Silicon wafer basket circulating transfer device and silicon wafer basket circulating transfer method

Abstract

The invention provides a silicon wafer basket circulating transfer device and a silicon wafer basket circulating transfer method, and belongs to the field of silicon wafer processing. The circulating transfer device comprises a transfer mounting vertical plate, a transverse moving module, a lifting module and a clamping basket; the clamping baskets are driven and controlled to move on the side face of the transferring installation vertical plate along a square path, and circulating transferring of empty basket feeding and full basket retreating is achieved. The clamping basket is transferred by adopting a mouth-shaped or concentric-square-shaped path, so that circulating transfer of empty basket supply and full basket exit is realized, meanwhile, the clamping basket is provided with a tidying module, the side edges of the baskets in the wafer inserting process are ensured to be flush, the working efficiency is improved, and the device is convenient to popularize and apply in the fields of semiconductor silicon wafer detection, production and processing and the like.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer processing, and in particular relates to a silicon wafer flower basket circulation transfer device and a silicon wafer flower basket circulation transfer method. Background Art

[0002] In the manufacturing process of photovoltaic silicon wafers, the silicon wafers need to be cleaned and inserted after being sliced. The efficiency of silicon wafer insertion also determines the efficiency of the entire manufacturing process. The insertion technology inserts the silicon wafers into the wafer basket. This process requires the provision of empty baskets and the transportation of full baskets. Traditional basket provision and transportation are handled by robotic arms or manual labor. Even semi-automatic methods greatly limit the overall efficiency. Therefore, it is necessary to design an efficient supply system for empty and full baskets. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a silicon wafer basket circulation transfer device and a silicon wafer basket circulation transfer method, which can solve the above problems.

[0004] A silicon wafer basket circulation transfer device comprises a transfer installation vertical plate, a transverse movement module, a lifting module and a clamping basket; the clamping basket is installed on the lifting module, the lifting module is installed on the transverse movement module, and the transverse movement module is installed on the side of the transfer installation vertical plate; the clamping basket is driven and controlled to move along a U-shaped path on the side of the transfer installation vertical plate to realize the circulation transfer of empty flower basket supply and full flower basket withdrawal.

[0005] Furthermore, the transverse movement module is driven in the form of a gear rack drive module, including a transverse movement rack, a transverse movement gear, a transverse movement guide rail assembly, a transverse movement mounting plate, a transverse movement driver, a transverse movement limiter, and a transverse movement end displacement sensing assembly; the transverse movement rack, the guide rail of the transverse movement guide rail assembly, the transverse movement limiter, and the sensor body of the transverse movement end displacement sensing assembly are arranged on the same side of the transfer mounting vertical plate; wherein, two transverse movement guide rail assemblies are arranged to enhance stability, two transverse movement limiters are arranged at the front and rear ends of the transfer mounting vertical plate, and two transverse movement end displacement sensing assemblies are arranged at the two end points of the transverse movement path; the transverse movement mounting plate and the slider of the transverse movement guide rail assembly are cooperatively connected with the guide rail on the transfer mounting vertical plate; the transverse movement driver is installed to the transverse movement mounting plate, and the transverse movement gear is installed to the output end of the transverse movement driver and meshes with the transverse movement rack.

[0006] Furthermore, the lifting module includes a lifting driving body and a lifting movable part. The lifting driving body is installed on the transverse movement mounting plate of the transverse movement module, and the lifting movable part is installed with the clamping basket.

[0007] Furthermore, the clamping basket includes a clamping basket frame module with a concave cross-section, a clamping basket clamping module and a clamping basket regularization module, wherein a back panel surface of the clamping basket frame module is installed to the lifting module, the clamping basket clamping module is arranged on the edge of the clamping basket frame module for pushing and clamping the silicon wafer basket to be accommodated, and the clamping basket regularization module is installed to the side of the clamping basket frame module for regularizing the silicon wafers inserted in the opened and closed silicon wafer basket from the side.

[0008] Furthermore, the clamping basket also includes a basket guide module, which is installed on the top and / or bottom of the clamping basket frame module and is used for guiding and positioning the silicon wafer basket in and out.

