Improved TLP welding equipment and method based on universal testing machine

Abstract

The invention discloses improved TLP welding equipment and method based on a universal testing machine, and belongs to the field of welding. Comprising an outermost hot drying oven (1), a base (2), a cross beam (4), supporting beams (3) on the two sides, a motor (5), a force sensor (6), a connecting rod (7) and a lifting rod (8). A force sensor (6), a connecting rod (7) and a lifting rod (8) are fixedly connected below the motor (5) in sequence; an internal thread for fixing a magnet is reserved at the bottom of the lifting rod (8), the lower end of the magnet adsorbs a processing mask (22) through magnetic force, the bottom of the processing mask (22) is a flat surface, the processing mask (22) can move up and down along with the lifting rod (8), and the processing mask is in contact with a welding material during welding; a force sensor is used for detecting parameter changes in the welding process in real time and adjusting welding parameters, and high quality of a welded joint is achieved while it is guaranteed that the welding parameters are accurate.

Description

Technical Field

[0001] The invention belongs to the field of microelectronic packaging, and in particular relates to a TLP welding device which is improved from a universal testing machine and can accurately control welding parameters. Background Art

[0002] With the rapid development of advanced packaging technologies such as three-dimensional packaging and system packaging, transient liquid phase diffusion welding (TLP, Transient Liquid Phase Welding) equipment has also been widely used. These packaging technologies require high-density and high-reliability interconnections between chips and between chips and packaging substrates, and TLP welding technology can meet these requirements, providing strong support for the development of advanced packaging technology. And with the continuous development and upgrading of electronic products, the requirements for packaging technology are getting higher and higher. TLP welding technology has received widespread attention and application in the field of electronic packaging with its unique advantages, and market demand is increasing. In the TLP welding process, it is particularly important to control the welding parameters of the welding equipment. During the welding process, it is necessary to accurately control the process parameters such as heating temperature, pressure, time, etc. to ensure the quality of the welded joint. At present, there is a lack of research on TLP welding parameters that can be accurately controlled. In this patent, a low-cost TLP welding device is developed for accurately controlling welding parameters, that is, a TLP welding device improved based on a universal testing machine. Summary of the invention

[0003] Due to the problems of inaccurate welding parameter control and uneven quality of welding joints in the TLP welding process, the present invention provides a low-cost, easy-to-operate, parameter-controllable welding equipment, which uses sensors to detect parameter changes in the welding process in real time and adjust the welding parameters to ensure accurate welding parameters while achieving high quality of the welding joints.

[0004] A TLP welding device improved on the basis of a universal testing machine, characterized in that it comprises an outermost heat oven (1), a base (2), a crossbeam (4) and supporting beams (3) on both sides, a motor (5), a force sensor (6), a connecting rod (7), and a lifting rod (8);

[0005] The lower ends of the vertical support beams (3) on both sides are bases (2), and the upper ends are fixedly supported by horizontal cross beams (4), and the motor (5) is fixed on the cross beam (4); the force sensor (6), the connecting rod (7), and the lifting rod (8) are fixedly connected in sequence below the motor (5); the bottom of the lifting rod (8) has an internal thread for fixing the magnet, and the lower end of the magnet adsorbs the processing mask (22) through magnetic force, and the bottom of the processing mask (22) is a flat surface. The processing mask (22) can move up and down with the lifting rod (8), and the processing mask (22) can be replaced at any time according to needs; the axial directions of the force sensor (6), the connecting rod (7), and the lifting rod (8) are all vertical;

[0006] A mounting plate (9) is provided inside the oven (1), and the lower end of the mounting plate (9) is supported by a support structure (a commercial support structure may be used) that can drive the mounting plate (9) to move parallel to the left and right in a horizontal plane, and the lower end of the support structure is located on the bottom surface of the hot oven (1); a mounting plate recessed area (21) is provided on the upper surface of the mounting plate (9); the recessed area (21) is used to match and place objects to be welded and a machining mask (22); a hole is provided on the top of the oven (1) for a lifting rod (8) to move up and down, and the lifting rod (8) passes through the hole and faces the recessed area (21) below.

[0007] A semicircular notch is left around the inner recessed area (21) on the mounting plate for easy access, and the recessed area (21) and the machined mask (22) are precisely matched in size.

[0008] In the device of the present application, the force sensor (6) is located above the connecting rod (7), and the two are threadedly matched. The connecting rod (7) and the lifting rod (8) are threadedly matched, and the motor (5) drives the connecting rod (7) through the force sensor (6), and drives the lifting rod (8) to move up and down.

