Gate valve for semiconductor production equipment and semiconductor production equipment
By designing a plug-in valve with a driving device and a guide device in semiconductor production equipment, the movement problem of the valve core due to external force is solved, and the sealing effect and the yield of semiconductor devices are improved.
Patent Information
- Application Number
- CN202411507611.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-25
- Publication Date
- 2025-01-10
AI Technical Summary
When the plug-in valve is closed in semiconductor production equipment, the valve core moves due to external force, resulting in poor sealing effect, which in turn affects the yield of semiconductor devices.
A plug-in valve including a housing, a driving device and a guide device is designed to drive the linear displacement of the valve core between the initial position and the locking position through the drive device, and to use the guide device to move the valve core to the locking position. Perform limits to avoid loosening of the valve core due to external forces.
Improve the sealing performance of the plug-in valve, ensure high yield of semiconductor devices, and avoid chemical gas mixing.
Smart Images
Figure CN119289115A_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the technical field of semiconductor production equipment, and specifically relates to a gate valve for semiconductor production equipment and semiconductor production equipment. Background Art
[0002] The semiconductor production equipment includes a gate valve for controlling the opening or closing of a negative pressure pipeline. The gate valve for semiconductor production equipment realizes the opening and closing of the gate valve for semiconductor production equipment by moving the valve core. When the gate valve for semiconductor production equipment is closed, the valve core covers the through hole of the gate valve for semiconductor production equipment.
[0003] However, in actual use, the gate valve for semiconductor production equipment will be affected by other forces, causing the valve core to move when the gate valve for semiconductor production equipment is closed, resulting in incomplete closure of the gate valve for semiconductor production equipment and poor sealing effect, thereby causing the chemical gases in the semiconductor production equipment to mix, and further resulting in low yield of semiconductor devices produced by the semiconductor production equipment. Summary of the invention
[0004] Purpose of the invention: The present application provides a gate valve for semiconductor production equipment, which is used to solve the technical problem that the gate valve for semiconductor production equipment is not completely closed and the sealing effect is poor due to the movement of the valve core; another purpose of the present application is to provide a semiconductor production equipment.
[0005] Technical solution: This application provides a gate valve for semiconductor production equipment, including: A housing, wherein the housing has a receiving cavity, and the housing includes a first wall, wherein the first wall is provided with a first through hole communicating with the receiving cavity; A driving device, the driving device is arranged in the accommodating cavity, the driving device has a first initial position and a first locking position, and the driving device can perform a linear displacement to move from the first initial position to the first locking position; A valve core, the valve core is arranged in the accommodating cavity, the valve core is located between the driving device and the first wall and is connected to the driving device; the valve core has a second initial position and a second locking position; when the driving device performs the linear displacement, it can drive the valve core to move between the second initial position and the second locking position; A guide device, wherein the guide device is arranged in the accommodating cavity and connected to the valve core; the guide device is used to cooperate with the driving device to limit the valve core when the valve core moves to the second locking position.
[0006] In some embodiments, the drive device has a first guide groove; The valve core includes a first body and a first guide portion, the first body and the first guide portion are connected, the first guide portion is arranged in the first guide groove, and the first guide portion can move along the extension direction of the first guide groove; In which, the first guide groove has a first guide area and a second guide area which are connected to each other, and when the first guide portion is located in the first guide area, the valve core moves toward or away from the first wall relative to the driving device; when the first guide portion is located in the second guide area, the valve core is located in the second locking position, and the driving device can perform linear displacement and limit the valve core.
[0007] In some embodiments, the first body comprises: Main body; A first connecting portion, the first connecting portion is connected to a side of the main body away from the first wall, the first connecting portion has a second guide groove, the first guide portion is arranged in the second guide groove, and the first guide portion can move along an extension direction of the second guide groove; Wherein, the second guide groove has a third guide area and a fourth guide area which are connected to each other, and when the first guide portion is located in the third guide area, the first guide portion moves toward or away from the first wall relative to the first connecting portion; when the first guide portion is located in the fourth guide area, the valve core is located in the second locking position, and the first guide portion follows the driving device to perform linear displacement.
[0008] In some embodiments, the driving device comprises: A second body, wherein the second body has a second through hole, and the second body has a hole wall, and the hole wall is used to enclose the second through hole; a second connecting portion, the second connecting portion being disposed in the second through hole and connected to the first body, the second connecting portion having the first guide groove, a portion of the first body being located in the second through hole and connected to the second connecting portion; Wherein, the hole wall can be connected with the first guide portion to limit the position of the first guide portion.
[0009] In some embodiments, the driving device includes at least two second connecting parts, at least two second connecting parts are arranged in one second through hole and form a gap, and the portion of the first body is located in the gap and clamped by at least two second connecting parts.
[0010] In some embodiments, the valve core further includes a first connecting member, which is located and connected between the portion of the first body and the second connecting portion to form a rolling friction force between the portion of the first body and the second connecting portion.
