Direct writing imaging type exposure device

Abstract

The invention belongs to the technical field of photoetching machines, and discloses a direct-writing imaging type exposure device which is characterized in that a workbench assembly of the direct-writing imaging type exposure device comprises a base and a gantry mechanism fixedly connected to the base; the moving table assembly is arranged on the base, the suction cup mechanism is used for adsorbing an exposure plate, and the moving mechanism drives the suction cup mechanism to move in the first direction / or the second direction so that the exposure assembly can be aligned with the exposure plate; the flattening assembly is connected to the suction cup mechanism, the first pressing plate piece is movably connected to the suction cup mechanism and connected to the exposure plate in a pressing mode, the length of the first pressing plate piece extends in the second direction, and the first pressing plate piece is located on the rear side of the exposure area; when the movement mechanism drives the suction cup mechanism to move in the first direction to pass through the exposure area, the pressing plate driving mechanism drives the first pressing plate piece to move oppositely relative to the suction cup mechanism and unfold and press the exposure plate, and the first pressing plate piece is located on the rear side of the exposure area all the time. According to the invention, exposure and flattening can be carried out at the same time, the process duration of the exposure process is prevented from being increased, and the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography machines, and in particular to a direct-write imaging exposure device. Background Art

[0002] Laser direct imaging (LDI) exposure machine is a device used to manufacture printed circuit boards. It uses a laser beam to project a circuit pattern onto a photosensitive material to form a circuit board pattern. The LDI exposure machine has the characteristics of high precision, high speed and high efficiency, which can greatly improve the quality and production efficiency of circuit board manufacturing. Due to the limited focal depth of the lithography machine itself, the flatness requirements of the printed circuit board are relatively high.

[0003] The printed circuit board is fixed by suction with a vacuum suction cup. Due to the influence of multiple factors such as the suction force of the suction cup, the material of the printed circuit board itself and the packaging method, the printed circuit board is prone to bending and edge warping, which affects the effect of exposure imaging. Some existing exposure machines are equipped with a pressure plate bar that is fixed and pressed on the edges of the printed circuit board. The pressure plate bar cannot deeply touch the bend in the middle area of ​​the printed circuit board; some exposure machines move the pressure plate bar to flatten the printed circuit board before exposure, which increases the process time of the exposure process and affects production efficiency. Summary of the invention

[0004] The purpose of the present invention is to provide a direct-write imaging exposure device, which can solve the problem that the existing fixed pressure plate strip cannot deeply reach the bending of the middle area of ​​the printed circuit board, and the problem that flattening before exposing increases the process time of the exposure process and affects production efficiency.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] A direct-write imaging exposure device is provided, comprising an exposure component and an alignment component, wherein the projection of the exposure component in a vertical direction forms an exposure area, and the direct-write imaging exposure device further comprises:

[0007] A workbench assembly comprises a base and a gantry mechanism fixedly connected to the base, wherein the exposure assembly and the alignment assembly are both arranged on the gantry mechanism;

[0008] A moving stage assembly is arranged on the base, the moving stage assembly comprises a moving mechanism and a suction cup mechanism, the suction cup mechanism is movably connected to the moving mechanism, the suction cup mechanism is used to absorb the exposure board, the moving mechanism is communicatively connected to the alignment assembly, and the moving mechanism is configured to drive the suction cup mechanism to move along the first direction and / or the second direction so that the exposure assembly is aligned with the exposure board;

[0009] A flattening assembly connected to the suction cup mechanism, the flattening assembly comprising a first pressing plate and a pressing plate driving mechanism, the first pressing plate being movably connected to the suction cup mechanism and pressed against the upper surface of the exposure plate, the length of the first pressing plate extending along the second direction and being located at the rear side of the exposure area;

[0010] Among them, during the exposure process, when the moving mechanism drives the suction cup mechanism to move along the first direction to pass through the exposure area, the pressure plate driving mechanism drives the first pressure plate member to move toward each other relative to the suction cup mechanism and press the exposure plate, and the first pressure plate member is always located at the rear side of the exposure area, and the first direction, the second direction and the vertical direction are perpendicular to each other.