[0009] In the device of the present application, the whole device is horizontal, the top crossbeam (4) is horizontal during the up and down movement of the lifting rod (8), and the device inside the oven is horizontal during the welding process. The up and down movement of the lifting rod is controlled by a motor.

[0010] The supporting structure comprises: a first horizontal slide (10), screws (11) around the first slide, a second horizontal slide (12), an X-direction joystick (13), a lower column of the testing machine (14), a bottom support plate (15), screws (16) around the second slide, a slide connection plate (17), a bolt fixing plate (18), and a Y-direction joystick (19);

[0011] The mounting plate (9) is connected downwardly in sequence to the fixing plate (18), the horizontal slide 1 (10), the slide connecting plate (17), the horizontal slide 2 (12), and the bottom support plate (15);

[0012] The X-direction joystick (13) is fixed to the side of the second horizontal slide (12) by bolts or threads; the Y-direction joystick (19) is fixed to the side of the first horizontal slide (10) by bolts or threads, and the second horizontal slide (12) and the first horizontal slide (10) can be operated to move in different directions (such as two perpendicular directions of X and Y) on the horizontal plane by rotating the X-direction joystick 13 and the Y-direction joystick to realize the plane movement of the entire slide.

[0013] The motor is equipped with a control device.

[0014] The method for TLP welding using the above TLP welding equipment comprises the following steps:

[0015] Further, the mounting plate (9) is placed in the oven (1) and supported by a supporting structure;

[0016] Step 1: Process or match the mounting plate, ceramic substrate and mask according to the size of the base material to be welded. The length and width of the base material to be welded are the same as the length and width of the mask. The length and width of the ceramic substrate are the same as the length and width inside the recessed area of ​​the mounting plate. The length and width of the recessed area of ​​the mounting plate are precisely matched with the length and width of the mask. The height of the mask is about 2 / 3 of the height of the recessed area of ​​the mounting plate.

[0017] Step 2: Copper is coated on the ceramic substrate, and then a coating 1 (i.e., a coating protective layer 1, which may or may not be present) is electroplated on the copper coating surface, and solder is placed on the surface of the coating 1 to form a structure of ceramic substrate-coating 1-solder from bottom to top, and then the ceramic substrate is placed flat at the bottom of the recessed area of ​​the mounting plate, with the solder facing upward;

[0018] Step 3: Copper is coated on the bottom of the base material to be welded, and then a coating 2 (electroplating protective layer 2, which may or may not be present) is formed on the surface of the copper coating, and the base material to be welded is horizontally placed on the brazing material of the processed ceramic substrate in the recessed area of ​​the mounting plate in step 2, so that the coating 2 is butted against the brazing material up and down; then the mask is connected to the lifting rod through a magnet;

[0019] Step 4: Adjust the support structure so that the recessed area of ​​the mounting plate is directly opposite to the mask; set the welding temperature (the specific temperature can be precisely controlled by the oven), start the oven heating, and control the motor to vertically lower the lifting rod to drive the mask to sink into the recessed area of ​​the mounting plate and contact with the base material to be welded; when heated to the welding temperature, the solder changes from a solid state to a molten state, and its reaction force on the mask changes. At this time, the pressure change during welding can be obtained through the force sensor, and the pressure during welding can be kept stable by adjusting the lifting rod; or according to actual needs, a welding joint is formed between the base material to be welded and the ceramic substrate, and the pressure at the welding joint can be controlled to decrease or increase by controlling the up and down movement of the lifting rod; the lifting rod can be lowered at a uniform speed during welding.

[0020] Step 5: After keeping warm for a certain period of time, turn off the oven, drive the lifting rod upward with the motor, take out the mounting plate, and then take out the finished welding product left in the recessed area of ​​the mounting plate.

[0021] According to the actual use of the equipment, the type of welding base material includes but is not limited to chips, the welding base material material includes but is not limited to Cu, the composition of the welding base material and the coating 1 and the coating 2 on the copper-clad surface includes but is not limited to Co-based materials, the solder filling method includes but is not limited to electroplating, and the solder composition includes but is not limited to Sn-based solder.

[0022] The present invention has the following beneficial effects:

[0023] (1) This application uses the above-mentioned design to improve the TLP experimental equipment based on the universal testing machine, which is low-cost. During the welding process, the welding temperature, welding pressure and other parameters can be detected at all times, and the up and down movement speed of the lifting rod can be controlled. There are no impurities in the welding area, and the composition of the welding joint is uniform.

