Ultrapure water treatment system for cleaning terminal

Abstract

The invention belongs to the field of pure water treatment, particularly relates to an ultrapure water treatment system of a cleaning terminal, and provides the following scheme aiming at the existing problems that the use amount of pure water is increased and the use cost is increased due to large overflow, continuous addition of new ultrapure water, the ultrapure water treatment system comprises a cleaning pool and a resin bed arranged on one side of the cleaning pool, a circulating pump is arranged between the cleaning pool and the resin bed, the liquid pumping end of the circulating pump is fixedly communicated with the cleaning pool, and the liquid outlet end of the circulating pump is fixedly communicated with a water inlet pipe. In the workpiece taking and placing process, the tops of the two inclined plates are close to each other, then a closed space is formed, contact between pure water and air is reduced, and the service life of the cleaning pool is prolonged; the pure water is prevented from reacting with air, meanwhile, the pure water is treated through the exchange resin in the resin bed, the pure water can be circulated, waste of the pure water is reduced, the cleaning cost is reduced, the spiral blade is driven to rotate through the threaded head, then the exchange resin in the resin bed is discharged, and the exchange resin is convenient to replace.

Description

Technical Field

[0001] The present invention relates to the technical field of pure water treatment, and in particular to an ultrapure water treatment system for a cleaning terminal. Background Art

[0002] Semiconductor front-end equipment components have very high requirements for cleanliness, especially the components that contact the wafer, which are very sensitive to particulate matter. The cleanliness of the components directly affects the chip yield, so cleaning before component packaging is particularly important. It must be cleaned in an ISO 6 or higher clean room using ultrapure water with a resistivity of not less than 4MΩ.

[0003] Conventional practice is that the ultrapure water with a value of not less than 15MΩ produced by the pure water station enters the clean room through a reversible PVC pipe, and then the ultrapure water is added to the tank in the clean room. Since the water quality of ultrapure water will drop rapidly after contacting with the air, it can be >5MΩ just after adding to the tank. As it contacts with the air or the parts to be cleaned enter the tank, the water quality of the ultrapure water will drop rapidly to <1MΩ, which is far from meeting the cleaning requirements. The traditional practice is to open a large overflow and continuously add new ultrapure water. However, this increases the amount of pure water used and the cost of use. Therefore, an ultrapure water treatment system for cleaning terminals is proposed. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings of the prior art that overflow is opened, new ultrapure water is continuously added, the amount of pure water is increased, and the use cost is increased, and an ultrapure water treatment system for cleaning terminals is proposed.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] An ultrapure water treatment system for a cleaning terminal comprises a cleaning tank and a resin bed arranged at one side of the cleaning tank, a circulating pump is arranged between the cleaning tank and the resin bed, a liquid extraction end of the circulating pump is fixedly connected to the cleaning tank, a liquid outlet end of the circulating pump is fixedly connected to a water inlet pipe, a connecting sleeve is threadedly connected to the top of the resin bed, a first connecting pipe and a second connecting pipe are fixedly penetrated through the inner circumference of the connecting sleeve, the first connecting pipe is fixedly connected to the water inlet pipe, and one end of the second connecting pipe is fixedly connected to the water outlet pipe;

[0007] A lifting plate is provided on the top of the cleaning tank, an inner box is fixedly connected to the bottom of the lifting plate, cover plates for closing the top of the inner box are hinged on both sides of the lifting plate, the water outlet pipe passes through the lifting plate and is connected to the inner box, a distribution pipe is provided in the resin bed, and the first connecting pipe is plugged into the distribution pipe;

[0008] Two symmetrically arranged inclined plates are rotatably connected between the inner walls on both sides of the inner box, and two top plates used in conjunction with the inclined plates are fixedly connected to the bottom inner wall of the inner box. Electric push rods are fixedly connected to both sides of the cleaning pool, and the output ends of the electric push rods are fixed to the lifting plates.

[0009] As a further solution of the present invention, the bottom of the inclined plate is fixedly connected with a penetrating drain pipe, and the top of the drain pipe is hinged with a floating cover for closing the top of the drain pipe.

[0010] As a further solution of the present invention, two limiting columns for limiting the inclined plate are fixedly connected to the inner walls on both sides of the inner box.

[0011] As a further solution of the present invention, an inclined filter plate is fixedly connected to the circumferential inner wall of the resin bed.

[0012] As a further solution of the present invention, the bottom of the filter plate is fixedly connected with a connecting pipe, the bottom of the connecting pipe is fixedly connected with a discharge pipe, the discharge pipe runs through the resin bed, one end of the discharge pipe is threadedly connected with a threaded head, one side of the threaded head is fixedly connected with a rotating shaft, the circumference of the rotating shaft is fixedly connected with a spiral blade for discharging, and the spiral blade is located in the discharge pipe.