[0011] In some embodiments, The first connecting portion has a connecting surface facing the first body; The main body comprises: A bracket, wherein the bracket has a third through hole, and the bracket has a first surface away from the first wall; a cover plate, the cover plate being disposed in the third through hole and connected to the bracket, the cover plate having a second surface away from the first wall and a third surface close to the first wall, the third surface being used to connect to the first wall; The first connecting portion is connected to the first main body portion so that the connecting surface is in contact with the first surface and the connecting surface is in contact with the second surface.
[0012] In some embodiments, the driving device has at least two first guide grooves; The valve core includes at least two first guide portions, and at least one of the first guide portions is disposed in at least two of the first guide grooves to limit the rotation of the valve core relative to the driving device.
[0013] In some embodiments, the valve core further includes a second connecting member, the second connecting member is connected to the first body, and the first guide portion is connected to the second connecting member, so that at least two of the first guide portions are relatively stationary.
[0014] In some embodiments, the guide device has a third guide groove, and the third guide groove has a fifth guide area and a sixth guide area connected to each other; The valve core further includes a second guide portion, the second guide portion is connected to the first body, the second guide portion is arranged in the third guide groove, and the second guide portion can move along the extension direction of the first guide groove; When the second guide portion is located in the fifth guide area, the valve core follows the driving device to perform linear displacement; when the second guide portion is located in the sixth guide area, the valve core moves toward or away from the first wall relative to the driving device.
[0015] Correspondingly, the present application also provides a semiconductor production equipment, which includes a gate valve for semiconductor production equipment as described in any one of the above embodiments.
[0016] Beneficial effect: Compared with the prior art, the gate valve for semiconductor production equipment provided in the embodiment of the present application includes a shell, a driving device, a valve core and a guide device, the shell has a accommodating chamber, the shell includes a first wall, and the first wall is provided with a first through hole connected to the accommodating chamber; the driving device is arranged in the accommodating chamber, the driving device has a first initial position and a first locking position, and the driving device can perform a linear displacement to move from the first initial position to the first locking position; the valve core is arranged in the accommodating chamber, the valve core is located between the driving device and the first wall and is connected to the driving device; the valve core has a second initial position and a second locking position; when the driving device performs a linear displacement, it can drive the valve core to move between the second initial position and the second locking position; the guide device is arranged in the accommodating chamber and is connected to the valve core; the guide device is used to cooperate with the driving device when the valve core moves to the second locking position to limit the valve core. The present application provides a driving device for driving the valve core and a guiding device for guiding the valve core so that the valve core of the gate valve for semiconductor production equipment can be locked after closing, so as to prevent the valve core from loosening when subjected to external force, thereby improving the sealing effect of the gate valve for semiconductor production equipment.
[0017] Accordingly, the present application also provides a semiconductor production equipment, the semiconductor production equipment including a gate valve for semiconductor production equipment as in any one of the above embodiments. The semiconductor production equipment including the gate valve for semiconductor production equipment has better sealing performance, and the yield of semiconductor devices produced by the equipment including the gate valve for semiconductor production equipment is higher. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.
[0019] Figure 1 A schematic diagram of the structure of a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 2 A schematic diagram of the structure of a gate valve for semiconductor production equipment provided in an embodiment of the present application with the housing hidden; Figure 3 A schematic diagram of the structure of a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 4 for Figure 3 Detailed view of the center circle A; Figure 5 A schematic diagram of the structure of a drive device in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 6 for Figure 5 Detailed view of the center right B; Figure 7A schematic diagram of the structure of a drive device and a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Figure 8 for Figure 7 Detailed view of the center circle C; Fig. 9 A schematic structural diagram of a drive device and a valve core from another angle in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.10 A schematic diagram of the exploded structure of a drive device and a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.11 A schematic diagram of the structure of a guide device in a gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.12 A schematic diagram of the relative position relationship between the drive device and the valve core in the gate valve for semiconductor production equipment provided in an embodiment of the present application; Fig.13 A schematic diagram of another relative position relationship between a drive device and a valve core in a gate valve for semiconductor production equipment provided in an embodiment of the present application.
[0020] Reference numerals: 1-housing, 11-accommodating chamber, 12-first wall, 121-first through hole, 13-second wall, 14-third wall, 15-fourth wall, 2-driving device, 21-second connecting portion, 211-first guide groove, 212-first guide area, 213-second guide area, 22-second body, 221-second through hole, 222-hole wall, 3-valve core, 31-first body, 311-main body, 3111-bracket, 3112-third through hole, 3113-first surface, 31 14-cover plate, 3115-second surface, 3116-third surface, 3117-seal, 312-first connecting part, 3121-second guide groove, 3122-third guide area, 3123-fourth guide area, 3124-connecting surface, 32-first guide part, 33-first connecting member, 34-second connecting member, 35-second guide part, 4-guiding device, 41-third guide groove, 411-fifth guide area, 412-sixth guide area, 5-first guide wheel, 6-second guide wheel. DETAILED DESCRIPTION
[0021] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.
[0022] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or can communicate with each other; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more features.
[0023] It should also be noted that in the drawings of the embodiments of the present application, arrows marked with X, Y, and Z respectively represent a first direction X, a second direction Y, and a third direction Z. The description of the present application introduces the first direction X, the second direction Y, and the third direction Z in order to more clearly describe the relative position relationship involved in the present application, wherein the first direction X, the second direction Y, and the third direction Z are three relative directions intersecting with each other, rather than absolute directions. In actual applications, the first direction X, the second direction Y, and the third direction Z can point to any direction in space as long as the intersection relationship between the two is maintained.