[0009] The present invention also provides a silicon wafer basket circulation and transportation method based on the aforementioned silicon wafer basket circulation and transportation device, and the silicon wafer basket circulation and transportation method includes the following steps.

[0010] S1. Put the empty flower basket into the frame, and move the empty flower basket into the clamping basket located at the material inlet and outlet origin of the silicon wafer flower basket circulation and transfer device.

[0011] S2. The empty basket moves downward, and the clamping basket drives the empty flower basket to move downward to the lower dead point of the inlet and outlet position.

[0012] S3. The empty basket moves horizontally, and the clamping basket drives the empty flower basket to move horizontally to the lower dead point of the insertion position.

[0013] S4. Insert wafers layer by layer, the clamping basket moves up layer by layer at the wafer inserting position, and the wafer flower basket inserts wafers layer by layer. The flower basket is filled with wafers and moves up to the upper stop point of the wafer inserting position.

[0014] S5. The full basket moves horizontally, and the clamping basket drives the full flower basket to move horizontally to the upper dead point of the inlet and outlet position.

[0015] S6. Remove the full basket. Remove the full flower basket from the clamping basket.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: the present application adopts a U-shaped or U-shaped path to transfer the clamping basket, thereby realizing the circular transportation of the supply of empty flower baskets and the withdrawal of full flower baskets. At the same time, the clamping basket is provided with a regular module to ensure that the sides of the flower basket are flush during the insertion process, thereby improving work efficiency and facilitating promotion and application in the fields of semiconductor silicon wafer detection and production and processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 and Figure 2 Schematic diagrams of the silicon wafer basket circulation and transportation device of the present invention from different viewing angles;

[0018] Figure 3 is a schematic diagram of a lifting module;

[0019] Figure 4 A schematic diagram of a clamping basket in a closed state;

[0020] Figure 5 A schematic diagram of a clamping basket in an open state;

[0021] Figure 6 It is a schematic diagram of two sets of silicon wafer basket circulation transfer devices arranged side by side;

[0022] Figure 7 It is a schematic diagram of the moving path of the clamping basket;

[0023] Figure 8 Schematic diagram of the transportation routes for empty flower baskets and full flower baskets.

[0024] In the figure,

[0025] 10. Transfer and install the vertical board;

[0026] 20. Transverse movement module; 21. Transverse movement rack; 22. Transverse movement gear; 23. Transverse movement guide rail assembly; 24. Transverse movement mounting plate; 25. Transverse movement driver; 26. Transverse movement limiter; 27. Transverse movement end displacement sensing assembly; 28. Transverse movement in-situ sensing assembly;

[0027] 30. Lifting module; 31. Lifting driving body; 32. Lifting movable part;

[0028] 40. Clamping basket; 41. Lifting mounting plate; 42. Clamping basket bottom plate; 43. Clamping basket lower guide; 44. Clamping basket lower vertical plate; 45. Clamping assembly under the flower basket; 451. Lower clamping driver; 452. Clamping rotating plate; 453. Push clamping column; 454. Push clamping piece; 46. Clamping basket side bracket; 47. Flower basket upper guide; 48. Clamping assembly on the clamping basket; 481. Upper clamping driver; 482. Upper pushing block; 49. Feed baffle assembly; 491. Wafer baffle assembly; 492. Swing arm assembly; 493. Drive gear shaft assembly; 494. Rotating mounting seat assembly; 495. Swing arm drive rack; 496. Swing arm driver. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Silicon wafer basket circulation transfer device

[0031] See also Figure 1-Figure 8 The silicon wafer basket circulation transfer device includes a transfer installation vertical plate 10, a transverse movement module 20, a lifting module 30 and a clamping basket 40.

[0032] Arrangement: the clamping basket 40 is installed on the lifting module 30, the lifting module 30 is installed on the transverse module 20, and the transverse module 20 is installed on the side of the transfer installation vertical plate 10; the clamping basket 40 is driven and moved along the U-shaped path on the side of the transfer installation vertical plate 10 to realize the circular transfer of empty flower basket supply and full flower basket withdrawal.

[0033] Among them, see Figure 1 and Figure 2 The traverse module 20 and the lifting module 30 are driven by a gear rack module, a motor belt module, a linear motor module or an electric cylinder module.

