Inserting device for circularly supplying flower basket and continuous inserting method

Abstract

The invention provides a wafer inserting device and a continuous wafer inserting method for circularly supplying flower baskets, and belongs to the field of silicon wafer production and manufacturing. The wafer inserting device comprises a wafer separating module, a wafer drawing module, a pre-sorting inserted wafer conveying module and a rapid basket changing module which are arranged in sequence; an empty flower basket overturning module and a full flower basket overturning and conveying module are arranged on the downstream of the rapid basket changing module side by side, and a flower basket hoisting module is arranged above the empty flower basket overturning module and the full flower basket overturning and conveying module; a clamping basket of the rapid basket changing module is driven and controlled by the basket changing transverse moving module and the basket changing lifting module to move on the side face of the transfer mounting vertical plate along a square path. The device adopts a modular design, is convenient to realize side-by-side multi-line arrangement, integrates stations such as wafer separation, wafer drawing, pre-sorting, wafer insertion, circular basket supply and transfer, ensures the yield of inserted wafers, can flexibly control the conveying rate, ensures the process rhythm, improves the working efficiency, and is convenient to popularize and apply in the fields of detection and production processing of sheets such as silicon wafers and the like.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production and manufacturing, and in particular relates to a wafer inserting device with circular supply of a flower basket and a continuous wafer inserting method. Background Art

[0002] In the manufacturing process of photovoltaic silicon wafers, the silicon wafers need to be cleaned, inserted and other processes after slicing. The silicon wafer insertion process is crucial and requires the coordination of the previous and next processes. The existing previous processes such as slicing and extraction are relatively complete, but the rhythm control is not good, and manual intervention is often required to control the rate. The subsequent processes such as the supply of empty baskets and the transportation of full baskets cannot be well coordinated and automated, and also require manual intervention and co-control. Therefore, it is necessary to design an efficient insertion equipment. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a flower basket circular supply inserting device and a continuous inserting method, which can solve the above problems.

[0004] A slice insertion device for circular supply of flower baskets, the slice insertion device comprising a slice separation module, a slice extraction module, a pre-sorting slice insertion conveying module and a quick basket changing module which are arranged in sequence; an empty flower basket flipping module and a full flower basket flipping conveying module are arranged side by side downstream of the quick basket changing module, and a flower basket hoisting module is arranged above the empty flower basket flipping module and the full flower basket flipping conveying module; wherein the quick basket changing module comprises two sets of relatively arranged transfer installation vertical plates, a basket changing transverse movement module, a basket changing lifting module and a clamping basket; the clamping basket moves along a U-shaped path on the side of the transfer installation vertical plate under the control of the basket changing transverse movement module and the basket changing lifting module, so as to realize the circular transfer of empty flower basket supply and full flower basket withdrawal.

[0005] Optionally, the slicing module includes a slicing trough, a sheet pushing unit and a side spray unit. Two roller guide rail assemblies are installed in the slicing trough. The sheet pushing unit is installed on the slicing trough and moves back and forth longitudinally along the bottom of the trough. The side spray unit is vertically arranged in the slicing trough and located at the discharge end where the flower basket is placed, and the spacing between two groups of oppositely arranged side spray pipes of the side spray unit is greater than the width of the silicon wafer.

[0006] Optionally, the sheet extraction module includes a vertical guide wheel assembly, a water absorption plate group, a lifting belt group and an arc-shaped climbing assembly. The vertical guide wheel assembly is vertically arranged at the end of the sheet separation module, the lifting belt group is arranged above the vertical guide wheel assembly, the water absorption plate group is embedded in the middle and lower part of the lifting belt group, the lower end of the arc-shaped climbing assembly is adjacent to the top of the lifting belt group, and the top end of the arc-shaped climbing assembly lifts the sheet after climbing for horizontal output.

[0007] Optionally, the pre-sorting insert conveying module adopts a multi-stage conveying structure and speeds up step by step from front to back, and the pre-sorting insert conveying module includes a fragment detection module, a thickness detection module, a foreign material rejection module, a material receiving box and an air blowing module arranged along the segmented transmission line; the fragment detection module and the thickness detection module are arranged upstream of the foreign material rejection module, and the material receiving box is arranged downstream of the foreign material rejection module; the air blowing module is arranged upstream and / or downstream of the foreign material rejection module.

[0008] Optionally, the clamping basket of the quick basket changing module is installed on the basket changing lifting module, the basket changing lifting module is installed on the basket changing transverse movement module, and the basket changing transverse movement module is installed on the side of the transfer mounting vertical plate; an end displacement sensor is respectively provided at both ends of the transverse movement path of the basket changing transverse movement module, and a transverse movement original position sensor is provided on the inner side of the transverse movement end displacement sensor at the empty flower basket receiving position, and the transverse movement original position sensor is used to enable the basket changing transverse movement module to quickly return to the original position at the empty flower basket receiving position after emergencies such as emergency stop, breakdown, power failure, etc.

[0009] Optionally, the empty flower basket flipping module includes a flower basket flipping mechanism, a flower basket flipping transmission mechanism and a flower basket transmission blocking mechanism; the flower basket flipping mechanism is arranged at one end of the flower basket flipping transmission mechanism, and is used to flip the flower basket; the flower basket flipping transmission mechanism is horizontally arranged, and is used to horizontally transmit the flower basket; the flower basket transmission blocking mechanism is arranged on the transmission line of the flower basket flipping transmission mechanism, and is used for blocking control of flower basket transmission.

