Optical multiplexer, optical multiplexing member, visible light source module, and optical engine

Abstract

Provided is an optical multiplexer that can be connected to or integrated with an optical modulator using a lithium niobate film, and that can cope with high output. This optical multiplexer (100) is provided with, for each laser beam, one-input and two-output multimode interference input units (60-1), (60-2), (60-3) as optical input units for the laser beam, and is further provided with: one optical output port (22o) capable of multiplexing and emitting three laser beams; a total of six optical input-side optical waveguides (21-11), (21-12), (21-21), (21-22), (21-31), (21-32) that extend two from each of the multimode interference input units (60-1), (60-2), (60-3), and a total of six optical input-side optical waveguides (21-11), (21-12), (21-21), (21-22), (21-31), (21-32); a light output-side optical waveguide (22) extending from the light output port (22o); and an optical multiplexing unit (50) in which six optical input-side optical waveguides (21-11), (21-12), (21-21), (21-22), (21-31), (21-32) and an optical output-side optical waveguide (22) are connected.

Description

Technical Field

[0001] The invention relates to an optical combiner, an optical combiner component, a visible light source module and an optical engine.

[0002] This application claims priority based on Japanese Patent Application No. 2023-106471 filed in Japan on June 28, 2023, and the contents are cited herein. Background Art

[0003] Currently, in xR technologies such as VR (Virtual Reality) or AR (Augmented Reality), glasses-type terminals are being studied. In particular, in recent years, retinal scanning displays that allow users to visually recognize images by imaging two-dimensionally scanned light on the user's retina have attracted attention. In retinal scanning displays, generally speaking, three colors of visible light emitted from light sources such as LEDs (Light Emitting Diodes) or LDs (Laser Diodes) corresponding to the colors R (red), G (green), and B (blue) are combined on one optical axis. The combined three-color visible light is transmitted to the image display unit. The image display unit performs two-dimensional scanning on the transmitted light and makes it incident on the user's pupil. The incident light forms an image on the user's retina, and the user recognizes the image. In this case, the retina is the screen that displays the image.

[0004] For example, Patent Document 1 discloses a structure of a retinal projection type display using a Mach-Zehnder type light modulator.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent No. 6728596

[0008] Patent Document 2: Japanese Patent No. 6787397

[0009] Patent Document 3: Japanese Patent No. 6572377

[0010] Patent Document 4: Japanese Patent Application Publication No. 2012-48071

[0011] Patent Document 5: Japanese Patent Application Publication No. 2020-27170 Summary of the invention

[0012] Problems to be solved by the invention

[0013] In the retinal projection display disclosed in Patent Document 1, a plurality of optical waveguides are close to each other but are not combined at the emission portion, so the optical axis differs for each wavelength, and control of the emission light becomes complicated.

[0014] Furthermore, a visible light modulator using a lithium niobate film is disclosed in Patent Document 2. Although there is a demand for an RGB optical combiner that can be connected to or integrated with a visible light modulator using a lithium niobate film, research has not yet been conducted.

[0015] Directional couplers are generally studied for multiplexing visible light (see, for example, Patent Document 3). These are made of glass materials and have excellent stability, but when a lithium niobate substrate with a large Δn is used, the coupling length becomes long and cannot be miniaturized.

[0016] Patent Documents 4 and 5 disclose structures of RGB combiners using MMI (Multi-Mode Interferometer), but both of them use glass-based materials and do not mention structures using lithium niobate films.

[0017] The MMI type optical multiplexer uses a plurality of waveguide ports on the optical input side to input a plurality of input signals, and uses a single waveguide port on the optical output side for the output signal, and combines all the input signals to output as an output signal.

[0018] Currently, no optical combiner capable of handling high output has been studied.

[0019] An object of the present invention is to provide an optical combiner that can be connected to or integrated with an optical modulator using a lithium niobate film and can handle high output, an optical combining component including the optical combiner, a visible light source module, and an optical engine.

[0020] Technical solutions to the problem

[0021] In order to solve the above problems, the present invention provides the following technical means.

[0022] Mode 1 of the present invention is an optical combiner, wherein the optical combiner is an optical combiner that combines multiple lasers with different wavelengths, and has a multimode interference input part with one input and multiple outputs for each of the lasers as an optical input part of the laser. The optical combiner also has: an optical output port, which can combine and emit the multiple lasers; a plurality of optical input side optical waveguides extending from each multimode interference input part; an optical output side optical waveguide extending from the optical output port; and an optical combining part, which connects the plurality of optical input side optical waveguides and the optical output side optical waveguide.

[0023] A second aspect of the present invention provides the optical multiplexer according to the first aspect, comprising a plurality of the optical output ports, and a plurality of the optical output-side optical waveguides respectively connected to the plurality of optical output ports.

[0024] A third aspect of the present invention is the optical multiplexer of the second aspect, wherein the interval between the optical output ports having the largest interval among the plurality of optical output ports is 25 μm or less.

[0025] A fourth aspect of the present invention is an optical multiplexer according to any one of aspects 1 to 3, wherein the optical multiplexing section is a multi-mode interference type multiplexing section.

[0026] Mode 5 of the present invention is a photosynthetic component comprising: a substrate formed of a material different from lithium niobate; and a photosynthetic functional layer formed on the main surface of the substrate and formed of a lithium niobate film, wherein any one of Modes 1 to 4 photosynthesizer is formed in the photosynthetic functional layer.

[0027] A sixth aspect of the present invention is a visible light source module comprising: the optical combining component of the fifth aspect; and a plurality of visible light laser light sources that emit visible light lasers combined by the optical combining component.

[0028] A seventh aspect of the present invention is an optical combining member with a light modulation function, wherein a Mach-Zehnder optical modulator is provided in the optical combining function layer of the optical combining member of the fifth aspect.

[0029] Mode 8 of the present invention is a visible light source module comprising: the optical combining component with light modulation function of mode 7; and a plurality of visible light laser light sources which emit visible light lasers combined by the optical combining component with light modulation function.

[0030] A ninth aspect of the present invention is an optical engine comprising: the visible light source module of the sixth aspect; and a light scanning mirror configured to change the angle of light emitted from the visible light source module and reflect the light so as to display an image.

[0031] A tenth aspect of the present invention is an optical engine comprising: the visible light source module of the eighth aspect; and a light scanning mirror that changes the angle of light emitted from the visible light source module and reflects the light so as to display an image.

