Clamping jaw structure for OHT crown block

Abstract

The invention discloses a clamping jaw structure for an OHT crown block, the clamping jaw structure comprises a clamping jaw driving assembly, a center positioning assembly and an unbalance detection assembly, the clamping jaw driving assembly realizes linear motion of a clamping jaw through a rolling guide rail and a double-spiral screw, and synchronism and stability of clamping and releasing actions are ensured; the central positioning assembly is matched with a compression spring through a linear bearing, and a mushroom head at the top of the wafer box is accurately positioned; the unbalance detection assembly monitors the inclination state of the wafer box in real time and provides an alarm signal through a sliding block, a sensor and a compression spring. The electromagnetic brake assembly automatically locks the double-spiral screw during power failure, the clamping state of the clamping jaw is kept, and the wafer box is prevented from falling off. A deep groove ball bearing is integrated in the bearing seat, so that high-precision support and low-friction operation are provided; the device has the characteristics of high safety, high positioning precision, strong adaptability and reliable operation, and is particularly suitable for the high-efficiency and safe carrying requirements of wafer cassettes in semiconductor production.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor handling and processing equipment, and in particular to a clamping claw structure for an OHT overhead crane. Background Art

[0002] In the production process of semiconductor factories, wafer boxes, as important semiconductor carriers, need to be transported by OHT overhead cranes. The existing clamping mechanism achieves transportation by clamping the mushroom head on the top of the wafer box, but there are the following technical problems: 1. The two ends of the wafer box are prone to imbalance during transportation, resulting in the risk of tilting or even falling off; 2. In the event of a system power outage or equipment failure, the gripper may release the wafer box, further increasing the safety risk; 3. The existing gripper structure lacks effective tilt detection and real-time feedback functions and cannot respond quickly to abnormal conditions. Summary of the invention

[0003] Technical purpose: In view of the shortcomings of the existing OHT overhead crane clamp structure, the present invention discloses a clamp structure for an OHT overhead crane, which can effectively solve the problem of wafer box tilting, falling off and loss of control in the case of power failure in the prior art, and ensure the safety and stability of wafer box transportation through imbalance detection, power-off braking and structural optimization.

[0004] Technical solution: To achieve the above technical objectives, the present invention adopts the following technical solution: A clamping claw structure for an OHT overhead crane comprises a clamping claw driving component, a center positioning component, an imbalance detection component and a substrate. The clamping claw driving component and the center positioning component are both mounted on the substrate. The clamping claw driving component is used to connect and drive two clamping claws to clamp and release a mushroom head on a top of a wafer box. The center positioning component is arranged in a central area of ​​the substrate and between two clamping claws, and is used to accurately position the mushroom head. The imbalance detection component is arranged on the clamping claw, and is used to detect the tilt state of the wafer box.

[0005] Preferably, the clamping jaw drive assembly includes a DC motor, which is installed on one side of the base plate, and the DC motor is connected to one end of the twin-screw rod, and the other end of the twin-screw rod is connected to the bearing seat, and the bearing seat is arranged on the base plate; two nut seats 1 and nut seats 2 are symmetrically arranged on the double-screw rod, and connecting plates 1 and 2 are respectively arranged on nut seats 1 and nut seats 2, and clamping jaws are fixed on connecting plates 1 and 2, and both ends of connecting plates 1 and 2 are connected to the base plate through rolling guide rails.

[0006] Preferably, the bearing seat includes a fixed bracket, an electromagnetic brake assembly and a deep groove ball bearing. The fixed bracket is installed on the base plate, and the deep groove ball bearing is installed in the cavity of the fixed bracket to support the rotational movement of the twin-rotation screw. The electromagnetic brake assembly is coaxially installed with the deep groove ball bearing to lock the position of the twin-rotation screw when the power is off.

[0007] Preferably, the DC motor and the bearing seat are connected to the twin-rotation screw via a coupling.

[0008] Preferably, the twin-thread screw adopts a forward and reverse thread design, and the symmetrical opening and closing of the clamping jaws is achieved through synchronous rotation.

[0009] Preferably, the center positioning assembly includes a flange, which is fixedly arranged in the central area of ​​the substrate. A linear bearing is sleeved in the middle of the flange, and a support shaft is arranged in the linear bearing. One end of the support shaft passes through the linear bearing and is connected to the center block, and the other end passes through the substrate and is fixed on the substrate. A compression spring is also wound around the outside of the linear bearing.

[0010] Preferably, a C-shaped shaft retaining ring is provided at the place where the support shaft contacts the linear bearing.

