Clamping device, ion beam shaping equipment and processing method

Abstract

The invention relates to the technical field of optical lens machining, in particular to a clamping device, ion beam shaping equipment and a machining method.The clamping device comprises a base and a clamping assembly, the base is provided with an installation station, the installation station is used for containing a lens to be machined, the base is provided with a plurality of guide rails, and the guide rails are arranged on the base. The guide rail is arranged in the radial direction of the center of the mounting station, the multiple clamping assemblies are arranged on the guide rail in a one-to-one correspondence mode, each clamping assembly comprises a sliding block, a telescopic unit, a rotating unit and a supporting plate, the sliding blocks are in sliding connection with the guide rail, and the telescopic units are arranged on the sliding blocks. The fixed part of the telescopic unit is fixedly connected with the sliding block, the rotating unit is arranged on the telescopic part of the telescopic unit, and the supporting plate is arranged on the rotating part of the rotating unit. The problem that the clamping device shields the surface of the workpiece and influences the final machining precision is solved, and the machining precision of ion beam shaping can be guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of optical lens processing, and in particular to a clamping device, ion beam shaping equipment and a processing method. Background Art

[0002] The manufacturing technology of high-precision complex optical curved mirrors is one of the core key technologies of high-performance optical systems. The working principle of this technology is to bombard the optical surface with a high-energy ion beam emitted by an ion source in a vacuum environment, and remove atomic-level materials through the physical sputtering effect. This method can achieve nanometer-level manufacturing accuracy and is considered to be one of the most accurate optical processing methods currently.

[0003] In ion beam shaping technology, the two mainstream forms are inverted and horizontal. Regarding the inverted processing method, the workpiece surface is faced downward for processing. The advantage of this processing method is that when processing large-diameter workpieces, the deformation of the workpiece due to the influence of gravity is small, thereby improving the processing accuracy. However, larger-diameter optical components are usually larger in mass and different in shape, and the workpiece needs to be hung upside down above the ion source. This undoubtedly increases the difficulty of loading and unloading the workpiece. In addition, the workpiece clamping device will block the surface of the workpiece. During the ion beam processing, the ion source cannot process the blocked area of ​​the workpiece, which affects the final processing accuracy. Summary of the invention The technical problem to be solved by the present invention is to solve one or more technical problems existing in the prior art and at least provide a beneficial choice or create conditions.

[0004] The solution of the present invention to its technical problem is: a clamping device, including a base and a clamping assembly, the base is provided with an installation station, the installation station is used to place the lens to be processed, the base is provided with a guide rail, the guide rail is provided in plurality, the guide rail is radially arranged along the center of the installation station, the clamping assembly is provided in plurality, each of the clamping assemblies is arranged on the guide rail in a one-to-one correspondence, the clamping assembly includes a slider, a telescopic unit, a rotating unit and a support plate, the slider is slidably connected to the guide rail, the fixed part of the telescopic unit is fixedly connected to the slider, the rotating unit is arranged on the telescopic part of the telescopic unit, the support plate is arranged on the rotating part of the rotating unit, and the support plate is used to support the lens installed at the installation station.

[0005] The beneficial effect of the present invention is that when the ion source needs to scan a specific area, the corresponding clamping assembly will extend the telescopic unit to drive the support plate to rotate, so that the support plate leaves and moves away from the lens surface and no longer supports the lens surface. In this case, the lens is mainly supported by other clamping assemblies, thereby avoiding movement. When the ion source completes the processing of the surface of the area, the clamping assembly will automatically reset and return to the initial state. This method effectively avoids the problem of the workpiece clamping device blocking the workpiece surface, thereby affecting the final processing accuracy. Through this design, the processing accuracy of the ion beam shaping can be ensured, thereby improving the overall processing quality and efficiency.

[0006] As a further improvement of the above technical solution, the clamping assembly further includes a first rubber pad, which is arranged on a surface of the support plate close to the base.

[0007] As a further improved beneficial effect of the above technical solution, the first rubber pad can effectively fix the lens surface to prevent the device from sliding or shifting during use. The soft material of the rubber pad can also play an anti-scratch role, protecting the lens surface from damage, thereby increasing the service life of the device and improving the user experience, so that it can remain stable and safe in various working environments.