[0034] In a specific example, the transverse movement module 20 is driven in the form of a gear rack drive module, including a transverse movement rack 21, a transverse movement gear 22, a transverse movement guide rail assembly 23, a transverse movement mounting plate 24, a transverse movement driver 25, a transverse movement limiter 26, and a transverse movement end displacement sensing assembly 27; the transverse movement rack 21, the guide rail of the transverse movement guide rail assembly 23, the transverse movement limiter 26, and the sensor body of the transverse movement end displacement sensing assembly 27 are arranged on the same side of the transfer mounting vertical plate 10; wherein, two transverse movement guide rail assemblies 23 are arranged to enhance stability, two transverse movement limiters 26 are arranged at the front and rear ends of the transfer mounting vertical plate 10, and two transverse movement end displacement sensing assemblies 27 are arranged at the two end points of the transverse movement path.

[0035] The transverse mounting plate 24 and the slider of the transverse guide rail assembly 23 are cooperated and connected with the guide rail on the transfer mounting vertical plate 10; the transverse driver 25 is installed on the transverse mounting plate 24, and the transverse gear 22 is installed on the output end of the transverse driver 25 and meshes with the transverse rack 21.

[0036] In the specific example, two transverse guide rail assemblies 23 are arranged on the upper and lower sides of the transverse rack 21. The driving motor and reducer of the transverse driver 25 are arranged on the side of the transverse mounting plate 24 away from the transverse rack 21; the transverse gear 22 is installed on the other side of the transverse mounting plate 24 and connected to the output shaft of the reducer.

[0037] In a specific example, the transverse rack 21 is a helical rack, and the transverse gear 22 is a helical gear. Of course, a straight gear form can also be used.

[0038] For further information, see Figure 6 The lateral movement module 20 further includes a lateral movement in-situ sensing component 28, which is arranged inside the lateral movement end displacement sensing component 27 at the empty flower basket receiving position. The lateral movement in-situ sensing component 28 is used to enable the lateral movement module 20 to return to the original position at the empty flower basket receiving position after an emergency stop, downtime, power failure or other emergencies.

[0039] Among them, see Figure 3 The lifting module 30 includes a lifting driving body 31 and a lifting movable part 32 . The lifting driving body 31 is mounted on the transverse moving mounting plate 24 of the transverse moving module 20 , and the lifting movable part 32 is mounted on the clamping basket 40 .

[0040] Through the above arrangement, the lifting module 30 is moved laterally along with the transverse mounting plate 24. In a specific example, the lifting module 30 is preferably driven by an electric cylinder module or a linear motor module.

[0041] The lifting driving body 31 is preferably a motor screw assembly or a linear motor, and the lifting movable part 32 is preferably a corresponding screw rod adapter movable end or a mover end of the linear motor.

[0042] Among them, see Figure 4 and Figure 5 The clamping basket 40 includes a clamping basket frame module with a concave cross-section, a clamping basket clamping module and a clamping basket regularization module, wherein a back panel surface of the clamping basket frame module is mounted to the lifting module 30, the clamping basket clamping module is arranged on the frame of the clamping basket frame module for pushing and positioning the silicon wafer basket to be accommodated, and the clamping basket regularization module is installed to the side of the clamping basket frame module for regularizing the silicon wafers inserted in the silicon wafer basket from the side.

[0043] Furthermore, the clamping basket 40 also includes a basket guide module, which is installed on the top and / or bottom of the clamping basket frame module and is used for guiding and positioning the silicon wafer basket in and out.

[0044] In a specific example, the clamping basket 40 includes a lifting mounting plate 41, a clamping basket bottom plate 42, a clamping basket lower guide 43, a clamping basket lower vertical plate 44, a flower basket lower clamping assembly 45, a clamping basket side bracket 46, a flower basket upper guide 47, a clamping basket upper clamping assembly 48 and a feed baffle assembly 49.

[0045] The lifting installation plate 41, the basket bottom plate 42 and the basket side bracket 46 constitute a basket frame module with a concave cross section, which serves as a basket accommodating frame. One side of the lifting installation plate 41 is mounted to the lifting module 30, and the lifting installation plate 41 and the basket side bracket 46 are vertically mounted on opposite ends of the basket bottom plate 42 placed horizontally.

