Semiconductor element with selection structure and preparation method thereof

Abstract

The present disclosure provides a semiconductor device including a first upper selection structure separated from a main signal pad at the same vertical plane as the main signal pad along a first direction; a fourth upper selection structure at the same vertical plane as the main signal pad and separated from the first upper selection structure in the first direction with the main signal pad interposed therebetween; the first grounding layer and the main signal pad are located on the same vertical plane, and the first grounding layer is separated from the main signal pad and the first upper selection structure; the second grounding layer and the main signal pad are arranged on the same vertical plane, and the second grounding layer is separated from the fourth upper selection structure and the main signal pad; the first lower selection structure is arranged at a position lower than a vertical plane of the main signal pad and is partially overlapped with the first upper selection structure and the first grounding layer; the second lower selection structure and the first lower selection structure are located on the same vertical plane, and the second lower selection structure is partially overlapped with the fourth upper selection structure and the second grounding layer; a first upper via between the first ground plane and the first lower selection structure; a third upper via between the second ground plane and the second lower selection structure; the second upper through hole is formed between the first upper selection structure and the first lower selection structure; the fourth upper through hole is formed between the fourth upper selection structure and the second lower selection structure; the first insulating layer is arranged between the second upper through hole and the first lower selection structure; the second insulating layer is arranged between the fourth upper through hole and the second lower selection structure.

Description

[0001] This application is a divisional application of Chinese invention patent application No. 2023111508261, filed on September 7, 2023, with the invention name of “Semiconductor element with selection structure”. Application No. 2023111508261 claims priority and benefits of U.S. formal application No. 18 / 209,755 filed on June 14, 2023. The contents of the U.S. formal application are incorporated herein by reference in their entirety. Technical Field

[0002] The present disclosure relates to a semiconductor device and a method for preparing the semiconductor device, and more particularly to a semiconductor device having a plurality of selection structures and a method for preparing the semiconductor device having the selection structures. Background Art

[0003] Semiconductor components are used in various electronic applications, such as personal computers, mobile phones, digital cameras, or other electronic devices. The size of semiconductor components is gradually getting smaller to meet the increasing demand for computing power. However, during the process of decreasing size, different problems are added, and such problems continue to increase. Therefore, there is still a constant challenge to achieve improved quality, yield, performance and reliability, as well as reduced complexity.

[0004] The above “prior art” description only provides background technology, does not admit that the above “prior art” description reveals the subject matter of the present disclosure, does not constitute the prior art of the present disclosure, and any description of the above “prior art” should not be regarded as any part of this case. Summary of the invention

[0005] An embodiment of the present disclosure provides a semiconductor element, including a first upper selection structure, which is located at the same vertical plane as a main signal pad along a first direction and is separated from the main signal pad; a fourth upper selection structure, which is located at the same vertical plane as the main signal pad and is separated from the first upper selection structure along the first direction, and the main signal pad is inserted therebetween; a first ground layer, which is located at the same vertical plane as the main signal pad and is separated from the main signal pad and the first upper selection structure; a second ground layer, which is located at the same vertical plane as the main signal pad and is separated from the fourth upper selection structure and the main signal pad; a first lower selection structure, which is located at a vertical plane lower than the main signal pad and is connected to the first upper selection structure in a top view. An upper selection structure partially overlaps with the first ground layer; a second lower selection structure is located at the same vertical plane as the first lower selection structure and overlaps with the fourth upper selection structure and the second ground layer in a top view; a first upper through hole is located between the first ground layer and the first lower selection structure; a third upper through hole is located between the second ground layer and the second lower selection structure; a second upper through hole is located between the first upper selection structure and the first lower selection structure; a fourth upper through hole is located between the fourth upper selection structure and the second lower selection structure; and a first insulating layer is located between the second upper through hole and the first lower selection structure; a second insulating layer is located between the fourth upper through hole and the second lower selection structure.

[0006] Another embodiment of the present disclosure provides a method for preparing a semiconductor element, including forming a first lower selection structure on a substrate, and including a first connection lower selection layer, a first vertical lower selection layer extending from the first connection lower selection layer along a first direction, and a first horizontal lower selection layer extending from the first connection lower selection layer along a second direction different from the first direction; forming a plurality of second upper through holes on the first horizontal lower selection layer and the first vertical lower selection layer, and forming a first upper through hole on the first connection lower selection layer; forming a plurality of first insulating layers between the plurality of second upper through holes and the first horizontal lower selection layer and between the plurality of second upper through holes and the first vertical lower selection layer; forming a first grounding layer on the first upper through hole; forming a first upper selection structure and a second upper selection structure on the plurality of second upper through holes respectively; forming a main signal pad at the same vertical plane as the first grounding layer and separated from the first upper selection structure and the second upper selection structure; and forming a wiring pad on the main signal pad, the first upper selection structure and the second upper selection structure. In a top view, the first upper selection structure partially overlaps the first horizontal lower selection layer, and the second upper selection structure partially overlaps the first vertical lower selection layer.

[0007] Due to the design of the semiconductor device disclosed in the present invention, one or more signal paths can be formed according to the selection during programming, which can be determined according to the needs of the user. The wiring pad can be used alone to conduct multiple signals to the main signal pad and the signal paths formed by selectively programming the first upper selection structure, the second upper selection structure, the third upper selection structure and / or the fourth upper selection structure to save valuable semiconductor real estate. Therefore, more functional elements can be provided for the semiconductor device.

[0008] The above has outlined the technical features and advantages of the present disclosure in a fairly broad manner, so that the detailed description of the present disclosure below can be better understood. Other technical features and advantages that constitute the subject matter of the claims of the present disclosure will be described below. It should be understood by those with ordinary knowledge in the technical field to which the present disclosure belongs that the concepts and specific embodiments disclosed below can be used to modify or design other structures or processes to achieve the same purpose as the present disclosure. It should also be understood by those with ordinary knowledge in the technical field to which the present disclosure belongs that such equivalent constructions cannot depart from the spirit and scope of the present disclosure as defined by the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] When with Figure 1 When read together, various aspects of the present disclosure can be best understood from the following detailed description. It should be understood that, in accordance with standard industry practice, various features are not drawn to scale. In fact, the size of various features can be arbitrarily increased or reduced for clarity of discussion.

[0010] Figure 1 1 is a flow chart illustrating a method for preparing a semiconductor device according to an embodiment of the present disclosure.

[0011] Figure 2 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure.

[0012] Figure 3 and Figure 4 is a schematic cross-sectional view, illustrating Figure 2 The cross section of the section lines A-A' and B-B'.

[0013] Figure 5 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure.

[0014] Figure 6 and Figure 7 is a schematic cross-sectional view, illustrating Figure 5 The cross section of the section lines A-A' and B-B'.

[0015] Figure 8 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure.

[0016] Fig. 9 and Fig.10 is a schematic cross-sectional view, illustrating Figure 8 The cross section of the section lines A-A' and B-B'.

[0017] Fig.11 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure.

[0018] Fig.12 and Fig.13 is a cross-sectional schematic diagram, illustrating the Fig.11 The cross section of the section lines A-A' and B-B'.

[0019] Fig.14 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure.

[0020] Fig.15 and Fig.16 is a schematic cross-sectional view, illustrating Fig.14 The cross section of the section lines A-A' and B-B'.

[0021] Fig.17 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure.

[0022] Fig.18 and Fig.19 is a cross-sectional schematic diagram illustrating an embodiment of the present disclosure along Fig.17 The cross-sections along the lines AA′ and BB′ illustrate a portion of the manufacturing process of the semiconductor device.

[0023] Fig. 20 and Fig.21 is a cross-sectional schematic diagram illustrating an embodiment of the present disclosure along Fig.17 The cross-sections along the lines AA′ and BB′ illustrate a portion of the manufacturing process of the semiconductor device.