[0008] As a further improvement of the above technical solution, the clamping assembly further includes a second rubber pad, and the second rubber pad is arranged on a surface of the sliding block close to the installation station.

[0009] As a further improvement of the above technical solution, by adding a second rubber pad to the slider, the side surface can be effectively fixed to prevent sliding or displacement during operation. The softness and elasticity of the rubber pad can play a role in anti-slip and anti-scratch. It can not only protect the surface of the clamped workpiece from damage, but also extend the service life of the clamping component itself, and improve the overall work efficiency and safety.

[0010] As a further improvement of the above technical solution, the installation station is configured in a circular shape.

[0011] As a further improvement of the above technical solution, due to the circular symmetry, it is more convenient to position and fix the lens, thereby improving the processing accuracy. The layout of the circular workstation makes the movement path of the equipment more reasonable, reducing the moving distance of the robot arm or other automated equipment during the processing, thereby improving production efficiency.

[0012] As a further improvement of the above technical solution, the installation station is configured as a rectangle.

[0013] As a further improvement of the above technical solution, the setting of the rectangular station can adapt to lenses of various shapes, such as elliptical, rectangular, stadium-shaped, rounded rectangular and other special lenses. The scope of application of the equipment has been significantly expanded, enabling it to meet more types of needs. The versatility of the equipment has been improved, bringing significant economic benefits and convenience in operation.

[0014] As a further improvement of the above technical solution, a buffer assembly is provided on the installation station, and the buffer assembly includes a mounting plate and a buffer device. The buffer device is arranged between the mounting plate and the base, and the buffer device is used to buffer the up and down movement of the mounting plate.

[0015] As a beneficial effect of further improvement of the above technical solution, the vibration and pressure caused by movement impact during the installation process are effectively reduced, thereby achieving the purpose of protecting the lens. This not only improves the safety of the production process, but also improves the quality stability of the product, thereby providing users with a more reliable and safe use experience.

[0016] As a further improvement of the above technical solution, the buffer device includes a plurality of driving screws and a plurality of springs, the driving screws correspond to the springs one by one, the mounting plate is fixed to the base through the driving screws, the spring is sleeved on the driving screws, one end of the spring is connected to the mounting plate, and the other end of the spring is connected to the base.

[0017] As a further improvement of the above technical solution, the mounting plate is fixedly connected to the base by a plug screw, thereby achieving a stable connection between the mounting plate and the base. Each spring is sleeved on its corresponding plug screw, forming a unique buffer structure to reduce damage caused by vibration or impact. The spring can produce appropriate elastic deformation when subjected to external force, thereby playing a role in buffering and shock absorption. It can not only effectively absorb and disperse external forces, but also ensure a stable connection between the mounting plate and the base, thereby improving the stability and reliability of the overall equipment.

[0018] As a further improvement of the above technical solution, a plurality of positioning holes are provided on the base, all of which penetrate through the thickness of the base, and the positioning holes are used to install and position the base on the main body of the ion beam shaping device.

[0019] As a beneficial effect of further improvement of the above technical solution, through the setting of the positioning holes, the installation process of the base becomes simpler and more stable, and the base is removed and replaced from the device body, thereby improving the maintainability of the device and the replaceability of components. The device can adapt to lenses of more shapes, and when the base is worn or damaged, the user can quickly replace the base with a new one without the need for complicated repairs or replacements of the entire device, thereby saving time and cost.

[0020] An ion beam shaping device comprises the clamping device as described in any one of the above items, wherein the clamping device is arranged on the ion beam shaping device body.

[0021] The beneficial effects of the present invention are: providing an ion beam shaping workpiece clamping device suitable for inverted processing, which can effectively solve many problems faced by large-aperture optical elements in the clamping process, such as difficult clamping, inconvenient loading and unloading, and the clamping device blocking the workpiece surface, thereby affecting the final processing accuracy. Through the implementation of the present invention, the processing efficiency and accuracy of large-aperture optical elements can be significantly improved, the processing quality can be ensured, and the needs of high-precision optical element manufacturing can be met.

