Manufacturing method of high-temperature-resistant long-life sampling cone

Abstract

The invention discloses a manufacturing method of a high-temperature-resistant long-life sampling cone. Comprising the steps that 1, metal plates are prepared, specifically, two high-temperature-resistant and corrosion-resistant metal plates and a high-heat-conduction-performance metal plate are prepared; 2, an assembly structure is machined on the upper-layer high-temperature-resistant and corrosion-resistant metal plate, an assembly structure is machined on the high-heat-conducting-performance metal plate, and an assembly structure is machined on the lower-layer high-temperature-resistant and corrosion-resistant metal plate; 3, assembling and welding are conducted, specifically, the upper-layer high-temperature-resistant and corrosion-resistant metal plate, the high-heat-conducting-performance metal plate and the lower-layer high-temperature-resistant and corrosion-resistant metal plate which are provided with the assembling structures are assembled together; splicing interfaces of the upper-layer high-temperature-resistant and corrosion-resistant metal plate and the lower-layer high-temperature-resistant and corrosion-resistant metal plate are subjected to welding and diffusion welding through the electron beam welding technology, and a first structural part is manufactured; and 4, structural part forming, specifically, the first structural part is made into a conical structure through plastic forming. The heat conduction performance of the sampling cone is improved, the high temperature resistance of the sampling cone is improved, and the service life is prolonged.

Description

Technical Field

[0001] The invention belongs to the technical field of mass spectrometers, and in particular relates to a high-temperature resistant and long-life sampling cone applied to inductively coupled plasma mass spectrometry (ICP-MS). Background Art

[0002] ICP-MS, the full name of Inductively coupled plasma mass spectrometry, refers to inductively coupled plasma mass spectrometry. It consists of an ICP torch, an interface device, and a mass spectrometer. The interface cone is the main component of the interface device, usually composed of a sampling cone and a skimmer cone. The interface cone plays a key role in the transmission efficiency of the ion flow and directly determines the detection limit and stability of the instrument. The interface cone component works in a harsh environment, at high temperature (about 1000°C) and in an acid-base environment. Therefore, the interface cone component is required to meet the requirements of high temperature resistance, corrosion resistance, and good thermal conductivity. In existing public documents, such as patent WO2018163576A1, a plasma cone for an inductively coupled plasma mass spectrometer, an inductively coupled plasma mass spectrometer, and a method for manufacturing a plasma cone for an inductively coupled plasma mass spectrometer. Platinum, platinum group metals other than platinum, alloys, or alloy films thereof are plated on the surface of the plasma cone by various coating methods. The invention can reduce the impurity background without sacrificing sensitivity (ionic strength) and further improve the durability of the cone. For example, patent US5793039A discloses a mass spectrometer, a skimmer cone assembly, a skimmer cone and a manufacturing method thereof. The cone is molded, and its manufacturing method is significantly easier than mechanical processing, thereby reducing production costs. For example, patent CN2510862Y discloses an inductively coupled plasma mass spectrometer interface device, which consists of a sampling cone and a skimmer cone. The sampling cone and the skimmer cone are axially concentric, and the thickness of the sampling cone and the skimmer cone hole end is 0.2mm to 0.5mm, and they are made of corrosion-resistant and high-temperature resistant metal materials.

[0003] However, the existing technology has the problem that the interface cone has a single product structure and material or a small bonding area of ​​different materials, insufficient bonding, and poor high temperature resistance; therefore, the problem of easy deformation still exists. In addition, the existing patents rarely involve the preparation process of the interface cone. The interface cone parts of a single material or a simple structure prepared by traditional molding or machining processes are difficult to use for a long time in a harsh working environment of high temperature acid and alkali corrosion. Summary of the invention

[0004] In view of the problems of easy deformation and short life in the background technology, the present invention provides a method for manufacturing a high temperature resistant and long life sampling cone, and the technical solution is as follows:

[0005] Step 1: Prepare metal plates: prepare two high temperature resistant and corrosion resistant metal plates and one high thermal conductivity metal plate;

