Gas inlet device and waste gas treatment equipment

Abstract

The invention relates to the technical field of general semiconductor waste gas treatment equipment, and discloses a gas inlet device and waste gas treatment equipment. The air inlet device comprises an air inlet cavity, an upper cover body and a lower cover body. The air inlet cavity comprises an air inlet outer pipe and an air inlet inner pipe; the air inlet outer pipe is arranged on the outer side of the air inlet inner pipe in a sleeving mode, and an annular gap is formed between the air inlet outer pipe and the air inlet inner pipe. A first water inlet is formed in the pipe wall of the air inlet outer pipe and communicates with the annular gap. The upper cover body is located at the upper end of the annular gap, the upper cover body and the upper end of the air inlet outer pipe are assembled in a sealed mode, the upper cover body and the upper end of the air inlet inner pipe are arranged in a spaced mode to form an overflowing gap, and the overflowing gap communicates with the annular gap; a main air inlet is formed in the upper cover body in the axial direction of the air inlet outer pipe, and the main air inlet communicates with an air inlet cavity of the air inlet cavity. The lower cover body is located at the lower end of the annular gap and connected with the lower end of the air inlet outer pipe and the lower end of the air inlet inner pipe so as to seal the lower end of the annular gap. The problem that an air inlet device is easily blocked by dust is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of pan-semiconductor exhaust gas treatment equipment, and in particular to an air intake device and exhaust gas treatment equipment. Background Art

[0002] With the increasing prosperity of the pan-semiconductor industry, production capacity has surged, and various waste gases (NF 3 , PH 3 , B 2 H 6 、SiH 4 Etc.), most of these gases are seriously harmful to the human body and the environment. Most of the unorganized waste gases emitted are heavier than air. If they are emitted into the atmosphere, they will be deposited on the ground after spreading and reach a very high concentration, causing serious environmental pollution and endangering human health. If they encounter a fire, it will cause a fire or even an explosion. Therefore, the market demand for waste gas treatment equipment is very large. However, due to the different internal facilities and environments of semiconductor manufacturers, waste gas treatment equipment also has a large demand for various practical special devices. At present, the waste gas treatment equipment includes an air intake cavity. When the waste gas enters the air intake device during use, dust (silane reacts with oxygen to produce a large amount of silicon dioxide) will block the air inlet, dust will block the negative pressure monitoring port, and dust will block the air intake cavity. Problems such as these will cause the waste gas treatment equipment to stop operating.

[0003] Therefore, how to prevent dust from clogging the air intake device of the exhaust gas treatment equipment is an issue that the industry urgently needs to solve. Summary of the invention

[0004] The invention provides an air intake device and waste gas treatment equipment, which are used to solve the problem that the air intake device of the waste gas treatment equipment in the prior art is easily blocked by dust.

[0005] The present invention provides an air intake device, comprising: An air intake cavity, the air intake cavity comprising an air intake outer tube and an air intake inner tube; the air intake outer tube is sleeved on the outer side of the air intake inner tube and forms an annular gap with the air intake inner tube; a first water inlet is opened on the wall of the air intake outer tube, and the first water inlet is connected to the annular gap; An upper cover body is located at the upper end of the annular gap, the upper cover body is sealed and assembled with the upper end of the air intake outer tube, the upper cover body and the upper end of the air intake inner tube are spaced apart to form a flow gap, and the flow gap is communicated with the annular gap; along the axial direction of the air intake outer tube, the upper cover body is provided with a main air inlet, and the main air inlet is communicated with the air intake cavity of the air intake cavity body; The lower cover body is located at the lower end of the annular gap, and the lower cover body is connected to the lower end of the air intake outer pipe and the lower end of the air intake inner pipe to close the lower end of the annular gap.

[0006] The air intake device provided by the present invention further includes: An overflow pipe, along the axial direction of the air intake outer pipe, the lower cover body is provided with an overflow port connected to the air intake cavity; the overflow pipe is located in the air intake cavity, the lower end of the overflow pipe is installed on the overflow port and is connected to the lower cover body; the upper end of the overflow pipe is spaced apart from the upper cover body.