[0024] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application.
[0025] The gate valve for semiconductor production equipment is opened and closed by moving the valve core 3. When the gate valve for semiconductor production equipment is closed, the valve core 3 covers the through hole of the gate valve for semiconductor production equipment. Usually, the gate valve for semiconductor production equipment needs to be moved to a specified position along a first direction X, and then moved along a second direction Y to contact the housing 1 of the gate valve for semiconductor production equipment and cover the through hole.
[0026] However, in actual use, when the gate valve for semiconductor production equipment is closed, the valve core 3 will also be affected by other forces, especially when it receives a force perpendicular to the sealing surface of the valve core 3, the valve core 3 will move, resulting in incomplete closure of the gate valve for semiconductor production equipment.
[0027] Specifically, other forces refer to forces other than those used to control the opening and closing of the gate valve for semiconductor production equipment, such as gravity, impact force from fluid, etc.
[0028] In order to solve the technical problem that the valve core 3 moves due to other forces, resulting in incomplete closure and poor sealing effect of the gate valve for semiconductor production equipment, the first embodiment of the present application provides a gate valve for semiconductor production equipment, see Figure 1 and Figure 2 The gate valve for semiconductor production equipment includes a shell 1, a driving device 2, a valve core 3 and a guide device 4. The shell 1 has a accommodating chamber 11, and the shell 1 includes a first wall 12. The first wall 12 is provided with a first through hole 121 connected to the accommodating chamber 11; the driving device 2 is arranged in the accommodating chamber 11, and the driving device 2 has a first initial position and a first locking position. The driving device 2 can perform a linear displacement to move from the first initial position to the first locking position; the valve core 3 is arranged in the accommodating chamber 11, and the valve core 3 is located between the driving device 2 and the first wall 12 and is connected to the driving device 2; the valve core 3 has a second initial position and a second locking position; when the driving device 2 performs a linear displacement, it can drive the valve core 3 to move between the second initial position and the second locking position; the guide device 4 is arranged in the accommodating chamber 11 and is connected to the valve core 3; the guide device 4 is used to cooperate with the driving device 2 when the valve core 3 moves to the second locking position to limit the valve core 3.
[0029] Specifically, the gate valve for semiconductor production equipment also includes a power source connected to the drive device 2, which can be any one of a screw driven by a hand wheel, an electric push rod, a hydraulic push rod, a pneumatic push rod, an electric motor, a hydraulic motor, a pneumatic motor, etc.
[0030] In some embodiments, the shell 1 also includes a second wall 13 and a third wall 14, the second wall 13 and the third wall 14 are relatively arranged along the third direction Z, the first wall 12 is connected to and located between the second wall 13 and the third wall 14, and at least one of the driving device 2 and the valve core 3 includes a plurality of first guide wheels 5, and the first guide wheels are rollingly connected to the second wall 13 or the third wall 14 to limit at least one of the driving device 2 and the valve core 3 along the third direction Z.
[0031] In some embodiments, the shell 1 also has a fourth wall 15 arranged opposite to the first wall 12 along the second direction Y, and the driving device 2 also includes a second guide wheel 6, which is rollingly connected to the fourth wall 15 to limit the driving device 2 along the second direction Y.
[0032] Specifically, the driving device 2 is used to drive the valve core 3 to move along the first direction X, and the guiding device 4 is used to guide the valve core 3 when the valve core 3 moves along the first direction X, so that the valve core 3 generates a sub-movement along the second direction Y, and then the valve core 3 can be driven by the driving device 2 to move from the second initial position to the second locking position, so as to fit with the first wall 12 and cover the first through hole 121. When the valve core 3 moves to the second locking position, the driving device 2 limits the valve core 3 along the second direction Y to prevent the valve core 3 from moving along the second direction Y and separating from the first wall 12; the guiding device 4 limits the valve core 3 along the first direction X to prevent the valve core 3 from moving along the first direction X so that the first through hole 121 is not sealed.
[0033] Furthermore, in some embodiments, after the valve core 3 is located in the second locking position, the driving device 2 can continue to move in the first direction X to enter the first locking position, that is, after the valve core 3 is located in the second locking position and the driving device 2 has not reached the first locking position, the valve core 3 and the driving device 2 can only move relative to each other in the first direction X, and cannot achieve relative movement in the second direction Y, and the valve core 3 is upper-limited in the second direction Y by the driving device 2.
[0034] In the above embodiment, the driving device 2 can limit the valve core 3 in the second locking position along the second direction Y to avoid the valve core 3 being separated from the first wall 12 when the gate valve for semiconductor production equipment is in a closed state, resulting in incomplete closure of the gate valve for semiconductor production equipment. The reliability and sealing of the gate valve for semiconductor production equipment when closed are improved, and the yield of semiconductor devices produced by the equipment including the gate valve for semiconductor production equipment is higher.