[0032] Effects of the Invention

[0033] According to the present invention, it is possible to provide an optical multiplexer that can be connected to or integrated with an optical modulator using a lithium niobate film and that can handle high output. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic plan view showing the optical multiplexer according to the first embodiment.

[0035] Figure 2 It is a schematic plan view showing an optical multiplexer according to the second embodiment.

[0036] Figure 3 It is a schematic plan view showing an optical multiplexer according to a third embodiment.

[0037] Figure 4 It is a schematic plan view showing an optical multiplexer according to a fourth embodiment.

[0038] Figure 5 yes Figure 1 The components shown are formed on the edges of the optical wave combining member of the optical wave combining function layer composed of lithium niobate. Figure 1 Schematic diagram of the cross section taken along line XX'.

[0039] Figure 6 It is a schematic plan view of a modified example of the optical combining member according to the embodiment of the present invention.

[0040] Figure 7 It is a schematic plan view of the visible light source module according to the first embodiment.

[0041] Figure 8 It is a schematic plan view of a visible light source module according to the second embodiment.

[0042] Fig. 9 This is a conceptual diagram for explaining the optical engine involved in this embodiment.

[0043] Fig.10 This is a diagram showing the relationship between the laser beam diameter and the distance Z from the laser emitting surface according to each example. DETAILED DESCRIPTION

[0044] Hereinafter, the embodiments will be described in detail with reference to the accompanying drawings as appropriate. In order to facilitate the understanding of the features, the drawings used in the following description may be enlarged to show the features as an expedient part, and the dimensional ratios of the components may be inconsistent with the actual ones. The materials, dimensions, etc. illustrated in the following description are only examples, and the present invention is not limited thereto, and the implementation can be appropriately changed within the scope of obtaining the effects of the present invention.

[0045] [Optical Combiner (First Embodiment)]

[0046] Figure 1 1 is a schematic plan view showing the optical multiplexer according to the first embodiment. L1, L2, and L3 in the figure conceptually represent three laser beams.

[0047] Figure 1The optical combiner 100 shown is an optical combiner for combining three lasers L1, L2, and L3 with different wavelengths. For each of the lasers, as an optical input section for the laser, there are a multi-mode interference type input section 60-1, 60-2, and 60-3 of a 1-input 2-output type, and further comprises: an optical output port 22o, which can combine the three lasers and emit them; a total of 6 optical input side optical waveguides 21-11, 21-12, 21-13, and 21-14. -21, 21-22, 21-31, 21-32, which extend two each from each of the multimode interference input parts 60-1, 60-2, 60-3; the optical output side optical waveguide 22, which extends from the optical output port 22o; and the optical combining part 50, which is connected with the six optical input side optical waveguides 21-11, 21-12, 21-21, 21-22, 21-31, 21-32 and the optical output side optical waveguide 22.

[0048] exist Figure 1 In the figure, the X direction is a direction perpendicular to the side surface 100A where the light input port is arranged, the Y direction is a direction perpendicular to the X direction, and the Z direction is a direction perpendicular to a plane formed by the X direction and the Y direction.

[0049] The optical combiner 100 is a structure that uses two optical waveguides for each laser to guide the optical combiner 50. That is, the laser light L1 is received by the optical input port 61-1i of the multi-mode interference (MMI) type input part 60-1, and is guided to the optical combiner 50 using two optical input side optical waveguides 21-11 and 21-12. In addition, the laser light L2 is received by the optical input port 61-2i of the multi-mode interference (MMI) type input part 60-2, and is guided to the optical combiner 50 using two optical input side optical waveguides 21-21 and 21-22. The laser light L3 is received by the optical input port 61-3i of the multi-mode interference (MMI) type input part 60-3, and is guided to the optical combiner 50 using two optical input side optical waveguides 21-31 and 21-32.

[0050] Thus, by providing a plurality of optical input side optical waveguides for guiding light to the optical multiplexing unit 50, the power density of the laser light guided by the optical waveguide is dispersed, and damage to the optical waveguide can be suppressed. This is an effective countermeasure against damage to the optical waveguide of high-output laser light (for example, laser light of 100 mW or more).

[0051] As an example, the dimensions of the light input side optical waveguide and the light output side optical waveguide may be 0.1 to 5 μm in width and 0.1 to 5 μm in height.

[0052] The optical multiplexer 100 has a structure that can cope with three situations where the input laser wavelengths are different, but is not limited to being used for three lasers with different wavelengths, and can also be used for two lasers with different wavelengths. A structure can be used in which the number of optical input ports or the number of optical input-side optical waveguides connected to the optical input ports is changed according to the number of lasers.

[0053] The input laser light having different wavelengths may be visible light, but is not limited to visible light, and may be configured to be used for visible light laser light and laser light other than visible light.

[0054] The optical combiner 100 has four side surfaces 100A, 100B, 100C, and 100D, and has a structure in which three optical input ports (optical input ports) are arranged on the first side surface 100A, and an optical output port is arranged on the third side surface 100C. However, a structure in which the optical output port is arranged on the second side surface 100B or the fourth side surface 100D can also be adopted.

[0055] The optical combining section 50 is a multi-mode interference (MMI) type combiner, but a directional coupler or a Y-shaped combiner may also be used. The optical combining section 50 is a 6-input 1-output type MMI type combiner, but is not limited to the 6-input 1-output type, and a multi-input 1-output type or a multi-input multi-output type MMI type combiner may be used.

[0056] By using the optical multiplexing unit 50 as a multi-mode interference (MMI) type multiplexer, the coupling efficiency of multiplexing can be improved.

[0057] In the optical multiplexer 100 , the MMI-type optical multiplexing unit 50 has a single-stage structure, but a two-stage or higher-stage structure may be employed.

[0058] The optical input side optical waveguide and the optical output side optical waveguide connected to the optical combining part 50 as an MMI type combiner preferably have a tapered portion whose width is wider as it approaches the input and output ports of the optical combining part 50. This is because the optical input side optical waveguide and the optical output side optical waveguide connected to the optical combining part 50 are set in a manner to propagate a laser of a single mode (0th order mode, fundamental mode), and the optical combining part 50 is set in a manner to propagate a laser of a multi-mode (0th order mode to high-order mode). Therefore, when input from the optical input side optical waveguide to the optical combining part 50, or output from the optical combining part 50 to the optical output side optical waveguide, coupling loss occurs due to the mode mismatch between the incident single mode and the multi-mode. In contrast, when a tapered portion is provided at the input and output ports, the mode mismatch between the incident single mode and the multi-mode is mitigated and the coupling loss is reduced. The wider the width of the tapered portion is, the more the mode mismatch is mitigated and the greater the effect of reducing the coupling loss is.