[0007] The air intake device provided by the present invention further includes: An air intake structure, the air intake structure comprising a main air intake pipe and a branch air intake pipe; the air outlet end of the main air intake pipe is installed at the main air intake port, and a branch air intake port is opened on the side of the main air intake pipe; the branch air intake pipe is installed at the branch air intake port; An air inlet scraper is installed on the main air inlet pipe and is used to scrape dust off the inner wall of the main air inlet pipe.

[0008] According to the air intake device provided by the present invention, the air intake structure includes a plurality of branch air intake pipes; a plurality of branch air intake ports are opened on the side of the main air intake pipe, the plurality of branch air intake ports are arranged at intervals, and the plurality of branch air intake ports correspond one-to-one to the plurality of branch air intake pipes.

[0009] According to the air intake device provided by the present invention, the air intake scraper comprises: A scraper assembly is disposed in the main air intake pipe, and a side surface of the scraper assembly abuts against an inner wall of the main air intake pipe; A scraper connecting assembly is installed on the main air inlet pipe, and one end of the scraper connecting assembly is connected to the scraper assembly; The first scraper driving assembly is connected to the other end of the scraper connecting assembly, and the first scraper driving assembly drives the scraper assembly to move through the scraper connecting assembly.

[0010] According to the air intake device provided by the present invention, the scraper assembly comprises: A scraper bar, wherein the upper end of the scraper bar is connected to the scraper connecting assembly, the lower end of the scraper bar extends axially along the main air intake pipe, and the side surface of the scraper bar abuts against the inner wall of the main air intake pipe; the first scraper driving assembly drives the scraper bar to rotate through the scraper connecting assembly.

[0011] The air intake device provided by the present invention further includes: A negative pressure detection tube, wherein a negative pressure detection port is provided on the wall of the branch air intake pipe; the negative pressure detection tube is installed at the negative pressure detection port and connected to the branch air intake pipe; A negative pressure detection port scraper is installed at the other end of the negative pressure detection tube and is used for entering and exiting the negative pressure detection port to scrape off dust at the negative pressure detection port.

[0012] According to the air intake device provided by the present invention, the negative pressure detection port scraper includes: A flexible scraper, wherein the negative pressure detection tube is sleeved on the outside of the flexible scraper and forms a ventilation channel with the flexible scraper; The second scraper driving assembly is connected to the flexible scraper and is used to drive the flexible scraper to enter and exit the negative pressure detection port.

[0013] The air intake device provided by the present invention further includes: The overflow flange is located below the lower cover body and connected to the lower cover body; the overflow flange has an annular main channel inside, and the overflow flange is provided with a second water inlet and an annular water outlet, the second water inlet is located on the outside of the annular main channel and is connected to the annular main channel; the annular water outlet is located on the inside of the annular main channel and is connected to the annular main channel.

[0014] The present invention also provides an exhaust gas treatment device, comprising any one of the above-mentioned air intake devices.

[0015] The air intake device provided by the present invention is provided with an air intake outer tube having a first water inlet, and an air intake inner tube arranged at an upper end and spaced apart from the upper cover body. The fluid enters the annular gap from the first water inlet, and then flows out of the annular gap from the flow gap, and forms a water curtain on the inner wall of the air intake inner tube. On the one hand, the inner wall of the air intake inner tube is cleaned, that is, the inner wall of the air intake cavity is cleaned; on the other hand, the temperature of the inner wall of the air intake cavity can be reduced, and the corrosion resistance of the air intake inner tube can be improved; in addition, the temperature of the outer wall of the air intake cavity can also be reduced, that is, the temperature of the air intake outer tube can be reduced, thereby protecting the safety of employees during equipment maintenance and inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 This is one of the structural schematic diagrams of the air intake device provided by the present invention.

[0018] Figure 2 This is the second structural schematic diagram of the air intake device provided by the present invention.

[0019] Figure 3 This is the third structural schematic diagram of the air intake device provided by the present invention.

[0020] Figure 4 yes Figure 3 Schematic diagram of the cross-sectional structure of section AA.

[0021] Figure 5 yes Figure 4 Schematic diagram of the enlarged structure at point B in the middle.

