Heating device of integrated fluid conveying system

Abstract

The invention discloses a heating device of an integrated fluid conveying system, the integrated fluid conveying system comprises a fluid conveying assembly, and the heating device comprises a heat conduction part which is arranged outside the fluid conveying assembly in a sleeving manner and is used for heating the fluid conveying assembly; the section shape of the inner wall of the heat conduction part along the fluid conveying direction is matched with the section shape of the outer wall of the fluid conveying assembly along the fluid conveying direction; the temperature control part is arranged outside the heat conduction part in a sleeving mode, the section shape of the inner wall of the temperature control part in the fluid conveying direction is matched with the section shape of the outer wall of the heat conduction part in the fluid conveying direction, and the temperature control part wraps the outer wall of the heat conduction part; in the working state, the temperature of the temperature control part is adjusted, and the temperature is transmitted to the outside of the fluid conveying assembly through the heat conduction part so that the temperature of the fluid conveying assembly can be guaranteed. The gas transmission assembly can be heated or subjected to heat preservation, the connecting position of the gas transmission system can be completely wrapped, the attaching performance is good, and the temperature uniformity is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a heating device for an integrated fluid delivery system. Background Art

[0002] In the semiconductor and pan-semiconductor industries, liquid or solid sources are converted into gas sources by heating, and then transported to the reaction chamber through a gas delivery system to participate in the process reaction. During the gas transportation process, corresponding heating or insulation devices are required to heat or insulate the gas delivery system to the required temperature.

[0003] At present, there are four basic methods for heating or insulating the gas delivery system: the first is a silicone foam heating garment, which has good temperature uniformity, but will volatilize particulate matter and cause abnormal air environment; the second is a glass fiber cloth wrapped and sewn heating garment, which has low cost, but poor fit and poor temperature uniformity; the third is module heating, which uses metal and heating rods to heat the gas delivery system, and has more accurate temperature control, but is large in size, heavy, and requires many electrical control points; the fourth is a wrap-around heating garment, which has a fast delivery time, but poor fit and cannot completely wrap the gas delivery system connection.

[0004] Therefore, it is necessary to provide a novel integrated fluid delivery system heating device to solve the problem of poor adhesion in the prior art and to improve temperature uniformity. Summary of the invention

[0005] The object of the present invention is to provide a heating device for an integrated fluid delivery system, which is used to heat or keep the gas warm during the gas transmission process, can completely wrap the connection of the gas delivery system, and has good temperature uniformity.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A heating device for an integrated fluid delivery system, the integrated fluid delivery system comprising a fluid delivery component, the heating device comprising:

[0008] A heat conducting member is sleeved on the outside of the fluid conveying component, and the cross-sectional shape of the inner wall of the heat conducting member along the fluid conveying direction is adapted to the cross-sectional shape of the outer wall of the fluid conveying component along the fluid conveying direction, and is wrapped around the outer wall of the fluid conveying component;

[0009] A temperature control part, which is sleeved on the outside of the heat-conducting part, wherein the cross-sectional shape of the inner wall of the temperature control part along the fluid conveying direction matches the cross-sectional shape of the outer wall of the heat-conducting part along the fluid conveying direction, and is wrapped around the outer wall of the heat-conducting part;

[0010] In the working state, the temperature of the temperature control component is adjusted, and the temperature is transferred to the outside of the fluid transport component through the heat conductive component to ensure the temperature of the gas in the fluid transport component.

[0011] By adopting the above technical solution, a heat conductive member is sleeved on the outside of the gas transmission component, and a temperature control unit is sleeved on the outside of the heat conductive member, wherein the heat conductive member is made of a material with a high thermal conductivity coefficient, which can quickly disperse the temperature of the temperature control unit so that the temperature of the temperature control unit is evenly distributed on the heat conductive member. At the same time, the heat conductive member fits the outer wall of the gas transmission component, which can make the temperature uniform and transfer it to the outer wall of the gas transmission component. In the process of heating the temperature control unit, there is no need to set too many heating points. At the same time, due to the setting of the heat conductive member, the temperature uniformity is high, thereby achieving uniform heating or insulation of the gas in the gas transmission component, so that the gas in the gas transmission component is within a predetermined temperature range.

[0012] Optionally, the heat conducting member is a block of high thermal conductivity material with a hollow center and a smooth outer wall.

[0013] By adopting the above technical solution, the central hollow design can reduce the amount of material used, thereby reducing thermal resistance and allowing heat to be transferred more quickly through the heat conductor; at the same time, the hollow structure can reduce the deformation of the material during thermal expansion, thereby improving the stability and service life of the heat conductor; and the smooth outer wall can better achieve fit with the temperature control part.