[0006] Step 2: Processing the upper layer of high temperature resistant and corrosion resistant metal plates into an assembled structure, processing the high thermal conductivity metal plates into an assembled structure, and processing the lower layer of high temperature resistant and corrosion resistant metal plates into an assembled structure:

[0007] The processing of the upper layer of high temperature resistant and corrosion resistant metal plate to form an assembled structure includes: processing an upper plate contact step and an inner layer upper plate contact surface, and machining an annular tooth portion on the surface of the upper plate contact surface;

[0008] Processing the lower layer of high temperature and corrosion resistant metal plate to form an assembled structure includes: processing a lower plate contact step and an inner lower plate boss, and turning annular teeth on the surface of the lower plate contact step and the surface of the lower plate boss;

[0009] The method of processing the high thermal conductivity metal plate into an assembled structure comprises: processing the high thermal conductivity metal plate into a ring with a rectangular cross section, turning annular teeth on the upper and lower end surfaces of the high thermal conductivity metal plate, the annular teeth of the upper end surface of the high thermal conductivity metal plate and the lower plate boss after assembly are matched with the annular teeth of the upper plate contact surface, and the annular teeth of the lower end surface of the high thermal conductivity metal plate are matched with the annular teeth of the lower plate contact step;

[0010] Step 3, assembling and welding: assembling the upper high temperature resistant and corrosion resistant metal plate, the high thermal conductivity metal plate and the lower high temperature resistant and corrosion resistant metal plate with the assembled structure together; using electron beam welding technology to weld the joint interface of the upper high temperature resistant and corrosion resistant metal plate and the lower high temperature resistant and corrosion resistant metal plate, and then performing diffusion welding to form a first structural member;

[0011] Step 4: Structural component forming: The first structural component is formed into a conical structure by plastic forming.

[0012] An upper plate welding step is processed outside the upper plate contact step, and a lower plate welding step is processed outside the lower plate contact step.

[0013] The step at the welding place of the upper plate is fitted with the step at the welding place of the lower plate.

[0014] The high temperature and corrosion resistant metal plate is high purity nickel, nickel-based high temperature alloy or stainless steel with a melting point of more than 1200°C; the high thermal conductivity metal plate is copper or copper alloy with a thermal conductivity of more than 90W / (m·K).

[0015] The tooth tip angle of the annular tooth portion is 50° to 70°, the tooth spacing is 0.4 to 0.6 mm, and the tooth height is 0.2 to 0.4 mm.

[0016] After the composite welding in step 3, the bonding rate of the high temperature resistant and corrosion resistant metal and the high thermal conductivity material metal is ≥99%.

[0017] The outer diameters of the upper layer of high temperature resistant and corrosion resistant metal plate with an assembled structure and the lower layer of high temperature resistant and corrosion resistant metal plate with an assembled structure are the same, both of which are 50-55 mm; the outer diameter of the high thermal conductivity metal plate with an assembled structure is 85%-95% of the outer diameter of the upper layer of high temperature resistant and corrosion resistant metal plate with an assembled structure, and the inner diameter of the high thermal conductivity metal material is 10-13 mm.

[0018] During the diffusion welding, the temperature is 450-550°C, the holding time is 3-6 hours, the pressure is 110MPa-130MPa, and the vacuum degree is ≤5*10 -3 Pa.

[0019] The volume proportion of the high thermal conductivity metal material in the high temperature resistant and long life sampling cone is 25% to 90%.

[0020] Step 4 is followed by precision machining.

[0021] The beneficial effects of the present invention are as follows: by adopting welding technology, high-temperature and corrosion-resistant metal materials and high thermal conductivity metal materials are composited into a first structural component, and by adjusting the volume proportion of the high thermal conductivity metal material, the thermal conductivity of the sampling cone is enhanced, and a toothed structure is processed at the contact interface of the two materials to improve the welding bonding rate and welding strength, enhance the thermal conductivity and working strength of the sampling cone, and ultimately improve the high temperature resistance and extend the service life of the sampling cone. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 The present invention is a schematic flow chart of a broad embodiment of a method for manufacturing a high-temperature resistant and long-life sampling cone.