[0024] (2) The welding equipment of the present invention can be used not only for TLP welding of electronic chips, but also for welding of welding base materials of other sizes, and has a wide range of applications. The parameters in the welding process are controllable, which effectively reduces the negative impact of welding parameters on the welded joints in TLP welding and improves the TLP welding process. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the three-dimensional structure of a TLP welding device improved based on a universal testing machine provided in an embodiment of the present application;

[0026] Figure 2 A front view of the device provided for the implementation mode of this application;

[0027] Figure 3 A schematic diagram of an internal horizontal slide and a mounting plate provided for an embodiment of the present application;

[0028] Figure 4 A schematic diagram of a welding process provided for an embodiment of the present application;

[0029] 1. Oven; 2. Base; 3. Support beams on both sides; 4. Crossbeam; 5. Motor; 6. Force sensor; 7. Connecting rod; 8. Lifting rod; 9. Mounting plate; 10. Horizontal slide 1; 11. Screws 1 around the slide; 12. Horizontal slide 2; 13. X-axis operating lever; 14. Lower column of the testing machine; 15. Bottom support plate; 16. Screws 2 around the slide; 17. Slide connecting plate; 18. Bolt fixing plate; 19. Y-axis joystick; 20. Bolt holes around the slide; 21. Groove; 22. Machining mask. DETAILED DESCRIPTION

[0030] A TLP welding device improved on the basis of a universal testing machine, characterized in that the plane movement of the horizontal slide and the vertical movement of the lifting rod are controlled, and the precise matching of the machining mask and the mounting plate size can precisely butt the two base materials to be welded, avoiding the influence of external impurities on the quality of the welded joint. The movement speed of the lifting rod is controlled by a motor, and the force sensor and thermocouple monitor the pressure on the top of the base material to be welded and the welding temperature during the welding process to ensure the stability of the welding process.

[0031] The following device is used, which includes an external hot oven 1, a base 2 for fixing the equipment, a crossbeam 4 and support beams 3 on both sides, a motor 5, and a force sensor 6. At the same time, the motor 5 controls the up and down movement of the lifting rod 8 through the connecting rod 7 via the force sensor 6; the interior of the oven includes a mounting plate 9, a supporting structure (a horizontal slide 10 and a horizontal slide 12, screws 11 and screws 16 around the two slides, an X-direction joystick 13 and a Y-direction joystick 19 for controlling the movement of the slides, a slide connecting plate 17 for connecting the two slides, a bolt fixing plate 18, the bolt fixing plate 18 is connected to the slide by threaded fitting, the mounting plate 9 is connected to the bolt fixing plate by bolt holes 20 around it, and the center spacing of the bolt holes 20 around it is an integer multiple of the spacing of the screw holes of the bolt fixing plate 18, and a machined mask 22 for matching the size of the recessed area 21 of the mounting plate).

[0032] The crossbeam and the supporting beams on both sides ensure that the equipment is level as a whole. The motor is placed through the crossbeam, and the force sensor, connecting rod and lifting rod are connected to the lower side of the motor. The lower part of the lifting rod is passed through the hole on the upper side of the oven. To avoid the heat loss inside the oven, the outer diameter of the lifting rod and the size of the opening on the upper side of the oven are precisely matched, so that the temperature inside the oven measured by the thermocouple is accurate. The electromagnet is fixed to the lifting rod through the internal thread of the lifting rod. Turn on the motor to drive the lifting rod up and down, and ensure that the lifting rod can move vertically up and down without hindrance in the hole on the upper side of the oven. The horizontal slide is placed at the bottom of the oven and ensure that the slide is fixed. The bolt fixing plate is placed above the slide and threaded. The mounting plate is placed above the bolt fixing plate, and the bolts are screwed into the screw holes around the mounting plate, tightly fixed to the bolt fixing plate, and the equipment installation process is completed.

[0033] Step 1: Machine or match the mounting plate, ceramic substrate and mask according to the size of the base material to be welded. The length and width of the base material to be welded are the same as the length and width of the mask. The length and width of the ceramic substrate are the same as the length and width inside the recessed area of ​​the mounting plate. The length and width of the recessed area of ​​the mounting plate are precisely matched with the length and width of the mask. The height of the mask is about 2 / 3 of the height of the recessed area of ​​the mounting plate.

[0034] Step 2: Copper is coated on the ceramic substrate, and then the copper coating surface can be electroplated to form a coating 1, and solder is placed on the coating surface to form a structure of ceramic substrate-coating 1-solder from bottom to top, and then the ceramic substrate is placed at the bottom of the recessed area of ​​the mounting plate.