[0011] Preferably, the imbalance detection component includes a cover shell, a pressure plate, a slider, a sensor and a compression spring. The cover shell is fixedly mounted on two clamps, and is provided with a guide rail for mounting the slider therein. The slider can move linearly in the cover shell through the guide rail, and contacts for triggering the sensor are provided on the side thereof. The sensor is fixed on the side wall of the cover shell and is used to detect the displacement state of the slider. The pressure plate is arranged at the bottom of the slider and is used to limit the movement range of the slider. The compression spring is arranged between the slider and the pressure plate and provides a reset force for the slider.

[0012] Beneficial effects: The clamping claw structure for an OHT overhead crane provided by the present invention has the following beneficial effects: The present invention organically combines a clamping jaw drive assembly, a center positioning assembly, an imbalance detection assembly, an electromagnetic brake assembly and a bearing seat, and coordinates and cooperates to optimize the clamping jaw function. Through the cooperation of the imbalance detection assembly and the electromagnetic brake, the wafer box tilting or falling accidents are effectively avoided; the elastic design of the center positioning assembly and the precise control of the clamping jaw drive assembly can adapt to wafer boxes of different sizes and weights; the high-precision support and lubrication function of the bearing seat improves the stability and durability of the system operation; through the linkage of the sensor and the overhead crane control system, real-time monitoring and dynamic adjustment are achieved, reducing the need for manual intervention; the tilting and falling problems existing in the wafer box transportation in the prior art are solved, especially in terms of safety, reliability and intelligence level, it has significant advantages, and can be widely used in the automated material handling system of semiconductor workshops.

[0013] The center positioning component of the present invention utilizes a linear bearing and a compression spring to ensure accurate positioning of wafer boxes of different specifications. At the same time, the clamping jaw drive component realizes symmetrical clamping through a double-rotation screw with positive and negative threads, with uniform force distribution and stable handling. The center positioning component provides a preliminary position adjustment function before the wafer box is clamped to avoid mushroom head deviation, thereby improving the reliability of the handling operation.

[0014] The bearing seat of the present invention integrates a deep groove ball bearing and an electromagnetic brake assembly to provide high-precision rotational support and extend the service life of the equipment. When the system is powered off or stopped in an emergency, the electromagnetic brake is automatically activated to prevent the clamping jaws from loosening by locking the double-rotation screw, thereby ensuring that the wafer box will not fall. At the same time, the overall design can adapt to wafer boxes of different sizes and weights to meet the needs of use in multiple scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0016] Figure 1 It is a schematic diagram of the overall structure of the clamping jaw structure of the present invention; Figure 2 It is a schematic diagram of the top view of the structure of the clamping jaw driving assembly of the present invention; Figure 3 It is a front view structural schematic diagram of the clamping jaw driving assembly of the present invention; Figure 4 It is a side structural schematic diagram of the clamping jaw driving assembly of the present invention; Figure 5 It is a structural schematic diagram of the center positioning and detection component of the present invention; Figure 6 It is a structural schematic diagram of the imbalance detection component of the present invention; Figure 7 It is a structural schematic diagram of the bearing seat of the present invention; Figure 8 It is a schematic diagram of the wafer box structure; Fig. 9 It is a schematic diagram of the structure of the present invention when grabbing a wafer box.

[0017] In the figure: 1. Gripper drive assembly; 11. DC motor; 12. Twin-rotation screw; 13. Bearing seat; 131. Fixed bracket; 132. Electromagnetic brake assembly; 133. Deep groove ball bearing; 14. Coupling; 15. Nut seat one; 16. Nut seat two; 17. Connecting plate one; 18. Connecting plate two; 19. Rolling guide; 2. Center positioning assembly; 21. Flange; 22. Linear bearing; 23. Support shaft; 24. Center block; 25. Compression spring; 26. Retaining ring for C-type shaft; 3. Imbalance detection assembly; 31. Cover; 32. Pressure plate; 33. Slider; 34. Sensor; 35. Compression spring. DETAILED DESCRIPTION

[0018] The present invention will be described more clearly and completely below by way of a preferred embodiment in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the embodiment.

[0019] like Figure 1 As shown, a clamping structure for an OHT overhead crane includes a clamping jaw drive component 1, a center positioning component 2, an imbalance detection component 3 and a substrate 4, wherein the clamping jaw drive component 1 and the center positioning component 2 are both mounted on the substrate 4, the clamping jaw drive component 1 is used to connect and drive two clamping jaws to clamp and release the mushroom head on the top of the wafer box, the center positioning component 2 is arranged in the central area of ​​the substrate 4 and between the two clamping jaws, and is used to accurately position the mushroom head, the imbalance detection component 3 is arranged on the clamping jaw, and is used to detect the tilt state of the wafer box, wherein the clamping jaw drive component 1 is arranged on the upper side of the substrate 4, and the center positioning component is arranged on the lower side of the substrate 4.