[0022] Figure 6 yes Figure 4 Schematic diagram of the enlarged structure at point C in the middle.

[0023] Figure 7 This is the fourth structural schematic diagram of the air intake device provided by the present invention.

[0024] Figure 8 This is one of the structural schematic diagrams of the air inlet scraper of the air inlet device provided by the present invention.

[0025] Fig. 9 This is one of the structural schematic diagrams of the negative pressure detection port scraper of the air intake device provided by the present invention.

[0026] Fig.10 It is a schematic cross-sectional structural diagram of a scraper for a negative pressure detection port of an air intake device provided by the present invention.

[0027] Fig.11 yes Fig.10 Schematic diagram of the enlarged structure at D in the middle.

[0028] Fig.12 It is a schematic structural diagram of the overflow flange of the air intake device provided by the present invention.

[0029] Fig.13 It is a schematic cross-sectional structure diagram of a flange body of an overflow flange of an air intake device provided by the present invention.

[0030] Fig.14 It is a structural schematic diagram of a flange cover plate of an overflow flange of an air intake device provided by the present invention.

[0031] Fig.15 This is the second structural schematic diagram of the air inlet scraper of the air inlet device provided by the present invention.

[0032] Fig.16 This is the third structural schematic diagram of the air inlet scraper of the air inlet device provided by the present invention.

[0033] Fig.17 yes Fig.16 A schematic cross-sectional view of the air inlet scraper is shown.

[0034] Reference numerals: 100, air inlet scraper; 110, scraper assembly; 120, scraper connecting assembly; 130, first scraper driving assembly; 170, support seat; 114, scraper rod; 101, mandrel; 102, bearing; 103, mandrel fixing flange; 104, oil seal; 105, mandrel mounting plate; 106, caliper; 107, scraper connecting piece; 200. Negative pressure detection port scraper; 210, guide assembly; 211, first guide tube; 212, second guide tube; 213, elbow; 220, flexible scraper; 221, scraper section of the detection port; 222, flexible section; 223, connecting section; 230, second scraper driving assembly; 231, driving cylinder; 2311, piston rod; 232, cylinder connecting sleeve; 240, second connecting sleeve; 241, scraper connecting rod; 250, first connection sleeve; 251, pressure detection port

[0035] 300, air inlet cavity; 310, air inlet outer tube; 320, air inlet inner tube; 330, annular gap; 340, flow gap; 350, air inlet cavity; 360, first water inlet; 370, pull ring; 111, scraper plate; 112, vent hole; 113, circumferential side; 121, first scraper connecting rod; 122, first flexible connector; 123, second scraper connecting rod; 124, air outlet; 140, housing; 141, guide tube; 142, fixed tube; 143, straight-through ferrule; 144, straight pipe section; 145, curved pipe section; 150, ferrule air inlet pipe; 160, throttle valve; 400, upper cover body; 410, heat source mounting hole; 500, lower cover body; 600, overflow pipe; 700, air intake structure; 710, main air intake pipe; 720, branch air intake pipe; 800, negative pressure detection tube; 900, overflow flange; 910, flange body; 920, flange cover plate; 940, second water inlet; 912, first convex ring; 913, guide groove; 914, second convex ring; 915, annular flow channel; 916, arc surface. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] Combine the following Figures 1 to 17 The structure and working principle of the air intake device of the present invention are described in detail.

[0038] like Figures 1 to 7 As shown, a specific embodiment of the first aspect of the present invention provides an air intake device. The air intake device includes an air intake cavity 300, an upper cover 400 and a lower cover 500. The air intake cavity 300 includes an air intake outer tube 310 and an air intake inner tube 320; the air intake outer tube 310 is sleeved on the outer side of the air intake inner tube 320, and an annular gap 330 is formed between the air intake outer tube 310 and the air intake inner tube 320; a first water inlet 360 is opened on the tube wall of the air intake outer tube 310, and the first water inlet 360 is connected to the annular gap 330. The upper cover 400 is located at the upper end of the annular gap 330, and the upper cover 400 is sealed and assembled with the upper end of the air intake outer tube 310. The upper cover 400 and the upper end of the air intake inner tube 320 are spaced to form a flow gap 340, and the flow gap 340 is connected with the annular gap 330. Along the axial direction of the air intake outer tube 310, the upper cover 400 is provided with a main air intake port, and the main air intake port is connected with the air intake cavity 350 of the air intake cavity 300. The lower cover 500 is located at the lower end of the annular gap 330, and the lower cover 500 is connected with the lower end of the air intake outer tube 310 and the lower end of the air intake inner tube 320 to close the lower end of the annular gap 330.