[0022] An ion beam shaping processing method, using the ion beam shaping device as described above, the ion beam shaping processing method specifically comprises the following steps: S1, according to the size and shape of the lens, a suitable base is installed on the main body of the ion beam shaping device, and the clamping assembly is slidably connected to the guide rail. In the following steps, the number of the clamping assemblies and the guide rail is set to 4, and the clamping assemblies are called clamping assembly A, clamping assembly B, clamping assembly C and clamping assembly D; S2, inputting the structural parameters of the lens to be processed into a computer, and the computer calculates the coordinates of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D according to the size of the lens; S3, placing the lens to be processed on the installation station, starting the four clamping assemblies, moving the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D to the coordinates specified by the computer, and then rotating the support plates of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D to below the lens, and each of the telescopic units drives the support plate to move upward to fit with the surface of the lens, so that the clamping assembly completes the clamping of the lens; S4, generating ion beam processing code, including importing the surface shape data of the lens to be processed, analyzing the removal function characteristics, calculating the dwell time and planning the ion source scanning path; S5, inputting the ion source scanning path into the control systems of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D; S6, perform ion beam shaping, the ion source polishes the lens surface along the planned scanning path, when the ion source is about to move to the vicinity of the coordinates of the clamping assembly A, the telescopic unit of the clamping assembly A is extended, the support plate of the clamping assembly A is no longer in contact with the lens surface, and then the rotating unit of the clamping assembly A rotates, driving the support plate of the clamping assembly A to move away from the lens surface, at this time the support plate of the clamping assembly A no longer supports the lens, the lens is supported by the three clamping assemblies of the clamping assembly B, the clamping assembly C and the clamping assembly D, the clamping assembly A no longer blocks the lens surface, when the ion source is about to move away from the vicinity of the coordinates of the clamping assembly A, the rotating unit of the clamping assembly A rotates, the telescopic unit of the clamping assembly A contracts, driving the support plate of the clamping assembly A to reset; S7, similarly, when the ion source is to be moved to the vicinity of the coordinates of clamping assembly B, clamping assembly C and clamping assembly D, clamping assembly B, clamping assembly C and clamping assembly D are respectively moved away according to the movement mode of clamping assembly A in S6, without blocking the lens, and at the same time the other three clamping assemblies keep the lens clamped and fixed.

[0023] S8, after the ion beam scanning is completed, the lens is supported at the bottom, and the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D are controlled to return to the origin, and the lens is removed, and the processing is completed.

[0024] The beneficial effect of the present invention is that by adopting this method, full-aperture ion beam shaping of optical lenses can be achieved. The method is easy to operate and has high positioning accuracy during loading and unloading, which makes it particularly suitable for clamping and loading and unloading of large-aperture optical lenses. In addition, since the workpiece clamping device does not block the workpiece surface during the clamping process, it can ensure that the surface quality of the lens finally processed is higher, thereby achieving higher processing accuracy. The application of this technology not only improves production efficiency, but also significantly improves the overall performance and quality of optical lenses. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is one of the structural schematic diagrams of a preferred embodiment of the clamping device in the present invention; Figure 2 is a cross-sectional view of the clamping device of the present invention; Figure 3 This is a second structural schematic diagram of a preferred embodiment of the clamping device of the present invention; Figure 4 It is a schematic diagram of the movement trajectory of the ion source during the ion beam processing of the present invention.

[0026] In the accompanying drawings: 1-base, 101-installation station, 102-guide rail, 2-clamping assembly, 201-slider, 202-telescopic unit, 203-rotation unit, 204-support plate, 3-first rubber pad, 4-second rubber pad, 5-buffer assembly, 501-plug screw, 502-spring, 6-positioning hole. DETAILED DESCRIPTION

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the above briefly describes the drawings required for use in the description of the embodiments. Obviously, the drawings described are only part of the embodiments of the present invention, not all of the embodiments, and those skilled in the art can also obtain other design solutions and drawings based on these drawings without creative work.