[0020] like Figures 2 to 4 As shown, the gripper drive assembly 1 includes a DC motor 11, which is mounted on one side of the base plate 4. The DC motor 11 is connected to one end of a twin-screw 12, and the other end of the twin-screw 12 is connected to a bearing seat 13. The DC motor 11 and the bearing seat 13 are both connected to the twin-screw 12 through a coupling 14. The bearing seat 13 is arranged on the other side of the base plate 4, and the bearing seat 13 and the DC motor 11 are located on the same horizontal line. Two nut seats 15 and nut seats 2 1 are symmetrically arranged on the twin-screw 12. 6. A connecting plate 17 and a connecting plate 2 18 are respectively provided on the nut seat 15 and the nut seat 2 16. Clamping claws are fixed on the connecting plate 17 and the connecting plate 2 18, and both ends of the connecting plate 17 and the connecting plate 2 18 are connected to the base plate 4 through rolling guides 19. The rolling guides 19 are symmetrically arranged up and down and left and right, and have the same length. The double-rotation screw 12 adopts a positive and negative thread design, and the connecting plate 17 and the connecting plate 2 18 are controlled to move synchronously on the rolling guides 19 through synchronous rotation, so as to realize the symmetrical opening and closing of the clamping claws.

[0021] like Figure 7 As shown, the bearing seat 13 includes a fixed bracket 131, an electromagnetic brake assembly 132 and a deep groove ball bearing 133. The fixed bracket 131 is installed on the base plate 4, and the deep groove ball bearing 133 is installed in the cavity of the fixed bracket 131, which is used to support the rotational movement of the twin-rotation screw 12, reduce friction and ensure stable operation. The electromagnetic brake assembly 132 is coaxially installed with the deep groove ball bearing 133, and is used to lock the position of the twin-rotation screw 12 in the power-off state. Lubrication holes or lubrication grooves can also be opened on the bearing seat 13 to provide long-term lubrication to the deep groove ball bearing to ensure its smooth operation for a long time.

[0022] like Figure 5As shown, the center positioning component 2 includes a flange 21, which is fixedly arranged in the central area of ​​the base plate 4. A linear bearing 22 is sleeved in the middle of the flange 21. The linear bearing 22 is used to guide the center block 24 to move smoothly along the direction of the support shaft 23. A support shaft 23 is arranged in the linear bearing 22. One end of the support shaft 23 passes through the linear bearing 22 and is connected to the center block 24, and the other end passes through the base plate 4 and is fixed on the base plate 4. A compression spring 25 is also wound around the outside of the linear bearing 22, and a C-type shaft retaining ring 26 is arranged at the place where the support shaft 23 contacts the linear bearing 22.

[0023] like Figure 6 As shown, the unbalance detection component 3 includes a cover 31, a pressure plate 32, a slider 33, a sensor 34 and a compression spring 35. The cover 31 is fixedly mounted on two clamps, and a guide rail for mounting the slider 33 is arranged therein. The slider 33 can move linearly in the cover 31 through the guide rail, and a contact for triggering the sensor 34 is arranged on the side thereof. The sensor 34 is fixed on the side wall of the cover 31 and is used to detect the displacement state of the slider 33. The pressure plate 32 is arranged at the bottom of the slider 33 and is used to limit the movement range of the slider 33. The compression spring 35 is arranged between the slider 33 and the pressure plate 32 to provide a reset force for the slider 33.

[0024] The working principle of the device of the present invention is as follows: Figure 8 and Fig. 9 As shown, 1. Clamping and releasing process: the center block 24 of the center positioning assembly 2 contacts with the mushroom head on the top of the wafer box, and the center block 24 is guided to move along the support shaft through the linear bearing 22. At the same time, the compression spring 25 provides elastic force to ensure that the mushroom head is in the correct position before clamping; the double-rotation screw 12 in the clamping jaw drive assembly 1 is driven by the DC motor 11, and the positive and negative thread design of the screw drives the clamping jaws on both sides to move inward synchronously along the rolling guide rail 19 to clamp the mushroom head on the top of the wafer box to achieve stable clamping; reverse rotation realizes the release of the clamping jaws.

[0025] 2. Real-time imbalance detection: During the transportation of the wafer box, the imbalance detection component 3 cooperates with the slider 33 and the sensor 34 in the cover 31 to monitor the balance state of the wafer box in real time. The slider 33 is installed on the guide rail. When the wafer box tilts, the slider 33 moves along the guide rail under force, triggering the sensor signal. The sensor 34 sends the tilt signal to the overhead crane control system. If the tilt angle exceeds the set safety threshold, the system issues an alarm and terminates the transportation operation to prevent the wafer box from tilting or falling.