[0023] Figure 2 It is a schematic diagram of the structure in which welding is completed in a broad embodiment of the present invention.

[0024] Figure 3 for Figure 2 A partial enlarged schematic diagram of area I.

[0025] Figure 4 It is a schematic diagram of the structure after preparation in a broad embodiment of the present invention.

[0026] Figure 5 It is a schematic diagram of the structure of the sampling cone obtained after precision machining in a broad embodiment of the present invention. DETAILED DESCRIPTION

[0027] The present invention is further described in detail below in conjunction with the accompanying drawings.

[0028] like Figure 1In the broad embodiment of the present invention shown, the sampling cone is firstly composited with a high temperature and corrosion resistant metal plate and a high thermal conductivity metal material into a tight fitting first structural member; then it is formed and prepared, and the contact end surfaces of the two materials are a toothed bite structure. It includes:

[0029] Step 1, prepare metal plates: prepare two high temperature resistant and corrosion resistant metal plates and one high thermal conductivity metal plate, and process the high temperature resistant and corrosion resistant metal plates and the high thermal conductivity metal plate into a round shape;

[0030] Step 2: Process two high temperature and corrosion resistant metal plates and one high thermal conductivity metal plate to form an assembled structure to form a high temperature and corrosion resistant metal upper plate 1, a high performance thermal conductive metal sandwich plate 2 and a high temperature and corrosion resistant metal lower plate 3. Specifically:

[0031] The high temperature and corrosion resistant metal upper plate 1 has two steps. The processed high temperature and corrosion resistant metal upper plate 1 includes: an outer upper plate welding step 101, a middle upper plate contact step 102 and an inner upper plate contact surface 103; then, an annular tooth portion is machined on the surface of the upper plate contact surface 103;

[0032] The high temperature and corrosion resistant metal lower plate 3 has two steps. The processed high temperature and corrosion resistant metal lower plate 3 includes: an outer layer of lower plate welding step 301, a middle layer of lower plate contact step 302 and an inner layer of lower plate boss 303; then, an annular tooth portion is machined on the surface of the lower plate contact step 302 and the surface of the lower plate boss 303;

[0033] The high-performance heat-conducting metal sandwich layer plate 2 is a ring with a rectangular cross section, and annular teeth are machined on the upper and lower end surfaces of the high-performance heat-conducting metal sandwich layer plate 2; the annular teeth of the upper end surface of the high-performance heat-conducting metal sandwich layer plate 2 and the lower plate boss 303 match the annular teeth of the upper plate contact surface 103, and the annular teeth of the lower end surface of the high-performance heat-conducting metal sandwich layer plate 2 match the annular teeth of the lower plate contact step 302;

[0034] Step 3, assembling and welding: Assemble the high temperature and corrosion resistant metal upper plate 1, the high performance heat conductive metal sandwich plate 2 and the high temperature and corrosion resistant metal lower plate 3 together, check and ensure that the annular teeth are fitted; use electron beam welding technology to weld the joint interface of the upper plate welding step 101 and the lower plate welding step 301; then diffuse weld the whole, so as to weld the three layers of composite material into Figure 2 and Figure 3 The first structural member is shown.

[0035] Step 4: Structural component forming: The first structural component is formed into the following Figure 4 The conical structure shown.

[0036] Step 5: Precision machining to obtain a method for manufacturing a high temperature resistant and long life sampling cone. Figure 5 As shown; the structure of a method for manufacturing a high-temperature resistant and long-life sampling cone prepared by the method of the present invention can be used in an inductively coupled plasma mass spectrometer.

[0037] In step 1, the high temperature and corrosion resistant metal plate is high purity nickel, nickel-based high temperature alloy or stainless steel with a melting point greater than 1200°C; the high thermal conductivity metal plate is copper or copper alloy with a thermal conductivity greater than 90W / (m·K).