[0028] The following will clearly and completely describe the concept, specific structure and technical effects of the present invention in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the present invention. In addition, all the connection / connection relationships mentioned in the text do not refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the present invention can be combined interchangeably without conflicting with each other.

[0029] The manufacturing technology of high-precision complex optical curved mirrors is one of the core key technologies of high-performance optical systems. The working principle of this technology is to bombard the optical surface with a high-energy ion beam emitted by an ion source in a vacuum environment, and remove atomic-level materials through the physical sputtering effect. This method can achieve nanometer-level manufacturing accuracy and is considered to be one of the most accurate optical processing methods currently.

[0030] In ion beam shaping technology, the two mainstream forms are inverted and horizontal. Regarding the inverted processing method, the workpiece surface is faced downward for processing. The advantage of this processing method is that when processing large-diameter workpieces, the deformation of the workpiece due to the influence of gravity is small, thereby improving the processing accuracy. However, larger-diameter optical components are usually larger in mass and different in shape, and the workpiece needs to be hung upside down above the ion source. This undoubtedly increases the difficulty of loading and unloading the workpiece. In addition, the workpiece clamping device will block the surface of the workpiece. During the ion beam processing, the ion source cannot process the blocked area of ​​the workpiece, which affects the final processing accuracy.

[0031] To this end, a clamping device, referring to Figure 1-2, which includes a base 1 and a clamping assembly 2, wherein the base 1 is provided with an installation station 101, and the installation station 101 is used to place the lens to be processed, and the base 1 is provided with a guide rail 102, and the guide rail 102 is provided in plurality, and the guide rail 102 is radially arranged along the center of the installation station 101, and the clamping assembly 2 is provided in plurality, and each of the clamping assemblies 2 is arranged on the guide rail 102 in a one-to-one correspondence, and the clamping assembly 2 includes a slider 201, a telescopic unit 202, a rotating unit 203 and a supporting plate 204, the slider 201 is slidably connected to the guide rail 102, the fixed part of the telescopic unit 202 is fixedly connected to the slider 201, the rotating unit 203 is arranged on the telescopic part of the telescopic unit 202, and the supporting plate 204 is arranged on the rotating part of the rotating unit 203, and the supporting plate 204 is used to support the lens installed at the installation station 101.

[0032] When the ion source needs to scan a specific area, the corresponding clamping assembly 2 will extend the telescopic unit 202, so that the rotating unit 203 drives the support plate 204 to rotate, so that the support plate 204 leaves and moves away from the lens surface, and no longer supports the lens surface. In this case, the lens mainly relies on other clamping assemblies 2 for support, thereby avoiding movement. When the ion source completes the processing of the surface of the area, the clamping assembly 2 will automatically reset and return to the initial state. This method effectively avoids the problem of the workpiece clamping device blocking the workpiece surface, thereby affecting the final processing accuracy. Through this design, the processing accuracy of the ion beam shaping can be ensured, thereby improving the overall processing quality and efficiency.

[0033] Preferably, the slider 201 reciprocates on the guide rail 102 through a cylinder, and the cylinder can be replaced by a gear rack device, a linear motor, a hydraulic cylinder, etc.

[0034] In this embodiment, the number of the clamping assembly 2 and the guide rail 102 is set to 4. When the lens needs to be clamped, the lens to be processed is placed on the installation station 101, and the slider 201 moves axially toward the lens along the guide rail under the action of the cylinder. One side of the second rubber pad 4 on the slider 201 abuts against the side of the lens, all the rotating units 203 are started to rotate all the support plates 204 to the bottom of the lens, all the telescopic units 202 are started to drive all the support plates 204 to move upward, and the top surface of the first rubber pad 3 on the support plate 204 abuts against the surface of the lens to complete the fixation of the lens.

[0035] The surface of the lens is very fragile and can easily leave marks if you are not careful. Therefore, in one embodiment, the clamping assembly 2 further includes a first rubber pad 3, which is disposed on the surface of the support plate 204 close to the base 1. The first rubber pad 3 can effectively fix the surface of the lens to prevent the device from sliding or shifting during use. The soft material of the rubber pad can also prevent scratches, protect the surface of the lens from damage, increase the service life of the device, and improve the user experience, so that it can remain stable and safe in various working environments.