[0010] Optionally, the full flower basket flipping and conveying module includes a flower basket flipping mechanism, a flower basket flipping transmission mechanism and a flower basket transmission blocking mechanism of the empty flower basket flipping module, and also includes a flower basket flipping water receiving trough and a transmission outer frame. The flower basket flipping transmission mechanism is arranged in the trough body of the flower basket flipping water receiving trough, and the outer periphery of the flower basket flipping water receiving trough is supported by the transmission outer frame.

[0011] Optionally, the flower basket hoisting module includes a hoisting crossbeam driving unit, a hoisting longitudinal beam driving unit, a hoisting vertical driving unit and a hook unit, and the hook unit is driven by the hoisting crossbeam driving unit, the hoisting longitudinal beam driving unit and the hoisting vertical driving unit to realize X, Y and Z movement; wherein, the hook unit includes a hook mounting top plate, a hook longitudinal driver, a main hook plate, a basket sensing hook plate, a hook tension spring assembly and a hook plate proximity switch; two hook longitudinal drivers are arranged at both ends of the horizontally arranged hook mounting top plate; the two vertically arranged main hook plate tops are fixedly connected to the driving ends of the corresponding side hook longitudinal drivers; the upper and lower movable limit of the basket sensing hook plate is arranged on the side of the main hook plate, and is movable and reset by the hook tension spring assembly; the hook plate proximity switch is arranged on the top of the basket sensing hook plate, which is used to determine whether the silicon wafer flower basket is hung on the main hook plate and the basket sensing hook plate.

[0012] The present invention also provides a continuous sheet inserting method based on the aforementioned sheet inserting device, and the continuous sheet inserting method comprises the following steps.

[0013] Slicing: The cut silicon wafers are transported to the slicing water tank of the slicing module through a flower basket. The flower basket is placed horizontally and the silicon wafers are placed vertically. The wafer pushing unit pushes the silicon wafers forward, and the side spray unit flushes and disperses the pushed silicon wafers from the side to achieve slicing.

[0014] The water absorption plate group of the wafer extraction module absorbs the adjacent silicon wafers, and lifts the absorbed silicon wafers through the lifting belt group and the arc climbing component, climbs the slope and then transfers them to horizontal transportation.

[0015] Pre-sorting horizontal conveying: The pre-sorting wafer conveying module performs defect and thickness inspection on the horizontally conveyed silicon wafers and removes unqualified silicon wafers. The qualified silicon wafers are horizontally conveyed to the wafer insertion station.

[0016] Inserting wafers, the quick basket changing module circulates the supply of empty baskets and transfers full baskets. At the inserting station, the quick basket changing module lifts the vertically arranged empty baskets layer by layer and receives the horizontally transported silicon wafers layer by layer. After the basket is full of silicon wafers, the quick basket changing module transfers the full basket to the entry and exit position.

[0017] The empty basket is supplied, and the flower basket hoisting module hoists the prepared empty flower basket in a horizontal state to the empty flower basket flipping module, and the empty flower basket flipping module transports the horizontal flower basket and flips it to a vertical placement state. Finally, the vertical empty flower basket is transported to the entry and exit position of the quick basket changing module.

[0018] Full basket transfer: the full flower basket located at the entry and exit position of the quick basket change module is transferred in a vertical state to the full flower basket flipping and conveying module, and the full flower basket is flipped into a horizontal state by the full flower basket flipping and conveying module, and the full flower basket in a horizontal state is transferred to the subsequent workstation by the flower basket hoisting module.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows: the modular design of the wafer insertion device of the present application facilitates the realization of parallel multi-line settings to improve efficiency, integrates workstations such as wafer separation, wafer extraction, pre-sorting, wafer insertion, flower basket circulation supply and transfer, ensures the wafer insertion yield, and can flexibly control the conveying rate, ensures the process rhythm, improves work efficiency, and is convenient for promotion and application in the detection and production and processing fields of silicon wafers and other sheet materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of a sheet inserting device for circulating supply of flower baskets of the present invention;

[0021] Figure 2 It is a schematic diagram of the sharding module;

[0022] Figure 3It is a schematic diagram of the extraction module;

[0023] Figure 4 It is a schematic diagram of the side spray unit, the sheet extraction module and the pre-sorting sheet conveying module;

[0024] Figure 5 is a schematic diagram of a quick basket change module;

[0025] Figure 6 It is a schematic diagram of the empty flower basket flipping module;

[0026] Figure 7 It is a schematic diagram of the flower basket transmission blocking mechanism;

[0027] Figure 8 This is a schematic diagram of a full flower basket flipping and conveying module;

[0028] Fig. 9 and Fig.10 This is a schematic diagram of the flower basket hoisting module;

[0029] Fig.11 is a schematic diagram of a hook unit;

[0030] Fig.12 It is a top view schematic diagram of multiple streamlines arranged side by side;

[0031] Fig.13 Schematic diagram of the continuous insertion method.

