Platform support compensation method and device, support platform, electronic equipment and medium

Abstract

The embodiment of the invention provides a platform support compensation method and device, a support platform, electronic equipment and a medium, and belongs to the field of semiconductor equipment manufacturing. The method is applied to supporting a platform, a first surface of the platform is used for placing a material processing element, and a second surface is provided with a fixed supporting point and an auxiliary supporting point to support the platform. The method comprises the steps of constructing a platform simulation structure based on a supporting platform; simulating and applying a supporting force to the target simulation supporting point to obtain a first deformation value; calculating according to the first deformation value and the supporting force to obtain a first deformation coefficient; calculating according to the first deformation value, the first deformation coefficient and an initial deformation value of the target simulation supporting point to obtain a target supporting force applied to the target simulation supporting point when the simulation deformation value of the platform simulation structure is zero; and carrying out support compensation on the platform simulation structure according to the target support force and the target simulation position. According to the embodiment, the accuracy of supporting compensation on the supporting platform can be improved, and then the flatness of the platform is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment manufacturing technology, and in particular to a platform support compensation method and device, a support platform, an electronic device and a medium. Background Art

[0002] The flatness of processed materials such as semiconductor materials, building materials, and mechanical materials affects the accuracy of the final processed equipment or structure. Therefore, it is necessary to ensure the flatness of the processing platform used to process the materials. Semiconductor materials, such as wafers, can be used to manufacture integrated circuit chips. The flatness of the wafer affects the manufacturing accuracy of the integrated circuit chips. During the wafer production, processing, and testing process, there are extremely high requirements for the flatness and stability of the semiconductor processing platform.

[0003] In the related art, the supporting force of the processing platform is adjusted based on human experience, which may easily result in the adjustment force being too large or too small, resulting in a large degree of overall deformation of the processing platform and low flatness. How to accurately adjust the supporting force of the processing platform has become a problem that needs to be solved urgently. Summary of the invention

[0004] The main purpose of the embodiments of the present application is to propose a platform support compensation method and device, a support platform, an electronic device and a medium, aiming to improve the accuracy of support compensation for the support platform.

[0005] To achieve the above-mentioned purpose, a first aspect of an embodiment of the present application proposes a platform support compensation method, which is applied to a support platform, wherein a first surface of the support platform is used to place a material processing element, a second surface of the support platform is provided with a fixed support point and an auxiliary support point, the second surface is an opposite surface of the first surface, the auxiliary support point includes a first auxiliary support point, a support force is applied to the fixed support point and the auxiliary support point to support the support platform, and the platform support compensation method includes:

[0006] Building a platform simulation structure based on the support platform, the platform simulation structure including a target simulation support point corresponding to the first auxiliary support point;

[0007] Applying a preset support force to the target simulation support point in a simulated manner to obtain a first deformation value of the target simulation support point;

[0008] Calculating according to the first deformation value and the supporting force to obtain a first deformation coefficient of the target simulation supporting point;

[0009] Obtain target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure;

[0010] Calculating according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point, to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero;

[0011] Support compensation is performed on the platform simulation structure according to the target support force and the target simulation position.

[0012] In some embodiments, the calculating according to the first deformation value and the supporting force to obtain the first deformation coefficient of the target simulation supporting point includes:

[0013] Calculating the average of the plurality of support forces to obtain an average support force;

[0014] Calculating the mean of the first deformation values ​​to obtain a first deformation value mean;

[0015] A first deformation coefficient of the target simulation support point is obtained by calculating according to the support force mean value and the first deformation value mean value.

[0016] In some embodiments, the auxiliary support point further includes a second auxiliary support point, and the platform simulation structure further includes an associated simulation support point corresponding to the second auxiliary support point, and the calculation is performed according to the first deformation value, the first deformation coefficient, and the initial deformation value of the target simulation support point to obtain the target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero, including:

[0017] Acquire a second deformation value of the associated simulation support point under the action of the support force, and perform mean calculation on the second deformation values ​​to obtain a second deformation value mean;

[0018] Calculating according to the support force mean and the second deformation value mean to obtain a second deformation coefficient of the associated simulation support point;

[0019] Calculating according to the first deformation coefficient, the second deformation coefficient and the initial deformation value to obtain a target simulation deformation value of the target simulation support point;

[0020] A target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero is calculated.

[0021] In some embodiments, obtaining the target simulation positions corresponding to the target number of the target simulation support points on the platform simulation structure includes:

[0022] Acquire an initial deformation image of the platform simulation structure under the action of the fixed support point and gravity, wherein the initial deformation image includes an initial deformation value of each position on the platform simulation structure;

[0023] determining a plurality of target areas on the platform simulation structure based on the initial deformation image;

[0024] According to the initial deformation value of each position in the target area, a target number of the target simulation support points and corresponding target simulation positions in the target area are determined.

[0025] In some embodiments, after performing support compensation on the platform simulation structure according to the target support force and the target simulation position, the method further includes:

[0026] Acquire a deformation value of a target support point, wherein the target support point includes the fixed support point and the auxiliary support point;

[0027] Obtaining a deformation value between any two of the target support points;

[0028] Comparing the deformation value of the target support point with a preset first deformation value threshold, and comparing the deformation value between any two support points with a preset second deformation value threshold;

[0029] When the deformation value of the target support point is greater than the first deformation value threshold, or the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points of the platform simulation structure is increased.

[0030] To achieve the above-mentioned purpose, a second aspect of an embodiment of the present application provides a platform support compensation device, the platform support compensation device comprising:

[0031] A first simulation unit, configured to construct a platform simulation structure based on the support platform, wherein the platform simulation structure includes a target simulation support point corresponding to the first auxiliary support point;

[0032] A second simulation unit, used for simulating and applying a preset support force to the target simulation support point to obtain a first deformation value of the target simulation support point;

[0033] A first calculation unit, configured to calculate according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point;

[0034] An acquisition unit, used for acquiring target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure;

[0035] A second calculation unit is used to calculate according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero;

[0036] A compensation unit is used to perform support compensation on the platform simulation structure according to the target support force and the target simulation position.

[0037] To achieve the above-mentioned purpose, a third aspect of an embodiment of the present application provides a support platform, wherein a first surface of the support platform is used to place a material processing element, a second surface of the support platform is provided with fixed support points and auxiliary support points, the auxiliary support points include first auxiliary support points, a support force is applied to the fixed support points and the auxiliary support points to support the support platform, and the support platform further includes:

[0038] A controller is used to control the auxiliary support structure to apply the target support force to the auxiliary support point according to the target support force and the target actual position of the auxiliary support point, so as to support compensate the support platform, and the target support force is obtained by the platform support compensation method described in the first aspect.

