Dual-mass gyroscope structure

Abstract

The invention provides a dual-mass gyroscope structure which comprises a substrate, two substructures, a driving coupling mechanism and a detection coupling mechanism, and the two substructures are connected through the driving coupling mechanism and the detection coupling mechanism; the driving coupling mechanism comprises a driving coupling straight beam and a plurality of driving coupling oblique beams, one ends of the driving coupling oblique beams are connected to the driving coupling straight beam, and the other ends of the driving coupling oblique beams are connected with the substructures. The design that the two sub-structures are coupled in the first direction in the mode of driving the coupling straight beam and the driving coupling oblique beam is adopted, so that a driving interference mode is far away from a working mode, and the environmental adaptability of the gyroscope is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of inertial sensors, and in particular relates to a dual-mass gyroscope structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single-, dual-, and three-axis combinations. Accelerometers are used to detect the acceleration signals of objects in the three independent axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. By measuring the angular velocity and acceleration of objects in three-dimensional space, they can accurately characterize the posture of the object and have very important application value in navigation.

[0003] In the existing dual-mass gyroscope structure, the coupling mode between the two mass blocks is generally an elastic beam connection, so that the movements of the two mass blocks are linked. This coupling mode between the two mass blocks causes the same-direction interference mode to appear before the reverse working mode. The existence of the same-direction interference mode is not conducive to improving the environmental adaptability of the gyroscope. Summary of the invention

[0004] The purpose of the present invention is to provide a dual-mass gyroscope structure, which can at least solve some of the defects existing in the prior art.

[0005] To achieve the above object, the present invention adopts the following technical solution:

[0006] A dual-mass gyroscope structure comprises a substrate, two substructures, a drive coupling mechanism and a detection coupling mechanism, wherein the two substructures are connected via the drive coupling mechanism and the detection coupling mechanism; the drive coupling mechanism comprises a drive coupling straight beam and a plurality of drive coupling inclined beams, wherein one end of the plurality of drive coupling inclined beams is connected to the drive coupling straight beam and the other end is connected to the substructure.

[0007] Furthermore, the drive coupling straight beam is a frame structure, the frame structure includes an upper horizontal section and a lower horizontal section, and a plurality of the drive coupling oblique beams are respectively connected to the upper horizontal section and the lower horizontal section.

[0008] Furthermore, the frame structure also includes a middle horizontal section, and the center of the middle horizontal section is anchored on the base through an anchor point.

[0009] Furthermore, the drive coupling straight beam and the drive coupling oblique beam are made of a material that is retractable, bendable and deformable.

[0010] Furthermore, the detection coupling mechanism comprises a detection coupling straight beam, and two ends of the detection coupling straight beam are respectively connected to the two substructures.

[0011] Furthermore, the substructure includes a sensitive mass block, a driving component and a detection component, wherein the driving component is connected to the sensitive mass block in a first direction, and is used to form a differential driving capacitor when the sensitive mass block moves in the first direction, and the detection component is connected to the sensitive mass block in a second direction, and is used to form a differential detection capacitor when the sensitive mass block moves in the second direction.

[0012] Furthermore, there are two detection coupling mechanisms, the two detection coupling mechanisms are respectively connected to the detection components of the two substructures, and the drive coupling mechanism is connected to the drive components of the two substructures.

[0013] Furthermore, the driving component includes a driving module, which is distributed in a first direction of the sensitive mass block and connected to the sensitive mass block by driving a vibration transfer beam, and the driving module close to the driving coupling mechanism is connected to the end of the driving coupling inclined beam; the detection component includes a detection module, which is distributed in a second direction of the sensitive mass block and connected to the sensitive mass block by a vibration decoupling elastic component, and adjacent detection modules located at the same end of the sensitive mass block along the second direction are connected by a truss component.