[0046] An example of a basket guide module being provided at both the top and the bottom, the basket guide module comprises a lower basket guide 43, a lower basket vertical plate 44 and an upper basket guide 47. The lower basket guide 43 and the lower basket vertical plate 44 are provided at the inner sides of both ends of the basket bottom plate 42 for bottom guidance of the basket. The upper basket guide 47 is provided at the top of the lifting mounting plate 41 for top guidance of the basket in and out.

[0047] An example of a clamping module for a clamping basket is shown in the figure. A clamping and positioning mechanism is provided at the top and the bottom, specifically including a lower clamping assembly 45 for a flower basket and an upper clamping assembly 48 for a clamping basket. The lower clamping assembly 45 for a flower basket is provided at one side of a clamping basket side bracket 46, and is used to clamp the flower basket from the lower outer side of the clamping basket side bracket 46; the upper clamping assembly 48 for a flower basket is provided at the top of the clamping basket side bracket 46, and is used to clamp the flower basket from the top outer side of the clamping basket side bracket 46.

[0048] An example of a clamp basket regularization module, see the attached figure, the clamp basket regularization module adopts the form of a feed baffle assembly 49. Specifically, the feed baffle assembly 49 is arranged on the side of the same side of the lifting mounting plate 41, the clamp basket bottom plate 42 or the clamp basket side bracket 46, and can be controlled to open or close, and when closed, it stops the silicon wafers on the adjacent side of the flower basket, so that the silicon wafers are inserted neatly.

[0049] Furthermore, the inner side surfaces of the lower guide member 43 and the lower vertical plate 44 of the clamping basket are provided with guide surfaces or guide parts, which are inclined surfaces, arc surfaces, etc. in a specific example.

[0050] The lower clamping assembly 45 of the flower basket includes a lower clamping driver 451, a clamping rotating plate 452, a pushing clamping column 453 and a pushing clamping piece 454. Specifically, the lower clamping driver 451 is installed at the bottom of the clamping basket bottom plate 42 or the clamping basket side bracket 46, and the driving end of the lower clamping driver 451 is fixedly connected to the clamping rotating plate 452, and the pushing clamping column 453 and the pushing clamping piece 454 are horizontally installed on the clamping rotating plate 452 and arranged toward the clamping basket bottom plate 42. Under the drive of the lower clamping driver 451, the pushing clamping column 453 and the pushing clamping piece 454 are pushed toward the direction of the clamping basket bottom plate 42, so as to clamp the bottom of the flower basket. Of course, the form, quantity and position of the pushing clamping column 453 and the pushing clamping piece 454 are determined according to the structure of the flower basket positioning part, and there may be only one form or other pushing clamp positioning structure forms, such as a push plate.

[0051] Furthermore, a notch is provided on the lower vertical plate 44 of the clamping basket to facilitate the movement of the clamping push column 453 and the clamping push piece 454 .

[0052] The upper clamping assembly 48 of the clamping basket includes an upper clamping driver 481 and an upper pushing block 482 . The upper clamping driver 481 is installed on the top of the clamping basket side bracket 46 , and the upper pushing block 482 is installed on the end of the driving rod of the upper clamping driver 481 .

[0053] Among them, the feed baffle assembly 49 adopts hinge type, swing arm type, lifting drive opening and closing type, etc. In the illustrated example, a swing arm structure is adopted, specifically including: silicon wafer baffle assembly 491, swing arm assembly 492, drive gear shaft assembly 493, rotating mounting seat assembly 494, swing arm drive rack 495 and swing arm driver 496.

[0054] The swing arm driver 496 is installed on the lifting mounting plate 41, the clamping basket bottom plate 42 or the clamping basket side bracket 46, and the swing arm driving rack 495 is driven to be connected to the output shaft of the swing arm driver 496 through a rack adapter. The rotating mounting seat assembly 494 is fixed to the outer end of the corresponding lifting mounting plate 41, the clamping basket bottom plate 42 or the clamping basket side bracket 46 to support the driving gear shaft assembly 493, and the shaft end gear of the driving gear shaft assembly 493 is meshed with the swing arm driving rack 495; one end of the swing arm assembly 492 is arranged on the gear shaft of the driving gear shaft assembly 493 and rotates with the shaft, and the other end is connected to the silicon wafer baffle assembly 491.

