Microwave plasma chamber structure

Abstract

The invention discloses a microwave plasma cavity structure which comprises a cavity and a buffer assembly arranged at the top end of the cavity. A pressure relief assembly is arranged at the top end of the buffer assembly, the pressure relief assembly closes a flow guide groove communicated with the buffer assembly through a movable assembly, the movable assembly moves along the straight cylinder and enables the buffer assembly to be communicated with the cavity through the flow guide groove, the pressure in the cavity is released, and the effect of adjusting the pressure in the cavity is achieved; the movable assembly drives the shielding curtain to move along the straight cylinder in a fixed mode through the linkage assembly connected with the bottom end of the movable assembly. According to the invention, the buffer assembly is used as the maximum compression value of the expansion pressure in the cavity, the substances which are less than or equal to the maximum compression value are subjected to normal experiment steps, the substances which exceed the maximum compression value of the cavity are released, and the expansion force in the inner cylinder is reduced and released in a manner of blocking through the shielding curtain. The overload protection effect is achieved, and the phenomenon of overload deformation of the inner cylinder is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of microwave plasma reaction, and in particular to a microwave plasma chamber structure. Background Art

[0002] Microwave plasma is a type of plasma formed by ionizing a precursor gas using microwave energy. It has no electrode discharge pollution and the plasma density is continuously controllable; therefore, it is widely used.

[0003] For example, the Chinese patent with publication number CN110913556A and titled "A Microwave Plasma Reaction Device" has a reaction chamber with an opening at the bottom for transmitting microwaves; a coaxial waveguide connected to the bottom opening of the reaction chamber for transmitting microwaves into the reaction chamber; a circular antenna for transmitting microwaves into the reaction chamber, a recess on the upper surface of the antenna for better focusing the microwaves, and the bottom of the recess is also used as a base; a substrate is located above the base; the antenna part is combined with the reaction chamber to clamp the dielectric window, and the dielectric window is completely isolated from the plasma, which protects the dielectric window from being etched by the plasma; a microwave reflector with adjustable height is provided on the upper part of the reaction chamber for optimizing the distribution of plasma inside the reaction chamber; the device has a simple structure and is easy to adjust, and is suitable for the deposition of high-quality diamond materials; the device cannot be unloaded after being overloaded, resulting in deformation of the reaction chamber.

[0004] The disadvantage of the prior art is that, during the reaction of the substance in the reaction chamber, overheating easily generates expansion pressure, and the expansion pressure of the cavity has a rated value. When overloaded, the expansion pressure cannot be released, and the unloading process cannot be performed after overload, resulting in expansion deformation of the reaction chamber. Summary of the invention

[0005] The object of the present invention is to provide a microwave plasma chamber structure, which uses a buffer component as the maximum pressure value of the expansion pressure in the cavity, performs normal experimental steps on materials that are less than or equal to the maximum pressure value, and reduces the release rate of materials that exceed the maximum pressure value of the cavity by blocking with a shielding curtain, and releases the expansion force in the inner cylinder, thereby achieving an overload protection effect; reducing the phenomenon of overload deformation of the inner cylinder.

[0006] In order to achieve the above-mentioned object, the present invention adopts the following technical scheme: a microwave plasma chamber structure, including a cavity and a buffer component provided at the top of the cavity;

[0007] The top of the buffer component is provided with a pressure relief component, and the pressure relief component closes the guide groove connected with the buffer component through the movable component, and the movable component has two strokes:

[0008] In the first stroke, the movable component moves along the straight cylinder and connects the buffer component with the cavity through the guide groove, thereby releasing the pressure in the cavity and regulating the pressure in the cavity;

[0009] In the second stroke, the movable component drives the shielding curtain to move along the straight tube through the linkage component connected to the bottom end, and the shielding curtain moves from between the outer shell and the inner tube to the inner tube through the guide plate, and the shielding curtain blocks the continuous heating and pressurization of the coil disk; the movable component moves along the straight tube and is connected with the air-permeable ring through the pressure relief groove, so as to release the continuous heating and pressurization in the cavity;

[0010] As a further description of the above technical solution:

[0011] The buffer assembly includes a connecting cover, and the connecting cover is fixedly connected to the inner cylinder, the top of the connecting cover is fixedly connected to the cylinder wall, the outer side of the cylinder wall is fixedly connected to the buffer cylinder, a buffer cavity is opened in the buffer cylinder, and the buffer cavity is connected to the inner cylinder through a guide groove.

