opening and closing cylinder 321 and a support 322. The support 322 is fixedly mounted on the top wall of the frame 1, and the support 322 is located on the side of the frame 1 close to the rotating shaft of the closed door 5, and the upper end of the support 322 is higher than the plane where the top wall of the cavity 2 is located. The cylinder body of the opening and closing cylinder 321 is fixedly mounted on the top wall of the closed door 5, and the piston rod of the opening and closing cylinder 321 is perpendicular to the rotating shaft of the closed door 5, and the piston rod of the opening and closing cylinder 321 is rotatably connected to the support 322 through the buffer assembly 33. In another embodiment of the present application, the opening and closing cylinder 321 can also be replaced by an electric cylinder.

[0040] Reference Figure 1 and Figure 3The buffer assembly 33 includes a rotating sleeve 331, a push rod 332, a locking piece and an unlocking piece. The rotating sleeve 331 is rotatably mounted on the support 322. One end of the push rod 332 is fixedly mounted on the end of the piston rod of the opening and closing cylinder 321. The push rod 332 is coaxially arranged with the piston rod of the opening and closing cylinder 321, and the other end of the push rod 332 passes through the rotating sleeve 331 and is slidably connected to the rotating sleeve 331. The locking member includes a locking block 334 and a locking spring 335. A locking groove is provided on the side wall of the push rod 332 near the piston rod of the opening and closing cylinder 321. The axis of the locking groove is perpendicular to the axis of the push rod 332. The locking block 334 is slidably installed in the locking groove along the axis direction of the locking groove, and one end of the locking block 334 extends out of the locking groove. The side wall of the locking block 334 at one end outside the locking groove is used to abut against the side wall of the rotating sleeve 331 at one end near the opening and closing cylinder 321. The locking spring 335 is installed in the locking groove, and one end of the locking spring 335 is fixedly connected to the bottom wall of the locking groove, and the other end is fixedly connected to the side wall of the locking block 334 at one end inside the locking groove. Figure 3 and Figure 4 A limiting plate 333 is also fixedly installed on the side wall of the push rod 332 at one end away from the closing cylinder 321, and the limiting plate 333 is located on the side of the rotating sleeve 331 away from the locking block 334, and the side wall of the limiting plate 333 is used to resist the side wall of the end of the rotating sleeve 331 away from the closing cylinder 321, and the distance between the limiting plate 333 and the locking block 334 is equal to the length of the rotating sleeve 331.

[0041] Refer to 4 and Figure 5 The unlocking member includes an unlocking block 336, which is fixedly mounted on the support 322 in the vertical direction, and is located below the rotating sleeve 331 and on the side of the rotating sleeve 331 close to the opening and closing cylinder 321, and the upper end of the unlocking block 336 is used to resist the end of the locking block 334 located outside the locking groove.

[0042] Reference Figure 1 and Figure 4 When the locking cam 331 is in the unlocking state, the locking cam 332 is in the unlocking state, and the locking cam 332 is in the unlocking state, so that the locking cam 332 is locked and the unlocking cam 332 is unlocked.

[0043] Reference Figure 4 and Figure 5 When the installation opening 21 needs to be closed, the piston rod of the opening and closing cylinder 321 is driven to extend outward, and the locking block 334 on the push rod 332 at the end of the piston rod abuts against the side wall of the rotating sleeve 331 close to the opening and closing cylinder 321, so that the cylinder body of the opening and closing cylinder 321 gradually drives the closing door 5 to rotate downward, so that the closing door 5 closes the installation opening 21. Figure 3 and Figure 5 When the locking cam 334 is in the unlocking state, the locking cam 334 is in the unlocking state, and the locking cam 334 is in the unlocking state, so that the locking cam 334 is gradually retreated into the locking groove and compressed the locking spring 335. When the closing door 5 closes the installation opening 21, the locking cam 334 is completely retreated into the locking groove under the action of the unlocking cam 336. At this time, the opening cylinder continues to drive its piston rod to extend outward to the end of the stroke. At this time, the piston rod drives the push rod 332 and the rotating sleeve 331 to slide relative to each other, so that the push rod 332 drives the locking cam 334 to slide in the direction away from the opening cylinder, thereby causing the locking cam 334 to slide into the rotating sleeve 331, and the locking cam 334 is against the inner wall of the rotating sleeve 331 under the action of the locking spring 335.