[0059] Figure 1 The six light input side optical waveguides 21-11, 21-12, 21-21, 21-22, 21-31, 21-32 and one light output side optical waveguide 22 shown are all structured to extend linearly in the x direction, but the structure is not limited to this and may have a curved portion.

[0060] [Optical combiner (second embodiment)]

[0061] Figure 2 1 is a schematic plan view showing an optical multiplexer according to Embodiment 2. The description of the same components as those of Embodiment 1 may be omitted.

[0062] Figure 2 The optical combiner 101 shown is an optical combiner for combining three lasers L1, L2, and L3 of different wavelengths. It has a 1-input 2-output type multi-mode interference input section 60-1, 60-2, and 60-3 as an optical input section for each laser, and also has: two optical output ports 22-1o and 22-2o capable of combining and emitting the three lasers; a total of six optical input side optical waveguides 21-11, 21-12, 21-21, 21-22, and 21- -31, 21-32, which extend two each from each multimode interference input section 60-1, 60-2, 60-3; two optical output side optical waveguides 22-1, 22-2 extending from each of the two optical output ports 22-1o, 22-2o; and an optical combining section 51 connected to six optical input side optical waveguides 21-11, 21-12, 21-21, 21-22, 21-31, 21-32 and two optical output side optical waveguides 22-1, 22-2.

[0063] The optical combiner 101 is structured as follows: not only two optical waveguides are used for each laser to guide the optical combiner 51, but also two optical output ports are provided, and the combined light is output from the optical combiner 51 through the two optical output ports using two optical waveguides. That is, the laser light L1 is received by the optical input port 61-1i of the multi-mode interference (MMI) type input part 60-1, and is guided to the optical combiner 50 using two optical input side optical waveguides 21-11 and 21-12. In addition, the laser light L2 is received by the optical input port 61-2i of the multi-mode interference (MMI) type input part 60-2, and is guided to the optical combiner 50 using two optical input side optical waveguides 21-21 and 21-22. The laser light L3 is received by the optical input port 61-3i of the multi-mode interference (MMI) type input part 60-3, and is guided to the optical combiner 51 using two optical input side optical waveguides 21-31 and 21-32. The light multiplexed by the optical multiplexing unit 51 is guided by the light output side optical waveguide 22-1 and output from the light output port 22-1o, and is guided by the light output side optical waveguide 22-2 and output from the light output port 22-2o.

[0064] In this way, by providing a plurality of optical input side optical waveguides guiding light to the optical combining unit 51 and a plurality of optical output side optical waveguides guiding light from the optical combining unit 51, the power density of the laser guided by the optical waveguide can be dispersed, thereby suppressing damage to the optical waveguide.

[0065] It is preferred that the interval do between the two optical output ports 22-1o and 22-2o is 25 μm or less. This is to ensure that when the optical combiner 100 is applied to retinal projection type XR glasses, it appears as a single beam and a clear image can be seen. Figure 1 As shown, this is the distance between the center of the optical output port 22 - 1o and the center of the optical output port 22 - 2o.

[0066] It is preferred that the interval do between the two optical output ports 22-1o and 22-2o is 25 μm or less. This is to ensure that when the optical combiner 100 is applied to retinal projection type XR glasses, it appears as a single beam and a clear image can be seen. Figure 2 As shown, this is the distance between the center of the optical output port 22 - 1o and the center of the optical output port 22 - 2o.

[0067] [Optical combiner (third embodiment)]

[0068] Figure 3 1 is a schematic plan view showing an optical multiplexer according to Embodiment 3. The description of the same components as those in the above-mentioned embodiments may be omitted.

[0069] Figure 3 The optical combiner 102 shown is an optical combiner for combining three laser beams L1, L2, and L3 with different wavelengths, and has a 1-input 3-output multi-mode interference input unit 60-11, 60-12, and 60-13 as an optical input unit for the lasers, and also has: three optical output ports 22-11o, 22-12o, and 22-13o, which can combine and emit the three laser beams; a total of 9 optical input side optical waveguides 21-111, 21-112, 21-113, 21-121, 21-122, 21-123, 21-131, 21-132, and 21-133, which are connected to the optical input side. Each of the multimode interference type input parts 60-11, 60-12, 60-13 has three extensions; three optical output side waveguides 22-11, 22-12, 22-13 extend from the three optical output ports 22-11o, 22-12o, 22-13 respectively; and an optical combining part 52 connected with nine optical input side waveguides 21-111, 21-112, 21-113, 21-121, 21-122, 21-123, 21-131, 21-132, 21-133 and three optical output side waveguides 22-11, 22-12, 22-13.

[0070] The optical combiner 102 is a structure that uses three optical waveguides for each laser to guide the optical combiner 52. That is, the laser light L1 is received by the optical input port 61-11i of the multi-mode interference (MMI) type input part 60-11, and is guided to the optical combiner 52 using three optical input side optical waveguides 21-111, 21-112, and 21-113. In addition, the laser light L2 is received by the optical input port 61-12i of the multi-mode interference (MMI) type input part 60-12, and is guided to the optical combiner 52 using three optical input side optical waveguides 21-121, 21-122, and 21-123. The laser light L3 is received by the optical input port 61-13i of the multi-mode interference (MMI) type input part 60-13, and is guided to the optical combiner 52 using three optical input side optical waveguides 21-131, 21-132, and 21-133.

[0071] In addition, the optical combiner 102 is provided with three optical output ports, and is configured to output the combined light from the three optical output ports using three optical waveguides from the optical combiner 52. That is, the light combined by the optical combiner 52 is guided by the optical output side optical waveguide 22-11 and output from the optical output port 22-11o, guided by the optical output side optical waveguide 22-12 and output from the optical output port 22-12o, and guided by the optical output side optical waveguide 22-13 and output from the optical output port 22-13o.

[0072] In this way, by providing a plurality of light input side optical waveguides guiding light to the optical combining unit 52 and a plurality of light output side optical waveguides guiding light from the optical combining unit 52, the power density of the laser light guided by the optical waveguide can be dispersed, thereby suppressing damage to the optical waveguide.

[0073] Preferably, the interval do between the two optical output ports 22-11o, 22-12o at the two ends of the three optical output ports 22-11o, 22-12o is 25 μm or less. Preferably, the interval do1 between the two adjacent optical output ports 22-11o, 22-13o and the interval do1 between the two optical output ports 22-12o, 22-13o are 10 μm or less.

