Semiconductor process chemical solution storage container management system using short-range wireless communication

Abstract

A system for managing a chemical solution storage container for a semiconductor process using short-range wireless communication, according to the present invention, comprises: a chemical solution supply means for supplying a chemical solution stored in a chemical solution storage container in which a chemical solution for a semiconductor process is stored to a region in which the semiconductor process is performed, and generating a plurality of pieces of information relating to the chemical solution storage container; and a monitoring management unit that receives a plurality of pieces of information generated by the liquid medicine supply unit and determines an operation situation of the liquid medicine supply unit, the liquid medicine supply unit including: a nozzle attachment unit that is detachably provided in the liquid medicine storage container and includes a nozzle identification tag that stores nozzle-related information of the corresponding liquid medicine storage container; a container placement unit which is provided so that the liquid medicine storage container can be placed on the inside thereof, and which acquires container placement information and container-related information; and a nozzle information acquisition unit that acquires nozzle-related information from the nozzle identification tag by short-range wireless communication and transmits the nozzle-related information to the container placement unit side.

Description

Technical Field

[0001] The present invention relates to a semiconductor process chemical liquid storage container management system, and more particularly, to a system that can utilize short-range wireless communication to more effectively manage and monitor semiconductor process chemical liquid storage containers. Background Art

[0002] Generally, the photolithography process includes a process of coating a photoresist on a wafer that has undergone a series of semiconductor manufacturing processes in advance, by placing the wafer on a spin chuck of a coating device.

[0003] The photoresist includes a resin, an inhibitor that is a photosensitizer activated by light, and a solvent in a liquid state.

[0004] Moreover, when contained in a container made of a glass bottle, the photoresist can be supplied to a photoresist supply line through a photoresist supply tube (Teflon tube) combined with the container cover, and the photoresist supplied by the photoresist supply line can be supplied to a coating device via multiple valves and intermediate tanks.

[0005] Furthermore, in the photolithography process, in order to fill an accurate amount of photoresist into a container, it is necessary to confirm the concentration, contamination, and other quality requirements of the photoresist. After the photoresist is filled in the container, the container containing the photoresist is connected to a liquid supply device provided in the semiconductor manufacturing equipment.

[0006] However, in the process of setting up such containers, the following situations may also occur: due to mistakes made by the staff, the covers are mixed up and installed in another container by mistake, or the container is not placed in the correct position.

[0007] In this case, of course, a very large loss will occur as the entire process performed in the corresponding equipment is interrupted, and there may also be a situation where the previously manufactured product needs to be discarded because the chemical solution is not properly supplied.

[0008] Therefore, a method is needed to solve these problems.

[0009] Prior art literature

[0010] Patent Literature

[0011] Patent Document 0001: Korean Publication Patent No. 10-2014-0047636 Summary of the invention

[0012] The present invention is proposed to solve the problems of the above-mentioned prior art. The purpose of the present invention is to grasp the moving path of the chemical liquid storage container for storing the chemical liquid used in the semiconductor process and prevent the mixing of nozzles. On the other hand, by automatically judging the shelf life and whether the chemical liquid storage container is discarded, the semiconductor process management can be effectively performed.

[0013] The problems of the present invention are not limited to the problems mentioned above, and ordinary technicians in the technical field to which the present invention belongs can clearly understand other problems not mentioned through the following description.

[0014] In order to achieve the above-mentioned purpose, the semiconductor process chemical liquid storage container management system using short-range wireless communication of the present invention includes: a chemical liquid supply component, which supplies the chemical liquid contained in the chemical liquid storage container to the area where the semiconductor process is performed, and generates multiple information related to the above-mentioned chemical liquid storage container, wherein the above-mentioned chemical liquid storage container contains chemical liquid for semiconductor process; and a monitoring management unit, which receives multiple information generated by the above-mentioned chemical liquid supply component to judge the operation status of the above-mentioned chemical liquid supply component, wherein the above-mentioned chemical liquid supply component includes: a nozzle installation unit, which is detachably arranged on the above-mentioned chemical liquid storage container, including a nozzle identification label, and the above-mentioned nozzle identification label stores nozzle-related information of the corresponding chemical liquid storage container; a container placement unit, which is arranged in a manner that enables the above-mentioned chemical liquid storage container to be placed inside, and obtains container placement information and container-related information, wherein the above-mentioned container placement information indicates whether the above-mentioned chemical liquid storage container is placed or not, and the above-mentioned container-related information is obtained from the container identification label pre-installed on the above-mentioned chemical liquid storage container through short-range wireless communication; and a nozzle information acquisition unit, which obtains the above-mentioned nozzle-related information from the above-mentioned nozzle identification label through short-range wireless communication and transmits it to the above-mentioned container placement unit side.