[0038] In step 2, the outer diameters of the high temperature corrosion resistant metal upper plate 1 and the high temperature corrosion resistant metal lower plate 3 before assembly are 50-55 mm, and the total thickness is 8-10 mm. The outer diameter of the high thermal conductivity metal material 2 is 85%-95% of the outer diameter of the high temperature corrosion resistant metal upper plate 1, the inner diameter is 10-13 mm, and the thickness is 1.5-4 mm. At the same time, it is necessary to ensure that the volume proportion of the high thermal conductivity metal material is 25%-90%.

[0039] In step 2, the tooth tip angle of the annular tooth portion is 50° to 70°, the tooth spacing is 0.4 to 0.6 mm, and the tooth height is 0.2 to 0.4 mm.

[0040] The step composed of the upper plate welding step 101 and the middle upper plate contact step 102 facilitates positioning and controlling the welding depth in step 3.

[0041] The temperature of diffusion welding in step 3 is 450-550°C, the holding time is 3-6 hours, the pressure is 110MPa-130MPa, and the vacuum degree is ≤5*10 -3 Pa.

[0042] After the composite welding in step 3, the bonding rate of the high temperature resistant and corrosion resistant metal and the high thermal conductivity material metal is ≥99%.

[0043] Example 1

[0044] The sampling cone is made by the method of manufacturing a high-temperature resistant and long-life sampling cone. The sampling cone is made by welding and diffusion welding the interface of high-purity nickel and copper to form the first structural part, and then forming and preparing it after precision machining. The copper volume accounts for 30%, and the contact interface of the two materials is a tooth-shaped bite structure. The manufacturing method includes the following steps:

[0045] Step 1. Prepare metal plates: Process high-purity nickel and copper metal plates into circles; high-purity nickel has an outer diameter of 50mm and a thickness of 10mm, copper has an outer diameter of 48mm, an inner diameter of 12mm and a thickness of 1.8mm, and the inner diameter of the groove of the upper nickel plate is 48.5mm and the height is 1.8mm.

[0046] Step 2: According to the set size, the contact position of the upper and lower layers of high-purity nickel plates is processed into a stepped splicing structure to facilitate positioning and control of welding depth, and then the surfaces of the upper and lower layers of high-purity nickel plates that contact the copper plates are geared, with a tooth tip angle of 50°, a gear spacing of 0.4mm, and a gear height of 0.2mm.

[0047] Step 3, assembly and welding: Use electron beam welding technology to weld the upper and lower layers of high-purity nickel plates at the stepped interface. Electron beam welding parameters: high voltage 70kV, welding beam current 10mA. Use diffusion welding technology to weld the above three layers of composite materials into the first structure. Diffusion welding parameters: temperature 450℃, holding time 3 hours, pressure 110MPa, vacuum degree 5*10 -3 Pa. After diffusion welding, the welding rate of high-purity nickel plate and copper plate is 99%.

[0048] Step 4, structural component forming: the structural component is formed into a conical structure by a molding process;

[0049] Step 5, precision machining: precision machining, to obtain a high temperature resistant and long life sampling cone, micro hole machining accuracy ± 20μm, taper accuracy ± 0.5°, cone surface roughness Ra ≤ 0.2μm.

[0050] The sampling cone obtained in Example 1 is used in an inductively coupled plasma mass spectrometer. When the metal solution signal drops to 1 / 4, the sampling cone has been working continuously for more than 1000 hours.

[0051] Example 2

[0052] The sampling cone is made by the method of manufacturing a high-temperature resistant and long-life sampling cone. The sampling cone is made by welding and diffusion welding the interface of high-purity nickel and copper to form the first structural part, and then forming and preparing it by precision machining. The volume proportion of copper is 90%, and the contact interface of the two materials is a tooth-shaped bite structure. The manufacturing method includes the following steps:

[0053] Step 1. Prepare metal plates: Process the high-purity nickel plate and copper plate into a circle; the high-purity nickel plate has an outer diameter of 55mm and a thickness of 8mm; the copper plate has an outer diameter of 49mm, an inner diameter of 11mm and a thickness of 3mm; the inner diameter of the groove of the upper nickel plate is 49.5mm and the height is 3mm.