[0074] When the optical combiner 100 is applied to retinal projection type XR glasses, it appears as a single beam, and a clear image can be seen.

[0075] The optical multiplexing unit 52 is a 9-input 3-output MMI type multiplexer.

[0076] [Optical combiner (fourth embodiment)]

[0077] Figure 4 1 is a schematic plan view showing an optical multiplexer according to Embodiment 4. Description of the same components as those in the above-mentioned embodiments may be omitted.

[0078] The optical multiplexer of the fourth embodiment is Figure 3 In the optical multiplexer of the fourth embodiment shown, the optical multiplexing section 52 which is a 9-input 3-output MMI type multiplexer is replaced with an optical multiplexing section 53 which is a 9-input 2-output MMI type multiplexer.

[0079] Figure 4 The optical combiner 103 shown is an optical combiner for combining three lasers L1, L2, and L3 of different wavelengths, and has: three optical output ports 22-11o and 22-12o, each of which has one input-three-output multimode interference input part 60-11, 60-12, and 60-13 as an optical input part of each laser, and can combine and emit three lasers; a total of nine optical input-side optical waveguides 21-111, 21-112, 21-113, 21-121, 21-122, 21-123, 21-131, and 21-132 , 21-133, which extend three each from each of the multimode interference type input parts 60-11, 60-12, 60-13; two optical output side optical waveguides 22-11, 22-12, which extend from each of the two optical output ports 22-11o, 22-12o; and an optical combining part 52, which is connected with nine optical input side optical waveguides 21-111, 21-112, 21-113, 21-121, 21-122, 21-123, 21-131, 21-132, 21-133 and two optical output side optical waveguides 22-11, 22-12.

[0080] The optical combiner 103 is a structure that uses three optical waveguides for each laser to guide the optical combiner 53. That is, the laser light L1 is received by the optical input port 61-11i of the multi-mode interference (MMI) type input part 60-11, and is guided to the optical combiner 52 using three optical input side optical waveguides 21-111, 21-112, and 21-113. In addition, the laser light L2 is received by the optical input port 61-12i of the multi-mode interference (MMI) type input part 60-12, and is guided to the optical combiner 52 using three optical input side optical waveguides 21-121, 21-122, and 21-123. The laser light L3 is received by the optical input port 61-13i of the multi-mode interference (MMI) type input part 60-13, and is guided to the optical combiner 52 using three optical input side optical waveguides 21-131, 21-132, and 21-133.

[0081] In addition, the optical combiner 103 has two optical output ports, and is configured to output the combined light from three optical output ports using two optical waveguides from the optical combiner 53. That is, the light combined by the optical combiner 52 is guided by the optical output side optical waveguide 22-11 and output from the optical output port 22-11o, and is guided by the optical output side optical waveguide 22-12 and output from the optical output port 22-12o.

[0082] In this way, by providing a plurality of light input side optical waveguides guiding light to the optical combining unit 52 and a plurality of light output side optical waveguides guiding light from the optical combining unit 52, the power density of the laser light guided by the optical waveguide can be dispersed, thereby suppressing damage to the optical waveguide.

[0083] The interval do between the two optical output ports 22 - 11o and 22 - 12o is preferably 25 μm or less.

[0084] This is because, when the optical combiner 100 is applied to retinal projection type XR glasses, it appears as a single beam and a clear image.

[0085] 〔Photosynthesis component〕

[0086] The optical combining component involved in the embodiment of the present invention has a substrate composed of a material different from lithium niobate, and an optical combining function layer formed on the main surface of the substrate and composed of a lithium niobate film, and the optical combiner involved in the above embodiment is formed in the optical combining function layer. For the components described below, the components having the same functions as in the above embodiment are sometimes marked with the same reference numerals and their descriptions are omitted. Figure 5 In the optical wave combining component 200 shown in FIG. Figure 1 The case where the optical combiner 100 shown is formed on the optical combining function layer is described as an example.

[0087] Figure 5 yes Figure 1 The optical combiner 100 shown in the figure has an optical combiner member 200 formed on the optical combiner function layer made of lithium niobate along the YZ plane ( Figure 1 Schematic diagram of the cross section taken at XX').

[0088] Figure 5 The optical combining component 200 shown comprises a substrate 10 formed of a material different from lithium niobate, and an optical combining functional layer 20 formed on the main surface of the substrate 10 and formed of lithium niobate, wherein the multi-mode interference input portion, the optical output port, the optical combining portion, the optical input side optical waveguide and the output side optical waveguide are formed in the optical combining functional layer 20.

[0089] In the optical combining component 200, when the refractive index difference between the waveguide core film and the waveguide cladding film is Δn, if the waveguide core film is lithium niobate, Δn can be designed to be a value larger than that of materials such as glass, and the curvature radius of the optical waveguide can be reduced. Furthermore, by using a multi-mode interference optical combining part, the increase in coupling length can be prevented compared to the case of using a directional coupler, thereby achieving both increased design freedom and miniaturization.

[0090] The optical combining functional layer 20 includes a waveguide core film 24 composed of a lithium niobate film on which the optical input port, the optical output port, the optical combining section, the optical input side optical waveguide, and the output side optical waveguide are formed, and a waveguide cladding (buffer) film 25 formed on the waveguide core film 24 so as to cover them. Hereinafter, the reference numeral 24 may also be used for the lithium niobate film.

[0091] Examples of the substrate 10 include a sapphire substrate, a Si substrate, and a thermally oxidized silicon substrate.

[0092] Since the photosynthetic wave function layer 20 is composed of a lithium niobate (LiNbO3) film, there is no particular limitation as long as the refractive index is lower than that of the lithium niobate film. As a substrate that can form a single-crystal lithium niobate film as an epitaxial film, a sapphire single-crystal substrate or a silicon single-crystal substrate is preferred. Although the crystal orientation of the single-crystal substrate is not particularly limited, for example, since the c-axis oriented lithium niobate film has a three-fold symmetry, the underlying single-crystal substrate is also expected to have the same symmetry. In the case of a sapphire single-crystal substrate, a c-plane substrate is preferred, and in the case of a silicon single-crystal substrate, a (111)-plane substrate is preferred.