[0015] In this case, the nozzle mounting unit includes: a first nozzle mounting portion, which surrounds at least a portion of the above-mentioned liquid medicine storage container and has the above-mentioned nozzle identification label formed thereon; and a second nozzle mounting portion, which is combined with the above-mentioned first nozzle mounting portion in a form surrounding the remaining periphery of the above-mentioned liquid medicine storage container.

[0016] Moreover, the above-mentioned container placement unit may include: a container holder, which has a placement space formed inside for placing the above-mentioned liquid medicine storage container; and a communication board, which is formed on the above-mentioned container holder, generates container placement information based on identifying whether the above-mentioned liquid medicine storage container is located in the above-mentioned placement space, obtains the above-mentioned container-related information and the above-mentioned nozzle-related information and transmits them to the above-mentioned monitoring and management unit.

[0017] Furthermore, the nozzle information acquisition unit may include: an identification antenna for identifying the nozzle identification tag and acquiring the nozzle related information, and transmitting the nozzle related information to the container placement unit; and a fixing bracket for fixing the identification antenna.

[0018] On the other hand, the above-mentioned liquid medicine supply component may also include a mounting frame, in which the plurality of nozzle information acquisition units and the plurality of container placement units are matched with each other 1:1, and the above-mentioned liquid medicine supply component can introduce a plurality of liquid medicine storage containers.

[0019] Furthermore, the present invention may further include a gateway, which distinguishes the container placement information, the container-related information and the nozzle-related information obtained from the multiple nozzle information acquisition units and the multiple container placement units and transmits them separately to the monitoring management unit, and distinguishes the wireless communication host protocol information generated by the monitoring management unit and transmits it separately to the multiple nozzle information acquisition units and the multiple container placement units.

[0020] At the same time, the present invention may also include an autonomous detection terminal, which receives the container placement information and monitors the current status and error occurrence of the process of loading or unloading the liquid medicine storage container to or from the container placement unit.

[0021] In this case, the autonomous detection terminal may include an alarm unit that receives the container placement information to generate an alarm during the process of loading or unloading the liquid medicine storage container to or from the container placement unit.

[0022] Furthermore, the present invention may further include a sound-generating device. When the monitoring and management unit determines that a preset error occurs in the liquid medicine supply assembly, the sound-generating device reproduces sound and sounds an alarm through the control instructions of the monitoring and management unit.

[0023] The semiconductor process chemical liquid storage container management system using short-range wireless communication of the present invention for solving the above-mentioned problems has the following advantages. As the monitoring and management unit receives and uses nozzle-related information, container placement information and container-related information respectively generated from the nozzle installation unit installed on the chemical liquid storage container and the container placement unit on which the chemical liquid storage container is placed and collected through short-range wireless communication, semiconductor process management can be effectively performed.

[0024] In particular, in the present invention, the monitoring and management department can grasp the moving path of the liquid medicine storage container and prevent the mixing of nozzle covers. On the other hand, with the automatic judgment of the shelf life and whether the liquid medicine storage container is discarded, the cause of process failure is fundamentally eliminated, and the overall cost is greatly reduced and productivity is improved during the process operation.

[0025] The effects of the present invention are not limited to the effects mentioned above, and a person skilled in the art can clearly understand other effects not mentioned through the description of the scope of protection claimed in the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a diagram showing the state of a wafer processing apparatus using the semiconductor process chemical solution storage container management system according to the first embodiment of the present invention.

[0027] Figure 2 It is a diagram showing the state of the chemical liquid supply unit in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0028] Figure 3 The diagram shows a state where a chemical liquid storage container is placed in a chemical liquid supply module in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0029] Figure 4 It is a diagram showing the structure of the nozzle mounting unit in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0030] Figure 5 It is a diagram showing the structure of the nozzle information acquisition unit in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0031] Figure 6 It is a diagram showing the structure of a container placement unit in the semiconductor process chemical solution storage container management system according to the first embodiment of the present invention.

[0032] Figure 7 This is a diagram schematically showing the overall structural elements of the semiconductor process chemical storage container management system according to the first embodiment of the present invention and the data flow between these structural elements.

[0033] Figure 8 and Fig. 9 It is a diagram showing the structure of a nozzle information acquisition unit in a semiconductor process chemical liquid storage container management system according to a second embodiment of the present invention.