[0035] Step 3: Copper is coated on the bottom of the base material to be welded, and then the copper coating surface can be electroplated to form a coating 2, and the base material to be welded is horizontally placed above the processed ceramic substrate in the recessed area of ​​the mounting plate. Then the mask is connected to the lifting rod through a magnet.

[0036] Step 4: Adjust the position of the horizontal slide so that the recessed area of ​​the mounting plate is opposite to the mask. Start the oven heating, control the motor to vertically lower the lifting rod, drive the mask to sink into the recessed area of ​​the mounting plate, and contact with the base material to be welded. When heated to the welding temperature, the solder changes from a solid state to a molten state, and its reaction force on the mask changes. At this time, the internal force is observed through the force sensor, and the pressure stability during the welding process is ensured by adjusting the movement of the lifting rod. During welding, the lifting rod can be controlled to move up and down according to actual needs to increase or decrease the pressure at the welding joint. In addition, the lifting rod can also be lowered at a uniform speed during the welding process.

[0037] Step 5: After keeping warm for a certain period of time, turn off the oven, drive the lifting rod up with the motor, unscrew the bolts around the mounting plate, remove the mounting plate from the bolt fixing plate, and then take out the finished welding product left in the recessed area of ​​the mounting plate.

[0038] According to the principle of TLP welding process, the device designed in this application is a heat oven with openings on the upper surface, and the interior includes a support structure that can control the free movement of the mounting plate plane. The internal device of the heat oven includes a mounting plate. The external device of the oven includes a base, two side support beams, a crossbeam, a motor, a force sensor, a horizontal fixed beam, a connecting rod, and a lifting rod. A recessed area is provided inside the mounting plate, and there are screw holes around the mounting plate for fixing.

[0039] The present invention is realized by the following technical scheme: a mounting plate, a ceramic substrate and a mask are machined according to the size of the base material to be welded. The mask is connected to the lifting rod by a magnet, the ceramic substrate is placed in the recessed area of ​​the mounting plate and the surface is processed, and then the base material to be welded is placed above the processed ceramic substrate. After the base material to be welded is placed in the recessed area of ​​the mounting plate, the horizontal position of the upper end surface of the support structure is adjusted so that the recessed area of ​​the mounting plate is directly opposite to the mask. The oven is started to heat, and the motor is controlled to vertically lower the lifting rod to drive the mask to sink into the recessed area of ​​the mounting plate and contact the base material to be welded. When heated to the welding temperature, the brazing material changes from a solid state to a molten state, and its reaction force on the mask changes. At this time, the internal force is observed by a force sensor to ensure that the pressure during the welding process is stable. At the same time, the lifting rod can be controlled to move up and down according to actual needs to increase or decrease the pressure at the welding joint. In addition, the lifting rod can also be lowered at a uniform speed during the welding process to ensure that the brazing material and the welding base material form a metal compound with uniform composition. Through this device, the welding parameters in the TLP welding process can be accurately controlled to obtain a welding joint with excellent quality.

[0040] A hot oven is used to heat the sealed drying chamber, and the heating temperature range is 240 degrees Celsius to 300 degrees Celsius. The heating time can be determined by actual specific needs.

[0041] The lifting rod is connected to the motor, which can accurately control the rise and fall of the lifting rod and its speed. Through the force sensor, a stress change chart at the weld joint during the welding process can be obtained, and the stress of the molten solder in the welding area can be known. The height of the lifting rod can be adjusted according to the actual situation to keep the pressure stable during the welding process. After cooling, pull up the lifting rod and take out the finished product after welding from the mounting plate.

[0042] According to the actual use of the equipment, the type of welding base material includes but is not limited to chips, the material of the welding base material includes but is not limited to Cu, the composition of the coating 1 and coating 2 on the welding base material and the copper-clad surface includes but is not limited to Co-based, the solder filling method includes but is not limited to electroplating, and the solder composition includes but is not limited to Sn-based solder. According to the actual use scenario, the lifting rod can not only control the increase or decrease of the welding pressure during the welding process, but also uniformly increase or decrease the pressure during the welding process. The present invention is further described below in conjunction with the accompanying drawings and specific examples, but the protection scope of the present invention is not limited to this.

