Square support plate de-bonding equipment

Abstract

The invention discloses a square carrier plate de-bonding device, and relates to the technical field of square carrier plates, the square carrier plate de-bonding device comprises a box body, the top surface of the box body is fixedly provided with a substrate, the top surface of the substrate is fixedly provided with a support frame 1, and the top surface of the box body is provided with two baffle plates; a plurality of stand columns are installed on the bottom faces of the two baffles correspondingly and are matched with a second electric push rod, a limiting plate, a pneumatic clamping jaw, a cover plate, an air inlet pipe, an air outlet box, a fan, a micro motor, a connecting rod, a rolling wheel, a movable plate, umbrella-shaped teeth, a toothed plate, a positioning block, a first rotating base, a movable rod, a supporting pipe and a spring. Nitrogen can be blown into the gap between the upper-layer film and the square carrier plate in the process of tearing the film by the pneumatic clamping jaw, so that the upper-layer film and the square carrier plate are completely separated, damage to the square carrier plate caused by attachment of part of the upper-layer film and the square carrier plate in the process of tearing the upper-layer film of the square carrier plate is avoided, and the de-bonding effect on the square carrier plate is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of square carriers, and in particular to a square carrier debonding device. Background Art

[0002] In the field of semiconductor packaging, a square substrate refers to a substrate used for chip packaging, which provides mechanical support, electrical connection and physical protection for the chip. A square substrate is usually a square substrate used to replace the traditional round wafer as a packaging carrier. This substrate can be rigid or flexible, and made of a variety of materials. The use of square substrates helps to improve packaging efficiency, reduce material waste, increase chip interconnection density, and help achieve more complex packaging designs. In addition, square substrates can also be customized as needed to meet specific application requirements. There are films on the top and bottom surfaces of the square substrate that need to be removed by debonding when used.

[0003] After searching, it is found that there are problems with the square carrier debonding equipment in the prior art. The existing semiconductor industry debonding equipment generally heats the square carrier as a whole in a constant temperature room. Since there are films on both sides of the product, it can be divided into an upper film and a lower film according to the top and bottom surfaces. After the overall temperature rises, the two sides will be debonded at the same time. When the film is manually torn off, there is a risk of film crystal chips falling and being damaged, and personnel being scalded. At the same time, when the top surface of the square carrier is heated, the upper film will produce bubbles and warp up, but bubbles will not be produced in all areas of the upper film. In the process of the staff tearing off the film, when the area without bubbles is torn off, the adhesion between the upper film and the square carrier is strong, which makes the resistance in the process of tearing off the upper film of the square carrier larger. The large resistance during tearing off the film may damage the square carrier, resulting in poor debonding effect, affecting the staff's debonding of the square carrier. Therefore, based on the above search and combined with the prior art, a square carrier debonding equipment is proposed to solve the above problems. Summary of the invention

[0004] The purpose of the present invention is to provide a square carrier debonding device, which has the advantages of good debonding effect, high quality, strong adaptability, etc., so as to solve the problems raised in the above background technology that there is a risk of film crystal chips falling and being damaged and personnel being scalded when manually tearing the film, and when tearing to an area without bubbles, the adhesion between the upper film and the square carrier is strong, resulting in greater resistance in the process of tearing off the upper film of the square carrier, and the large resistance during film tearing may cause damage to the square carrier.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] The square carrier debonding device comprises a box body, a substrate is fixedly mounted on the top surface of the box body, a support frame 1 is fixedly mounted on the top surface of the substrate, two baffles are arranged on the top surface of the box body; a plurality of columns are respectively mounted on the bottom surfaces of the two baffles for supporting the baffles, and a support bin is arranged on the top surface of the substrate; a support frame 2 is mounted on the top surface of the support bin for supporting the support bin; an electric push rod 1 is mounted on the top surface of the support frame 1 for driving the The support frame 2 moves; a debonding mechanism, which is arranged on the bottom surface of the support bin and is used to debond the square carrier; the debonding mechanism includes a mica board, which is installed on the bottom surface of the support bin by bolts, and the top surface of the mica board is equipped with several heaters for heating the top surface of the square carrier, the top surface of the box body is slidably connected with a connecting plate 1, and the top surface of the connecting plate 1 is equipped with a cooling bin for cooling the bottom surface of the square carrier, and two water inlets for connecting water are fixedly installed on both sides of the cooling bin.