[0039] In some embodiments, the auxiliary support structure comprises:

[0040] an auxiliary supporting member, configured to contact the second surface of the supporting platform to support the supporting platform;

[0041] A pressure sensor, used to detect the supporting force provided by the auxiliary supporting component to the supporting platform and output pressure value information;

[0042] An adjusting nut, one end of which is electrically connected to the controller, and the other end of which is connected to the auxiliary supporting component. The controller controls the adjusting nut to move toward or away from the supporting platform according to the target supporting force, so as to control the auxiliary supporting component to support and compensate the supporting platform.

[0043] To achieve the above objectives, the fourth aspect of an embodiment of the present application proposes an electronic device, which includes a memory and a processor, the memory stores a computer program, and the processor implements the method described in the first aspect when executing the computer program.

[0044] To achieve the above objectives, the fifth aspect of an embodiment of the present application proposes a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method described in the first aspect is implemented.

[0045] The platform support compensation method and device, support platform, electronic device and medium proposed in the present application, the method provided in the embodiment of the present application is applied to the support platform, the first surface of the support platform is used to place material processing elements, the second surface is provided with fixed support points and auxiliary support points, and the platform is supported by applying support forces to the fixed support points and the auxiliary support points. The method provided in the embodiment of the present application constructs a platform simulation structure based on the support platform, and the platform simulation structure includes target simulation support points corresponding to the auxiliary support points of the support platform; applies a preset support force to the target simulation support point to obtain a first deformation value of the target simulation support point; calculates according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point; obtains the target simulation position corresponding to the target number of target simulation support points on the platform simulation structure; calculates according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point to obtain the target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; and finally supports and compensates the platform simulation structure according to the target support force and the target simulation position.

[0046] In the embodiment of the present application, under the deadweight of the supporting platform, the target supporting force required to offset the deformation is obtained through simulation calculation by combining the deformation value and deformation coefficient of each auxiliary supporting point, so that an accurate supporting force value can be calculated; then the supporting force provided by each auxiliary supporting point is adjusted according to the calculated target supporting force, thereby offsetting the deformation at the auxiliary supporting point, minimizing the overall deformation of the platform and the deformation of a single supporting point, and ultimately improving the flatness of the supporting platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 is a schematic diagram of the structure of the support platform provided in the embodiment of the present application;

[0048] Figure 2 It is a schematic diagram of the deformation of a platform with three-point fixed support in the related art;

[0049] Figure 3 It is a schematic diagram of the support method provided in the embodiment of the present application;

[0050] Figure 4 It is a schematic diagram of a platform with additional auxiliary support in the related art;

[0051] Figure 5 is a schematic diagram of deformation of a platform for applying auxiliary supporting force in the related art;

[0052] Figure 6 is a flow chart of a platform support compensation method provided in an embodiment of the present application;

[0053] Figure 7 is a schematic diagram of the initial deformation of the platform simulation structure provided in an embodiment of the present application;

[0054] Figure 8 is a schematic diagram of target simulation support points provided in an embodiment of the present application;

[0055] Fig. 9 is a schematic diagram of simulating the support force of point D provided in an embodiment of the present application;

[0056] Fig.10 is a schematic structural diagram of a platform support compensation device provided in an embodiment of the present application;

[0057] Fig.11 is a schematic diagram of a spherical gasket support structure provided in an embodiment of the present application;

[0058] Fig.12 is a schematic diagram of an auxiliary support structure provided in an embodiment of the present application;

[0059] Fig.13 is a module schematic diagram of a control circuit provided in an embodiment of the present application;

[0060] Fig.14 It is a schematic diagram of the hardware structure of the electronic device provided in the embodiment of the present application.

[0061] Figure numbers: support platform 101, frame 102, fixed support point 301, auxiliary support point 302, spherical gasket support structure 1100, spherical gasket 1101, spherical contact surface 1102, support ring 1103, auxiliary support component 1201, pressure sensor 1202, adjusting nut 1203, locking screw 1204, sensor wiring jack 1205. DETAILED DESCRIPTION

[0062] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0063] It should be noted that, although the functional modules are divided in the device schematic diagram and the logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in a different order than the module division in the device or the order in the flowchart. The terms "first", "second", etc. in the specification, claims and the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence.

[0064] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein are only for the purpose of describing the embodiments of this application and are not intended to limit this application.

[0065] Before introducing the embodiments of the present application, the platform support compensation scheme in the prior art is first introduced. In semiconductor production testing, in order to better meet the needs of semiconductor production capacity, wafers are moving towards larger sizes (such as 12 inches). Therefore, the processing platform used to process and test wafers is also larger, and higher requirements are placed on the flatness of the processing platform. Please refer to Figure 1 , Figure 1 1 is a schematic diagram of the structure of the support platform provided in the embodiment of the present application. The semiconductor processing platform may include a support platform 101 and a frame 102, the frame 102 is used to carry the support platform 101, and the support platform 101 is used to carry processing materials (such as wafers).

[0066] In order to place the support platform 101 flatly on the rack 102, support points need to be set to support the platform. The load of a small platform is small, so it can be supported by three-point support. Since the deformation of a small platform is small, the deformation produced by three-point support is very small and can meet the flatness requirements of the platform. However, for a large platform, although the three-point support can fix the platform, the platform outside the support point will be significantly deformed due to the large span or cantilever, resulting in the large platform being unable to meet the flatness requirements during material production testing. Please refer to Figure 2 , Figure 2 This is a schematic diagram of the three-point fixed support in the related technology. It can be seen that the large platform will still produce obvious deformation under the three-point support, resulting in low flatness of the platform. Figure 2 A shows that when the support force applied by two of the three fixed support points is large, the two ends of the support platform will deform in the opposite direction. Figure 2 B shows that the support force exerted by the support point in the middle of the support platform among the three fixed support points is too large, resulting in reverse deformation in the middle of the support platform.

