Multi-path combined material characterization test platform

Abstract

The invention provides a multi-path combined material characterization test platform. Comprising a sample table for fixing a to-be-detected sample, and further comprises an X-ray analysis system, an absorption spectrum analysis system and a fluorescence analysis system which irradiate the to-be-detected sample on the sample table from different directions and obtain detection irradiation results. Incident light paths of the X-ray analysis system, the absorption spectrum analysis system and the fluorescence analysis system at the to-be-detected sample are pairwise orthogonal. According to the multi-path combined material characterization test platform, simultaneous multi-parameter imaging and analysis of the same to-be-tested sample are realized by coupling the X-ray analysis system, the absorption spectrum analysis system and the fluorescence analysis system, and multi-mode simultaneous analysis is realized, so that the test efficiency can be improved; and the relationship between different characteristics of the material under the same condition can be researched.

Description

Technical Field

[0001] The present invention relates to the technical field of material characterization testing, and in particular to a multi-channel material characterization testing platform. Background Art

[0002] At present, the test platforms used for material characterization generally adopt a single-mode architecture, that is, they are built around a single core technology. The main technical directions of common test platforms include: 1) X-ray small-angle scattering instrument for microstructure measurement; 2) UV-visible absorption spectrometer for electronic structure measurement; 3) Laser pumping-time-resolved fluorescence spectrometer for dynamic research, etc.

[0003] Although this type of single-mode architecture has advantages such as clear development goals, easy assembly and debugging, and convenient repair and maintenance, its limitations are becoming more and more prominent with the development of science and technology. Generally speaking, single-mode test instruments can only obtain the properties of a certain aspect of the material and cannot provide multi-dimensional information. As the research on the problem deepens, the characterization of the properties of a single aspect is often not enough to draw accurate experimental conclusions. It is usually necessary to combine the experimental results obtained by multiple means and analyze them from different aspects to obtain a more comprehensive and accurate conclusion on the analysis object.

[0004] For example, small-angle X-ray scattering is often used to infer the microstructure of materials, but it is generally inferential. Based on the scattering pattern, only a few characteristic dimensions can be obtained to infer the microstructure. The UV-visible absorption spectrometer can obtain the atomic composition information of the test material based on the different absorption peaks of atoms to light. The combination of structural information and atomic composition information can infer the molecular structure of the main components of the material and clarify the composition information of the material. In addition, the time-resolved fluorescence spectrometer can further obtain relevant molecular dynamics information on this basis. Summary of the invention

[0005] In order to meet the ever-changing needs of scientific research, provide a testing instrument that can obtain multi-faceted information of material samples and improve the accuracy of sample analysis conclusions, the present application provides a multi-channel joint material characterization testing platform.

[0006] The technical solution of the present invention provides a multi-channel material characterization test platform, including a sample table for fixing the sample to be tested, and also includes an X-ray analysis system, an absorption spectrum analysis system and a fluorescence spectrum analysis system for irradiating the sample to be tested on the sample table from different directions and obtaining detection irradiation results.

[0007] Preferably, the incident light paths of the X-ray analysis system, the absorption spectrum analysis system and the fluorescence spectrum analysis system at the sample to be tested are orthogonal to each other.

[0008] Preferably, the X-ray analysis system comprises an X-ray source, a collimation system and a first detector; The X-ray source is used to generate X-rays, the collimation system is used to adjust the X-rays generated by the X-ray source into a light beam with a set divergence angle to irradiate the sample to be tested, and the first detector is placed behind the sample to be tested in the optical path of the X-ray analysis system.

[0009] Preferably, the absorption spectrum analysis system comprises a light source, a monochromator and a second detector; The light source is used to generate white light with a continuous spectrum, the monochromator is used to split the white light generated by the light source to obtain monochromatic light of a set frequency, the monochromatic light is irradiated onto the sample to be tested, and the second detector is placed after the sample to be tested in the optical path of the absorption spectrum analysis system.

[0010] Preferably, the fluorescence spectrum analysis system comprises a laser light source, a lens system and a fluorescence detector; The lens system is used to continuously adjust the focal length of the laser emitted by the laser light source to control the spot size of the laser irradiating the sample to be tested. The fluorescence detector takes the sample to be tested as the origin and is deflected at an angle relative to the extension line of the incident laser emitted by the fluorescence spectrum analysis system after the sample to be tested to avoid laser irradiation of the fluorescence detector.