[0035] In some embodiments, see Figure 5 and Figure 6 , the driving device 2 has a first guide groove 211; see Figure 3 and Figure 4 The valve core 3 includes a first body 31 and a first guide portion 32, the first body 31 and the first guide portion 32 are connected, the first guide portion 32 is arranged in the first guide groove 211, and the first guide portion 32 can move along the extension direction of the first guide groove 211; wherein the first guide groove 211 has a first guide area 212 and a second guide area 213 connected to each other, when the first guide portion 32 is located in the first guide area 212, please refer to Fig.13 , the valve core 3 moves toward or away from the first wall 12 relative to the driving device 2; see Fig.12 When the first guide portion 32 is located in the second guide area 213 , the valve core 3 is located in the second locking position, and the driving device 2 can perform linear displacement and limit the valve core 3 .
[0036] In some embodiments, the first guide portion 32 is a columnar object, such as a pin. Part of the first guide portion 32 is disposed in the first guide groove 211 to move in the first guide groove 211, and part of the first guide portion 32 is connected to the first body 31, that is, part of the first guide portion 32 is connected to the groove wall of the first guide groove 211, so that the first body 31 can move along the extension direction of the first guide groove 211, that is, the first guide groove 211 can guide the first body 31.
[0037] Furthermore, in some embodiments, the second guide area 213 extends in a straight line along the first direction X, so that a relative displacement along the first direction X can be generated between the valve core 3 and the driving device 2; the first guide area 212 extends along an oblique line or an arc line, so that the valve core 3, driven by the driving device 2, can move along the first direction X relative to the guide device 4, and can also move toward the first wall 12 along the second direction Y relative to the driving device 2 when moving along the first direction X relative to the guide device 4.
[0038] Specifically, in some embodiments, the driving device 2 further has a first transition position between the first initial position and the first locking position, and the valve core 3 further has a second transition position between the second initial position and the second locking position. When the valve core 3 is located between the second initial position and the second transition position, the driving device 2 is between the first initial position and the first transition position, the valve core 3 and the driving device 2 remain relatively stationary, the valve core 3 moves relative to the guide device 4 along the first direction X, and the first guide portion 32 is stationary in the first guide area 212, see Fig.13 ; When the valve core 3 is located between the second transition position and the second locking position, the driving device 2 is located between the first initial position and the first transition position, and the valve core 3 moves relative to the guide device 4 along the first direction X and along the second direction Y toward the first wall 12. The valve core 3 moves relative to the driving device 2 along the second direction Y. When the valve core 3 reaches the second locking position, the driving device 2 reaches the first transition position, during which the first guide portion 32 moves from the end of the first guide area 212 away from the second guide area 213 to the end of the first guide area 212 close to the second guide area 213; when the valve core 3 is in the second locking position, the driving device 2 moves from the first transition position to the first locking position along the first direction X, during which the first guide portion 32 moves from the end of the second guide area 213 close to the first guide area 212 to the end of the second guide area 213 away from the first guide area 212, please refer to Fig.12During this period, since the second guide area 213 can only guide the first guide part 32 to move along the first direction X, the first guide part 32 cannot move along the second direction Y, that is, the displacement of the first guide part 32 along the second direction Y is limited. Since the valve core 3 includes the first guide part 32 and the first body 31 connected thereto, the first guide groove 211 is provided on the driving device 2, that is, the driving device 2 can limit the position of the valve core 3 in the second locking position along the second direction Y, thereby avoiding the separation of the valve core 3 from the first wall 12, and improving the reliability and sealing of the gate valve for semiconductor production equipment when it is in a closed state.
[0039] In some embodiments, see Figure 3 and Figure 4 The first body 31 includes a main body portion 311 and a first connecting portion 312; the first connecting portion 312 is connected to a side of the main body portion 311 away from the first wall 12, the first connecting portion 312 has a second guide groove 3121, the first guide portion 32 is arranged in the second guide groove 3121, and the first guide portion 32 can move along the extension direction of the second guide groove 3121; wherein, the second guide groove 3121 has a third guide area 3122 and a fourth guide area 3123 connected to each other, when the first guide portion 32 is located in the third guide area 3122, the first guide portion 32 moves toward or away from the first wall 12 relative to the first connecting portion 312; when the first guide portion 32 is located in the fourth guide area 3123, the valve core 3 is located in the second locking position, and the first guide portion 32 follows the driving device 2 to perform a linear displacement.
[0040] Furthermore, in some embodiments, the fourth guide area 3123 extends in a straight line along the first direction X, so that a relative displacement along the first direction X can be generated between the valve core 3 and the driving device 2; the third guide area 3122 extends along an oblique line or an arc line, so that the valve core 3, driven by the driving device 2, can move along the first direction X relative to the guide device 4, and can also move toward the first wall 12 along the second direction Y relative to the driving device 2 when moving along the first direction X relative to the guide device 4.
[0041] It is understandable that the driving device 2 is disposed on the side of the main body 311 away from the first wall 12 , and disposing the first connecting portion 312 on the side of the main body 311 away from the first wall 12 can facilitate the connection between the first connecting portion 312 and the driving device 2 .