[0014] Optionally, the cross-sectional shape of the inner wall of the heat-conducting element along the fluid conveying direction is circular or polygonal.

[0015] By adopting the above technical solution, during use, different inner wall shapes can be selected according to different working conditions or different components to improve the adaptability of the heat conducting component.

[0016] Optionally, the high thermal conductivity material block is at least one of a graphite block and an aluminum block.

[0017] By adopting the above technical solution, the graphite block and the aluminum block have high thermal conductivity and good chemical properties, which facilitates the heat conduction process.

[0018] Optionally, the heat conductive part includes a first heat conductive sleeve and a second heat conductive sleeve, the fluid conveying assembly includes a plurality of fluid elements and pipelines, the inner wall of the first heat conductive sleeve is attached to the outer wall of the fluid element, the second heat conductive sleeve is fixedly arranged on the side wall of the first heat conductive sleeve, the second heat conductive sleeve is connected to the first heat conductive sleeve, and the second heat conductive sleeve is used to pass the pipeline.

[0019] By adopting the above technical solution, the first heat-conducting sleeve is attached to the outer wall of the fluid element, and the pipeline is passed through the second heat-conducting sleeve. At the same time, since the first heat-conducting sleeve and the second heat-conducting sleeve are fixedly arranged, the connection between the fluid element and the pipeline can be completely wrapped, further ensuring the uniformity of the heating temperature.

[0020] Optionally, the heat-conducting member further comprises a third heat-conducting sleeve, one end of the third heat-conducting sleeve is connected to the first heat-conducting sleeve, and the other end of the third heat-conducting sleeve is connected to the second heat-conducting sleeve;

[0021] The pipeline is provided with a connection structure for connecting with the fluid element, and the inner wall of the third heat-conducting sleeve is in contact with the outer wall of the connection structure.

[0022] By adopting the above technical solution, the third heat-conducting sleeve fits the outer wall of the connecting structure, which can ensure that the temperature of the temperature control part is evenly transmitted to the pipeline.

[0023] Optionally, a mounting hole adapted to the fluid element is formed on the first heat-conducting sleeve, and the fluid element is passed through the mounting hole.

[0024] By adopting the above technical solution, the fluid element is inserted into the installation hole, which makes it easy to control the fluid element from outside the temperature control unit, while ensuring the heating or heat preservation effect of the fluid element.

[0025] Optionally, a plurality of heating elements are arranged on the temperature control unit, and the plurality of heating elements are evenly distributed on the temperature control unit, and the heating elements are used to heat the temperature control unit.

[0026] By adopting the above technical solution, a plurality of heating elements are provided and evenly distributed on the side wall of the temperature control unit, so that the temperature control unit can be heated evenly, and due to the presence of the heat conductor, the temperature can be transferred to the side wall of the fluid element and the side wall of the pipeline more quickly, reducing the temperature loss of the heating element, thereby improving the heating efficiency.

[0027] Optionally, the heating device further comprises a temperature detection device and an over-temperature protection device, and the over-temperature protection device and the heating element are arranged in series;

[0028] In the working state, the temperature detection device is used to detect the temperature of the fluid conveying component. After the temperature of the fluid conveying component exceeds a predetermined temperature, the over-temperature protection device is disconnected and the heating element no longer heats.

[0029] By adopting the above technical solution, the over-temperature protection device and the heating element are arranged in series. When the temperature detection device detects that the heating temperature exceeds the predetermined temperature range, the over-temperature protection device is disconnected. Since the over-temperature protection device and the heating element are arranged in series, when the over-temperature protection device is disconnected, the heating element cannot continue to heat, thereby ensuring that the temperature does not exceed the predetermined temperature range.

[0030] Optionally, the temperature detection device is arranged at a variable temperature measuring point and / or a constant temperature measuring point of the fluid conveying component.

[0031] By adopting the above technical solution, temperature detection can be performed at different positions of the fluid conveying component according to different usage conditions.