[0007] Furthermore, the debonding mechanism also includes a cover plate, which is slidably connected to the top surfaces of the two baffles, a card plate is fixedly installed on one side of the cover plate, an electric push rod 2 is fixedly installed on one side of the card plate, a sliding plate is slidably connected to one side of the electric push rod 2, the bottom surface of the telescopic shaft of the electric push rod 2 is fixedly connected to the inner bottom surface of the sliding plate, a limit plate is fixedly installed on the bottom surface of the sliding plate, a plurality of pneumatic clamps for tearing the film are fixedly installed on the bottom surface of the limit plate, and one side of the cover plate is fixedly installed A support plate is provided, a positioning plate is arranged on the bottom surface of the support plate, two connecting plates 2 are fixedly installed on one side of the positioning plate, an electric push rod 3 for driving the positioning plate to move is fixedly installed on the bottom surface of the support plate, an air outlet box is rotatably connected to the top surface of the connecting plate 2, an air pump for air intake is fixedly installed on one side of the positioning plate, a hose is fixedly sleeved on the inner circular wall surface of the air outlet hole of the air pump, one end of the hose is connected to the air outlet box, a guide plate for guiding the airflow is provided inside the air outlet box, and the outlet Fans are rotatably connected on both sides of the air box, guide tubes are fixedly installed on both sides of the air outlet box, two positioning blocks are fixedly installed on one side of the air outlet box, a toothed plate is rotatably connected between the two positioning blocks through a rotating shaft, a movable plate is rotatably connected to the top surface of the connecting plate two, an umbrella-shaped tooth is fixedly installed at one end of the movable plate, and the umbrella-shaped tooth is meshed with the toothed plate, a micro-motor is fixedly installed on the top surface of the connecting plate two, a connecting rod is fixedly installed on the top surface of the micro-motor driving shaft, a roller is rotatably connected to the top surface of the connecting rod, and the roller is slidably connected to the movable plate, two fixed blocks are fixedly installed on one side of the air outlet box, a rotating seat one is rotatably connected between the two fixed blocks, two placement blocks are fixedly installed on the top surface of the connecting plate two, a rotating seat two is rotatably connected between the two placement blocks, a support tube is fixedly installed on one side of the rotating seat two, an active rod is movably sleeved on the inner circular wall surface of the support tube, one end of the active rod is fixedly connected to one side of the rotating seat one, and a spring is movably sleeved on the outer circular wall surface of the support tube.

[0008] Furthermore, two bearing seats are fixedly installed on the top surface of the baffle plate on the right side, and a screw rod 2 is rotatably connected between the two bearing seats. A driving motor 2 for driving the screw rod 2 to rotate is fixedly installed on the top surface of the baffle plate on the right side, and a mounting block is threadedly connected to the outer cylindrical wall surface of the screw rod 2, and one side of the mounting block is fixedly connected to one side of the cover plate. Two slide rails 2 for supporting the sliding of the cover plates are fixedly installed on the top surfaces of the two baffle plates, and two sliders 2 are slidably connected to the slide rails 2.

[0009] Furthermore, a slide rail three for limiting the movement of the tooth plate is fixedly installed on the top surface of the second connecting plate, and a slide groove is provided on one side of the tooth plate, and the slide groove is slidably connected to the slide rail three.

[0010] Furthermore, a mounting frame is fixedly installed on the top surface of the substrate, a sliding block is slidably connected to the inside of the mounting frame, a screw rod 1 is rotatably connected to the inside of the mounting frame, the screw rod 1 is threadedly connected to the sliding block, a connecting block is fixedly installed on one side of the sliding block, a mounting plate is installed on the top surface of the connecting block, the bottom surface of the mounting plate is fixedly connected to the top surface of the connecting plate 1, and a driving motor 1 for driving the screw rod 1 to rotate is installed on one side of the mounting frame.

[0011] Furthermore, two slide rails 1 for supporting the sliding of the connecting plate 1 are fixedly mounted on the top surface of the base plate, and a plurality of sliders 1 are fixedly mounted on the bottom surface of the connecting plate 1, and the sliders 1 are slidably connected to the slide rails 1.

[0012] Furthermore, a plurality of bearing sleeves are fixedly mounted on the top surface of the support frame 1, a plurality of connecting rods are fixedly mounted on the top surface of the debonding mechanism, and the outer circumferential wall surface of the connecting rods is slidably connected to the inner circumferential wall surface of the bearing sleeve.

[0013] Furthermore, two limiting rods are fixedly mounted on the top surface of the positioning plate, and the limiting rods are slidably connected to the supporting plate.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The cooling chamber, heater, mica plate, water head, electric push rod 1, support frame 2 and support chamber cooperate with each other to cool down the lower film during the heating of the upper film on the square carrier plate, thus avoiding deformation of the lower film during the heating of the upper film.

[0016] By cooperating with the second electric push rod, the limit plate, the pneumatic clamping jaws, the cover plate, the air inlet pipe, the air outlet box, the fan, the micro motor, the connecting rod, the roller, the movable plate, the umbrella-shaped teeth, the tooth plate, the positioning block, the first rotating seat, the movable rod, the support tube and the spring, nitrogen can be blown into the gap between the upper film and the square carrier plate during the film tearing process of the pneumatic clamping jaws, so that the upper film and the square carrier plate are completely separated, avoiding damage to the square carrier plate due to the adhesion of part of the upper film to the square carrier plate during the process of tearing off the upper film of the square carrier plate, thereby achieving the debonding effect of the square carrier plate, and facilitating the staff to process the square carrier plate.