[0067] Based on this, in order to reduce the deformation of the platform, you can use a deformation-reducing structure, such as reinforcing ribs, etc., or you can increase the thickness of the platform to reduce the deformation. However, these two methods will increase the volume of the platform and increase the additional processing cost. In addition, you can also add some auxiliary support points based on the three-point fixed support. Please refer to Figure 3 , Figure 3 It is a schematic diagram of the support method provided in the embodiment of the present application. Figure 3 The method in the embodiment is to add three auxiliary support points on the basis of three fixed support points 301 to adjust the local deformation of the platform. When adjusting, the support force is first applied to the three fixed support points 301 for adjustment, and then the support force applied to the auxiliary support points is adjusted. Please refer to Figure 4 , Figure 4Schematic diagram of a platform with additional auxiliary support in the related art. Adding auxiliary support points to a large platform can reduce the deformation of the platform. Figure 2 For the deformed platform in A, please refer to Figure 4 A. When fixed support points are applied at both ends of the platform, an auxiliary support point is applied in the middle area between the two fixed support points to reduce the deformation in the middle of the platform. Figure 2 In the platform of B, a fixed support point is applied in the middle of the platform, but due to the excessive support force, the platform is obviously deformed. On this basis, please refer to Figure 4 B, Figure 4 In B, on the basis of a fixed support point in the middle, an auxiliary support point is added at each end of the platform to reduce the overall deformation of the platform.

[0068] However, in the related art, the support force applied by the auxiliary support points is adjusted based on human experience. If the applied support force is too small, the auxiliary support points cannot play a supporting role. If the applied support force is too large, the platform will be deformed in the opposite direction. Figure 5 , Figure 5 It is a schematic diagram of platform deformation for applying auxiliary supporting force in the related art. Figure 5 A shows a schematic diagram of the platform being deformed in the opposite direction due to the excessive support force applied by the auxiliary support points on both sides. Figure 5 B shows a schematic diagram showing that the supporting force applied by the auxiliary supporting point in the middle is too large, causing the platform to deform in the opposite direction.

[0069] Based on this, the embodiments of the present application provide a platform support compensation method and device, a support platform, an electronic device and a medium, which are intended to improve the accuracy of support compensation for the support platform 101, thereby improving the flatness of the platform. It should be noted that the platform support compensation method provided in the embodiments of the present application can be applied not only to processing platforms for producing and manufacturing processing materials (such as semiconductor materials, building materials or mechanical materials, etc.), but also to some building structures, such as beam structures (long-distance gantry guide rails, etc.), which are not limited here.

[0070] The platform support compensation method and device, support platform 101, electronic equipment and medium provided in the embodiments of the present application are specifically described through the following embodiments. First, the platform support compensation method in the embodiments of the present application is described.

[0071] The present application can be used in many general or special computer system environments or configurations. For example: personal computers, server computers, handheld or portable devices, tablet devices, multiprocessor systems, microprocessor-based systems, set-top boxes, programmable consumer electronics, network PCs, minicomputers, mainframe computers, distributed computing environments including any of the above systems or devices, etc. The present application can be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application can also be practiced in distributed computing environments, in which tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules can be located in local and remote computer storage media including storage devices.

[0072] Figure 6 is an optional flow chart of the platform support compensation method provided in the embodiment of the present application. Figure 6 The method may include but is not limited to steps 601 to 606:

[0073] Step 601, constructing a platform simulation structure based on a supporting platform;

[0074] Step 602, applying a preset support force to the target simulation support point to obtain a first deformation value of the target simulation support point;

[0075] Step 603, calculating according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point;

[0076] Step 604, obtaining target simulation positions corresponding to target simulation support points of a target number on the platform simulation structure;

[0077] Step 605, calculating according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero;

[0078] Step 606: Perform support compensation on the platform simulation structure according to the target support force and the target simulation position.

[0079] Specifically, the platform support compensation method provided in the embodiment of the present application is applied to the support platform 101, please refer to Figure 1The support platform 101 shown in . The support platform 101 includes a first surface and a second surface, the second surface being the opposite surface of the first surface. Specifically, the first surface may be an upper surface, and the first surface is used to carry material processing elements, such as semiconductor processing materials or building materials, etc., which are not limited here. The second surface may be a lower surface, and the second surface is provided with fixed support points 301 and auxiliary support points 302. Among them, the fixed support points 301 are three support points that are not in the same straight line, and are used to determine a plane. The three fixed support points 301 form a triangular structure, which can be an equilateral triangle or an irregular triangle. If it is an equilateral triangle, the center of gravity of the support platform 101 is close to the center of gravity of the triangle. Except for the fixed support points 301, the remaining support points are auxiliary support points 302.

[0080] In step 601 of some embodiments, the platform simulation structure can be constructed according to the simulation software, and the simulation software is not limited here. Figure 7 , Figure 7 is a schematic diagram of the initial deformation of the platform simulation structure provided in the embodiment of the present application. Figure 7 The figure shows the deformation diagram of the platform simulation structure under the action of three fixed support points 301 and the platform's own weight. The platform simulation structure may also include a target simulation support point corresponding to the first auxiliary support point 302. The target simulation support point refers to the auxiliary support point 302 simulated in the simulation environment. The number of target simulation support points can be one, three, or more. Please refer to Figure 8 , Figure 8 3 is a schematic diagram of the target simulation support points provided in the embodiment of the present application. Three target simulation support points are set in the platform simulation structure. Points A, B, and C are fixed support points 301, points D, E, and F are target simulation support points, and point G is the center of gravity of the platform simulation structure.

[0081] In step 602 of some embodiments, a preset support force is applied to the target simulation support point. In order to ensure the accuracy of the calculated support force value, there may be multiple preset support forces. Under the action of the applied support force, the target simulation support point will deform, and the first deformation value represents the deformation value corresponding to the target simulation support point itself when the support force is applied to the target simulation support point. For example, multiple preset support forces may be applied to point D, and point D may generate the first deformation value under the action of the support force; or multiple preset support forces may be applied to point E, and point E may generate the first deformation value under the action of the support force. For example, a support force F is applied to the target simulation support point D. D , where F D Includes multiple preset support forces, such as F D1 、F D2 、F D3 、F D4etc., support force F D1 The first deformation value of the corresponding target simulation support point D is expressed as y DD1 , support force F D2 The first deformation value of the corresponding target simulation support point D is expressed as y DD2 wait.

[0082] The first deformation value can be obtained from the simulation software. For example, by clicking a certain position point in the platform simulation structure, the first deformation value of the point can be read. In other embodiments, the deformation value of a certain area in the platform simulation structure can also be obtained. Please continue to refer to Figure 7 , Figure 7 The same color areas in the figure represent the same deformation. The deformation unit is mm. Other units can also be used. Under the action of gravity acceleration, red represents the maximum deformation, which can be 0.0044012mm, and the dark blue area is the area with the smallest deformation.