[0013] As a further solution of the present invention, the discharge pipe contacts the bottom inner wall of the resin bed, two guide plates are fixedly connected between the bottom inner wall of the resin bed and the bottom of the filter plate, and the discharge pipe is located between the two guide plates.

[0014] As a further solution of the present invention, a filter box is fixedly connected to the bottom of the distribution pipe, and the filter box is located below the filter plate.

[0015] As a further scheme of the present invention, a treatment box is provided on one side of the resin bed, and a sodium hydroxide solution is provided in the treatment box. An air pump is fixedly installed on the top of the treatment box, and the air suction end of the air pump is fixedly connected to an air suction pipe, and the circumference of the air suction pipe is fixedly connected to two second branch pipes, and the two second branch pipes are respectively connected to the resin bed and the inner box, and the air outlet end of the air pump is fixedly connected to an exhaust pipe, and the exhaust pipe passes through the treatment box and is located in the treatment box, and the top of the treatment box is fixedly connected to an air outlet pipe, and the circumference of the air outlet pipe is fixedly connected to two first branch pipes, and the first branch pipes are respectively connected to the resin bed and the inner box.

[0016] As a further solution of the present invention, control valves are installed around the circumferences of the first branch pipe and the second branch pipe.

[0017] As a further solution of the present invention, the first branch pipe and the second branch pipe are both hoses.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present invention installs an inner box in the cleaning pool, and a rotatable inclined plate is installed at the bottom of the inner box, so that in the process of taking and placing the workpiece, the tops of the two inclined plates are close to each other, thereby forming a closed space, reducing the contact between pure water and air, and avoiding the reaction between pure water and air.

[0020] 2. The present invention installs a drain pipe at the bottom of the inclined plate, and a floating cover is hinged on the top of the drain pipe. The pure water retained in the inclined plate flows downward through the drain pipe. After the liquid level drops, the floating cover falls and closes, further preventing the pure water from reacting with the air.

[0021] 3. The present invention uses a circulation pump and a resin bed in combination, so that pure water in the cleaning pool is extracted by a circulation pump, and the pure water enters the resin bed through a distribution pipe. The pure water is treated by the exchange resin in the resin bed, so that the pure water can be circulated, thereby reducing the waste of pure water and lowering the cleaning cost.

[0022] 4. The present invention installs a discharge pipe on one side of the resin bed, a spiral blade is installed in the discharge pipe, and the thread head is rotated to drive the spiral blade to rotate, thereby discharging the exchange resin in the resin bed, making it convenient to replace the exchange resin.

[0023] In the present invention, during the process of taking and placing the workpiece, the tops of the two inclined plates are close to each other to form a closed space, thereby reducing the contact between pure water and air and avoiding the reaction between pure water and air. At the same time, the pure water is treated by the exchange resin in the resin bed so that the pure water can be circulated, thereby reducing the waste of pure water and the cleaning cost. The spiral blades are driven to rotate by the threaded head to discharge the exchange resin in the resin bed, thereby facilitating the replacement of the exchange resin. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of a three-dimensional structure from a first viewing angle of an ultrapure water treatment system for a cleaning terminal proposed by the present invention;

[0025] Figure 2 A schematic diagram of a three-dimensional structure from a second viewing angle of an ultrapure water treatment system for cleaning a terminal proposed by the present invention;

[0026] Figure 3 This is a schematic diagram of the cross-sectional structure of an inner box of an ultrapure water treatment system for a cleaning terminal proposed by the present invention;

[0027] Figure 4 This is a schematic cross-sectional view of a resin bed and a treatment box of an ultrapure water treatment system for a cleaning terminal proposed by the present invention;

[0028] Figure 5This is a schematic diagram of the enlarged structure of point A of an ultrapure water treatment system for cleaning a terminal proposed by the present invention;

[0029] Figure 6 This is a schematic diagram of the partial structure of a resin bed of an ultrapure water treatment system for a cleaning terminal proposed by the present invention.