[0011] In one embodiment, the pressure plate driving mechanism includes a first driving member and a second driving member both arranged on the suction cup mechanism, the first driving member is used to drive the first pressure plate member to move along a first direction to reach a position for pressing the exposure plate, and the second driving member is used to drive the first pressure plate member to reciprocate along a vertical direction to abut against or move away from the exposure plate.

[0012] In one embodiment, the pressure plate driving mechanism further includes a transfer driving member, one end of the transfer driving member is connected to the output end of the first driving member, and the other end is connected to the first pressure plate member, and the second driving member is arranged on the transfer driving member and moves synchronously with the first pressure plate member;

[0013] Wherein, the first pressure plate component and the adapter driving component are movably connected via a connecting mechanism, and the connecting mechanism is configured to limit relative movement between the first pressure plate component and the adapter driving component along a first direction, and not to limit relative movement between the first pressure plate component and the adapter driving component along a vertical direction.

[0014] In one embodiment, the connecting mechanism includes a slide groove and a guide member that can be movably inserted into the slide groove along the vertical direction, and one of the first pressure plate member and the adapter drive member is provided with the slide groove, and the other is provided with the guide member.

[0015] In one embodiment, the first driving member comprises a first driving motor and a screw extending in a first direction, the screw is connected to a motor shaft of the first driving motor, and the adapter driving member is threadedly connected to the screw to move along the axial direction of the screw; and / or,

[0016] The flattening assembly further includes a guide rail member extending along a first direction, and the adapter drive member is slidably connected to the guide rail member.

[0017] In one embodiment, the pressure plate driving mechanism also includes an elastic buffer, one end of the elastic buffer is connected to the output end of the second driving member, and the other end is connected to the first pressure plate member, and the elastic buffer is configured to apply an elastic force to the first pressure plate member so that the first pressure plate member always has a tendency to move in a direction away from the suction cup mechanism.

[0018] In one embodiment, the first pressure plate member is a roller, and the roller is rotatably connected to the pressure plate driving mechanism around its own axis.

[0019] In one embodiment, the flattening assembly further comprises a roller bearing, wherein the roller bearing is connected to the platen driving mechanism, and the roller is sleeved on the outer side of the roller bearing; and / or,

[0020] The roller is an anti-sticking roller.

[0021] In one embodiment, the flattening assembly further comprises a second pressing plate member, the second pressing plate member and the first pressing plate member are parallel to each other, and the second pressing plate member is located at the front side of the exposure area; and / or,

[0022] The flattening assembly includes two groups of pressure plate driving mechanisms, which are respectively located on both sides of the suction cup mechanism and are respectively connected to both ends of the first pressure plate member to simultaneously drive the first pressure plate member to move.

[0023] Beneficial effects of the present invention:

[0024] In the direct-write imaging exposure device provided by the present invention, during the exposure process, the gantry mechanism remains stationary, and the motion mechanism drives the suction cup mechanism to move along the first direction to pass through the exposure area. The entire area of ​​the suction cup mechanism passes through the exposure area in sequence, thereby completing the exposure. In the above process, the suction cup mechanism starts to move from the exposure start position, passes through the exposure middle position, and stops moving at the exposure end position. While the suction cup mechanism moves along the first direction, the pressure plate driving mechanism drives the first pressure plate member to move toward the suction cup mechanism and press the exposure plate. As the first pressure plate member moves in the opposite direction of the first direction relative to the suction cup mechanism, the first pressure plate member can move and press on the upper surface of the exposure plate, reduce the bending of the exposure plate, and maintain the flatness of the exposure plate. Moreover, this relative movement enables the first pressure plate member to always be located at the rear side of the exposure area. The suction cup mechanism moves along a straight line with the motion mechanism, and the first pressure plate and the suction cup mechanism move toward each other, and finally the first pressure plate remains stationary relative to the gantry mechanism, so that it is always located at the rear side of the exposure area, ensuring that during the exposure process, the area to be exposed on the exposure board first undergoes the leveling action of the first pressure plate, and then enters the exposure area, realizing exposure and leveling at the same time, avoiding increasing the process time of the exposure process and improving production efficiency. Moreover, the first pressure plate will not block the exposure area, and the exposure board can achieve full-board exposure. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a schematic structural diagram of a direct writing imaging exposure device provided by an embodiment of the present invention at an exposure start position;