[0017] 2. By cooperating with each other through the set driving motor 1, screw rod 1, sliding block, connecting block, mounting plate, cooling bin and connecting plate 1, the cooling bin can be moved and the square carrier can be placed in the cooling bin. At the same time, the square carrier can also be unloaded after debonding. By cooperating with each other through the set slider 1 and slide rail 1, the movement of the cooling bin can be restricted. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the installation structure of the substrate and the support frame 1 of the present invention;

[0020] Figure 3 It is a schematic diagram of the cooling bin moving structure of the present invention;

[0021] Figure 4 It is a schematic diagram of the installation structure of the installation plate and the sliding block of the present invention;

[0022] Figure 5 It is a schematic diagram of the supporting warehouse moving structure of the present invention;

[0023] Figure 6 It is a schematic diagram of the installation structure of the cover plate and the support plate of the present invention;

[0024] Figure 7 It is a schematic diagram of the installation structure of the sliding plate and the limiting plate of the present invention;

[0025] Figure 8 It is a schematic diagram of the installation structure of the positioning plate and the second connecting plate of the present invention;

[0026] Fig. 9 for Figure 8 Schematic diagram of the local structure of A;

[0027] Fig.10 for Figure 8 Schematic diagram of the local structure of B;

[0028] Fig.11 It is a schematic diagram of the connection structure of the air pump and the hose of the present invention;

[0029] Fig.12 It is a schematic diagram of the connection structure between the tooth plate and the slide rail three of the present invention.

[0030] In the figure: 1, box; 2, base plate; 3, slide; 4, support frame 1; 5, fan; 6, debonding mechanism; 7, mica board; 8, cooling chamber; 9, water head; 10, connecting plate 1; 11, slide rail 1; 12, slider 1; 13, drive motor 1; 14, mounting plate; 15, air inlet pipe; 16, mounting frame; 17, sliding block; 18, screw rod 1; 19, connecting block; 20, support frame 2; 21, heater; 22, electric push rod 1; 23, connecting rod; 24, bearing sleeve; 25, column; 26, baffle; 27, bearing seat; 28, screw rod 2; 29, mounting block; 30, guard plate; 31, drive motor 2; 32, slide rail 2; 33, slider 2; 34. Cover plate; 35. Support plate; 36. Sliding plate; 37. Electric push rod 2; 38. Air pump; 39. Guide tube; 40. Limit plate; 41. Pneumatic gripper; 42. Guide plate; 43. Limit rod; 44. Positioning plate; 45. Connecting plate 2; 46. Air outlet box; 47. Hose; 48. Tooth plate; 49. Slide rail 3; 50. Positioning block; 51. Umbrella gear; 52. Micro motor; 53. Connecting rod; 54. Movable plate; 55. Roller; 56. Fixed block; 57. Rotating seat 1; 58. Movable rod; 59. Support tube; 60. Spring; 61. Placement block; 62. Rotating seat 2; 63. Support bin; 64. Card plate; 65. Electric push rod 3. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In a typical implementation of this application, please refer to Figures 1 to 12 , a square carrier debonding device comprises a box body 1, a substrate 2 is fixedly mounted on the top surface of the box body 1, a support frame 4 is fixedly mounted on the top surface of the substrate 2, two baffles 26 are arranged on the top surface of the box body 1, a plurality of columns 25 are respectively mounted on the bottom surfaces of the two baffles 26, for supporting the baffles 26, the bottom surfaces of the columns 25 are fixedly connected to the top surface of the substrate 2, a support bin 63 is arranged on the top surface of the support bin 63, a support frame 20 is mounted on the top surface of the support bin 63 by bolts, for supporting the support bin 63, an electric push rod 22 is mounted on the top surface of the support frame 4, for driving the support frame 20 to move, and a debonding mechanism 6 is arranged on the bottom surface of the support bin 63, for debonding the square carrier;

[0033] The debonding mechanism 6 includes a mica plate 7, which is mounted on the bottom surface of the support bin 63 by bolts, and a plurality of heaters 21 for heating the top surface of the square carrier are mounted on the top surface of the mica plate 7. By controlling the temperature of each heater 21, the temperature of different areas on the mica plate 7 is different. The top surface of the box body 1 is slidably connected with a connecting plate 10, and a cooling bin 8 for cooling the bottom surface of the square carrier is mounted on the top surface of the connecting plate 10 by bolts. Two water inlets 9 for accessing water are fixedly mounted on both sides of the cooling bin 8, and a circulation pipeline connected to the water inlet 9 is arranged inside the cooling bin 8;

[0034] Among them, the staff places four square carriers that need to be debonded on the top surface of the cooling bin 8, and multiple heaters 21 are started to heat the mica board 7. The telescopic axis of the electric push rod 22 moves downward to drive the support bin 63 and the mica board 7 to move downward until the bottom surface of the mica board 7 contacts the top surface of the square carrier, thereby contact heating the top surface. At the same time, the staff connects water to the interior of the cooling bin 8, and the cold water flows inside the cooling bin 8 to cool the bottom surface of the square carrier. The top surface of the square carrier is heated so that the upper film is separated by heat, and the lower film is cooled by the cooling bin 8 and does not deform, which is convenient for subsequent processing of the lower film, thereby debonding the square carrier.