[0011] Preferably, the deflection angle of the fluorescence detector relative to the extension line with the sample to be tested as the origin is 30-60 degrees.

[0012] Preferably, the first detector, the second detector and the fluorescence detector are coplanar; the fluorescence detector is located within a right angle range between the first detector and the second detector with the sample to be tested as the vertex.

[0013] Preferably, the X-ray analysis system comprises an X-ray source, a collimation system and a first detector; the X-ray source is used to generate X-rays, the collimation system is used to adjust the X-rays generated by the X-ray source into a light beam with a set divergence angle to irradiate the sample to be tested, and the first detector is placed behind the sample to be tested on the optical path of the X-ray analysis system; The absorption spectrum analysis system comprises a light source, a monochromator and a second detector; the light source is used to generate white light with a continuous spectrum, the monochromator is used to split the white light generated by the light source to obtain monochromatic light of a set frequency, the monochromatic light is irradiated onto the sample to be tested, and the second detector is placed after the sample to be tested on the optical path of the absorption spectrum analysis system; The fluorescence spectrum analysis system comprises a laser light source, a lens system and a fluorescence detector; the lens system is used to continuously adjust the focal length of the laser light emitted by the laser light source to control the spot size of the laser light irradiating the sample to be tested; the fluorescence detector takes the sample to be tested as the origin and deflects the incident laser light emitted by the fluorescence spectrum analysis system at an angle relative to the extension line after the sample to be tested to avoid the laser light irradiating the fluorescence detector; The local light path represented by the X-ray source of the X-ray analysis system and the collimation system, the local light path represented by the light source of the absorption spectrum analysis system and the monochromator, and the local light path represented by the laser light source of the fluorescence spectrum analysis system and the lens system are arranged parallel to each other.

[0014] Preferably, the absorption spectrum analysis system includes an optical fiber component, which receives the monochromatic light adjusted by the monochromator and irradiates the sample to be tested after changing the direction of the light path; the fluorescence spectrum analysis system includes a reflection component, which receives the laser emitted by the lens system and irradiates the sample to be tested after changing the direction of the light path; the incident light paths of the X-ray analysis system, the absorption spectrum analysis system and the fluorescence spectrum analysis system at the sample to be tested are orthogonal to each other.

[0015] Preferably, it also includes a control system, which includes a master control server, a first data acquisition server and a second data acquisition server; The master control server is signal-connected to the X-ray analysis system, the absorption spectrum analysis system, the fluorescence spectrum analysis system and the sample stage; the first data acquisition server is signal-connected to the first detector, and the second data acquisition server is signal-connected to the fluorescence detector; the master control server is signal-connected to both the first data acquisition server and the second data acquisition server.

[0016] The multi-channel material characterization test platform of the present invention realizes simultaneous multi-parameter imaging and analysis of the same sample to be tested by coupling the X-ray analysis system, the absorption spectrum analysis system and the fluorescence spectrum analysis system, and realizes multi-modal simultaneous analysis, which can not only improve the test efficiency, but also study the relationship between different characteristics of materials under the same conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a control logic diagram of the multi-channel material characterization test platform of the present application.

[0018] In the figure: 1: X-ray analysis system; 11: X-ray source; 12: collimation system; 13: first detector; 2: absorption spectrum analysis system; 21: light source; 22: monochromator; 23: second detector; 24: optical fiber assembly; 3: fluorescence spectrum analysis system; 31: laser light source; 32: lens system; 33: fluorescence detector; 34: reflection assembly; 4: sample stage; 5: control system; 51: master control server; 52: first data acquisition server; 53: second data acquisition server. DETAILED DESCRIPTION

[0019] The following is a detailed description of this patent type in conjunction with the accompanying drawings and specific embodiments. In this specification, the dimensions of the drawings do not represent the actual size ratios. The drawings are only used to reflect the relative position relationship and connection relationship between the components. Components with the same name or the same number represent similar or identical structures and are only for illustrative purposes.