[0039] In this embodiment, an air intake outer tube 310 having a first water inlet 360 is provided, and an air intake inner tube 320 is provided at an interval between the upper end and the upper cover body 400. The fluid enters the annular gap 330 from the first water inlet 360, and then flows out of the annular gap 330 from the flow gap 340, and forms a water curtain on the inner wall of the air intake inner tube 320. On the one hand, the inner wall of the air intake inner tube 320 is cleaned, that is, the inner wall of the air intake cavity 350 is cleaned; on the other hand, the temperature of the inner wall of the air intake cavity 350 can be reduced, and the corrosion resistance of the air intake inner tube 320 can be improved; in addition, the temperature of the outer wall of the air intake cavity 300 can also be reduced, that is, the temperature of the air intake outer tube 310 can be reduced, thereby protecting the safety of employees during equipment maintenance and inspection.

[0040] It should be noted that both the intake outer pipe 310 and the intake inner pipe 320 are metal pipes. At high temperatures, the corrosion resistance of metals is reduced and they are more easily corroded by fluorides in the exhaust gas. Therefore, lowering the temperature of the intake inner pipe 320 can improve the corrosion resistance of the intake inner pipe 320.

[0041] It should be noted that the dust includes silicon dioxide formed by the reaction of silane in the exhaust gas with oxygen.

[0042] Furthermore, the outer air intake pipe 310 has two first water inlets 360; the two first water inlets 360 are symmetrically arranged; each first water inlet pipe 360 ​​is installed with a first water inlet pipe, and the two first water inlet pipes allow water to enter the annular gap 330 along a direction tangent to the inner air intake pipe 320. The tangent first water inlet pipes can make the water in the annular gap 330 rotate and flow evenly, and overflow evenly from the upper end of the inner air intake pipe 320, so as to wash away the dust on the inner wall of the inner air intake pipe 320.

[0043] Furthermore, the outer side surface of the air intake outer tube 310 is provided with a pull ring 370, so as to facilitate turning over the air intake cavity 300 during cavity maintenance.

[0044] like Figure 1 and Figure 4 As shown, further, the upper cover 400 is connected to the upper end of the intake outer pipe 310 through an upper flange. Specifically, the upper cover 400 and the upper flange are fixed by bolts and sealed by an O-ring. The upper flange is connected to the upper end of the intake outer pipe 310.

[0045] like Figure 1 and Figure 3 As shown, specifically, along the axial direction of the air intake outer pipe 310, the upper cover body 400 is further provided with a heat source mounting hole 410, the heat source mounting hole 410 is spaced apart from the main air intake port, and the heat source mounting hole 410 is used to mount a heat source.

[0046] like Figure 2 , Figure 3 and Figure 4 As shown, in some embodiments, the air intake device also includes an overflow pipe 600; along the axial direction of the air intake outer pipe 310, the lower cover body 500 is provided with an overflow port connected to the air intake cavity 350; the overflow pipe 600 is located in the air intake cavity 350, and the lower end of the overflow pipe 600 is installed on the overflow port and connected to the lower cover body 500; the upper end of the overflow pipe 600 is spaced apart from the upper cover body 400.