[0093] The lithium niobate film is, for example, a c-axis oriented lithium niobate film. The lithium niobate film is, for example, an epitaxial film grown epitaxially on the substrate 10. An epitaxial film refers to a single crystal film whose crystal orientation is uniformly aligned using a substrate as a base. An epitaxial film is a film having a single crystal orientation in the z direction and in the xy plane direction, and is a film in which the crystal is uniformly oriented in the x-axis, y-axis, and z-axis directions. Whether the film formed on the substrate 10 is an epitaxial film can be proved, for example, by confirming the peak intensity and pole at the orientation position of 2θ-θ X-ray diffraction.

[0094] Specifically, when measuring by 2θ-θ X-ray diffraction, all peak intensities other than the target surface are less than 10% of the maximum peak intensity of the target surface, preferably less than 5%. For example, when the lithium niobate film is a c-axis oriented epitaxial film, the peak intensity other than the (00L) surface is less than 10% of the maximum peak intensity of the (00L) surface, preferably less than 5%. Here, (00L) is a general term for equivalent surfaces such as (001) and (002).

[0095] In addition, under the conditions for confirming the peak intensity at the above-mentioned orientation position, only the orientation in one direction is indicated. Therefore, even if the above-mentioned conditions are obtained, when the crystal orientation in the plane is inconsistent, the intensity of the X-ray at a specific angle position is not high, and the poles are not visible. For example, in the case where the lithium niobate film is a lithium niobate film, since LiNbO3 is a trigonal crystal structure, the poles of LiNbO3 (014) in the single crystal become three. In the case of lithium niobate, it is known that epitaxial growth is carried out in a state of so-called twin crystals in which the crystals are symmetrically combined after rotating 180° around the c-axis. In this case, the three poles become symmetrically combined in pairs, so the poles become six. In addition, in the case where a lithium niobate film is formed on a silicon single crystal substrate of the (100) plane, the substrate becomes four-fold symmetric, so 4x3=12 poles are observed. In addition, in the present application, a lithium niobate film epitaxially grown in a twin crystal state is also included in the epitaxial film.

[0096] The composition of lithium niobate is Li x Nb y O z . A is an element other than Li, Nb, and O. x is greater than or equal to 0.5 and less than or equal to 1.2, preferably greater than or equal to 0.9 and less than or equal to 1.05. y is greater than or equal to 0 and less than or equal to 0.5. z is greater than or equal to 1.5 and less than or equal to 4.0, preferably greater than or equal to 2.5 and less than or equal to 3.5. Elements of A are, for example, K, Na, Rb, Cs, Be, Mg, Ca, Sr, Ba, Ti, Zr, Hf, V, Cr, Mo, W, Fe, Co, Ni, Zn, Sc, and Ce, and combinations of two or more of these elements are also possible.

[0097] Furthermore, the lithium niobate film may be a lithium niobate single crystal thin film bonded to a substrate.

[0098] The thickness of the lithium niobate film is, for example, 2 μm or less. The thickness of the lithium niobate film is the thickness of the portion other than the ridge. The thickness of the lithium niobate film may be optimally designed according to the wavelength used, the shape of the ridge, and the like.

[0099] The waveguide is a ridge protruding from the first surface 24A of the lithium niobate film 24. The first surface 24A is the upper surface of the portion (slab layer) of the lithium niobate film 24 other than the ridge.

[0100] like Figure 5As shown in FIG. 1 , the cross-sectional shape of the light input side optical waveguides 21-11, 21-12, 21-21, 21-22, 21-31, and 21-32 is a rectangular cross-sectional shape, but any shape that can guide light may be used, such as a trapezoid, a triangle, a semicircle, etc. The width Wa of the three ridges in the y direction is preferably 0.2 μm or more and 5.0 μm or less, and the height of the three ridges (the protruding height Ha from the first surface 24A) is preferably 0.1 μm or more and 1.0 μm or less, for example. The same is true for the other optical waveguides.

[0101] By making the other optical waveguides 21-11, 21-12, 21-21, 21-22, 21-31, 21-32 on the light input side Figure 1 The size of the optical waveguide shown is about the wavelength of the laser light, and can propagate in a single mode.

[0102] Figure 6 It is a schematic plan view of a modified example of the optical combining member according to the embodiment of the present invention.

[0103] Figure 6 The optical combining member 300 shown in the figure includes a substrate 10 made of a material different from lithium niobate (see Figure 5 ) and an optical combining functional layer 20 formed on the main surface of the substrate 10 and composed of a lithium niobate film, is an optical combining component with an optical modulation function in which the optical combiner of the above-mentioned embodiment and the Mach-Zehnder type optical modulator are formed.

[0104] Figure 6 The optical multiplexing component 300 with light modulation function shown in the figure is an example of an optical multiplexing device having the above-mentioned embodiment. Figure 1 The situation of the optical combiner 100 is shown.

[0105] The optical combining member 300 with a light modulation function includes an optical combiner 100 and a Mach-Zehnder optical modulator 40 in an optical combining function layer 20 .

[0106] The Mach-Zehnder optical modulator 40 includes six Mach-Zehnder optical waveguides 40 - 1 , 40 - 2 , 40 - 3 , 40 - 4 , 40 - 5 , and 40 - 6 .

[0107] The Mach-Zehnder optical waveguide 40-1 is provided between the optical waveguide 21-11 on the light input side and the optical combining section 50. The Mach-Zehnder optical waveguide 40-2 is provided between the optical waveguide 21-12 on the light input side and the optical combining section 50. The Mach-Zehnder optical waveguide 40-3 is provided between the optical waveguide 21-21 on the light input side and the optical combining section 50. The Mach-Zehnder optical waveguide 40-2 is provided between the optical waveguide 21-22 on the light input side and the optical combining section 50. The Mach-Zehnder optical waveguide 40-5 is provided between the optical waveguide 21-31 on the light input side and the optical combining section 50. The Mach-Zehnder optical waveguide 40-6 is provided between the optical waveguide 21-32 on the light input side and the optical combining section 50.

[0108] As the Mach-Zehnder optical modulator 40, a known Mach-Zehnder optical modulator or optical waveguide can be used to split (demultiplex) a light beam with the same wavelength and phase into two pairs of light beams, and then combine (combine) them with different phases. Depending on the phase difference, the intensity of the combined light beam is different.

[0109] Figure 6 The Mach-Zehnder optical waveguides 40 (40-1, 40-2, 40-3, 40-4, 40-5, 40-6) shown in the figure each include an optical waveguide 41, an optical waveguide 42, an input path 43, an output path 44, a branching portion 45, and a coupling portion 46. In the figure, only the reference numerals of the components are shown for the Mach-Zehnder optical waveguide 40-1.