[0042] Specifically, when the first guide portion 32 is located in the second guide area 213, the first guide portion 32 is also located in the fourth guide area 3123, and the second guide area 213 guides the first guide portion 32 and enables the first guide portion 32 to move along the first direction X relative to the driving device 2, the first guide portion 32 also moves along the first direction X relative to the first body 31, that is, when the first guide portion 32 is located in the second guide area 213 and the fourth guide area 3123, the driving device 2 can move along the first direction X relative to the first body 31, and the driving device 2 and the valve core 3 do not generate displacement along the second direction Y relative to the guide device 4; when When the first guide portion 32 is located in the first guide area 212, the first guide portion 32 is also located in the third guide area 3122. When the first guide area 212 guides the first guide portion 32 so that the first guide portion 32 moves along the second direction Y relative to the driving device 2, the third guide area 3122 also guides the first guide portion 32 to move along the second direction Y relative to the first body 31. That is, when the first guide portion 32 is located in the first guide area 212 and the third guide area 3122, the driving device 2 can move along the second direction Y relative to the first body 31, and the driving device 2 and the valve core 3 both move along the first direction X relative to the guide device 4.
[0043] It can be understood that the volume inside the accommodating chamber 11 is relatively small, and the sizes of the first guide groove 211 and the second guide groove 3121 are limited. In order to make the relative displacement stroke between the driving device 2 and the first valve body larger, in the above embodiment, a second guide groove 3121 that can be used in conjunction with the first guide groove 211 is added to increase the relative displacement stroke between the first body 31 and the driving device 2, so that the valve core 3 can obtain better closing and locking effects.
[0044] In some embodiments, see Figure 5 and Figure 6 The driving device 2 includes a second body 22 and a second connecting part 21, the second body 22 has a second through hole 221, the second body 22 has a hole wall 222, the hole wall 222 is used to enclose the second through hole 221; the second connecting part 21 is arranged in the second through hole 221 and is connected to the first body 31, the second connecting part 21 has a first guide groove 211, a part of the first body 31 is located in the second through hole 221 and is connected to the second connecting part 21; wherein the hole wall 222 can be connected with the first guide part 32 to limit the first guide part 32.
[0045] Specifically, in some embodiments, a portion of the first body 31 is the first connecting portion 312 , that is, a portion of the first body 31 is disposed in the second through hole 221 .
[0046] In some embodiments, the first guide portion 32 is always in contact with the hole wall 222 during the movement relative to the driving device 2; in other embodiments, the first guide portion 32 is able to contact with the hole wall 222 during the movement relative to the driving device 2.
[0047] In some embodiments, when the first guide portion 32 moves relative to the driving device 2, one end of the first guide portion 32 contacts the hole wall 222; in other embodiments, when the first guide portion 32 moves relative to the driving device 2, both ends of the first guide portion 32 contact the hole wall 222. That is, the hole wall 222 can limit the first guide portion 32 in the axial direction.
[0048] It can be understood that, in some embodiments, the first guide groove 211 and / or the second guide groove 3121 can only limit the first guide portion 32 along the first direction X and the second direction Y. In the above embodiment, when the first guide portion 32 slides in the first guide groove 211 and / or the second guide groove 3121, the end of the first guide portion 32 can be connected to the hole wall 222, and the hole wall 222 can limit the displacement of the first guide portion 32 along the third direction Z.
[0049] In the above embodiment, the second connecting portion 21 is connected to the hole wall 222, that is, the hole wall 222 is arranged on one side of the second connecting portion 21, so that the first guide portion 32 penetrating the second connecting portion 21 can be connected with the hole wall 222, so as to realize the limitation of the first guide portion 32 by the hole wall 222, so that the relative movement between the driving device 2 and the valve core 3 is more stable, and the relative stillness between the driving device 2 and the valve core 3 is also more stable.
[0050] In some embodiments, see Figure 7 and Figure 8 The driving device 2 includes at least two second connecting parts 21, at least two second connecting parts 21 are arranged in the same second through hole 221 and form a gap, part of the first body 31 is located in the gap and clamped between the at least two second connecting parts 21, specifically, the first connecting part 312 is arranged in the gap and clamped between the at least two second connecting parts 21.
[0051] Furthermore, in some embodiments, part of the first body 31 is disposed in the gap and two sides of the part of the first body 31 are respectively connected to two second connection parts 21, so that the two second connection parts 21 can limit the part of the first body 31 along the third direction Z.
[0052] In some embodiments, the driving device 2 has at least two second through holes 221 and includes at least four second connecting portions 21 , so that at least two second through holes 221 are provided with two second connecting portions 21 to form a gap that can limit the first body 31 .
[0053] In the above embodiment, part of the first body 31 is disposed in the gap so that the second connection portion 21 limits the first body 31 along the third direction Z, thereby improving the stability of the valve core 3 during movement.
[0054] In some embodiments, see Figure 8 The valve core 3 also includes a first connecting member 33 , which is located and connected between a portion of the first body 31 and the second connecting portion 21 to form a rolling friction force between the portion of the first body 31 and the second connecting portion 21 .