[0054] Step 2: According to the set size, the contact position of the upper and lower high-purity nickel plates is processed into a stepped splicing structure to facilitate positioning and control of welding depth. Then, the surfaces of the upper and lower high-purity nickel plates that are in contact with the high thermal conductivity metal plates are geared. The tooth tip angle is 70°, the gear spacing is 0.6mm, and the gear height is 0.4mm.

[0055] Step 3, assembly and welding: electron beam welding technology is used to weld the upper high-purity nickel plate and the lower high-purity nickel plate in a step-by-step interface. Electron beam welding parameters: high voltage 90kV, welding beam current 20mA. Diffusion welding technology is used to weld the above three layers of composite materials into the first structural part. Diffusion welding parameters: temperature 550℃, insulation time 6 hours, pressure 130MPa, vacuum degree 5*10 -3 Pa. After diffusion welding, the welding rate of high temperature and corrosion resistant metal and high thermal conductivity material metal is 99.9%.

[0056] Step 4: Structural component forming: The structural component is formed into a conical structure by a molding process.

[0057] Step 5, precision machining: precision machining, to obtain a high temperature resistant and long life sampling cone, micro hole machining accuracy ± 20μm, taper accuracy ± 0.5°, cone surface roughness Ra ≤ 0.2μm.

[0058] The sampling cone obtained in Example 2 is used in an inductively coupled plasma mass spectrometer. When the metal solution signal drops to 1 / 4, the sampling cone can work continuously for more than 1200 hours.

[0059] Example 3

[0060] The sampling cone is made by the method of manufacturing a high temperature resistant and long life sampling cone. The sampling cone is made of a nickel-based high temperature alloy and copper splicing interface welding and diffusion welding to form the first structural part, and then formed and prepared by precision machining. The copper volume accounts for 40%, and the contact interface of the two materials is a toothed bite structure. The manufacturing method includes the following steps:

[0061] Step 1. Prepare metal plates: Process the nickel-based high-temperature alloy and copper plates into circles. The nickel-based high-temperature alloy has an outer diameter of 55mm, an inner diameter of 11.5mm, and a thickness of 8mm. The copper has an outer diameter of 50mm and a thickness of 2mm. The upper nickel-based high-temperature alloy groove has an outer diameter of 50.5mm and a height of 2mm.

[0062] Step 2: The electron beam welding positions of the upper and lower nickel-based high-temperature alloy metal plates are processed into a stepped splicing structure according to the set size to facilitate positioning and control of welding depth, and then the surfaces of the upper and lower nickel-based high-temperature alloy metal plates in contact with the copper metal plates are toothed, with a tooth tip angle of 70°, a tooth spacing of 0.6 mm, and a tooth height of 0.4 mm.

[0063] Step 3, assembling and welding: Use electron beam welding technology to weld the upper nickel-based high-temperature alloy metal plate-copper metal plate-lower nickel-based high-temperature alloy metal plate step-by-step. Electron beam welding parameters: high voltage 90kV, welding beam 20mA. Use diffusion welding technology to weld the above three layers of composite materials into the first structure. Diffusion welding parameters: temperature 550℃, holding time 6 hours, pressure 130MPa, vacuum 5*10-3 Pa. After diffusion welding, the welding rate of nickel-based high-temperature alloy and copper is 99.9%.

[0064] Step 4: Structural component forming: The above structural components are made into a conical structure by using a spinning process.

[0065] Step 5, precision machining: precision machining, to obtain a high temperature resistant and long life sampling cone, micro hole machining accuracy ± 20μm, taper accuracy ± 0.5°, cone surface roughness Ra ≤ 0.2μm.

[0066] The sampling cone obtained in Example 3 is used in an inductively coupled plasma mass spectrometer. When the metal solution signal drops to 1 / 4, the sampling cone can work continuously for more than 1000 hours.