[0026] Figure 2 It is a schematic structural diagram of a direct writing imaging exposure device provided by an embodiment of the present invention at an exposure intermediate position;

[0027] Figure 3 is a schematic structural diagram of a direct writing imaging exposure device provided by an embodiment of the present invention at an exposure end position;

[0028] Figure 4 is a structural schematic diagram of a flattening assembly provided by an embodiment of the present invention when it is installed on a suction cup mechanism at one viewing angle;

[0029] Figure 5 is a structural schematic diagram of another viewing angle when the flattening assembly provided by an embodiment of the present invention is installed on a suction cup mechanism;

[0030] Figure 6 It is a schematic diagram of the structural disassembly of the flattening assembly and the suction cup mechanism provided in an embodiment of the present invention.

[0031] In the figure:

[0032] 1. Workbench assembly; 11. Base; 12. Gantry mechanism;

[0033] 2. Movement platform assembly; 21. Movement mechanism; 22. Suction cup mechanism;

[0034] 3. Flattening assembly; 31. First pressing plate; 32. Pressing plate driving mechanism; 321. First driving member; 3211. First driving motor; 3212. Screw rod; 322. Second driving member; 323. Transfer driving member; 324. Elastic buffer member; 3251. First slider; 3252. Second slider; 33. Connecting mechanism; 331. Slide; 332. Guide member; 34. Guide rail member; 341. First guide rail member; 342. Second guide rail member; 35. Roller bearing; 36. Second pressing plate member; 37. Fixed support member;

[0035] 100. Exposure component; 101. Exposure area. DETAILED DESCRIPTION

[0036] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0040] Laser direct imaging (LDI) exposure machine is a device used to manufacture printed circuit boards. It uses a laser beam to project a circuit pattern onto a photosensitive material to form a circuit board pattern. The LDI exposure machine has the characteristics of high precision, high speed and high efficiency, which can greatly improve the quality and production efficiency of circuit board manufacturing. Due to the limited focal depth of the lithography machine itself, the flatness requirements of the printed circuit board are relatively high.

[0041] The printed circuit board is fixed by suction with a vacuum suction cup. Due to the influence of multiple factors such as the suction force of the suction cup, the material of the printed circuit board itself and the packaging method, the printed circuit board is prone to bending and edge warping, which affects the effect of exposure imaging. Some existing exposure machines are equipped with a pressure plate bar that is fixed and pressed on the edges of the printed circuit board. The pressure plate bar cannot deeply touch the bend in the middle area of ​​the printed circuit board; some exposure machines move the pressure plate bar to flatten the printed circuit board before exposure, which increases the process time of the exposure process and affects production efficiency.

[0042] At the same time, the inventors have found through research that the LDI exposure machine is different from the traditional exposure machine. During the exposure process, the LDI exposure machine has a smaller scanning spot area. It only needs to ensure the flatness of the area near the spot. Synchronous scanning is performed during the exposure process, which improves the flatness of the printed circuit board without prolonging the exposure process time. Figures 1 to 6 As shown, the embodiment of the present invention first provides a direct writing imaging exposure device to solve the above problems.