[0012] As a further description of the above technical solution:

[0013] A piston ring is slidably provided in the buffer cavity, a connecting rod is fixedly connected to the top of the piston ring, the connecting rod passes through the buffer cavity and is connected to a top plate, a supporting spring is fixedly connected to the bottom end of the top plate, and one end of the supporting spring away from the top plate is fixed on the buffer cylinder.

[0014] As a further description of the above technical solution:

[0015] The pressure relief assembly includes a straight cylinder, the bottom end of which is fixedly connected to the cylinder wall, double rifling is provided in the straight cylinder, a movable assembly is movably provided in the straight cylinder, a breathable cover is fixedly connected to the top end of the straight cylinder, and a breathable ring is provided at one end of the straight cylinder close to the breathable cover.

[0016] As a further description of the above technical solution:

[0017] The movable assembly includes a movable block, the top of which is symmetrically fixedly connected to a limit block, and the two limit blocks are adapted to the double rifling. A pressure relief groove is provided on the circumference of the movable block, and a bottom groove is provided at the bottom end of the movable block, and a connecting rope is provided in the bottom groove.

[0018] As a further description of the above technical solution:

[0019] Guide grooves are symmetrically provided at both ends of the shell, a movable ring is slidably provided in the guide groove, a shielding curtain is fixedly connected to one end of the movable ring, and a lever is fixedly connected to the other end of the movable ring. A limiting groove is connected to one end of the shell close to the guide groove, and a lever is movably provided in the limiting groove.

[0020] As a further description of the above technical solution:

[0021] The bottom end of the inner cylinder is fixedly connected with a guide plate, two ends of the inner cylinder are symmetrically provided with slide grooves, a sliding ring is slidably connected in the slide groove, one end of the sliding ring is fixedly connected with a slider, and the slider is slidably arranged in the slide groove.

[0022] As a further description of the above technical solution:

[0023] The linkage assembly comprises a connecting rope, the top end of which is fixedly connected to a movable assembly, the bottom end of which is fixedly connected to a sliding ring, and one end of the connecting rope close to the buffer assembly is provided with a guide rod, which is fixed on the inner cylinder.

[0024] As a further description of the above technical solution:

[0025] It also includes a connecting piece, which includes a U-shaped block. One end of the U-shaped block is provided with an internal thread, and the other end of the U-shaped block is provided with a thread groove, and the thread groove is threadedly connected to the shell.

[0026] As a further description of the above technical solution:

[0027] It also includes a bearing component, which includes a tray, a support rod is fixedly connected to the top of the tray, a sealing plate is passed through the top of the support, a threaded block is fixedly connected to the top of the sealing plate, and the threaded block is threadedly connected to the internal thread, a groove is opened at the top of the threaded block, and a bearing plate is arranged in the groove, and the bearing plate is fixed on the support rod.

[0028] The present invention provides a microwave plasma chamber structure, which has the following beneficial effects:

[0029] In the present invention, the buffer component is used as the maximum pressure value of the expansion pressure in the cavity, and the material that is less than the maximum pressure value or equal to the maximum pressure value is subjected to normal experimental steps. The material that exceeds the maximum pressure value of the cavity is released at a speed, and the expansion force in the inner tube is reduced and released by blocking with a shielding curtain, thereby achieving an overload protection effect and reducing the phenomenon of overload deformation of the inner tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic diagram of a microwave plasma chamber structure proposed by the present invention;

[0031] Figure 2 It is a schematic diagram of the structure of the coil disk in the present invention;

[0032] Figure 3 It is a structural schematic diagram of the inner cylinder in the present invention;

[0033] Figure 4 It is a structural schematic diagram of the connecting member in the present invention;