[0110] The output paths 44 of the Mach-Zehnder optical waveguides 40 - 1 , 40 - 2 , 40 - 3 , 40 - 4 , 40 - 5 , and 40 - 6 are optically connected to the optical combining unit 50 .

[0111] Figure 6 The first optical waveguide 41 and the second optical waveguide 42 shown in the figure are structured to extend linearly in the x direction except in the vicinity of the branching portion 45 and the vicinity of the coupling portion 46 , but are not limited to such a structure. Figure 6 The first optical waveguide 41 and the second optical waveguide 42 shown have substantially the same length. The branch portion 45 is located between the input path 43 and the first optical waveguide 41 and the second optical waveguide 42. The input path 43 is connected to the first optical waveguide 41 and the second optical waveguide 42 via the branch portion 45. The coupling portion 46 is located between the first optical waveguide 41 and the second optical waveguide 42 and the output path 44. The first optical waveguide 41 and the second optical waveguide 42 are connected to the output path 44 via the coupling portion 46.

[0112] Electrodes 29 and 26 are electrodes for applying modulation voltage to each Mach-Zehnder type optical waveguide 40-1, 40-2, 40-3, 40-4, 40-5, and 40-6 (hereinafter, sometimes referred to as "each Mach-Zehnder type optical waveguide 40"). Electrode 29 is an example of a first electrode, and electrode 26 is an example of a second electrode. One end of electrode 29 is connected to a power supply 131, and the other end is connected to a terminal resistor 132. One end of electrode 26 is connected to a power supply 131, and the other end is connected to a terminal resistor 132. The power supply 131 is a part of a driving circuit for applying modulation voltage to each Mach-Zehnder type optical waveguide 40. In order to simplify the illustration, electrodes 29 and 26 are depicted only in the portion of Mach-Zehnder type optical waveguide 40-6.

[0113] The electrodes 27 and 28 are electrodes for applying a DC bias voltage to each Mach-Zehnder optical waveguide 40. One end of the electrode 27 and one end of the electrode 28 are connected to a power supply 133. The power supply 133 is a part of a DC bias application circuit for applying a DC bias voltage to each Mach-Zehnder optical waveguide 40.

[0114] When a DC bias voltage is superimposed on the electrodes 29 and 26, the electrodes 27 and 28 may not be provided. In addition, a ground electrode may be provided around the electrodes 29, 26, 27, and 28.

[0115] [Visible light source module (first embodiment)]

[0116] The visible light source module according to the first embodiment includes the optical combining member according to the above-mentioned embodiment and a plurality of visible light laser light sources that emit visible light combined by the optical combining member.

[0117] Figure 7 is a schematic plan view of a visible light source module according to this embodiment. Figure 7 Indicates that Figure 5 The optical combining member 200 shown is an example of a visible light source module.

[0118] Figure 7 The visible light source module 1000 shown includes an optical combining member 200 having an optical combining section 50, and three visible light laser light sources 30 (30-1, 30-2, 30-3) that emit visible light combined by the optical combining member 200. The optical combining member 200 includes a substrate 10 made of a material different from lithium niobate (see Figure 5 ) and a light combining functional layer 20 formed on the main surface of the substrate 10 and composed of lithium niobate (refer to Figure 5 ) and has a side surface 200A as a light incident surface.

[0119] for Figure 7In the illustrated components, components having the same functions as those described above are denoted by the same reference numerals and their description may be omitted.

[0120] As the visible light laser light source 30, various laser elements can be used. For example, commercially available laser diodes (LDs) of red light, green light, blue light, etc. can be used. Red light can use light with a peak wavelength of 600 nm to 750 nm, green light can use light with a peak wavelength of 500 nm to 600 nm, and blue light can use light with a peak wavelength of 380 nm to 500 nm.

[0121] In the visible light source module 1000, for example, the visible light laser light sources 30-1, 30-2, and 30-3 are LDs that emit red light, green light, and blue light, respectively. LDs 30-1, 30-2, and 30-3 are arranged on the upper surface of the subcarrier 120 with a gap between them in a direction substantially orthogonal to the emission direction of the light emitted from each LD.

[0122] In the visible light source module 1000, the number of visible light laser light sources is 3, but if there are multiple visible light laser light sources, it is not limited to 3, and it can be 2 or 4 or more. The multiple visible light laser light sources can be light sources with different wavelengths of light emitted, or can be visible light laser light sources with the same wavelength of light emitted. In addition, the emitted light can use light other than red (R), green (G), and blue (B). The order of mounting red (R), green (G), and blue (B) described using the drawings does not necessarily have to be this order and can be appropriately changed.

[0123] The LD 30 can be mounted on the subcarrier 120 in a bare chip. The subcarrier 120 is made of, for example, aluminum nitride (AlN), aluminum oxide (Al2O3), silicon (Si), or the like.

[0124] The subcarrier 120 can be directly bonded to the substrate 10 via a metal bonding layer. According to this structure, spatial coupling and fiber coupling are not performed, so that further miniaturization can be achieved.

[0125] By adopting a structure in which the subcarrier 120 and the substrate 10 are bonded by a metal bonding layer, the relative position of the subcarrier 120 and the substrate 10 can be adjusted during manufacturing so that the optical axis of each visible light laser coincides with the respective axes of the multi-mode interference type input unit 60-1, the multi-mode interference type input unit 60-2, and the multi-mode interference type input unit 60-3, thereby aligning the optical axis position of the laser (active alignment).

[0126] In the visible light source module 1000, the light input port (light input port) 61-1i of the multimode interference type input unit 60-1, the light input port (light input port) 61-2i of the multimode interference type input unit 60-2, and the light input port (light input port) 61-3i of the multimode interference (MMI) type input unit 60-3 are opposite to the exit ports of each LD30 (30-1, 30-2, 30-3), and the light emitted from the exit surface of each LD30 is positioned so as to be incident on the light input ports 61-1i, 61-2i, and 61-3i. With such a structure and arrangement, the red light, green light, and blue light emitted from the LD30-1, LD30-2, and LD30-3 can be incident on the three multimode interference type input units 60-1, 60-2, and 60-3 of the optical combiner 50.

[0127] In the visible light source module 1000, the light exit surface 31 of the LD30 and the light incident surface 200A of the optical combining component 200 are arranged at a prescribed interval. The light incident surface 200A is opposite to the light exit surface 31, and a gap S is provided between the light exit surface 31 and the light incident surface 200A in the x direction. Since the visible light source module 1000 is exposed to the air, the gap S is filled with air. Since the gap S is filled with the same gas (air), it is easy for the various colors of light emitted from the LD30 to be incident on the incident path in a state that satisfies the prescribed coupling efficiency. When the visible light source module 1000 is used for AR glasses or VR glasses, the size of the gap (interval) S in the x direction is, for example, greater than 0 μm and less than 5 μm, taking into account the amount of light required by the AR glasses or VR glasses.