[0014] Furthermore, the truss assembly includes a V-shaped truss and a detection vibration transmission straight beam, one end of the detection vibration transmission straight beam is connected to the vertex of the V-shaped truss, and the other end is connected to the sensitive mass block through the vibration decoupling elastic component, and the two ends of the V-shaped truss are respectively connected to the adjacent detection modules.

[0015] Furthermore, the vibration decoupling elastic component includes a vibration decoupling straight beam and a U-shaped beam, both ends of the U-shaped beam are connected to the sensitive mass block, and the bottom center of the U-shaped beam is connected to the center of the vibration decoupling straight beam through a connecting beam.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] (1) The present invention adopts a driving coupling mechanism and a detection coupling mechanism to connect the two substructures, so that when the two substructures move in the first direction, the coupling design of the driving coupling straight beam and the driving coupling inclined beam can be utilized to make the driving interference mode away from the working mode, thereby improving the environmental adaptability of the gyroscope; at the same time, when the two substructures move in the second direction, the coupling design of the detection coupling mechanism can be utilized to make the detection work in the reverse mode, thereby eliminating the common mode error signal.

[0018] (2) The dual-mass gyroscope structure provided by the present invention adopts a plurality of comb teeth arrangement, so that the differential capacitance formed during the vibration is doubled, thereby increasing the capacitance detection signal and improving the capacitance signal detection sensitivity.

[0019] The present invention will be further described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of the dual-mass gyroscope structure of the present invention;

[0021] Figure 2 is a schematic diagram of the vibration of the sensitive mass block of the dual-mass gyroscope structure of the present invention along the first direction;

[0022] Figure 3 It is a schematic diagram of the vibration of the sensitive mass block of the dual-mass gyroscope structure of the present invention along the second direction.

[0023] Explanation of the reference numerals in the accompanying drawings: 1. substructure; 2. drive coupling mechanism; 3. detection coupling mechanism; 4. drive module; 5. detection module; 6. sensitive mass block; 7. truss assembly; 8. vibration decoupling elastic assembly; 9. drive vibration transfer beam; 10. detection vibration elastic member; 11. first drive vibration elastic member; 12. drive frame; 13. first movable comb teeth; 14. first fixed comb teeth; 15. detection frame; 16. second movable comb teeth; 17. second fixed comb teeth; 18. V-shaped truss; 19. detection vibration transfer straight beam; 20. drive coupling straight beam; 21. drive coupling oblique beam; 22. second drive vibration elastic member; 23. vibration decoupling straight beam; 24. connecting beam; 25. U-shaped beam. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features; in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0028] like Figure 1 , Figure 2 and Figure 3 As shown, this embodiment provides a dual-mass gyroscope structure, including two substructures 1, a driving coupling mechanism 2 and a detection coupling mechanism 3, wherein the two substructures 1 are connected through the driving coupling mechanism 2 and the detection coupling mechanism 3; the driving coupling mechanism 2 includes a driving coupling straight beam 20 and a plurality of driving coupling inclined beams 21, wherein one end of the plurality of driving coupling inclined beams 21 is connected to the driving coupling straight beam 20, and the other end is connected to the substructure 1. Specifically, the plurality of driving coupling inclined beams 21 are symmetrically distributed on both sides of the axis of the driving coupling straight beam 20, and the driving coupling inclined beams 21 on the same side of the driving coupling straight beam 20 are symmetrically arranged about the perpendicular midline of the driving coupling straight beam 20, wherein the driving coupling straight beam 20 and the driving coupling inclined beam 21 are both made of a material that can be stretched, bent and deformed, and can be stretched, bent and deformed when subjected to an applied force.

