Accurate positioning device for laser holographic lithography machine and use method thereof

Abstract

The invention discloses a precise positioning device for a laser holography photoetching machine, the precise positioning device comprises a main body, the top of the main body is provided with a translation mechanism, the rear end of the surface of the translation mechanism is provided with an adjusting mechanism, the adjusting mechanism comprises a support, a supporting plate, a second motor, a sliding block and a threaded rod, and the surface of the sliding block is provided with a positioning mechanism. The positioning mechanism comprises a mounting box, a visual camera, a lens, a light source, an infrared sensor and a controller. By arranging the main body, the translation mechanism, the adjusting mechanism and the positioning mechanism, the effect of accurately positioning the photoetching plate is achieved, the position of the photoetching plate can be recognized through cooperation of the mounting box, the visual camera, the lens, the light source, the infrared sensor and the controller, and the positions of the photoetching plate and laser beams are continuously adjusted through the translation mechanism and the adjusting mechanism; therefore, the photoetching plate can be accurately positioned and photoetched independently, and the positioning accuracy of the laser holographic photoetching machine is effectively improved.

Description

Technical Field

[0001] The present invention relates to the field of precision positioning equipment for laser holographic lithography machines, and in particular to a precision positioning device for laser holographic lithography machines and a method for using the same. Background Art

[0002] Laser holographic lithography is a precision device used to produce holographic images and photolithography plates. It uses the principle of laser interference to precisely control the phase and intensity of the laser beam to record and reproduce the three-dimensional information of an object. This equipment is widely used in the fields of optical platemaking, anti-counterfeiting label production, micro-nano structure processing, etc. The main features of laser holographic lithography include high precision, high resolution and high speed. It can be used to produce various complex holographic images and tiny photolithography patterns, and is suitable for scientific research, industry and commerce. When using it, a positioning device is required to ensure accurate positioning and alignment of the photolithography plate during the photolithography process.

[0003] According to Chinese patent application No.: 202121936331.8, a laser holographic lithography machine with anti-vibration function is disclosed, including a workbench, a feeder and a cleaner, a photolithography box is installed on the top of the workbench, and the photolithography box is located on one side of the console, a feeder is installed on the outer wall of the photolithography box, a feeding box is installed on the inner wall of the conveying box, and the feeding box is located on one side of the conveyor belt, and a cleaner is installed on the inner wall of the workbench. The problem of long crystal placement time is solved by installing the feeding box and the feeder. The crystal enters the interior of the conveying box through the slide slot, and the motor provides power for the conveyor belt. The conveyor belt conveys the crystal into the interior of the feeding box and enters the top of the support. The drive box drives the reciprocating screw to rotate, and the rotation of the reciprocating screw drives the support plate to move. The movement of the support plate drives the hydraulic rod to move, and the hydraulic rod contracts to separate the support. The crystal on the top of the support enters the top of the sliding base, so as to achieve the purpose of rapid crystal processing.

[0004] The existing technology effectively solves the problem of long placement time, and has the advantages of convenient crystal placement and reduced manual operation. However, this type of laser holographic lithography machine usually uses a positioning sensor to position the laser beam, which makes the positioning efficiency low, thus easily affecting the positioning accuracy. Summary of the invention

[0005] The purpose of the present invention is to provide a precise positioning device for a laser holographic lithography machine and a method of using the same, which has the advantage of being able to accurately position a photolithography plate and solves the problem that the positioning efficiency of the laser holographic lithography machine is low and easily affects the positioning accuracy.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: A precise positioning device for a laser holographic lithography machine, comprising a main body, a translation mechanism is installed on the top of the main body, an adjustment mechanism is installed on the rear end of the surface of the translation mechanism, the adjustment mechanism comprises a bracket, a support plate, a second motor, a slider and a threaded rod, a positioning mechanism is installed on the surface of the slider, the positioning mechanism comprises an installation box, a visual camera, a lens, a light source, an infrared sensor and a controller, the controller is installed on the surface of the main body, the visual camera, the lens and the light source are all fixed on one side of the installation box, the infrared sensor is installed on the bottom of the installation box, the positioning mechanism is used to position the photolithography plate, the installation box is fixedly connected to the slider, the translation mechanism comprises a bottom plate, a bearing plate, a first motor, a gear and a rack, the bottom plate is fixedly connected to the main body, the bearing plate is located on the top of the bottom plate, the bracket is fixedly connected to the bottom plate, the translation mechanism and the adjustment mechanism are used to adjust the lithography position, the output ends of the visual camera and the infrared sensor are both connected to the input of the controller, and the output ends of the controller are respectively connected to the input ends of the first motor, the second motor and the light source.