[0128] [Visible light source module (second embodiment)]

[0129] Figure 8 It is a schematic plan view of a visible light source module according to the second embodiment.

[0130] Figure 8 The visible light source module 2000 shown has Figure 6 The optical combining component 300 with light modulation function shown in the figure and a plurality of visible light laser light sources 30 (30-1, 30-2, 30-3) emitting visible light combined by the optical combining component 300 with light modulation function. The optical combining component 300 has a substrate 10 made of a material different from lithium niobate (see Figure 5 ), and a light combining functional layer 20 formed on the main surface of the substrate 10 and composed of lithium niobate (refer to Figure 5 ), having side 300A.

[0131] for Figure 8 In the illustrated components, components having the same functions as those described above are denoted by the same reference numerals and their description may be omitted.

[0132] The visible light source module 2000 has the number of visible light laser light sources 30-1, 30-2, 30-3 and six Mach-Zehnder type optical waveguides 40-1, 40-2, 40-3, 40-4, 40-5, 40-6. The visible light laser light sources 30-1, 30-2, 30-3 and the optical input port 61-1i of the multi-mode interference type input unit 60-1, the optical input port 61-2i of the multi-mode interference type input unit 60-2, and the optical input port 61-3i of the multi-mode interference (MMI) type input unit 60-3 (see Figure 6 ) is positioned in such a way that light emitted from a visible light laser light source is incident on a corresponding Mach-Zehnder type optical waveguide.

[0133] A structure can be adopted in which the subcarrier 120 equipped with the visible light laser light sources 30-1, 30-2, and 30-3 is directly bonded to the substrate 10 formed with the optical combining function layer 20 of the optical combining member 300 having the optical modulation function through a metal bonding layer. With this structure, spatial coupling and optical fiber coupling are not performed, thereby achieving further miniaturization.

[0134] Furthermore, during manufacturing, the relative position of the subcarrier 120 and the substrate 10 can be adjusted to align the optical axis position of the laser light (active alignment).

[0135] The size of the optical wave combining functional layer 20 is, for example, 100 mm. 2 If the size of the light combining functional layer 20 is 100 mm 2 The following are suitable for xR glasses such as AR glasses and VR glasses.

[0136] The photosynthesis functional layer 20 can be manufactured by a known method, for example, by using a semiconductor process such as epitaxial growth, photolithography, etching, vapor phase growth, and metallization.

[0137] When the visible light source module involved in the present invention is used for xR glasses such as AR glasses and VR glasses, the width of the first multi-mode interference type optical combining part and the second multi-mode interference type optical combining part constituting the optical combiner is preferably about 1 to 1000 μm, and the length is preferably about 10 to 10000 μm, for example.

[0138] For example, in a retinal projection display, in order to display an image in a desired color, it is necessary to independently modulate the respective intensities of the RGB3 colors representing visible light at high speed. When the modulation is performed only with a visible light laser light source (current modulation), the load of the IC controlling these modulations will increase, but the modulation (voltage modulation) using the Mach-Zehnder optical modulator 40 (optical wave combining component 300 with optical modulation function) can also be used in combination. In this case, coarse adjustment can also be performed with current (visible light laser light source) and fine adjustment can be performed with voltage (Mach-Zehnder optical modulator 40). In addition, coarse adjustment can also be performed with voltage (Mach-Zehnder optical modulator 40) and fine adjustment can be performed with current (visible light laser light source). Because the responsiveness is better when the voltage is fine-tuned, the former is preferably used when responsiveness is emphasized, and because the fine-tuning with current can be completed with a low current, the power consumption will be suppressed, so the latter is preferably used when the power consumption is suppressed.

[0139] 〔Optical Engine〕

[0140] In this specification, an optical engine is a device comprising: an optical system including a plurality of light sources and a combining unit for combining a plurality of light emitted from the plurality of light sources into a single light; a light scanning mirror for changing the angle of light emitted from the optical system and reflecting it in such a manner as to display an image; and a control element for controlling the light scanning mirror.

[0141] Fig. 9 A conceptual diagram for explaining an optical engine 5001 according to the present embodiment is shown. The diagram shows a state where the optical engine 5001 is mounted on a frame 10010 of glasses 10000. Reference numeral L represents image display light.

[0142] The optical engine 5001 includes a visible light source module 1001 and a light scanning mirror 3001. As the visible light source module 1001 included in the optical engine 5001, the visible light source module according to the above-mentioned embodiment is used.

[0143] The laser irradiated from the visible light source module 1001 installed in the eyeglass frame is reflected by the light scanning mirror, scanned and enters the human eye, and a direct image (video) is projected on the retina.

[0144] The light scanning mirror 3001 is, for example, a MEMS mirror. In order to project a 2D image, it is preferably a two-axis MEMS mirror that swings so as to reflect laser light at a changing angle in the horizontal direction (X direction) and the vertical direction (Y direction).

[0145] The optical engine 5001 is an optical system that performs optical processing on the laser light emitted from the visible light source module 1001 and includes a collimating lens 2001a, a slit 2001b, and an ND filter 2001c. This optical system is only an example, and other structures are also possible.

[0146] The optical engine 5001 has a laser driver 1100, a light scanning mirror driver 1200, and a video controller 1300 that controls these drivers.

[0147] [Example]

[0148] Hereinafter, the present invention will be described in further detail using examples. However, the present invention is not limited to the following examples at all.

[0149] Example 1 is to use Figure 2 An example of a light-combining component having a structure shown.

[0150] Embodiments 2, 4 to 5 use Figure 4 An example of a light-combining component having a structure shown.

[0151] Embodiment 3 is provided with Figure 3 The structure of the optical wave combining component is shown.

[0152] Example 6 uses a Figure 1 The structure of the optical wave combining component is shown.

[0153] Comparative Example 1 used Figure 1 In the structure shown, the optical combining section 50 is replaced with an optical combining member of a three-input single-output MMI type optical combiner.

