MEMS angular velocity sensor

Abstract

The invention discloses an MEMS angular velocity sensor. The MEMS angular velocity sensor comprises a first driving mass block and a second driving mass block which have the same structure, the first detection mass block and the second detection mass block are the same in structure, the first detection mass block is located in the first driving mass block and coupled with the first driving mass block, and the second detection mass block is located in the second driving mass block and coupled with the second driving mass block; the torsional pendulum mass block is coupled with the first detection mass block and the second detection mass block; the first detection mass block, the second detection mass block and the torsional pendulum mass block form a detection structure used for detecting the angular velocity in the first axis direction, and the first axis is perpendicular to the plane where the first detection mass block and the second detection mass block are located. According to the structure of the MEMS angular velocity sensor provided by the invention, the stability of the MEMS angular velocity sensor can be effectively improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a MEMS angular velocity sensor. Background Art

[0002] MEMS angular velocity sensors are widely used in consumer electronics, automotive electronics, industrial electronics, etc. In the fields of automotive electronics and industrial electronics, the stability requirements for MEMS angular velocity sensors are high, and usually a lower Q value (quality factor) is required to achieve higher stability. Summary of the invention

[0003] In view of the above problems, the purpose of the present application is to provide a MEMS angular velocity sensor with higher stability.

[0004] According to one aspect of the present invention, there is provided a MEMS angular velocity sensor, comprising:

[0005] A first driving mass block and a second driving mass block having the same structure;

[0006] A first detection mass block and a second detection mass block of identical structure, wherein the first detection mass block is located in and coupled to the first driving mass block, and the second detection mass block is located in and coupled to the second driving mass block;

[0007] a wiggling mass coupled to the first detection mass and the second detection mass;

[0008] The first detection mass block, the second detection mass block and the torsion pendulum mass block form a detection structure for detecting the angular velocity in the direction of a first axis, and the first axis is perpendicular to the plane where the first detection mass block and the second detection mass block are located.

[0009] Optionally, different numbers of damping comb teeth are arranged in the tumble mass block.

[0010] Optionally, the first detection mass block, the second detection mass block, and the yaw mass block are symmetrical as a whole about a second axis, and the second axis is perpendicular to the first axis.

[0011] Optionally, a center line of symmetry of the tumble mass coincides with the second axis.

[0012] Optionally, the damping comb teeth in the tumble mass block are symmetrical about the second axis as a whole.

[0013] Optionally, the first driving mass and the second driving mass are symmetrical about the second axis as a whole.

[0014] Optionally, the first detection mass block and the second detection mass block are symmetrical about a second axis as a whole.

[0015] Optionally, the yaw mass block comprises:

[0016] A first cavity and a second cavity, wherein the first cavity and the second cavity are symmetrical about a second axis as a whole, and the damping comb teeth are arranged in the first cavity and the second cavity.

[0017] Optionally, the detection structure further includes:

[0018] a first coupling beam coupling the wiggling mass to the first detection mass;

[0019] a second coupling beam coupling the wiggling mass to the second detection mass;

[0020] A first anchor point is located in the recessed area of ​​the tumble mass and is symmetrical about a symmetry center line of the tumble mass; and

[0021] A tumble beam couples the tumble mass to the first anchor point.

[0022] Optionally, the detection structure further includes:

[0023] A plurality of detection beams, the first detection mass is coupled to the first drive mass via corresponding detection beams, and the second detection mass is coupled to the second drive mass via corresponding detection beams.

[0024] Optionally, each of the first detection mass block and the second detection mass block comprises:

[0025] The third cavity;

[0026] A plurality of connecting beams are located in the third cavity and divide the third cavity into a plurality of spaces;

[0027] A first plate, located in the third cavity, and forming a first detection capacitor with the connecting beam;

[0028] A second plate is located in the third cavity and forms a second detection capacitor with the connecting beam.

[0029] A first plate and a second plate are provided in each space, and the first plate and the second plate in each space are arranged opposite to each other.

[0030] Optionally, it also includes:

[0031] multiple drive beams;

[0032] Two groups of anchor points, each group of anchor points includes a second anchor point and a third anchor point arranged in parallel along a third axis direction, each driving mass block is coupled to a group of anchor points via a corresponding driving beam, wherein the second anchor point and the third anchor point in each group of anchor points are respectively located on two opposite sides of the driving mass block coupled thereto, the third axis is perpendicular to the second axis, and the first axis is perpendicular to a plane formed by the third axis and the second axis.