[0083] In step 603 of some embodiments, a first deformation coefficient of the target simulation support point is obtained by calculation based on the first deformation value of the target simulation support point and the corresponding support force that causes the deformation. The first deformation coefficient is used to characterize the relationship between the support force applied by the target simulation support point and the first deformation value generated by the target simulation support point itself, and is a linear slope calculated by the first deformation value and the support force. Step 603 may include but is not limited to the following steps:

[0084] Calculate the average of multiple support forces to obtain the average support force;

[0085] Calculating the mean of the first deformation values ​​to obtain the mean of the first deformation values;

[0086] The first deformation coefficient of the target simulation support point is obtained by calculating according to the mean value of the support force and the mean value of the first deformation value.

[0087] Specifically, the multiple support forces may be multiple support forces applied to a target simulation support point, and the corresponding support force averages are calculated based on these support forces. Each support force corresponds to a first deformation value, and the first deformation value average can be obtained based on these first deformation values.

[0088] For example, if n supporting forces are applied to the target simulation supporting point D in sequence, the first deformation coefficient of point D can be calculated by the following formula:

[0089]

[0090] Among them, k DD represents the support force applied to the target simulation support point D, the first deformation coefficient of point D, n represents the total number of support forces applied to the target simulation support point D, F Direpresents the i-th support force applied, represents the mean value of all support forces applied to point D, y DDi Indicates that a support force F is applied to point D Di When , the first deformation value of point D is, Represents the mean of all first deformation values ​​of point D, that is, the mean of the first deformation values ​​of point D.

[0091] In some other embodiments, the target simulation support points E and F can be calculated by the above method to obtain the corresponding k EE and k FF , which will not be elaborated here.

[0092] In some embodiments, the auxiliary support point 302 of the support platform 101 also includes a second auxiliary support point, and accordingly, the platform simulation structure also includes an associated simulation support point corresponding to the second auxiliary support point. For example, if the target simulation support point is point D, then point E and point F are associated simulation support points of the target simulation support point D; if the target simulation support point is point E, then point D and point F are associated simulation support points of the target simulation support point E, and the associated simulation support points will be introduced in detail later.

[0093] In step 604 of some embodiments, the target simulation position corresponding to the target number of target simulation support points on the platform simulation structure can be obtained. The target number is the number of set target simulation support points. The target simulation position can be obtained by clicking on the platform simulation structure to obtain specific coordinates. Multiple support forces can be applied to the target simulation support points at the target simulation position. Figure 8 , Figure 8 The red arrows in the figure can indicate the target simulation positions corresponding to points D, E, and F, and can also indicate the direction in which the supporting force is applied.

[0094] Step 604 includes but is not limited to the following steps:

[0095] Acquire an initial deformation image of the platform simulation structure under the action of fixed support points and gravity, wherein the initial deformation image includes an initial deformation value of each position on the platform simulation structure;

[0096] Determine a plurality of target areas on the platform simulation structure based on the initial deformation image;

[0097] According to the initial deformation value of each position in the target area, the target number of target simulation support points in the target area and the corresponding target simulation positions are determined.

[0098] Specifically, see Figure 7 , Figure 7The initial deformation image of the platform simulation structure under the action of the fixed support point 301 and the platform's own weight is shown. The initial deformation image includes the initial deformation value of each position on the platform simulation structure. For example, the initial deformation value of the target simulation support point D can be expressed as y 0D , the initial deformation value of the target simulation support point E can be expressed as y 0E , the initial deformation value of the target simulation support point F can be expressed as y 0F .

[0099] Furthermore, multiple target areas can be determined on the platform simulation structure based on the initial deformation image. The target area can represent an area with a larger initial deformation value on the platform simulation structure, such as a red area. Target simulation support points can be added in the red area with a larger span; the target area can also be an area where the overall deformation value exceeds a preset threshold. For each target area, the number of target simulation support points to be added can be determined based on the initial deformation value of each position point in the area, such as adding target simulation support points at two positions with a large difference in initial deformation values, or applying a target simulation support point at the position with the largest initial deformation value, or adding three target simulation support points that are not on the same straight line in a target area with a larger area. The number and position of the target simulation support points can be adaptively adjusted according to the deformation value of the platform simulation structure.

[0100] In step 605 of some embodiments, a calculation may be performed based on the first deformation value, the first deformation coefficient, and the initial deformation value of the target simulation support point to obtain the target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero. Specifically, step 605 may include but is not limited to the following steps:

[0101] Obtaining a second deformation value of the associated simulation support point under the action of the support force, and performing mean calculation on the second deformation values ​​to obtain a mean value of the second deformation values;

[0102] Calculate according to the mean value of the support force and the mean value of the second deformation value to obtain the second deformation coefficient of the associated simulation support point;

[0103] Calculating according to the first deformation coefficient, the second deformation coefficient and the initial deformation value to obtain a target simulation deformation value of the target simulation support point;

[0104] The target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero is calculated.

[0105] Specifically, the support force applied to each auxiliary support point 302 will affect the overall deformation value of the platform and the deformation values ​​of other auxiliary support points 302. Therefore, when a support force is applied to each target simulation support point, the second deformation value of the associated simulation support point will also be affected. The associated simulation support point is the other auxiliary support point affected except the target simulation support point where the support force is applied. The second deformation value represents the deformation value generated by the associated simulation support point when the support force is applied to the target simulation support point. The second deformation value can be directly obtained from the platform simulation structure. Please refer to Fig. 9 , is a schematic diagram of a platform simulation structure for applying a support force to point D provided in an embodiment of the present application. For example, multiple support forces F are applied to the target simulation support point D. D , the associated simulation support points E and F will also produce corresponding second deformation values. If the support force F is applied to point D D1 , then the second deformation value of point E is expressed as y DE1 , the second deformation value generated by point F is expressed as y DF1 If a support force F is applied to point E E2 , then the second deformation value of point D is expressed as y ED2 , the second deformation value of point F is expressed as y EF2 Taking three target simulation support points as an example, the support force is applied to point D, and the first deformation value of point D and the second deformation values ​​of E and F are shown in Table 1 below:

[0106] Table 1 Relationship between support force and first deformation value and second deformation value

[0107] <![CDATA[Preset support force F D > Target simulation support point D Related simulation support point E Associated simulation support point F <![CDATA[F D1 ]]> <![CDATA[y DD1 ]]> <![CDATA[y DE1 ]]> <![CDATA[y DF1 <!-- 8 -->]]> <![CDATA[F D2 ]]> <![CDATA[y DD2 ]]> <![CDATA[y DE2 ]]> <![CDATA[y DF2 ]]> <![CDATA[F D3 ]]> <![CDATA[y DD3 ]]> <![CDATA[y DE3 ]]> <![CDATA[y DF3 ]]> <![CDATA[F D4 ]]> <![CDATA[y DD4 ]]> <![CDATA[y DE4 ]]> <![CDATA[y DF4 ]]> ... ... ... ...