[0032] The beneficial effects of the heating device of the integrated fluid delivery system provided by the present invention include at least:

[0033] 1. The heat conducting piece increases the overall diameter of the fluid element and the pipeline, and the temperature control piece fits well on the outer wall of the heat conducting piece, so that the temperature control piece fits better on the outside of the fluid element and the pipeline;

[0034] 2. The heat-conducting member is made of a material with a high thermal conductivity coefficient, which can quickly disperse the temperature of the temperature-controlling part, so that the temperature of the temperature-controlling part is evenly distributed on the heat-conducting member, and there is no need to set too many heating points during the heating process of the temperature-controlling part;

[0035] 3. The first heat-conducting sleeve is attached to the outer wall of the fluid element, and the second heat-conducting sleeve is provided with a pipeline. At the same time, since the first heat-conducting sleeve and the second heat-conducting sleeve are fixedly arranged, the temperature control unit integrally wraps the heat-conducting component, so that the connection between the fluid element and the pipeline can be completely wrapped, the adhesion is good, and the uniformity of the heating temperature is further ensured;

[0036] 4. During the heating process, the temperature control unit will not volatilize particulate matter and will not affect the air environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a schematic diagram of the main structure of an embodiment of the present invention;

[0038] Figure 2 A cross-sectional view of a single fluid element and a heating device installation method according to an embodiment of the present invention;

[0039] Figure 3 for Figure 2 Enlarged view of part A in the middle;

[0040] Figure 4 A schematic diagram of the connection between an external control system and a heating element according to an embodiment of the present invention;

[0041] Figure 5 It is a line graph of the temperature errors of various measuring points on the pipeline at a constant temperature of 50° C. for 60 minutes according to an embodiment of the present invention;

[0042] Figure 6 This is a line graph of the temperature errors of various measuring points on the pipeline when the temperature is kept constant at 150° C. for 60 minutes according to an embodiment of the present invention.

[0043] Reference numerals:

[0044] 100, fluid transport assembly; 110, fluid element; 120, pipeline; 200, heat conductive part; 210, first heat conductive sleeve; 220, second heat conductive sleeve; 230, third heat conductive sleeve; 300, temperature control unit; 400, heating element; 510, temperature detection device; 520, over-temperature protection device; 540, gas supply equipment; 550, gas reaction equipment; 560, external control system; 600, mounting hole. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0046] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0047] An embodiment of the present invention provides a heating device for an integrated fluid delivery system, wherein the integrated fluid delivery system includes a fluid delivery component 100, the fluid delivery component 100 is used to deliver a medium such as a liquid or a gas, and transfer it to a predetermined position, the heating device includes: a heat conductive member 200 and a temperature control member 300, the heat conductive member 200 is sleeved on the outside of the fluid delivery component 100, and the cross-sectional shape of the inner wall of the heat conductive member 200 along the fluid delivery direction is adapted to the cross-sectional shape of the outer wall of the fluid delivery component 100 along the fluid delivery direction, and is wrapped around the outer wall of the fluid delivery component 100, and the temperature control member 300 is sleeved on the outside of the heat conductive member 200, and the cross-sectional shape of the inner wall of the temperature control member 300 along the fluid delivery direction is adapted to the cross-sectional shape of the outer wall of the heat conductive member 200 along the fluid delivery direction, and Wrapped on the outer wall of the heat conductive part 200; wherein the fluid conveying component 100 includes a plurality of fluid elements 110 and a pipeline 120, and the plurality of fluid elements 110 are connected in turn through the pipeline 120, so that the gas can be transported between the plurality of fluid elements 110. In the present embodiment, the heat conductive part 200 is sleeved on the outer walls of the plurality of fluid elements 110 and the outer walls of the pipeline 120; wherein the plurality of fluid elements 110 are respectively a hand valve, a pneumatic diaphragm valve, a filter, a three-way pneumatic diaphragm valve, a buffer cylinder, etc.; the gas in the external environment first passes through the hand valve through the pipeline 120, and passes through the pipeline 120, and successively enters the pneumatic diaphragm valve, the filter, the three-way pneumatic diaphragm valve, and finally enters the buffer cylinder, and is discharged to the specified external environment through the pipeline 120, thereby completing the gas transmission.

[0048] Reference Figure 1-6 The heat-conducting member 200 includes a first heat-conducting sleeve 210, a second heat-conducting sleeve 220 and a third heat-conducting sleeve 230, wherein the first heat-conducting sleeve 210 is used to be sleeved on the fluid element 110, and the inner wall of the first heat-conducting sleeve 210 is in contact with the outer wall of the fluid element 110 to facilitate the heat transfer process. Specifically in this embodiment, the first heat-conducting sleeve 210 is adapted to the shapes of different fluid elements 110, that is, the first heat-conducting sleeve 210 is sleeved on the outside of the hand valve, pneumatic diaphragm valve, filter, three-way pneumatic diaphragm valve, buffer cylinder and other components, and The inner walls of the multiple first heat-conducting sleeves 210 are respectively fitted to the outer wall of the hand valve, the outer wall of the pneumatic diaphragm valve, the outer wall of the filter, the outer wall of the three-way pneumatic diaphragm valve, and the outer wall of the buffer cylinder, that is, the inner wall of the first heat-conducting sleeves 210 can be square, round or other shapes that are adapted to the fluid element 110; when adjusting the temperature of the temperature control unit 300, since the heat-conducting component 200 is fitted with the fluid element 110, the heat of the temperature control unit 300 can be quickly transferred to the fluid element 110, which is convenient for heating or keeping the gas in the fluid element 110 warm.