[0033] Optionally, each of the first driving mass block and the second driving mass block includes:

[0034] fourth cavity;

[0035] The driving push-pull comb teeth are located in the fourth cavity, and two groups of driving push-pull comb teeth that are adjacent and opposite to each other form a group of push-pull driving capacitors;

[0036] The drive feedback comb teeth are located in the fourth cavity, and two groups of drive feedback comb teeth that are adjacent and opposite to each other form a group of drive feedback capacitors.

[0037] Optionally, the push-pull drive capacitors in the first drive mass, the second drive mass, the third drive mass and the fourth drive mass are symmetrical as a whole about the first axis and the second axis.

[0038] Optionally, the drive feedback capacitors in the first drive mass, the second drive mass, the third drive mass and the fourth drive mass are symmetrical as a whole about the first axis and the second axis.

[0039] Optionally, in the driving mode, each of the first driving mass block and the second driving mass block performs linear motion along the third axis direction;

[0040] The first detection mass block follows the first driving mass block to perform linear motion, and the second detection mass block follows the second driving mass block to perform linear motion;

[0041] The torsion pendulum mass block does not move due to force balance and the constraint of the first anchor point.

[0042] The movement directions of the first driving mass mass and the second driving mass mass are opposite.

[0043] Optionally, in the detection mode of the angular velocity in the direction of the first axis, the first detection mass block and the second detection mass block perform linear motion along the direction of the second axis, and the motion directions of the first detection mass block and the second detection mass block are opposite;

[0044] The first driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling between the first detection mass block, and the second driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling between the second detection mass block;

[0045] The yaw mass performs rotational motion in a plane defined by the second axis and the third axis along with the first detection mass and the second detection mass coupled thereto.

[0046] Optionally, the MEMS angular velocity sensor is symmetrical about a second axis.

[0047] Optionally, the MEMS angular velocity sensor is a single-axis angular velocity sensor, which is used to detect the angular velocity in the X-axis direction, or the angular velocity in the Y-axis direction, or the angular velocity in the Z-axis direction.

[0048] The MEMS angular velocity sensor provided by the present application includes a first driving mass block and a second driving mass block with the same structure, a first detection mass block and a second detection mass block with the same structure, and a torsion mass block. The first detection mass block is located in the first driving mass block and coupled thereto, the second detection mass block is located in the second driving mass block and coupled thereto, and the torsion mass block is coupled to the first detection mass block and the second detection mass block. This effectively improves the stability of the MEMS angular velocity sensor.

[0049] Furthermore, the MEMS angular velocity sensor provided in the present application can quantitatively reduce the Q value in the detection mode independently without affecting the Q value in the driving mode by setting different numbers of damping comb teeth in the torsion pendulum mass block, thereby effectively improving the stability of the MEMS angular velocity sensor.

[0050] Furthermore, the MEMS angular velocity sensor provided in the present application has a Q value in the driving mode that is often quantitatively and individually regulated by adjusting the air pressure, and a Q value in the detection mode that is quantitatively and individually regulated by the number of arranged damping comb teeth, thereby achieving quantitative and individual regulation of the Q value in the driving and detection modes, and improving the flexibility and controllability of the MEMS angular velocity sensor design. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] The above and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0052] Figure 1 A schematic diagram of a top view of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown;

[0053] Figure 2A motion schematic diagram of a driving mode of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown;

[0054] Figure 3 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the Z-axis direction is shown. DETAILED DESCRIPTION

[0055] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same elements are represented by the same or similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0056] The specific implementation of the present invention is further described in detail below in conjunction with the drawings and examples.

[0057] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "coupled" and the like should be understood in a broad sense; for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0058] Figure 1 A schematic diagram of the top view of the structure of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown.

[0059] The MEMS angular velocity sensor provided in the present application is a single-axis angular velocity sensor, which is used to detect the angular velocity in the X-axis direction, or the angular velocity in the Y-axis direction, or the angular velocity in the Z-axis direction.