[0024] Fig. 22 and Fig.23 is a cross-sectional schematic diagram illustrating an embodiment of the present disclosure along Fig.17 The cross-sections along the lines AA′ and BB′ illustrate a portion of the manufacturing process of the semiconductor device.

[0025] Fig.24 FIG. 4 is a top view schematically illustrating a semiconductor device according to another embodiment of the present disclosure.

[0026] Fig.25 FIG. 4 is a top view schematically illustrating an intermediate semiconductor element according to another embodiment of the present disclosure.

[0027] Fig.26 and Fig. 27 is a schematic cross-sectional view, illustrating Fig.15 The cross section of the section lines A-A' and B-B'.

[0028] Fig.28 FIG. 4 is a top view schematically illustrating an intermediate semiconductor element according to another embodiment of the present disclosure.

[0029] Fig.29 and Fig.30 is a schematic cross-sectional view, illustrating Fig.28 The cross section of the section lines AA' and BB'. The reference numerals are explained as follows:

[0030] 1A: Semiconductor components

[0031] 1B: Semiconductor components

[0032] 1C: Semiconductor components

[0033] 1D: Semiconductor components

[0034] 10: Preparation method

[0035] 101: Base

[0036] 103: First dielectric layer

[0037] 105: Second dielectric layer

[0038] 107: The third dielectric layer

[0039] 109: Fourth dielectric layer

[0040] 111: Fifth dielectric layer

[0041] 113: Sixth dielectric layer

[0042] 115: Upper passivation layer

[0043] 115-1: Opening

[0044] 115-3: Opening

[0045] 115-5: Opening

[0046] 117: Wiring pad

[0047] 119: Wire

[0048] 211: Lower pad

[0049] 213: Lower pad

[0050] 215: Lower pad

[0051] 217: Lower pad

[0052] 219: Lower pad

[0053] 221: Main bridge pad

[0054] 223: Main signal pad

[0055] 231: First ground layer

[0056] 233: Second ground layer

[0057] 311: First lower through hole

[0058] 321: Second lower through hole

[0059] 323: Second lower through hole

[0060] 325: Second lower through hole

[0061] 327: Second lower through hole

[0062] 331: Main upper through hole

[0063] 341: First upper through hole

[0064] 343: The third upper through hole

[0065] 351: Second upper through hole

[0066] 353: Second upper through hole

[0067] 355: Fourth upper through hole

[0068] 357: Fourth upper through hole

[0069] 411: First insulation layer

[0070] 413: First insulation layer

[0071] 415: Second insulation layer

[0072] 417: Second insulation layer

[0073] 510: First selection structure

[0074] 511: First level lower selection layer

[0075] 513: First vertical down selection layer

[0076] 515: First connection lower selection layer

[0077] 520: Second selection structure

[0078] 521: Second level lower selection layer

[0079] 523: Second vertical lower selection layer

[0080] 525: Second connection lower selection layer

[0081] 610: First upper selection structure

[0082] 611: First connection upper selection layer

[0083] 613: First signal upper selection layer

[0084] 620: Second upper selection structure

[0085] 621: Second connection upper selection layer

[0086] 623: Second signal upper selection layer

[0087] 630: Third upper selection structure

[0088] 631: Third connection upper selection layer

[0089] 633: Third signal upper selection layer

[0090] 640: Fourth upper selection structure

[0091] 641: Fourth connection upper selection layer

[0092] 643: Fourth signal upper selection layer

[0093] D1: Direction

[0094] S11: Steps

[0095] S13: Steps

[0096] S15: Steps

[0097] S17: Steps

[0098] VL1: Vertical plane

[0099] VL2: Vertical plane

[0100] VL3: Vertical plane

[0101] X: Direction

[0102] Y: direction

[0103] Z: Direction DETAILED DESCRIPTION

[0104] Specific examples of components and configurations are described below to simplify the embodiments of the present disclosure. Of course, these embodiments are for illustration only and are not intended to limit the scope of the present disclosure. For example, in the description, the first component is formed on the second component, which may include an embodiment in which the first and second components are in direct contact, and may also include an embodiment in which additional components are formed between the first and second components so that the first and second components are not in direct contact. In addition, the embodiments of the present disclosure may repeat reference numbers and / or letters in many examples. The purpose of these repetitions is to simplify and clarify, and unless otherwise specified in the text, they do not themselves represent a specific relationship between the various embodiments and / or the configurations discussed.

[0105] Furthermore, for ease of description, spatially relative terms such as "beneath," "below," "lower," "above," "upper," etc. may be used herein to describe the relationship of one element or feature shown in the figures to another (other) element or feature. The spatially relative terms are intended to encompass different orientations of the elements in use or operation in addition to the orientation depicted in the figures. The device may have other orientations (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may be interpreted accordingly.

[0106] It should be understood that when forming a component on, connected to, and / or coupled to another component, it may include embodiments in which these components are in direct contact, and may also include embodiments in which additional components are formed between these components so that these components are not in direct contact.

[0107] It should be understood that although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers, or sections, these elements, components, regions, layers, or sections are not limited by these terms. Instead, these terms are only used to distinguish one element, component, region, layer, or section from another region, layer, or section. Therefore, without departing from the teachings of the progressive conception of the present invention, the first element, component, region, layer, or section discussed below may be referred to as a second element, component, region, layer, or section.

[0108] Unless the context indicates otherwise, as used herein, terms such as "same," "equal," "planar," or "coplanar" when referring to orientation, layout, location, shapes, sizes, amounts, or other measures do not necessarily mean an exactly identical orientation, layout, location, shape, size, amount, or other measure, but rather mean nearly identical orientation, layout, location, shape, size, amount, or other measure within acceptable variances that may occur, for example, due to manufacturing processes. The term "substantially" may be used herein to convey this meaning. For example, substantially the same, substantially equal, or substantially planar, is exactly the same, equal, or planar, or it may be the same, equal, or planar within an acceptable variance, and for example, the acceptable variance may occur due to the manufacturing process.

[0109] In the present disclosure, a semiconductor device generally refers to a device that can operate by utilizing semiconductor characteristics, and an electro-optic device, a light-emitting display device, a semiconductor circuit, and an electronic device are all included in the category of semiconductor devices.

[0110] It should be understood that in the description of the present disclosure, above (or up) corresponds to the direction of the Z-direction arrow, and below (or down) corresponds to the relative direction of the Z-direction arrow.

[0111] Figure 1 1 is a flow chart illustrating a method 10 for manufacturing a semiconductor device 1A according to an embodiment of the present disclosure. Figure 2 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure. Figure 3 and Figure 4is a schematic cross-sectional view, illustrating Figure 2 The cross section of the section lines A-A' and B-B'. Figure 5 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure. Figure 6 and Figure 7 is a schematic cross-sectional view, illustrating Figure 5 The cross section of the section lines A-A' and B-B'.

[0112] Figure 8 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure. Fig. 9 and Fig.10 is a schematic cross-sectional view, illustrating Figure 8 The cross section of the section lines A-A' and B-B'. Fig.11 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure. Fig.12 and Fig.13 is a schematic cross-sectional view, illustrating Fig.11 The cross section of the section lines A-A' and B-B'.

[0113] Please refer to Figures 1 to 13 In step S11 , a substrate 101 may be provided, and a main bridge pad 221 , a first lower selection structure 510 , and a second lower selection structure 520 may be formed on the substrate 101 .

[0114] Please refer to Figures 2 to 4 In some embodiments, the substrate 101 may include a bulk semiconductor substrate, which is completely composed of at least one semiconductor material, a plurality of device elements (not shown for clarity), a plurality of dielectric layers (not shown for clarity), and a plurality of conductive elements (not shown for clarity). For example, the bulk semiconductor substrate may include an elemental semiconductor, such as silicon or germanium; a compound semiconductor, such as silicon germanium, silicon carbide, gallium arsenide, gallium phosphide, indium phosphide, indium arsenide, indium antimonide, or a III-V compound semiconductor or a II-VI compound semiconductor; or a combination thereof.