[0043] The direct-writing imaging exposure device includes an exposure assembly 100 and an alignment assembly (not shown in the figure), and the projection of the exposure assembly 100 along the vertical direction forms an exposure area 101. The direct-writing imaging exposure device also includes a workbench assembly 1, a moving table assembly 2 and a flattening assembly 3. The workbench assembly 1 includes a base 11 and a gantry mechanism 12 fixedly connected to the base 11. The exposure assembly 100 and the alignment assembly are both arranged on the gantry mechanism 12. During the exposure process, the exposure assembly 100 does not need to move, thereby avoiding the vibration of the gantry mechanism 12 and affecting the exposure accuracy. Moreover, during the assembly process of the direct-writing imaging exposure device, the exposure assembly 100, the alignment assembly and the gantry mechanism 12 are pre-assembled, and the suction cup mechanism 22 and the flattening assembly 3 are pre-assembled. These two pre-assemblies can be performed separately, thereby improving the assembly efficiency of the overall structure.

[0044] The moving stage assembly 2 is arranged on the base 11. The moving stage assembly 2 includes a moving mechanism 21 and a suction cup mechanism 22. The suction cup mechanism 22 is movably connected to the moving mechanism 21. The suction cup mechanism 22 limits the position of the exposure board by vacuum adsorbing the exposure board (not shown in the figure). The moving mechanism 21 is communicatively connected to the alignment assembly. The moving mechanism 21 is configured to drive the suction cup mechanism 22 to move along the first direction and / or the second direction so that the exposure assembly 100 is aligned with the exposure board. The flattening assembly 3 is connected to the suction cup mechanism 22. The flattening assembly 3 includes a first pressing plate 31 and a pressing plate driving mechanism 32. The first pressing plate 31 is movably connected to the suction cup mechanism 22 and is pressed against the upper surface of the exposure board. The length of the first pressing plate 31 extends along the second direction and is located at the rear side of the exposure area 101, so that the first pressing plate 31 can be horizontally pressed on the entire exposure board along the width direction of the exposure board, and penetrate into the middle area of ​​the exposure board during the movement process, thereby reducing the problems of bending and bulging in the middle area of ​​the exposure board and ensuring the overall flatness of the exposure board.

[0045] In the exposure process, the gantry mechanism 12 remains stationary, and the motion mechanism 21 drives the suction cup mechanism 22 to move along the first direction to pass through the exposure area 101. The entire area of ​​the suction cup mechanism 22 passes through the exposure area 101 in sequence, thereby completing the exposure. In the above process, the suction cup mechanism 22 starts to move from the exposure start position, passes through the exposure middle position, and stops moving at the exposure end position. While the suction cup mechanism 22 moves along the first direction, the pressure plate driving mechanism 32 drives the first pressure plate member 31 to move relative to the suction cup mechanism 22 and press the exposure plate. As the first pressure plate member 31 moves in the opposite direction of the first direction relative to the suction cup mechanism 22, the first pressure plate member 31 can move and press on the upper surface of the exposure plate, reduce the bending of the exposure plate, and maintain the flatness of the exposure plate. Moreover, this relative movement enables the first pressure plate member 31 to always be located at the rear side of the exposure area 101. The suction cup mechanism 22 moves in a straight line with the motion mechanism 21, and the first pressure plate member 31 and the suction cup mechanism 22 move toward each other, and finally the first pressure plate member 31 remains stationary relative to the gantry mechanism 12, so that it is always located at the rear side of the exposure area 101, ensuring that during the exposure process, the area to be exposed on the exposure board first undergoes the leveling action of the first pressure plate member 31, and then enters the exposure area 101, realizing exposure and leveling at the same time, avoiding increasing the process time of the exposure process, and improving production efficiency. Moreover, the first pressure plate member 31 will not block the exposure area 101, and the exposure board can achieve full-board exposure.