[0060] For example, the present application is described by taking a single-axis angular velocity sensor for detecting the angular velocity in the Z-axis direction as an example. Figure 1 As shown, the MEMS angular velocity sensor includes a first driving mass block 101 , a second driving mass block 102 , a first detection mass block 401 , a second detection mass block 402 , and a yaw mass block 501 .

[0061] The first driving mass 101 and the second driving mass 102 have the same structure.

[0062] The first detection mass 401 and the second detection mass 402 have the same structure. The first detection mass 401 is located in and coupled to the first driving mass 101, and the second detection mass 402 is located in and coupled to the second driving mass 102. Exemplarily, the first detection mass 401 is located in the first opening 115 of the first driving mass 101. The second detection mass 402 is located in the first opening 125 of the second driving mass 102.

[0063] The yaw mass 501 is coupled to the first detection mass 401 and the second detection mass 402 .

[0064] The first detection mass block 401, the second detection mass block 402 and the yaw mass block 501 form a detection structure for detecting the angular velocity in the direction of a first axis (eg, the Z axis). The first axis is perpendicular to the plane (eg, the XOY plane) where the first detection mass block 401 and the second detection mass block 402 are located.

[0065] Furthermore, different numbers of damping comb teeth 502 are arranged in the yaw mass block 501 .

[0066] Further, the first detection mass block 401 , the second detection mass block 402 , and the yaw mass block 501 are symmetrical as a whole about a second axis (eg, the Y axis), and the second axis is perpendicular to the first axis.

[0067] Furthermore, the symmetry centerline of the yaw mass 501 coincides with the second axis.

[0068] Furthermore, the damping comb teeth 502 in the yaw mass block 501 are symmetrical about the second axis as a whole.

[0069] Further, the first driving mass 101 and the second driving mass 102 are symmetrical about the second axis as a whole.

[0070] Further, the first detection mass block 401 and the second detection mass block 402 are symmetrical about the second axis as a whole.

[0071] Further, the MEMS angular velocity sensor is symmetrical about the second axis.

[0072] Furthermore, the torsion mass block 501 includes a first cavity 505 and a second cavity 506 . The first cavity 505 and the second cavity 506 are symmetrical about the second axis as a whole. Damping comb teeth 502 are disposed in the first cavity 505 and the second cavity 506 .

[0073] Further, the detection structure further includes a first coupling beam 415, a second coupling beam 425, a first anchor point 503, and a wobbling beam 504. The first coupling beam 415 couples the wobbling mass block 501 with the first detection mass block 401. The second coupling beam 425 couples the wobbling mass block 501 with the second detection mass block 402. The first anchor point 503 is located in the recessed area of ​​the wobbling mass block 501 and is symmetrical about the symmetry center line of the wobbling mass block 501. The wobbling beam 504 couples the wobbling mass block 501 with the first anchor point 503.

[0074] Furthermore, the detection structure further includes a plurality of detection beams. The first detection mass block 401 is coupled to the first driving mass block 101 via corresponding detection beams 411, 412, 413, and 414, and the second detection mass block 402 is coupled to the second driving mass block 102 via corresponding detection beams 421, 422, 423, and 424.

[0075] Further, a third cavity 416 is provided in the first detection mass block 401. A plurality of connecting beams 417 are provided in the third cavity 416, dividing the third cavity 416 into a plurality of spaces. A first plate 419 and a second plate 418 are provided in each space, and the first plate 419 and the second plate 418 in each space are arranged opposite to each other. The first plate 419 and the connecting beam 417 form a first detection capacitor, and the second plate 418 and the connecting beam 417 form a second detection capacitor.

[0076] A third cavity 426 is provided in the second detection mass block 402. A plurality of connecting beams 427 are provided in the third cavity 426, dividing the third cavity 426 into a plurality of spaces. A first plate 429 and a second plate 428 are provided in each space, and the first plate 429 and the second plate 428 in each space are arranged opposite to each other. The first plate 429 and the connecting beam 427 form a first detection capacitor, and the second plate 428 and the connecting beam 427 form a second detection capacitor.

[0077] The first detection capacitor and the second detection capacitor are used to detect the angular velocity in the direction of the first axis.

[0078] Furthermore, the MEMS angular velocity sensor further includes a plurality of driving beams and two groups of anchor points. Each group of anchor points includes a second anchor point and a third anchor point arranged in parallel along a third axis (e.g., X-axis), and each driving mass block is coupled to a group of anchor points via a corresponding driving beam, wherein the second anchor point and the third anchor point in each group of anchor points are respectively located on opposite sides of the driving mass block coupled thereto, the third axis is perpendicular to the second axis, and the first axis is perpendicular to a plane formed by the third axis and the second axis.