[0115] In some embodiments, the substrate 101 may also include a semiconductor-on-insulator structure, which is composed of a processing substrate, an insulator layer, and a topmost semiconductor material layer from bottom to top. The processing substrate and the topmost semiconductor material layer may include the same material as the aforementioned bulk semiconductor substrate. The insulator layer may be a crystalline or amorphous dielectric material, such as an oxide and / or a nitride. For example, the insulator layer may be a dielectric oxide, such as silicon oxide. As another example, the insulator layer may be a dielectric nitride, such as silicon nitride or boron nitride. As another example, the insulator layer may include a stack of dielectric oxides and dielectric nitrides, such as a stack of silicon oxide and silicon nitride or boron nitride in any order. The insulator layer may have a thickness between approximately 10 nm and 200 nm.

[0116] It should be understood that the term "about" modifies a quantity of an ingredient, component, or reactant of the present disclosure, which indicates the variation in the numerical quantity that may occur, for example, through typical measurements and liquid handling procedures, and the liquid handling procedures are used to make concentrates or solutions. Furthermore, the variation may arise from inadvertent errors in the measurement procedures used to make the compositions or implement the methods or the like, differences in manufacturing, sources, or purity of the ingredients. In one aspect, the term "about" means within 10% of the reported value. In another aspect, the term "about" means within 5% of the reported value. In yet another aspect, the term "about" means within 10, 9, 8, 7, 6, 5, 4, 3, 2, or 1% of the reported value.

[0117] A plurality of device elements may be formed on the substrate 101. Some portions of the plurality of device elements may be formed in the substrate 101. The plurality of device elements may be transistors, such as complementary metal oxide semiconductor transistors, metal oxide semiconductor field effect transistors, fin field effect transistors, the like, or combinations thereof.

[0118] A plurality of dielectric layers may be formed on the substrate 101 and cover a plurality of device elements. For example, in some embodiments, the plurality of dielectric layers may include silicon oxide, borophosphosilicate glass, undoped silicate glass, fluorinated silicate glass, low-k dielectric material, the like, or a combination thereof. The low-k dielectric material may have a dielectric constant less than 3.0 or even less than 2.5. In some embodiments, the low-k dielectric material may have a dielectric constant less than 2.0. The fabrication techniques for the plurality of dielectric layers may include deposition processes such as chemical vapor deposition, plasma enhanced chemical vapor deposition, or similar processes. A planarization process may be performed after the deposition process to remove excess material and provide a substantially flat surface for subsequent processing steps.

[0119] A plurality of conductive features may include a plurality of interconnect layers, a plurality of conductive vias, and a plurality of conductive pads. A plurality of interconnect layers may be separated from one another and may be horizontally arranged in a plurality of dielectric layers along the Z direction. In the present embodiment, the topmost interconnect layer may be designated as a conductive pad. A plurality of conductive vias may connect adjacent interconnect layers, adjacent device elements and interconnect layers, and adjacent conductive pads and interconnect layers along the Z direction. In some embodiments, a plurality of conductive vias may improve heat dissipation and may provide structural support. In some embodiments, for example, a plurality of conductive features may include tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitrides (e.g., titanium nitride), transition metal aluminides, or combinations thereof. A plurality of conductive features may be formed during the formation of a plurality of dielectric layers.

[0120] In some embodiments, multiple device elements and multiple conductive features can be configured together into multiple functional units of substrate 101. In the description of the present disclosure, a functional unit generally refers to a functionally related circuit that is divided into different units for functional purposes. In some embodiments, for example, the functional unit of substrate 101 may include highly complex circuits, such as a processor core, a memory controller, or an accelerator unit.

[0121] Please refer to Figures 2 to 4 , the first dielectric layer 103 may be formed on the substrate 101. In some embodiments, the first dielectric layer 103 may be a portion of a plurality of dielectric layers of the substrate 101. In some embodiments, for example, the first dielectric layer 103 may include silicon oxide, borophosphosilicate glass, undoped silicate glass, fluorinated silicate glass, a low-k dielectric material such as a spin-on low-k dielectric layer or a chemical vapor deposited low-k dielectric layer, or a combination thereof. In some embodiments, the first dielectric layer 103 may include a self-planarizing material such as spin-on glass or SiLK. TMThe use of a self-planarizing dielectric material can avoid the need to perform a subsequent planarization step. In some embodiments, for example, the fabrication technique of the first dielectric layer 103 can include a deposition process including chemical vapor deposition, plasma enhanced chemical vapor deposition, evaporation, or spin coating. In some embodiments, a planarization process, such as chemical mechanical polishing, can be performed to provide a substantially flat surface for subsequent processing steps.

[0122] Please refer to Figures 2 to 4 , a plurality of lower pads 211, 213, 215, 217, 219 may be formed in the first dielectric layer 103. The upper surfaces of the plurality of lower pads 211, 213, 215, 217, 219 may be substantially coplanar with the upper surface of the first dielectric layer 103. The plurality of lower pads 211, 213, 215, 217, 219 may be electrically coupled to the device elements of the substrate 101 and may be referred to as part of the conductive features of the substrate 101.

[0123] In some embodiments, the plurality of pad openings ( Figure 2 road Figure 4 A first dielectric layer 103 (not shown) may be formed in the first dielectric layer 103, and a conductive material may be formed to fill the pad openings to form a plurality of lower pads 211, 213, 215, 217, 219. A planarization process, such as chemical mechanical polishing, may be performed after filling the conductive material to remove excess material and provide a substantially flat surface for subsequent processing steps.

[0124] The pad opening fabrication technique may include a lithography process followed by an etching process. In some embodiments, the etching process may be an anisotropic dry etching process using argon and tetrafluoromethane as etchants. The process temperature of the etching process may be between about 120° C. and about 160° C. The process pressure of the etching process may be between about 0.3 Torr and about 0.4 Torr. The process duration of the etching process may be between about 33 seconds and about 39 seconds.

[0125] Alternatively, in some embodiments, the etching process may be an anisotropic dry etching process using helium and nitrogen trifluoride as etchants. The process temperature of the etching process may be between about 80° C. and about 100° C. The process pressure of the etching process may be between about 1.2 Torr and about 1.3 Torr. The process duration of the etching process may be between about 20 seconds and about 30 seconds.

[0126] In some embodiments, for example, the conductive material can be tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitrides (e.g., titanium nitride), transition metal aluminides, or combinations thereof.

[0127] In some embodiments, the pad openings may be sequentially filled with a conductive material by sputtering or electroless plating. For example, when sputtering with an aluminum copper material as a source to fill the pad openings, the process temperature of the sputtering may be between about 100°C and about 400°C. The process pressure of the sputtering may be between about 1 mTorr and about 100 mTorr. As another example, the pad openings may be filled by an electroplating process using a plating solution. The electroplating solution may include copper sulfate, copper methane sulfonate, copper gluconate, copper sulfamate, copper nitrate, copper phosphate, or copper chloride. The pH of the plating solution may be between about 2 and about 6, or between about 3 and about 5. The process temperature of the electroplating process may be maintained between about 40°C and about 75°C, or between about 50°C and about 70°C.

[0128] In some embodiments, the plurality of lower pads 211, 213, 215, 217, 219 may be arranged in a specific pattern in a top view. For example, in the present embodiment, the plurality of lower pads 211, 213, 215, 217, 219 may be arranged in a cross pattern. In detail, the lower pad 211 and the lower pad 219 may be separated from each other along the Y direction, and the lower pad 215 is inserted between the lower pad 211 and the lower pad 219. The lower pad 213 and the lower pad 217 may be separated from each other along the X direction, and the lower pad 215 is inserted between the lower pad 213 and the lower pad 217.