[0034] Fig.10 and Fig.11 It is a diagram showing a process of placing a chemical liquid storage container in a chemical liquid supply module in a semiconductor process chemical liquid storage container management system according to a second embodiment of the present invention.

[0035] Fig.12 It is a diagram showing the structure of a container rotating unit in a semiconductor process chemical solution storage container management system according to a third embodiment of the present invention. DETAILED DESCRIPTION

[0036] In this specification, when a structural element (or region, layer, part, etc.) is mentioned as being "on", "connected" or "combined with" another structural element, this means that the structural element can be directly configured / connected / combined with another structural element, or a third structural element can be configured between them.

[0037] The same reference numerals may refer to the same structural elements. In addition, in the drawings, the thickness, ratio, and size of the structural elements are exaggerated in order to effectively explain the technical contents.

[0038] "And / or" includes more than one combination that can be defined by the related constructions.

[0039] The terms first, second, etc. may be used to describe various structural elements, but the above structural elements should not be limited to the above terms. The above terms are only used to distinguish one structural element from another structural element. For example, without departing from the scope of the invention, the first structural element may be referred to as the second structural element, and similarly, the second structural element may also be referred to as the first structural element. Unless clearly indicated in the context, the expression in the singular includes the expression in the plural.

[0040] In order to explain the relationship between the structures shown in the drawings, terms such as "below", "lower side", "above", and "upper side" are used. The above terms may be relative concepts and are explained based on the directions shown in the drawings.

[0041] Unless otherwise defined, all terms (including technical terms and scientific terms) used in this specification have the same meanings as those commonly understood by ordinary technicians in the technical field to which the present invention belongs. In addition, terms defined in commonly used dictionaries may be interpreted as having the same meaning as the contextual meaning in the relevant technical field, unless they are interpreted as having an ideal or overly formal meaning, otherwise they are clearly defined in this article.

[0042] The terms "including" or "having" are used to specify the existence of features, numbers, steps, operations, structural elements, components or their combinations recorded in the specification, and should not be understood as excluding the existence or additional possibilities of one or more other features, numbers, steps, operations, structural elements, components or their combinations.

[0043] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0044] Figure 1 1 is a diagram showing a state of a wafer processing apparatus 1 using the semiconductor process chemical solution storage container management system according to the first embodiment of the present invention.

[0045] like Figure 1As shown, the wafer processing apparatus 1 may include various structural elements for processing wafers.

[0046] For example, the wafer processing device 1 may include multiple process areas, and the multiple process areas include various processing processes such as wafer cutting, grinding, etching, and coating.

[0047] Among them, in this embodiment, the wafer processing device 1 may include a process area for coating (Coating) photoresist (Photoresist) on the wafer. Therefore, one or more liquid supply components 100 may be formed in the wafer processing device 1, and the above-mentioned liquid supply components 100 are used to supply liquids such as photoresist to the wafer.

[0048] Moreover, a monitoring management unit 200 may be formed in the wafer processing device 1. The monitoring management unit 200 and the liquid supply component 100 together determine the operation status of the liquid supply component 100. The liquid supply component 100 and the monitoring management unit 200 together constitute a liquid storage container management system for semiconductor processes.

[0049] Hereinafter, the semiconductor process chemical solution storage container management system of the present invention will be described in detail.

[0050] Figure 2 FIG. 2 is a diagram showing the state of the chemical liquid supply unit 100 in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention. Figure 3 1 is a diagram showing a state where a chemical liquid storage container 10 is placed in a chemical liquid supply unit 100 in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0051] like Figure 2 and Figure 3 As shown, in this embodiment, the liquid medicine supply component 100 serves to supply the liquid medicine contained in the liquid medicine storage container 10 to the area where the semiconductor process is performed. In detail, it includes a nozzle installation unit 120, a container placement unit 130, a nozzle information acquisition unit 140 and a mounting frame 110.

[0052] In this embodiment, the drug liquid storage container 10 includes: a drug liquid storage body 11, which contains drug liquid; and a nozzle cover 12, which is formed on the upper part of the drug liquid storage body 11 in a detachable manner, and serves to supply the drug liquid contained in the drug liquid storage body 11 to the process area.

[0053] The nozzle mounting unit 120 is detachably mounted on the liquid medicine storage container 10 , and includes a nozzle identification label storing information related to the nozzle of the corresponding liquid medicine storage container 10 .

[0054] Furthermore, in the present embodiment, although the nozzle mounting unit 120 is mounted adjacent to the nozzle cover 12 of the liquid medicine storage container 10 , this is not limited to the present embodiment.