[0079] Exemplarily, a second anchor point 111 and a third anchor point 112 arranged in parallel along the third axis are provided on both sides of the first driving mass 101, and the first driving mass 101 is coupled to the second anchor point 111 via a driving beam 113, and is coupled to the third anchor point 112 via a driving beam 114. A second anchor point 121 and a third anchor point 122 arranged in parallel along the third axis are provided on both sides of the second driving mass 102, and the second driving mass 102 is coupled to the second anchor point 121 via a driving beam 123, and is coupled to the third anchor point 122 via a driving beam 124.

[0080] Exemplarily, each driving mass includes three groups of push-pull driving capacitors and one group of driving feedback capacitors.

[0081] A fourth cavity 116 is provided inside the first driving mass block 101 , and the fourth cavity 116 contains driving push-pull comb teeth 117 and driving feedback comb teeth 118 . The driving push-pull comb teeth 117 arranged opposite to each other form a push-pull driving capacitor, and the driving feedback comb teeth 118 arranged opposite to each other form a driving feedback capacitor.

[0082] A fourth cavity 126 is provided inside the second driving mass block 102. The fourth cavity 116 contains driving push-pull comb teeth 117 and driving feedback comb teeth 118. The driving push-pull comb teeth 127 arranged opposite to each other form a push-pull driving capacitor, and the driving feedback comb teeth 128 arranged opposite to each other form a driving feedback capacitor.

[0083] Further, the push-pull drive capacitors in the first drive mass 101 and the second drive mass 102 are symmetrical about the first axis and the second axis. The drive feedback capacitors in the first drive mass 101 and the second drive mass 102 are symmetrical about the first axis and the second axis.

[0084] The push-pull drive capacitor generates a driving force under the action of the alternating voltage, and the first drive mass block 101 and the second drive mass block 102 perform driving motions with equal amplitude and opposite phases in the direction of the third axis under the action of the driving force. When the angular velocity in the direction of the first axis is input, under the action of the Coriolis force, the first detection mass block 401 and the second detection mass block 402 generate detection motions with equal amplitude and opposite phases in the direction of the second axis, and the first detection capacitor and the second detection capacitor generate differential outputs, thereby detecting the output angular velocity.

[0085] Figure 2 A motion schematic diagram of a driving mode of a MEMS angular velocity sensor provided according to an embodiment of the present application is shown.

[0086] like Figure 2As shown, under the action of electrostatic force, the first drive mass 101 and the second drive mass 102 perform linear motion in the plane (XOY plane) defined by the second axis and the third axis, specifically, perform linear motion along the direction of the third axis (for example, the X-axis direction). The motion directions of the first drive mass 101 and the second drive mass 102 are opposite. Exemplarily, the first drive mass 101 performs linear motion along the positive direction of the first axis (for example, the X-axis), and the second drive mass 102 performs linear motion along the negative direction of the X-axis. In other embodiments, the second drive mass 102 may also perform linear motion along the positive direction of the third axis (for example, the X-axis), and the first drive mass 101 performs linear motion along the negative direction of the X-axis.

[0087] The first detection mass block 401 follows the first driving mass block 101 to perform linear motion in the same direction within the plane (XOY plane) defined by the first axis and the second axis. The second detection mass block 402 follows the second driving mass block 102 to perform linear motion in the same direction within the plane (XOY plane) defined by the first axis and the second axis. Exemplarily, the second detection mass block 402 performs linear motion in the negative direction along the third axis (e.g., the X-axis), and the first detection mass block 401 performs linear motion in the positive direction of the X-axis. In other embodiments, the second detection mass block 402 performs linear motion in the positive direction along the third axis (e.g., the X-axis), and the first detection mass block 401 performs linear motion in the negative direction of the X-axis.

[0088] Since the two detection masses (the first detection mass 401 and the second detection mass 402) move with equal amplitude and opposite phases, the coupling beams 415 and 425 coupled to the wobbling mass block 501 deform in opposite phases, and the wobbling beam 504 and the wobbling mass block 501 do not move due to force balance. Therefore, in the driving mode, the damping comb teeth 502 inside the wobbling mass block 501 do not move, and no additional damping is generated, which does not affect the Q value in the driving mode.