[0034] Figure 5 For the present invention Figure 4 Schematic diagram of the local structure at A in the middle;

[0035] Figure 6 For the present invention Figure 4 Schematic diagram of the local structure at B in the middle;

[0036] Figure 7 For the present invention Figure 4 Schematic diagram of the local structure at C in the middle;

[0037] Figure 8 It is a schematic diagram of the structure of the buffer assembly in the present invention;

[0038] Fig. 9 For the present invention Figure 8 Schematic diagram of the local structure at D in the middle;

[0039] Fig.10 It is a structural schematic diagram of the load-bearing component in the present invention.

[0040] Legend: 1. Cavity; 11. Shell; 111. Guide groove; 112. Limiting groove; 12. Inner cylinder; 121. Slide groove; 13. Coil disk; 14. Guide plate; 15. Shielding curtain; 16. Moving ring; 161. Push rod; 2. Buffer assembly; 21. Connecting cover; 22. Cylinder wall; 23. Buffer cylinder; 231. Buffer cavity; 232. Breathing groove; 24. Piston ring; 25. Connecting rod; 26. Top plate; 27. Support spring; 28. Guide groove; 3. Pressure relief assembly; 31. Straight cylinder; 311. Double rifling; 312. Breathing ring; 32. Movable assembly; 321. Movable block; 322. Bottom groove; 323. Pressure relief groove; 324. Limit block; 33. Breathing cover; 4. Connector; 41. U-shaped block; 42. Internal thread; 43. Thread groove; 5. Load-bearing assembly; 51. Tray; 52. Support rod; 53. Load-bearing plate; 54. Groove; 55. Threaded block; 56. Sealing plate; 6. Linking assembly; 61. Connecting rope; 62. Guide rod; 63. Sliding ring; 64. Sliding block. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0042] Reference Figure 1-10, a microwave plasma chamber structure, comprising a cavity 1 and a buffer component 2 provided at the top of the cavity 1; a pressure relief component 3 is provided at the top of the buffer component 2, and the pressure relief component 3 closes the guide groove 28 connected to the buffer component 2 through a movable component 32, and the movable component 32 has two strokes: in the first stroke, the movable component 32 moves along the straight cylinder 31 and connects the buffer component 2 with the cavity 1 through the guide groove 28, releases the pressure in the cavity 1 and has the effect of regulating the pressure in the cavity 1; in the second stroke, the movable component 32 drives the shielding curtain 15 to move along the straight cylinder 31 through the linkage component 6 connected to the bottom end, and the shielding curtain 15 moves from the outer shell 11 and the inner cylinder 12 through the guide plate 14 to the inner cylinder 12, and the shielding curtain 15 blocks the continuous heating and pressurization of the coil disk 13; the movable component 32 moves along the straight cylinder 31 and communicates with the air permeable ring 312 through the pressure relief groove 323, so as to release the continuous heating and pressurization in the cavity 1;

[0043] Specifically, the cavity 1 is composed of an outer shell 11 and an inner cylinder 12, and a gap is left between the outer shell 11 and the inner cylinder 12 for placing the coil disk 13 and the shielding curtain 15. The shielding curtain 15 is made of a metal material that can block the coil disk 13 from releasing energy. The buffer component 2 fixedly connected to the top of the cavity 1 moves along the straight cylinder 31 through the movable component 32 under the support of the expansion force of the internal pressure of the cavity 1, and the guide groove 28 of the movable component 32 is linked with the buffer component 2, so that the excessive pressure generated in the cavity 1 is buffered to a stable state, but the expansion pressure in the cavity 1 is not released. When the expansion pressure in the cavity 1 is too large, causing the buffer component 2 to be unable to buffer the expansion pressure to a stable pressure, the overloaded expansion pressure in the cavity 1 causes the movable component 32 to move in a directional manner along the straight cylinder 31, and the pressure relief groove 323 in the movable component 32 is connected to the buffer component 2. The air-permeable ring 312 is connected to release the expansion pressure in the cavity 1 to prevent the cavity 1 from being deformed or damaged due to excessive expansion pressure. At the same time, the bottom end of the movable component 32 drives the shielding curtain 15 to move through the linkage component 6, so that the shielding curtain 15 moves from between the outer shell 11 and the inner tube 12 through the guide plate 14 to the inner tube 12. The guide plate 14 is fixed on the inner tube 12. The shielding curtain 15 blocks the energy output of the coil disk 13 and reduces the release speed of the substance in the cavity 1. The device uses the buffer component 2 as the maximum pressure value of the expansion pressure in the cavity 1, and performs normal experimental steps on the substances that are less than or equal to the maximum pressure value. The release speed of the substances that exceed the maximum pressure value of the cavity 1 is reduced by blocking the shielding curtain 15 and the expansion force in the inner tube 12 is released, which plays an overload protection effect.