[0049] Reference Figure 1-6The third heat-conducting sleeve 230 is fixedly arranged on the side wall of the first heat-conducting sleeve 210, and the fixing method thereof can be welding, bolt fixing or buckle fixing, etc. When the overall thickness of the heat-conducting member 200 is required to be thinner, the buckle fixing method between the third heat-conducting sleeve 230 and the first heat-conducting sleeve 210 is selected. When the overall thickness of the heat-conducting member 200 is required to be thicker, the bolt fixing method between the third heat-conducting sleeve 230 and the first heat-conducting sleeve 210 is selected; wherein a connecting structure is provided on the pipeline 120, and the pipeline 120 is connected to the fluid through the connecting structure The third heat-conducting sleeve 230 is connected to the fluid element 110, and the connection structure can adopt a buckle or a nut. In the present embodiment, the pipeline 120 and the fluid element 110 are connected and fixed by a nut, and the inner wall of the third heat-conducting sleeve 230 fits with the outer wall of the connection structure, that is, the cross-sectional shape of the inner wall of the third heat-conducting sleeve 230 along the fluid conveying direction can be circular, polygonal, or other shapes that are adapted to the connection structure; during operation, the third heat-conducting sleeve 230 can quickly transfer heat to the connection structure, so as to facilitate the operation process.

[0050] Reference Figure 1-6The second heat-conducting sleeve 220 is fixed to one end of the third heat-conducting sleeve 230, so that the second heat-conducting sleeve 220 is connected to the first heat-conducting sleeve 210, that is, one end of the third heat-conducting sleeve 230 is connected to the first heat-conducting sleeve 210, and the other end is connected to the second heat-conducting sleeve 220; wherein the second heat-conducting sleeve 220 and the third heat-conducting sleeve 230 can be fixed by welding, bolting or snap-fitting, etc. When the overall thickness of the heat-conducting member 200 is required to be thinner, the third heat-conducting sleeve 230 and the second heat-conducting sleeve 220 are selected to be fixed by snap-fitting. When the overall thickness of the heat-conducting member 200 is required to be thicker, the third heat-conducting sleeve 230 and the second heat-conducting sleeve 220 are fixed by bolts. The second heat-conducting sleeve 220 is connected to the first heat-conducting sleeve 210, and the second heat-conducting sleeve 220 is cylindrical. The second heat-conducting sleeve 220 is used to pass through the pipeline 120 and is wrapped around the outer wall of the pipeline 120, that is, the cross-sectional shape of the inner wall of the second heat-conducting sleeve 220 along the fluid conveying direction can be circular, square or other cross-sectional shapes that are consistent with the outer wall of the pipeline 120. The cross-sectional shape of the wall along the fluid conveying direction is adapted to the shape; when the first heat-conducting sleeve 210 is sleeved on the outside of the fluid element 110, the pipeline 120 connected to the side wall of the fluid element 110 passes through the second heat-conducting sleeve 220, and the heat-conducting member 200 can completely wrap the connection between the fluid element 110 and the pipeline 120, reducing the temperature loss of the gas in the pipeline 120 and achieving a heat preservation effect; at the same time, the temperature control unit 300 is wrapped around the outer wall of the heat-conducting member 200, and the inner wall of the heat-conducting member 200 along the fluid conveying direction The cross-sectional shape may be circular, square or other shapes, and is not limited here, as long as the temperature control unit 300 can be wrapped around the outer wall of the heat conductive member 200. Since the heat conductive member 200 has good fit with the fluid element 110 and the pipeline 120, the temperature control unit 300 is wrapped around the outer wall of the heat conductive member 200, so that the temperature of the temperature control unit 300 can be quickly transferred to the heat conductive member 200 and evenly distributed in the heat conductive member 200, so that the heat is evenly transferred to the fluid element 110 and the pipeline 120.