[0129] Please refer to Figures 5 to 7 , a second dielectric layer 105 may be formed on the first dielectric layer 103. In some embodiments, the second dielectric layer 105 may be referred to as a part of the dielectric layer of the substrate 101. In some embodiments, the second dielectric layer 105 may include the same material as the first dielectric layer 103, and its manufacturing technology may include a similar process as the first dielectric layer 103, which will not be described again.

[0130] Please refer to Figures 5 to 7 , a first lower via 311 may be formed in the second dielectric layer 105 and formed on the lower pad 215. The main bridge pad 221 may be formed in the second dielectric layer 105 and formed on the first lower via 311. In some embodiments, for example, the first lower via 311 and the main bridge pad 221 may include tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbide (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitride (e.g., titanium nitride), transition metal aluminide, or a combination thereof. In some embodiments, for example, the manufacturing technology of the first lower via 311 and the main bridge pad 221 may include a damascene process.

[0131] Please refer to Figures 8 to 10, a third dielectric layer 107 may be formed on the second dielectric layer 105. In some embodiments, the third dielectric layer 107 may be referred to as a part of the dielectric layer of the substrate 101. In some embodiments, the third dielectric layer 107 may include the same material as the first dielectric layer 103, and its manufacturing technology may include a similar process as the first dielectric layer 103, which will not be described again.

[0132] Please refer to Figures 8 to 10 , a plurality of second lower vias 321, 323, 325, 327 may be formed along the third dielectric layer 107 and the second dielectric layer 105. A plurality of second lower vias 321, 323, 325, 327 may be formed on a plurality of lower pads 211, 213, 217, 219, respectively. In some embodiments, for example, the plurality of second lower vias 321, 323, 325, 327 may include tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitrides (e.g., titanium nitride), transition metal aluminides, or combinations thereof. In some embodiments, the plurality of second lower vias 321, 323, 325, 327 may be referred to as a portion of the conductive features of the substrate 101.

[0133] Please refer to Figure 11 to Figure 13 , a fourth dielectric layer 109 may be formed on the third dielectric layer 107. In some embodiments, the fourth dielectric layer 109 may be referred to as a part of the dielectric layer of the substrate 101. In some embodiments, the fourth dielectric layer 109 may include the same material as the first dielectric layer 103, and its manufacturing technology may include a similar process as the first dielectric layer 103, which will not be described again.

[0134] Please refer to Figure 11 to Figure 13 The first lower selection structure 510 may be formed along the fourth dielectric layer 109 and formed on the second lower via 321 and the second lower via 323. The second lower selection structure 520 may be formed along the fourth dielectric layer 109 and formed on the second lower via 325 and the second lower via 327. The first lower selection structure 510 and the second lower selection structure 520 may be formed at a vertical plane VL2 higher than a vertical plane VL1 of the main bridge pad 221.

[0135] In some embodiments, multiple structural openings ( Figure 11 to Figure 13The fourth dielectric layer 109 may be formed with a conductive material to fill the structural openings to form a first lower selection structure 510 and a second lower selection structure 520. The manufacturing technology of the structural openings may include a lithography process and a subsequent etching process. In some embodiments, the etching process may be an anisotropic dry etching process using argon and tetrafluoromethane as etchants. The process temperature of the etching process may be between about 120° C. and about 160° C. The process pressure of the etching process is between about 0.3 Torr and about 0.4 Torr. The process duration of the etching process may be between about 33 seconds and about 39 seconds.

[0136] Alternatively, in some embodiments, the etching process may be an anisotropic dry etching process using helium and nitrogen trifluoride as etchants. The process temperature of the etching process may be between about 80° C. and about 100° C. The process pressure of the etching process may be between about 1.2 Torr and about 1.3 Torr. The process duration of the etching process may be between about 20 seconds and about 30 seconds. In some embodiments, for example, the conductive material may be tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbide (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitride (e.g., titanium nitride), transition metal aluminide, or a combination thereof.

[0137] In some embodiments, the structural openings may be sequentially filled with conductive materials by sputtering or electroless plating. For example, when an aluminum copper material is used as a source for sputtering to fill the structural openings, the process temperature of the sputtering may be between about 100°C and about 400°C. The process pressure of the sputtering may be between about 1 mTorr and about 100 mTorr. As another example, the structural openings may be filled by an electroplating process using a plating solution. The electroplating solution may include copper sulfate, copper methane sulfonate, copper gluconate, copper sulfamate, copper nitrate, copper phosphate, or copper chloride. The pH value of the plating solution may be between about 2 and about 6, or between about 3 and about 5. The process temperature of the electroplating process may be maintained between about 40°C and about 75°C, or between about 50°C and about 70°C.

[0138] A planarization process, such as chemical mechanical polishing, may be performed after filling with the conductive material to remove excess material and provide a substantially planar surface for subsequent processing steps.

[0139] Please refer to Figure 11 to Figure 13, the first lower selection structure 510 may include a first horizontal lower selection layer 511, a first vertical lower selection layer 513, and a first connection lower selection layer 515. In a top view, the first horizontal lower selection layer 511 may extend along the X direction. The first vertical lower selection layer 513 may extend along the Y direction. The first horizontal lower selection layer 511 and the first vertical lower selection layer 513 may cross each other. The crossing portion of the first horizontal lower selection layer 511 and the first vertical lower selection layer 513 may be referred to as the first connection lower selection layer 515. In other words, the first horizontal lower selection layer 511 and the first vertical lower selection layer 513 may extend from the first connection lower selection layer 515 along the X direction and the Y direction, respectively.

[0140] In the cross-sectional view, the first horizontal lower selection layer 511 may be formed on the second lower through hole 321. The first vertical lower selection layer 513 may be formed on the second lower through hole 323.

[0141] In some embodiments, the first horizontal lower selection layer 511 and the first vertical lower selection layer 513 may not extend in directions perpendicular to each other.

[0142] Please refer to Figure 11 to Figure 13 In a top view, the second lower selection structure 520 may be separated from the first lower selection structure 510 along a D1 direction. The D1 direction may be inclined relative to the X direction and the Y direction. The second lower selection structure 520 may include a second horizontal lower selection layer 521, a second vertical lower selection layer 523, and a second connection lower selection layer 525.

[0143] In a top view, the second horizontal lower selection layer 521 may extend along the X direction. In some embodiments, the second horizontal lower selection layer 521 and the first horizontal lower selection layer 511 may extend in opposite directions. For example, the first horizontal lower selection layer 511 may extend along the positive X direction, and the second horizontal lower selection layer 521 may extend along the negative X direction. The second vertical lower selection layer 523 may extend along the Y direction. In some embodiments, the second vertical lower selection layer 523 and the first vertical lower selection layer 513 extend in opposite directions. For example, the first vertical lower selection layer 513 may extend along the positive Y direction, and the second vertical lower selection layer 523 may extend along the negative Y direction.

[0144] The second horizontal lower selection layer 521 and the second vertical lower selection layer 523 may cross each other in a top view. The intersection of the second horizontal lower selection layer 521 and the second vertical lower selection layer 523 may be referred to as a second connection lower selection layer 525. In other words, the second horizontal lower selection layer 521 and the second vertical lower selection layer 523 may extend from the second connection lower selection layer 525 along the X direction and the Y direction, respectively.

[0145] In a cross-sectional view, the second horizontal lower selection layer 521 may be formed on the second lower through hole 327. The second vertical lower selection layer 523 may be formed on the second lower through hole 325.

[0146] In some embodiments, the second horizontal lower selection layer 521 and the second vertical lower selection layer 523 may not extend in directions perpendicular to each other. In this case, the second horizontal lower selection layer 521 may still extend in a direction parallel to the first horizontal lower selection layer 511, and the second vertical lower selection layer 523 may still extend in a direction parallel to the first vertical lower selection layer 513.

[0147] Fig.14 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure. Fig.15 and Fig.16 is a schematic cross-sectional view, illustrating Fig.14 The cross section of the section lines A-A' and B-B'. Fig.17 FIG. 4 is a top view schematically illustrating a middle semiconductor element according to an embodiment of the present disclosure. Fig.18 and Fig.19 is a cross-sectional schematic diagram illustrating an embodiment of the present disclosure along Fig.17 The cross-sections along the lines AA′ and BB′ illustrate a portion of the manufacturing process of the semiconductor device.