[0055] The container placement unit 130 is arranged in a manner that enables the medicine liquid storage container 10 to be placed inside, and obtains container placement information and container-related information. The above-mentioned container placement information indicates whether the medicine liquid storage container 10 is placed or not. The above-mentioned container-related information is obtained from the container identification tag 13 pre-installed on the medicine liquid storage container 10 through short-range wireless communication.

[0056] In this embodiment, the container identification label 13 is formed on the liquid medicine storage body 11 of the liquid medicine storage container 10 , and the container placement unit 130 identifies the container identification label 13 of the liquid medicine storage container 10 placed inside.

[0057] In this case, the wireless communication method applicable to the container placement unit 130 and the container identification tag 13 may be radio frequency identification (RFID), but is not limited thereto, and various wireless communication methods such as Bluetooth, Zigbee, WiFi, and ultra-wideband (UWB) may also be applicable.

[0058] The nozzle information acquisition unit 140 plays a role of acquiring nozzle related information from the nozzle identification tag of the nozzle installation unit 120 through short-range wireless communication and transmitting it to the container placement unit 130 side.

[0059] In this embodiment, the wireless communication method applicable to the nozzle information acquisition unit 140 and the nozzle identification tag may also be radio frequency identification (RFID), and the various wireless communication methods listed above may also be applicable.

[0060] Furthermore, the data transmission process between the nozzle information acquisition unit 140 and the container placement unit 130 may also be any one of the wireless communication methods listed above, or may also be a wired communication method.

[0061] The mounting frame 110 provides a basic frame structure for mounting the container placement unit 130 and the nozzle information acquisition unit 140 .

[0062] In this embodiment, in the mounting frame 110 , the plurality of nozzle information acquiring units 140 and the plurality of container placement units 130 are matched with each other in a 1:1 manner, and the liquid medicine supply assembly 100 can introduce a plurality of liquid medicine storage containers 10 .

[0063] Also, the mounting frame 110 includes a lower frame 114 formed with a plurality of container setting areas separated from each other so that a plurality of container placement units 130 can be set; and an upper frame 111 connected to such lower frame 114 so that a plurality of nozzle information acquisition units 140 can be set.

[0064] In particular, in this embodiment, the lower frame 114 is symmetrical with respect to the upper frame 111 in multiple container installation areas, and in the upper frame 111 , multiple nozzle information acquisition units 140 are symmetrical.

[0065] However, the shape of the mounting frame 110 may be designed and modified into various shapes other than the present embodiment.

[0066] Hereinafter, the detailed structures of the nozzle installation unit 120 , the container placement unit 130 , and the nozzle information acquisition unit 140 will be described in more detail.

[0067] Figure 4 1 is a diagram showing the structure of the nozzle mounting unit 120 in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0068] like Figure 4 As shown, in this embodiment, the nozzle mounting unit 120 includes a first nozzle mounting portion 120a and a second nozzle mounting portion 120b.

[0069] The first nozzle mounting portion 120a surrounds at least a portion of the liquid medicine storage container 10 and is formed with a nozzle identification label 122. In this case, the nozzle identification label 122 may store nozzle related information, which is information related to the nozzle cover 12 of the corresponding liquid medicine storage container 10.

[0070] Also, the second nozzle mounting portion 120 b is coupled to the first nozzle mounting portion 120 a in a manner surrounding the remaining circumference of the chemical liquid storage container 10 .

[0071] That is, in the nozzle mounting unit 120 , the first nozzle mounting portion 120 a and the second nozzle mounting portion 120 b are detachably coupled to the liquid medicine storage container 10 .

[0072] Furthermore, in the present embodiment, the first nozzle mounting portion 120 a and the second nozzle mounting portion 120 b are installed adjacent to the nozzle cover 12 of the liquid medicine storage container 10 .

[0073] Moreover, in this embodiment, in detail, the first nozzle mounting portion 120a includes: a label mounting portion 121, formed with a nozzle identification label 122; and a first combining portion 123, which branches on both sides of the label mounting portion 121 and can be combined with the second nozzle mounting portion 120b.

[0074] In this case, a recessed placement groove 12a may be formed on the nozzle cover 12 side of the liquid medicine storage container 10, and a placement shoulder 124 may be formed on the first coupling portion 123 of the first nozzle mounting portion 120a, and the placement shoulder 124 is inserted into the placement groove 12a to improve the fixing force.