[0046] It should be noted that the first direction, the second direction and the vertical direction are perpendicular to each other, the first direction is the length direction of the exposure board, the second direction is the width direction of the exposure board, and the rear side of the exposure area 101 is defined by the moving direction of the exposure board, that is, the direction in which the suction cup mechanism 22 drives the exposure board to move relative to the exposure area 101 is the front side. Figure 1 As shown in the figure, the direct writing imaging exposure device is in the exposure starting position, and the exposure area 101 is located on the front side of the exposure plate; with the movement of the suction cup mechanism 22 relative to the gantry mechanism 12, and the relative movement between the first pressure plate member 31 and the suction cup mechanism 22, the direct writing imaging exposure device is in the exposure starting position in sequence. Figure 2 The exposure middle position and Figure 3 The exposure end position in the exposure is completed. Figures 1 to 3 It can be seen that the first pressing plate member 31 remains stationary relative to the gantry mechanism 12 and is always located at the rear side of the exposure area 101 .

[0047] The specific structure and working principle of the exposure assembly 100, the motion mechanism 21, the alignment assembly and the suction cup mechanism 22 can be set with reference to the prior art. This is not the focus of this application and will not be described in detail in this embodiment.

[0048] The pressure plate driving mechanism 32 includes a first driving member 321 and a second driving member 322, both of which are arranged on the suction cup mechanism 22. The first driving member 321 is used to drive the first pressure plate member 31 to move back and forth in the first direction to press the exposure plate. After completing the flattening of the exposure plate once, it moves in the reverse direction to return to the exposure start position and wait for the next movement and flattening. The second driving member 322 is used to drive the first pressure plate member 31 to move back and forth in the vertical direction to abut against or away from the exposure plate. When the first pressure plate member 31 is away from the exposure plate, the suction cup mechanism 22 can be operated to load or remove the plate.

[0049] The platen driving mechanism 32 further includes a transfer driving member 323, one end of which is connected to the output end of the first driving member 321, and the other end is connected to the first platen member 31. The second driving member 322 is disposed on the transfer driving member 323 and moves synchronously with the first platen member 31. In this way, at any exposure position, the second driving member 322 can drive the first platen member 31 to move up and down.

[0050] The first platen component 31 and the transfer drive component 323 are movably connected via a connection mechanism 33, and the connection mechanism 33 is configured to limit the relative movement between the first platen component 31 and the transfer drive component 323 along the first direction, and does not limit the relative movement between the first platen component 31 and the transfer drive component 323 along the vertical direction. In this way, the transfer drive component 323 can drive the first platen component 31 to move along the first direction, and at the same time, when the second drive component 322 drives the first platen component 31 to move along the vertical direction, the connection between the transfer drive component 323 and the first platen component 31 will not limit the first platen component 31.

[0051] Specifically, the connecting mechanism 33 includes a slide groove 331 and a guide member 332 that can be movably inserted into the slide groove 331 in the vertical direction. One of the first platen member 31 and the transfer drive member 323 is provided with a slide groove 331, and the other is provided with a guide member 332. Exemplarily, the flattening assembly 3 also includes two fixed support members 37, and the two fixed support members 37 are supported at both ends of the first platen member 31. The fixed support member 37 is provided with a slide groove 331, and the transfer drive member 323 is provided with a guide member 332. Moreover, the fixed support member 37 is connected to the second drive member 322 to drive the first platen member 31 to reciprocate in the vertical direction. The length of the guide member 332 extends in the vertical direction. The transfer drive member 323 drives the fixed support member 37 and the first pressure plate member 31 to reciprocate along the first direction through the guide member 332. When the second drive member 322 moves the first pressure plate member 31 along the vertical direction through the fixed support member 37, the slide groove 331 and the guide member 332 move relative to each other, and the transfer drive member 323 will not hinder the movement of the fixed support member 37. Moreover, the insertion and matching of the slide groove 331 and the guide member 332 guides the movement of the first pressure plate member 31 along the vertical direction, and the first pressure plate member 31 will not be deflected, thereby ensuring the position accuracy of the first pressure plate member 31.