[0108] Similarly, when multiple supporting forces are applied to the target simulation support point E, point E will produce a corresponding first deformation value, and the associated simulation support points D and F will also produce corresponding second deformation values; when multiple supporting forces are applied to the target simulation support point F, point F will produce a corresponding first deformation value, and the associated simulation support points D and E will also produce corresponding second deformation values.

[0109] Furthermore, according to the data in Table 1, the average support force applied to point D can be calculated: Based on the calculated support force average and the second deformation values ​​of E and F, the first deformation coefficient k of point D is calculated. DD , and the corresponding second deformation coefficient k of the associated simulation support points E and F DE and k DF . Specifically, k DE The calculation formula is as follows:

[0110]

[0111] Among them, kDE represents the support force applied to the target simulation point D, and the second deformation coefficient of the associated simulation support point E, n represents the total number of support forces applied to the target simulation support point D, F Di represents the i-th support force applied, represents the mean value of all support forces applied to point D, y DEi Indicates that a support force F is applied to point D Di When , the second deformation value generated at point E is, It represents the mean of all the second deformation values ​​of point E when the support force is applied to point D, that is, the mean of the second deformation values ​​of point E.

[0112] Furthermore, k DF The calculation formula is as follows:

[0113]

[0114] Among them, k DF represents the second deformation coefficient of the associated simulation support point F when the support force is applied to the target simulation point D. n represents the total number of support forces applied to the target simulation support point D. F Di represents the i-th support force applied, represents the mean value of all support forces applied to point D, y DFi Indicates that a support force F is applied to point D Di When , the second deformation value generated at point F is, It represents the mean of all the second deformation values ​​of point F when the support force is applied to point D, that is, the mean of the second deformation values ​​of point F.

[0115] According to the calculation method of the first deformation coefficient and the second deformation coefficient described in the above steps, the deformation coefficients of the target simulation support point and the associated simulation support point can be calculated in sequence. For example, with point E as the target simulation support point, a support force F is applied. E When , a series of first deformation values ​​y of point E can be obtained EEi and a series of second deformation values ​​y of the associated simulation support points D and F EDi and EFi , and then calculate the first deformation coefficient k of point E EE , the second deformation coefficient k of point D ED and the second deformation coefficient k at point F EF .

[0116] For example, take point F as the target simulation support point and apply support force F F When , a series of first deformation values ​​y of point F can be obtained FFi and a series of second deformation values ​​y of the associated simulation support points D and E FDi and FEi , and then calculate the first deformation coefficient k of point FFF , the second deformation coefficient k of point D FD and the second deformation coefficient k of point E FE Taking the three target simulation support points D, E, and F as an example, the corresponding relationship between the deformation coefficient, support force, and initial deformation value is shown in Table 2 below:

[0117] Table 2 Deformation coefficients and corresponding support forces and initial deformation values ​​of D, E, and F

[0118] Support D E F 0 <![CDATA[y 0D ]]> <![CDATA[y 0E ]]> <![CDATA[y 0F ]]> <![CDATA[F D ]]> <![CDATA[k DD ]]> <![CDATA[k DE ]]> <![CDATA[k EF <!-- 9 -->]]> <![CDATA[F E ]]> <![CDATA[k DD ]]> <![CDATA[k DD ]]> <![CDATA[k EF ]]> <![CDATA[F F ]]> <![CDATA[k FD ]]> <![CDATA[k FE ]]> <![CDATA[k FF ]]>

[0119] Among them, y 0D ,y 0E ,y 0F They represent the initial deformation values ​​of D, E, and F when the applied support force is 0 and there are only fixed support points and the platform's own weight. D Indicates that point D is used as the target simulation support point and multiple support forces are applied to point D; F E Indicates that point E is used as the target simulation support point and multiple support forces are applied to point E; F F It indicates that point F is used as the target simulation support point, and multiple support forces are applied to point F. The remaining parameters have been introduced by way of example in the above steps, and those skilled in the art can deduce the meaning of the remaining parameters by the same logic, which will not be described here.

[0120] Further, how to solve the target support force will be introduced in detail. Since the deformation value generated by multiple support forces on a target simulation support point is the same as the deformation value generated by each support force acting on the target simulation support point alone, the target simulation deformation value formula of any target simulation support point can be obtained. For example, F D 、F E 、F F The total deformation produced at point D can be calculated by F D The deformation value of point D plus F E The deformation value produced by point D, plus F F The sum of the deformation values ​​produced at point D.

[0121] Specifically, taking the target simulation support point as point D as an example, the target simulation deformation value formula of point D is as follows:

[0122] y D =k DD F D +k ED F E +k FD F F +y 0D

[0123] Among them, yD Represents the target simulation deformation value of point D. The other parameters in the formula have been introduced in the previous steps and will not be repeated here.

[0124] Similarly, taking point E as the target simulation support point, the target simulation deformation value y at point E is E The formula is as follows:

[0125] y E =k DE F D +k EE F E +k FE F F +y 0E

[0126] For another example, the target simulation support point is point F, and the target simulation deformation value y of point F is F The formula is as follows:

[0127] y F =k DF F D +k EF F E +k FF F F +y 0F

[0128] Furthermore, the target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero can be calculated. D When it is zero, the target support force applied to the target simulation support point D can be calculated by the following formula:

[0129] k DD F D +k ED F E +k FD F F =-y 0D

[0130] Similarly, the target support force applied to point E and point F can also be obtained through a similar calculation formula. The target support force applied by the calculated target simulation support point makes the simulation deformation value of the platform simulation structure zero.