[0044] Reference Figure 1 and Figure 6 The holding mechanism 4 includes a clamping assembly 41 and a linkage assembly 42. The clamping assembly 41 includes a clamping block 411, a driving rod 412 and a reset member. The clamping block 411 is provided with several blocks. Figure 6 and Figure 7,,A plurality of clamping blocks 411 are respectively arranged on both sides of the mounting opening 21 on the cavity 2, and are distributed at both ends of the rotating shaft of the closed door 5, and the plurality of clamping blocks 411 located on both sides of the mounting opening 21 of the cavity 2 are arranged along a straight line, each clamping block 411 is rotatably mounted on the top wall of the cavity 2, and one end of each clamping block 411 extends toward the mounting opening 21, and one end of the clamping block 411 close to the mounting opening 21 is used to clamp the top wall of the closed door 5, and the other end of the clamping block 411 extends upwardly and obliquely away from the mounting opening 21. A support plate 415 is also fixedly installed on the top wall of the cavity 2 near the clamping block 411, and a driving rod 412 is slidably installed on the support plate 415 along a direction parallel to the rotation axis of the closed door 5, and one end of the driving rod 412 passes through the side wall of the support plate 415 and extends to the clamping block 411, and a sliding rod 413 is fixedly installed on the end of the driving rod 412 near the clamping block 411, and the axis of the sliding rod 413 is perpendicular to the axis of the driving rod 412, and a driving groove 4111 is opened on the side wall of the clamping block 411, and the driving groove 4111 extends obliquely downward from the end of the clamping block 411 away from the mounting port 21 toward the direction of the rotation axis of the clamping block 411, and the sliding rod 413 is slidably installed in the driving groove 4111. The reset member includes a reset spring 416 , and a baffle 414 is fixedly mounted on one end of the driving rod 412 away from the sliding rod 413 . The reset spring 416 is mounted on the driving rod 412 , and one end of the reset spring 416 abuts against the side wall of the support plate 415 , and the other end abuts against the side wall of the baffle 414 .

[0045] Reference Figure 5 and Figure 7The linkage assembly 42 includes a connecting member, a control member and an elastic member. The control member includes a control plate 421. The control plate 421 is slidably installed on the top wall of the cavity 2 in a direction perpendicular to the rotating axis of the closed door 5, and the control plate 421 is located near the baffle 414 on the driving rod 412, and one end of the control plate 421 extends away from the cavity 2. A control groove 4211 is opened on the side wall of the control plate 421 near the baffle 414, and the bottom wall of the control groove 4211 is connected to the side wall of the control plate 421 by a slope, and the baffle 414 on the driving rod 412 slides along the control groove 4211. The elastic member includes a tension spring 423, a connecting plate 422 is fixedly installed at one end of the control plate 421 outside the cavity 2, the axis of the connecting plate 422 is perpendicular to the axis of the control plate 421, a positioning rod is fixedly installed on the side wall of the connecting plate 422, a reset rod is fixedly installed on the top wall of the cavity 2, one end of the tension spring 423 is installed on the positioning rod, and the other end of the tension spring 423 is installed on the reset rod. The connecting member includes a connecting frame 424, the connecting frame 424 is slidably installed on the support 322, and the sliding path of the connecting frame 424 is perpendicular to the rotating shaft of the closed door 5, and the upper end of the connecting frame 424 extends to the push rod 332, and the upper end of the connecting frame 424 is used for the push rod 332 to contact, and the lower end of the connecting frame 424 is fixedly connected to the connecting plate 422.