[0032] In the figure,

[0033] 100, slice module; 110, slice water tank; 120, slice push unit; 130, side spray unit; 140, roller guide assembly;

[0034] 200, sheet extraction module; 210, vertical guide wheel assembly; 220, water absorption plate assembly; 230, lifting belt assembly; 240, arc climbing assembly; 250, auxiliary climbing assembly;

[0035] 300, pre-sorting insert conveying module; 310, segmented transmission line; 320, debris detection module; 330, thickness detection module; 340, foreign material rejection module; 350, material receiving box; 360, air blowing module;

[0036] 400, fast basket changing module; 410, transfer installation vertical plate; 420, basket changing transverse movement module; 430, basket changing lifting module; 440, basket clamping;

[0037] 500, empty flower basket flip module; 510, flower basket flip mechanism; 511, flip axis module; 512, flip drive module; 513, flip pad assembly; 514, flip back plate assembly; 515, flip upper clamping assembly; 516, flip lower clamping assembly; 520, flower basket flip transmission mechanism; 521, transmission frame; 522, transmission drive chain belt module; 523, flip rear buffer assembly; 524, material transmission sensing assembly; 530, flower basket transmission blocking mechanism; 531, blocking installation base plate; 532, blocking vertical plate; 533, blocking plate; 534, blocking drive assembly; 535, blocking in place monitoring assembly;

[0038] 600, full flower basket turning and conveying module; 540, flower basket turning and water receiving trough; 550, transmission outer frame;

[0039] 700, flower basket lifting module; 710, lifting beam drive unit; 720, lifting longitudinal beam drive unit; 730, lifting vertical drive unit; 740, hook unit; 741, hook mounting top plate; 742, hook longitudinal driver; 743, main hook plate; 744, basket sensing hook plate; 745, hook tension spring assembly; 746, hook plate proximity switch; 747, vertical long guide groove; 748, hanging plate column pin. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] Insert device

[0042] A flower basket cyclic supply insert device, see Figure 1-Figure 12 The inserting device includes a slicing module 100, a sheet extraction module 200, a pre-sorting inserting conveying module 300 and a quick basket changing module 400 which are arranged in sequence; an empty flower basket turning module 500 and a full flower basket turning conveying module 600 are arranged side by side downstream of the quick basket changing module 400, and the flower basket hoisting module 700 is arranged above the empty flower basket turning module 500 and the full flower basket turning conveying module 600.

[0043] The insert device realizes modular design: see Fig.12The slicing module 100, the slice extraction module 200, the pre-sorting and inserting conveying module 300, the quick basket changing module 400, the empty basket turning module 500 and the full basket turning conveying module 600 can be arranged in multiple rows side by side, and the basket hoisting module 700 can realize the hoisting and transportation of empty baskets and full baskets for them.

[0044] Among them, see Figure 2 The slicing module 100 includes a slicing trough 110, a sheet pushing unit 120 and a side spray unit 130. Two roller guide rail assemblies 140 are installed in the slicing trough 110 to support a flower basket. The sheet pushing unit 120 is installed on the slicing trough 110 and moves back and forth longitudinally along the bottom of the trough. The side spray unit 130 is vertically arranged in the slicing trough 110 and is located at the discharge end where the flower basket is placed, and the spacing between the two groups of oppositely arranged side spray pipes of the side spray unit 130 is greater than the width of the silicon wafer.

[0045] The segmented water tank 110 includes a segmented water tank body with an open top, a filtering and drainage module, a water tank water inlet pipe group, a segmented overflow baffle and a segmented liquid level meter; the segmented overflow baffle is arranged on the inner side of the peripheral wall of the segmented water tank body to control the overflow liquid level; the segmented liquid level meter is arranged on the inner side of the peripheral wall of the segmented water tank body to monitor the liquid level of the segmented water tank.

[0046] The sheet pushing unit 120 includes a sheet pushing driving mechanism and a sheet pushing guide head. The sheet pushing guide head is connected to the end of the sheet pushing driving mechanism and is arranged close to the middle of the bottom of the sheet dividing water tank 110. Two roller guide rail assemblies 140 are arranged longitudinally and parallelly at intervals at the bottom of the sheet dividing water tank 110.

[0047] In one example, the sheet pushing drive mechanism includes a sheet pushing driver, a drive rail and a drive adapter. The sheet pushing driver and the drive rail adopt a motor slide rail assembly or a linear motor assembly. The drive adapter is arranged in an inverted U shape as a whole. The bottom of one end is set near the bottom of the slice trough and is connected to the sheet pushing guide head. The sheet pushing guide head directly abuts against one surface of the silicon wafer in the flower basket, thereby pushing the silicon wafer in the flower basket to move forward in a controllable manner along the roller guide rail assembly 140 through the sheet pushing drive mechanism.

[0048] The side spray unit 130 includes a side spray mounting plate, a side spray adjustment assembly and a side spray pipe; the two side spray pipes are mounted to both ends of the side spray mounting plate, and the spray angle of the side spray pipe is adjusted by the side spray adjustment assembly.

[0049] Among them, see Figure 3The sheet drawing module 200 includes a vertical guide wheel assembly 210, a water absorption plate group 220, a lifting belt group 230 and an arc-shaped climbing assembly 240. The vertical guide wheel assembly 210 is vertically arranged at the end of the sheet separation module 100, and the lifting belt group 230 is arranged above the vertical guide wheel assembly 210. The water absorption plate group 220 is embedded in the middle and lower part of the lifting belt group 230. The lower end of the arc-shaped climbing assembly 240 is adjacent to the top of the lifting belt group 230. The top end of the arc-shaped climbing assembly 240 will lift the climbing sheet and output it horizontally.

[0050] The vertical guide wheel assembly 210 includes a small wheel mounting member and multiple groups of rust-proof wheels. The multiple groups of rust-proof wheels are installed side by side on the same plane on the small wheel mounting member, and the small wheel mounting member supports the multiple groups of rust-proof wheels to be arranged vertically. In a specific example, the small wheel mounting member adopts a small wheel mounting plate structure with multiple small wheel mounting seats, and the rust-proof wheels adopt plastic bearings, ceramic bearings, etc., and multiple rust-proof wheels are coaxially spaced on each small wheel mounting seat. The back of the small wheel mounting member is installed on the side spray mounting plate of the side spray unit 130.