[0051] Reference Figure 1-6, the heat-conducting member 200 is a central hollow setting, and the outer wall is a high-thermal conductivity material block with a smooth outer wall, so that the outer wall of the heat-conducting member 200 can be fitted with the inner wall of the temperature control unit 300, and the smooth outer wall can better fit with the temperature control unit 300; wherein, the central hollow design can reduce the amount of material used, thereby reducing thermal resistance, so that heat can be transferred more quickly through the heat-conducting member; at the same time, the hollow structure can reduce the deformation of the material during thermal expansion, and improve the stability and service life of the heat-conducting member; the heat-conducting member 200 is a material with a high thermal conductivity coefficient. The use of a material with a high thermal conductivity coefficient can quickly transfer heat from the heat source to ensure rapid and uniform heat transmission. In this embodiment, the heat-conducting member 200 is made of at least one of a graphite block and an aluminum block. A graphite block can be used alone, or an aluminum block can be used alone, or a graphite block and an aluminum block can be used simultaneously; the temperature control unit 300 includes but is not limited to a glass fiber cloth wrapped heating garment and a winding heating garment, etc. In this embodiment, the temperature control unit 300 is selected The heating garment is sewn with a glass fiber cloth. The glass fiber cloth has excellent high temperature resistance and is suitable for heat insulation materials in high temperature environments. When making the heating garment, this material can withstand high temperatures to ensure the stability and safety of the heating garment in a high temperature working environment. In addition, it has extremely high surface cleanliness and does not produce volatile particles during the heating process. At the same time, the glass fiber cloth-wrapped heating garment is integrally wrapped with the heat conductive member 200 and fixed by buckles or Velcro, so that the connection between the second heat conductive sleeve 220 and the first heat conductive sleeve 210 can be completely wrapped, ensuring the temperature stability of the connection between the second heat conductive sleeve 220 and the first heat conductive sleeve 210. In addition, the heat conductive member 200 increases the overall diameter of the fluid element 110 and the pipeline 120, and the temperature control unit 300 is more tightly wrapped when wrapped. At the same time, since the heat conductive member 200 is made of a high thermal conductivity material, it can ensure that heat is evenly and efficiently transferred to the surface of the fluid element 110 and the pipeline 120.

[0052] Reference Figure 1-6The shape of the heat conductive member 200 is adapted to the shape of the fluid element 110 and the shape of the pipeline 120. Specifically, the heat conductive member 200 may be an integrally formed shell, or may include at least two shells. In addition, a plurality of shells may be used. In this embodiment, the heat conductive member 200 includes two shells, and the two shells are detachably connected. When the two shells are connected, the two shells form a complete heat conductive member 200. The two shells may be detachably connected by rotation or by a connecting member. In this embodiment, the two shells are connected by a connecting member. The two shells are connected, and connecting pieces are provided on both shells. The connecting pieces can be buckles, bolts or other parts that can connect the two. In this embodiment, the connecting pieces are bolts, and holes for passing the bolts are provided on the shells. In the working state, the two shells are fitted together by controlling the connecting pieces on the two shells to form a complete heat conducting member 200. Such a setting makes it easy to disassemble the heat conducting member 200. At the same time, in the process of connecting the heat conducting member 200 with the fluid conveying component 100, the detachable setting of the heat conducting member 200 facilitates the installation process. When the pipeline 120 is short, the corresponding The second heat-conducting sleeve 220 is connected between two adjacent first heat-conducting sleeves 210, that is, the first heat-conducting sleeve 210 and the second heat-conducting sleeve 220 fully cover the fluid element 110 and the pipeline 120, and the gas is evenly heated during the gas transmission process; when the pipeline 120 is long, multiple second heat-conducting sleeves 220 can be selected and evenly distributed along the axial direction of the pipeline 120, and the second heat-conducting sleeve 220 close to the first heat-conducting sleeve 210 is fixed to the first heat-conducting sleeve 210. Such an arrangement can ensure that the connection between the fluid element 110 and the pipeline 120 is completely wrapped, and the gas in the longer pipeline 120 can be heated. During the transportation of the gas, the gas can be evenly heated. At the same time, the interval arrangement can save materials and improve economic benefits while ensuring uniform heating of the gas. In addition, a mounting hole 600 is provided on the first heat-conducting sleeve 210, and the mounting hole 600 is adapted to the fluid element 110. When the fluid element 110 is a valve-type element or other fluid element 110 that needs to be controlled from the outside, the fluid element 110 is inserted into the mounting hole 600, and at the same time, the inner wall of the mounting hole 600 is attached to the outer wall of the fluid element 110, which is convenient for controlling the fluid element 110 while ensuring the uniformity of temperature transfer to the greatest extent.