[0046] Reference Figure 5 and Figure 8 When the driving assembly 32 drives the closed door 5 to rotate downward to the closed installation opening 21, the unlocking block 336 contacts the locking block 334 and pushes the locking block 334 into the locking groove, so that the locking block 334 is separated from the side wall of the end of the rotating sleeve 331, and then the opening and closing cylinder 321 continues to push the push rod 332 to move in the direction of the connecting frame 424, and the end of the push rod 332 contacts the upper end of the connecting frame 424 and pushes the connecting frame 424 away from the support 322. Figure 5 and Figure 8, so that the connecting frame 424 drives the control plate 421 to move away from the cavity 2 through the connecting plate, so that the control groove 4211 on the control plate 421 moves away from the pressing block 411, so that the baffle 414 at the end of the driving rod 412 slides along the bottom wall of the control groove 4211 to the slope, and then slides from the slope to the side wall of the control plate 421, so that the baffle 414 drives the driving rod 412 to move in the direction of the pressing block 411 and compresses the reset spring 416, so that the driving rod 412 The rod 412 drives the slide rod 413 to slide in the driving groove 4111 of the pressing block 411 toward the rotation axis direction of the pressing block 411, so that the end of the pressing block 411 away from the driving rod 412 rotates downward and presses the top wall of the closed door 5, thereby pressing the closed door 5 against the cavity 2, thereby reducing the vibration generated when the conveying mechanism on the cavity 2 conveys the material into the cavity 2, thereby causing a gap between the closed door 5 and the edge of the mounting port 21 on the top wall of the cavity 2, thereby affecting the airtightness of the cavity 2.

[0047] Reference Figure 4 and Figure 5 When the driving assembly 32 is required to drive the closed door 5 to rotate upward and open the installation opening 21, the push rod 332 is first driven to move in the direction of the opening and closing cylinder 321 through the opening and closing cylinder 321, so that the push rod 332 drives the limit plate 333 to move in the direction of the rotating sleeve 331. At the same time, the push rod 332 drives the locking block 334 to move in the direction of the opening and closing cylinder 321, so that the end of the locking block 334 slides along the inner wall of the rotating sleeve 331. When the opening and closing cylinder 321 drives the push rod 332 to move until the limit plate 333 contacts the side wall of the end of the rotating sleeve 331, the locking block 334 moves out of the rotating sleeve 331 and contacts the upper end of the unlocking block 336 again driven by the locking spring 335, refer to ,7 and Figure 8 , and while the opening and closing cylinder 321 drives the push rod 332 to move, the control plate 421 also moves toward the direction of the cavity 2 driven by the tension spring 423, thereby driving the control slot 4211 to move toward the direction of the driving rod 412, so that the baffle 414 at the end of the driving rod 412 slides along the side wall of the control plate 421 to the slope, and then slides from the slope to the control slot 4211, so that the driving rod 412 moves away from the clamping block 411 under the drive of the return spring 416, thereby driving the baffle 414 to resist the bottom wall of the control slot 4211, so that the driving rod 412 drives the sliding rod 413 to move in the driving slot 4111 in the direction away from the clamping block 411, so that the clamping block 411 rotates downward, so that the end of the clamping block 411 close to the closed door 5 is separated from the closed door 5.

[0048] Reference Figure 4 and Figure 8The locking cam 334 is pressed against the locking cam 336 to lock the locking cam 337. The locking cam 334 is pressed against the locking cam 336 to lock the locking cam 337. The locking cam 334 is pressed against the locking cam 337 to lock the locking cam 337.

[0049] The working principle of the embodiment of the present application is as follows: when it is necessary to evacuate the cavity 2, the piston rod of the opening and closing cylinder 321 is driven to extend outward, and the locking block 334 on the push rod 332 at the end of the piston rod abuts against the end of the rotating sleeve 331, so that the front end of the piston rod of the opening and closing cylinder 321 is limited by the locking block 334, so that the cylinder body of the opening and closing cylinder 321 rotates in the direction away from the support 322, thereby driving the closed door 5 to rotate downward to the closed mounting opening 21. When the locking cam 334 is in the unlocking state, the locking cam 334 is pressed against the locking cam 336, and the locking cam 336 is pressed against the locking cam 336 to release the locking cam 336. 31, so that the end of the locking block 334 abuts against the inner wall of the rotating sleeve 331. At the same time, one end of the push rod 332 away from the combination cylinder 321 abuts against the upper end of the connecting frame 424 and pushes the connecting frame 424 away from the cavity 2, so that the connecting frame 424 drives the control plate 421 to move through the connecting plate, so that the tension spring 423 is stretched, and the baffle 414 at the end of the driving rod 412 also slides from the control groove 4211 to the side wall of the control plate 421, so that the driving rod 412 compresses the reset spring 416 and drives the sliding rod 413 to slide in the driving groove 4111, so that the clamping block 411 presses the top wall of the closed door 5 downward, thereby maintaining the tightness of the connection between the closed door 5 and the cavity 2, thereby improving the airtightness of the cavity 2, and facilitating the heater on the closed door 5 to increase the temperature in the cavity 2 to reach the working temperature.