[0051] The water absorption plate group 220 adopts a water absorption plate structure, and an air source hole, an air extraction hole and a belt avoidance guide groove are opened on the water absorption plate; wherein, the air extraction hole and the belt avoidance guide groove are opened on the front of the water absorption plate. The air source hole can be opened on any surface of the water absorption plate, as long as it is suitable for the installation environment. A water absorption plate installation hole is opened on the back of the water absorption plate, which is used to install the water absorption plate to the middle and lower part of the lifting belt group. The water absorption plate adopts a single-piece structure, and can also adopt a multi-piece combined structure.

[0052] The lifting belt set 230 includes a lifting back plate, a lifting pulley, a lifting belt, a lifting bearing seat and a lifting drive unit; two sets of lifting pulleys are installed to the upper and lower ends of the lifting back plate through the lifting bearing seat, the lifting belt is installed to the lifting pulley, and the lifting drive unit drives the lifting belt to move, thereby driving the vertical sheet to be lifted. The lifting belt adopts a raw belt.

[0053] Furthermore, a belt support block is arranged in the middle of the lifting back plate, and a belt guide groove is provided on the belt support block.

[0054] Furthermore, the lifting belt set 230 is installed on the side fixing plate of the drawing module 200 through the lifting mounting member. In a specific example, the lifting mounting member is a mounting shaft, and both ends are fixedly connected to the side fixing plates on both sides through flanges. Among them, the shaft section of the mounting shaft is connected to the back of the lifting back plate, thereby supporting the entire lifting belt set 230.

[0055] Sheet lifting principle: The water absorption plate group 220 is installed to the lower middle part of the lifting back plate to provide an adsorption force to pull the sheet toward the lifting belt. The lifting belt moves upward to lift the adsorbed sheet.

[0056] The arc-shaped climbing component 240 includes a crescent-shaped guide, a climbing belt, a climbing side support plate, a climbing pulley and a climbing drive module; two climbing pulleys are arranged at both ends of the crescent-shaped guide, and two climbing side support plates are supported on the two side surfaces of the climbing pulley and the crescent-shaped guide; the climbing belt is sleeved on the crescent-shaped guide through the climbing pulley, and the climbing pulley is driven by the climbing drive module.

[0057] The arc climbing assembly 240 also includes a climbing tension roller and a belt idler pulley, which are arranged on the concave surface of the crescent-shaped guide member, and the arc convex surface thereof is the sheet abutting conveying surface.

[0058] Referring to the attached drawings, the climbing tension roller adopts a smooth wheel shaft structure, while the two belt idler wheels adopt groove wheels with multiple guide grooves arranged side by side longitudinally.

[0059] The sheet extraction module 200 further includes an auxiliary climbing component 250, which includes a flat-head nozzle and a climbing auxiliary guide wheel group, which are installed at the lower feeding position of the arc-shaped climbing component 240 through an auxiliary climbing bracket group, wherein the flat-head nozzle sprays obliquely upward toward the arc-shaped surface of the arc-shaped climbing component 240 to facilitate sheet climbing and sheet extraction. The auxiliary climbing component 250 also includes a climbing sheet sensor for sensing the presence or absence of material.

[0060] Furthermore, the sheet extraction module 200 also includes a horizontal guiding group, which is arranged at the discharge end of the arc climbing component 240 , and the horizontal guiding group adopts a pulley or bearing mechanism to receive the sheet output from the discharge end of the arc climbing component 240 .

[0061] Furthermore, both the climbing drive module and the lifting drive unit adopt a motor and a synchronous belt structure to ensure the stability of the slice separation and extraction.

[0062] Among them, see Figure 4 The pre-sorting insert conveying module 300 adopts a multi-stage conveying structure and speeds up step by step from front to back. The pre-sorting insert conveying module 300 includes a debris detection module 320, a thickness detection module 330, a foreign material rejection module 340, a material receiving box 350 and an air blowing module 360 ​​arranged along the segmented transmission line 310; the debris detection module 320 and the thickness detection module 330 are arranged upstream of the foreign material rejection module 340, and the material receiving box 350 is arranged downstream of the foreign material rejection module 340; the air blowing module 360 ​​is arranged upstream and / or downstream of the foreign material rejection module 340.

[0063] Among them, see Figure 4The quick basket changing module 400 includes two sets of relatively arranged transfer mounting vertical plates 410, a basket changing transverse movement module 420, a basket changing lifting module 430 and a clamping basket 440; the clamping basket 440 moves along a U-shaped path on the side of the transfer mounting vertical plate 410 under the control of the basket changing transverse movement module 420 and the basket changing lifting module 430, thereby realizing the cyclic transfer of empty flower basket supply and full flower basket withdrawal.

[0064] Furthermore, the basket clamping 440 of the quick basket changing module 400 is installed on the basket changing lifting module 430, the basket changing lifting module 430 is installed on the basket changing transverse movement module 420, and the basket changing transverse movement module 420 is installed on the side of the transfer mounting vertical plate 410; an end displacement sensor is respectively arranged at both ends of the transverse movement path of the basket changing transverse movement module 420, and a transverse movement original position sensor is arranged on the inner side of the transverse movement end displacement sensor at the empty flower basket receiving position, and the transverse movement original position sensor is used for enabling the basket changing transverse movement module 420 to quickly return to the original position at the empty flower basket receiving position after emergencies such as emergency stop, shutdown, power failure, etc.