[0029] In this embodiment, when the substructures 1 at the left and right ends of the drive coupling mechanism 2 move in the same direction along the first direction, the drive coupling straight beam 20 thereof is simultaneously subjected to pressure and tension from the drive coupling oblique beam 21 on the same side thereof. Since the structures at the left and right ends of the drive coupling mechanism 2 are symmetrical, the pressure and tension are equal in magnitude and opposite in direction, and the resultant external force on the drive coupling straight beam 20 is zero, and the drive coupling straight beam 20 is in a static state, that is, the state of the same direction movement is suppressed; when the substructures 1 at the left and right ends of the drive coupling mechanism 2 move in the opposite direction along the first direction, the drive coupling straight beam 20 is subjected to tension from the drive coupling oblique beam 21, and the resultant external force on the drive coupling straight beam 20 is not zero, and the drive coupling straight beam 20 is in a movable state, that is, the reverse movement can be performed. This embodiment adopts the coupling connection design of the drive coupling straight beam 20 and the drive coupling oblique beam 21, so that when the two substructures 1 move in the first direction, the drive same direction interference mode thereof is effectively suppressed, and the same direction interference vibration frequency is much higher than the reverse working frequency, so that the drive interference mode of the dual-mass gyroscope structure is far away from the working mode, thereby improving the environmental adaptability of the gyroscope.

[0030] Specifically, Figure 1 and Figure 2 As shown, the drive coupling straight beam 20 is designed as a frame structure, and the frame structure includes an upper horizontal section and a lower horizontal section, and a plurality of the drive coupling oblique beams 21 are respectively connected to the upper horizontal section and the lower horizontal section. Further, the frame structure also includes an intermediate horizontal section, and the center of the intermediate horizontal section is anchored on the substrate through an anchor point. In some embodiments, four drive coupling oblique beams 21 are designed, and the four drive coupling oblique beams 21 are arranged in groups of two, symmetrically distributed on both sides of the drive coupling straight beam 20, and each group of two drive coupling oblique beams forms a V-shape, and the intersection point thereof is located at the center of the upper and lower horizontal sections of the drive coupling straight beam 20 frame, that is, one end of the upper two drive coupling oblique beams 21 of the drive coupling mechanism 2 is connected to the center of the upper horizontal section of the drive coupling straight beam 20, and the other ends of the upper two drive coupling oblique beams 21 are respectively connected to the upper parts of the two substructures 1, so that when the two substructures 1 move in the opposite direction along the first direction, for the drive coupling straight beams The center of the upper horizontal section of the driving coupling straight beam 20 is subjected to the upward pulling force of the two upper driving coupling inclined beams 21, so that the upper horizontal section of the driving coupling straight beam 20 is bent and deformed upward; and when the two substructures 1 move in the same direction along the first direction, the center of the upper horizontal section of the driving coupling straight beam 20 is subjected to the downward pressure of one of the driving coupling inclined beams 21 and the upward pulling force of the other driving coupling inclined beam 21, and the pressure and pulling force are equal in magnitude and opposite in direction, and the resultant external force at the center of the upper horizontal section of the driving coupling straight beam 20 is zero, so the upper horizontal section of the driving coupling straight beam 20 is in a static state, that is, the state of moving in the same direction is suppressed. Similarly, one end of the lower two driving coupling inclined beams 21 of the driving coupling mechanism 2 is connected to the center of the lower horizontal section of the driving coupling straight beam 20, and the other ends of the lower two driving coupling inclined beams 21 are respectively connected to the lower parts of the two substructures 1, and when the two substructures 1 vibrate in the first direction, the state of moving in the same direction of the lower horizontal section of the driving coupling straight beam 20 will be suppressed.

[0031] As a specific implementation, the substructure 1 includes a sensitive mass block 6, a driving component and a detection component, wherein the driving component is connected to the sensitive mass block 6 in a first direction, and is used to form a differential driving capacitor when the sensitive mass block 6 moves in the first direction, and the detection component is connected to the sensitive mass block 6 in a second direction, and is used to form a differential detection capacitor when the sensitive mass block 6 moves in the second direction. The first direction is the movement direction of the sensitive mass block 6 in the driving state, that is, Figure 1 The second direction is the left and right direction of the driving coupling mechanism 2, and the second direction is the movement direction of the sensitive mass block 6 in the detection state, that is, Figure 1 The middle driving coupling mechanism 2 moves in the up and down direction.