[0036] In the process of clamping the lens, the side of the lens may be scratched. Therefore, in one embodiment, the clamping assembly 2 also includes a second rubber pad 4, which is arranged on the surface of the slider 201 close to the installation station 101. By adding the second rubber pad 4 to the slider 201, the side can be effectively fixed to prevent sliding or displacement during operation. The softness and elasticity of the rubber pad can play an anti-slip and anti-scratch role. It can not only protect the surface of the clamped workpiece from damage, but also extend the service life of the clamping assembly 2 itself, and improve the overall work efficiency and safety.

[0037] Most lenses are circular in shape, which is not only beautiful but also has unique advantages in optical performance. Therefore, in one embodiment, the installation station 101 is set to be circular. Due to the symmetry of the circle, it is more convenient to position and fix the lens, thereby improving the processing accuracy. The layout of the circular station makes the movement path of the equipment more reasonable, reduces the moving distance of the robot arm or other automated equipment during the processing, thereby improving the production efficiency.

[0038] Due to the diversity of production requirements, in addition to the common round lenses, there are also lenses of various other shapes. These lenses may be designed into square, rectangular, elliptical or other irregular shapes according to specific application scenarios and functional requirements. Figure 3 , the installation station 101 is set in a rectangular shape. The setting of the rectangular station can adapt to lenses of various shapes, such as oval, rectangular, stadium-shaped, rounded rectangular and other special lenses. The scope of application of the equipment has been significantly expanded, so that it can meet more types of needs. The versatility of the equipment is improved, bringing significant economic benefits and convenience in operation.

[0039] In this embodiment, the number of the clamping assemblies 2 and the guide rails 102 is set to 6. When the lens needs to be clamped, the lens to be processed is placed on the installation station 101. The slider 201 moves axially toward the lens along the guide rail under the action of the cylinder. One side of the second rubber pad 4 on the slider 201 abuts against the side of the lens. All the rotating units 203 are started to rotate all the support plates 204 to the bottom of the lens. All the telescopic units 202 are started to drive all the support plates 204 to move upward. The top surface of the first rubber pad 3 on the support plate 204 abuts against the surface of the lens to complete the fixation of the lens.

[0040] During the installation of the lens, a certain force needs to be applied to the base 1 to ensure that the lens can be firmly fixed in the correct position. If this force is not controlled, it may be too large, causing the lens to be subjected to excessive pressure and eventually causing damage to the lens. Therefore, in one embodiment, a buffer assembly 5 is provided on the installation station 101, and the buffer assembly 5 includes a mounting plate and a buffer device. The buffer device is arranged between the mounting plate and the base 1, and the buffer device is used to buffer the up and down movement of the mounting plate. The vibration and pressure caused by the impact of movement during the installation process are effectively reduced, thereby achieving the purpose of protecting the lens, which not only improves the safety of the production process, but also improves the quality stability of the product, thereby providing users with a more reliable and safe use experience.

[0041] When the device is subjected to vibration or impact, the spring 502 can produce appropriate elastic deformation, absorb and disperse these external forces, and reduce their damage to the workpiece. Therefore, in one embodiment, the buffer device includes a plurality of plug screws 501 and a plurality of springs 502, the plug screws 501 correspond to the springs 502 one by one, the mounting plate is fixed to the base 1 through the plug screws 501, the spring 502 is sleeved on the plug screws 501, one end of the spring 502 is connected to the mounting plate, and the other end of the spring 502 is connected to the base 1. The mounting plate is fixedly connected to the base 1 through the plug screws 501, thereby achieving a stable combination between the mounting plate and the base 1. Each spring 502 is sleeved on its corresponding plug screw 501, forming a unique buffer structure to reduce damage caused by vibration or impact. The spring 502 can produce appropriate elastic deformation when subjected to external force, thereby playing a role of buffering and shock absorption. It can not only effectively absorb and disperse external forces, but also ensure a firm connection between the mounting plate and the base 1, thereby improving the stability and reliability of the overall equipment.