[0047] In this embodiment, the water in the annular gap 330 flows into the air inlet cavity 350 from the flow gap 340. When the air inlet cavity 350 is full, the water will flow out of the air inlet cavity 350 from the overflow pipe 600. This design can increase the processing efficiency: the upper part of the overflow pipe 600 is a heat source, and the flame burns downward through the overflow pipe 600 along the air flow direction. All exhaust gases will also flow through the overflow pipe 600. At this time, the flame and the exhaust gas can fully contact in the overflow pipe 600; secondly, the overflow pipe 600 is protected to prevent the overflow pipe 600 from being quickly burned by the flame or corroded by the corrosive gas at high temperature; thirdly, dust is removed. After the exhaust gas enters the air inlet cavity 350 from the upper cover body 400, it first contacts the water surface in the cavity. At this time, some exhaust gases that are easily soluble in water will dissolve in water, and the dust in the exhaust gas will also sink to the bottom of the water or flow out from the overflow pipe 600.

[0048] Specifically, the overflow pipe 600 is located below the heat source installation hole 410 .

[0049] It can be understood that the diameter of the overflow pipe 600 is significantly smaller than the diameter of the intake inner pipe 320 .

[0050] like Figure 4 As shown, further, the overflow pipe 600 is detachably connected to the lower cover body 500 through a quick disassembly structure. This design is to solve the problem of dust accumulation in the air inlet cavity 350 and difficulty in maintenance. After the overflow pipe 600 is quickly disassembled, the dust can be pushed out of the air inlet cavity 350 from the overflow port.

[0051] Specifically, the quick disassembly structure includes a flange notch of the overflow pipe 600 and a flange buckle provided on the lower cover 500; the buckle and the notch are snap-fitted. The overflow pipe 600 is then fixed to the lower cover 500 using threads and bolts on the flange buckle.

[0052] like Figure 1 As shown, in some embodiments, the air intake device further includes an air intake structure 700 and an air intake scraper 100; the air intake structure 700 includes a main air intake pipe 710 and a branch air intake pipe 720; the air outlet end of the main air intake pipe 710 is installed at the main air intake, and a branch air intake is opened on the side of the main air intake pipe 710; the branch air intake pipe 720 is installed at the branch air intake. The air intake scraper 100 is installed at the main air intake pipe 710 to scrape dust off the inner wall of the main air intake pipe 710.

[0053] In this embodiment, by providing the main air inlet pipe 710 and the branch air inlet pipe 720, an air inlet flow channel can be formed, so that the gas entering from the branch air inlet pipe 720 enters the air inlet chamber 350 after passing through the main air inlet pipe 710. By providing the main air inlet pipe 710, a mounting base can also be provided for the air inlet scraper 100, so that the air inlet scraper 100 can scrape off the dust in the main air inlet to prevent the main air inlet from being blocked by dust. After the process waste gas enters the air inlet chamber 350, it will react rapidly with the reaction gas in the chamber at high temperature (for example, silane reacts with oxygen to produce a large amount of silicon dioxide), and some dust will flow out from the overflow pipe 600 through the air flow. A small amount of dust will adhere to the inner wall of the air inlet structure 700 with the dust in some waste gas under the action of turbulence in the chamber. After a long period of operation, the inner wall of the air inlet structure 700 will be blocked by dust. After installing the air inlet scraper 100, the dust on the inner wall of the air inlet structure 700 can be scraped off regularly.

[0054] Specifically, the main air intake pipe 710 can be a 108 mm pipe, which is welded to a vacuum flange, and the vacuum flange is installed on the upper cover body 400 .

[0055] like Figure 4 and Figure 8 As shown, in some embodiments, the air inlet scraper 100 includes a scraper assembly 110, a scraper connection assembly 120, and a first scraper drive assembly 130. The scraper assembly 110 is disposed in the main air inlet pipe 710, and the side of the scraper assembly 110 abuts against the inner wall of the main air inlet pipe 710. The scraper connection assembly 120 is installed in the main air inlet pipe 710, and one end of the scraper connection assembly 120 is connected to the scraper assembly 110. The first scraper drive assembly 130 is connected to the other end of the scraper connection assembly 120, and the first scraper drive assembly 130 drives the scraper assembly 110 to move through the scraper connection assembly 120.