[0032] Optionally, there are two detection coupling mechanisms 3 , and the two detection coupling mechanisms 3 are respectively connected to two ends of the two substructures 1 , and the driving coupling mechanism 2 is connected to driving components of the two substructures 1 .

[0033] In a further detailed implementation, the driving assembly includes two driving modules 4, the two driving modules 4 are connected to the two ends of the sensitive mass block 6 respectively by driving the vibration transmission beam 9, the driving module 4 close to the driving coupling mechanism 2 is connected to the end of the driving coupling inclined beam 21, when the sensitive mass block 6 moves along the first direction, the two driving modules 4 on both sides of the sensitive mass block 6 are driven to move synchronously by driving the vibration transmission beam 9. The detection assembly includes four detection modules 5, the four detection modules 5 are arranged in pairs, symmetrically distributed on both sides of the sensitive mass block 6, and the two detection modules 5 on the same side are connected by a truss assembly 7, the four detection modules 5 are connected to the sensitive mass block 8 by a vibration decoupling elastic assembly 8, when the sensitive mass block 6 moves along the second direction, the four detection modules 5 are driven to move synchronously by the truss assembly 7 and the vibration decoupling elastic assembly 8. Among them, the two ends of the above-mentioned sensitive mass block 6 are the two ends of the sensitive mass block 6 in the first direction, and the two sides of the sensitive mass block 6 are the two ends of the sensitive mass block 6 in the second direction.

[0034] In some embodiments, the driving module 4 includes a driving frame 12 and at least one group of first movable comb teeth 13 and at least one group of first fixed comb teeth 14 arranged in the driving frame 12; the first movable comb teeth 13 and the first fixed comb teeth 14 correspond to each other, the first fixed comb teeth 14 are anchored on the substrate, the first movable comb teeth 13 are connected to the driving frame 12, and the driving frame 12 is connected to the sensitive mass block 6 by driving the vibration transfer beam 9. When the dual-mass gyroscope moves in the reverse direction along the first direction, as shown in FIG. Figure 2 As shown, for a substructure 1, a variable capacitor is formed between its first movable comb teeth 13 and the first fixed comb teeth 14. Since the first movable comb teeth 13 and the first fixed comb teeth 14 of the two driving modules 4 at the left and right ends of the sensitive mass block 6 are symmetrically distributed about the sensitive mass block 6, the capacitance values ​​at the left and right ends of the sensitive mass block 6 increase and decrease respectively, and the capacitances at the two ends are differentiated to form a differential capacitance, which increases the capacitance detection signal, thereby improving the capacitance signal detection sensitivity, and at the same time, the common mode error signal is differentially subtracted.

[0035] Preferably, the driving module 4 connected to the driving coupling inclined beam 21 is also anchored on the substrate through a second driving vibration elastic member 22, and the second driving vibration elastic member 22 can be extended and retracted along the first direction, for example, a vibration spring, a retractable and bendable U-shaped beam, etc. The second driving vibration elastic member 22 is provided to further ensure the stability of the driving module 4 moving along the first direction.

[0036] In some embodiments, the detection module 5 includes a detection frame 15, and at least one group of second movable comb teeth 16 and at least one group of second fixed comb teeth 17 arranged in the detection frame 15; the second movable comb teeth 16 and the second fixed comb teeth 17 correspond to each other, the second fixed comb teeth 17 are anchored on the substrate, the second movable comb teeth 16 are connected to the detection frame 15, and the detection frame 15 is connected to the sensitive mass block 6 through a vibration decoupling elastic component 8; and the detection frames 15 of the two detection modules 5 located at the same end of the sensitive mass block 6 along the second direction are connected through a truss component 7. When the dual-mass gyroscope moves along the second direction, as shown in FIG. Figure 3 As shown, for a substructure 1, due to the arrangement of the truss assembly 7 in the second direction, the second movable comb teeth 16 on the two detection frames 15 connected by the truss assembly 7 move in the opposite direction, for example Figure 3 When the left sensitive mass block 6 shown moves upward, the truss assembly 7 above it contracts and drives the two detection frames 15 connected thereto to move in opposite directions and approach each other. At the same time, the truss assembly 7 below the sensitive mass block 6 extends and pushes the two detection frames 15 connected thereto to move in opposite directions and away from each other. During this movement, a variable capacitor is formed between the second movable comb teeth 16 and the second fixed comb teeth 17. Since the left and right detection modules 5 connected to the same truss assembly 7 are symmetrically distributed, the capacitance values ​​at the left and right ends increase and decrease respectively, and the difference between the capacitances at the two ends forms a differential capacitance, thereby increasing the capacitance detection signal and at the same time subtracting the common mode error signal by difference.

