Degumming rinsing device and degumming machine

Abstract

The invention provides a degumming and rinsing device and a degumming machine, and belongs to the field of silicon wafer processing.The degumming and rinsing device comprises at least one degumming and rinsing unit, and each degumming and rinsing unit comprises a degumming module and a rinsing module, each of the degumming module and the rinsing module comprises a box body, an inner support frame group, a hydraulic control assembly, a heating assembly and a bubbling assembly, the degumming module is provided with a degumming spraying assembly, and the rinsing module is provided with a rinsing vibration assembly; the top of the degumming module and the top of the rinsing module which are transversely arranged side by side share a transversely-moving cover plate assembly, the longitudinal space occupation is small, the linkage and degumming effects are good, the efficiency is high, and the device is convenient to popularize and apply in the fields of degumming, cleaning and the like of silicon wafers in the industries of photovoltaics, semiconductors and the like.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer processing, and in particular relates to a degumming and rinsing device and a degumming machine. Background Art

[0002] In the process of silicon wafer preparation, the degumming module is an important mechanism. The single-layer silicon wafer is sliced ​​from the cut whole silicon rod or silicon ingot through heating degumming treatment. The single sheet or single-layer silicon wafer is separated from the material holder through the heating degumming treatment of the agent to complete the degumming of the silicon wafer. During the degumming process of the single crystal silicon wafer, it is necessary to control the temperature and spray the degumming agent in the degumming tank, and then transfer it to the rinsing tank for cleaning. The traditional manual operation is not only inefficient, but also has poor degumming and rinsing effects, and the labor intensity of the workers is high.

[0003] The existing degumming module and the rinsing module are arranged longitudinally, which occupies a large space and has poor linkage and degumming effects. Therefore, it is necessary to design a degumming device that reduces the longitudinal arrangement space. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides a degumming and rinsing device and a degumming machine, which can solve the above problems.

[0005] A degumming and rinsing device comprises at least one group of degumming and rinsing units, each group of degumming and rinsing units comprises a degumming module and a rinsing module with open tops, wherein the tops of the degumming modules and the rinsing modules arranged side by side laterally share a laterally movable cover assembly.

[0006] Furthermore, the cover plate assembly includes a cover plate frame, a cover plate body and a cover plate driving assembly, the cover plate frame is composed of a plurality of groove rails with inner guide grooves, a transverse guide assembly is provided at two transversely arranged groove rails, the fixed end of the transverse guide assembly is fixedly connected to the cover plate body, and the guide portion of the transverse guide assembly abuts against the two groove rails; the cover plate body is laterally driven by the cover plate driving assembly to move horizontally in the inner guide groove of the groove rail.

[0007] Furthermore, the degumming module includes a degumming box, a degumming inner support frame group, a degumming liquid control component with a dosing tank module, a degumming heating component, a degumming bubbling component and a degumming spray component; the bottom of the degumming inner support frame group is suspended longitudinally arranged in the degumming box for supporting the silicon wafer basket; the degumming liquid control component is used for supplying, replenishing, overflowing and discharging the degumming liquid; the heating part of the degumming heating component is arranged in the degumming box for monitoring and controlling the temperature in the box; the degumming bubbling component is arranged on the bottom plate of the degumming box for supplying bubbles to the degumming liquid to improve the degumming effect; the degumming spray component is arranged on the inner wall surface of the degumming box outside the degumming inner support frame group, and the spraying angle of the degumming spray component covers the glue-attached part of the silicon wafer basket.

[0008] Furthermore, the degumming liquid control assembly includes a degumming liquid inlet and outlet pipe group, a water inlet pipe group, a sewage pipe group, an overflow module and a dosing tank module.

[0009] Furthermore, the rinsing module includes a rinsing box, an internal rinsing support frame group, a rinsing liquid control component, a rinsing heating component, a rinsing bubbling component, and a rinsing vibration component; the bottom of the internal rinsing support frame group is suspended longitudinally and arranged in the rinsing box to support the silicon wafer basket; the rinsing liquid control component is used for the supply, replenishment, overflow and discharge of the rinsing liquid; the heating part of the rinsing heating component is arranged in the rinsing box to monitor and control the temperature in the box; the rinsing bubbling component is arranged on the bottom plate of the rinsing box to supply bubbles to the rinsing liquid to improve the rinsing effect; the rinsing vibration component is arranged in the rinsing box outside the internal rinsing support frame group to provide vibration waves to improve the rinsing effect.