[0055] Specifically, in some embodiments, the first connecting member 33 is a ball bearing, and a fixing groove is opened on the first body 31 to limit the first connecting member 33, and also allow the first connecting member 33 to roll in the fixing groove, so that rolling friction is generated when the first connecting member 33 contacts and moves relative to the second connecting part 21.
[0056] It can be understood that the portion of the first body 31 clamped between the second connection parts 21 can be limited by connecting with the second connection parts 21. However, the first body 31 will be relatively displaced with the second connection parts 21 along the first direction X and the second direction Y, and sliding friction will be generated between the portion of the first body 31 and the second connection parts 21.
[0057] In the above embodiment, part of the sliding friction force is converted into rolling friction force by providing the first connecting member 33 so that the relative movement between the first body 31 and the second connecting portion 21 is smoother.
[0058] In some embodiments, see Fig. 9 and 10 The first connecting portion 312 has a connecting surface 3124 facing the first body 31; the main body 311 includes a bracket 3111 and a cover plate 3114, the bracket 3111 has a third through hole 3112, and the bracket 3111 has a first surface 3113 away from the first wall 12; the cover plate 3114 is arranged at the third through hole 3112 and connected to the bracket 3111, the cover plate 3114 has a second surface 3115 away from the first wall 12 and a third surface 3116 close to the first wall 12, and the third surface 3116 is used to close the first through hole 121; wherein the first connecting portion 312 is connected to the first body 31 so that the connecting surface 3124 is in contact with the first surface 3113, and the connecting surface 3124 is in contact with the second surface 3115.
[0059] It is understandable that the third surface 3116 has a high requirement for flatness, and the bracket 3111 may be made by bending, stamping and other processes. In the above embodiment, separating the portion where the third surface 3116 is located from the bracket 3111 can reduce the difficulty of processing.
[0060] Specifically, the first connection portion 312 is detachably connected to the first body 31 , and the first connection portion 312 is pressed on the cover plate 3114 so that the cover plate 3114 can be fixed to the third through hole 3112 .
[0061] In some embodiments, the main body 311 further includes a seal 3117 , the cover plate 3114 is sealedly connected to the bracket 3111 via the seal 3117 , and the seal 3117 is used to be sealedly connected to the first wall 12 so that the valve core 3 covers the first through hole 121 .
[0062] In the above embodiment, the difficulty of parts processing can be reduced by providing a detachable cover plate 3114 and a bracket 3111 . Meanwhile, providing a detachable first connecting portion 312 can make the connection between the cover plate 3114 and the bracket 3111 better.
[0063] In some embodiments, see Figure 8 , the driving device 2 has at least two first guide grooves 211; The valve core 3 includes at least two first guide portions 32 . At least one first guide portion 32 is disposed in the at least two first guide grooves 211 to limit the rotation of the valve core 3 relative to the driving device 2 .
[0064] Specifically, the rotation of the valve core 3 relative to the driving device 2 around the axial direction of the first guide portion 32 is limited.
[0065] Specifically, in some embodiments, at least two first guide portions 32 are spaced apart in the plane where the first direction X and the second direction Y are located.
[0066] It is understandable that if the first guide portion 32 is a cylindrical pin, and there is only one first guide portion 32 in the first direction X or the second direction Y, rotation may occur between the driving device 2 and the valve core 3 .
[0067] In the above embodiment, by providing at least two first guide portions 32 spaced apart in the first direction X and the second direction Y, relative rotation between the driving device 2 and the valve core 3 can be further avoided, thereby making the movement of the driving device 2 and the valve core 3 more stable.
[0068] In some embodiments, see Figure 8The valve core 3 further includes a second connecting member 34, which is connected to the first body 31, and the first guide portion 32 is connected to the second connecting member 34, so that at least two second connecting members 34 are relatively stationary.
[0069] In some embodiments, the first connecting portion 312 has a mounting groove connected to the second guide groove 3121 , the second connecting member 34 is disposed in the mounting groove, and the first guiding portion 32 passes through the second guide groove 3121 to communicate with the second connecting member 34 .
[0070] It is understandable that if relative movement occurs between the plurality of first guide portions 32 in the plane where the first direction X and the second direction Y are located, the relative movement between the driving device 2 and the valve core 3 may cause jamming.
[0071] In the above embodiment, the second connecting member 34 is provided to connect the plurality of first guide portions 32 spaced apart in the plane where the first direction X and the second direction Y are located so that the plurality of first guide portions 32 remain relatively still, thereby improving the stability of the relative movement between the valve core 3 and the driving device 2.
[0072] In some embodiments, see Figure 2 and Fig.11 The guide device 4 has a third guide groove 41, and the third guide groove 41 has a fifth guide area 411 and a sixth guide area 412 that are connected to each other; the valve core 3 also includes a second guide portion 35, the second guide portion 35 is connected to the first body 31, the second guide portion 35 is arranged in the third guide groove 41, and the second guide portion 35 can move along the extension direction of the first guide groove 211; wherein, when the second guide portion 35 is located in the fifth guide area 411, the valve core 3 follows the driving device 2 to perform a linear displacement; when the second guide portion 35 is located in the sixth guide area 412, the valve core 3 moves toward or away from the first wall 12 relative to the driving device 2.