[0075] In detail, the second nozzle mounting portion 120b includes: a container tight fitting portion 125, which surrounds the remaining periphery of the liquid medicine storage container 10 on the other side of the first nozzle mounting portion 120a; and a second combining portion 126, which is arranged on both sides of such container tight fitting portion 125 and can be combined with the first nozzle mounting portion 120a.

[0076] Figure 5 1 is a diagram showing the structure of the nozzle information acquisition unit 140 in the semiconductor process chemical liquid storage container management system according to the first embodiment of the present invention.

[0077] like Figure 4 As shown, in this embodiment, the nozzle information acquisition unit 140 includes an identification antenna 141 and a fixing bracket 142 .

[0078] The recognition antenna 141 recognizes the nozzle recognition tag 121 of the nozzle installation unit 120 and acquires nozzle related information, and transmits the nozzle related information to the container placement unit 130 side.

[0079] Moreover, the fixing bracket 142 serves to fix the identification antenna 141 to the mounting frame 110 .

[0080] In this embodiment, the fixing bracket 142 includes: a rear surface fixing portion 143, which surrounds the rear surface of the identification antenna 141; a pair of guide portions 144, which extend forward on both sides of the rear surface fixing portion 143, and the first nozzle mounting portion 120a of the nozzle mounting unit 120 is located between the above-mentioned pair of guide portions 144; and a frame fastening portion 145, which extends from the lower end of the rear surface fixing portion 143 in a bent shape toward the rear and is fastened to the side of the mounting frame 110.

[0081] In this case, when the liquid medicine storage container 10 is placed on the container placement unit 130 , the pair of guides 144 guide the nozzle identification tag 121 provided on the first nozzle mounting portion 120 a of the nozzle mounting unit 120 to face the identification antenna 141 .

[0082] Furthermore, at least one of the pair of guide portions 144 is bent from the rear surface fixing portion 143 in a form surrounding a portion of the front surface of the identification antenna 141 , so that the identification antenna 141 can be stably fixed.

[0083] Also, the identification antenna 141 is in the form of a flat plate, and can be coupled to or separated from the upper side of the fixing bracket 142 .

[0084] Figure 6 1 is a diagram showing the structure of the container placement unit 130 in the semiconductor process chemical solution storage container management system according to the first embodiment of the present invention.

[0085] like Figure 6 As shown, in this embodiment, the container placement unit 130 includes a container bracket 131 and a communication board 133 .

[0086] The container holder 131 is formed with a placement space 132, and the liquid medicine storage container 10 is placed inside the placement space 132. In this embodiment, the container holder 131 is in a form surrounding the liquid medicine storage body 11 at the lower side of the integral liquid medicine storage container 10.

[0087] The communication board 133 is formed on the container holder 131, and its function is to generate container placement information according to whether the liquid medicine storage container 10 is located in the placement space 132, obtain container related information and nozzle related information and transmit them to the monitoring management unit 200 described later (refer to Figure 7 ).

[0088] In this case, the communication board 133 may include a container detection sensor 134 exposed to the placement space 132 side for detecting whether the liquid medicine storage container 10 is located in the placement space 132. The container detection sensor 134 may be any one of the known sensors for detecting front objects.

[0089] Furthermore, the communication board 133 may include an identification probe 135, which is exposed to the side of the placement space 132 and receives information from a container identification tag 13 (see FIG. 1 ) pre-installed in the liquid medicine storage container 10 through short-range wireless communication. Figure 3 ) to obtain container-related information.

[0090] At the same time, the communication board 133 can receive the nozzle related information obtained from the above-mentioned identification antenna 141.

[0091] That is, the communication board 133 collects container placement information, container-related information, and nozzle-related information, and transmits them to the monitoring management unit 200 described later.

[0092] Figure 7 This is a diagram schematically showing the overall structural elements of the semiconductor process chemical storage container management system according to the first embodiment of the present invention and the data flow between these structural elements.

[0093] like Figure 7As shown, the container placement unit 130 of the liquid medicine supply component 100 generates container placement information and container-related information from the liquid medicine storage container 10, and collects the nozzle-related information identified by the nozzle installation unit 120 by the nozzle information acquisition unit 140, and each such information is transmitted to the monitoring management unit 200 side.

[0094] In this embodiment, a plurality of liquid medicine storage containers 10 are formed in the liquid medicine supply assembly 100 , and therefore, container placement information, container-related information, and nozzle-related information corresponding to each liquid medicine storage container 10 can be generated and transmitted to the monitoring management unit 200 side.

[0095] Moreover, the monitoring management unit 200 can determine the operation status of the liquid medicine supply assembly 100 by receiving container placement information, container-related information, and nozzle-related information. All data processed by the monitoring management unit 200 can be stored on the operation server 600.