[0050] When it is necessary to open the mounting opening 21, the piston rod is driven to retract by the opening and closing cylinder 321, so that the piston rod first drives the push rod 332 to move toward the cylinder body of the opening and closing cylinder 321, thereby causing the push rod 332 to drive the limit plate 333 to move toward the rotating sleeve 331 and drive the locking block 334 to move toward the opening and closing cylinder 321, so that the limit plate 333 contacts the end of the rotating sleeve 331, and the locking block 334 moves out of the rotating sleeve 331 and contacts the unlocking block 336 again, so that the locking block 334 remains in the locking groove. At the same time, as the push rod 332 drives the limit plate 333 to move in the direction of the rotating sleeve 331, the connecting frame 424 also moves in the direction of the cavity 2 under the drive of the tension spring 423, thereby driving the control plate 421 to move, so that the baffle 414 at the end of the driving rod 412 slides from the side wall of the control plate 421 to the control groove 4211, so that the driving rod 412 moves in the direction of the control plate 421 under the action of the return spring 416, so that the driving rod 412 drives the sliding rod 413 to move along the driving groove 4111 in the direction away from the clamping block 411, thereby driving the clamping block 411 to rotate, so that the end of the clamping block 411 close to the closed door 5 rotates upward and separates from the closed door 5, thereby releasing the lock of the closed door 5. When the locking cam 332 is in the unlocking state, the locking cam 334 is in the unlocking state, and the locking cam 334 is in the unlocking state, so that the locking cam 334 is locked and the locking cam 334 is locked.

[0051] The above are preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum chamber (2) door opening and closing device, comprising a frame (1) and a chamber (2), wherein the chamber (2) is mounted on the frame (1). Features: The top wall of the cavity (2) is provided with an installation opening, and a closed door (5) is rotatably installed on the cavity (2) at the installation opening. An opening and closing mechanism (3) for driving the closed door (5) to rotate is installed on the frame (1), and the opening and closing mechanism (3) comprises a driving component (32), and the driving component (32) is installed on the frame (1). The closed door (5) is connected to the driving component (32), and the closed door (5) is used to close the installation opening, and the closed door (5) is used to install a heater. A retaining mechanism is installed on the cavity (2), and the retaining mechanism is connected to the closed door (5), and the retaining mechanism is used to keep the closed door (5) tightly connected to the cavity (2).

2. A vacuum chamber (2) door opening and closing device according to claim 1, Features: The driving assembly (32) comprises an opening and closing cylinder (321) and a support (322); the support (322) is arranged on the frame (1) at one side of the cavity (2); the opening and closing cylinder (321) is installed on the closed door (5), and the output end of the opening and closing cylinder (321) is connected to the support (322).

3. A vacuum chamber (2) door opening and closing device according to claim 2, Features: The opening and closing mechanism (3) further comprises a buffer assembly (33), the buffer assembly (33) comprising a rotating sleeve (331), a push rod (332), a locking member and an unlocking member, the rotating sleeve (331) being rotatably mounted on the support (322), the push rod (332) being mounted on the piston rod of the opening and closing cylinder (321) along the axial direction of the piston rod of the opening and closing cylinder (321), and one end of the push rod (332) passing through the rotating sleeve (331) and extending in a direction away from the closing cylinder (321), and the end of the push rod (332) away from the closing cylinder (321) is used to engage with the holding member. The push rod (332) is connected to the mechanism, a limit plate (333) for contacting the rotating sleeve (331) is installed on the side wall of the end of the push rod (332) away from the closing cylinder (321), and the limit plate (333) is located on the side of the rotating sleeve (331) away from the closing cylinder (321), the locking member is installed on the push rod (332), and the rotating sleeve (331) is located between the limit plate (333) and the locking member, and the locking member is used to limit the end of the rotating sleeve (331) away from the limit plate (333), and the unlocking member is installed on the frame (1), and the unlocking member is connected to the locking member.