[0044] The buffer assembly 2 includes a connecting cover 21, and the connecting cover 21 is fixedly connected to the inner tube 12. The top of the connecting cover 21 is fixedly connected to the tube wall 22, and the outer side of the tube wall 22 is fixedly connected to the buffer tube 23. The buffer tube 23 is provided with a buffer cavity 231, and the buffer cavity 231 is connected to the inner tube 12 through the guide groove 28; a piston ring 24 is slidably arranged in the buffer cavity 231, and the top of the piston ring 24 is fixedly connected to a connecting rod 25, and the connecting rod 25 passes through the buffer cavity 231 and is connected to a top plate 26, and the bottom end of the top plate 26 is fixedly connected to a support spring 27, and the end of the support spring 27 away from the top plate 26 is fixed to the buffer cylinder 23;

[0045] Specifically, the connection cover 21 in the buffer assembly 2 is sealed and fixedly connected to the inner cylinder 12, the cylinder wall 22 fixedly connected to the top of the connection cover 21 is communicated with the inner cylinder 12 and the straight cylinder 31, and the buffer cavity 231 opened by the buffer cylinder 23 fixedly connected to the outer side of the cylinder wall 22 is communicated with the inner cylinder 12 through the guide groove 28. When the movable assembly 32 is in the upward stroke along the straight cylinder 31, the movable assembly 32 opens the closed guide groove 28, so that the expansion pressure in the inner cylinder 12 enters the buffer cavity 231 opened by the buffer cylinder 23, and the buffer cavity 231 is located in the buffer cavity 2 The piston ring 24 in the movable connection 31 is subjected to the expansion pressure and rises along the cylinder wall 22. The gas in the buffer cylinder 23 located at the upper half of the piston ring 24 is discharged along the air-permeable groove 232 opened at the top of the buffer cylinder 23. When the expansion pressure closes the air-permeable groove 232 of the piston ring 24, the expansion pressure is transferred to the movable component 32, and the overloaded expansion pressure is released through the movable component 32. Among them, the supporting spring 27 fixedly connected to the piston ring 24 through the connecting rod 25 is used for resetting the piston ring 24, so as to facilitate the reuse of the buffer component 2.

[0046] The pressure relief assembly 3 comprises a straight cylinder 31, the bottom end of which is fixedly connected to the cylinder wall 22, a double rifling 311 is provided in the straight cylinder 31, a movable assembly 32 is movably provided in the straight cylinder 31, a breathable cover 33 is fixedly connected to the top end of the straight cylinder 31, and a breathable ring 312 is provided at one end of the straight cylinder 31 close to the breathable cover 33; the movable assembly 32 comprises a movable block 321, the top end of the movable block 321 is symmetrically fixedly connected to a limiting block 324, and the two limiting blocks 324 are adapted to the double rifling 311, a pressure relief groove 323 is provided on the circumference of the movable block 321, a bottom groove 322 is provided at the bottom end of the movable block 321, and a connecting rope 61 is provided in the bottom groove 322;