[0020] At present, there is no multimodal joint characterization test platform that organically combines the X-ray small-angle scattering method, the ultraviolet-visible absorption spectrum method, and the laser pump-time-resolved fluorescence spectrum method. Currently, there are only single-modal characterization test platforms on the market that focus on the above three core technologies. The main reasons are: 1) It is difficult to design an optical path and equipment structure that can integrate and match X-ray small-angle scattering measurement, ultraviolet-visible absorption spectrum measurement, and laser pump-time-resolved fluorescence measurement; 2) It is difficult to achieve joint control of detectors and synchronous data acquisition of the three technologies; 3) It is difficult to quickly and effectively store the data generated by the three technologies.

[0021] Figure 1 The figure is a schematic diagram of the overall structure of the multi-channel material characterization test platform. It includes a sample stage 4, which is used to fix the sample to be tested. Usually, the sample stage is equipped with a precision displacement mechanism, which can realize the precise control of the three degrees of freedom of movement of XYZ-α-β-γ and three degrees of freedom of rotation, so as to realize the precise adjustment of the position and posture of the sample, thereby controlling the lateral position of the incident light point, the longitudinal position of the incident light point, the incident angle and other key position and posture parameters.

[0022] It also includes an X-ray analysis system 1, an absorption spectrum analysis system 2, and a fluorescence spectrum analysis system 3 that can irradiate the sample to be tested on the sample stage 4 from different directions and obtain the detection irradiation results. The multi-channel joint material characterization test platform also includes a control system 5, which is used to control the X-ray analysis system 1, the absorption spectrum analysis system 2, the fluorescence spectrum analysis system 3, and the sample stage 4, so that the optical path of each of the above systems (X-ray analysis system 1, absorption spectrum analysis system 2, fluorescence spectrum analysis system 3) can be adjusted to a working state, and the corresponding incident light is irradiated at a set angle and a set distance relative to the sample through the coordination between the output light of each system and the posture of the sample stage. That is, not only align the sample, but also ensure that the sample is at the correct distance and posture on the optical path to ensure the accuracy and representativeness of the test results.

[0023] In order to facilitate the arrangement of each system and avoid interference between components of each system, it is preferred to make the incident light paths of each system that directly illuminate the sample orthogonal to each other at the sample to be tested. In this case, the irradiation device of each system located in front of the sample stage and the sensor device located behind the sample stage can be arranged along three orthogonal axes in space. It provides a maximized arrangement space for the arrangement of components of each system, while also avoiding the problem of interference between the light paths and sensor devices of different systems during testing. At the same time, this is also conducive to the design of the clamping mechanism of the sample stage 4 for the sample to be tested, avoiding interference between the clamping mechanism and the light paths of each system, that is, providing an optimal layout space for the clamping mechanism while avoiding interference of the light paths.

[0024] The required X-ray analysis system 1 includes an X-ray source 11, a collimation system 12, and a first detector 13. The X-ray source 11 is formed by a cathode ray tube with a specific target material, and is also equipped with a high-voltage generator and a corresponding control system. During exposure, the control system gives information, and the high-voltage generator outputs a high-voltage pulse to the cathode ray tube. The cathode ray tube generates a high-energy electron beam under the high-voltage pulse, and the target material emits X-rays after being bombarded by the electron beam. The X-rays emitted by the light source are adjusted by the collimation system to an X-ray beam with a suitable divergence angle and irradiated onto the sample to be tested. The collimation system 12 includes a collimator and a slit system. The four light-carding knife edges equipped with the slit system can be independently displaced with high precision through program control, that is, the size, shape, and geometric center position of the light aperture can be independently adjusted. The X-rays with a smaller divergence angle emitted after being processed by the collimation system 12 irradiate the sample to be tested. A first detector 13 is set after the sample to be tested along the optical path of the X-ray analysis system 1. The first detector 13 is used to obtain an X-ray image after being scattered by the sample. The first detector 13 is preferably a two-dimensional surface detector, and can actually use a zero-noise X-ray single photon counting detector, which has high sensitivity and high quantum efficiency. Its base is fixedly mounted on an XYZ three-axis precision displacement mechanism, and the position of the detector can be flexibly adjusted to expand the actual detectable area.