[0056] In this embodiment, by providing a scraper assembly 110 that can abut against the inner wall of the pipe, a scraper connecting assembly 120 connected to the scraper assembly 110, and a first scraper driving assembly 130 for driving the scraper connecting assembly 120, the scraper connecting assembly 120 can be driven by the first scraper driving assembly 130, thereby driving the scraper assembly 110 to move in the main air intake pipe 710, so that the scraper assembly 110 can scrape off the dust on the inner wall of the main air intake pipe 710 to avoid clogging of the main air intake pipe 710. The problem of dust clogging of the air intake pipe of the air intake chamber 350 of the exhaust gas treatment equipment in the prior art and the difficulty in installing the traditional cylinder scraper is solved.

[0057] It should be noted that, in some embodiments, the first scraper drive assembly 130 can drive the scraper assembly 110 to rotate around the axial direction of the main air intake pipe 710 through the scraper connection assembly 120, that is, the dust on the inner wall of the main air intake pipe 710 is scraped off by the rotating scraper assembly 110. In other embodiments, the first scraper drive assembly 130 can drive the scraper assembly 110 to reciprocate along the axial direction of the main air intake pipe 710 through the scraper connection assembly 120, in other words, the dust on the inner wall of the main air intake pipe 710 is scraped off by the scraper assembly 110 that reciprocates along the axial direction of the main air intake pipe 710. In the specific embodiment of the present invention, there is no limitation on the specific movement form of the scraper assembly 110, as long as the scraper assembly 110 can scrape off the dust on the inner wall of the main air intake pipe 710.

[0058] The following uses the example that the first scraper driving assembly 130 can drive the scraper assembly 110 to rotate axially around the main air intake pipe 710 through the scraper connecting assembly 120 to explain in detail the structure and working principle of the air intake scraper 100 of the present invention.

[0059] like Figure 8 As shown, further, the scraper assembly 110 includes a scraper bar 114; the upper end of the scraper bar 114 is connected to the scraper connecting assembly 120, and the lower end extends along the axial direction of the main air intake pipe 710, and the side of the scraper bar 114 abuts against the inner wall of the main air intake pipe 710; the first scraper driving assembly 130 drives the scraper bar 114 to rotate through the scraper connecting assembly 120. The dust on the inner wall of the main air intake pipe 710 is scraped off by the rotation of the scraper bar 114.

[0060] like Figure 4 As shown, further, a fixing flange of the mandrel 101 is installed at one end of the main air inlet 710 away from the main air inlet, an oil seal 104 is arranged on the upper side of the fixing flange of the mandrel 101, and a mounting plate of the mandrel 101 is installed on the upper side of the oil seal 104. In other words, the mounting plate of the mandrel 101 is assembled with the fixing flange of the mandrel 101 through the oil seal 104, and the mounting plate of the mandrel 101 and the fixing flange of the mandrel 101 are fixed by clamping 106. Along the axial direction of the main air inlet 710, the mounting plate of the mandrel 101 is provided with a mounting hole of the mandrel 101. The scraper connecting assembly 120 includes a mandrel 101 and a bearing 102; the bearing 102 is fixedly installed in the mounting hole of the mandrel 101, the mandrel 101 and the bearing 102 are rotatably matched, the upper end of the mandrel 101 is connected to the first scraper driving assembly 130, and the lower end of the mandrel 101 is connected to the scraper bar 114 of the scraper assembly 110. The first scraper drive assembly 130 drives the core shaft 101 to rotate, and the core shaft 101 drives the scraper rod 114 of the scraper assembly 110 to rotate, so that the scraper assembly 110 scrapes off the dust on the inner wall of the main air inlet pipe 710, and the dust falls into the water surface in the air inlet cavity 350, or sinks to the bottom of the water or flows out of the air inlet cavity 350 with the water.

[0061] Furthermore, the first scraper driving assembly 130 is mounted on the mounting plate of the mandrel 101 through the support seat 170. The first scraper driving assembly 130 is a rotary cylinder, and the rotating shaft of the rotary cylinder is connected to the mandrel 101.