[0007] Preferably, the rack is fixed to the inner cavity of the base plate, the gear is meshed with the rack, the first motor is fixed to the inner cavity of the carrier plate, and the output shaft of the first motor passes through the outside of the carrier plate and is connected to the gear transmission.

[0008] Preferably, the translation mechanism further includes a slide rail and a slide seat, the slide rail is fixedly connected to the base plate, the slide seat is located on the surface of the slide rail and is slidably connected to the slide rail, and the bearing plate is fixedly connected to the slide seat.

[0009] Preferably, the support plate is fixedly connected to the bracket, the second motor is fixedly connected to the support plate, and the threaded rod is located in the inner cavity of the support plate and is movably connected to the inner wall of the support plate through a bearing.

[0010] Preferably, the sliding block is sleeved on the surface of the threaded rod and is threadedly connected to the surface of the threaded rod, and the output shaft of the second motor passes through the inner cavity of the support plate and is drivingly connected to the threaded rod.

[0011] Preferably, the adjustment mechanism further comprises a guide plate and a guide seat, the guide plate is fixedly connected to the support plate, the guide seat is located on the surface of the guide plate and is slidably connected to the surface of the guide plate, and the slider is fixedly connected to the guide seat.

[0012] Preferably, the method of use comprises the following steps:

[0013] A. First, place the photomask at the center of the top of the carrier plate, then identify and locate the photomask through the positioning mechanism, control the brightness of the light source through the controller, and enable the visual camera to capture a clear picture. The visual camera captures the photomask through the lens, and the visual camera converts the captured picture into an electrical signal and transmits it to the controller. The controller arranges the photolithography position according to the identified photomask, and the infrared sensor locates the photolithography position on the surface of the photomask. The position of the photomask is continuously adjusted through the translation mechanism and the adjustment mechanism, so that the holographic photolithography operation can be accurately performed on the surface of the photomask;

[0014] B. The carrying plate carries the photolithography plate, and the output shaft of the first motor rotates to drive the gear to rotate, so that the gear moves along the surface of the rack, thereby driving the carrying plate to move. When the carrying plate moves, it drives the slide to move along the surface of the slide rail, thereby adjusting the position of the photolithography plate;

[0015] C. The output shaft of the second motor rotates to drive the threaded rod to rotate. When the threaded rod rotates, it drives the slider to move along the surface of the threaded rod. When the slider moves, it drives the guide seat to move along the surface of the guide plate. When the slider moves, it drives the positioning mechanism to move, thereby adjusting the position of the laser beam.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The present invention achieves the effect of accurately positioning the photolithography plate by setting up a main body, a translation mechanism, an adjustment mechanism and a positioning mechanism. The installation box, the visual camera, the lens, the light source, the infrared sensor and the controller cooperate to identify the position of the photolithography plate. The positions of the photolithography plate and the laser beam are continuously adjusted through the translation mechanism and the adjustment mechanism, so that the photolithography can be accurately positioned on the photolithography plate alone, effectively improving the positioning accuracy of the laser holographic lithography machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the main structure of the present invention;

[0019] Figure 2 It is a schematic structural diagram of the separated state of the adjusting mechanism and the positioning mechanism of the present invention;

[0020] Figure 3 It is a structural schematic diagram of the separation state of the translation mechanism of the present invention;

[0021] Figure 4 It is a schematic diagram of the system flow of the present invention.

[0022] In the figure: 1. main body; 2. translation mechanism; 201. bottom plate; 202. bearing plate; 203. first motor; 204. gear; 205. rack; 206. slide rail; 207. slide seat; 3. adjustment mechanism; 301. bracket; 302. support plate; 303. second motor; 304. slider; 305. threaded rod; 306. guide plate; 307. guide seat; 4. positioning mechanism; 401. installation box; 402. visual camera; 403. lens; 404. light source; 405. infrared sensor; 406. controller. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] The main body 1, translation mechanism 2, base plate 201, bearing plate 202, first motor 203, gear 204, rack 205, slide rail 206, slide seat 207, adjustment mechanism 3, bracket 301, support plate 302, second motor 303, slider 304, threaded rod 305, guide plate 306, guide seat 307, positioning mechanism 4, installation box 401, visual camera 402, lens 403, light source 404, infrared sensor 405 and controller 406 of the present invention are all universal standard parts or parts known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or through conventional experimental methods.