[0148] Fig. 20 and Fig.21 is a cross-sectional schematic diagram illustrating an embodiment of the present disclosure along Fig.17 The cross sections along the lines AA′ and BB′ illustrate a portion of the manufacturing process of the semiconductor device 1A. Fig. 22 and Fig.23 is a cross-sectional schematic diagram illustrating an embodiment of the present disclosure along Fig.17 The cross sections along the lines AA′ and BB′ illustrate a portion of the manufacturing process of the semiconductor device 1A.

[0149] Please refer to Figure 1 and Figure 14 to Figure 16 In step S13, a first upper through hole 341 and a plurality of second upper through holes 351, 353 may be formed on the first lower selection structure 510, a plurality of main upper through holes 331 may be formed on the main bridge pad 221, a third upper through hole 343 and a plurality of fourth upper through holes 355, 357 may be formed on the second lower selection structure 520, a plurality of first insulating layers 411, 413 may be formed between the plurality of second upper through holes 351, 353 and the first lower selection structure 510, and a plurality of second insulating layers 415, 417 may be formed between the plurality of fourth upper through holes 355, 357 and the second lower selection structure 520.

[0150] Please refer to Figure 14 to Figure 16, a fifth dielectric layer 111 may be formed on the fourth dielectric layer 109. In some embodiments, the fifth dielectric layer 111 may be referred to as a part of the dielectric layer of the substrate 101. In some embodiments, the fifth dielectric layer 111 may include the same material as the first dielectric layer 103, and its manufacturing technology may include a similar process to the first dielectric layer 103, which will not be described again.

[0151] Please refer to Figure 14 to Figure 16 , a plurality of main upper vias 331 may be formed along the fifth dielectric layer 111, the fourth dielectric layer 109, and the third dielectric layer 107 and formed on the main bridge pad 221. For example, the plurality of main upper vias 331 may include tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitrides (e.g., titanium nitride), transition metal aluminides, or combinations thereof. During the formation of the plurality of main upper vias 331, the first lower selection structure 510 and the second lower selection structure 520 may be covered by a mask layer (not shown for clarity), which is removed after the plurality of main upper vias 331 are formed.

[0152] Please refer to Figure 14 to Figure 16 , a plurality of via openings (not shown for clarity) may be formed along the fifth dielectric layer 111 to expose the first horizontal lower selection layer 511, the first vertical lower selection layer 513, the second horizontal lower selection layer 521, and the second vertical lower selection layer 523. An insulating layer (not shown for clarity) may be conformally formed in the plurality of via openings and on the upper surface of the fifth dielectric layer 111. A conductive layer may be formed on the insulating layer and may completely fill the plurality of via openings. A planarization process, such as chemical mechanical polishing, may be performed until the upper surface of the fifth dielectric layer 111 is exposed to remove excess material and provide a substantially flat surface for subsequent processing steps. After the planarization process, the remaining insulating layer may become a plurality of first insulating layers 411, 413 and a plurality of second insulating layers 415, 417. The remaining conductive layer may become a plurality of second upper vias 351, 353 and a plurality of fourth upper vias 355, 357.

[0153] In some embodiments, for example, the insulating layer may include a high-k material. In some embodiments, the high-k material may include a hafnium-containing material. For example, the hafnium-containing material may be hafnium oxide, hafnium silicon oxide, hafnium silicon oxynitride, or a combination thereof. In some embodiments, for example, the high-k material may be lanthanum oxide, lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide, zirconium silicon oxynitride, aluminum oxide, or a combination thereof. In some embodiments, for example, the conductive layer may include tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitrides (e.g., titanium nitride), transition metal aluminides, or a combination thereof.

[0154] The plurality of main upper vias 331 may be covered during the formation of the plurality of second upper vias 351 , 353 , the plurality of fourth upper vias 355 , 357 , the plurality of first insulating layers 411 , 413 , and the plurality of second insulating layers 415 , 417 .

[0155] In detail, the second upper via hole 351 may be formed on the first horizontal lower selection layer 511. The first insulating layer 411 may be formed between the second upper via hole 351 and the first horizontal lower selection layer 511. The second upper via hole 353 may be formed on the first vertical lower selection layer 513. The first insulating layer 413 may be formed between the second upper via hole 353 and the first vertical lower selection layer 513. The fourth upper via hole 355 may be formed on the second vertical lower selection layer 523. The second insulating layer 415 may be formed between the fourth upper via hole 355 and the second vertical lower selection layer 523. The fourth upper via hole 357 may be formed on the second horizontal lower selection layer 521. The second insulating layer 417 may be formed between the fourth upper via hole 357 and the second horizontal lower selection layer 521.

[0156] Please refer to Figure 14 to Figure 16 , the first upper via 341 and the third upper via 343 may be formed along the fifth dielectric layer 111. The first upper via 341 may be formed on the first connection lower selection layer 515. The third upper via 343 may be formed on the second connection lower selection layer 525. In some embodiments, for example, the first upper via 341 and the third upper via 343 may include tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbide (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitride (e.g., titanium nitride), transition metal aluminide, or a combination thereof.

[0157] Please refer to Figure 1 and Figure 17 to Figure 19 In step S15, a main signal pad 223 can be formed on the main bridging pad 221, a first ground layer 231 can be formed on the first upper through hole 341, a second ground layer 233 can be formed on the third upper through hole 343, a first upper selection structure 610 and a second upper selection structure 620 can be formed on the plurality of second upper through holes 351, 353, and a third upper selection structure 630 and a fourth upper selection structure 640 can be formed on the plurality of fourth upper through holes 355, 357.

[0158] Please refer to Figure 17 to Figure 19, a sixth dielectric layer 113 may be formed on the fifth dielectric layer 111. In some embodiments, the sixth dielectric layer 113 may be referred to as a part of the dielectric layer of the substrate 101. In some embodiments, the sixth dielectric layer 113 may include the same material as the first dielectric layer 103, and its manufacturing technology may include a similar process as the first dielectric layer 103, which will not be described again.

[0159] Please refer to Figure 17 to Figure 19 , the main signal pad 223, the first ground layer 231, the second ground layer 233, the first upper selection structure 610, the second upper selection structure 620, the third upper selection structure 630 and the fourth upper selection structure 640 may be formed along the sixth dielectric layer 113. In some embodiments, a plurality of openings ( Figure 17 to Figure 19 A plurality of dielectric layers (not shown in the figure) may be formed in the sixth dielectric layer 113, and a conductive material may be formed to fill the openings to form the main signal pad 223, the first ground layer 231, the second ground layer 233, the first upper selection structure 610, the second upper selection structure 620, the third upper selection structure 630, and the fourth upper selection structure 640. A planarization process, such as chemical mechanical polishing, may be performed after filling the conductive material to remove excess material and provide a substantially flat surface for subsequent processing steps.

[0160] The techniques for making the openings may include a lithography process followed by an etching process. In some embodiments, the etching process may be an anisotropic dry etching process using argon and tetrafluoromethane as etchants. The process temperature of the etching process may be between about 120° C. and about 160° C. The process pressure of the etching process may be between about 0.3 Torr and about 0.4 Torr. The process duration of the etching process may be between about 33 seconds and about 39 seconds.

[0161] Alternatively, in some embodiments, the etching process may be an anisotropic dry etching process using helium and nitrogen trifluoride as etchants. The process temperature of the etching process may be between about 80° C. and about 100° C. The process pressure of the etching process may be between about 1.2 Torr and about 1.3 Torr. The process duration of the etching process may be between about 20 seconds and about 30 seconds.