[0026] 3. Power-off protection mechanism: During normal operation, the electromagnetic brake assembly 132 remains in a loosened state, and the twin-rotation screw 12 can rotate freely to drive the clamping jaws to move; when the system loses power or an emergency stop occurs, the electromagnetic brake assembly 132 is automatically activated, and the position of the twin-rotation screw is locked to keep the clamping jaws in a clamped state. Even in a power-off state, the electromagnetic brake assembly 132 can ensure that the wafer box will not fall due to loose clamping jaws, thereby improving the safety of the system; the bearing seat 1312 supports the twin-rotation screw, and the deep groove ball bearing 133 reduces the rotational friction to ensure that the clamping jaws move smoothly and accurately; the linear bearing 22 guides the movement of the center block 24 in the center positioning assembly 2, further optimizing the positioning and clamping accuracy.

[0027] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A clamping claw structure for an OHT overhead crane, characterized in that: The invention comprises a clamping jaw driving component (1), a center positioning component (2), an imbalance detection component (3) and a base plate (4). The clamping jaw driving component (1) and the center positioning component (2) are both mounted on the base plate (4). The clamping jaw driving component (1) is used to connect and drive two clamping jaws to clamp and release the mushroom head on the top of the wafer box. The center positioning component (2) is arranged in the central area of ​​the base plate (4) and between the two clamping jaws, and is used to accurately position the mushroom head. The imbalance detection component (3) is arranged on the clamping jaw and is used to detect the tilt state of the wafer box.

2. The clamping claw structure for an OHT overhead crane according to claim 1, characterized in that: The clamping jaw driving assembly (1) comprises a DC motor (11), which is mounted on one side of a base plate (4). The DC motor (11) is connected to one end of a double-screw rod (12), and the other end of the double-screw rod (12) is connected to a bearing seat (13), and the bearing seat (13) is arranged on the base plate (4); two nut seats (15) and two nut seats (16) are symmetrically arranged on the double-screw rod (12), and connecting plates (17) and (18) are arranged on the nut seats (15) and (16) respectively, and clamping jaws are fixed on the connecting plates (17) and (18), and both ends of the connecting plates (17) and (18) are connected to the base plate (4) via rolling guide rails (19).

3. The clamping claw structure for an OHT overhead crane according to claim 2, characterized in that: The bearing seat (13) comprises a fixed bracket (131), an electromagnetic brake assembly (132) and a deep groove ball bearing (133); the fixed bracket (131) is mounted on the base plate (4); the deep groove ball bearing (133) is mounted in a cavity of the fixed bracket (131) and is used to support the rotational movement of the twin-rotation screw (12); the electromagnetic brake assembly (132) and the deep groove ball bearing (133) are coaxially mounted and are used to lock the position of the twin-rotation screw (12) in a power-off state.

4. The clamping claw structure for an OHT overhead crane according to claim 2, characterized in that: The DC motor (11) and the bearing seat (13) are connected to the twin-rotation screw (12) via a coupling (14).

5. The clamping claw structure for an OHT overhead crane according to claim 2, characterized in that: The double-rotation screw (12) adopts a positive and negative thread design, and realizes symmetrical opening and closing of the clamping jaws through synchronous rotation.

6. The clamping claw structure for an OHT overhead crane according to claim 1, characterized in that: The center positioning component (2) comprises a flange (21), the flange (21) is fixedly arranged in the central area of ​​the base plate (4), a linear bearing (22) is sleeved in the middle of the flange (21), a support shaft (23) is arranged in the linear bearing (22), one end of the support shaft (23) passes through the linear bearing (22) and is connected to the center block (24), and the other end passes through the base plate (4) and is fixed on the base plate (4), and a compression spring (25) is also wound around the outer side of the linear bearing (22).

7. The clamping claw structure for an OHT overhead travelling crane according to claim 5, characterized in that: A C-shaped shaft retaining ring (26) is provided at the place where the support shaft (23) contacts the linear bearing (22).

8. The clamping claw structure for an OHT overhead travelling crane according to claim 1, characterized in that: The unbalance detection assembly (3) comprises a housing (31), a pressure plate (32), a slider (33), a sensor (34) and a compression spring (35). The housing (31) is fixedly mounted on two clamping jaws and is provided with a guide rail for mounting the slider (33). The slider (33) can move linearly in the housing (31) via the guide rail. A contact for triggering the sensor (34) is provided on a side of the housing. The sensor (34) is fixed on a side wall of the housing (31) and is used to detect the displacement state of the slider (33). The pressure plate (32) is arranged at the bottom of the slider (33) and is used to limit the movement range of the slider (33). The compression spring (35) is arranged between the slider (33) and the pressure plate (32) and provides a reset force for the slider (33).

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