[0154] In Table 1, the shape of the input port indicates whether it is an MMI type input part. The coupling efficiency with the laser is the result of a simulation investigation. The simulation software used is Fimmwave (full vector 3D pattern solver) (Photon Design). The coupling efficiency with the laser indicates the proportion of the laser power that propagates to the optical waveguide side of the optical input side. The spacing of the output ports is Figure 2 to Figure 4 The distance in the figure corresponds to the distance indicated by the reference symbol do. The degradation of the optical waveguide is determined by the shape of the laser beam output from the optical output port. When the shape of the laser beam input to the optical input side optical waveguide and the shape of the laser beam output from the optical output port are in a similar relationship, it is considered that there is no degradation, and when the shape changes without a similar relationship, it is considered that there is degradation.

[0155] [Table 1]

[0156]

[0157] Fig.10It is used to illustrate the relationship between the laser beam diameter and the distance Z (equivalent to the distance Z) from the laser emission surface corresponding to each embodiment in the case of a Gaussian beam. Fig. 9 and Fig.10 A diagram showing the relationship between the gap S).

[0158] The laser beam diameter is defined by the following formula (2).

[0159]

[0160] In equations (1) and (2), ω0 is the beam width (the value at which the beam diameter becomes the minimum after diffraction), and Z is the distance from the laser source (equivalent to Figure 7 and Figure 8 Gap S) (Refer to Fig.10 ). λ is the wavelength of the laser.

[0161] Table 2 shows the laser beam diameters [μm] of the RGB lasers when the beam width ω0 is 0.2 μm and the distance Z from the laser emission surface is 1 μm, 2.5 μm, and 4 μm, respectively. Z=1 μm corresponds to Comparative Example 1, Z=2.5 μm corresponds to Example 1 and Example 6, and Z=4 μm corresponds to Examples 2 to 5.

[0162] [Table 2]

[0163]

[0164] Embodiments 1, 4 to 6 are structures that use two optical input side optical waveguides to guide each laser incident from each laser light source to the optical combiner to the optical combiner. Therefore, compared with the comparative example that uses one optical input side optical waveguide to guide each laser incident from each laser light source to the optical combiner to the optical combiner, Embodiments 1, 4 to 6 disperse the power density of the laser to the two optical input side optical waveguides under the same coupling efficiency as the laser, so it is possible to suppress the degradation of the optical input side optical waveguide compared with the comparative example. Therefore, Embodiments 1, 4 to 6 are also suitable for use as an optical combiner for high-output lasers.

[0165] In addition, Examples 2 and 3 are structures that use three optical input side optical waveguides to guide each laser incident from each laser light source to the optical combiner to the optical combiner. Therefore, compared with the comparative example that uses one optical input side optical waveguide to guide each laser incident from each laser light source to the optical combiner to the optical combiner, Examples 2 and 3 disperse the power density of the laser to the three optical input side optical waveguides under the same coupling efficiency as the laser, so it is possible to suppress the degradation of the optical input side optical waveguide compared with the comparative example. Therefore, Examples 2 and 3 are also suitable for use as an optical combiner for high-output lasers.

[0166] In addition, Examples 1, 2, 4, and 5 are structures that have two optical output ports and use two optical output side optical waveguides to output light from the optical combiner to each optical output port. Therefore, compared with the comparative example in which there is one optical output port and one optical output side optical waveguide is used to guide the optical waveguide to the optical output port, Examples 1, 2, 4, and 5 disperse the power density of the laser to two optical output side optical waveguides to output light, so it is possible to suppress the degradation of the optical input side optical waveguide compared with the comparative example. Therefore, Examples 2 and 3 are also suitable for use as an optical combiner for high-output lasers.

[0167] In addition, the third embodiment has three optical output ports, and is structured to guide the light from the optical combiner to each optical output port through three optical output side optical waveguides for light output. Therefore, there is only one optical output port, and compared with the comparative example in which the light is guided to the optical output port by one optical output side optical waveguide, the third embodiment disperses the power density of the laser to the three optical output side optical waveguides for light output, so that the degradation of the optical input side optical waveguide can be suppressed compared with the comparative example. Therefore, the third embodiment is also suitable for use as an optical combiner for high-output laser.

[0168] Description of Reference Numerals

[0169] 10 substrate

[0170] 20 Photosynthesis functional layer

[0171] 30 Visible light laser source

[0172] 40 Mach-Zehnder optical modulator

[0173] 50, 51, 52 Photosynthesis Unit

[0174] 60-1, 60-2, 60-3 Multimode interference input unit

[0175] 100, 101, 102 optical combiner

[0176] 200, 300 Photosynthetic wave components

[0177] 1000, 2000 Visible light source module

Claims

1. A light combiner, wherein: The optical combiner is an optical combiner that combines a plurality of laser beams with different wavelengths. For each of the laser beams, a multi-mode interference input unit having one input and multiple outputs is provided as a light input unit for the laser beam. The optical combiner further comprises: An optical output port capable of combining and emitting the plurality of laser beams; a plurality of light input-side optical waveguides extending from each multimode interference type input portion; a light output-side optical waveguide extending from the light output port; and The optical combining section connects the plurality of light input side optical waveguides and the light output side optical waveguides.

2. The optical combiner according to claim 1, wherein: The optical output port is provided in plurality, and the optical output side optical waveguide is provided in plurality, which is respectively connected to the optical output ports.

3. The optical combiner according to claim 2, wherein: The interval between the light output ports with the largest interval among the plurality of light output ports is 25 μm or less.

4. The optical combiner according to claim 1, wherein: The optical combining section is a multi-mode interference type combining section.

5. A light-combining wave component, wherein: have: a substrate composed of a material different from the lithium niobate; and a light-combining functional layer formed on the main surface of the substrate and composed of a lithium niobate film, The optical combiner according to any one of claims 1 to 4 is formed in the optical combiner functional layer.

6. A visible light source module, wherein: The invention comprises: the optical combining component according to claim 5; and a plurality of visible light laser light sources which emit visible light laser light combined by the optical combining component.

7. An optical wave combining component with optical modulation function, wherein: The optical combining member according to claim 5 includes a Mach-Zehnder optical modulator in the optical combining functional layer.

8. A visible light source module, wherein: The device comprises: the optical combining component with light modulation function as claimed in claim 7; and a plurality of visible light laser light sources which emit visible light laser light combined by the optical combining component with light modulation function.

9. An optical engine, wherein: have: The visible light source module according to claim 6; and A light scanning mirror changes the angle of the light emitted from the visible light source module and reflects the light in such a way as to display an image.

10. An optical engine, wherein: have: The visible light source module according to claim 8; and A light scanning mirror changes the angle of the light emitted from the visible light source module and reflects the light in such a way as to display an image.

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