[0096] In addition, the semiconductor process chemical liquid storage container management system of this embodiment may further include a gateway 400 , an autonomous detection terminal 300 , and a sound generating device 500 .

[0097] The function of the gateway 400 is to distinguish between multiple container placement information, container-related information and nozzle-related information and transmit them separately to the monitoring management unit 200 during the process of transmitting data from the container placement unit 130 to the monitoring management unit 200, and to distinguish between the wireless communication host protocol information generated by the monitoring management unit 200 and transmit it separately to multiple nozzle information acquisition units 140 and multiple container placement units 130.

[0098] The autonomous detection terminal 300 receives the container placement information and monitors the status and error occurrence of the process of loading or unloading the liquid medicine storage container 10 into or from the container placement unit 130 .

[0099] In this case, the autonomous detection terminal 300 may include an alarm part which receives the container placement information to generate an alarm through sound or light during the process of loading or unloading the medical liquid storage container 10 to or from the container placement unit 130 .

[0100] When the monitoring management unit 200 determines that a preset error occurs in the drug solution supply assembly 100 , the sound generating device 500 plays a role of reproducing sound and sounding an alarm through the control command of the monitoring management unit 100 .

[0101] To this end, the sound generating device 500 of this embodiment may include: an amplifier 510 for amplifying sound signals; and a speaker 520 for reproducing sound.

[0102] As described above, in the semiconductor process chemical liquid storage container management system of the present invention, as the monitoring management unit 200 can receive and use nozzle-related information, container placement information, and container-related information generated from the nozzle installation unit 120 installed on the chemical liquid storage container 10 and the container placement unit 130 on which the chemical liquid storage container 10 is placed and collected through short-range wireless communication, semiconductor process management can be effectively performed.

[0103] In particular, in the present invention, the monitoring management unit 200 can grasp the moving path of the liquid medicine storage container 10 and prevent the mixing of the nozzle cover 12. On the other hand, by automatically determining the shelf life and whether the liquid medicine storage container 10 is discarded, the cause of process failure is fundamentally eliminated, thereby greatly reducing the overall cost and improving productivity during the process operation.

[0104] Hereinafter, another embodiment of the present invention will be described. In this case, in each embodiment described below, repeated description of the same structural elements as those of the first embodiment will be omitted.

[0105] Figure 8 and Fig. 9 1 is a diagram showing the structure of the nozzle information acquisition unit 140 in the semiconductor process chemical liquid storage container management system according to the second embodiment of the present invention.

[0106] exist Figure 8 and Fig. 9 In the second embodiment of the present invention shown, as in the first embodiment, the nozzle information acquisition unit 140 includes an identification antenna 141 and a fixing bracket 142 , and the fixing bracket 142 includes a rear surface fixing portion 143 , a pair of guide portions 144 and a frame fastening portion 145 .

[0107] Furthermore, the nozzle information acquisition unit 140 of the present embodiment is characterized in that it may further include a sliding module 146 , and the sliding module 146 is used to horizontally move the fixed bracket 142 within a specified range.

[0108] Specifically, in this embodiment, the frame fastening portion 145 of the fixed bracket 142 is fixed to the upper side of the mounting portion 112, and the mounting portion 112 is arranged on the upper frame 111 of the mounting frame 110. In this case, a connecting gap 113 can be formed in the mounting portion 112 in a manner extending in the transverse direction.

[0109] In this case, the sliding module 146 is formed at the lower side of the mounting portion 112 and is connected to the fixing bracket 142 through the connecting gap 113 .

[0110] Moreover, in this embodiment, the sliding module 146 may include a sliding component 147 , an elastic component 149 and a fixing component 148 .

[0111] At least a portion of the sliding member 147 passes through the connection gap 113 and is connected to the frame fastening portion 145 of the fixing bracket 142 located on the upper side of the mounting portion 112. Therefore, the sliding member 147 and the fixing bracket 142 can move horizontally along the length direction of the connection gap 113.

[0112] Furthermore, a pair of elastic members 149 are disposed on both sides of the sliding member 147 .

[0113] Furthermore, a pair of fixing members 148 may be provided and formed at the lower portions of both sides of the frame fastening portion 145 of the fixing bracket 142, so that the pair of fixing members 148 may fix the outer sides of the elastic members 149, and the above-mentioned fixed elastic members 149 are located in respectively corresponding directions.