[0067] Comparative Example 1

[0068] The sampling cone is made by the method of manufacturing a high-temperature resistant and long-life sampling cone. The sampling cone is made by welding and diffusion welding the interface of high-purity nickel and copper to form the first structural part, and then forming and preparing it by precision machining. The volume proportion of copper is 10%, and the contact interface of the two materials is a tooth-shaped bite structure. The manufacturing method includes the following steps:

[0069] Step 1. Prepare metal plates: Process high-purity nickel and copper metal plates into circles; high-purity nickel has an outer diameter of 55mm and a thickness of 10mm, copper has an outer diameter of 43mm, an inner diameter of 13mm, and a thickness of 1.6mm, and the outer diameter of the upper nickel plate groove is 43.5mm and the height is 1.6mm.

[0070] Step 2: According to the set size, the contact position of the upper and lower layers of high-purity nickel plates is processed into a stepped splicing structure to facilitate positioning and control of welding depth, and then the surfaces of the upper and lower layers of high-purity nickel plates that contact the copper plates are geared, with a tooth tip angle of 50°, a gear spacing of 0.4mm, and a gear height of 0.2mm.

[0071] Step 3, assembly and welding: Use electron beam welding technology to weld the upper and lower layers of high-purity nickel plates at the stepped interface. Electron beam welding parameters: high voltage 70kV, welding beam current 10mA. Use diffusion welding technology to weld the above three layers of composite materials into the first structure. Diffusion welding parameters: temperature 450℃, holding time 3 hours, pressure 110MPa, vacuum degree 5*10 -3 Pa. After diffusion welding, the welding rate of high-purity nickel plate and copper plate is 99%.

[0072] Step 4: Structural component forming: The structural component is formed into a conical structure by a molding process.

[0073] Step 6: Precision machining: Precision machining is used to obtain a method for manufacturing a high-temperature resistant and long-life sampling cone.

[0074] The sampling cone obtained in this comparative example is used in an inductively coupled plasma mass spectrometer. Due to the poor thermal conductivity of the sampling cone, when the metal solution signal drops to 1 / 4, the continuous working time is less than 700 hours.

[0075] Comparative Example 2

[0076] The sampling cone is made by the method of manufacturing a high temperature resistant and long life sampling cone. The sampling cone is made by welding and diffusion welding the interface of high purity nickel and copper to form the first structural part, and then forming and precision machining. The copper volume accounts for 95%, and the contact interface of the two materials is a toothed bite structure. The manufacturing method includes the following steps:

[0077] Step 1. Prepare metal plates: Process the high-purity nickel plate and copper plate into a circle; the high-purity nickel plate has an outer diameter of 55mm and a thickness of 8mm; the copper plate has an outer diameter of 49.6mm, an inner diameter of 10mm, and a thickness of 3mm; the outer diameter of the groove of the upper nickel plate is 49.6mm and the height is 3mm.

[0078] Step 2: According to the set size, the contact position of the upper and lower high-purity nickel plates is processed into a stepped splicing structure to facilitate positioning and control of welding depth, and then the surfaces of the upper and lower high-purity nickel plates that contact the high thermal conductivity metal plates are cut with teeth, with a tooth tip angle of 70°, a tooth spacing of 0.6mm, and a tooth height of 0.4mm.

[0079] Step 3, assembly and welding: electron beam welding technology is used to weld the upper high-purity nickel plate and the lower high-purity nickel plate in a step-by-step interface. Electron beam welding parameters: high voltage 90kV, welding beam current 20mA. Diffusion welding technology is used to weld the above three layers of composite materials into the first structural part. Diffusion welding parameters: temperature 550℃, insulation time 6 hours, pressure 130MPa, vacuum degree 5*10 -3 Pa. After diffusion welding, the welding rate of high temperature and corrosion resistant metal and high thermal conductivity material metal is 99.9%.

[0080] Step 4: Structural component forming: The structural components are formed into a conical structure by using a molding process.

[0081] Step 5, precision machining: precision machining to obtain a method for manufacturing a high temperature resistant and long-life sampling cone.

[0082] The sampling cone obtained in this comparative example is used in an inductively coupled plasma mass spectrometer. The sampling cone is easily deformed during use due to reduced temperature resistance and strength. When the metal solution signal drops to 1 / 4, the continuous working time is less than 600 hours.