[0065] The clamping basket 440 includes a clamping basket frame module with a concave cross-section, a clamping basket clamping module and a clamping basket regularization module, wherein a back panel surface of the clamping basket frame module is installed to the basket changing lifting module 430, the clamping basket clamping module is arranged on the edge of the clamping basket frame module for pushing and clamping the silicon wafer basket to be accommodated, and the clamping basket regularization module is installed to the side of the clamping basket frame module for regularizing the silicon wafers inserted in the opened and closed silicon wafer basket from the side.

[0066] In a specific example, the clamping basket 440 includes a lifting mounting plate, a clamping basket bottom plate, a clamping basket lower guide, a clamping basket lower vertical plate, a flower basket lower clamping assembly, a clamping basket side bracket, a flower basket upper guide, a clamping basket upper clamping assembly and a feed baffle assembly.

[0067] The lifting installation plate, the basket clamping bottom plate and the basket clamping side bracket constitute a basket clamping frame module with a concave cross section, which serves as a basket accommodating frame. One side of the lifting installation plate is mounted to the basket changing lifting module 430, and the lifting installation plate and the basket clamping side bracket are vertically mounted on opposite ends of the horizontally placed basket clamping bottom plate.

[0068] An example of a clamping module for a basket is shown in the figure. A clamping and positioning mechanism is provided at the top and bottom, specifically including a lower clamping assembly for a basket and an upper clamping assembly for a basket. The lower clamping assembly for a basket is provided on one side of the basket side bracket, and is used to clamp the basket from the lower outer side of the basket side bracket; the upper clamping assembly for a basket is provided on the top of the basket side bracket, and is used to clamp the basket from the top outer side of the basket side bracket.

[0069] An example of a basket tidying module is in the form of an inlet baffle assembly. Specifically, the inlet baffle assembly is arranged on the side of the same side of the lifting mounting plate, the basket bottom plate or the basket side bracket, and can be controlled to open or close, and when closed, it stops the silicon wafers on the adjacent side of the basket, so that the silicon wafers are inserted neatly.

[0070] The lower clamping assembly of the flower basket and the upper clamping assembly of the clamping basket are in the form of a combination of a driver and a clamping piece. The driver pushes and pulls the clamping piece to clamp or loosen the positioning piece of the flower basket, such as a hanging column.

[0071] The feed baffle assembly adopts hinge type, swing arm type, lifting drive opening and closing type, etc. In the example shown in the figure, a swing arm structure is adopted, which specifically includes a silicon wafer baffle assembly, a swing arm assembly, a drive gear shaft assembly, a rotating mounting seat assembly, a swing arm drive rack and a swing arm driver.

[0072] In a specific example, when the whole is in a closed state, the silicon wafer baffle assembly is vertically located in the middle position of the same side of the lifting mounting plate and the clamping basket side bracket. Of course, it can also be other positions that match the silicon wafer basket, so as to facilitate the side regularity of the silicon wafer inserts in the basket.

[0073] The feed baffle assembly driven by hinges is connected to the wafer baffle assembly and the adjacent lifting mounting plate, the clamping basket bottom plate or the clamping basket side bracket by a pivoting hinge, and the wafer baffle assembly is driven by a pivoting drive mechanism to pivotally open and close.

[0074] In the example of a lifting-driven opening and closing structure, a lifting-driven air cylinder, electric cylinder, linear motor, chain rail, rack and pinion, etc. are used to lift the silicon wafer baffle assembly to achieve the regularity of the silicon wafer side when the silicon wafer basket is inserted.

[0075] Furthermore, the silicon wafer baffle assembly includes a baffle body and a flexible strip, wherein the flexible strip is arranged at the front end of the baffle body and directly contacts the side surface of the silicon wafer to be regularized to avoid damage to the silicon wafer due to rigid contact.

[0076] Among them, see Figure 6 The empty flower basket turning module 500 includes a flower basket turning mechanism 510, a flower basket turning transmission mechanism 520 and a flower basket transmission blocking mechanism 530; the flower basket turning mechanism 510 is arranged at one end of the flower basket turning transmission mechanism 520, and is used to turn over the flower basket; the flower basket turning transmission mechanism 520 is horizontally arranged, and is used to transmit the flower basket horizontally; the flower basket transmission blocking mechanism 530 is arranged on the transmission line of the flower basket turning transmission mechanism 520, and is used to block the flower basket transmission.

[0077] The flower basket flipping mechanism 510 includes a flip axis module 511, a flip driving module 512, a flip pad assembly 513, a flip back plate assembly 514, and a flip upper clamping assembly 515; the bottom of one end of the flip pad assembly 513 is fixedly connected to the flip axis module 511, the flip back plate assembly 514 is vertically fixed to the flip pad assembly 513, and a flip upper clamping assembly 515 and a flip lower clamping assembly 516 are correspondingly arranged at the top and bottom of the flip back plate assembly 514, and the flip driving module 512 is connected to the flip axis module 511 or to the flip back plate assembly 514.