[0035] The debonding mechanism 6 also includes a cover plate 34, which is slidably connected to the top surfaces of the two baffles 26, a card plate 64 is fixedly installed on one side of the cover plate 34, an electric push rod 37 is fixedly installed on one side of the card plate 64, a sliding plate 36 is slidably connected to one side of the electric push rod 37, the bottom surface of the telescopic axis of the electric push rod 37 is fixedly connected to the inner bottom surface of the sliding plate 36, a limit plate 40 is fixedly installed on the bottom surface of the sliding plate 36, and a plurality of pneumatic clamps 41 for tearing the film are fixedly installed on the bottom surface of the limit plate 40, each two pneumatic clamps 41 form a group for tearing off the upper film of a square carrier plate, after the upper film of the square carrier plate is heated and separated, the pneumatic clamps 41 open and close to clamp the separated upper film, and the cover plate 34 moves forward to drive the pneumatic clamps 41 to move forward, thereby tearing off the upper film of the square carrier plate;

[0036] A support plate 35 is fixedly installed on one side of the cover plate 34, a positioning plate 44 is arranged on the bottom surface of the support plate 35, two connecting plates 45 are fixedly installed on one side of the positioning plate 44, an electric push rod 3 65 for driving the positioning plate 44 to move is fixedly installed on the bottom surface of the support plate 35, the bottom surface of the telescopic shaft of the electric push rod 3 65 is fixedly connected to the top surface of the positioning plate 44, the top surface of the connecting plate 2 45 is rotatably connected to the air outlet box 46 through a bearing, an air pump 38 for air intake is fixedly installed on one side of the positioning plate 44, a hose 47 is fixedly sleeved on the inner circular wall surface of the air outlet hole of the air pump 38, one end of the hose 47 is connected to the air outlet box 46, an air inlet pipe 15 is fixedly installed on the inner circular wall surface of the air inlet hole of the air pump 38, a flange is fixedly sleeved on the outer circular wall surface of the air inlet pipe 15, and the staff connects the external pipeline with the air inlet pipe 15 through the flange, so that the air pump 38 sucks in nitrogen and then transports it to the inside of the air outlet box 46 through the hose 47;

[0037] The interior of the air outlet box 46 is used to guide the guide plate 42 for guiding the air flow. Fans 5 are rotatably connected to both sides of the air outlet box 46. The rotation of the fan 5 causes the nitrogen entering the air outlet box 46 to move to both sides. Guide tubes 39 are fixedly installed on both sides of the air outlet box 46. Two positioning blocks 50 are fixedly installed on one side of the air outlet box 46. A tooth plate 48 is rotatably connected between the two positioning blocks 50 through a rotating shaft. A movable plate 54 is rotatably connected to the top surface of the connecting plate 2 45 through a rotating shaft. An umbrella tooth 51 is fixedly installed at one end of the movable plate 54, and the umbrella tooth 51 is meshed with the tooth plate 48. A micro motor 52 is fixedly installed on the top surface of the connecting plate 2 45. A connecting rod 53 is fixedly installed on the top surface of the driving shaft of the micro motor 52. A roller 55 is rotatably connected to the top surface of the connecting rod 53 through a rotating shaft. The roller 55 is slidably connected to the movable plate 54. Two fixed Block 56, a rotating seat 1 57 is rotatably connected between the two fixed blocks 56 through a rotating shaft, two placement blocks 61 are fixedly installed on the top surface of the connecting plate 2 45, a rotating seat 2 62 is rotatably connected between the two placement blocks 61 through a rotating shaft, a support tube 59 is fixedly installed on one side of the rotating seat 2 62, a movable rod 58 is movably sleeved on the inner circular wall surface of the support tube 59, one end of the movable rod 58 is fixedly connected to one side of the rotating seat 1 57, a spring 60 is movably sleeved on the outer circular wall surface of the support tube 59, one end of the spring 60 is fixedly connected to one side of the rotating seat 2 62, and the other end of the spring 60 is fixedly connected to one side of the rotating seat 1 57, a PLC controller is fixedly installed on the top surface of the substrate 2, and the heater 21, the electric push rod 3 65, the air pump 38, the micro motor 52, the electric push rod 2 37, the pneumatic clamp 41 and the electric push rod 2 37 are all electrically connected to the PLC controller;

[0038] When the upper film of the square carrier is torn by two pneumatic clamps 41, the air outlet box 46 moves forward following the cover plate 34 and the pneumatic clamps 41, and the nitrogen inside the air outlet box 46 is blown to the gap between the upper film and the square carrier. At the same time, the driving shaft of the micro motor 52 rotates to drive the connecting rod 53 and the roller 55 to rotate, and the rotation of the roller 55 drives the movable plate 54 and the umbrella-shaped teeth 51 to rotate back and forth, and the umbrella-shaped teeth 51 rotate back and forth to drive the tooth plate 48 to move forward and backward, and the tooth plate 48 moves forward and backward to drive the air outlet box 46 Swinging back and forth, the air outlet box 46 swings back and forth to drive the movable rod 58 to move back and forth inside the support tube 59, while causing the spring 60 to be continuously stretched and compressed. The left and right ends of the air outlet box 46 intermittently approach the gap between the upper film and the square carrier plate, shortening the distance between the airflow and the gap between the upper film and the square carrier plate, so that the upper film is separated from the square carrier plate more quickly, reducing the adhesion between the upper film and the square carrier plate, reducing the resistance of the pneumatic clamp 41 when tearing the film, and better protecting the square carrier plate to prevent it from being damaged;

[0039] By adopting the above technical features, through the cooling bin 8, the staff places four square carriers that need to be debonded on the top surface of the cooling bin 8, and the staff starts multiple heaters 21. The heater 21 can heat the mica board 7. The staff starts the electric push rod 1 22. The telescopic axis of the electric push rod 1 22 moves downward to drive the support frame 2 20 and the support bin 63 to move downward. The support bin 63 moves downward to drive the mica board 7 to move downward until the bottom surface of the mica board 7 contacts the top surface of the square carrier, thereby contact heating the square carrier, and heating separates the upper film of the square carrier from the top surface of the square carrier. In this process, the staff connects water to the water inlet 9, and the water flows in the circulation pipeline inside the cooling bin 8 through the water inlet 9, so that the cooling bin 8 can cool the bottom surface of the square carrier, prevent the heat from the top surface from being transferred to the bottom surface, and avoid deformation of the lower film during heating of the upper film, so as to facilitate the staff to tear off the lower film later.