[0162] In some embodiments, for example, the conductive material can be tungsten, cobalt, zirconium, tantalum, titanium, aluminum, ruthenium, copper, metal carbides (e.g., tantalum carbide, titanium carbide, tantalum magnesium carbide), metal nitrides (e.g., titanium nitride), transition metal aluminides, or combinations thereof.

[0163] In some embodiments, the openings may be sequentially filled with a conductive material by sputtering or electroless plating. For example, when sputtering with an aluminum copper material as a source to fill the openings, the process temperature of the sputtering may be between about 100°C and about 400°C. The process pressure of the sputtering may be between about 1 mTorr and about 100 mTorr. As another example, the openings may be filled by an electroplating process using a plating solution. The electroplating solution may include copper sulfate, copper methane sulfonate, copper gluconate, copper sulfamate, copper nitrate, copper phosphate, or copper chloride. The pH of the plating solution may be between about 2 and about 6, or between about 3 and about 5. The process temperature of the electroplating process may be maintained between about 40°C and about 75°C, or between about 50°C and about 70°C.

[0164] Please refer to Figure 17 to Figure 19 , the main signal pad 223 may be formed on the plurality of main upper vias 331 to be electrically coupled to the main bridge pad 221 and the lower pad 215. The first ground layer 231 may be formed on the first upper via 341 to be electrically coupled to the first connection lower selection layer 515 of the first lower selection structure 510. The second ground layer 233 may be formed on the third upper via 343 to be electrically coupled to the second connection lower selection layer 525 of the second lower selection structure 520.

[0165] Please refer to Figure 17 to Figure 19 , the first upper selection structure 610 may be formed on the second upper through hole 351. The second upper selection structure 620 may be formed on the second upper through hole 353. The third upper selection structure 630 may be formed on the fourth upper through hole 355. The fourth upper selection structure 640 may be formed on the fourth upper through hole 357. The main signal pad 223, the first ground layer 231, the second ground layer 233, the first upper selection structure 610, the second upper selection structure 620, the third upper selection structure 630 and the fourth upper selection structure 640 may be located at the same vertical plane VL3, which is higher than the vertical plane VL2 of the first lower selection structure 510 and the second lower selection structure 520.

[0166] In detail, the first upper selection structure 610 may include a first connection upper selection layer 611 and a first signal upper selection layer 613. In a top view, the first connection upper selection layer 611 may have a linear profile extending along the Y direction and may be separated from the main signal pad 223 along the Y direction. The first connection upper selection layer 611 may partially overlap with the first horizontal lower selection layer 511. For example, in the present embodiment, the lower portion of the first connection upper selection layer 611 overlaps with the first horizontal lower selection layer 511. The first signal upper selection layer 613 may contact the upper portion of the first connection upper selection layer 611, be separated from the main signal pad 223, and be located between the main signal pad 223 and the first connection upper selection layer 611. In some embodiments, the first signal upper selection layer 613 may have an arc-shaped profile. The concave surface of the first signal upper selection layer 613 may face the main signal pad 223.

[0167] The second upper selection structure 620 may include a second connection upper selection layer 621 and a second signal upper selection layer 623. In a top view, the second connection upper selection layer 621 may have a linear profile extending along the X direction and may be separated from the main signal pad 223 along the X direction. The second connection upper selection layer 621 may partially overlap with the first vertical lower selection layer 513. For example, in the present embodiment, the left portion of the second connection upper selection layer 621 overlaps with the first vertical lower selection layer 513. The second signal upper selection layer 623 may contact the right portion of the second connection upper selection layer 621, be separated from the main signal pad 223, and be located between the main signal pad 223 and the second connection upper selection layer 621. In some embodiments, the second signal upper selection layer 623 may have an arc-shaped profile. The concave surface of the second signal upper selection layer 623 may face the main signal pad 223.

[0168] The third upper selection structure 630 may include a third connection upper selection layer 631 and a third signal upper selection layer 633. In a top view, the third connection upper selection layer 631 may have a linear profile extending along the X direction, and is separated from the second signal upper selection layer 623 along the X direction, and the main signal pad 223 is interposed therebetween. The third connection upper selection layer 631 may partially overlap with the second vertical lower selection layer 523. For example, in the present embodiment, the right side portion of the third connection upper selection layer 631 overlaps with the second vertical lower selection layer 523. The third signal upper selection layer 633 may contact the left side portion of the third connection upper selection layer 631, be separated from the main signal pad 223, and be located between the main signal pad 223 and the third connection upper selection layer 631. In other words, the third signal upper selection layer 633 may be separated from the second signal upper selection layer 623 along the X direction, and the main signal pad 223 is interposed therebetween. In some embodiments, the third signal upper selection layer 633 may have an arcuate profile. A concave surface of the third signal upper selection layer 633 may face the main signal pad 223 .

[0169] The fourth upper selection structure 640 may include a fourth connection upper selection layer 641 and a fourth signal upper selection layer 643. In a top view, the fourth connection upper selection layer 641 may have a linear profile extending along the Y direction, and is separated from the first signal upper selection layer 613 along the Y direction, and the main signal pad 223 is interposed therebetween. The fourth connection upper selection layer 641 may partially overlap with the second horizontal lower selection layer 521. For example, in the present embodiment, the upper portion of the fourth connection upper selection layer 641 overlaps with the second horizontal lower selection layer 521. The fourth signal upper selection layer 643 may contact the lower portion of the fourth connection upper selection layer 641, be separated from the main signal pad 223, and be located between the main signal pad 223 and the fourth connection upper selection layer 641. In other words, the fourth signal upper selection layer 643 may be separated from the first signal upper selection layer 613 along the Y direction, and the main signal pad 223 is interposed therebetween. In some embodiments, the fourth signal upper selection layer 643 may have an arcuate profile. A concave surface of the fourth signal upper selection layer 643 may face the main signal pad 223 .

[0170] Please refer to Figure 1 and Figure 20 to Figure 23 In step S17 , a wiring pad 117 may be formed on the main signal pad 223 , the first upper selection structure 610 , the second upper selection structure 620 , the third upper selection structure 630 , and the fourth upper selection structure 640 .

[0171] Please refer to Fig. 20 and Fig.21, an upper passivation layer 115 may be formed on the sixth dielectric layer 113. In some other embodiments, the upper passivation layer 115 may be a dielectric layer. The dielectric layer may include a nitride such as silicon nitride, an oxide such as silicon oxide, an oxynitride such as silicon oxynitride, silicon oxynitride, phosphosilicate glass, borosilicate glass, boron-doped phosphosilicate glass, the like, or a combination thereof. In some embodiments, the upper passivation layer 115 may include poly(p-oxadiazole benzene), polyimide, benzocyclobutene, Ajinomoto built-in film, solder mask, the like, or a combination thereof. The upper passivation layer 115 comprising a polymeric material may have many attractive properties, such as the ability to fill openings with high aspect ratios, a relatively low dielectric constant (approximately 3.2), a simple deposition process, a reduction in sharp features or steps in the underlying layer, and high temperature resistance after curing.

[0172] In some embodiments, for example, the manufacturing technique of the upper passivation layer 115 may include spin coating, lamination, deposition or the like. The deposition may include chemical vapor deposition, such as plasma enhanced chemical vapor deposition. The process temperature of plasma enhanced chemical vapor deposition may be between about 350° C. and about 450° C. The process pressure of plasma enhanced chemical vapor deposition may be between about 2.0 Torr and about 2.8 Torr. The process duration of plasma enhanced chemical vapor deposition may be between about 8 seconds and about 12 seconds.

[0173] Please refer to Fig. 20 and Fig.21 , a plurality of openings 115-1, 115-3, 115-5 may be formed along the upper passivation layer 115 to expose the first ground layer 231, the second ground layer 233, the main signal pad 223, the first signal upper selection layer 613, the second signal upper selection layer 623, the third signal upper selection layer 633, and the fourth signal upper selection layer 643. In detail, the main signal pad 223, the first signal upper selection layer 613, the second signal upper selection layer 623, the third signal upper selection layer 633, and the fourth signal upper selection layer 643 may be exposed through the opening 115-1. The first ground layer 231 may be exposed through the opening 115-3. The second ground layer 233 may be exposed through the opening 115-5.