Claims

1. A method for manufacturing a high temperature resistant and long life sampling cone, characterized in that: include: Step 1: Prepare metal plates: prepare two high temperature resistant and corrosion resistant metal plates and one high thermal conductivity metal plate; Step 2: Processing the upper layer of high temperature resistant and corrosion resistant metal plates into an assembled structure, processing the high thermal conductivity metal plates into an assembled structure, and processing the lower layer of high temperature resistant and corrosion resistant metal plates into an assembled structure: The processing of the upper layer of high temperature resistant and corrosion resistant metal plate to form an assembled structure includes: processing an upper plate contact step and an inner layer upper plate contact surface, and machining an annular tooth portion on the surface of the upper plate contact surface; Processing the lower layer of high temperature and corrosion resistant metal plate to form an assembled structure includes: processing a lower plate contact step and an inner lower plate boss, and turning annular teeth on the surface of the lower plate contact step and the surface of the lower plate boss; The method of processing the high thermal conductivity metal plate into an assembled structure comprises: processing the high thermal conductivity metal plate into a ring with a rectangular cross section, turning annular teeth on the upper and lower end surfaces of the high thermal conductivity metal plate, the annular teeth of the upper end surface of the high thermal conductivity metal plate and the lower plate boss after assembly are matched with the annular teeth of the upper plate contact surface, and the annular teeth of the lower end surface of the high thermal conductivity metal plate are matched with the annular teeth of the lower plate contact step; Step 3, assembling and welding: assembling the upper high temperature resistant and corrosion resistant metal plate, the high thermal conductivity metal plate and the lower high temperature resistant and corrosion resistant metal plate with the assembled structure together; using electron beam welding technology to weld the joint interface of the upper high temperature resistant and corrosion resistant metal plate and the lower high temperature resistant and corrosion resistant metal plate, and then performing diffusion welding to form a first structural member; Step 4: Structural component forming: The first structural component is formed into a conical structure by plastic forming.

2. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 1, characterized in that: An upper plate welding step is processed outside the upper plate contact step, and a lower plate welding step is processed outside the lower plate contact step.

3. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 2, characterized in that: The step at the welding place of the upper plate is fitted with the step at the welding place of the lower plate.

4. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 1, characterized in that: The high temperature and corrosion resistant metal plate is high purity nickel, nickel-based high temperature alloy or stainless steel with a melting point of more than 1200°C; the high thermal conductivity metal plate is copper or copper alloy with a thermal conductivity of more than 90W / (m·K).

5. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 1, characterized in that: The tooth tip angle of the annular tooth portion is 50° to 70°, the tooth spacing is 0.4 to 0.6 mm, and the tooth height is 0.2 to 0.4 mm.

6. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 1, characterized in that: After the composite welding in step 3, the bonding rate of the high temperature resistant and corrosion resistant metal and the high thermal conductivity material metal is ≥99%.

7. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 1, characterized in that: The outer diameters of the upper layer of high temperature resistant and corrosion resistant metal plate with an assembled structure and the lower layer of high temperature resistant and corrosion resistant metal plate with an assembled structure are the same, both of which are 50-55 mm; the outer diameter of the high thermal conductivity metal plate with an assembled structure is 85%-95% of the outer diameter of the upper layer of high temperature resistant and corrosion resistant metal plate with an assembled structure, and the inner diameter of the high thermal conductivity metal material is 10-13 mm.

8. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 1, characterized in that: During the diffusion welding, the temperature is 450-550°C, the holding time is 3-6 hours, the pressure is 110MPa-130MPa, and the vacuum degree is ≤5*10 -3 Pa.

9. A method for manufacturing a high temperature resistant and long life sampling cone according to any one of claims 1 to 8, characterized in that: The volume proportion of the metal material with high thermal conductivity in the high temperature resistant and long life sampling cone is 25% to 90%.

10. The method for manufacturing a high temperature resistant and long life sampling cone according to claim 9, characterized in that: Step 4 is followed by precision machining.

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