[0037] Specifically, Figure 1 and Figure 3 As shown, the truss assembly 7 includes a V-shaped truss 18 and a detection vibration transmission straight beam 19, one end of the detection vibration transmission straight beam 19 is connected to the vertex of the V-shaped truss 18, and the other end of the detection vibration transmission straight beam 19 is connected to the sensitive mass block 6 through the vibration decoupling elastic assembly 8, and the two ends of the V-shaped truss 18 are respectively connected to the two detection modules 5. Among them, the V-shaped truss 18 and the detection vibration transmission straight beam 19 can be stretched, bent and deformed when subjected to a force. When the sensitive mass block 6 moves along the second direction, the detection vibration transmission straight beam 19 of the truss assembly 7 at one end thereof pushes the vertex of the V-shaped truss 18, so that the two free ends of the V-shaped truss 18 are close to each other, driving the two detection modules 5 connected thereto to move in the opposite direction; at the same time, the detection vibration transmission straight beam 19 of the truss assembly 7 at the other end pulls the vertex of the V-shaped truss 18, so that the two free ends of the V-shaped truss 18 are away from each other, and also drives the two detection modules 5 connected thereto to move in the opposite direction.

[0038] Specifically, the vibration decoupling elastic component 8 includes a vibration decoupling straight beam 23 and a U-shaped beam 25. The vibration decoupling straight beam 23 is located between the sensitive mass block 6 and the detection module 5. Both ends of the vibration decoupling straight beam 23 are anchored on the base. The opening of the U-shaped beam 25 faces the vibration decoupling straight beam 23. Both ends of the U-shaped beam 25 are connected to the sensitive mass block 6. The bottom center of the U-shaped beam 25 is connected to the center of the vibration decoupling straight beam 23 through a connecting beam 24. At the same time, the end of the detection vibration transmission straight beam 19 of the truss component 7 is connected to the center of the vibration decoupling straight beam 23. Wherein, the vibration decoupling straight beam 23 and the U-shaped beam 25 can be stretched, bent and deformed when subjected to force.

[0039] In an optimized implementation, the substructure 1 also includes a first driving vibration elastic member 11 for anchoring the driving module 4 on the substrate, and a detection vibration elastic member 10 for anchoring the detection module 5 on the substrate. Specifically, the first driving vibration elastic member 11 is connected to the driving module 4 on the side away from the driving coupling mechanism 2. The first driving vibration elastic member 11 can be extended and retracted along the first direction. For example, a vibration spring, a retractable and bendable U-shaped beam, etc. can be used. One end of the first driving vibration elastic member 11 is anchored on the substrate, and the other end is connected to the driving frame 12 of the driving module 4. The detection vibration elastic member 10 can also be a vibration spring, a retractable and bendable U-shaped beam, etc. Since the movement direction of the detection module 5 is along the first direction, the detection vibration elastic member 10 also extends and retracts along the first direction. One end of the detection vibration elastic member 10 is anchored on the substrate, and the other end is connected to the detection frame 15 of the detection module 5.