[0030] In the figure: 1. cleaning tank; 2. lifting plate; 3. cover plate; 4. electric push rod; 5. circulation pump; 6. resin bed; 7. connecting sleeve; 8. discharge pipe; 9. treatment box; 10. air pump; 11. inner box; 12. inclined plate; 13. drain pipe; 14. floating cover; 15. top plate; 16. limiting column; 17. distribution pipe; 18. exhaust pipe; 19. outlet pipe; 20. first branch pipe; 21. exhaust pipe; 22. second branch pipe; 23. outlet pipe; 24. inlet pipe; 25. first connecting pipe; 26. second connecting pipe; 27. filter plate; 28. connecting pipe; 29. ​​threaded head; 30. rotating shaft; 31. spiral blade; 32. guide plate; 33. filter box. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0032] Embodiment 1

[0033] Reference Figure 1-Figure 6 , an ultrapure water treatment system for a cleaning terminal, comprising a cleaning tank 1 and a resin bed 6 arranged on one side of the cleaning tank 1, wherein pure water is arranged in the cleaning tank 1, and exchange resin for treating pure water is arranged in the resin bed 6, a circulation pump 5 is arranged between the cleaning tank 1 and the resin bed 6, a liquid extraction end of the circulation pump 5 is fixedly connected with the cleaning tank 1, a liquid outlet end of the circulation pump 5 is fixedly connected with a water inlet pipe 24, a connecting sleeve 7 is threadedly connected with the top of the resin bed 6, a first connecting pipe 25 and a second connecting pipe 26 are fixedly penetrated through the inner circumference of the connecting sleeve 7, the first connecting pipe 25 is fixedly connected with the water inlet pipe 24, and one end of the second connecting pipe 26 is fixedly connected with a water outlet pipe 23;

[0034] A lifting plate 2 is provided on the top of the cleaning tank 1, and an inner box 11 is fixedly connected to the bottom of the lifting plate 2. Cover plates 3 for closing the top of the inner box 11 are hinged on both sides of the lifting plate 2. A water outlet pipe 23 passes through the lifting plate 2 and is communicated with the inner box 11. A distribution pipe 17 is provided in the resin bed 6. The first connecting pipe 25 is plugged into the distribution pipe 17. The circulation pump 5 extracts pure water from the cleaning tank 1 and allows the pure water to enter the resin bed 6 through the distribution pipe 17. The pure water is processed by the exchange resin in the resin bed 6. As the water pressure in the resin bed 6 increases, the processed pure water returns to the cleaning tank 1 through the drain pipe 13, so that the pure water can be circulated, reducing the waste of pure water.

[0035] Two symmetrically arranged inclined plates 12 are rotatably connected between the inner walls on both sides of the inner box 11, and two top plates 15 used in conjunction with the inclined plates 12 are fixedly connected to the bottom inner wall of the inner box 11. Electric push rods 4 are fixedly connected to both sides of the cleaning pool 1, and the output ends of the electric push rods 4 are fixed to the lifting plates 2. When placing the workpiece, the inner box 11 moves upward and out of the water surface, and the inclined plate 12 at the bottom thereof is out of contact with the top plate 15, so that the inclined plate 12 rotates under the action of its own weight, and the tops of the two inclined plates 12 approach each other, thereby forming a closed space, reducing the contact between pure water and air, and avoiding the reaction between pure water and air.

[0036] Embodiment 2

[0037] Reference Figure 1-Figure 6 , the present invention provides a new technical solution based on the first embodiment:

[0038] In the present invention, the bottom of the inclined plate 12 is fixedly connected with a drain pipe 13 passing through it, and the top of the drain pipe 13 is hinged with a floating cover 14 for closing the top of the drain pipe 13. The pure water retained in the inclined plate 12 flows downward through the drain pipe 13. After the liquid level drops, the floating cover 14 falls down and closes, further preventing the pure water from reacting with the air.

[0039] In particular, two limiting columns 16 for limiting the position of the inclined plate 12 are fixedly connected to the inner walls on both sides of the inner box 11. The limiting columns 16 play a role in limiting the position of the inclined plate 12 and limiting its angle.

[0040] It should be noted that an inclined filter plate 27 is fixedly connected to the inner circumferential wall of the resin bed 6 , and the filter plate 27 blocks the resin.

[0041] In the present invention, the bottom of the filter plate 27 is fixedly connected with a connecting pipe 28, and the bottom of the connecting pipe 28 is fixedly connected with a discharge pipe 8, which passes through the resin bed 6. One end of the discharge pipe 8 is threadedly connected with a threaded head 29, and one side of the threaded head 29 is fixedly connected with a rotating shaft 30. The circumference of the rotating shaft 30 is fixedly connected with a spiral blade 31 for discharging. The spiral blade 31 is located in the discharge pipe 8. The threaded head 29 is rotated to drive the spiral blade 31 to rotate through the threaded head 29, thereby discharging the exchange resin in the resin bed 6, making it convenient to replace the resin.