[0053] Reference Figure 1-6, a plurality of heating elements 400 are arranged on the temperature control unit 300, and the plurality of heating elements 400 are evenly distributed on the temperature control unit 300, and the distribution mode thereof can be heating wire winding, or the heating elements can be linearly distributed on the temperature control unit 300, or other modes that can evenly heat the temperature control unit 300 and the fluid delivery component; during use, the heating element 400 heats the temperature control unit 300 to achieve the effect of regulating the temperature of the temperature control unit 300; in addition, the heating device also includes a temperature detection device 510 and an over-temperature protection device 520, and the temperature detection device 510 is mainly used to detect the temperature of the fluid delivery component 100, that is, to detect the temperature of the fluid element 110 and the pipeline 120, and the temperature detection device 510 and the over-temperature protection device 520 can each be provided with one, or can each be provided with multiple, and in this embodiment, the temperature detection device 510 and the over-temperature protection device 520 are each provided with multiple.

[0054] A plurality of temperature detection devices 510 are evenly distributed outside the fluid delivery component 100. In some embodiments, the plurality of temperature detection devices 510 are evenly distributed on the outer wall of the fluid element 110 and the outer wall of the pipeline 120; or, the plurality of temperature detection devices 510 are evenly distributed inside the temperature control unit 300; or, the plurality of temperature detection devices 510 are evenly distributed inside the fluid delivery component 100 and the temperature control unit 300. Specifically, in this embodiment, the outer wall of the fluid element 110 and the outer wall of the pipeline 120 are both provided with a plurality of evenly distributed temperature detection devices 510.

[0055] In this embodiment, a plurality of temperature detection devices 510 are evenly distributed outside the fluid delivery component 100 and inside the temperature control unit 300. Such a configuration can more intuitively detect whether the heat transfer is uniform, and can also detect the real-time temperature, thereby facilitating the adjustment of the heating temperature on the temperature control unit 300.

[0056] A plurality of over-temperature protection devices 520 are evenly distributed outside the fluid delivery component 100. In some embodiments, the plurality of over-temperature protection devices 520 are evenly distributed on the outer wall of the fluid element 110 and the outer wall of the pipeline 120; or, the plurality of over-temperature protection devices 520 are evenly distributed inside the temperature control unit 300; or, the plurality of over-temperature protection devices 520 are evenly distributed inside the fluid delivery component 100 and the temperature control unit 300. Specifically, in this embodiment, the outer wall of the fluid element 110, the outer wall of the pipeline 120 and the temperature control unit 300 are all provided with a plurality of evenly distributed over-temperature protection devices 520.

[0057] In this embodiment, the temperature detection device 510 can be evenly distributed at the variable temperature measuring points outside the fluid delivery component, or the temperature detection device 510 can be evenly distributed at the fixed temperature measuring points outside the fluid delivery component, or the temperature detection device 510 can be evenly distributed at the variable temperature measuring points and fixed temperature measuring points outside the fluid delivery component, wherein the variable temperature measuring point is the temperature change position on the surface of the pipeline 120, and the positioning measuring point is the cold point position. In this embodiment, the temperature detection device 510 uses a temperature detection thermocouple, and the over-temperature protection device 520 uses a temperature control switch. The temperature detection thermocouple can be distributed at the temperature change position on the surface of the pipeline 120, and can also be distributed in certain Cold spot position; multiple over-temperature protection devices 520 correspond to the positions of multiple temperature detection devices 510 one by one, and at the same time, multiple over-temperature protection devices 520 correspond to the positions of multiple heating elements 400. An over-temperature protection device 520 is arranged in each heating zone, and the over-temperature protection devices 520 with corresponding positions and the heating elements 400 in the heating zone are arranged in series. In the working state, the temperature detection device 510 detects the heating temperature of the temperature control unit 300. When the heating temperature exceeds the predetermined temperature, the over-temperature protection device 520 is disconnected, so that the heating element 400 no longer heats the temperature control unit 300, thereby preventing the heating temperature from being too high.

[0058] Reference Figure 1-6 The heating device also includes an external control system 560, which is electrically connected to the temperature detection device 510 and the heating element 400. In the working state, the temperature detection device 510 is mainly used to detect the heating temperature of the heated clothing, and feed back the detected heating temperature to the external control system 560. The external control system 560 adjusts the heating temperature of the heating element 400 according to the temperature feedback of the temperature detection device 510 to adapt to different heating or insulation requirements, and can monitor the heating conditions in each heating section in real time.