[0042] During the processing of different lenses, the base 1 needs to be replaced so that it can adapt to various types of lenses. Therefore, in one embodiment, a plurality of positioning holes 6 are provided on the base 1, and all of the positioning holes 6 penetrate the thickness of the base 1, and the positioning holes 6 are used to install and position the base 1 on the main body of the ion beam shaping device. By providing the positioning holes 6, the installation process of the base 1 becomes simpler and more stable, and the base 1 is disassembled and replaced from the main body of the device, thereby improving the maintainability of the device and the replaceability of components. The device can adapt to lenses of more shapes. When the base 1 is worn or damaged, the user can quickly replace the new base 1 without complicated repairs or replacements of the entire device, thereby saving time and cost.

[0043] An ion beam shaping device comprises the clamping device as described in any one of the above items, wherein the clamping device is arranged on the ion beam shaping device body.

[0044] An ion beam shaping workpiece clamping device suitable for inverted processing is provided, which can effectively solve many problems faced by large-aperture optical elements in the clamping process, such as difficult clamping, inconvenient loading and unloading, and the clamping device blocking the workpiece surface, thereby affecting the final processing accuracy. Through the implementation of the present invention, the processing efficiency and accuracy of large-aperture optical elements can be significantly improved, the processing quality can be ensured, and the needs of high-precision optical element manufacturing can be met.

[0045] An ion beam shaping processing method, using the ion beam shaping device as described above, referring to Figure 1-Figure 4 In this embodiment, the number of the clamping assembly 2 and the guide rail 102 is set to 4, and the ion beam shaping processing method specifically includes the following steps: S1, according to the size and shape of the lens, a suitable base 1 is installed on the main body of the ion beam shaping device, the clamping assembly 2 is slidably connected to the guide rail 102, and the four clamping assemblies 2 are respectively called clamping assembly A, clamping assembly B, clamping assembly C and clamping assembly D; S2, inputting the structural parameters of the lens to be processed into a computer, and the computer calculates the coordinates of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D according to the size of the lens; S3, placing the lens to be processed on the installation station 101, starting the four clamping assemblies 2, the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D are moved to the coordinates specified by the computer, and then the support plates 204 of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D are rotated to the bottom of the lens, and each of the telescopic units 202 drives the support plate 204 to move upward to fit with the surface of the lens, so that the clamping assembly 2 completes the clamping of the lens; S4, generating ion beam processing code, including importing the surface shape data of the lens to be processed, analyzing the removal function characteristics, calculating the dwell time and planning the ion source scanning path; S5, inputting the ion source scanning path into the control systems of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D; S6, perform ion beam shaping, the ion source polishes the lens surface along the planned scanning path, when the ion source is about to move to the vicinity of the coordinates of the clamping assembly A, the telescopic unit 202 of the clamping assembly A is extended, the support plate 204 of the clamping assembly A is no longer in contact with the lens surface, and then the rotating unit 203 of the clamping assembly A rotates, driving the support plate 204 of the clamping assembly A to move away from the lens surface, at this time, the support plate 204 of the clamping assembly A no longer supports the lens, the lens is supported by the three clamping assemblies 2 of the clamping assembly B, the clamping assembly C and the clamping assembly D, and the clamping assembly A no longer blocks the lens surface, when the ion source is about to move away from the vicinity of the coordinates of the clamping assembly A, the rotating unit 203 of the clamping assembly A rotates, the telescopic unit 202 of the clamping assembly A contracts, driving the support plate 204 of the clamping assembly A to reset; S7, similarly, when the ion source is to be moved to the vicinity of the coordinates of clamping assembly B, clamping assembly C and clamping assembly D, clamping assembly B, clamping assembly C and clamping assembly D are respectively moved away according to the movement mode of clamping assembly A in S6, without blocking the lens, and at the same time, the other three clamping assemblies 2 keep the lens clamped and fixed.

[0046] S8, after the ion beam scanning is completed, the lens is supported at the bottom, and the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D are controlled to return to the origin, and the lens is removed, and the processing is completed.