[0131] In some embodiments, the formula for calculating the target support force can also be expressed by the following matrix:

[0132] KF=Y

[0133] Among them, the corresponding support force at different target simulation support points can be calculated using the equation group. In the above formula, K and Y are known. Specifically, K can be represented by the following matrix:

[0134]

[0135] F can be represented by the following matrix:

[0136]

[0137] Y can be represented by the following matrix:

[0138]

[0139] Under the action of the target support force, the deformation value of each support point of the support platform is close to 0, so that the overall deformation of the support platform 101 is minimized. In order to ensure that the overall deformation of the large platform is minimized, multiple support points can be used to upgrade the formula KF=Y. If the target simulation support points are i, K can be represented by the following general matrix:

[0140]

[0141] Among them, k 11 Indicates that the support force is applied to the first target simulation support point, and the first deformation coefficient of the target simulation support point, k 1i It represents the support force applied to the first target simulation support point and the second deformation coefficient of the i-th associated simulation support point. The same is true for other parameters in the matrix.

[0142] F can be represented by the following general matrix:

[0143]

[0144] Among them, F i It represents the support force applied to the i-th target simulation support point. Y can be represented by the following general matrix

[0145]

[0146] Among them, y 0i It represents the initial deformation value of the i-th target simulation support point, and the other parameters are similar.

[0147] The aforementioned steps 601 to 605 are target support forces applied to each target simulation support point based on the simulation structure calculation. In step 606 of some embodiments, support compensation can be performed on the platform simulation structure based on the target support force and the target simulation position. On this basis, the support force obtained by simulation calculation can be applied to the corresponding first auxiliary support point of the support platform and its corresponding actual position to perform support compensation on the support platform.

[0148] In some embodiments, after the platform simulation structure is supported and compensated according to the target support force and the target simulation position, the method provided in the embodiment of the present application further includes:

[0149] Obtain the deformation value of the target support point;

[0150] Get the deformation value between any two target support points;

[0151] Comparing the deformation value of the target support point with a preset first deformation value threshold, and comparing the deformation value between any two support points with a preset second deformation value threshold;

[0152] When the deformation value of the target support point is greater than the first deformation value threshold, or the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points of the platform simulation structure is increased.

[0153] Specifically, the deformation value of a certain support point in the simulation structure can be obtained and compared with a preset first deformation value threshold. If the deformation value of a certain target support point is greater than the first deformation value threshold, the number of target simulation support points can be increased in the area near the support point in the platform simulation structure, and then the simulation calculation as described in the above steps can be performed to fine-tune the support force to further reduce the deformation of the platform and improve the flatness of the platform.

[0154] In other embodiments, the target support point includes a fixed support point 301 and an auxiliary support point 302, and any two target support points may be a fixed support point 301 and an auxiliary support point 302, or a fixed support point 301 and a fixed support point 301, or an auxiliary support point 302 and an auxiliary support point 302. For example, in the platform simulation structure, the deformation value between the fixed support point A and the target simulation support point E may be obtained, and the deformation value between the target simulation support points D and E may also be obtained. According to the obtained deformation value between any two support points, the deformation value is compared with the preset second deformation value threshold. If the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points may be increased in the area between the two support points in the platform simulation structure, and then the simulation calculation as described in the above steps may be performed to further reduce the deformation of the platform.

[0155] In addition, the overall deformation image of the platform after the calculated target support force is applied to the platform simulation structure can be obtained, such as Figure 7 If there is still a red area in the image, it means that the support platform 101 still has a large deformation, which may be caused by the insufficient number of auxiliary support points 302. At this time, it is necessary to increase the number of auxiliary support points 302 and perform simulation calculation again.

[0156] See also Fig.10 The embodiment of the present application further provides a platform support compensation device, which can implement the above platform support compensation method, and the device includes:

[0157] The first simulation unit 1010 is used to construct a platform simulation structure based on the support platform, and the platform simulation structure includes a target simulation support point corresponding to the first auxiliary support point; the second simulation unit 1020 is used to simulate and apply a preset support force to the target simulation support point to obtain a first deformation value of the target simulation support point; the first calculation unit 1030 is used to calculate according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point; the acquisition unit 1040 is used to obtain a target simulation position corresponding to a target number of target simulation support points on the platform simulation structure; the second calculation unit 1050 is used to calculate according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; the compensation unit 1060 is used to perform support compensation on the platform simulation structure according to the target support force and the target simulation position.

[0158] The specific implementation of the platform support compensation device is basically the same as the specific implementation of the above-mentioned platform support compensation method, and will not be repeated here.

[0159] The present application also provides a support platform 101, please refer to Figure 1 , the first surface of the support platform 101 is used to place the material processing element, the second surface of the support platform is provided with a fixed support point 301 and an auxiliary support point 302, the auxiliary support point 302 includes a first auxiliary support point, and a supporting force is applied to the fixed support point 301 and the auxiliary support point 302 to support the support platform 101. Among them, the fixed support point 301 applies a supporting force to the fixed support point 301 through the spherical gasket support structure 1100, and taking the fixed support point 301 of the platform simulation structure as A, B, and C as an example, the spherical gasket support structure 1100 applies a supporting force to the actual position of the fixed support point 301 of the support platform 101.

[0160] Please refer to Fig.11 , Fig.11It is a schematic diagram of the spherical gasket support structure provided in an embodiment of the present application. The spherical gasket support structure 1100 includes a spherical gasket 1101, a spherical contact surface 1102 and a support ring 1103. Before adjusting the auxiliary support points, it is necessary to first fix the three-point support, and use the locking screws to lock the spherical gasket support structure 1100 of the three-point support points. Among them, the spherical gasket 1101 is used to contact the support platform 101 to support the support platform 101. After the support force applied by the spherical gasket 1101 reaches the target support force, it is locked by a screw. Due to the spherical effect, the spherical gasket 1101 rotates a small amount so that the upper surface of the gasket contacts the platform with maximum adaptability, so that the support platform 101 will not produce new deformation due to locking.

[0161] In some embodiments, the support platform 101 also includes a controller, and the controller 1303 can automatically control the aforementioned spherical gasket support structure 1100 to support the fixed support point 301, and can also automatically control the auxiliary support structure to apply the target support force to the auxiliary support point 302 according to the target support force and the target actual position of the auxiliary support point 302 on the support platform 101, so as to support and compensate the support platform 101. Among them, the auxiliary support structure can be adjusted by a motor, and the target support force can be calculated by the aforementioned steps. The embodiment of the present application can accurately calculate the auxiliary support force required by the platform according to the deformation of the platform without increasing the thickness of the support platform 101, thereby reducing the manufacturing cost of the platform and improving the flatness of the platform.