[0025] The absorption spectrum analysis system 2 required for the multi-channel material characterization test platform includes a light source 21, a monochromator 22 and a second detector 23. The light source 21 is mainly used to generate a continuous white light spectrum, and the wavelength of the spectrum covers the visible light and ultraviolet regions, and the typical spectrum range is 180-2000nm. The monochromator 22 is used to split the complex white light emitted by the light source 21 to obtain monochromatic light of a certain frequency. The monochromator 22 can be based on grating diffraction splitting or prism splitting. The monochromator 22 optionally has a lens system and a slit system arranged before and after the splitting component to achieve the adjustment of the light flux and light focusing characteristics. The monochromator 22 is preferably a grating component, and the grating component can have a plurality of switchable grating tower wheels of different densities. The higher the grating line density, the higher the resolution of the monochromatic light, but the lower the light flux. Therefore, the high-line density grating realizes the high-resolution mode, and the low-line density grating realizes the high-flux mode. In order to cooperate with the operation of the grating, the slit system of the monochromator 22 needs to be adjusted accordingly, increasing the width to adapt to the high-throughput mode and reducing the width to adapt to the high-resolution mode. A second detector 23 is set after the sample to be tested on the optical path of the absorption spectrum analysis system 2. The second detector 23 can be a point detector to determine the received light intensity, thereby determining the absorption of the specified monochromatic light by the sample to be tested. Further experiments can obtain the absorption spectrum of the sample to be tested. In fact, the second detector 23 has a switchable first detection unit and a second detection unit, which respectively match incident light of different wavelengths. The first detection unit and the second detection unit can respectively use a silicon-based detector and a gallium arsenide indium detector. When the incident monochromatic light is lower than 1000nm, a silicon-based detector is selected, and when the incident monochromatic light is not less than 1000nm, a gallium arsenide indium detector is selected to optimize the quantum detection efficiency and improve the resolution of the second detector 23 at different wavelengths.

[0026] The fluorescence spectrum analysis system 3 required for the multi-channel material characterization test platform includes a laser light source 31, a lens system 32 and a fluorescence detector 33. The lens system 32 is used to continuously adjust the focal length and focus position of the outgoing laser, so as to control the size of the laser spot obtained on the ground test sample. When the focal length is extremely large, the laser propagates in the sample approximately like parallel light, which is suitable for solid samples that are sensitive to laser radiation and have a low damage threshold; when the focal length is equal to the distance to the center of the sample, the laser converges at the geometric center of the sample. This mode is suitable for liquid or gas samples with high tolerance to laser radiation and a high damage threshold. Special attention should be paid to the layout of the fluorescence detector 33, which is significantly different from the layout of the X-ray analysis system 1 and the absorption spectrum analysis system 2. In order to avoid direct laser damage to the sensing device and to avoid direct laser interference with the resolution of the fluorescence results, the fluorescence detector 33 should be set to avoid being on the extension line of the incident laser emitted by the lens system 32 after the sample to be tested, but should be set with the sample to be tested as the origin and deviated from the extension line by an appropriate angle. This angle The angle can be 30-60 degrees, and in the embodiment of the present application, it is 45 degrees. The angle is mainly set to avoid direct laser radiation and to avoid interference with the optical paths of the X-ray analysis system 1 and the absorption spectrum analysis system 2. It can be 90 degrees, at which point the first detector 13, the second detector 23 and the fluorescence detector 33 are coplanar. In this case, in order to avoid interference between different systems while taking into account the installation of the fluorescence detector 33, the fluorescence detector 33 is located in the common plane of the three detectors within the right angle range between the first detector 13 and the second detector 23 with the sample to be tested as the vertex. The fluorescence spectrum analysis system 3 is mainly used to obtain the fluorescence information of the sample to be tested after laser irradiation. The fluorescence information has no specific emission direction. Therefore, no matter how the position of the fluorescence detector 33 is set, the expected effect can be achieved. The fluorescence detector 33 can use a high-sensitivity SDD detector, which has the characteristics of high time resolution and adjustable central detection wavelength.