[0040] As a specific implementation, the detection coupling mechanism 3 includes a detection coupling straight beam, and the two ends of the detection coupling straight beam are respectively connected to the two substructures 1; specifically, the two ends of the detection coupling straight beam are respectively connected to the detection modules 5 of the two substructures 1. The two substructures 1 are coupled in the second direction by means of the detection coupling straight beam, so that the two detection modules 5 connected to the detection coupling straight beam move in opposite directions.

[0041] It should be noted that in the present invention, Figure 2 and Figure 3 The figure is a schematic diagram of the final state of the motion of the movable parts of the dual-mass gyroscope structure when it vibrates along the driving direction and the detection direction respectively. In order to reflect the motion effect, the movement displacement of the movable parts in the figure is exaggerated.

[0042] The above examples are merely illustrative of the present invention and do not constitute a limitation on the protection scope of the present invention. All designs that are the same or similar to the present invention fall within the protection scope of the present invention.

Claims

1. A dual-mass gyroscope structure, characterized in that: It includes a base, two substructures, a driving coupling mechanism and a detection coupling mechanism, wherein the two substructures are connected via the driving coupling mechanism and the detection coupling mechanism; the driving coupling mechanism includes a driving coupling straight beam and a plurality of driving coupling inclined beams, wherein one end of the plurality of driving coupling inclined beams is connected to the driving coupling straight beam, and the other end is connected to the substructure.

2. The dual-mass gyroscope structure according to claim 1, characterized in that: The driving coupling straight beam is a frame structure, and the frame structure includes an upper horizontal section and a lower horizontal section. A plurality of driving coupling oblique beams are respectively connected to the upper horizontal section and the lower horizontal section.

3. The dual-mass gyroscope structure according to claim 2, characterized in that: The frame structure further comprises a middle horizontal section, the center of which is anchored on the base via an anchor point.

4. The dual-mass gyroscope structure according to claim 1, characterized in that: The driving coupling straight beam and the driving coupling oblique beam are made of a material that can be stretched, bent and deformed.

5. The dual-mass gyroscope structure according to claim 1, characterized in that: The detection coupling mechanism comprises a detection coupling straight beam, and two ends of the detection coupling straight beam are respectively connected to the two substructures.

6. The dual-mass gyroscope structure according to claim 1, characterized in that: The substructure includes a sensitive mass block, a driving component and a detection component. The driving component is connected to the sensitive mass block in a first direction and is used to form a differential driving capacitor when the sensitive mass block moves in the first direction. The detection component is connected to the sensitive mass block in a second direction and is used to form a differential detection capacitor when the sensitive mass block moves in the second direction.

7. The dual-mass gyroscope structure according to claim 6, characterized in that: There are two detection coupling mechanisms, and the two detection coupling mechanisms are respectively connected to the detection components of the two substructures, and the drive coupling mechanism is connected to the drive components of the two substructures.

8. The dual-mass gyroscope structure according to claim 6, characterized in that: The driving component includes a driving module, which is distributed in a first direction of the sensitive mass block and connected to the sensitive mass block by driving a vibration transfer beam, and the driving module close to the driving coupling mechanism is connected to the end of the driving coupling inclined beam; the detection component includes a detection module, which is distributed in a second direction of the sensitive mass block and connected to the sensitive mass block by a vibration decoupling elastic component, and adjacent detection modules located at the same end of the sensitive mass block along the second direction are connected by a truss component.

9. The dual-mass gyroscope structure according to claim 8, characterized in that: The truss assembly includes a V-shaped truss and a detection vibration transmission straight beam, one end of the detection vibration transmission straight beam is connected to the vertex of the V-shaped truss, and the other end is connected to the sensitive mass block through the vibration decoupling elastic component, and the two ends of the V-shaped truss are respectively connected to the adjacent detection modules.

10. The dual-mass gyroscope structure according to claim 8, characterized in that: The vibration decoupling elastic component includes a vibration decoupling straight beam and a U-shaped beam, both ends of the U-shaped beam are connected to the sensitive mass block, and the bottom center of the U-shaped beam is connected to the center of the vibration decoupling straight beam through a connecting beam.

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