[0174] Please refer to Fig. 20 and Fig.21, the first upper selection structure 610, the second upper through hole 351, the first insulating layer 411 and the first lower selection structure 510 can be configured as a programmable unit (also referred to as a first programmable unit), such as an anti-fuse. The second upper selection structure 620, the second upper through hole 353, the first insulating layer 413 and the first lower selection structure 510 can be configured as a programmable unit (also referred to as a second programmable unit), such as an anti-fuse. The third upper selection structure 630, the fourth upper through hole 355, the second insulating layer 415 and the second lower selection structure 520 can be configured as a programmable unit (also referred to as a third programmable unit), such as an anti-fuse. The fourth upper selection structure 640, the fourth upper through hole 357, the second insulating layer 417 and the second lower selection structure 520 can be configured as a programmable unit (also referred to as a fourth programmable unit), such as an anti-fuse.

[0175] The programmable cells can be programmed to form one or more signal paths, respectively. For example, during programming of the first programmable cell, a high voltage (e.g., +6.0 volts) can be applied to the first signal upper selection layer 613, and the first ground layer 231 can be grounded. The first insulating layer 411 sandwiched between the second upper via 351 and the first horizontal lower selection layer 511 can be stressed under the programming voltage. As a result, the sandwiched portion of the first insulating layer 411 (e.g., the bottom of the first insulating layer 411) will be broken to form a continuous path connecting the first upper selection structure 610 and the first horizontal lower selection layer 511. In other words, the sandwiched portion of the first insulating layer 411 can be fused and the first programmable cell is programmed. Since no voltage is applied to the second signal upper selection layer 623 , the third signal upper selection layer 633 , the fourth signal upper selection layer 643 and the second ground layer 233 , the first insulating layer 413 , the second insulating layer 415 and the second insulating layer 417 remain intact after programming.

[0176] As another example, during programming of the first programmable cell and the second programmable cell, a high voltage (e.g., +6.0 volts) may be applied to the first signal upper selection layer 613 and the second signal upper selection layer 623. The first ground layer 231 may be grounded. The first insulating layer 411 sandwiched between the second upper via 351 and the first horizontal lower selection layer 511 and the first insulating layer 413 sandwiched between the second upper via 353 and the first vertical lower selection layer 513 may be stressed under the programming voltage. As a result, a sandwiched portion of the first insulating layer 411 (e.g., the bottom of the first insulating layer 411) and a sandwiched portion of the first insulating layer 413 (e.g., the bottom of the first insulating layer 413) may be broken to form two continuous paths connecting the first upper selection structure 610 and the first horizontal lower selection layer 511 and connecting the second upper selection structure 620 and the first vertical lower selection layer 513. In other words, the sandwiched portion of the first insulating layer 411 and the sandwiched portion of the first insulating layer 413 may be fused. The first programmable cell and the second programmable cell are programmed. Since no voltage is applied to the third signal upper selection layer 633, the fourth signal upper selection layer 643 and the second ground layer 233, the second insulating layer 415 and the second insulating layer 417 remain intact after programming.

[0177] As another example, during programming of the first programmable cell and the third programmable cell, a high voltage (e.g., +6.0 volts) may be applied to the first signal upper selection layer 613 and the third signal upper selection layer 633. The first ground layer 231 and the second ground layer 233 may be grounded. The first insulating layer 411 sandwiched between the second upper via 351 and the first horizontal lower selection layer 511 and the second insulating layer 415 sandwiched between the fourth upper via 355 and the second vertical lower selection layer 523 may be stressed under the programming voltage. As a result, the sandwiched portion of the first insulating layer 411 (e.g., the bottom of the first insulating layer 411) and the sandwiched portion of the second insulating layer 415 (e.g., the bottom of the second insulating layer 415) may be broken to form two continuous paths connecting the first upper selection structure 610 and the first horizontal lower selection layer 511 and connecting the third upper selection structure 630 and the second vertical lower selection layer 523. In other words, the sandwiched portion of the first insulating layer 411 and the sandwiched portion of the second insulating layer 415 may be fused. The first programmable cell and the third programmable cell are programmed. Since no voltage is applied to the second signal upper selection layer 623 and the fourth signal upper selection layer 643, the first insulating layer 413 and the second insulating layer 417 are still intact after programming.

[0178] Please refer to Fig. 22 and Fig.23, the wiring pad 117 may be formed on the main signal pad 223, on the first signal upper selection layer 613, on the second signal upper selection layer 623, on the third signal upper selection layer 633, and on the fourth signal upper selection layer 643. A wire 119 may be formed on the wiring pad 117 to electrically couple the wiring pad 117 to an external element (e.g., other die). The wiring pad 117 may include tin, lead, silver, copper, nickel, bismuth, or an alloy thereof.

[0179] Fig.24 FIG. 1 is a top view schematically illustrating a semiconductor device 1B according to another embodiment of the present disclosure.

[0180] Please refer to Fig.24 , the semiconductor element 1B may have a structure that Fig.17 The structure shown is similar. Fig.24 Zhongyu Fig.17 The same or similar elements in the semiconductor device 1B have been marked with similar element numbers, and repeated descriptions have been omitted. In the semiconductor device 1B, the first signal upper selection layer 613, the second signal upper selection layer 623, the third signal upper selection layer 633, and the fourth signal upper selection layer 643 may have a linear profile in a top view. For example,

[0181] Fig.25 613 and the fourth signal upper selection layer 643 may have a linear profile extending along the X direction. The second signal upper selection layer 623 and the second signal upper selection layer 623 may have a linear profile extending along the Y direction.

[0182] Fig.25 FIG. 4 is a top view schematically illustrating an intermediate semiconductor element according to another embodiment of the present disclosure. Fig.26 and Fig. 27 is a schematic cross-sectional view, illustrating Fig.15 The cross section of the section lines A-A' and B-B'.

[0183] Please refer to Figure 25 to Figure 27 , the semiconductor element 1C may have a structure, with Fig.17 , Fig. 22 and Fig.23 The structure shown is similar. Figure 25 to Figure 27 Zhongyu Fig.17 , Fig. 22 and Fig.23 The same or similar elements have been labeled with similar element numbers, and repeated descriptions have been omitted. The semiconductor device 1C includes only a first programmable unit and a fourth programmable unit.

[0184] Fig.28FIG. 4 is a top view schematically illustrating an intermediate semiconductor element according to another embodiment of the present disclosure. Fig.29 and Fig.30 is a schematic cross-sectional view, illustrating Fig.28 The cross section of the section lines A-A' and B-B'.

[0185] Please refer to Figure 28 to Figure 30 , the semiconductor device 1D may have a structure, Fig.17 , Fig. 22 and Fig.23 The structure shown is similar. Figure 28 to Figure 30 Zhongyu Fig.17 , Fig. 22 and Fig.23 The same or similar elements in FIG. 1 have been labeled with similar element numbers, and repeated descriptions have been omitted. The semiconductor device 1D includes only a first programmable unit and a second programmable unit.

[0186] An embodiment of the present disclosure provides a semiconductor element, including a first upper selection structure, which is located at the same vertical plane as a main signal pad along a first direction and is separated from the main signal pad; a fourth upper selection structure, which is located at the same vertical plane as the main signal pad and is separated from the first upper selection structure along the first direction, and the main signal pad is inserted therebetween; a first ground layer, which is located at the same vertical plane as the main signal pad and is separated from the main signal pad and the first upper selection structure; a second ground layer, which is located at the same vertical plane as the main signal pad and is separated from the fourth upper selection structure and the main signal pad; a first lower selection structure, which is located at a vertical plane lower than the main signal pad and is connected to the first upper selection structure in a top view. An upper selection structure partially overlaps with the first ground layer; a second lower selection structure is located at the same vertical plane as the first lower selection structure and overlaps with the fourth upper selection structure and the second ground layer in a top view; a first upper through hole is located between the first ground layer and the first lower selection structure; a third upper through hole is located between the second ground layer and the second lower selection structure; a second upper through hole is located between the first upper selection structure and the first lower selection structure; a fourth upper through hole is located between the fourth upper selection structure and the second lower selection structure; and a first insulating layer is located between the second upper through hole and the first lower selection structure; a second insulating layer is located between the fourth upper through hole and the second lower selection structure.