[0027] In a preferred embodiment, in order to optimize the system layout and reduce the space occupied, while ensuring that the optical paths of each system are orthogonal to each other at the sample to be tested, it is preferred that the front-end optical paths of each system can be arranged in parallel with each other, so that the entire device extends along a single dimension, which is conducive to the layout of the device. To this end, the local area represented by the X-ray source 11 and the collimation system 12 of the X-ray analysis system 1, the local area represented by the light source 21 and the monochromator 22 of the absorption spectrum analysis system 2, and the local area represented by the laser light source 31 and the lens system 32 of the fluorescence spectrum analysis system 3 should be arranged in parallel with each other. Taking the above embodiment as an example, the light source 21 and the monochromator 22 of the absorption spectrum analysis system 2 are arranged in parallel along the layout direction of the X-ray analysis system 1, and the laser light source 31 and the lens system 32 of the fluorescence spectrum analysis system 3 are arranged in parallel along the layout direction of the X-ray analysis system 1. In order to ensure that the optical paths of each system are orthogonal to each other at the sample to be tested in this case, it is necessary to change the direction of the optical path in the absorption spectrum analysis system 2 and the fluorescence spectrum analysis system 3. Among them, as for the absorption spectrum analysis system 2, the optical fiber component 24 can be used behind the monochromator 22 to receive the monochromatic light to realize the switching of the monochromatic light, that is, one end of the optical fiber is aligned with the exit slit of the monochromator 22, and the other end extends along the original optical path direction at the sample to be tested, so that the emitted monochromatic light is emitted in the direction of the original embodiment. For the fluorescence spectrum analysis system 3, it is preferred to use a reflection component 34 to realize the function of laser light path switching. That is, the reflection component 34 is set on the output laser light path of the lens system 32, and the angle of the reflection component 34 is set so that after the laser is reflected by the reflection component 34, the reflected light is emitted along the laser light path at the sample to be tested in the original embodiment. In this case, it can be ensured that even if the layout of the system changes, the orthogonality of the optical paths of each system at the sample to be tested can still be maintained.

[0028] The control system 5 of the multi-channel material characterization test platform first includes a master control server 51, which is signal-connected to the X-ray analysis system 1, the absorption spectrum analysis system 2, the fluorescence spectrum analysis system 3 and the sample stage 4 to control the parameter settings and operation management of each system. Specifically, for the X-ray analysis system 1, the parameter setting is manifested in that it can control the parameter settings of the collimation system 12 according to the instructions provided by the master control server 51 to obtain X-rays with the expected divergence angle and intensity at the sample to be tested. In addition, preferably, for the first detector 13 of the X-ray analysis system 1, it can adjust the position according to the instructions of the master control server 51 to ensure that it has a suitable area coverage when acquiring the scattered image. Similarly, for the absorption spectrum analysis system 2 and the fluorescence spectrum analysis system 3, the parameter setting is manifested in the adjustment of the monochromator 22 and the lens system 32, so that the monochromator 22 obtains monochromatic light of the required frequency, and the lens system 32 obtains the appropriate laser focal length and other parameters. During operation management, it is necessary to control the operation of the light source and detector of each system. The control software is directly installed on the master control server 51. Parameters such as start, stop, power adjustment, and repetition frequency can be directly called by the user interaction software of the master control computer. Since the network communication between different computers is omitted, the delay can be ignored.

[0029] The control system 5 also includes a number of data acquisition servers connected to the first detector 13, the second detector 23 and the fluorescence detector 33. In this embodiment, the data acquisition servers include a first data acquisition server 52 connected to the first detector 13 and a second data acquisition server 53 connected to the fluorescence detector 33. The first data acquisition server 52 and the second data acquisition server 53 are mainly responsible for processing the data collected by the first detector 13 and the fluorescence detector 33 respectively. For the second detector 23, no independent data acquisition server is set in this embodiment, and it is directly processed by the master control server 51. The main reason for such setting is that, in terms of the specific test scheme, the X-ray analysis system 1 and the fluorescence spectrum analysis system 3 have a large amount of data, high requirements for data processing, and high processing pressure. Separating the data processing task can ensure the operating reliability and stability of the master control server 51. As for the absorption spectrum analysis system 2, its data volume is small and can be processed by the master control server 51. The first data acquisition server 52 and the second data acquisition server 53 run special EPICS software and Linux system, which are responsible for the data acquisition control of the detector. They can adjust the acquisition threshold, exposure time, exposure cycle, number of acquisitions, number of file storage and other parameters. In addition, they are equipped with large memory to act as hardware cache to meet the massive data generated by the detector during time-resolved testing. The first data acquisition server 52 and the second data acquisition server 53 are connected to the master control server 51 of the multimodal joint characterization test platform. This server is a user interaction computer, and all user interfaces, function settings, and parameter fine-tuning are completed on this computer.