[0078] Specifically, the flipping upper clamping assembly 515 includes an upper clamping mounting block, an upper clamping driver, an upper clamping fixing block, a clamping connecting rod and a double-headed clamping piece, the bottom of the upper clamping driver is transferred to the top side of the back plate body of the flipping back plate assembly 514 through the upper clamping mounting block, and the bottom of the upper clamping fixing block is fixedly connected to the upper clamping driver housing or the top side of the back plate body; one end of the two clamping connecting rods is pivotally connected to the top of the upper clamping fixing block, and the other end of the two clamping connecting rods is pivotally connected to the middle part of the double-headed clamping piece; the double-headed clamping piece includes two forks, one fork is pivotally connected to the end of the driving piston rod of the upper clamping driver, and the other fork is arranged toward the direction of the basket to be flipped.

[0079] The flap lower clamp assembly 516 includes a lower clamp with a limiting portion and a lower clamp driver, wherein the front portion of the lower clamp extends toward the flip pad assembly 513, and the rear portion of the lower clamp is connected to the driving active end of the horizontally arranged lower clamp driver, wherein the limiting portion of the lower clamp matches the lifting head or positioning piece of the flower basket.

[0080] The flower basket flipping transmission mechanism 520 includes a transmission frame 521, a transmission drive chain belt module 522, a post-flipping buffer component 523 and a material transmission sensing component 524; the transmission chain belt of the transmission drive chain belt module 522 is arranged longitudinally along the transmission frame 521; the post-flipping buffer component 523 is arranged on the crossbeam of the transmission frame 521, and is used to buffer the flower basket flipping mechanism 510 arranged horizontally after flipping; the material transmission sensing component 524 is arranged on the outer side of the longitudinal beam of the transmission frame 521, and is used to detect whether there is a material basket on the transmission line.

[0081] See also Figure 7The flower basket transmission blocking mechanism 530 includes a blocking mounting base plate 531, a blocking vertical plate 532, a blocking plate 533 with a blocking protrusion, a blocking drive assembly 534 and a blocking in-place monitoring assembly 535; the blocking mounting base plate 531 is arranged on the crossbeam of the flower basket flipping transmission mechanism 520, and is used to support the entire flower basket transmission blocking mechanism 530; the bottoms of two parallel and spaced blocking vertical plates 532 are fixed to the blocking mounting base plate 531, one end of two parallel and spaced blocking plates 533 is installed to the blocking vertical plate 532 through a blocking support pivot, and the other end of the two parallel and spaced blocking plates 533 is pivotally connected to the end of the driving rod of the blocking drive assembly 534 through a blocking drive pivot, and the two sides of the housing of the blocking drive of the blocking drive assembly 534 are pivotally connected to the blocking drive support block; the blocking in-place monitoring assembly 535 is installed below the blocking plate 533, and is used to monitor whether the blocking drive is in place.

[0082] Among them, see Figure 8 The full flower basket turning and conveying module 600 includes the flower basket turning mechanism 510, the flower basket turning transmission mechanism 520 and the flower basket transmission blocking mechanism 530 of the empty flower basket turning module 500, and also includes a flower basket turning water receiving trough 540 and a transmission outer frame 550. The flower basket turning transmission mechanism 520 is arranged in the trough body of the flower basket turning water receiving trough 540, and the periphery of the flower basket turning water receiving trough 540 is supported by the transmission outer frame 550. The flower basket turning water receiving trough 540 is mainly used for receiving water.

[0083] In a specific example, the flower basket turning mechanism 510 of the empty flower basket turning module 500 adopts an inclined driving cylinder, a hydraulic cylinder, etc., while the flower basket turning mechanism 510 of the full flower basket turning and conveying module 600 adopts a motor gear rack mechanism or a motor synchronous belt structure.

[0084] Among them, see Figure 9-11The flower basket hoisting module 700 includes a hoisting beam drive unit 710, a hoisting longitudinal beam drive unit 720, a hoisting vertical drive unit 730 and a hook unit 740. The hook unit 740 is driven by the hoisting beam drive unit 710, the hoisting longitudinal beam drive unit 720 and the hoisting vertical drive unit 730 to achieve X, Y and Z direction movement; wherein the hook unit 740 includes a hook mounting top plate 741, a hook longitudinal driver 742, a main hook plate 743, a basket sensing hook plate 744, a hook tension spring assembly 745 and a hook plate proximity switch 746. 46; two hook longitudinal drivers 742 are arranged at both ends of the horizontally arranged hook mounting top plate 741; the tops of the two vertically arranged main hook plates 743 are fixedly connected to the driving ends of the corresponding side hook longitudinal drivers 742; the upper and lower movable limit positions of the basket sensing hook plate 744 are arranged on the sides of the main hook plate 743, and are movable and reset by the hook tension spring assembly 745; the hook plate proximity switch 746 is arranged on the top of the basket sensing hook plate 744, which is used to determine whether the silicon wafer flower baskets are hung on the main hook plate 743 and the basket sensing hook plate 744.

[0085] In a specific example, the main hook plate 743 and the basket sensing hook plate 744 are integrally formed into an anchor shape or a double hook shape that is symmetrical on both sides, which is compatible with the hanging column of the flower basket.

[0086] Furthermore, a plurality of vertical long guide grooves 747 are provided on the main hook plate 743, and the basket sensing hook plate 744 is inserted into the vertical long guide grooves 747 through the hanging plate column pins 748. The hanging plate column pins 748 at the top are used to connect the hook tension spring assembly 745. The hanging plate column pins 748 and the vertical long guide grooves 747 define the vertical movable range of the main hook plate 743 and the basket sensing hook plate 744. The hook tension spring assembly 745 is used to realize the reset of the basket sensing hook plate 744 when the basket is not hung.