[0042] In particular, the discharge pipe 8 contacts the bottom inner wall of the resin bed 6, and two guide plates 32 are fixedly connected between the bottom inner wall of the resin bed 6 and the bottom of the filter plate 27. The discharge pipe 8 is located between the two guide plates 32. After the resin with smaller particles passes through the filter plate 27, it can be guided by the guide plate 32 and enter the discharge pipe 8, thereby improving the discharge effect.

[0043] It should be noted that a filter box 33 is fixedly connected to the bottom of the distribution pipe 17. The filter box 33 is located below the filter plate 27. The filter box 33 prevents the water outlet from being blocked.

[0044] In the present invention, a treatment box 9 is provided on one side of the resin bed 6, and a sodium hydroxide solution is provided in the treatment box 9. An air pump 10 is fixedly installed on the top of the treatment box 9. The air extraction end of the air pump 10 is fixedly connected with an air extraction pipe 21. Two second branch pipes 22 are fixedly connected to the circumference of the air extraction pipe 21. The two second branch pipes 22 are respectively connected to the resin bed 6 and the inner box 11. The air outlet end of the air pump 10 is fixedly connected with an exhaust pipe 18. The exhaust pipe 18 passes through the treatment box 9 and is located in the treatment box 9. The top of the treatment box 9 is fixedly connected with an air outlet pipe 19. The circumference of the air outlet pipe 19 is fixedly connected with two first branch pipes 20. The first branch pipes 20 are respectively connected to the resin bed 6 and the inner box 11. The air pump 10 is started, and the air pump 10 extracts the air in the inner box 11, and then discharges it into the treatment box 9, and reacts with the sodium hydroxide solution in the treatment box 9 to remove carbon dioxide in the air, and then discharges it into the inner box 11 again to reduce the reaction of carbon dioxide in the air with pure water.

[0045] In particular, control valves are installed on the circumference of the first branch pipe 20 and the second branch pipe 22, and the control valves facilitate the replacement of the passages.

[0046] It should be noted that the first branch pipe 20 and the second branch pipe 22 are both hoses, which are convenient for movement.

[0047] Working principle: when in use, pure water is set in the cleaning pool 1. When a workpiece needs to be placed, the electric push rod 4 is started. The electric push rod 4 drives the inner box 11 to move upward through the lifting plate 2. When the inner box 11 leaves the water surface, the inclined plate 12 at the bottom is separated from the contact with the top plate 15, so that the inclined plate 12 rotates under the action of its own weight, and the tops of the two inclined plates 12 are close to each other, thereby forming a closed space, reducing the contact between pure water and air, and avoiding the reaction between pure water and air. The pure water retained in the inclined plate 12 flows downward through the drain pipe 13. After the liquid level drops, the floating cover 14 falls and closes, further avoiding the reaction between pure water and air. After the workpiece is placed, the cover plate 3 is closed, and then the air pump 10 is started. The air pump 10 extracts the air in the inner box 11, and then discharges it into the processing box 9, and reacts with the sodium hydroxide solution in the processing box 9 to remove the carbon dioxide in the air, and then discharges it into the inner box 11 again. After the gas treatment is completed, the inner box 11 is moved downward. During the downward movement of the inner box 11, the inclined plate 12 is pushed open by the top plate 15, so that pure water enters the inner box 11, and then the workpiece is immersed and cleaned. At the same time, the circulation pump 5 is started, and the circulation pump 5 extracts the pure water in the cleaning tank 1 and allows the pure water to enter the resin bed 6 through the distribution pipe 17. The pure water is treated by the exchange resin in the resin bed 6. As the water pressure in the resin bed 6 increases, the treated pure water returns to the cleaning tank 1 through the drain pipe 13, so that the pure water can circulate, reducing the waste of pure water. When the exchange resin needs to be replaced, the water in the resin bed 6 is discharged, and then the threaded head 29 is rotated to disengage the threaded head 29 from the discharge pipe 8, and then the threaded head 29 is rotated to drive the spiral blade 31 to rotate through the threaded head 29, so that the exchange resin in the resin bed 6 is discharged, which is convenient for people to use.

[0048] However, as is well known to those skilled in the art, the working principles and wiring methods of the electric push rod 4, the circulation pump 5, and the air pump 10 are commonplace, and are all conventional means or common knowledge, and will not be elaborated here. Those skilled in the art can make any optional selections according to their needs or convenience.