[0030] The schematic diagram of the automatic control, data acquisition and storage of the multi-channel material characterization test platform is as follows: Figure 2 As shown. Since the entire platform includes three related systems, namely, the X-ray analysis system 1, the absorption spectrum analysis system 2, and the fluorescence spectrum analysis system 3, and is also equipped with an in-situ environment, a vacuum system, and status monitoring equipment, the entire automated control architecture adopts a distributed control system, that is, different components of the platform can operate independently, and the maintenance and replacement of components will not affect the stability of the overall platform. On this basis, the three core test functions are all gathered in the master control server 51. This computer is the interface for interaction between the platform and the user. It uses a set of standardized software, and the main functions, including light source switching, optical path adjustment, sample adjustment, detector photography, etc., can all be implemented in the master control computer. The specific control logic is as follows Figure 2 As shown in the figure, the master control computer divides the instructions into 1) light source control part and 2) detector control part. In the light source control part, the first step is to monitor whether the status of the X-ray light source, white light source and laser light source is normal. If the status is abnormal, a termination process is issued and the entire program returns to the origin. When the light source status is confirmed to be normal, the master control computer obtains the control right of the X-ray light source shutter, white light source monochromator and laser light source parameter setting respectively. After setting according to the user's needs, the incident light enters the sample environment and interacts with the sample. In the detector part, since the two-dimensional surface detector used for X-ray scattering measurement and the SDD detector for time-resolved fluorescence spectroscopy involve extremely large data throughput and complex detector parameter settings, servers are installed behind these two detectors respectively. The server and the detector are connected through a gigabit network and are responsible for control and data transmission. The server uses high-speed RAM memory as a hardware cache. When a set of time-resolved data is successfully collected, it is centrally transmitted to the master control computer through the gigabit network connected to the master control computer for the next step of data analysis and visualization. The amount of data of the ultraviolet-visible absorption spectrum is small, and no separate server is set up at the back end. The data is directly connected to the master control computer.

[0031] This application provides the first new type of comprehensive characterization platform, which organically combines X-ray small-angle scattering method, UV-visible absorption spectroscopy method, and laser pumping-time-resolved fluorescence spectroscopy method to successfully achieve multimodal testing, providing material scientists and R&D personnel with an innovative joint testing platform that can simultaneously observe the microstructure, electronic structure and dynamic processes of materials.

[0032] The above content only describes the preferred implementation methods of this patent type and does not limit the scope of this patent type. Without departing from the design spirit of this patent type, various modifications and improvements made to the technical solutions of this patent type by ordinary technicians in this field should fall within the protection scope determined by the claims of this patent type.

Claims

1. A multi-channel material characterization test platform, characterized in that: It comprises a sample stage (4) for fixing a sample to be tested, and also comprises an X-ray analysis system (1), an absorption spectrum analysis system (2) and a fluorescence spectrum analysis system (3) for irradiating the sample to be tested on the sample stage (4) from different directions and obtaining detection irradiation results.

2. The multi-channel material characterization test platform according to claim 1, characterized in that: The incident light paths of the X-ray analysis system (1), the absorption spectrum analysis system (2), and the fluorescence spectrum analysis system (3) at the sample to be tested are orthogonal to each other.

3. The multi-channel material characterization test platform according to claim 1, characterized in that: The X-ray analysis system (1) comprises an X-ray source (11), a collimation system (12) and a first detector (13); The X-ray source (11) is used to generate X-rays, the collimation system (12) is used to adjust the X-rays generated by the X-ray source (11) into a light beam with a set divergence angle and irradiate the sample to be tested, and the first detector (13) is placed behind the sample to be tested on the optical path of the X-ray analysis system (1).

4. The multi-channel material characterization test platform according to claim 1, characterized in that: The absorption spectrum analysis system (2) comprises a light source (21), a monochromator (22) and a second detector (23); The light source (21) is used to generate white light with a continuous spectrum, the monochromator (22) is used to split the white light generated by the light source (21) to obtain monochromatic light of a set frequency, the monochromatic light is irradiated onto the sample to be tested, and the second detector (23) is placed after the sample to be tested in the optical path of the absorption spectrum analysis system (2).