[0087] Continuous Insertion Method

[0088] A continuous inserting method based on the above-mentioned inserting device, see Fig.13 , the continuous inserting method comprises the following steps.

[0089] Slicing: the cut silicon wafers are transported to the slicing water tank 110 of the slicing module 100 through the flower basket. The flower basket is placed horizontally and the silicon wafers are placed vertically. The wafer pushing unit 120 pushes the silicon wafers forward, and the side spray unit 130 flushes and disperses the pushed silicon wafers from the side to achieve slicing;

[0090] The water absorption plate group 220 of the wafer extraction module 200 absorbs the adjacent silicon wafers, and lifts the absorbed silicon wafers through the lifting belt group 230 and the arc climbing component 240, climbs the slope and then transfers to horizontal transportation.

[0091] Pre-sorting horizontal conveying, the pre-sorting wafer conveying module 300 performs defect detection and thickness detection on the horizontally conveyed silicon wafers and removes unqualified silicon wafers, and conveys qualified silicon wafers horizontally to the wafer insertion station; at the same time, the water on the silicon wafers is removed by air knives; unqualified silicon wafers include defective wafers such as fragments and scratches, as well as stacked wafers. Furthermore, the pre-sorting wafer conveying module 300 can accelerate the horizontally conveyed silicon wafers step by step to the wafer insertion station, so that the spacing between the silicon wafers is increased to prevent the wafers from being bumped due to insufficient time, and facilitate wafer insertion.

[0092] Inserting wafers, the quick basket changing module 400 circulates the supply of empty baskets and transfers full baskets. At the inserting station, the quick basket changing module 400 lifts the vertically arranged empty baskets layer by layer and receives the horizontally transported silicon wafers layer by layer. After the baskets are filled with silicon wafers, the quick basket changing module 400 transfers the full baskets to the entry and exit positions.

[0093] The empty basket is supplied, and the flower basket hoisting module 700 hoists the prepared empty flower basket in a horizontal state to the empty flower basket flipping module 500, and the empty flower basket flipping module 500 transports and flips the horizontal flower basket to a vertical placement state, and finally the vertical empty flower basket is transported to the entry and exit position of the quick basket changing module 400.

[0094] Full basket transfer: the full flower basket located at the entry and exit position of the quick basket change module 400 is transferred in a vertical state to the full flower basket flipping and conveying module 600, and the full flower basket is flipped into a horizontal state by the full flower basket flipping and conveying module 600, and the full flower basket in a horizontal state is transferred to the subsequent workstation by the flower basket hoisting module 700.

[0095] The above steps are executed repeatedly in no particular order.

[0096] The empty flower baskets come from the empty flower basket station, such as the empty flower baskets after the subsequent sorting machine has processed the materials, and the empty flower baskets for replenishment and spare are transferred to an empty flower basket flow line station.

[0097] The subsequent workstations to which the full flower baskets are transferred include drying, labeling, sorting, etc.

[0098] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A flower basket circular supply inserting device, characterized in that: The sheet inserting device comprises a sheet separation module (100), a sheet extraction module (200), a pre-sorting sheet inserting conveying module (300) and a quick basket changing module (400) which are arranged in sequence; an empty flower basket turning module (500) and a full flower basket turning conveying module (600) are arranged side by side downstream of the quick basket changing module (400); and a flower basket hoisting module (700) is arranged above the empty flower basket turning module (500) and the full flower basket turning conveying module (600); The quick basket changing module (400) comprises two sets of relatively arranged transfer installation vertical plates (410), a basket changing transverse movement module (420), a basket changing lifting module (430) and a clamping basket (440); the clamping basket (440) moves along a U-shaped path on the side of the transfer installation vertical plate (410) under the control of the basket changing transverse movement module (420) and the basket changing lifting module (430), thereby realizing the circular transfer of empty flower basket supply and full flower basket withdrawal.

2. The inserting device according to claim 1, characterized in that: The slicing module (100) comprises a slicing water trough (110), a sheet pushing unit (120) and a side spray unit (130); two roller guide rail assemblies (140) are installed in the slicing water trough (110); the sheet pushing unit (120) is installed on the slicing water trough (110) and moves back and forth longitudinally along the bottom of the trough; the side spray unit (130) is vertically arranged in the slicing water trough (110) and is located at the discharge end where the flower basket is placed; and the spacing between two groups of side spray pipes arranged opposite to each other of the side spray unit (130) is greater than the width of the silicon wafer.

3. The inserting device according to claim 1, characterized in that: The sheet extraction module (200) comprises a vertical guide wheel assembly (210), a water absorption plate assembly (220), a lifting belt assembly (230) and an arc-shaped climbing assembly (240); the vertical guide wheel assembly (210) is vertically arranged at the end of the sheet separation module (100); the lifting belt assembly (230) is arranged above the vertical guide wheel assembly (210); the water absorption plate assembly (220) is embedded in the middle and lower part of the lifting belt assembly (230); the lower end of the arc-shaped climbing assembly (240) is adjacent to the top of the lifting belt assembly (230); and the top end of the arc-shaped climbing assembly (240) outputs the lifted and climbed sheets horizontally.

4. The inserting device according to claim 1, characterized in that: The pre-sorting insert conveying module (300) adopts a multi-stage conveying structure and increases speed step by step from front to back. The pre-sorting insert conveying module (300) comprises a debris detection module (320), a thickness detection module (330), a foreign material rejection module (340), a material receiving box (350) and an air blowing module (360) arranged along a segmented transmission line (310); the debris detection module (320) and the thickness detection module (330) are arranged upstream of the foreign material rejection module (340), and the material receiving box (350) is arranged downstream of the foreign material rejection module (340); and the air blowing module (360) is arranged upstream and / or downstream of the foreign material rejection module (340).