[0047] By adopting this method, full-aperture ion beam shaping of optical lenses can be achieved. This method is easy to operate and has high positioning accuracy during loading and unloading, which makes it particularly suitable for clamping and loading and unloading large-aperture optical lenses. In addition, since the workpiece clamping device does not block the workpiece surface during the clamping process, it can ensure that the surface quality of the final processed lens is higher, thereby achieving higher processing accuracy. The application of this technology not only improves production efficiency, but also significantly improves the overall performance and quality of optical lenses. In this embodiment, the number of the clamping assembly 2 and the guide rail 102 is set to 4. When the lens needs to be clamped, the lens to be processed is placed on the installation station 101, and the slider 201 moves axially toward the lens along the guide rail under the action of the cylinder. One side of the second rubber pad 4 on the slider 201 abuts against the side of the lens, all the rotating units 203 are started to rotate all the support plates 204 to the bottom of the lens, all the telescopic units 202 are started to drive all the support plates 204 to move upward, and the top surface of the first rubber pad 3 on the support plate 204 abuts against the surface of the lens to complete the fixation of the lens.

[0048] When shaping the ion beam, the ion source Figure 4 The ion source moves along the moving trajectory shown. When the ion source is about to move to the vicinity of the coordinates of the clamping assembly A, the telescopic unit 202 of the clamping assembly A will extend, so that the support plate 204 is separated from the lens surface. Subsequently, the rotating unit 203 of the clamping assembly A starts to rotate, guiding the support plate 204 to move away from the lens surface. At this time, the support plate 204 no longer supports the lens, but the lens is held up by the clamping assemblies B, C and D together. Therefore, the clamping assembly A no longer blocks the lens surface. When the ion source is ready to leave the coordinate area of ​​the clamping assembly A, the rotating unit 203 of the clamping assembly A will rotate again, and the telescopic unit 202 will shrink, so that the support plate 204 returns to its original position; accordingly, when the ion source needs to move to the vicinity of the coordinates of the clamping assembly B, the clamping assembly C and the clamping assembly D, the clamping assembly B, the clamping assembly C and the clamping assembly D will move according to the above-mentioned movement mode of the clamping assembly A to ensure that the lens will not be blocked. At the same time, the other three clamping assemblies continue to maintain the clamping and fixing state of the lens. This technology realizes the full-aperture ion beam shaping of the lens and provides an innovative method for clamping optical lenses. The loading and unloading process of this technology is simple and the positioning is precise. It is especially suitable for clamping and loading and unloading of large-aperture optical lenses. Since the workpiece clamping device will not block the workpiece surface, it can ensure that the final processing accuracy is improved.

[0049] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A clamping device, characterized in that: include: A base (1), wherein an installation station (101) is provided on the base (1), wherein the installation station (101) is used to place a lens to be processed, and wherein a guide rail (102) is provided on the base (1), wherein a plurality of guide rails (102) are provided, and wherein the guide rails (102) are radially arranged toward the center of the installation station (101); A clamping assembly (2), wherein a plurality of the clamping assemblies (2) are provided, each of the clamping assemblies (2) being arranged on the guide rail (102) in a one-to-one correspondence, the clamping assembly (2) comprising a slider (201), a telescopic unit (202), a rotating unit (203) and a support plate (204), the slider (201) being slidably connected to the guide rail (102), the fixed portion of the telescopic unit (202) being fixedly connected to the slider (201), the rotating unit (203) being arranged on the telescopic portion of the telescopic unit (202), the supporting plate (204) being arranged on the rotating portion of the rotating unit (203), and the supporting plate (204) being used to support a lens installed at the installation station (101).

2. A clamping device according to claim 1, characterized in that: The clamping assembly (2) further comprises a first rubber pad (3), wherein the first rubber pad (3) is arranged on a surface of the support plate (204) close to the base (1).

3. A clamping device according to claim 1, characterized in that: The clamping assembly (2) further comprises a second rubber pad (4), wherein the second rubber pad (4) is arranged on a surface of the sliding block (201) close to the installation station (101).