[0025] Example 1

[0026] like Figure 1-4As shown, it is the first embodiment of the present invention, which provides a precise positioning device for a laser holographic lithography machine and a method of using the same, including a main body 1, a translation mechanism 2 is installed on the top of the main body 1, an adjustment mechanism 3 is installed on the rear end of the surface of the translation mechanism 2, the adjustment mechanism 3 includes a bracket 301, a support plate 302, a second motor 303, a slider 304 and a threaded rod 305, a positioning mechanism 4 is installed on the surface of the slider 304, the positioning mechanism 4 includes an installation box 401, a visual camera 402, a lens 403, a light source 404, an infrared sensor 405 and a controller 406, the controller 406 is installed on the surface of the main body 1, and the visual camera 402, the lens 403 and the light source 404 are all fixed to the installation box 401 On one side, the infrared sensor 405 is installed at the bottom of the installation box 401, the positioning mechanism 4 is used to position the photolithography plate, the installation box 401 is fixedly connected to the slider 304, the translation mechanism 2 includes a base plate 201, a carrier plate 202, a first motor 203, a gear 204 and a rack 205, the base plate 201 is fixedly connected to the main body 1, the carrier plate 202 is located on the top of the base plate 201, the bracket 301 is fixedly connected to the base plate 201, the translation mechanism 2 and the adjustment mechanism 3 are used to adjust the photolithography position, the output ends of the visual camera 402 and the infrared sensor 405 are connected to the input of the controller 406, and the output ends of the controller 406 are respectively connected to the input ends of the first motor 203, the second motor 303 and the light source 404.

[0027] like Figure 1-4 As shown, the inner cavity of the installation box 401 is used to install the laser beam generator, the photolithography plate is placed at the center of the top of the carrier plate 202, and then the photolithography plate is identified and positioned by the positioning mechanism 4, and the brightness of the light source 404 is controlled by the controller 406, so that the visual camera 402 can capture a clear picture. The visual camera 402 captures the photolithography plate through the lens 403, and the visual camera 402 converts the captured picture into an electrical signal and transmits it to the controller 406. The controller 406 arranges the photolithography position according to the identified photolithography plate, and the infrared sensor 405 locates the photolithography position on the surface of the photolithography plate. The position of the photolithography plate and the laser beam is continuously adjusted by the translation mechanism 2 and the adjustment mechanism 3, so that the holographic lithography operation can be accurately performed on the surface of the photolithography plate. The controller 406 is composed of a development board and a control chip, and an image recognition module is provided in the control chip for identifying and analyzing the picture captured by the visual camera 402.

[0028] Example 2

[0029] Reference Figure 1 and 2 , which is the second embodiment of the present invention, and this embodiment is based on the previous embodiment.

[0030] In this embodiment, the rack 205 is fixed to the inner cavity of the base plate 201, the gear 204 is meshed with the rack 205, the first motor 203 is fixed to the inner cavity of the carrier plate 202, and the output shaft of the first motor 203 passes through the outside of the carrier plate 202 and is transmission-connected to the gear 204.

[0031] The translation mechanism 2 further includes a slide rail 206 and a slide seat 207 . The slide rail 206 is fixedly connected to the bottom plate 201 . The slide seat 207 is located on the surface of the slide rail 206 and is slidably connected to the slide rail 206 . The bearing plate 202 is fixedly connected to the slide seat 207 .

[0032] like Figure 1 and 2 As shown, the carrier plate 202 carries the photolithography plate, and the output shaft of the first motor 203 rotates to drive the gear 204 to rotate, so that the gear 204 moves along the surface of the rack 205, thereby driving the carrier plate 202 to move. When the carrier plate 202 moves, it drives the slide 207 to move along the surface of the slide rail 206, so as to adjust the position of the photolithography plate. The output shaft of the first motor 203 rotates forward to drive the carrier plate 202 to move forward, and the output shaft of the first motor 203 rotates backward to drive the carrier plate 202 to move backward, so as to adjust the position of the photolithography plate. The slide rail 206 and the slide 207 cooperate to limit the movement trajectory of the carrier plate 202.