5. The inserting device according to claim 1, characterized in that: The clamping basket (440) of the quick basket changing module (400) is mounted on the basket changing lifting module (430), the basket changing lifting module (430) is mounted on the basket changing transverse movement module (420), and the basket changing transverse movement module (420) is mounted on the side of the transfer mounting vertical plate (410); an end displacement sensor is respectively arranged at both ends of the transverse movement path of the basket changing transverse movement module (420), and a transverse movement original position sensor is arranged inside the transverse movement end displacement sensor at the empty flower basket receiving position, and the transverse movement original position sensor is used to enable the basket changing transverse movement module (420) to quickly return to the original position at the empty flower basket receiving position after an emergency stop, a shutdown, a power failure or other sudden situations.

6. The inserting device according to claim 1, characterized in that: The empty flower basket turning module (500) comprises a flower basket turning mechanism (510), a flower basket turning transmission mechanism (520) and a flower basket transmission blocking mechanism (530); the flower basket turning mechanism (510) is arranged at one end of the flower basket turning transmission mechanism (520) and is used to turn over the flower basket; the flower basket turning transmission mechanism (520) is arranged horizontally and is used to transmit the flower basket horizontally; the flower basket transmission blocking mechanism (530) is arranged on the transmission line of the flower basket turning transmission mechanism (520) and is used to block the flower basket transmission.

7. The inserting device according to claim 6, characterized in that: The full flower basket turning and conveying module (600) comprises a flower basket turning mechanism (510), a flower basket turning and transmission mechanism (520) and a flower basket transmission blocking mechanism (530) of the empty flower basket turning module (500), and also comprises a flower basket turning and water receiving trough (540) and a transmission outer frame (550); the flower basket turning and transmission mechanism (520) is arranged in the trough body of the flower basket turning and water receiving trough (540), and the outer periphery of the flower basket turning and water receiving trough (540) is supported by the transmission outer frame (550).

8. The inserting device according to claim 1, characterized in that: The flower basket hoisting module (700) comprises a hoisting crossbeam driving unit (710), a hoisting longitudinal beam driving unit (720), a hoisting vertical driving unit (730) and a hook unit (740), wherein the hook unit (740) is driven by the hoisting crossbeam driving unit (710), the hoisting longitudinal beam driving unit (720) and the hoisting vertical driving unit (730) to realize X, Y and Z direction movement; wherein the hook unit (740) comprises a hook mounting top plate (741), a hook longitudinal driver (742), a main hook plate (743), a basket sensing hook plate (744), a hook tension spring assembly (745) and a hook plate connection assembly (746). A proximity switch (746); two hook longitudinal drivers (742) are arranged at both ends of a horizontally arranged hook mounting top plate (741); the tops of the two vertically arranged main hook plates (743) are fixedly connected to the driving ends of the corresponding side hook longitudinal drivers (742); the basket sensing hook plate (744) is arranged with upper and lower movable limits on the side of the main hook plate (743) and is movable and reset by a hook tension spring assembly (745); the hook plate proximity switch (746) is arranged on the top of the basket sensing hook plate (744) to determine whether the silicon wafer flower basket is hung on the main hook plate (743) and the basket sensing hook plate (744).

9. A continuous sheet inserting method based on the sheet inserting device according to any one of claims 1 to 8, characterized in that: Continuous insertion methods include: Slicing: the cut silicon wafers are transported to the slicing water tank (110) of the slicing module (100) through a flower basket, the flower basket is placed horizontally, and the silicon wafers are placed vertically. The wafer pushing unit (120) pushes the silicon wafers forward, and the side spray unit (130) flushes and disperses the pushed silicon wafers from the side to achieve slicing; Extracting the wafers, the water absorption plate group (220) of the wafer extraction module (200) absorbs the adjacent silicon wafers, and lifts the absorbed silicon wafers through the lifting belt group (230) and the arc-shaped climbing component (240), climbs the slope and then transfers to horizontal transportation; Pre-sorting horizontal conveying, the pre-sorting wafer insertion conveying module (300) performs defect detection and thickness detection on the horizontally conveyed silicon wafers and removes unqualified silicon wafers, and horizontally conveys qualified silicon wafers to the wafer insertion station; Inserting wafers, the quick basket changing module (400) circulates the supply of empty baskets and transfers full baskets. At the inserting station, the quick basket changing module (400) lifts the vertically arranged empty baskets layer by layer and receives the horizontally transported silicon wafers layer by layer. After the baskets are filled with silicon wafers, the quick basket changing module (400) transfers the full baskets to the in-and-out basket position. The empty basket is supplied, the flower basket hoisting module (700) hoists the prepared empty flower basket in a horizontal state to the empty flower basket flipping module (500), and the empty flower basket flipping module (500) transports the horizontal flower basket and flips it to a vertical placement state, and finally the vertical empty flower basket is transported to the basket entry and exit position of the quick basket changing module (400); Full basket transfer: the full flower basket located at the basket entry and exit position of the quick basket changing module (400) is transferred in a vertical state to the full flower basket turning and conveying module (600), and the full flower basket is turned over by the full flower basket turning and conveying module (600) to a horizontal state, and the full flower basket in a horizontal state is transferred to a subsequent workstation by the flower basket hoisting module (700).

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