4. A clamping device according to claim 1, characterized in that: The installation station (101) is arranged in a circular shape.

5. A clamping device according to claim 1, characterized in that: The installation station (101) is configured in a rectangular shape.

6. A clamping device according to claim 1, characterized in that: The installation station (101) is provided with a buffer assembly (5), the buffer assembly (5) comprising a mounting plate and a buffer device, the buffer device being arranged between the mounting plate and the base (1), the buffer device being used to buffer the up and down movement of the mounting plate.

7. A clamping device according to claim 6, characterized in that: The buffer device comprises a plurality of driving screws (501) and a plurality of springs (502), wherein the driving screws (501) correspond to the springs (502) one by one, the mounting plate is fixed to the base (1) via the driving screws (501), the springs (502) are sleeved on the driving screws (501), one end of the spring (502) is connected to the mounting plate, and the other end of the spring (502) is connected to the base (1).

8. A clamping device according to claim 1, characterized in that: The base (1) is provided with a plurality of positioning holes (6), all of the positioning holes (6) penetrate the thickness of the base (1), and the positioning holes (6) are used to install and position the base (1) on the main body of the ion beam shaping device.

9. An ion beam shaping device, characterized in that: It comprises the clamping device according to any one of claims 1 to 8, wherein the clamping device is arranged on the ion beam shaping equipment body.

10. An ion beam shaping method, characterized in that: Using the ion beam shaping device as claimed in claim 9, the ion beam shaping processing method specifically comprises the following steps: S1, according to the size and shape of the lens, a suitable base (1) is mounted on the main body of the ion beam shaping device, the clamping assembly (2) is slidably connected to the guide rail (102), the number of the clamping assemblies (2) and the guide rail (102) in the following steps is set to 4, and the clamping assemblies (2) are referred to as clamping assembly A, clamping assembly B, clamping assembly C and clamping assembly D; S2, inputting the structural parameters of the lens to be processed into a computer, and the computer calculates the coordinates of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D according to the size of the lens; S3, placing the lens to be processed on the installation station (101), starting the four clamping assemblies (2), moving the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D to the coordinates specified by the computer, and then rotating the support plates (204) of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D to the bottom of the lens, and each of the telescopic units (202) drives the support plate (204) to move upwards to fit with the surface of the lens, so that the clamping assembly (2) completes the clamping of the lens; S4, generating ion beam processing code, including importing the surface shape data of the lens to be processed, analyzing the removal function characteristics, calculating the dwell time and planning the ion source scanning path; S5, inputting the ion source scanning path into the control systems of the clamping assembly A, the clamping assembly B, the clamping assembly C and the clamping assembly D; S6, performing ion beam shaping, the ion source polishes the lens surface along the planned scanning path, when the ion source is about to move to the vicinity of the coordinates of the clamping component A, the telescopic unit (202) of the clamping component A is extended, the support plate (204) of the clamping component A is no longer in contact with the lens surface, and then the rotating unit (203) of the clamping component A rotates, driving the support plate (204) of the clamping component A to move away from the lens surface, at this time the support plate (204) of the clamping component A no longer supports the lens, the lens is supported by the three clamping components (2) of the clamping component B, the clamping component C and the clamping component D, and the clamping component A no longer blocks the lens surface, when the ion source is about to move away from the vicinity of the coordinates of the clamping component A, the rotating unit (203) of the clamping component A rotates, the telescopic unit (202) of the clamping component A contracts, driving the support plate (204) of the clamping component A to reset; S7, similarly, when the ion source is to be moved to the vicinity of the coordinates of the clamping assembly B, the clamping assembly C and the clamping assembly D, the clamping assembly B, the clamping assembly C and the clamping assembly D are respectively moved away according to the movement mode of the clamping assembly A in S6, without blocking the lens, and at the same time, the other three clamping assemblies (2) keep the lens clamped and fixed; S8, after the ion beam scanning is completed, the lens is supported at the bottom, and the clamping components A, B, C and D are controlled to return to the origin, and the lens is removed, and the processing is completed.

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