[0059] The integrated fluid delivery system also includes a gas supply device 540, a gas reaction device 550, a gas transmission component and a heating device, wherein one end of the fluid delivery component 100 is connected to the gas supply device 540, and the other end is connected to the gas reaction device 550. The liquid source or solid source is converted into a gas source in the gas supply device 540, and enters the gas reaction device 550 through the fluid delivery component 100 to participate in the process reaction. During the gas transportation process, a corresponding heating or insulation device is required to heat or insulate the gas transmission component to the required temperature. In order to achieve this effect, a heating element 400 is set in the temperature control unit 300, so as to heat the temperature control unit 300 in the heating device.

[0060] In addition, since the fluid delivery assembly 100 includes a plurality of fluid elements 110 and pipelines 120, the gas supply device 540 and the gas reaction device 550 are both connected to the fluid element 110 through the pipeline 120, that is, after the gas is transferred from the gas supply device 540 to the pipeline, it passes through the hand valve, the pneumatic diaphragm valve, the filter, the three-way pneumatic diaphragm valve, and the buffer cylinder in sequence and then enters the gas reaction device 550. In this process, the temperature control unit 300 heats the heat conductive member 200, thereby heating the side wall of the fluid element 110 and the outer wall of the pipeline 120. Specifically in this embodiment, the temperature control unit 300 heats the hand valve, the pneumatic diaphragm valve, the filter, the three-way pneumatic diaphragm valve, and the outer wall of the buffer cylinder respectively through the heat conductive member 200. The integrated fluid delivery system also includes an external control system 560, which can receive signal feedback from the temperature detection device 510. The external control system 560 is connected to the heating element 400 and can control the heating temperature of the heating element 400. However, when the temperature feedback from the temperature detection device 510 exceeds the predetermined temperature, the external control system 560 controls the heating element 400 to lower the heating temperature or stop heating, so as to achieve precise control of the heating temperature. At the same time, when the temperature is too high, the over-temperature protection device 520 will disconnect the circuit of the heating element 400, so that the heating element 400 cannot continue to heat, so as to ensure that the temperature is always within the predetermined temperature range.

[0061] Reference Figure 1-6 In this embodiment, in order to evaluate the heating effect, we conducted a heating test on a section of the pipeline 120 with an outer diameter of 1 / 4 inch in the pipeline system. The specific operation is as follows: 12 temperature measurement points are evenly distributed on the selected pipeline section. Then, we used two different heating temperatures, namely 50°C and 150°C, to heat the pipeline; the heating process lasted for 60 minutes to ensure that the pipeline achieved a stable temperature distribution; during the entire heating process, a traditional heating garment was used as a control group to compare and evaluate the effects of different heating methods. After the heating was completed, the temperatures of the 12 measurement points were accurately measured and the relevant data were recorded:

[0062] After setting the constant temperature at 50℃ for 60min, the temperature of the test pipe is as follows

[0063]

[0064] After setting the constant temperature at 150℃ for 60min, the temperature of the test pipe is as follows

[0065]

[0066] From the above, we can intuitively conclude that:

[0067] In the 50°C heating experiment, the range of the experimental results of the traditional heating clothing was 8.1°C, the average error was -0.7°C, and the standard deviation was 2.4°C; the range of the experimental results of the device described in the present invention was 2.2°C, the average error was 0.3°C, and the standard deviation was 0.7°C.

[0068] In the 150°C heating experiment, the range of the experimental results of the traditional heating clothing was 30.6°C, the average error was -4.2°C, and the standard deviation was 10°C; the range of the experimental results of the device described in the present invention was 11.1°C, the average error was 0.7°C, and the standard deviation was 3°C.

[0069] At the two heating temperatures, the temperature extremes of the heating device are significantly lower than those of traditional heating clothing, which indicates that the patented device can provide a more uniform heating effect and reduce the temperature gradient inside the pipeline; at the same time, the average error of the heating device is smaller than that of traditional heating clothing, indicating that it is more stable in maintaining the set temperature; the standard deviation of the heating device is lower than that of traditional heating clothing, which indicates that the temperature fluctuation is smaller during the heating process, the heating performance is more reliable, and the temperature uniformity and precise control can be achieved. At the same time, it has the advantages of no serious volatile particulate matter, good fit, small size, light weight, fewer electrical control points required, and complete wrapping of the gas delivery system connection.