[0089] In the driving mode, a lower Q value is achieved by driving the push-pull comb teeth and the feedback comb teeth set in the driving mass block and regulating the internal air pressure.

[0090] Figure 3 A schematic diagram of the motion mode of the MEMS angular velocity sensor provided in an embodiment of the present application when there is an angular velocity input in the Z-axis direction is shown.

[0091] like Figure 3 As shown, when there is an angular velocity input in the Z-axis direction, each of the first detection mass block 401 and the second detection mass block 402 moves linearly along the second axis direction, and the movement directions of the first detection mass block 401 and the second detection mass block 402 are opposite.

[0092] The first driving mass 101 does not move due to the constraints of the anchor points on both sides and the decoupling with the first detection mass 401 , and the second driving mass 102 does not move due to the constraints of the anchor points on both sides and the decoupling with the second detection mass 402 .

[0093] The yaw mass block 501 performs a rotational motion in a plane defined by the second axis and the third axis along with the first detection mass block 401 and the second detection mass block 402 coupled thereto.

[0094] When there is an angular velocity input in the Z-axis direction, the first detection capacitor and the second detection capacitor change. Therefore, the angular velocity in the Z-axis direction is obtained by calculating the change of the above detection capacitors.

[0095] In the detection mode, the first detection mass block 401 and the second detection mass block 402 make vertical motions with equal amplitude and opposite phases, and the wiggling mass block 501 performs in-plane torsional motion following the motions of the first detection mass block 401 and the second detection mass block 402. At this time, the gap between the damping comb teeth 502 inside the wiggling mass block 501 changes. The increase or decrease in the gap generates a larger squeeze film damping between the damping comb teeth 502, which can further increase the damping in the detection mode, thereby reducing the Q value of the detection mode and improving stability.

[0096] The present application can generate quantitative squeeze-film damping by arranging damping comb teeth 502 with different numbers or gaps, so as to quantitatively control the Q value of the MEMS angular velocity sensor in the detection mode.

[0097] It should be noted that the MEMS angular velocity sensor of the present application can regulate the Q value to maintain the Q value in the driving mode unchanged and quantitatively reduce the Q value in the detection mode under the premise that the internal air pressure remains unchanged.

[0098] Furthermore, the Q value in the driving mode is often quantitatively and individually controlled by adjusting the air pressure, and the Q value in the detection mode is quantitatively and individually controlled by the number of arranged damping comb teeth, thereby realizing quantitative and individual control of the Q value in the driving and detection modes, and improving the flexibility and controllability of the MEMS angular velocity sensor design.

[0099] According to the embodiments of the present invention as described above, these embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and changes can be made based on the above description. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can make good use of the present invention and the modified use based on the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A MEMS angular velocity sensor, wherein: include: A first driving mass block and a second driving mass block having the same structure; A first detection mass block and a second detection mass block of identical structure, wherein the first detection mass block is located in and coupled to the first driving mass block, and the second detection mass block is located in and coupled to the second driving mass block; a wiggling mass coupled to the first detection mass and the second detection mass; The first detection mass block, the second detection mass block and the torsion pendulum mass block form a detection structure for detecting the angular velocity in the direction of a first axis, and the first axis is perpendicular to the plane where the first detection mass block and the second detection mass block are located.

2. The MEMS angular velocity sensor according to claim 1, wherein: The torsion pendulum mass block is provided with different numbers of damping comb teeth.

3. The MEMS angular velocity sensor according to claim 1, wherein: The first detection mass block, the second detection mass block, and the yaw mass block are symmetrical about a second axis as a whole, and the second axis is perpendicular to the first axis.

4. The MEMS angular velocity sensor according to claim 1, wherein: The symmetry center line of the torsion pendulum mass coincides with the second axis.

5. The MEMS angular velocity sensor according to claim 2, wherein: The damping comb teeth in the torsion mass block are symmetrical about the second axis as a whole.

6. The MEMS angular velocity sensor according to claim 1, wherein: The first driving mass and the second driving mass are symmetrical about a second axis as a whole.

7. The MEMS angular velocity sensor according to claim 1, wherein: The first detection mass block and the second detection mass block are symmetrical about a second axis as a whole.