[0010] Furthermore, the degumming and rinsing device also includes an intermediate main line, a degumming and rinsing frame and a movable clamping claw module. The intermediate main line is arranged on one side of the degumming and rinsing unit, the degumming and rinsing frame is laterally arranged across the top of the degumming and rinsing unit, the movable clamping claw module is laterally slidably arranged on the degumming and rinsing frame, and the movable clamping claw module is controllably raised and lowered in the Z direction.

[0011] Furthermore, the mobile gripper module includes a gripper three-axial drive assembly and a gripper assembly, wherein the gripper assembly is arranged at the lower part of the gripper three-axial drive assembly for picking up a silicon wafer basket, and the gripper three-axial drive assembly is mounted on the de-bleaching machine frame through a drive beam for realizing spatial movement of the gripper assembly in the X, Y and Z directions.

[0012] The present invention also provides a degumming machine, comprising a spraying device, a degumming rinsing device and a loading cart. The loading cart, the spraying device and the degumming rinsing device are arranged along the degumming process streamline. The spraying device is provided with a spray pipe group with different spraying angles for the upper, middle and lower parts of the side of the silicon wafer basket to achieve pre-cleaning of the silicon wafer; the degumming rinsing device is used for degumming and cleaning the silicon wafer.

[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: the present application adopts a degumming module and a rinsing module which are arranged horizontally side by side, and the two share a horizontally arranged sliding cover plate, which occupies a small longitudinal space, has good linkage and degumming effects, and is convenient for promotion and application in the fields of degumming and cleaning of silicon wafers in the photovoltaic and semiconductor industries. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the degumming and rinsing device of the present invention;

[0015] Figure 2 and Figure 3 Schematic diagrams showing different perspectives of the cover plate assembly in the degumming module and the rinsing module;

[0016] Figure 4 is a schematic diagram of a cover plate assembly;

[0017] Figure 5 A schematic diagram of a degumming and rinsing device from another perspective;

[0018] Figure 6 This is a schematic diagram of a degumming machine.

[0019] In the figure,

[0020] 100, degumming module; 110, degumming box; 120, degumming inner support frame group; 130, degumming hydraulic control assembly; 131, degumming water inlet pipe group; 132, degumming sewage pipe group; 133, degumming overflow module; 134, degumming temperature detector; 135, dosing tank module; 140, degumming heating assembly; 150, degumming bubbling assembly; 160, degumming spray assembly;

[0021] 200, rinsing module; 210, rinsing box; 220, rinsing inner support frame group; 230, rinsing liquid control assembly; 231, rinsing water inlet pipe group; 232, rinsing sewage pipe group; 233, rinsing overflow module; 234, rinsing temperature detector; 240, rinsing heating assembly; 250, rinsing bubbling assembly; 260, rinsing vibration assembly;

[0022] 300, cover assembly; 310, cover frame; 311, groove rail; 320, cover body; 330, cover drive assembly; 331, lateral drive; 332, cover adapter; 333, lateral in-position sensor; 340, lateral guide assembly;

[0023] 400, middle mainstream line;

[0024] 500, debleaching rack;

[0025] 600, mobile clamping claw module; 610, clamping claw three-axis driving assembly; 620, clamping claw assembly;

[0026] 1000. Spraying device;

[0027] 2000, degumming and rinsing device;

[0028] 3000. Loading car. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] A degumming and rinsing device, see Figure 1-Figure 5 The degumming and rinsing device includes at least one group of degumming and rinsing units, each group of degumming and rinsing units includes a degumming module 100 and a rinsing module 200 with an open top, wherein the tops of the degumming modules 100 and the rinsing modules 200 arranged side by side laterally share a laterally movable cover assembly 300. The degumming and rinsing device also includes an intermediate main flow line 400, a degumming and rinsing rack 500 and a mobile clamping claw module 600, wherein the intermediate main flow line 400 is arranged on one side of the degumming and rinsing unit, the degumming and rinsing rack 500 is laterally arranged across the top of the degumming and rinsing unit, the mobile clamping claw module 600 is laterally slidably arranged on the degumming and rinsing rack 500, and the mobile clamping claw module 600 is arranged to be controllably lifted in the Z direction.

[0031] Exemplarily, a group of degumming and rinsing units are symmetrically arranged on both sides of the middle main flow line 400 .