[0052] The vertical stroke of the first platen member 31 is relatively small, and the second driving member 322 may be a cylinder. In one embodiment, the platen driving mechanism 32 is further provided with a sensor (not shown in the figure), which is communicatively connected to the second driving member 322, and is used to detect the thickness of the exposure plate to adjust the stroke of the second driving member 322.

[0053] The first driving member 321 includes a first driving motor 3211 and a screw rod 3212 extending in the first direction, the screw rod 3212 is connected to the motor shaft of the first driving motor 3211, and the adapter driving member 323 is threadedly connected to the screw rod 3212 to move axially along the screw rod 3212. Since the exposure plate is long in the first direction, the control accuracy of the screw rod transmission structure is high, which is conducive to improving the position accuracy of the first pressing plate member 31. The screw rod 3212 and the first driving motor 3211 are both arranged on the back of the suction cup mechanism 22, reducing the size of the suction cup mechanism 22 and the flattening assembly 3 in the second direction, and the structure is relatively compact.

[0054] Through the adapter drive member 323, the first drive member 321 on the back of the suction cup mechanism 22 drives the first pressure plate member 31 above the suction cup mechanism 22. This embodiment does not limit the specific structure of the adapter drive member 323, and is not limited to the accompanying drawings of this embodiment. Exemplarily, the adapter drive member 323 is an L-shaped structure, wherein the part located on the side of the suction cup mechanism 22 is used to connect the second drive member 322 and the first pressure plate member 31, and the part located on the back of the suction cup mechanism 22 is used to connect the screw rod 3212.

[0055] In order to guide the movement of the first pressure plate member 31 in the first direction and to improve the flattening effect on the exposure plate by controlling the position accuracy of the first pressure plate member 31, the flattening assembly 3 also includes a guide rail member 34 extending along the first direction, and the adapter drive member 323 is slidably connected to the guide rail member 34.

[0056] Specifically, in this embodiment, the guide rail member 34 includes a first guide rail member 341 and a second guide rail member 342 which are arranged in parallel with each other. The first guide rail member 341 is arranged on the side of the suction cup mechanism 22, and the second guide rail member 342 is arranged on the back of the suction cup mechanism 22. The first slider 3251 and the second slider 3252 are respectively arranged at both ends of the L-shaped structure of the transfer drive member 323. The first slider 3251 is slidably connected to the first guide rail member 341, and the second slider 3252 is slidably connected to the second guide rail member 342, so as to further improve the guiding reliability of the first pressure plate member 31.

[0057] In order to reduce the impact that the first pressing plate 31 may have on the exposure plate when it is lifted and lowered in the vertical direction, the pressing plate driving mechanism 32 further includes an elastic buffer 324, one end of which is connected to the output end of the second driving member 322, and the other end is connected to the first pressing plate 31. The elastic buffer 324 is configured to apply elastic force to the first pressing plate 31 so that the first pressing plate 31 always has a tendency to move in a direction away from the suction cup mechanism 22. The second driving member 322 drives the first pressing plate 31 to move up and down through the elastic buffer 324. Under the buffering of the elastic force of the elastic buffer 324, the first pressing plate 31 slowly rises or falls to avoid damaging the exposure plate.

[0058] In order to achieve the connection stability between the elastic buffer member 324 and the first pressing plate member 31, a mounting groove is provided on the fixed support member 37, and the elastic buffer member 324 is at least partially located in the mounting groove and connected to the fixed support member 37. The elastic buffer member 324 drives the first pressing plate member 31 through the fixed support member 37. The mounting groove provides a guide for the expansion and contraction of the elastic buffer member 324 to prevent the elastic buffer member 324 from twisting and affecting the position accuracy of the first pressing plate member 31.