[0114] On the other hand, Fig. 9 As shown, in this embodiment, a pair of guide portions 144 of the fixing bracket 142 are in a state where a portion of the upper portion is inclined and gradually expand outward from the lower portion to the upper portion.

[0115] According to the configuration of nozzle information acquisition unit 140 of this embodiment, the process of placing liquid medicine storage container 10 in liquid medicine supply assembly 100 can be performed as follows.

[0116] Fig.10 and Fig.11 1 is a diagram showing a process of placing a chemical liquid storage container 10 in a chemical liquid supply module 100 in a semiconductor process chemical liquid storage container management system according to a second embodiment of the present invention.

[0117] like Fig.10 and Fig.11 As shown, during the process of placing the liquid medicine storage container 10 in the liquid medicine supply assembly 100, the liquid medicine storage container 10 may be introduced in a slightly rotated state due to a worker's mistake or an error / error of the equipment. In this state, the nozzle identification label 122 formed on the nozzle mounting unit 120 is in a twisted state instead of directly facing the direction of the nozzle information acquisition unit 140, so there is a possibility that the recognition rate may be reduced or remain in an unrecognizable state.

[0118] However, as described above, in the nozzle information acquisition unit 140 of the present embodiment, a portion of the upper portion of a pair of guide portions 144 is in an inclined state and is in a form that gradually expands outward from the lower portion toward the upper portion. Therefore, when the liquid medicine storage container 10 is introduced in a slightly rotated state, the label mounting portion 121 can contact the inclined surface of the guide portion 144.

[0119] Therefore, if Fig.11As shown in part (a) of FIG. 1 , the fixing bracket 142 of the nozzle information acquiring unit 140 moves horizontally toward the direction where the guide portion 144 is located, and the guide portion 144 contacts the label mounting portion 121 .

[0120] In this process, among the pair of elastic members 149 provided on the sliding module 146 , the elastic member 149 located on the horizontal movement direction side of the fixing bracket 142 is compressed as the sliding member 147 moves, while the elastic member 149 located on the other side is stretched.

[0121] Afterwards, if Fig.11 As shown in part (b) of FIG. 1 , in a state where the drug solution supply assembly 100 is completely introduced, the drug solution storage container 10 uses the restoring force of the pair of elastic members 149 to move the fixing bracket 142 back to its initial position.

[0122] Moreover, during this process, the side guide portion 144 can push the label mounting portion 121 of the nozzle mounting unit 120, so that the liquid storage container 10 will rotate as a whole, thereby correcting the position of the nozzle identification label 122 in a manner directly facing the direction of the nozzle information acquisition unit 140, and the above-mentioned nozzle identification label 122 is formed on the nozzle mounting unit 120.

[0123] In this case, when the sliding member 147 is located at the center, the pair of elastic members 149 provided on the pair of sliding modules 146 may be in a state where the tensile force and the compressive force are balanced.

[0124] Therefore, when the sliding member 147 moves horizontally in either direction, the sliding member 147 may receive a restoring force from both of the pair of elastic members 149 and apply a stronger pressing force to the nozzle mounting unit 120 .

[0125] Fig.12 1 is a diagram showing the structure of a container rotating unit 150 in a semiconductor process chemical solution storage container management system according to a third embodiment of the present invention.

[0126] exist Fig.12 In the third embodiment of the present embodiment shown, the premise is that the structural elements are the same as those of the second embodiment as a whole, and the liquid medicine supply assembly 100 further includes a container rotating unit 150.

[0127] The container rotating unit 150 is located at the lower portion of the container placement unit 130 and plays a role in supporting the lower portion of the medical solution storage container 10 .

[0128] Specifically, in this embodiment, the container rotating unit 150 includes: a base portion 151 formed in a fixed state; and a rotating portion 152 that can rotate relative to the base portion 151 with the center point as a reference, and is used to support the liquid medicine storage container 10.

[0129] In this case, the rotation axis R of the rotating portion 152 is consistent with the central axis of the liquid medicine storage container 10, so that during the process of correcting the position of the nozzle identification label 122, the liquid medicine storage container 10 can be smoothly rotated by minimizing the friction force applied to the liquid medicine storage container 10.

[0130] In particular, in this embodiment, in order to smoothly supply the medicine, the medicine storage container 10 can be fixed to the medicine supply assembly 100 with the center axis slightly tilted from the ground. Therefore, the rotation axis R of the rotating part 152 can also be in a state of being tilted at the same angle θ relative to the horizontal line H.

[0131] Moreover, for this purpose, the lower surface of the base portion 151 can be parallel to the horizontal line H and in contact with the ground, and the upper surface can be inclined vertically relative to the rotation axis R of the rotating portion 152, so that the rotating portion 152 can rotate smoothly.