[0062] Furthermore, the lower end of the mandrel 101 is connected to the scraper bar 114 through the scraper connector 107, and the mandrel 101 drives the scraper bar 114 to be installed through the scraper connector 107. Specifically, the scraper connector 107 can be a connecting rod or a connecting disk, and the cross-section of the connecting disk is circular. The connecting rod is horizontally arranged, the middle part of the connecting rod is connected to the mandrel 101, and a scraper bar 114 is installed at both ends of the connecting rod. The connecting disk is placed horizontally and connected to the mandrel 101, and a plurality of scraper bars 114 are arranged at intervals along the circumference of the connecting disk, and the upper end of the scraper bar 114 is connected to the connecting disk, and the lower end extends downward.

[0063] The following is an example in which the first scraper driving assembly 130 can drive the scraper assembly 110 to reciprocate along the axial direction of the main air intake pipe 710 through the scraper connecting assembly 120 to explain in detail the structure and working principle of the air intake scraper 100 of the present invention.

[0064] like Fig.16 As shown, in some embodiments, the scraper assembly 110 includes a scraper plate 111, and the circumferential side surface 113 of the scraper plate 111 is used to abut against the inner wall of the pipe. When the scraper plate 111 moves in the axial direction of the pipe in the pipe, the circumferential side surface 113 of the scraper plate 111 can scrape off the dust on the inner wall of the pipe. One end of the scraper connecting assembly 120 is connected to the first end surface of the scraper plate 111, and the scraper connecting assembly 120 is used to slide with the pipe along the axial direction of the pipe; the first scraper driving assembly 130 drives the scraper plate 111 to reciprocate along the axial direction of the pipe through the scraper connecting assembly 120. By providing the scraper plate 111 whose circumferential side surface abuts against the inner wall of the pipe, and the scraper connecting assembly 120 that slides with the pipe along the axial direction of the pipe, and then cooperating with the first scraper driving assembly 130, dust can be removed from the pipe along the axial direction, and the structure is simple and easy to operate.

[0065] Specifically, the linear cylinder is connected to the other end of the scraper connecting assembly 120 and is used to drive the scraper plate 111 to reciprocate along the axial direction of the pipeline in the pipeline through the scraper connecting assembly 120 to scrape off the dust attached to the inner wall of the pipeline.

[0066] Furthermore, along the axial direction of the pipeline, the scraper plate 111 is provided with a vent hole 112. The vent hole 112 can ensure that the gas in the pipeline flows smoothly when the scraper plate 111 is working, realize continuous action, and improve the working speed.

[0067] It should be noted that the shape of the vent hole 112 is not limited in this embodiment. Preferably, the vent hole 112 is a fan-shaped hole. The central angle of each fan-shaped hole points to the center of the scraper plate 111.

[0068] Specifically, the cross section of the scraper plate 111 is the same as the cross section of the pipeline. For example, the cross section of the scraper plate 111 is circular.

[0069] like Fig.16 and Fig.17 As shown, further, the scraper connection assembly 120 includes a first scraper link 121, a first flexible connector 122 and a second scraper link 123. One end of the first scraper link 121 is connected to the first end surface of the scraper plate 111 and is used to slide with the pipeline; one end of the first flexible connector 122 is connected to the other end of the first scraper link 121. One end of the second scraper link 123 is connected to the other end of the first flexible connector 122, and the other end of the second scraper link 123 is connected to the first scraper drive assembly 130. By providing the first scraper link 121, a mounting base can be provided for the scraper plate 111, which plays a guiding role for the scraper plate 111, ensuring that the scraper plate 111 can move along the axial direction of the pipeline when subjected to force. By providing the first flexible connector 122, the shape of the scraper connection assembly 120 can be adjusted according to actual conditions. For example, the first flexible connector 122 can be bent, which can reduce the space occupied by the scraper connection assembly 120, which is conducive to the miniaturized design of the air inlet scraper 100 and facilitates the use of the air inlet scraper 100 in areas with smaller spaces. In addition, the installation direction of the first scraper drive assembly 130 can be adjusted to reduce the installation space. By providing the second scraper connecting rod 123, an installation foundation can be provided for the first scraper drive assembly 130 to facilitate the transmission of force.

[0070] Specifically, one end of the first scraper link 121 is welded to the first end face of the scraper plate 111, and one end of the first flexible connector 122 is welded to the other end of the first scraper link 121; one end of the second scraper link 123 is welded to the other end of the first flexible connector 122, and the other end of the second scraper link 123 is connected to the piston rod of the cylinder. The piston rod of the cylinder drives the scraper plate 111 to reciprocate along the axial direction of the pipeline through the second scraper link 123, the first flexible connector 122 and the first scraper link 121.