[0187] Another embodiment of the present disclosure provides a method for preparing a semiconductor element, including forming a first lower selection structure on a substrate, and including a first connection lower selection layer, a first vertical lower selection layer extending from the first connection lower selection layer along a first direction, and a first horizontal lower selection layer extending from the first connection lower selection layer along a second direction different from the first direction; forming a plurality of second upper through holes on the first horizontal lower selection layer and the first vertical lower selection layer, and forming a first upper through hole on the first connection lower selection layer; forming a plurality of first insulating layers between the plurality of second upper through holes and the first horizontal lower selection layer and between the plurality of second upper through holes and the first vertical lower selection layer; forming a first grounding layer on the first upper through hole; forming a first upper selection structure and a second upper selection structure on the plurality of second upper through holes respectively; forming a main signal pad at the same vertical plane as the first grounding layer and separated from the first upper selection structure and the second upper selection structure; and forming a wiring pad on the main signal pad, the first upper selection structure and the second upper selection structure. In a top view, the first upper selection structure partially overlaps the first horizontal lower selection layer, and the second upper selection structure partially overlaps the first vertical lower selection layer.

[0188] Due to the design of the semiconductor device disclosed in the present invention, one or more signal paths can be formed according to the selection during programming, which can be determined according to the needs of the user. The wiring pad can be used alone to conduct multiple signals to the main signal pad and the signal paths formed by selectively programming the first upper selection structure, the second upper selection structure, the third upper selection structure and / or the fourth upper selection structure to save valuable semiconductor real estate. Therefore, more functional elements can be provided for the semiconductor device.

[0189] Although the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and replacements may be made without departing from the spirit and scope of the present disclosure as defined in the claims. For example, many of the above processes may be implemented in different ways, and other processes or combinations thereof may be used to replace many of the above processes.

[0190] Furthermore, the scope of the present application is not limited to the specific embodiments of the processes, machines, manufactures, compositions of matter, means, methods, and steps described in the specification. A person skilled in the art can understand from the disclosure of the present disclosure that existing or future developed processes, machines, manufactures, compositions of matter, means, methods, or steps that have the same functions or achieve substantially the same results as the corresponding embodiments described herein can be used according to the present disclosure. Accordingly, such processes, machines, manufactures, compositions of matter, means, methods, or steps are included in the claims of the present application.

Claims

1. A semiconductor element, comprising: a first upper selection structure, located at the same vertical plane as a main signal pad along a first direction and separated from the main signal pad; a fourth upper selection structure located at the same vertical plane as the main signal pad and separated from the first upper selection structure along the first direction, with the main signal pad interposed therebetween; a first ground layer, located at the same vertical plane as the main signal pad and separated from the main signal pad and the first upper selection structure; a second ground layer, located at the same vertical plane as the main signal pad and separated from the fourth upper selection structure and the main signal pad; a first lower selection structure located at a vertical plane lower than the main signal pad and partially overlapping the first upper selection structure and the first ground layer in a top view; a second lower selection structure, located at the same vertical plane as the first lower selection structure, and partially overlapping the fourth upper selection structure and the second ground layer in the top view; a first upper through hole located between the first ground layer and the first lower selection structure; a third upper through hole located between the second ground layer and the second lower selection structure; a second upper through hole, located between the first upper selection structure and the first lower selection structure; a fourth upper through hole, located between the fourth upper selection structure and the second lower selection structure; a first insulating layer located between the second upper through hole and the first lower selection structure; and A second insulating layer is located between the fourth upper through hole and the second lower selection structure.

2. The semiconductor device as claimed in claim 1, wherein the first lower selection structure comprises: a first connection lower selection layer, located directly below the first upper through hole; as well as a first horizontal lower selection layer extending from the first connection lower selection layer along a second direction and partially overlapping the first upper selection structure, The second direction is different from the first direction.

3. The semiconductor device as claimed in claim 2, wherein the first upper selection structure comprises: a first connected upper selection layer disposed along a first direction and partially overlapping the first horizontal lower selection layer in the top view; as well as A first signal upper selection layer contacts the first connection upper selection layer, is separated from the main signal pad, and is located between the first connection upper selection layer and the main signal pad.

4. The semiconductor device as claimed in claim 3, wherein the second lower selection structure comprises: a second connection lower selection layer, located directly below the third upper through hole; as well as A second horizontal lower selection layer extends from the second connection lower selection layer along the second direction and partially overlaps with the fourth upper selection structure.

5. The semiconductor device as claimed in claim 4, wherein the fourth upper selection structure comprises: a fourth connection upper selection layer separated from the first connection upper selection layer along the first direction, with the main signal pad interposed therebetween and partially overlapping the second horizontal lower selection layer; as well as A fourth signal upper selection layer contacts the fourth connection upper selection layer, is separated from the main signal pad, and is located between the fourth connection upper selection layer and the main signal pad. 6 . The semiconductor device as claimed in claim 5 , wherein the first signal upper selection layer and the fourth signal upper selection layer comprise an arc-shaped profile in the top view.

7. The semiconductor device according to claim 6, further comprising: A wiring pad is located on the main signal pad, the first upper selection structure and the second upper selection structure. The semiconductor device as claimed in claim 7 , wherein the first direction and the second direction are perpendicular to each other. 9 . The semiconductor device as claimed in claim 8 , wherein the first insulating layer and the second insulating layer comprise a high-k material.

10. A method for preparing a semiconductor element, comprising: A first lower selection structure is formed on a substrate, and includes a first connection lower selection layer, a first vertical lower selection layer extending from the first connection lower selection layer along a first direction, and a first horizontal lower selection layer extending from the first connection lower selection layer along a second direction different from the first direction; forming a plurality of second upper through holes on the first horizontal lower selection layer and the first vertical lower selection layer, and forming a first upper through hole on the first connection lower selection layer; forming a plurality of first insulating layers between the plurality of second upper vias and the first horizontal lower selection layer and between the plurality of second upper vias and the first vertical lower selection layer; forming a first ground layer on the first upper through hole; Forming a first upper selection structure and a second upper selection structure on the plurality of second upper through holes respectively and correspondingly; forming a main signal pad at the same vertical plane as the first ground layer and separated from the first upper selection structure and the second upper selection structure; as well as forming a wiring pad on the main signal pad, the first upper selection structure and the second upper selection structure, In a top view, the first upper selection structure partially overlaps with the first horizontal lower selection layer, and the second upper selection structure partially overlaps with the first vertical lower selection layer.

11. The method of claim 10, wherein the first upper selection structure comprises: a first connected upper selection layer extending in a first direction and partially overlapping the first horizontal lower selection layer in the top view; as well as A first signal upper selection layer contacts the first connection upper selection layer, is separated from the main signal pad, and is located between the first connection upper selection layer and the main signal pad.

12. The method of claim 11, wherein the second upper selection structure comprises: a second connection upper selection layer extending along the second direction and partially overlapping the first vertical lower selection layer in the top view; as well as A second signal upper selection layer contacts the second connection upper selection layer, is separated from the main signal pad, and is located between the second connection upper selection layer and the main signal pad. 13 . The manufacturing method according to claim 12 , wherein the first signal upper selection layer and the second signal upper selection layer comprise an arc-shaped profile in the top view. The method as claimed in claim 13 , wherein the plurality of first insulating layers comprise a high-k material.

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