[0032] See also Figure 2 and Figure 3 The degumming module 100 includes a degumming box 110, a degumming inner support frame group 120, a degumming liquid control component 130 with a dosing tank module, a degumming heating component 140, a degumming bubbling component 150 and a degumming spray component 160; the bottom of the degumming inner support frame group 120 is suspended and longitudinally arranged in the degumming box 110 for supporting the silicon wafer basket; the degumming liquid control component 130 is used for supplying, replenishing, overflowing and discharging the degumming liquid; the heating part of the degumming heating component 140 is arranged in the degumming box 110 for monitoring and controlling the temperature in the box; the degumming bubbling component 150 is arranged on the bottom plate of the degumming box 110 for supplying bubbles to the degumming liquid; the degumming spray component 160 is arranged on the inner wall surface of the degumming box 110 outside the degumming inner support frame group 120, and the spraying angle of the degumming spray component 160 covers the glued part of the silicon wafer basket.

[0033] Furthermore, the degumming liquid control assembly 130 includes a degumming water inlet pipe group 131, a degumming sewage pipe group 132, a degumming overflow module 133, a degumming temperature detector 134 and a dosing tank module 135. The degumming sewage pipe group 132 includes a sewage filter, a sewage tank and a sewage pipe arranged at the bottom of the degumming box 110. The degumming overflow module 133 is arranged on the upper part of the inner wall of the degumming box 110 for overflow control of the degumming liquid.

[0034] See also Figure 2 and Figure 3 , wherein the rinsing module 200 includes a rinsing box 210, an inner rinsing support frame group 220, a rinsing liquid control component 230, a rinsing heating component 240, a rinsing bubbling component 250, and a rinsing vibration component 260; the bottom of the inner rinsing support frame group 220 is suspended and longitudinally arranged in the rinsing box 210, for supporting the silicon wafer material basket; the rinsing liquid control component 230 is used for supplying, replenishing, overflowing and discharging the rinsing liquid; the heating part of the rinsing heating component 240 is arranged in the rinsing box 210, for monitoring and controlling the temperature in the box; the rinsing bubbling component 250 is arranged on the bottom plate of the rinsing box 210, for supplying bubbles to the rinsing liquid; the rinsing vibration component 260 is arranged in the rinsing box 210 outside the inner rinsing support frame group 220, and provides vibration waves to improve the rinsing effect.

[0035] Furthermore, the rinse liquid control assembly 230 includes a rinse water inlet pipe group 231, a rinse sewage pipe group 232, a rinse overflow module 233, a rinse temperature detector 234 and a dosing tank module. The above structure is the same or similar to the degumming liquid control assembly 130, and the modular design reduces the cost. The rinse liquid control assembly 230 and the degumming liquid control assembly 130 share the dosing module, and can also be used independently.

[0036] Furthermore, the rinsing vibration component 260 uses a vibration plate and / or a vibration rod.

[0037] The shared internal support frame groups (degumming internal support frame group 120 and rinsing internal support frame group 220) have the same structure, both including a longitudinal frame and a plurality of groove bottom guides, the longitudinal ends of the longitudinal frames are connected to the inner wall surface of the box body, the bottom of the longitudinal frame is suspended, and the groove bottom guides are arranged on the bottom rods of the longitudinal frames.

[0038] The reason why the bottom of the longitudinal frame is suspended is to facilitate the sewage to be discharged from the bottom, and there is a sewage discharge space. The function of the bottom guide of the trough is to facilitate the bottom guidance and positioning of the silicon wafer basket, so as to achieve effective support and protection of the silicon wafer basket.

[0039] Wherein, the cover plate assembly 300, see Figure 4 , including a cover frame 310, a cover body 320 and a cover driving assembly 330, the cover frame is composed of a plurality of groove rails 311 with inner guide grooves, a transverse guide assembly 340 is arranged at two transversely arranged groove rails 311, the fixed end of the transverse guide assembly 340 is fixedly connected to the cover body 320, and the guide part of the transverse guide assembly 340 abuts against the two groove rails 311; the cover body 320 is laterally driven by the cover driving assembly 330 to move horizontally in the inner guide groove of the groove rail 311.

[0040] The cover driving assembly 330 includes a transverse driver 331 , a cover adapter 332 and a transverse in-position sensor 333 . The transverse driver 331 is mounted on the cover frame, and the cover adapter 332 and the transverse in-position sensor 333 are mounted on the cover body 320 .

[0041] In a specific example, the transverse driver 331 adopts a pneumatic cylinder, a hydraulic cylinder, an electric cylinder, etc., and the cylinder body is installed on the outer side of the cover frame or the outer wall of the box body; the end of the piston rod is transferred to the cover body 320 through the cover adapter 332.