[0047] Specifically, the straight cylinder 31 is communicated with the cylinder wall 22 at the bottom, and the initial position of the movable component 32 located in the straight cylinder 31 is set at the guide groove 28 opened in the cylinder wall 22, and the guide groove 28 is in a closed state. A limit block 324 fixed on the movable block 321 is slidably provided in the double rifling 311 opened in the straight cylinder 31. When the bottom groove 322 of the movable block 321 is squeezed by the expansion pressure, the limit block 324 fixed in the movable block 321 moves along the double rifling 311, so that the movable block 321 itself rotates. The rotating movable block 321 reduces the degree of movement in the straight cylinder 31, and reduces the collision with the air cover 33 fixedly connected to the top of the straight cylinder 31. When the movable block 321 contacts the air cover 33, the pressure relief groove 323 opened in the movable block 321 is communicated with the air ring 312, so that the overloaded expansion pressure is released through the air ring 312. The pressure relief component 3 plays a role of overload protection, reducing the phenomenon of overload deformation of the inner cylinder 12.

[0048] The outer shell 11 is symmetrically provided with guide grooves 111 at both ends, and a movable ring 16 is slidably provided in the guide groove 111, one end of the movable ring 16 is fixedly connected to a shielding curtain 15, and the other end of the movable ring 16 is fixedly connected to a lever 161, and one end of the outer shell 11 close to the guide groove 111 is connected with a limiting groove 112, and a lever 161 is movably provided in the limiting groove 112; the bottom end of the inner cylinder 12 is fixedly connected to a guide plate 14, and the inner cylinder 12 is symmetrically provided with slide grooves 121 at both ends, and a sliding ring 63 is slidably connected in the slide groove 121, and one end of the sliding ring 63 is fixedly connected to a slider 64, and the slider 64 is slidably provided in the slide groove 121; the linkage assembly 6 includes a connecting rope 61, the top end of the connecting rope 61 is fixedly connected to a movable assembly 32, the bottom end of the connecting rope 61 is fixedly connected to a sliding ring 63, and the end of the connecting rope 61 close to the buffer assembly 2 is provided with a guide rod 62, and the guide rod 62 is fixed on the inner cylinder 12;

[0049] Specifically, the connecting rope 61 in the linkage assembly 6 is in a two-strand winding structure, the top of the two-strand winding connecting rope 61 is fixedly connected to the movable assembly 32, and the two unwound parts are separated at both ends and fixedly connected to the sliding ring 63 through the guide rod 62 respectively. When the movable block 321 rotates and rises, the movable block 321 drives the sliding ring 63 to move along the slide groove 121 through the connecting rope 61, so that the shielding curtain 15 fixedly connected to the bottom end of the sliding ring 63 moves from between the outer shell 11 and the inner cylinder 12 through the guide plate 14 to the inner cylinder 12, and the shielding curtain The blocking surface of the shielding curtain 15 between the outer shell 11 and the inner cylinder 12 faces the coil disk 13. When the shielding curtain 15 moves in the inner cylinder 12, the blocking surface still faces the coil disk 13, so that the shielding curtain 15 blocks the energy output of the coil disk 13 and reduces the release speed of the substance in the cavity 1. At the same time, the connecting rope 61 connected to the movable block 321 rises and winds. When the lever 161 is manually pulled to drive the shielding curtain 15 to reset, the wound connecting rope 61 rotates and drives the movable block 321 to rotate in the opposite direction along the straight cylinder 31, thereby improving the convenience of resetting the movable block 321.

[0050] It also includes a connecting member 4, the connecting member 4 includes a U-shaped block 41, one end of the U-shaped block 41 is provided with an internal thread 42, the other end of the U-shaped block 41 is provided with a thread groove 43, and the thread groove 43 is threadedly connected to the housing 11;

[0051] Specifically, the U-shaped block 41 in the connecting member 4 is used to connect the outer shell 11 and the inner tube 12, so that the outer shell 11 and the inner tube 12 are in a sealed state, and the internal thread 42 fixedly connected at one end of the U-shaped block 41 is used to connect the bearing assembly 5, thereby improving the convenience of assembling the device. The device has a simple structure and is flexible to use;