[0162] In some embodiments, please refer to Fig.12 , Fig.12 is a schematic diagram of the structure of the auxiliary support structure provided in the embodiment of the present application, wherein: Fig.12 The left figure in the figure is a schematic diagram of the overall structure of the auxiliary support structure, and the right figure is a schematic diagram of the disassembled structure of the auxiliary support structure. The auxiliary support structure may include an auxiliary support component 1201, a pressure sensor 1202, an adjustment nut 1203, a locking screw 1204, and a sensor wiring jack 1205. Among them, the auxiliary support component 1201 may be an auxiliary support nut, such as a special-shaped custom nut, and the auxiliary support component 1201 is used to contact the second surface of the platform to support the support platform 101. The adjusting nut 1203 can be threadedly connected to the auxiliary supporting component 1201, the upper end of the adjusting nut 1203 contacts the supporting platform 101, and the other end of the adjusting nut 1203 can be electrically connected to the controller 1303. The controller 1303 controls the adjusting nut 1203 to move in a direction close to the supporting platform 101 according to the target supporting force to push the platform upward and apply a supporting force to the supporting platform 101; the controller 1303 can also control the adjusting nut 1203 to move in a direction away from the supporting platform 101 according to the target supporting force to reduce the supporting force applied to the supporting platform 101 and prevent over-adjustment.

[0163] Furthermore, in the process of applying the supporting force, the supporting platform 101 generates downward pressure on the adjusting nut 1203, and the pressure is transmitted to the auxiliary supporting component 1201, and then transmitted to the pressure sensor 1202. The lower end surface of the pressure sensor 1202 is connected to the frame 102 of the supporting platform 101, and the applied supporting force is controlled by the value displayed by the pressure sensor 1202. When the adjusting nut 1203 is adjusted, the adjusting nut 1203 is locked using the locking screw 1204 to fix the position of the adjusting nut 1203 and the auxiliary supporting component 1201. The pressure sensor 1202 also includes a sensor wiring jack 1205, which can be used to access the controller to input the acquired pressure value into the controller. It can be understood that if there are multiple auxiliary support points 302, there are also multiple auxiliary supporting structures, and there can also be multiple pressure sensors 1202. By setting the pressure sensor 1202 in the auxiliary supporting structure, the pressure can be monitored in real time and automatically adjusted in time.

[0164] In some embodiments, see Fig.13 , Fig.13 1300 is a schematic diagram of a module of a control circuit provided in an embodiment of the present application. Specifically, the control circuit 1300 may include a data input module 1301, a data processing center 1302, a controller 1303, a display module 1304, an audible and visual alarm module 1305, and a data storage module 1306. Among them, the data input module 1301 is used to input the target support force of the auxiliary support point calculated in the above steps into the data processing center 1302. The data processing center 1302 can be a single-chip microcomputer, a computer, a processor based on a reduced instruction set computing architecture (Advanced RISC Machines, ARM), etc., which is not limited here. The controller 1303 is the controller described in the above steps, which is used to connect with the pressure sensor 1202 in the auxiliary support structure, obtain the pressure value of the auxiliary support point 302, and input the pressure value into the data processing center 1302. The controller 1303 is also used to control the auxiliary support structure to support and compensate the support platform 101 according to the preset target support force. The data processing center 1302 can compare the obtained pressure value with the preset target support force, and display the obtained pressure value through the display module 1304 for the convenience of the staff to view. If the pressure value exceeds the preset pressure value range, the data processing center 1302 can also issue an alarm through the sound and light alarm module 1305 to remind the staff, and can also save the preset pressure value threshold and the adjusted pressure data and support force data to the data storage module 1306 for subsequent query. The control circuit 1300 provided in the embodiment of the present application can improve the convenience of supporting force adjustment and automatically adjust the support compensation process according to the target supporting force and the obtained pressure value.

[0165] The embodiment of the present application also provides an electronic device, the electronic device includes a memory and a processor, the memory stores a computer program, and the processor implements the above platform support compensation method when executing the computer program. The electronic device can be any smart terminal including a tablet computer, a car computer, etc.

[0166] See also Fig.14 , Fig.14 The hardware structure of an electronic device of another embodiment is illustrated, and the electronic device includes:

[0167] The processor 1401 may be implemented by a general-purpose central processing unit (CPU), a microprocessor, an application-specific integrated circuit (ASIC), or one or more integrated circuits, and is used to execute relevant programs to implement the technical solutions provided in the embodiments of the present application;

[0168] The memory 1402 can be implemented in the form of a read-only memory (ROM), a static storage device, a dynamic storage device, or a random access memory (RAM). The memory 1402 can store an operating system and other applications. When the technical solution provided in the embodiments of this specification is implemented by software or firmware, the relevant program code is stored in the memory 1402, and the processor 1401 calls and executes the platform support compensation method of the embodiments of this application;

[0169] Input / output interface 1403, used to implement information input and output;

[0170] The communication interface 1404 is used to realize the communication interaction between the device and other devices. The communication can be realized through a wired manner (such as USB, network cable, etc.) or a wireless manner (such as mobile network, WIFI, Bluetooth, etc.);

[0171] A bus 1405 that transmits information between the various components of the device (e.g., the processor 1401, the memory 1402, the input / output interface 1403, and the communication interface 1404);

[0172] The processor 1401 , the memory 1402 , the input / output interface 1403 and the communication interface 1404 are connected to each other in communication within the device via a bus 1405 .

[0173] An embodiment of the present application also provides a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, the above-mentioned platform support compensation method is implemented.

[0174] The memory, as a non-transient computer-readable storage medium, can be used to store non-transient software programs and non-transient computer executable programs. In addition, the memory may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory may optionally include a memory remotely disposed relative to the processor, and these remote memories may be connected to the processor via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0175] The embodiments described in the embodiments of the present application are intended to more clearly illustrate the technical solutions of the embodiments of the present application and do not constitute a limitation on the technical solutions provided in the embodiments of the present application. Those skilled in the art will appreciate that with the evolution of technology and the emergence of new application scenarios, the technical solutions provided in the embodiments of the present application are also applicable to similar technical problems.

[0176] Those skilled in the art will appreciate that the technical solutions shown in the figures do not constitute a limitation on the embodiments of the present application, and may include more or fewer steps than shown in the figures, or a combination of certain steps, or different steps.

[0177] The device embodiments described above are merely illustrative, and the units described as separate components may or may not be physically separated, that is, they may be located in one place or distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0178] Those skilled in the art will appreciate that all or some of the steps in the methods disclosed above, and the functional modules / units in the systems and devices may be implemented as software, firmware, hardware, or a suitable combination thereof.