5. The multi-channel material characterization test platform according to claim 1, characterized in that: The fluorescence spectrum analysis system (3) comprises a laser light source (31), a lens system (32) and a fluorescence detector (33); The lens system (32) is used to continuously adjust the focal length of the laser light emitted by the laser light source (31) to control the spot size of the laser light irradiating the sample to be tested. The fluorescence detector (33) takes the sample to be tested as the origin and deflects at an angle relative to the extension line of the incident laser light emitted by the fluorescence spectrum analysis system (3) after the sample to be tested to avoid the laser light irradiating the fluorescence detector (33).

6. The multi-channel material characterization test platform according to claim 5, characterized in that: The deflection angle of the fluorescence detector (33) relative to the extension line with the sample to be tested as the origin 30-60 degrees.

7. The multi-channel material characterization test platform according to claim 5, characterized in that: The first detector (13), the second detector (23) and the fluorescence detector (33) are coplanar; the fluorescence detector (33) is located within a right angle range between the first detector (13) and the second detector (23) with the sample to be tested as a vertex.

8. The multi-channel material characterization test platform according to claim 1, characterized in that: The X-ray analysis system (1) comprises an X-ray source (11), a collimation system (12) and a first detector (13); the X-ray source (11) is used to generate X-rays, the collimation system (12) is used to adjust the X-rays generated by the X-ray source (11) into a light beam with a set divergence angle and irradiate the sample to be tested, and the first detector (13) is placed behind the sample to be tested on the optical path of the X-ray analysis system (1); The absorption spectrum analysis system (2) comprises a light source (21), a monochromator (22) and a second detector (23); the light source (21) is used to generate white light with a continuous spectrum, the monochromator (22) is used to split the white light generated by the light source (21) to obtain monochromatic light of a set frequency, the monochromatic light is irradiated onto the sample to be tested, and the second detector (23) is placed after the sample to be tested on the optical path of the absorption spectrum analysis system (2); The fluorescence spectrum analysis system (3) comprises a laser light source (31), a lens system (32) and a fluorescence detector (33); the lens system (32) is used to continuously adjust the focal length of the laser light emitted by the laser light source (31) to control the spot size of the laser light irradiating the sample to be tested; the fluorescence detector (33) takes the sample to be tested as the origin and deflects the incident laser light emitted by the fluorescence spectrum analysis system (3) at an angle relative to the extension line behind the sample to be tested to avoid the laser light irradiating the fluorescence detector (33); The local light path represented by the X-ray source (11) and the collimation system (12) of the X-ray analysis system (1), the local light path represented by the light source (21) and the monochromator (22) of the absorption spectrum analysis system (2), and the local light path represented by the laser light source (31) and the lens system (32) of the fluorescence spectrum analysis system (3) are arranged in parallel with each other.

9. The multi-channel material characterization test platform according to claim 8, characterized in that: The absorption spectrum analysis system (2) comprises an optical fiber component (24), wherein the optical fiber component (24) receives the monochromatic light adjusted by the monochromator (22), changes the direction of the light path and then irradiates the sample to be tested; the fluorescence spectrum analysis system (3) comprises a reflection component (34), wherein the reflection component (34) receives the laser light emitted by the lens system (32), changes the direction of the light path and then irradiates the sample to be tested; the incident light paths of the X-ray analysis system (1), the absorption spectrum analysis system (2) and the fluorescence spectrum analysis system (3) at the sample to be tested are orthogonal to each other.

10. The multi-channel material characterization test platform according to claim 1, characterized in that: It also includes a control system (5), wherein the control system (5) includes a master control server (51), a first data acquisition server (52) and a second data acquisition server (53); The master control server (51) is signal-connected to the X-ray analysis system (1), the absorption spectrum analysis system (2), the fluorescence spectrum analysis system (3) and the sample stage (4); the first data acquisition server (52) is signal-connected to the first detector (13), and the second data acquisition server (53) is signal-connected to the fluorescence detector (33); the master control server (51) is signal-connected to both the first data acquisition server (52) and the second data acquisition server (53).

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