[0043] like Figure 2 The installation process is as follows. The crossbeam 4 and the supporting beams 3 on both sides ensure the horizontal stability of the equipment. The lower side of the motor 5 is connected to the force sensor 6, the connecting rod 7 and the lifting rod 8. The lower part of the lifting rod 8 passes through the hole on the upper side of the oven 1. In order to avoid the heat loss inside the oven, the outer diameter of the lifting rod and the size of the opening on the upper side of the oven are precisely matched, so that the temperature inside the oven measured by the thermocouple is accurate. The electromagnet is fixed to the lifting rod through the internal thread of the lifting rod 9. Turn on the motor to drive the lifting rod up and down, and ensure that the lifting rod can move vertically up and down without hindrance in the hole on the upper side of the oven. The horizontal slide 10 and the horizontal slide 12 are placed at the bottom of the oven, and ensure that the slide is fixed. The bolt fixing plate 18 is placed above the slide and matched with threads. The mounting plate 9 is placed above the bolt fixing plate, and the bolts are screwed into the screw holes 20 around the mounting plate to tightly fix it with the bolt fixing plate 18.

[0044] The present invention can realize a TLP welding process with accurate control of welding parameters, and the specific working process is as follows:

[0045] According to the size of the base material to be welded, the mounting plate, ceramic substrate and mask are machined, wherein the mask is connected to the lifting rod by a magnet. Copper is coated on the surface of the ceramic substrate, and a protective layer 1 and a solder coating are selectively electroplated. From bottom to top, each layer is a ceramic substrate, copper, electroplated protective coating 1 (optional), and solder coating. The above-treated ceramic substrate is placed in the recessed area of ​​the mounting plate. Subsequently, copper is coated on the surface of the welding base material, and a protective layer 2 is selectively electroplated, and the treated base material to be welded is placed above the treated ceramic substrate. After the base material to be welded is placed in the recessed area of ​​the mounting plate, the position of the horizontal slide is adjusted so that the recessed area of ​​the mounting plate is opposite to the mask. The oven is started to heat, and the motor is controlled to vertically lower the lifting rod, driving the mask to sink into the recessed area of ​​the mounting plate and contact the base material to be welded. When heated to the welding temperature, the solder changes from a solid state to a molten state, and its reaction force on the mask changes. At this time, the internal force is observed by a force sensor to keep the pressure stable during the welding process. At the same time, the lifting rod can be controlled to move up and down according to actual needs to increase or decrease the pressure at the welding joint. In addition, the lifting rod can also be lowered at a uniform speed during the welding process to ensure that the brazing material and the welding base material form a uniform intermetallic compound. According to the actual situation, after a certain period of insulation, stop the oven heating and open the oven, operate the motor to drive the lifting rod to rise, unscrew the bolts around the mounting plate, remove the mounting plate from the bolt fixing plate, and then take out the welded product from the recessed area of ​​the mounting plate.

Claims

1. A TLP welding device improved based on a universal testing machine, characterized in that: It includes an outermost heat oven (1), a base (2), a crossbeam (4), support beams (3) on both sides, a motor (5), a force sensor (6), a connecting rod (7), and a lifting rod (8); The lower ends of the vertical support beams (3) on both sides are bases (2), and the upper ends are fixedly supported by horizontal cross beams (4), and the motor (5) is fixed on the cross beam (4); the force sensor (6), the connecting rod (7), and the lifting rod (8) are fixedly connected in sequence below the motor (5); the bottom of the lifting rod (8) has an internal thread for fixing the magnet, and the lower end of the magnet adsorbs the processing mask (22) through magnetic force, and the bottom of the processing mask (22) is a flat surface. The processing mask (22) can move up and down with the lifting rod (8), and the processing mask (22) can be replaced at any time according to needs; the axial directions of the force sensor (6), the connecting rod (7), and the lifting rod (8) are all vertical; A mounting plate (9) is provided inside the oven (1), and the lower end of the mounting plate (9) is supported by a support structure (a commercial support structure may be used) that can drive the mounting plate (9) to move parallel to the left and right in a horizontal plane, and the lower end of the support structure is located on the bottom surface of the hot oven (1); a mounting plate recessed area (21) is provided on the upper surface of the mounting plate (9); the recessed area (21) is used to match and place objects to be welded and a machining mask (22); a hole is provided on the top of the oven (1) for a lifting rod (8) to move up and down, and the lifting rod (8) passes through the hole and faces the recessed area (21) below.

2. A TLP welding device improved based on a universal testing machine according to claim 1, characterized in that: A semicircular notch is left around the inner recessed area (21) on the mounting plate for easy access, and the recessed area (21) and the machined mask (22) are precisely matched in size.