[0059] In order to reduce the friction force when the first pressing plate 31 flattens the exposure plate, the first pressing plate 31 is a roller, which is rotatably connected to the pressing plate driving mechanism 32 around its own axis, so that when the first pressing plate 31 flattens the exposure plate, there is rolling friction between the first pressing plate 31 and the exposure plate. Moreover, compared with flat pushing, rolling avoids forming creases at the curled position of the exposure plate, which is conducive to improving the flatness of the exposure plate.

[0060] The flattening assembly 3 also includes a roller bearing 35, which is connected to the pressure plate driving mechanism 32. The roller is sleeved on the outer side of the roller bearing 35. The roller bearing 35 provides rolling support for the first pressure plate member 31 to reduce the friction between the first pressure plate member 31 and the pressure plate driving mechanism 32.

[0061] In order to avoid adhesion between the first pressure plate member 31 and the exposure plate, the roller is an anti-sticking roller. Specifically, it can be made of non-sticky materials such as glass to avoid sticking to dry film, oil film or ink on the exposure plate.

[0062] In one embodiment, the flattening assembly 3 further includes a second pressing plate 36, which is parallel to the first pressing plate 31 and is located at the rear side of the exposure area 101. The fixed support member 37 provides support for both the second pressing plate 36 and the first pressing plate 31, so that the second pressing plate 36 and the first pressing plate 31 move synchronously along the first direction at the same time. Both the second pressing plate 36 and the first pressing plate 31 are rollers, so that during the simultaneous movement, tension is formed between the second pressing plate 36 and the first pressing plate 31 on the exposure plate, and this tension can prevent curling recovery between the two rollers.

[0063] In order to improve the stability of the first pressing plate 31 during movement, the flattening assembly 3 includes two sets of pressing plate driving mechanisms 32, which are respectively located on both sides of the suction cup mechanism 22, and are respectively connected to both ends of the first pressing plate 31 to simultaneously drive the first pressing plate 31 to move in the first direction and / or the second direction. The structures of the two sets of pressing plate driving mechanisms 32 are both set with reference to the above-mentioned embodiment.

[0064] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A direct-write imaging exposure device, comprising an exposure assembly (100) and an alignment assembly, wherein the projection of the exposure assembly (100) in a vertical direction forms an exposure area (101), characterized in that: The direct writing imaging exposure device also includes: A workbench assembly (1) comprises a base (11) and a gantry mechanism (12) fixedly connected to the base (11), wherein the exposure assembly (100) and the alignment assembly are both arranged on the gantry mechanism (12); A moving table assembly (2) is arranged on the base (11), the moving table assembly (2) comprises a moving mechanism (21) and a suction cup mechanism (22), the suction cup mechanism (22) is movably connected to the moving mechanism (21), the suction cup mechanism (22) is used to absorb the exposure plate, the moving mechanism (21) is communicatively connected to the alignment assembly, the moving mechanism (21) is arranged to drive the suction cup mechanism (22) to move along a first direction and / or a second direction, so that the exposure assembly (100) is aligned with the exposure plate; a flattening assembly (3) connected to the suction cup mechanism (22), the flattening assembly (3) comprising a first pressing plate member (31) and a pressing plate driving mechanism (32), the first pressing plate member (31) being movably connected to the suction cup mechanism (22) and pressed against the upper surface of the exposure plate, the length of the first pressing plate member (31) extending along the second direction and being located at the rear side of the exposure area (101); Wherein, during the exposure process, when the moving mechanism (21) drives the suction cup mechanism (22) to move along the first direction to pass through the exposure area (101), the pressure plate driving mechanism (32) drives the first pressure plate member (31) to move relative to the suction cup mechanism (22) and to press the exposure plate, and the first pressure plate member (31) is always located at the rear side of the exposure area (101), and the first direction, the second direction and the vertical direction are perpendicular to each other.