[0049] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An ultrapure water treatment system for a cleaning terminal, comprising a cleaning tank (1) and a resin bed (6) arranged on one side of the cleaning tank (1), characterized in that: A circulation pump (5) is arranged between the cleaning tank (1) and the resin bed (6); the liquid extraction end of the circulation pump (5) is fixedly connected to the cleaning tank (1); the liquid discharge end of the circulation pump (5) is fixedly connected to a water inlet pipe (24); a connecting sleeve (7) is threadedly connected to the top of the resin bed (6); a first connecting pipe (25) and a second connecting pipe (26) are fixedly passed through the inner circumference of the connecting sleeve (7); the first connecting pipe (25) is fixedly connected to the water inlet pipe (24); one end of the second connecting pipe (26) is fixedly connected to a water outlet pipe (23); A lifting plate (2) is arranged on the top of the cleaning tank (1), the bottom of the lifting plate (2) is fixedly connected to an inner box (11), both sides of the lifting plate (2) are hinged with cover plates (3) for closing the top of the inner box (11), the water outlet pipe (23) passes through the lifting plate (2) and is connected to the inner box (11), a distribution pipe (17) is arranged in the resin bed (6), and a first connecting pipe (25) is plugged into the distribution pipe (17); Two symmetrically arranged inclined plates (12) are rotatably connected between the inner walls on both sides of the inner box (11), and two top plates (15) used in conjunction with the inclined plates (12) are fixedly connected to the bottom inner wall of the inner box (11). Electric push rods (4) are fixedly connected to both sides of the cleaning tank (1), and the output ends of the electric push rods (4) are fixed to the lifting plates (2).

2. The ultrapure water treatment system for cleaning a terminal according to claim 1, characterized in that: The bottom of the inclined plate (12) is fixedly connected with a drain pipe (13) passing through, and the top of the drain pipe (13) is hinged with a floating cover (14) for closing the top of the drain pipe (13).

3. The ultrapure water treatment system for cleaning a terminal according to claim 1, characterized in that: Two inner walls on both sides of the inner box (11) are fixedly connected to two limiting columns (16) for limiting the position of the inclined plate (12).

4. The ultrapure water treatment system for cleaning a terminal according to claim 1, characterized in that: A filter plate (27) arranged obliquely is fixedly connected to the circumferential inner wall of the resin bed (6).

5. The ultrapure water treatment system for cleaning a terminal according to claim 4, characterized in that: The bottom of the filter plate (27) is fixedly connected to a connecting pipe (28), the bottom of the connecting pipe (28) is fixedly connected to a discharge pipe (8), the discharge pipe (8) passes through the resin bed (6), one end of the discharge pipe (8) is threadedly connected to a threaded head (29), one side of the threaded head (29) is fixedly connected to a rotating shaft (30), the circumference of the rotating shaft (30) is fixedly connected to a spiral blade (31) for discharging, and the spiral blade (31) is located in the discharge pipe (8).

6. The ultrapure water treatment system for cleaning a terminal according to claim 5, characterized in that: The discharge pipe (8) is in contact with the bottom inner wall of the resin bed (6), and two guide plates (32) are fixedly connected between the bottom inner wall of the resin bed (6) and the bottom of the filter plate (27), and the discharge pipe (8) is located between the two guide plates (32).

7. The ultrapure water treatment system for cleaning a terminal according to claim 6, characterized in that: A filter box (33) is fixedly connected to the bottom of the distribution pipe (17), and the filter box (33) is located below the filter plate (27).

8. The ultrapure water treatment system for cleaning a terminal according to claim 1, characterized in that: A treatment box (9) is provided on one side of the resin bed (6), and a sodium hydroxide solution is provided in the treatment box (9). An air pump (10) is fixedly installed on the top of the treatment box (9), and an air extraction pipe (21) is fixedly connected to the air extraction end of the air pump (10), and two second branch pipes (22) are fixedly connected to the circumference of the air extraction pipe (21), and the two second branch pipes (22) are respectively connected to the resin bed (6) and the inner box (11). An exhaust pipe (18) is fixedly connected to the air outlet end of the air pump (10), and the exhaust pipe (18) passes through the treatment box (9) and is located in the treatment box (9). An air outlet pipe (19) is fixedly connected to the top of the treatment box (9), and two first branch pipes (20) are fixedly connected to the circumference of the air outlet pipe (19), and the first branch pipes (20) are respectively connected to the resin bed (6) and the inner box (11).

9. The ultrapure water treatment system for cleaning a terminal according to claim 8, characterized in that: Control valves are installed on the circumferences of the first branch pipe (20) and the second branch pipe (22).

10. The ultrapure water treatment system for cleaning a terminal according to claim 8, characterized in that: The first branch pipe (20) and the second branch pipe (22) are both hoses.

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