[0052] The bearing assembly 5 further comprises a tray 51, the top of the tray 51 is fixedly connected to a support rod 52, a sealing plate 56 is provided through the top of the support, a threaded block 55 is fixedly connected to the top of the sealing plate 56, and the threaded block 55 is threadedly connected to the internal thread 42, a groove 54 is provided at the top of the threaded block 55, and a bearing plate 53 is provided in the groove 54, and the bearing plate 53 is fixed on the support rod 52;

[0053] Specifically, the threaded block 55 is threadedly connected to the internal thread 42 at one end of the U-shaped block 41, so that the inner cylinder 12 is a closed structure, and the substance is placed on the carrier disk 53. When the threaded block 55 is connected to the internal thread 42, the inner cylinder 12 is loosened, so that the support column in the tray 51 pushes the substance in the carrier disk 53 to the center of the coil disk 13, so as to maximize the contact reaction of the substance. When the expansion pressure in the inner cylinder 12 is overloaded, the tray 51 is manually pulled to drive the substance in the carrier disk 53 away from the center of the coil disk 13, thereby effectively reducing the reaction speed of the substance.

[0054] Working principle: the cavity 1 is composed of an outer shell 11 and an inner cylinder 12. A gap is left between the outer shell 11 and the inner cylinder 12 for placing the coil disk 13 and the shielding curtain 15. The shielding curtain 15 is made of a metal material that can block the coil disk 13 from releasing energy. The buffer component 2 fixedly connected to the top of the cavity 1 moves along the straight cylinder 31 through the movable component 32 under the support of the expansion force of the internal pressure of the cavity 1, and the guide groove 28 of the movable component 32 is linked with the buffer component 2, so that the excessive pressure generated in the cavity 1 is buffered to a stable state, but the expansion pressure in the cavity 1 is not released. When the expansion pressure in the cavity 1 is too large, causing the buffer component 2 to be unable to buffer the expansion pressure to a stable pressure, the overloaded expansion pressure in the cavity 1 will directional move the movable component 32 along the straight cylinder 31, and the pressure relief groove 323 in the movable component 32 It is connected to the air-permeable ring 312 to release the expansion pressure in the cavity 1 to prevent the cavity 1 from being deformed or damaged due to excessive expansion pressure. At the same time, the bottom of the movable component 32 drives the shielding curtain 15 to move through the linkage component 6, so that the shielding curtain 15 moves from between the outer shell 11 and the inner tube 12 through the guide plate 14 to the inner tube 12. The guide plate 14 is fixed on the inner tube 12. The shielding curtain 15 blocks the energy output of the coil disk 13 and reduces the release rate of the substance in the cavity 1. The device uses the buffer component 2 as the maximum pressure value of the expansion pressure in the cavity 1, and performs normal experimental steps on substances that are less than or equal to the maximum pressure value. The release rate of substances that exceed the maximum pressure value of the cavity 1 is reduced by blocking the shielding curtain 15 and the expansion force in the inner tube 12 is released, thereby achieving the effect of overload protection.

[0055] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A microwave plasma chamber structure, characterized in that: It comprises a cavity (1) and a buffer component (2) provided at the top of the cavity (1); The top of the buffer component (2) is provided with a pressure relief component (3), and the pressure relief component (3) closes the guide groove (28) connected to the buffer component (2) through a movable component (32), and the movable component (32) has two strokes: In the first stroke, the movable component (32) moves along the straight cylinder (31) and connects the buffer component (2) with the cavity (1) through the guide groove (28), thereby releasing the pressure in the cavity (1) and achieving the effect of regulating the pressure in the cavity (1); In the second stroke, the movable component (32) drives the shielding curtain (15) to move along the straight tube (31) through the linkage component (6) connected to the bottom end. The shielding curtain (15) moves from between the outer shell (11) and the inner tube (12) through the guide plate (14) into the inner tube (12). The shielding curtain (15) blocks the coil disk (13) from continuously increasing temperature and pressure. The movable component (32) moves along the straight tube (31) and is connected to the air permeable ring (312) through the pressure relief groove (323), thereby releasing the continuously increased temperature and pressure in the cavity (1).