[0070] The implementation principle of the heating device of an integrated fluid delivery system of the present invention is to set the heat conductive member 200 on the outside of the fluid element 110 and the outside of the pipeline 120, and set the temperature control unit 300 on the outside of the heat conductive member 200. At this time, the temperature control unit 300 is wrapped on the outer wall of the heat conductive member 200, and the heating element 400 is evenly distributed in the temperature control unit 300. The temperature control unit 300 is heated by the heating element 400, and the temperature of the temperature control unit 300 is transmitted to the outer wall of the fluid element 110 and the outer wall of the pipeline 120 through the heat conductive member 200 to heat the outer wall of the fluid element 110 and the outer wall of the pipeline 120, so as to ensure that the temperature of the gas in the gas transmission component is always within a predetermined temperature range. At the same time, compared with traditional heating clothes, the heating device has good temperature uniformity and precise control, and has the advantages of not serious volatile particulate matter, good adhesion, small size, light weight, few required electrical control points, and can completely wrap the connection of the gas delivery system.

[0071] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A heating device for an integrated fluid delivery system, characterized in that: The integrated fluid delivery system comprises a fluid delivery assembly (100), and the heating device comprises: A heat conducting member (200) is sleeved on the outside of the fluid conveying component (100), and the cross-sectional shape of the inner wall of the heat conducting member (200) along the fluid conveying direction is adapted to the cross-sectional shape of the outer wall of the fluid conveying component (100) along the fluid conveying direction, and is wrapped around the outer wall of the fluid conveying component (100); A temperature control part (300) is sleeved on the outside of the heat conducting part (200), the cross-sectional shape of the inner wall of the temperature control part (300) along the fluid conveying direction is adapted to the cross-sectional shape of the outer wall of the heat conducting part (200) along the fluid conveying direction, and is wrapped around the outer wall of the heat conducting part (200); In the working state, the temperature of the temperature control unit (300) is adjusted, and the temperature is transferred to the outside of the fluid transport component (100) through the heat conductor (200) to ensure the temperature of the gas in the fluid transport component (100).

2. The heating device according to claim 1, characterized in that The heat conducting member (200) is a block of high heat conducting material with a hollow center and a smooth outer wall.

3. The heating device according to claim 2, characterized in that: The cross-sectional shape of the inner wall of the heat-conducting member (200) along the fluid conveying direction is circular or polygonal.

4. The heating device according to claim 3, characterized in that: The high thermal conductivity material block is at least one of a graphite block and an aluminum block.

5. The heating device according to claim 2, characterized in that: The heat-conducting member (200) comprises a first heat-conducting sleeve (210) and a second heat-conducting sleeve (220); the fluid transport assembly (100) comprises a plurality of fluid elements (110) and a pipeline (120); the inner wall of the first heat-conducting sleeve (210) is attached to the outer wall of the fluid element (110); the second heat-conducting sleeve (220) is fixedly arranged on the side wall of the first heat-conducting sleeve (210); the second heat-conducting sleeve (220) is connected to the first heat-conducting sleeve (210); and the second heat-conducting sleeve (220) is used for passing the pipeline (120).

6. The heating device according to claim 5, characterized in that: The heat-conducting member further comprises a third heat-conducting sleeve (230), one end of the third heat-conducting sleeve (230) is connected to the first heat-conducting sleeve (210), and the other end is connected to the second heat-conducting sleeve (220); The pipeline (120) is provided with a connection structure for connecting to the fluid element (110), and the inner wall of the third heat-conducting sleeve (230) is in contact with the outer wall of the connection structure.

7. The heating device according to claim 5, characterized in that: The first heat-conducting sleeve (210) is provided with a mounting hole (600) adapted to the fluid element (110), and the fluid element (110) is passed through the mounting hole (600).

8. The heating device according to claim 1, characterized in that A plurality of heating elements (400) are arranged on the temperature control part (300), and the plurality of heating elements (400) are evenly distributed on the temperature control part (300), and the heating elements (400) are used to heat the temperature control part (300).

9. The heating device according to claim 8, characterized in that The heating device further comprises a temperature detection device (510) and an over-temperature protection device (520), wherein the over-temperature protection device (520) and the heating element (400) are arranged in series; In the working state, the temperature detection device (510) is used to detect the temperature of the fluid delivery component (100). After the temperature of the fluid delivery component (100) exceeds a predetermined temperature, the over-temperature protection device (520) is disconnected and the heating element (400) no longer performs heating.

10. The heating device according to claim 9, characterized in that The temperature detection device (510) is arranged at a variable temperature measurement point and / or a constant temperature measurement point of the fluid conveying component (100).

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