[0033] Example 3

[0034] Reference Figure 1 and 3 , which is the third embodiment of the present invention, and this embodiment is based on the previous two embodiments.

[0035] In this embodiment, the support plate 302 is fixedly connected to the bracket 301, the second motor 303 is fixedly connected to the support plate 302, and the threaded rod 305 is located in the inner cavity of the support plate 302 and movably connected to the inner wall of the support plate 302 through a bearing.

[0036] The slider 304 is sleeved on the surface of the threaded rod 305 and is threadedly connected to the surface of the threaded rod 305 . The output shaft of the second motor 303 passes through the inner cavity of the support plate 302 and is drivingly connected to the threaded rod 305 .

[0037] The adjustment mechanism 3 further includes a guide plate 306 and a guide seat 307 . The guide plate 306 is fixedly connected to the support plate 302 . The guide seat 307 is located on the surface of the guide plate 306 and is slidably connected to the surface of the guide plate 306 . The slider 304 is fixedly connected to the guide seat 307 .

[0038] like Figure 1 and 3As shown, the output shaft of the second motor 303 rotates to drive the threaded rod 305 to rotate. When the threaded rod 305 rotates, it drives the slider 304 to move along the surface of the threaded rod 305. When the slider 304 moves, it drives the guide seat 307 to move along the surface of the guide plate 306. When the slider 304 moves, it drives the positioning mechanism 4 to move, so that the position of the laser beam can be adjusted. The output shaft of the second motor 303 rotates forward so that the slider 304 drives the positioning mechanism 4 to move to one side. The output shaft of the second motor 303 rotates backward and drives the positioning mechanism 4 to move to the other side, so that the position of the laser beam can be adjusted. The guide plate 306 and the guide seat 307 cooperate to limit the movement trajectory of the slider 304.

[0039] A method for using a precise positioning device for a laser holographic lithography machine, the method comprising the following steps:

[0040] A. First, place the photolithography plate at the center of the top of the carrier plate 202, then identify and locate the photolithography plate through the positioning mechanism 4, control the brightness of the light source 404 through the controller 406, so that the visual camera 402 can take a clear picture, the visual camera 402 takes a picture of the photolithography plate through the lens 403, and the visual camera 402 converts the taken picture into an electrical signal and transmits it to the controller 406, the controller 406 arranges the photolithography position according to the identified photolithography plate, the infrared sensor 405 locates the photolithography position on the surface of the photolithography plate, and continuously adjusts the position of the photolithography plate through the translation mechanism 2 and the adjustment mechanism 3, so that the holographic photolithography operation can be accurately performed on the surface of the photolithography plate;

[0041] B. The carrying plate 202 carries the photolithography plate, and the output shaft of the first motor 203 rotates to drive the gear 204 to rotate, so that the gear 204 moves along the surface of the rack 205, thereby driving the carrying plate 202 to move. When the carrying plate 202 moves, it drives the slide 207 to move along the surface of the slide rail 206, so as to adjust the position of the photolithography plate;

[0042] C. The output shaft of the second motor 303 rotates to drive the threaded rod 305 to rotate. When the threaded rod 305 rotates, it drives the slider 304 to move along the surface of the threaded rod 305. When the slider 304 moves, it drives the guide seat 307 to move along the surface of the guide plate 306. When the slider 304 moves, it drives the positioning mechanism 4 to move, so as to adjust the position of the laser beam.

[0043] The standard parts used in this application document can all be purchased from the market and can be customized according to the description in the specification and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented through simple programming by technicians in this field, which is common knowledge in the field. This application is mainly used to protect mechanical devices, so this application no longer explains the control method and circuit connection in detail.