2. The direct writing imaging exposure device according to claim 1, characterized in that: The pressure plate driving mechanism (32) comprises a first driving member (321) and a second driving member (322) both of which are arranged on the suction cup mechanism (22); the first driving member (321) is used to drive the first pressure plate member (31) to move along a first direction to reach a position for pressing the exposure plate; the second driving member (322) is used to drive the first pressure plate member (31) to move back and forth in a vertical direction to abut against or move away from the exposure plate.

3. The direct writing imaging exposure device according to claim 2, characterized in that: The pressure plate driving mechanism (32) further comprises a transfer driving member (323), one end of the transfer driving member (323) is connected to the output end of the first driving member (321), and the other end is connected to the first pressure plate member (31), and the second driving member (322) is arranged on the transfer driving member (323) and moves synchronously with the first pressure plate member (31); The first pressure plate component (31) and the adapter driving component (323) are movably connected via a connecting mechanism (33), and the connecting mechanism (33) is configured to limit relative movement between the first pressure plate component (31) and the adapter driving component (323) along a first direction, and not to limit relative movement between the first pressure plate component (31) and the adapter driving component (323) along a vertical direction.

4. The direct writing imaging exposure device according to claim 3, characterized in that: The connecting mechanism (33) comprises a slide groove (331) and a guide member (332) which can be movably inserted into the slide groove (331) along a vertical direction; one of the first pressure plate member (31) and the transfer drive member (323) is provided with the slide groove (331), and the other is provided with the guide member (332).

5. The direct writing imaging exposure device according to claim 3, characterized in that: The first driving member (321) comprises a first driving motor (3211) and a screw rod (3212) extending in a first direction, the screw rod (3212) is connected to a motor shaft of the first driving motor (3211), and the adapter driving member (323) is threadedly connected to the screw rod (3212) to move axially along the screw rod (3212); and / or, The flattening assembly (3) further comprises a guide rail member (34), wherein the guide rail member (34) extends along a first direction, and the transfer drive member (323) is slidably connected to the guide rail member (34).

6. The direct writing imaging exposure device according to claim 2, characterized in that: The pressure plate driving mechanism (32) further comprises an elastic buffer (324), one end of the elastic buffer (324) being connected to the output end of the second driving member (322), and the other end being connected to the first pressure plate member (31), and the elastic buffer (324) being configured to apply an elastic force to the first pressure plate member (31) so that the first pressure plate member (31) always has a tendency to move in a direction away from the suction cup mechanism (22).

7. The direct writing imaging exposure device according to claim 1, characterized in that: The first pressing plate component (31) is a roller, and the roller is rotatably connected to the pressing plate driving mechanism (32) around its own axis.

8. The direct writing imaging exposure device according to claim 7, characterized in that: The flattening assembly (3) further comprises a roller bearing (35), wherein the roller bearing (35) is connected to the pressing plate driving mechanism (32), and the roller is sleeved on the outer side of the roller bearing (35); and / or, The roller is an anti-sticking roller.

9. The direct writing imaging exposure device according to any one of claims 1 to 8, characterized in that: The flattening assembly (3) further comprises a second pressing plate (36), wherein the second pressing plate (36) and the first pressing plate (31) are parallel to each other, and the second pressing plate (36) is located at the front side of the exposure area (101); and / or, The flattening assembly (3) comprises two groups of pressure plate driving mechanisms (32), the two groups of pressure plate driving mechanisms (32) are respectively located on both sides of the suction cup mechanism (22), and the two groups of pressure plate driving mechanisms (32) are respectively connected to the two ends of the first pressure plate member (31) to simultaneously drive the first pressure plate member (31) to move.

10. The direct writing imaging exposure device according to any one of claims 1 to 8, characterized in that: The flattening assembly (3) further comprises a second pressure plate component (36), wherein the second pressure plate component (36) and the first pressure plate component (31) are parallel to each other, and the second pressure plate component (36) is located at the front side of the exposure area (101), and the first pressure plate component (31) and the second pressure plate component (36) are both rollers, and the rollers are rotatably connected to the pressure plate driving mechanism (32) around their own axes.

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