4. A vacuum chamber (2) door opening and closing device according to claim 3, Features: The locking member comprises a locking block (334) and a locking spring (335); a locking groove is provided on the side wall of the push rod (332); the axis of the locking groove is perpendicular to the axis of the push rod (332); the locking block (334) is slidably installed in the locking groove, and one end of the locking block (334) extends out of the locking groove, and the side wall of the end of the locking block (334) located outside the locking groove is used to abut against the side wall of the end of the rotating sleeve (331); the locking spring (335) is installed in the locking groove, and one end of the locking spring (335) is connected to the bottom wall of the locking groove, and the other end is connected to one end of the locking block (334) located in the locking groove.

5. A vacuum chamber (2) door opening and closing device according to claim 4, Features: The unlocking member comprises an unlocking block (336), the unlocking block (336) is mounted on the support (322), and the unlocking block (336) is used to abut against one end of the locking block (334) located outside the locking groove.

6. A vacuum chamber (2) door opening and closing device according to claim 3, Features: The holding mechanism comprises a linkage assembly (42) and a clamping assembly (41), wherein the clamping assembly (41) comprises a clamping block (411), a driving rod (412) and a reset member, wherein the clamping block (411) is rotatably mounted on the top wall of the cavity (2) near the mounting opening, and one end of the clamping block (411) is used to clamp the top wall of the closed door (5), wherein the driving rod (412) is slidably mounted on the top wall of the cavity (2) near the clamping block (411), and one end of the driving rod (412) is connected to an end of the clamping block (411) away from the mounting opening, wherein the reset member is mounted on the driving rod (412), and the reset member is also connected to the cavity (2), wherein the linkage assembly (42) is mounted on the cavity (2), and the linkage assembly (42) is connected to the driving rod (412), and the linkage assembly (42) is also connected to the buffer assembly (33).

7. A vacuum chamber (2) door opening and closing device according to claim 6, Features: The reset member comprises a reset spring (416); a support plate (415) is installed on the frame (1) near the pressing block (411); the driving rod (412) is slidably installed on the support plate (415), and the driving rod (412) passes through the support plate (415) and is connected to the pressing block (411); a baffle (414) is provided at one end of the driving rod (412) away from the pressing block (411), and the baffle (414) is connected to the linkage assembly (42); the reset spring (416) is installed on the driving rod (412), and one end of the reset spring (416) contacts the side wall of the baffle (414), and the other end contacts the side wall of the support plate (415).

8. A vacuum chamber (2) door opening and closing device according to claim 6, Features: The linkage assembly (42) comprises a control member, an elastic member and a connecting member, wherein the control member comprises a control plate (421), wherein the control plate (421) is mounted on the cavity (2) in a direction perpendicular to the rotation axis of the closed door (5), and the control plate (421) is located on a side of the driving rod (412) away from the mounting opening, wherein a control groove (4211) for sliding the end of the driving rod (412) is provided on a side wall of the control plate (421), wherein a groove bottom wall of the control groove (4211) and a side wall of the control plate (421) are connected via a slope, wherein the elastic member is mounted on the control plate (421), and the elastic member is connected to the frame (1), wherein the connecting member is mounted on the frame (1), and the connecting member is connected to the control plate (421), and the connecting member is also connected to the buffer assembly (33).

9. A vacuum chamber (2) door opening and closing device according to claim 8, Features: The elastic member comprises a tension spring (423), one end of the tension spring (423) is connected to the cavity (2), and the other end is connected to the control board (421).

10. A vacuum chamber (2) door opening and closing device according to claim 8, Features: The connecting member comprises a connecting frame (424), the connecting frame (424) is slidably mounted on the frame (1) in a horizontal direction, the lower end of the connecting frame (424) is connected to one end of the control board (421), and the upper end of the connecting frame (424) is used to be connected to the buffer assembly (33).

Images