[0055] In a specific example, when the whole is in a closed state, the silicon wafer baffle assembly 491 is vertically located in the middle position of the same side of the lifting mounting plate 41 and the clamping basket side bracket 46. Of course, it can also be other positions that match the silicon wafer flower basket, so as to facilitate the side regularity of the silicon wafer inserts in the flower basket.

[0056] The feed baffle assembly 49 driven by a hinge is connected to the wafer baffle assembly 491 and the adjacent lifting mounting plate 41, the clamping basket bottom plate 42 or the clamping basket side bracket 46 by a pivoting hinge, and the wafer baffle assembly 491 is driven by a pivoting drive mechanism to realize the pivoting opening and closing of the silicon wafer baffle assembly 491.

[0057] In the example of a lifting-driven opening and closing structure, the silicon wafer baffle assembly 491 is lifted and lowered by a lifting-driven air cylinder, electric cylinder, linear motor, chain rail, rack and pinion, etc. to achieve the regularity of the side of the silicon wafer when the silicon wafer basket is inserted.

[0058] Furthermore, the silicon wafer baffle assembly 491 includes a baffle body and a flexible strip, wherein the flexible strip is arranged at the front end of the baffle body and directly contacts the side surface of the silicon wafer to be regularized to avoid damage to the silicon wafer due to rigid contact.

[0059] Among them, in order to sense whether it is in place or whether there is a product, a basket sensor is installed on the clamping basket bottom plate 42, a clamping sensor and an in-place buffer or a limit stop are set at the clamping assembly 45 under the basket, and an opening and closing sensor or an opening and closing buffer or a limit stop is set at the feed baffle assembly 49.

[0060] See also Figure 6 Two groups of silicon wafer basket circulation transfer devices are arranged side by side and opposite to each other to save space and improve efficiency. Of course, it can also be expanded to include four, six, eight, etc. groups arranged side by side and opposite to each other.

[0061] Silicon wafer basket recycling method

[0062] A silicon wafer basket circulation and transportation method based on the aforementioned silicon wafer basket circulation and transportation device, see Figure 7and Figure 8 The silicon wafer basket recycling transfer method includes the following steps.

[0063] S1. Put the empty flower basket into the frame, and move the empty flower basket into the clamping basket 40 of the silicon wafer flower basket circulation and transportation device located at the material inlet and outlet origin.

[0064] S2, the empty basket moves downward, and the clamping basket 40 drives the empty flower basket to move downward to the lower dead point of the inlet and outlet position.

[0065] S3, the empty basket is translated, and the clamping basket 40 drives the empty flower basket to translate to the lower dead point of the inserting position.

[0066] S4, insert wafers layer by layer, the clamping basket 40 moves up layer by layer at the wafer inserting position, and the silicon wafer flower basket inserts wafers layer by layer. The flower basket is filled with wafers and moves up to the upper dead point of the wafer inserting position.

[0067] S5, the full basket moves horizontally, and the clamping basket 40 drives the full flower basket to move horizontally to the upper dead center of the inlet and outlet position.

[0068] S6, remove the full basket, and remove the full flower basket from the clamping basket 40.

[0069] Repeat S1-S6 to achieve reciprocating cycle insertion.

[0070] Of course, when an emergency such as a shutdown or emergency stop occurs, the device searches for the origin according to the lateral movement in-situ sensing component 28, and the lateral movement module 20 can return to the origin position of the empty flower basket receiving location.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A silicon wafer basket circulation and transportation device, characterized in that: The device comprises a transfer installation vertical plate (10), a transverse movement module (20), a lifting module (30) and a clamping basket (40); The clamping basket (40) is mounted on the lifting module (30), the lifting module (30) is mounted on the transverse movement module (20), and the transverse movement module (20) is mounted on the side of the transfer installation vertical plate (10); The clamping basket (40) is driven and controlled to move along a U-shaped path on the side of the transfer installation vertical plate (10), thereby realizing the circular transfer of empty flower basket supply and full flower basket withdrawal.