[0040] By controlling each heater 21, the temperature of different areas of the mica board 7 is different, so that the square carrier board is heated in different areas;

[0041] After the upper film is separated from the square carrier plate, the staff starts the electric push rod 2 37, and the telescopic shaft of the electric push rod 2 37 moves downward to drive the limit plate 40 to move downward, and the limit plate 40 moves downward to drive the pneumatic clamping jaws 41 to move downward to the position where the upper film is separated. At this time, the pneumatic clamping jaws 41 open and close to clamp the separated upper film. Every two pneumatic clamping jaws 41 can clamp one side of an upper film, and then the cover plate 34 moves forward to drive the pneumatic clamping jaws 41 to move forward to tear the upper film;

[0042] At the same time, in the process of tearing the film with the pneumatic gripper 41, the staff connects the external pipeline with the air inlet pipe 15, and the air pump 38 absorbs nitrogen through the air inlet pipe 15. The nitrogen enters the inside of the air outlet box 46 through the hose 47. The fans 5 on both sides of the air outlet box 46 rotate to make the nitrogen move to both sides along the guide plate 42 inside the air outlet box 46 until it is discharged upward through the guide pipe 39. When the cover plate 34 drives the pneumatic gripper 41 to tear the film, the nitrogen inside the air outlet box 46 will blow to the gap between the upper film and the square carrier plate;

[0043] The staff starts the micro motor 52, and the driving shaft of the micro motor 52 rotates to drive the connecting rod 53 to rotate. The rotation of the connecting rod 53 drives the roller 55 to slide back and forth in the through hole on the movable plate 54. The roller 55 slides back and forth in the through hole on the movable plate 54 to drive the movable plate 54 to rotate back and forth around the rotating shaft. The movable plate 54 rotates back and forth to drive the umbrella-shaped teeth 51 to rotate back and forth. The umbrella-shaped teeth 51 rotate back and forth to drive the tooth plate 48 to move back and forth. The tooth plate 48 moves back and forth to drive the air outlet box 46 to swing back and forth through the positioning block 50. The air outlet box 46 swings back and forth so that the fixed block 56 drives the rotating seat 1 57 to move back and forth. The rotating seat 1 57 moves back and forth to drive the movable rod 58 to move back and forth inside the support tube 59, and at the same time, the spring 60 is continuously compressed and stretched, and the air outlet box 46 swings back and forth. The left and right ends of the gas outlet box 46 are intermittently close to the gap between the upper film and the square carrier plate. When the left end of the gas outlet box 46 is close to the gap between the upper film and the square carrier plate, the nitrogen gas is closer to the gap between the upper film and the square carrier plate, and the airflow strength is increased, making it easier for the left side of the upper film to be separated from the square carrier plate; when the right end of the gas outlet box 46 is close to the gap between the upper film and the square carrier plate, the nitrogen gas is closer to the gap between the upper film and the square carrier plate, and the airflow strength is increased, making it easier for the right side of the upper film to be separated from the square carrier plate, thereby making it easier for the upper film to be separated from the square carrier plate, reducing the resistance of the pneumatic clamp 41 when tearing the film, reducing the adhesion between the upper film and the square carrier plate, improving the smoothness of film tearing, and reducing the possibility of damage to the square carrier plate;

[0044] In this process, the lower film is cooled down while the upper film of the square carrier is heated, so that the staff can process the lower film later. Nitrogen is blown into the gap between the upper film and the square carrier during the film tearing process by the pneumatic clamp 41, so that the upper film and the square carrier are completely separated, so that the square carrier is not damaged due to the adhesion of part of the upper film to the square carrier during the tearing process of the upper film of the square carrier, so as to achieve the debonding effect of the square carrier, and facilitate the staff to process the square carrier.

[0045] Two bearing seats 27 are fixedly installed on the top surface of the baffle 26 on the right side, and a screw rod 28 is rotatably connected between the two bearing seats 27. A driving motor 21 for driving the screw rod 21 to rotate is fixedly installed on the top surface of the baffle 26 on the right side. A guard plate 30 is fixedly installed on the top surface of the baffle 26 on the right side. The guard plate 30 can protect the driving motor 21. One end of the driving shaft of the driving motor 21 is fixedly connected to one end of the screw rod 21. The outer wall surface of the screw rod 21 is threadedly connected with a mounting block 29. One side of the mounting block 29 is fixedly connected to one side of the cover plate 34. The driving motor 21 is electrically connected to the PLC controller. The rotation of the driving shaft of the driving motor 21 drives the screw rod 21 to rotate. The rotation of the screw rod 21 causes the mounting block 29 to drive the cover plate 34 and the pneumatic clamp 41 to move forward, thereby driving the cover plate 34 to move forward.