[0179] The terms "first", "second", "third", "fourth", etc. (if any) in the specification of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0180] It should be understood that in the present application, "at least one (item)" means one or more, and "plurality" means two or more. "And / or" is used to describe the association relationship of associated objects, indicating that three relationships may exist. For example, "A and / or B" can mean: only A exists, only B exists, and A and B exist at the same time, where A and B can be singular or plural. The character " / " generally indicates that the objects associated before and after are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can mean: a, b, c, "a and b", "a and c", "b and c", or "a and b and c", where a, b, c can be single or multiple.

[0181] In the several embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the above units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0182] The units described above as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0183] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0184] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including multiple instructions to enable a computer device (which can be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of various embodiments of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (Read-Only Memory, referred to as ROM), random access memory (Random Access Memory, referred to as RAM), disk or optical disk and other media that can store programs.

[0185] The preferred embodiments of the present invention are described above with reference to the accompanying drawings, but the scope of the rights of the present invention is not limited thereto. Any modification, equivalent substitution and improvement made by a person skilled in the art without departing from the scope and essence of the present invention should be within the scope of the rights of the present invention.

Claims

1. A platform support compensation method, It is characterized in that The platform support compensation method is applied to a support platform, wherein a first surface of the support platform is used to place a material processing element, a second surface of the support platform is provided with a fixed support point and an auxiliary support point, the second surface is an opposite surface of the first surface, the auxiliary support point includes a first auxiliary support point, and a support force is applied to the fixed support point and the auxiliary support point to support the support platform, the method comprising: Building a platform simulation structure based on the support platform, the platform simulation structure including a target simulation support point corresponding to the first auxiliary support point; Applying a preset support force to the target simulation support point in a simulated manner to obtain a first deformation value of the target simulation support point; Calculating according to the first deformation value and the supporting force to obtain a first deformation coefficient of the target simulation supporting point; Obtain target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure; Calculating according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point, to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; Support compensation is performed on the platform simulation structure according to the target support force and the target simulation position.

2. The method according to claim 1, It is characterized in that The calculating according to the first deformation value and the supporting force to obtain the first deformation coefficient of the target simulation supporting point includes: Calculating the average of the plurality of support forces to obtain an average support force; Calculating the mean of the first deformation values ​​to obtain a first deformation value mean; A first deformation coefficient of the target simulation support point is obtained by calculating according to the support force mean value and the first deformation value mean value.

3. The method according to claim 2, It is characterized in that The auxiliary support point further includes a second auxiliary support point, the platform simulation structure further includes an associated simulation support point corresponding to the second auxiliary support point, and the calculation is performed according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero, including: Acquire a second deformation value of the associated simulation support point under the action of the support force, and perform mean calculation on the second deformation values ​​to obtain a second deformation value mean; Calculating according to the support force mean and the second deformation value mean to obtain a second deformation coefficient of the associated simulation support point; Calculating according to the first deformation coefficient, the second deformation coefficient and the initial deformation value to obtain a target simulation deformation value of the target simulation support point; A target support force applied to the target simulation support point when the target simulation deformation value of the target simulation support point is zero is calculated.

4. The method according to claim 1, It is characterized in that The step of obtaining target simulation positions corresponding to the target number of target simulation support points on the platform simulation structure includes: Acquire an initial deformation image of the platform simulation structure under the action of the fixed support point and gravity, wherein the initial deformation image includes an initial deformation value of each position on the platform simulation structure; determining a plurality of target areas on the platform simulation structure based on the initial deformation image; According to the initial deformation value of each position in the target area, a target number of the target simulation support points and corresponding target simulation positions in the target area are determined.

5. The method according to claim 1, It is characterized in that After performing support compensation on the platform simulation structure according to the target support force and the target simulation position, the method further includes: Acquire a deformation value of a target support point, wherein the target support point includes the fixed support point and the auxiliary support point; Obtaining a deformation value between any two of the target support points; Comparing the deformation value of the target support point with a preset first deformation value threshold, and comparing the deformation value between any two support points with a preset second deformation value threshold; When the deformation value of the target support point is greater than the first deformation value threshold, or the deformation value between any two support points is greater than the second deformation value threshold, the number of target simulation support points of the platform simulation structure is increased.

6. A platform support compensation device, It is characterized in that The platform support compensation device comprises: A first simulation unit, configured to construct a platform simulation structure based on the support platform, wherein the platform simulation structure includes a target simulation support point corresponding to the first auxiliary support point; A second simulation unit, used for simulating and applying a preset support force to the target simulation support point to obtain a first deformation value of the target simulation support point; A first calculation unit, configured to calculate according to the first deformation value and the support force to obtain a first deformation coefficient of the target simulation support point; An acquisition unit, used for acquiring target simulation positions corresponding to a target number of target simulation support points on the platform simulation structure; A second calculation unit is used to calculate according to the first deformation value, the first deformation coefficient and the initial deformation value of the target simulation support point to obtain a target support force applied to the target simulation support point when the simulation deformation value of the platform simulation structure is zero; A compensation unit is used to perform support compensation on the platform simulation structure according to the target support force and the target simulation position.

7. A support platform, It is characterized in that The first surface of the support platform is used to place the material processing element, the second surface of the support platform is provided with a fixed support point and an auxiliary support point, the auxiliary support point includes a first auxiliary support point, and a supporting force is applied to the fixed support point and the auxiliary support point to support the support platform, and the support platform also includes: A controller is used to control the auxiliary support structure to apply the target support force to the auxiliary support point according to the target support force and the target actual position of the auxiliary support point, so as to support and compensate the support platform, and the target support force is obtained by the platform support compensation method described in any one of claims 1 to 5.

8. The method according to claim 7, It is characterized in that The auxiliary support structure comprises: an auxiliary supporting member, configured to contact the second surface of the supporting platform to support the supporting platform; A pressure sensor, used to detect the supporting force provided by the auxiliary supporting component to the supporting platform and output pressure value information; An adjusting nut, one end of which is electrically connected to the controller, and the other end of which is connected to the auxiliary supporting component. The controller controls the adjusting nut to move toward or away from the supporting platform according to the target supporting force, so as to control the auxiliary supporting component to support and compensate the supporting platform.

9. An electronic device, It is characterized in that The electronic device comprises a memory and a processor, the memory stores a computer program, and the processor implements the platform support compensation method according to any one of claims 1 to 5 when executing the computer program.

10. A computer-readable storage medium storing a computer program. It is characterized in that When the computer program is executed by a processor, the platform support compensation method according to any one of claims 1 to 5 is implemented.

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