2. The silicon wafer basket circulation and transportation device according to claim 1, characterized in that: The transverse movement module (20) and the lifting module (30) are driven by a gear rack module, a motor belt module, a linear motor module or an electric cylinder module.

3. The silicon wafer basket circulation and transportation device according to claim 1 or 2, characterized in that: The transverse movement module (20) is driven in the form of a gear rack drive module, and includes a transverse movement rack (21), a transverse movement gear (22), a transverse movement guide rail assembly (23), a transverse movement mounting plate (24), a transverse movement driver (25), a transverse movement limiter (26), and a transverse movement end displacement sensing assembly (27); the transverse movement rack (21), the guide rail of the transverse movement guide rail assembly (23), the transverse movement limiter (26), and the sensor body of the transverse movement end displacement sensing assembly (27) are arranged on the same side of the transfer mounting vertical plate (10); wherein two transverse movement guide rail assemblies (23) are arranged to enhance stability, two transverse movement limiters (26) are arranged at the front and rear ends of the transfer mounting vertical plate (10), and two transverse movement end displacement sensing assemblies (27) are arranged at the two end points of the transverse movement path; The transverse mounting plate (24) and the slider of the transverse guide rail assembly (23) are cooperatively connected with the guide rail on the transfer mounting vertical plate (10); the transverse drive (25) is installed on the transverse mounting plate (24), and the transverse gear (22) is installed on the output end of the transverse drive (25) and meshes with the transverse rack (21).

4. The silicon wafer basket circulation and transportation device according to claim 3, characterized in that: The transverse movement module (20) further comprises a transverse movement in-situ sensing component (28), wherein the transverse movement in-situ sensing component (28) is arranged inside the transverse movement end displacement sensing component (27) at the empty flower basket receiving position.

5. The silicon wafer basket circulation and transportation device according to claim 3, characterized in that: The lifting module (30) comprises a lifting drive body (31) and a lifting movable part (32); the lifting drive body (31) is mounted on the transverse movement mounting plate (24) of the transverse movement module (20); and the lifting movable part (32) is mounted on the clamping basket (40).

6. The silicon wafer basket circulation and transportation device according to claim 5, characterized in that: The clamping basket (40) comprises a clamping basket frame module with a concave cross section, a clamping basket clamping module and a clamping basket regularization module, wherein a back panel surface of the clamping basket frame module is mounted to the lifting module (30), the clamping basket clamping module is arranged on the frame of the clamping basket frame module for positioning the push clamp of the silicon wafer basket to be accommodated, and the clamping basket regularization module is mounted on the side of the clamping basket frame module for regularizing the silicon wafers inserted in the opened and closed silicon wafer basket from the side.

7. The silicon wafer basket circulation and transportation device according to claim 6, characterized in that: The clamping basket (40) also includes a basket guide module, which is installed on the top and / or bottom of the clamping basket frame module and is used for guiding and positioning the silicon wafer basket in and out.

8. A method for recycling and transferring silicon wafer baskets based on the silicon wafer basket recycling and transferring device according to any one of claims 1 to 7, characterized in that: The silicon wafer basket recycling method includes: S1, the empty flower basket is put into the frame, and the empty flower basket is moved into the clamping basket (40) located at the material inlet and outlet origin position of the silicon wafer flower basket circulation and transportation device; S2, the empty basket moves downward, and the clamping basket (40) drives the empty flower basket to move downward to the lower dead point of the material inlet and outlet position; S3, the empty basket moves horizontally, and the clamping basket (40) drives the empty flower basket to move horizontally to the lower dead point of the inserting position; S4, inserting wafers layer by layer, the clamping basket (40) moves up layer by layer at the wafer inserting position, inserting wafers layer by layer in the silicon wafer flower basket, and the flower basket is filled with wafers and moves up to the upper dead point of the wafer inserting position; S5, the full basket moves horizontally, and the clamping basket (40) drives the full flower basket to move horizontally to the upper dead center of the inlet and outlet position; S6, remove the full basket, and remove the full flower basket from the clamping basket (40).

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