3. A TLP welding device improved based on a universal testing machine according to claim 1, characterized in that: The force sensor (6) is located above the connecting rod (7), and the two are threadedly matched. The connecting rod (7) and the lifting rod (8) are threadedly matched, and the motor (5) drives the connecting rod (7) through the force sensor (6), and drives the lifting rod (8) to move up and down.

4. A TLP welding device improved based on a universal testing machine according to claim 1, characterized in that: The whole equipment is level, the top crossbeam (4) is level during the up and down movement of the lifting rod (8), and the device inside the oven is level during the welding process. The up and down movement of the lifting rod is controlled by a motor.

5. A TLP welding device improved based on a universal testing machine according to claim 1, characterized in that: The supporting structure comprises: a first horizontal slide (10), screws (11) around the first slide, a second horizontal slide (12), an X-direction joystick (13), a lower column of the testing machine (14), a bottom support plate (15), screws (16) around the second slide, a slide connection plate (17), a bolt fixing plate (18), and a Y-direction joystick (19); The mounting plate (9) is connected downwardly in sequence to the fixing plate (18), the horizontal slide 1 (10), the slide connecting plate (17), the horizontal slide 2 (12), and the bottom support plate (15); The X-direction joystick (13) is fixed to the side of the second horizontal slide (12) by bolts or threads; the Y-direction joystick (19) is fixed to the side of the first horizontal slide (10) by bolts or threads, and the second horizontal slide (12) and the first horizontal slide (10) can be operated to move in different directions (such as two perpendicular directions of X and Y) on the horizontal plane by rotating the X-direction joystick 13 and the Y-direction joystick to realize the plane movement of the entire slide.

6. A method for TLP welding using the TLP welding equipment according to any one of claims 1 to 5, characterized in that: The following steps are involved: placing the mounting plate (9) in the oven (1) and supporting it with a supporting structure; Step 1: Process or match the mounting plate, ceramic substrate and mask according to the size of the base material to be welded. The length and width of the base material to be welded are the same as the length and width of the mask. The length and width of the ceramic substrate are the same as the length and width inside the recessed area of ​​the mounting plate. The length and width of the recessed area of ​​the mounting plate are precisely matched with the length and width of the mask. The height of the mask is about 2 / 3 of the height of the recessed area of ​​the mounting plate. Step 2: Copper is coated on the ceramic substrate, and then a coating 1 is formed on the copper coating surface by electroplating, and a solder is placed on the surface of the coating 1 to form a structure of ceramic substrate-coating 1-solder from bottom to top, and then the ceramic substrate is placed flat at the bottom of the recessed area of ​​the mounting plate, with the solder facing upward; Step 3: Copper is coated on the bottom of the base material to be welded, and then a coating 2 can be formed on the surface of the copper coating by electroplating, and the base material to be welded is horizontally placed on the brazing material of the processed ceramic substrate in the recessed area of ​​the mounting plate in step 2, so that the coating 2 and the brazing material are butted up and down; then the mask is connected to the lifting rod through a magnet; Step 4: Adjust the support structure so that the recessed area of ​​the mounting plate is directly opposite to the mask; set the welding temperature to start the oven heating, control the motor to vertically lower the lifting rod, drive the mask to sink into the recessed area of ​​the mounting plate, and contact with the base material to be welded; when heated to the welding temperature, the solder changes from a solid state to a molten state, and its reaction force on the mask changes. At this time, the pressure change during welding can be obtained through the force sensor, and the pressure during welding can be kept stable by adjusting the lifting rod; or according to actual needs, the welding joint formed between the base material to be welded and the ceramic substrate can be controlled by controlling the up and down movement of the lifting rod to reduce or increase the pressure at the welding joint; the lifting rod can be made to descend at a uniform speed during welding; Step 5: After keeping warm for a certain period of time, turn off the oven, drive the lifting rod upward with the motor, take out the mounting plate, and then take out the finished welding product left in the recessed area of ​​the mounting plate.

7. The method according to claim 6, characterized in that The plating layer 1 is the electroplating protective layer 1, which may be added or not added as needed; the plating layer 2 is the electroplating protective layer 2, which may be added or not added as needed.

8. The method according to claim 6, characterized in that The types of welding base materials include but are not limited to chips, the materials of welding base materials include but are not limited to Cu, the components of the welding base materials and the coating 1 and coating 2 on the copper-clad surface include but are not limited to Co-based materials, the solder filling methods include but are not limited to electroplating, and the solder components include but are not limited to Sn-based solders.

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