[0046] The top surfaces of the two baffles 26 are fixedly mounted with a second slide rail 32 for supporting the sliding of the cover plate 34, and the bottom surface of the cover plate 34 is fixedly mounted with two second sliders 33, which are slidably connected with the second slide rail 32. The movement of the cover plate 34 drives the second slider 33 to move along the cover plate 34, and the second slide rail 32 and the slide groove 3 can limit the movement of the cover plate 34;

[0047] Specifically, by setting the driving motor 2 31, the driving shaft of the driving motor 2 31 rotates to drive the screw rod 28 to rotate between the two bearing seats 27, the screw rod 28 rotates so that the mounting block 29 drives the cover plate 34 to move, the cover plate 34 moves to drive the slider 2 33 to move on the slide rail 2 32, the slide rail 2 32 and the slider 2 33 cooperate to limit the movement of the cover plate 34, the cover plate 34 moves to drive the multiple pneumatic clamps 41 to move, the pneumatic clamps 41 move to tear off the upper film of the square carrier plate, thereby driving the pneumatic clamps 41 to move, and achieving the movement effect of the pneumatic clamps 41;

[0048] A slide rail 3 49 for limiting the movement of the tooth plate 48 is fixedly installed on the top surface of the second connecting plate 45. A slide groove 3 is provided on one side of the tooth plate 48. The slide groove 3 is slidably connected with the slide rail 3 49. The tooth plate 48 moves along the slide rail 3 49. The slide rail 3 49 can limit the movement of the tooth plate 48.

[0049] Specifically, by setting the tooth plate 48, the tooth plate 48 moves forward and backward along the slide rail 3 49, and the slide groove 3 and the slide rail 3 49 cooperate to limit the movement of the tooth plate 48, thereby achieving a limiting effect on the tooth plate 48.

[0050] As a preferred implementation in this embodiment, please refer to Figure 1 to Figure 7A mounting frame 16 is fixedly mounted on the top surface of the substrate 2, a sliding block 17 is slidably connected inside the mounting frame 16, a screw rod 18 is rotatably connected inside the mounting frame 16 through a bearing, the screw rod 18 is threadedly connected to the sliding block 17, a connecting block 19 is fixedly mounted on one side of the sliding block 17, a mounting plate 14 is mounted on the top surface of the connecting block 19 through bolts, the bottom surface of the mounting plate 14 is fixedly connected to the top surface of the connecting plate 10, a driving motor 13 for driving the screw rod 18 to rotate is mounted on one side of the mounting frame 16, a driving shaft of the driving motor 13 is fixedly connected to one end of the screw rod 18, and the driving motor 13 is electrically connected to the PLC controller;

[0051] The driving shaft of the driving motor 13 rotates to drive the screw rod 18 to rotate, and the screw rod 18 rotates so that the sliding block 17 drives the mounting plate 14 to move, and the movement of the mounting plate 14 drives the connecting plate 10 and the cooling bin 8 to move, thereby moving the position of the cooling bin 8;

[0052] Specifically, by setting a driving motor 13, the driving shaft of the driving motor 13 rotates to drive the screw rod 18 to rotate, the screw rod 18 rotates to make the sliding block 17 move along the screw rod 18, the sliding block 17 moves to drive the connecting block 19 to move, the connecting block 19 moves to drive the mounting plate 14 to move, the mounting plate 14 moves to drive the cooling bin 8 and the connecting plate 10 to move, when the cooling bin 8 moves forward to a position other than the mica board 7, the staff can place the square carrier on the cooling bin 8 and unload the debonded square carrier, and then the cooling bin 8 moves to the bottom of the mica board 7 to debond the square carrier, which is convenient for the staff to unload and unload the square carrier;

[0053] Two slide rails 11 for supporting the sliding of the connecting plate 10 are fixedly installed on the top surface of the base plate 2, and a plurality of sliders 12 are fixedly installed on the bottom surface of the connecting plate 10, and the sliders 12 are slidably connected with the slide rails 11;

[0054] Specifically, by setting the cooling bin 8, when the cooling bin 8 and the connecting plate 10 move, the slider 12 will be driven to move along the slide rail 11, and the slide rail 11 and the slider 12 cooperate to limit the movement of the cooling bin 8, thereby limiting the moving path of the cooling bin 8;

[0055] A plurality of bearing sleeves 24 are fixedly mounted on the top surface of the support frame 4, and a plurality of connecting rods 23 are fixedly mounted on the top surface of the debonding mechanism 6. The support bin 63 moves downward to drive the connecting rods 23 to move inside the bearing sleeve 24, thereby improving the stability of the movement of the support bin 63. The outer circumferential wall surface of the connecting rod 23 is slidably connected with the inner circumferential wall surface of the bearing sleeve 24.

[0056] Specifically, by setting up the support bin 63, the support bin 63 and the mica board 7 move downward to drive the connecting rod 23 to move downward inside the bearing sleeve 24. The connecting rod 23 and the bearing sleeve 24 can limit the movement of the support bin 63 and improve the stability of the movement of the support bin 63.