2. A microwave plasma chamber structure according to claim 1, characterized in that: The buffer assembly (2) comprises a connecting cover (21), and the connecting cover (21) is fixedly connected to the inner cylinder (12); the top end of the connecting cover (21) is fixedly connected to a cylinder wall (22); the outer side of the cylinder wall (22) is fixedly connected to a buffer cylinder (23); a buffer cavity (231) is provided in the buffer cylinder (23), and the buffer cavity (231) is connected to the inner cylinder (12) through a guide groove (28).

3. A microwave plasma chamber structure according to claim 2, characterized in that: A piston ring (24) is slidably disposed in the buffer cavity (231), a connecting rod (25) is fixedly connected to the top end of the piston ring (24), the connecting rod (25) passes through the buffer cavity (231) and is connected to a top plate (26), a supporting spring (27) is fixedly connected to the bottom end of the top plate (26), and one end of the supporting spring (27) away from the top plate (26) is fixed to the buffer cylinder (23).

4. A microwave plasma chamber structure according to claim 1, characterized in that: The pressure relief assembly (3) comprises a straight cylinder (31), the bottom end of the straight cylinder (31) is fixedly connected to the cylinder wall (22), a double rifling (311) is provided in the straight cylinder (31), a movable assembly (32) is movably provided in the straight cylinder (31), a breathable cover (33) is fixedly connected to the top end of the straight cylinder (31), and a breathable ring (312) is provided at one end of the straight cylinder (31) close to the breathable cover (33).

5. A microwave plasma chamber structure according to claim 4, characterized in that: The movable assembly (32) comprises a movable block (321), the top of the movable block (321) is symmetrically fixedly connected to a limit block (324), and the two limit blocks (324) are adapted to the double rifling (311), a pressure relief groove (323) is provided on the circumference of the movable block (321), a bottom groove (322) is provided at the bottom end of the movable block (321), and a connecting rope (61) is provided in the bottom groove (322).

6. The microwave plasma chamber structure according to claim 1, characterized in that: Guide grooves (111) are symmetrically provided at both ends of the shell (11), a movable ring (16) is slidably provided in the guide groove (111), one end of the movable ring (16) is fixedly connected to a shielding curtain (15), and the other end of the movable ring (16) is fixedly connected to a lever (161), and one end of the shell (11) close to the guide groove (111) is connected to a limit groove (112), and a lever (161) is movably provided in the limit groove (112).

7. The microwave plasma chamber structure according to claim 1, characterized in that: The bottom end of the inner cylinder (12) is fixedly connected to a guide plate (14), and two ends of the inner cylinder (12) are symmetrically provided with slide grooves (121), a slide ring (63) is slidably connected in the slide groove (121), one end of the slide ring (63) is fixedly connected to a slider (64), and the slider (64) is slidably arranged in the slide groove (121).

8. The microwave plasma chamber structure according to claim 1, characterized in that: The linkage assembly (6) comprises a connecting rope (61), the top end of the connecting rope (61) is fixedly connected to a movable assembly (32), the bottom end of the connecting rope (61) is fixedly connected to a sliding ring (63), and a guide rod (62) is provided at one end of the connecting rope (61) close to the buffer assembly (2), and the guide rod (62) is fixed on the inner cylinder (12).

9. The microwave plasma chamber structure according to claim 1, characterized in that: The invention also comprises a connecting member (4), wherein the connecting member (4) comprises a U-shaped block (41), one end of the U-shaped block (41) is provided with an internal thread (42), the other end of the U-shaped block (41) is provided with a thread groove (43), and the thread groove (43) is threadedly connected to the outer shell (11).

10. The microwave plasma chamber structure according to claim 1, characterized in that: The bearing assembly (5) further comprises a tray (51), wherein the tray (51) has a top end fixedly connected to a support rod (52), a sealing plate (56) passing through the top end of the support, a threaded block (55) fixedly connected to the top end of the sealing plate (56), and the threaded block (55) is threadedly connected to the internal thread (42), a groove (54) is formed at the top end of the threaded block (55), and a bearing plate (53) is provided in the groove (54), and the bearing plate (53) is fixed on the support rod (52).

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