[0132] As shown above, the preferred embodiments of the present invention are described. In addition to the above embodiments, the present invention can be embodied in other specific forms without departing from the subject matter or scope of the present invention, which is obvious to those skilled in the art of the present invention. Therefore, the above embodiments should be understood to be illustrative rather than restrictive, and thus, the present invention is not limited to the above description, and can also be changed within the scope of the invention and its equivalent scope.

Claims

1. A semiconductor process chemical storage container management system, characterized in that: include: A chemical liquid supply component supplies a chemical liquid contained in a chemical liquid storage container to an area where a semiconductor process is performed, and generates a plurality of information related to the chemical liquid storage container, wherein the chemical liquid storage container contains the chemical liquid used in the semiconductor process; and The monitoring management unit receives a plurality of information generated by the above-mentioned liquid medicine supply component to determine the operation status of the above-mentioned liquid medicine supply component, The above-mentioned liquid medicine supply assembly comprises: A nozzle mounting unit is detachably mounted on the above-mentioned liquid medicine storage container, and includes a nozzle identification label, wherein the above-mentioned nozzle identification label stores information related to the nozzle of the corresponding liquid medicine storage container; a container placement unit, arranged in a manner that the above-mentioned liquid medicine storage container can be placed inside, and acquiring container placement information and container-related information, wherein the container placement information indicates whether the above-mentioned liquid medicine storage container is placed or not, and the above-mentioned container-related information is acquired from a container identification tag pre-installed on the above-mentioned liquid medicine storage container through short-range wireless communication; and The nozzle information acquisition unit acquires the nozzle related information from the nozzle identification tag through short-range wireless communication and transmits it to the container placement unit.

2. The semiconductor process chemical storage container management system according to claim 1, characterized in that: The nozzle installation unit comprises: A first nozzle mounting portion, surrounding at least a portion of the liquid medicine storage container, and having the nozzle identification label formed thereon; and The second nozzle mounting portion is coupled to the first nozzle mounting portion so as to surround the remaining circumference of the chemical solution storage container.

3. The semiconductor process chemical storage container management system according to claim 1, characterized in that: The container placement unit comprises: A container holder having a placement space formed therein for placing the above-mentioned liquid medicine storage container; and The communication board is formed on the above-mentioned container bracket, generates container placement information based on identifying whether the above-mentioned liquid medicine storage container is located in the above-mentioned placement space, obtains the above-mentioned container-related information and the above-mentioned nozzle-related information and transmits them to the above-mentioned monitoring management unit.

4. The semiconductor process chemical storage container management system according to claim 1, characterized in that: The nozzle information acquisition unit includes: An identification antenna identifies the nozzle identification tag and obtains the nozzle related information, and transmits the nozzle related information to the container placement unit; and The fixing bracket is used to fix the above identification antenna.

5. The semiconductor process chemical storage container management system according to claim 1, characterized in that: The above-mentioned liquid medicine supply assembly also includes a mounting frame, In the above-mentioned installation frame, the plurality of the above-mentioned nozzle information acquisition units and the plurality of the above-mentioned container placement units are matched with each other in a 1:1 ratio. The above-mentioned liquid medicine supply assembly can introduce a plurality of liquid medicine storage containers.

6. The semiconductor process chemical storage container management system according to claim 5, characterized in that: It also includes a gateway, which distinguishes the container placement information, the container-related information and the nozzle-related information obtained from the multiple nozzle information acquisition units and the multiple container placement units and transmits them separately to the monitoring management unit, and distinguishes the wireless communication host protocol information generated by the monitoring management unit and transmits it separately to the multiple nozzle information acquisition units and the multiple container placement units.

7. The semiconductor process chemical storage container management system according to claim 1, characterized in that: It also includes an autonomous detection terminal, which receives the container placement information and monitors the current status and error occurrence of the process of loading the liquid medicine storage container into the container placement unit or unloading it from the container placement unit.

8. The semiconductor process chemical storage container management system according to claim 7, characterized in that: The autonomous detection terminal includes an alarm unit, which receives the container placement information to generate an alarm during the process of loading or unloading the liquid medicine storage container to or from the container placement unit.

9. The semiconductor process chemical liquid storage container management system according to claim 1, characterized in that: It also includes a sound-generating device. When the monitoring and management unit determines that a preset error occurs in the liquid medicine supply component, the sound-generating device reproduces sound and sounds an alarm through the control instructions of the monitoring and management unit.

Images