[0044] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0045] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A precise positioning device for a laser holographic lithography machine, comprising a main body (1), characterized in that: A translation mechanism (2) is installed on the top of the main body (1); an adjustment mechanism (3) is installed on the rear end of the surface of the translation mechanism (2); the adjustment mechanism (3) comprises a bracket (301), a support plate (302), a second motor (303), a slider (304) and a threaded rod (305); a positioning mechanism (4) is installed on the surface of the slider (304); the positioning mechanism (4) comprises an installation box (401), a visual camera (402), a lens (403), a light source (404), an infrared sensor (405) and a controller (406); the controller (406) is installed on the surface of the main body (1); the visual camera (402), the lens (403) and the light source (404) are all fixed on one side of the installation box (401); the infrared sensor (405) is installed on the bottom of the installation box (401); The present invention relates to a device for positioning a photolithography plate, wherein the positioning mechanism (4) is used for positioning the photolithography plate, the mounting box (401) is fixedly connected to the slider (304), the translation mechanism (2) comprises a base plate (201), a carrier plate (202), a first motor (203), a gear (204) and a rack (205), the base plate (201) is fixedly connected to the main body (1), the carrier plate (202) is located on the top of the base plate (201), the bracket (301) is fixedly connected to the base plate (201), the translation mechanism (2) and the adjustment mechanism (3) are used for adjusting the photolithography position, the output ends of the visual camera (402) and the infrared sensor (405) are both connected to the input end of the controller (406), and the output end of the controller (406) is respectively connected to the input ends of the first motor (203), the second motor (303) and the light source (404).

2. The precise positioning device for a laser holographic lithography machine according to claim 1, characterized in that: The rack (205) is fixed to the inner cavity of the base plate (201), the gear (204) is meshed with the rack (205), the first motor (203) is fixed to the inner cavity of the carrier plate (202), and the output shaft of the first motor (203) passes through the outside of the carrier plate (202) and is transmission-connected to the gear (204).

3. The precise positioning device for a laser holographic lithography machine according to claim 1, characterized in that: The translation mechanism (2) further comprises a slide rail (206) and a slide seat (207); the slide rail (206) is fixedly connected to the base plate (201); the slide seat (207) is located on the surface of the slide rail (206) and is slidably connected to the slide rail (206); and the bearing plate (202) is fixedly connected to the slide seat (207).

4. The precise positioning device for a laser holographic lithography machine according to claim 1, characterized in that: The support plate (302) is fixedly connected to the bracket (301), the second motor (303) is fixedly connected to the support plate (302), and the threaded rod (305) is located in the inner cavity of the support plate (302) and is movably connected to the inner wall of the support plate (302) via a bearing.

5. The precise positioning device for a laser holographic lithography machine according to claim 1, characterized in that: The slider (304) is sleeved on the surface of the threaded rod (305) and is threadedly connected to the surface of the threaded rod (305); the output shaft of the second motor (303) passes through the inner cavity of the support plate (302) and is drivingly connected to the threaded rod (305).

6. The precise positioning device for a laser holographic lithography machine according to claim 1, characterized in that: The adjustment mechanism (3) further comprises a guide plate (306) and a guide seat (307); the guide plate (306) is fixedly connected to the support plate (302); the guide seat (307) is located on the surface of the guide plate (306) and is slidably connected to the surface of the guide plate (306); and the slider (304) is fixedly connected to the guide seat (307).

7. A method for using a precise positioning device for a laser holographic lithography machine according to any one of claims 1 to 6, characterized in that: The method of use includes the following steps: A. First, place the photolithography plate at the center of the top of the carrier plate (202), then identify and locate the photolithography plate through the positioning mechanism (4), control the brightness of the light source (404) through the controller (406), so that the visual camera (402) can capture a clear picture, the visual camera (402) captures the photolithography plate through the lens (403), the visual camera (402) converts the captured picture into an electrical signal and transmits it to the controller (406), the controller (406) arranges the photolithography position according to the identified photolithography plate, the infrared sensor (405) locates the photolithography position on the surface of the photolithography plate, and continuously adjusts the position of the photolithography plate through the translation mechanism (2) and the adjustment mechanism (3), so that the holographic photolithography operation can be accurately performed on the surface of the photolithography plate; B. The carrying plate (202) carries the photolithography plate, and the output shaft of the first motor (203) rotates to drive the gear (204) to rotate, so that the gear (204) moves along the surface of the rack (205), thereby driving the carrying plate (202) to move. When the carrying plate (202) moves, it drives the slide seat (207) to move along the surface of the slide rail (206), so that the position of the photolithography plate can be adjusted; C. The output shaft of the second motor (303) rotates to drive the threaded rod (305) to rotate. When the threaded rod (305) rotates, it drives the slider (304) to move along the surface of the threaded rod (305). When the slider (304) moves, it drives the guide seat (307) to move along the surface of the guide plate (306). When the slider (304) moves, it drives the positioning mechanism (4) to move, so that the position of the laser beam can be adjusted.

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