8. The MEMS angular velocity sensor according to claim 5, wherein: The wiggling mass block comprises: A first cavity and a second cavity, wherein the first cavity and the second cavity are symmetrical about a second axis as a whole, and the damping comb teeth are arranged in the first cavity and the second cavity.

9. The MEMS angular velocity sensor according to claim 1, wherein: The detection structure also includes: a first coupling beam coupling the wiggling mass to the first detection mass; a second coupling beam coupling the wiggling mass to the second detection mass; A first anchor point is located in the recessed area of ​​the tumble mass and is symmetrical about a symmetry center line of the tumble mass; and A tumble beam couples the tumble mass to the first anchor point.

10. The MEMS angular velocity sensor according to claim 1, wherein: The detection structure also includes: A plurality of detection beams, the first detection mass is coupled to the first drive mass via corresponding detection beams, and the second detection mass is coupled to the second drive mass via corresponding detection beams.

11. The MEMS angular velocity sensor according to claim 1, wherein: Each of the first detection mass block and the second detection mass block comprises: The third cavity; A plurality of connecting beams are located in the third cavity and divide the third cavity into a plurality of spaces; A first plate, located in the third cavity, and forming a first detection capacitor with the connecting beam; A second plate is located in the third cavity and forms a second detection capacitor with the connecting beam. A first plate and a second plate are provided in each space, and the first plate and the second plate in each space are arranged opposite to each other.

12. The MEMS angular velocity sensor according to claim 1, wherein: Also includes: multiple drive beams; Two groups of anchor points, each group of anchor points includes a second anchor point and a third anchor point arranged in parallel along a third axis direction, each driving mass block is coupled to a group of anchor points via a corresponding driving beam, wherein the second anchor point and the third anchor point in each group of anchor points are respectively located on two opposite sides of the driving mass block coupled thereto, the third axis is perpendicular to the second axis, and the first axis is perpendicular to a plane formed by the third axis and the second axis.

13. The MEMS angular velocity sensor according to claim 1, wherein: Each of the first driving mass block and the second driving mass block comprises: fourth cavity; The driving push-pull comb teeth are located in the fourth cavity, and two groups of driving push-pull comb teeth that are adjacent and opposite to each other form a group of push-pull driving capacitors; The drive feedback comb teeth are located in the fourth cavity, and two groups of drive feedback comb teeth that are adjacent and opposite to each other form a group of drive feedback capacitors.

14. The MEMS angular velocity sensor according to claim 13, wherein: The push-pull drive capacitors in the first drive mass, the second drive mass, the third drive mass, and the fourth drive mass are symmetrical as a whole about the first axis and the second axis.

15. The MEMS angular velocity sensor according to claim 13, wherein: The drive feedback capacitors in the first drive mass, the second drive mass, the third drive mass, and the fourth drive mass are symmetrical as a whole about the first axis and the second axis.

16. The MEMS angular velocity sensor according to claim 9, wherein: In the driving mode, each of the first driving mass block and the second driving mass block performs linear motion along the third axis direction; The first detection mass block follows the first driving mass block to perform linear motion, and the second detection mass block follows the second driving mass block to perform linear motion; The torsion pendulum mass block does not move due to force balance and the constraint of the first anchor point. The movement directions of the first driving mass mass and the second driving mass mass are opposite.

17. The MEMS angular velocity sensor according to claim 12, wherein: In the detection mode of the angular velocity in the direction of the first axis, the first detection mass block and the second detection mass block perform linear motion along the direction of the second axis, and the motion directions of the first detection mass block and the second detection mass block are opposite; The first driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling between the first detection mass block, and the second driving mass block does not move due to the constraints of the anchor points on both sides and the decoupling between the second detection mass block; The yaw mass performs rotational motion in a plane defined by the second axis and the third axis along with the first detection mass and the second detection mass coupled thereto.

18. The MEMS angular velocity sensor according to claim 1, wherein: The MEMS angular velocity sensor is symmetrical about the second axis.

19. The MEMS angular velocity sensor according to claim 1, wherein: The MEMS angular velocity sensor is a single-axis angular velocity sensor, which is used to detect the angular velocity in the X-axis direction, or the angular velocity in the Y-axis direction, or the angular velocity in the Z-axis direction.

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