[0057] Two limit rods 43 are fixedly mounted on the top surface of the positioning plate 44, and the limit rods 43 are slidably connected to the support plate 35;

[0058] Specifically, by providing the positioning plate 44 , the positioning plate 44 moves downward to drive the limiting rod 43 to move downward inside the supporting plate 35 . The limiting rod 43 can limit the movement of the positioning plate 44 to prevent the positioning plate 44 from deflecting.

[0059] Working principle: through the drive motor 13, the drive shaft of the drive motor 13 rotates to drive the screw rod 18 to rotate, the screw rod 18 rotates to make the sliding block 17 drive the mounting plate 14 to move, the mounting plate 14 moves to drive the connecting plate 10 and the cooling bin 8 to move, thereby moving the position of the cooling bin 8. After the cooling bin 8 is moved outward, the staff places the square carrier on the top surface of the cooling bin 8, thereby loading the square carrier, and the cooling bin 8 moves and resets;

[0060] Secondly, multiple heaters 21 are started to heat the mica board 7, and the telescopic shaft of the electric push rod 22 moves downward to drive the support bin 63 and the mica board 7 to move downward until the bottom surface of the mica board 7 contacts the top surface of the square carrier, thereby contact heating the top surface. At the same time, the staff connects water to the interior of the cooling bin 8, and the cold water flows inside the cooling bin 8 to cool the bottom surface of the square carrier. The top surface of the square carrier is heated so that the upper film is separated by heat, while the lower film is cooled by the cooling bin 8 and does not deform, which is convenient for subsequent processing of the lower film, thereby debonding the square carrier.

[0061] Next, after the upper film of the square carrier is heated and separated, the pneumatic clamp 41 opens and closes to clamp the separated upper film, and the driving shaft of the second driving motor 31 rotates to drive the second screw rod 28 to rotate. The rotation of the second screw rod 28 causes the mounting block 29 to drive the cover plate 34 and the pneumatic clamp 41 to move forward, thereby driving the cover plate 34 to move forward. The forward movement of the cover plate 34 drives the pneumatic clamp 41 to move forward, thereby tearing off the upper film of the square carrier;

[0062] Finally, when the upper film of the square carrier is torn by the two pneumatic clamps 41, the gas outlet box 46 moves forward following the cover plate 34 and the pneumatic clamps 41, and the nitrogen inside the gas outlet box 46 is blown to the gap between the upper film and the square carrier. At the same time, the driving shaft of the micro motor 52 rotates to drive the connecting rod 53 and the roller 55 to rotate, and the rotation of the roller 55 drives the movable plate 54 and the umbrella-shaped teeth 51 to rotate back and forth, and the umbrella-shaped teeth 51 rotate back and forth to drive the tooth plate 48 to move forward and backward, and the tooth plate 48 moves forward and backward to drive the gas outlet box 46 The air outlet box 46 swings back and forth, driving the movable rod 58 to move back and forth inside the support tube 59 while causing the spring 60 to be continuously stretched and compressed. The left and right ends of the air outlet box 46 intermittently approach the gap between the upper film and the square carrier plate, shortening the distance between the airflow and the gap between the upper film and the square carrier plate, allowing the upper film to separate from the square carrier plate faster, reducing the adhesion between the upper film and the square carrier plate, reducing the resistance of the pneumatic clamp 41 when tearing the film, and better protecting the square carrier plate to prevent damage.

[0063] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. Square carrier debonding equipment, characterized in that: include: A box body (1), a base plate (2) being fixedly mounted on the top surface of the box body (1), a support frame (4) being fixedly mounted on the top surface of the base plate (2), and two baffles (26) being arranged on the top surface of the box body (1); a plurality of columns (25), wherein the plurality of columns (25) are respectively mounted on the bottom surfaces of the two baffles (26) and are used to support the baffles (26); a support bin (63) is provided on the top surface of the base plate (2); A second support frame (20), the second support frame (20) being installed on the top surface of the support bin (63) and used for supporting the support bin (63); An electric push rod 1 (22), the electric push rod 1 (22) being mounted on the top surface of the support frame 1 (4) and used for driving the support frame 2 (20) to move; A debonding mechanism (6), the debonding mechanism (6) being arranged on the bottom surface of the supporting bin (63) and being used for debonding the square carrier plate; The debonding mechanism (6) comprises a mica plate (7), the mica plate (7) being mounted on the bottom surface of the support bin (63) by means of bolts, the top surface of the mica plate (7) being mounted with a plurality of heaters (21) for heating the top surface of the square carrier, the top surface of the box body (1) being slidably connected with a connecting plate 1 (10), the top surface of the connecting plate 1 (10) being mounted with a cooling bin (8) for cooling the bottom surface of the square carrier, and two water inlets (9) for receiving water being fixedly mounted on both sides of the cooling bin (8).