[0073] It can be understood that when the valve core 3 is in the second locking position, the second guide portion 35 is located at the end of the third guide groove 41, and the valve core 3 needs to be unlocked only so that the valve core 3 moves relative to the drive device 2 along the direction from the second initial position to the second transition position, so that the valve core 3 approaches the drive device 2 along the second direction Y. However, since the second guide portion 35 is located at the end of the third guide groove 41 at this time, the second guide portion 35 cannot move along the direction from the second initial position to the second transition position, that is, the locking effect is achieved. By moving the drive device 2 in the first locking position to the first transition position, the valve core 3 is moved relative to the drive device 2 along the direction from the second initial position to the second transition position, so that the valve core 3 can approach the drive device 2 along the second direction Y, thereby realizing the transition of the gate valve for semiconductor production equipment from the closed state to the open state.
[0074] The following is the action process of the gate valve used in semiconductor production equipment from opening to closing: 1. The driving device 2 moves from the first initial position along the first direction X to the first transition position; the valve core 3 moves from the second initial position along the first direction X to the second transition position driven by the driving device 2; 2. The valve core 3 reaches the second transition position, and the driving device 2 continues to move toward the first transition position along the first direction X. The valve core 3 is driven by the driving device 2 to move along the first direction X. At the same time, under the guidance of the sixth guide area 412, the first guide area 212 and the third guide area 3122, the valve core 3 generates a sub-movement along the second direction Y and moves toward the first wall 12. 3. The valve core 3 reaches the second locking position, and the driving device 2 reaches the first transition position; 4. The valve core 3 is kept at the second locking position. Under the guidance of the second guide area 213 and the fourth guide area 3123, the driving device 2 moves from the first transition position along the first direction X to the first locking position. The driving device 2 has achieved the limit of the valve core 3 along the second direction Y. 5. The driving device 2 reaches the first locking position, and the driving device 2 limits the valve core 3 along the second direction Y.
[0075] The following is the action process of the gate valve used in semiconductor production equipment from closing to opening: 1. The valve core 3 is kept at the second locking position. Under the guidance of the second guide area 213 and the fourth guide area 3123, the driving device 2 moves from the first locking position to the first transition position along the first direction X; 2. The driving device 2 reaches the first transition position, and the limiting effect of the driving device 2 on the valve core 3 along the second direction Y is released; 4. The driving device 2 moves from the first transition position to the first initial position along the first direction X, and the valve core 3 moves from the second locking position to the second transition position. During this period, the valve core 3 moves relative to the driving device 2 along the second direction Y, and the valve core 3 performs a composite movement along the first direction X and the second direction Y relative to the guide device 4.
[0076] 5. The driving device 2 continues to move along the first direction X toward the first initial position, and the valve core 3 reaches the second transition position; 6. Driven by the driving device 2, the valve core 3 and the driving device 2 simultaneously move relative to the guide device 4 along the first direction X and reach the first initial position and the second initial position respectively.
[0077] Accordingly, the present application also provides a semiconductor production device, the semiconductor production device including a gate valve for semiconductor production equipment as in any one of the above embodiments. The semiconductor production device including the gate valve for semiconductor production equipment has better sealing performance and is not prone to chemical gas mixing, thereby improving the yield of semiconductor devices.
[0078] Specifically, the semiconductor production equipment can be chemical vapor deposition equipment or physical vapor deposition equipment. Specifically, the chemical vapor deposition equipment can be plasma enhanced chemical vapor deposition equipment, hot wire chemical vapor deposition equipment, low pressure chemical vapor deposition equipment, metal organic chemical vapor deposition equipment, atomic layer deposition equipment, chemical beam epitaxy equipment, laser chemical vapor deposition equipment. Specifically, the physical vapor deposition equipment can be vacuum evaporation coating equipment, sputtering coating equipment, ion plating equipment, molecular beam epitaxy equipment, pulsed laser deposition equipment, arc ion plating equipment, hollow cathode ion plating equipment, magnetron sputtering ion plating equipment.
[0079] The above is a detailed introduction to a gate valve for semiconductor production equipment and semiconductor production equipment provided in the embodiments of the present application. Specific examples are used in the present application to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and its core idea of the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A gate valve for semiconductor production equipment, characterized in that: include: A housing (1), the housing (1) having a containing cavity (11), the housing (1) comprising a first wall (12), the first wall (12) being provided with a first through hole (121) communicating with the containing cavity (11); A driving device (2), the driving device (2) being arranged in the accommodating cavity (11), the driving device (2) having a first initial position and a first locking position, and the driving device (2) being capable of performing a linear displacement to move from the first initial position to the first locking position; a valve core (3), the valve core (3) being arranged in the accommodating chamber (11), the valve core (3) being located between the driving device (2) and the first wall (12) and being connected to the driving device (2); the valve core (3) having a second initial position and a second locking position; when the driving device (2) performs the linear displacement, it can drive the valve core (3) to move between the second initial position and the second locking position; A guide device (4), the guide device (4) being arranged in the accommodating cavity (11) and connected to the valve core (3); the guide device (4) being used to cooperate with the drive device (2) to limit the position of the valve core (3) when the valve core (3) moves to the second locking position.