[0042] The cover plate adapter 332 can be in the form of an L-shaped or [-shaped buckle plate, etc., and is connected to a floating adapter at the end of a piston rod.

[0043] The lateral in-position sensor 333 may be a photoelectric switch, an in-position switch, a distance measuring sensor, or the like.

[0044] In a specific example, the lateral movement guide assembly 340 adopts a U-shaped roller assembly, the base of which is fixedly connected to the top surface of the cover body 320, and the U-shaped wheel of the U-shaped roller assembly is used as a guide portion to abut against the top rails of the two groove rails 311. The lateral movement of the cover body 320 is more stable through the lateral movement guide assembly 340.

[0045] A round steel is respectively arranged on the top of the two transversely arranged groove rails 311 as a top rail to cooperate with the U-shaped roller assembly.

[0046] Of course, the transverse guide assembly 340 can also be changed to other forms, such as setting rollers, guide bearings, etc. as guide parts at the two longitudinal ends of the cover body 320, and embedding them into the inner guide groove of the groove rail 311, and the upper and lower surfaces of the inner guide groove rollingly abut against the outer surface of the guide part to play a guiding and supporting role.

[0047] The middle mainstream line 400 is used to longitudinally transfer the silicon wafer basket, and the mobile clamping module 600 is used to transfer the silicon wafer basket between the middle mainstream line 400, the degumming module 100 and the rinsing module 200 of the degumming and rinsing unit.

[0048] The middle main flow line 400 adopts a belt-driven frame group, a sprocket-driven frame group, an electric cylinder-driven frame group, etc., for longitudinally conveying the silicon wafer basket.

[0049] The debleaching frame 500 adopts a gantry structure, a steel beam structure, etc., and is used to install the mobile clamping claw module 600, the dosing tank module, the longitudinal top beam support seat, etc.

[0050] Among them, see Figure 1The mobile clamp module 600 includes a clamp tri-axial drive assembly 610 and a clamp assembly 620. The clamp assembly 620 is arranged at the lower part of the clamp tri-axial drive assembly 610 for picking up the silicon wafer basket. The clamp tri-axial drive assembly 610 is mounted on the de-bleaching frame 500 through a drive beam for realizing the spatial transfer of the clamp assembly 620 in the X, Y and Z directions. The clamp tri-axial drive assembly 610 can adopt a three-dimensional space drive mechanism commonly used in the field. This example adopts: a crossbeam and a longitudinal beam with a drive motor and a gear rack structure, and the Z direction is also driven by a motor and a gear rack. Of course, linear motors, synchronous belt drives and the like can also be used.

[0051] Because the lower group of degumming and rinsing units includes a degumming module 100 and a rinsing module 200, in the preferred example, the mobile clamping claw module 600 uses two clamping claw assemblies 620. Of course, the clamping claw triaxial drive assembly 610 also uses two, but the X-direction and Y-direction parts are shared, while the Z-direction is divided into two independent ones. Of course, in other examples, two mobile clamping claw modules 600 can also be used.

[0052] See also Figure 6 A degumming machine comprises a spraying device 1000, a degumming rinsing device 2000 and a loading vehicle 3000.

[0053] Layout relationship: the loading car 3000, the spray device 1000 and the degumming and rinsing device 2000 are arranged along the degumming process streamline. The spray device 1000 is provided with a spray pipe group with different spray angles for the upper, middle and lower parts of the side of the silicon wafer basket to achieve pre-cleaning of the silicon wafers; the degumming and rinsing device 2000 adopts the aforementioned degumming and rinsing device for degumming and cleaning the silicon wafers.

[0054] In a specific example, the spray device 1000, the degumming and rinsing device 2000 and the loading vehicle 3000 are arranged in two groups symmetrically on the streamline to improve efficiency, that is, a double-station streamline arrangement is adopted.

[0055] Furthermore, a degumming effect monitoring unit and a drug solution monitoring unit are provided at the spray device 1000 and the degumming rinsing device 2000. The degumming effect monitoring unit is used to visually judge the degumming effect and determine whether to re-degumming through an algorithm; the drug solution monitoring unit monitors the drug concentration and liquid level in the drug adding box (drug adding tank module 135) online, and automatically adds and replenishes the drug.