2. The square carrier debonding device according to claim 1, characterized in that: The debonding mechanism (6) further comprises a cover plate (34), wherein the cover plate (34) is slidably connected to the top surfaces of the two baffles (26), a clamping plate (64) is fixedly mounted on one side of the cover plate (34), a second electric push rod (37) is fixedly mounted on one side of the clamping plate (64), a sliding plate (36) is slidably connected to one side of the second electric push rod (37), the bottom surface of the telescopic shaft of the second electric push rod (37) is fixedly connected to the inner bottom surface of the sliding plate (36), a limiting plate (40) is fixedly mounted on the bottom surface of the sliding plate (36), a plurality of pneumatic clamps (41) for film tearing are fixedly mounted on the bottom surface of the limiting plate (40), and a support plate (35) is fixedly mounted on one side of the cover plate (34). A positioning plate (44) is provided on the bottom surface of the support plate (35), two connecting plates (45) are fixedly installed on one side of the positioning plate (44), an electric push rod (65) for driving the positioning plate (44) to move is fixedly installed on the bottom surface of the support plate (35), an air outlet box (46) is rotatably connected to the top surface of the connecting plate (45), an air pump (38) for air intake is fixedly installed on one side of the positioning plate (44), a hose (47) is fixedly sleeved on the inner circular wall surface of the air outlet hole of the air pump (38), one end of the hose (47) is connected to the air outlet box (46), the inside of the air outlet box (46) is a guide plate (42) for guiding the airflow, and the two ends of the air outlet box (46) are connected to the guide plate (42) for guiding the airflow. The two sides of the air outlet box (46) are rotatably connected to a fan (5), the two sides of the air outlet box (46) are fixedly installed with guide tubes (39), one side of the air outlet box (46) is fixedly installed with two positioning blocks (50), and a toothed plate (48) is rotatably connected between the two positioning blocks (50) through a rotating shaft, the top surface of the connecting plate (45) is rotatably connected to a movable plate (54), one end of the movable plate (54) is fixedly installed with an umbrella tooth (51), and the umbrella tooth (51) is meshed with the toothed plate (48), the top surface of the connecting plate (45) is fixedly installed with a micro motor (52), the top surface of the driving shaft of the micro motor (52) is fixedly installed with a connecting rod (53), and the top surface of the connecting rod (53) is rotatably connected to a roller (55 ), the roller (55) is slidably connected to the movable plate (54), two fixed blocks (56) are fixedly installed on one side of the air outlet box (46), and a rotating seat (57) is rotatably connected between the two fixed blocks (56), two placement blocks (61) are fixedly installed on the top surface of the connecting plate (45), and a rotating seat (62) is rotatably connected between the two placement blocks (61), and a support tube (59) is fixedly installed on one side of the rotating seat (62), and a movable rod (58) is movably sleeved on the inner circular wall surface of the support tube (59), and one end of the movable rod (58) is fixedly connected to one side of the rotating seat (57), and a spring (60) is movably sleeved on the outer circular wall surface of the support tube (59).

3. The square carrier debonding device according to claim 2, characterized in that: Two bearing seats (27) are fixedly installed on the top surface of the baffle (26) located on the right side, and a screw rod (28) is rotatably connected between the two bearing seats. A driving motor (31) for driving the screw rod (28) to rotate is fixedly installed on the top surface of the baffle (26) located on the right side. A mounting block (29) is threadedly connected to the outer cylindrical wall surface of the screw rod (28), and one side of the mounting block (29) is fixedly connected to one side of the cover plate (34). A slide rail (32) for supporting the sliding of the cover plate (34) is fixedly installed on the top surfaces of the two baffles (26). Two sliders (33) are fixedly installed on the bottom surface of the cover plate (34), and the sliders (33) are slidably connected to the slide rails (32).

4. The square carrier debonding device according to claim 3, characterized in that: A slide rail three (49) for limiting the movement of the tooth plate (48) is fixedly installed on the top surface of the second connecting plate (45); a slide groove (3) is provided on one side of the tooth plate (48); and the slide groove (3) is slidably connected to the slide rail three (49).

5. The square carrier debonding device according to claim 2, characterized in that: A mounting frame (16) is fixedly mounted on the top surface of the base plate (2), a sliding block (17) is slidably connected inside the mounting frame (16), a screw rod (18) is rotatably connected inside the mounting frame (16), the screw rod (18) is threadedly connected to the sliding block (17), a connecting block (19) is fixedly mounted on one side of the sliding block (17), a mounting plate (14) is mounted on the top surface of the connecting block (19), the bottom surface of the mounting plate (14) is fixedly connected to the top surface of the connecting plate (10), and a driving motor (13) for driving the screw rod (18) to rotate is mounted on one side of the mounting frame (16).

6. The square carrier debonding device according to claim 5, characterized in that: Two slide rails (11) for supporting the sliding of the connecting plate (10) are fixedly mounted on the top surface of the base plate (2), and a plurality of sliders (12) are fixedly mounted on the bottom surface of the connecting plate (10), wherein the sliders (12) are slidably connected to the slide rails (11).

7. The square carrier debonding device according to claim 1, characterized in that: A plurality of bearing sleeves (24) are fixedly mounted on the top surface of the support frame 1 (4), and a plurality of connecting rods (23) are fixedly mounted on the top surface of the debonding mechanism (6), wherein the outer circular wall surface of the connecting rod (23) is slidably connected to the inner circular wall surface of the bearing sleeve (24).

8. The square carrier debonding device according to claim 2, characterized in that: Two limiting rods (43) are fixedly mounted on the top surface of the positioning plate (44), and the limiting rods (43) are slidably connected to the supporting plate (35).

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