2. The gate valve for semiconductor production equipment according to claim 1, characterized in that: The driving device (2) has a first guide groove (211); The valve core (3) comprises a first body (31) and a first guide portion (32), the first body (31) and the first guide portion (32) are connected, the first guide portion (32) is arranged in the first guide groove (211), and the first guide portion (32) is movable along an extension direction of the first guide groove (211); The first guide groove (211) has a first guide area (212) and a second guide area (213) which are connected to each other; when the first guide portion (32) is located in the first guide area (212), the valve core (3) moves toward or away from the first wall (12) relative to the drive device (2); when the first guide portion (32) is located in the second guide area (213), the valve core (3) is located in the second locking position, and the drive device (2) is able to perform linear displacement and limit the valve core (3).
3. The gate valve for semiconductor production equipment according to claim 2, characterized in that: The first body (31) comprises: Main body (311); a first connecting portion (312), the first connecting portion (312) being connected to a side of the main body portion (311) away from the first wall (12), the first connecting portion (312) having a second guide groove (3121), the first guide portion (32) being arranged in the second guide groove (3121), and the first guide portion (32) being able to move along an extension direction of the second guide groove (3121); The second guide groove (3121) has a third guide area (3122) and a fourth guide area (3123) which are connected to each other; when the first guide portion (32) is located in the third guide area (3122), the first guide portion (32) moves toward or away from the first wall (12) relative to the first connecting portion (312); when the first guide portion (32) is located in the fourth guide area (3123), the valve core (3) is located in the second locking position, and the first guide portion (32) follows the driving device (2) to perform linear displacement.
4. The gate valve for semiconductor production equipment according to claim 2, characterized in that: The driving device (2) comprises: A second body (22), the second body (22) having a second through hole (221), the second body (22) having a hole wall (222), the hole wall (222) being used to enclose the second through hole (221); a second connecting portion (21), the second connecting portion (21) being arranged in the second through hole (221) and connected to the first body (31), the second connecting portion (21) having the first guide groove (211), and a portion of the first body (31) being located in the second through hole (221) and connected to the second connecting portion (21); Wherein, the hole wall (222) can be connected to the first guide portion (32) to limit the position of the first guide portion (32).
5. The gate valve for semiconductor production equipment according to claim 4, characterized in that: The driving device (2) comprises at least two second connecting parts (21), the at least two second connecting parts (21) being arranged in one second through hole (221) and forming a gap, and the portion of the first body (31) being located in the gap and clamped between the at least two second connecting parts (21).
6. The gate valve for semiconductor production equipment according to claim 4, characterized in that: The valve core (3) further comprises a first connecting member (33), the first connecting member (33) being located between the portion of the first body (31) and the second connecting portion (21), and respectively connecting the portion of the first body (31) and the second connecting portion (21), so as to form a rolling friction force between the portion of the first body (31) and the second connecting portion (21).
7. The gate valve for semiconductor production equipment according to claim 3, characterized in that: The first connecting portion (312) has a connecting surface (3124) facing the first body (31); The main body (311) comprises: A bracket (3111), the bracket (3111) having a third through hole (3112), and the bracket (3111) having a first surface (3113) away from the first wall (12); a cover plate (3114), the cover plate (3114) being arranged in the third through hole (3112) and connected to the bracket (3111), the cover plate (3114) having a second surface (3115) away from the first wall (12) and a third surface (3116) close to the first wall (12), the third surface (3116) being used for connecting to the first wall (12); The first connecting portion (312) is connected to the first main body (31) so that the connecting surface (3124) fits the first surface (3113), and the connecting surface (3124) fits the second surface (3115).
8. The gate valve for semiconductor production equipment according to claim 2, characterized in that: The driving device (2) has at least two first guide grooves (211); The valve core (3) comprises at least two first guide portions (32), and at least one of the first guide portions (32) is provided in at least two of the first guide grooves (211) to limit the rotation of the valve core (3) relative to the drive device (2).
9. The gate valve for semiconductor production equipment according to claim 8, characterized in that: The valve core (3) further comprises a second connecting member (34), the second connecting member (34) being connected to the first body (31), and the first guide portion (32) being connected to the second connecting member (34), so that at least two of the first guide portions (32) are relatively stationary.
10. The gate valve for semiconductor production equipment according to claim 2, characterized in that: The guide device (4) has a third guide groove (41), and the third guide groove (41) has a fifth guide area (411) and a sixth guide area (412) that are connected to each other; The valve core (3) further comprises a second guide portion (35), the second guide portion (35) being connected to the first body (31), the second guide portion (35) being arranged in the third guide groove (41), and the second guide portion (35) being movable along an extension direction of the first guide groove (211); When the second guide portion (35) is located in the fifth guide area (411), the valve core (3) follows the driving device (2) to perform linear displacement; when the second guide portion (35) is located in the sixth guide area (412), the valve core (3) moves toward or away from the first wall (12) relative to the driving device (2).
11. A semiconductor production equipment, characterized in that: The semiconductor production equipment comprises the gate valve for semiconductor production equipment according to any one of claims 1 to 10.