[0056] Among them, the loading cart 3000 can be a manual cart, AGV transport cart, etc., and this solution prefers a manual cart.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A degumming and rinsing device, characterized in that: The degumming and rinsing device comprises at least one group of degumming and rinsing units, each group of degumming and rinsing units comprises a degumming module (100) and a rinsing module (200) arranged with an open top, wherein the tops of the degumming modules (100) and the rinsing modules (200) arranged side by side laterally share a laterally movable cover plate assembly (300).

2. The degumming and rinsing device according to claim 1, characterized in that: The cover plate assembly (300) comprises a cover plate frame (310), a cover plate body (320) and a cover plate driving assembly (330); the cover plate frame is composed of a plurality of groove rails (311) with inner guide grooves; a transverse guide assembly (340) is arranged at two transversely arranged groove rails (311); a fixed end of the transverse guide assembly (340) is fixedly connected to the cover plate body (320), and a guide portion of the transverse guide assembly (340) abuts against the two groove rails (311); the cover plate body (320) is transversely driven by the cover plate driving assembly (330) to move horizontally in the inner guide groove of the groove rail (311).

3. The degumming and rinsing device according to claim 1, characterized in that: The degumming module (100) comprises a degumming box (110), a degumming inner support frame group (120), a degumming liquid control component (130) provided with a dosing slot module, a degumming heating component (140), a degumming bubbling component (150) and a degumming spray component (160); the bottom of the degumming inner support frame group (120) is suspended and longitudinally arranged in the degumming box (110); the degumming liquid control component (130) is used for supplying, replenishing, overflowing and discharging the degumming liquid; the heating part of the degumming heating component (140) is arranged in the degumming box (110), the degumming bubbling component (150) is arranged on the bottom plate of the degumming box (110), and the degumming spray component (160) is arranged on the inner wall surface of the degumming box (110) outside the degumming inner support frame group (120); and the spraying angle of the degumming spray component (160) covers the glued part of the silicon wafer basket.

4. The degumming and rinsing device according to claim 3, characterized in that: The degumming liquid control assembly (130) comprises a degumming liquid inlet and outlet pipe group, a water inlet pipe group, a sewage discharge pipe group, an overflow module and a dosing tank module.

5. The degumming and rinsing device according to claim 3, characterized in that: The rinsing module (200) comprises a rinsing box (210), an inner rinsing support frame group (220), a rinsing liquid control component (230), a rinsing heating component (240), a rinsing bubbling component (250), and a rinsing vibration component (260); the inner rinsing support frame group (220) is longitudinally arranged in the rinsing box (210) with its bottom suspended in the air; the rinsing liquid control component (230) is used for supplying, replenishing, overflowing and discharging the rinsing liquid; the heating part of the rinsing heating component (240) is arranged in the rinsing box (210), the rinsing bubbling component (250) is arranged on the bottom plate of the rinsing box (210), and the rinsing vibration component (260) is arranged in the rinsing box (210) outside the inner rinsing support frame group (220).

6. The degumming and rinsing device according to claim 5, characterized in that: The rinsing vibration component (260) adopts a vibration plate and / or a vibration rod.

7. The degumming and rinsing device according to claim 1, characterized in that: The degumming and rinsing device further comprises an intermediate main flow line (400), a degumming and rinsing frame (500) and a movable clamping claw module (600), wherein the intermediate main flow line (400) is arranged on one side of the degumming and rinsing unit, the degumming and rinsing frame (500) is laterally arranged across the top of the degumming and rinsing unit, the movable clamping claw module (600) is laterally arranged on the degumming and rinsing frame (500) for sliding movement, and the movable clamping claw module (600) is controllably arranged for lifting and lowering in the Z direction.

8. The degumming and rinsing device according to claim 7, characterized in that: The mobile clamping jaw module (600) comprises a clamping jaw three-axial drive assembly (610) and a clamping jaw assembly (620), wherein the clamping jaw assembly (620) is arranged at the lower part of the clamping jaw three-axial drive assembly (610), and the clamping jaw three-axial drive assembly (610) is mounted on the de-bleaching frame (500) via a drive beam.

9. A degumming machine, comprising a spraying device (1000), a degumming rinsing device (2000) and a loading vehicle (3000), characterized in that: The loading vehicle (3000), the spraying device (1000) and the degumming and rinsing device (2000) are arranged along the degumming process flow line; the spraying device (1000) is provided with a spray pipe group with different spraying angles for the upper, middle and lower parts of the side of the silicon wafer basket to achieve pre-cleaning of the silicon wafers; the degumming and rinsing device (2000) adopts the degumming and rinsing device according to any one of claims 1 to 8.

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