[0071] Furthermore, the first flexible connector 122 may be a tension spring. The tension spring can be used to closely fit the waves in a free state, so that the scraper plate 111 acts as a rigid force when working, thereby improving the dust scraping effect.

[0072] like Fig.15 and Fig.17As shown, further, the air inlet scraper 100 also includes a shell 140; the shell 140 has a receiving cavity inside, the scraper connecting assembly 120 is located in the receiving cavity, and a ventilation gap is formed between the shell 140 and the inner wall; the shell 140 is provided with an air inlet hole connected to the ventilation gap; the first scraper connecting rod 121 is a pipe, and the side of the first scraper connecting rod 121 is provided with a plurality of air outlet holes 124, and the plurality of air outlet holes 124 are arranged at intervals along the axial direction of the first scraper connecting rod 121, and the air outlet holes 124 are connected to the ventilation gap. When the scraper plate 111 reciprocates along the axial direction of the pipeline, the first scraper connecting rod 121 will also move relative to the pipeline, and the air inlet hole, the first scraper connecting rod 121 and the ventilation gap form a purge pipeline, and the air outlet holes 124 on the first scraper connecting rod 121 have a purge function. When the scraper plate 111 is working, the airflow blown by the air outlet 124 will ensure that the first scraper connecting rod 121 is under positive pressure and the airflow continues to flow out, ensuring that no dust enters the interior of the housing 140, and protecting the interior of the scraper from being eroded by dust and exhaust gas.

[0073] Specifically, one end of the housing 140 is used to connect with the pipeline, and the other end of the housing 140 is threadedly assembled with the cylinder, and a sealing gasket is arranged inside. The accommodating cavity of the housing 140 can ensure that the piston rod of the cylinder can move freely.

[0074] Specifically, a ferrule air inlet pipe 150 is installed at the air inlet hole of the outer shell 140, and a throttle valve 160 is installed on the ferrule air inlet pipe 150. The throttle valve 160 is used to adjust the air flow rate entering the ventilation gap to ensure that the air flow discharged from the air outlet 124 can prevent dust and exhaust gas from entering the accommodating cavity of the outer shell 140, thereby ensuring that the interior of the air inlet scraper 100 is not corroded by dust and exhaust gas.

[0075] Further, the housing 140 includes a guide tube 141 and a fixed tube 142; the guide tube 141 is sleeved on the outside of the first scraper connecting rod 121 and the first flexible connector 122, and one end of the guide tube 141 is used to connect with the pipeline. One end of the fixed tube 142 is detachably connected to the other end of the guide tube 141, and the fixed tube 142 is sleeved on the outside of the second scraper connecting rod 123, and the other end of the fixed tube 142 is connected to the first scraper driving assembly 130. The first scraper connecting rod 121 and the first flexible connector 122 can be protected by providing the guide tube 141, and the second scraper connecting rod 123 can be protected by providing the fixed tube 142. By detachably connecting the guide tube 141 and the fixed tube 142, it is convenient to maintain and disassemble the air inlet scraper 100. For example, if the tension spring is damaged and needs to be replaced, the scraper plate 111 is maintained, and the linear cylinder is maintained, the guide tube 141 and the fixed tube 142 can be disassembled first.

[0076] Specifically, the guide tube 141 and the fixed tube 142 are connected by a straight-through ferrule 143 to form a housing 140 with an accommodating cavity inside, the fixed tube 142 is threadedly assembled with the linear cylinder, the piston rod of the linear cylinder is connected to the second scraper connecting rod 123, and an air inlet hole is opened on the tube wall of the fixed tube 142. The length of the fixed tube 142 changes with the stroke of the linear cylinder, and the fixed tube 142 ensures that the movement of the piston rod within the maximum stroke is not interfered.

[0077] It is understandable that the straight-through ferrule 143 may be a straight-through reducing ferrule.

[0078] Furthermore, the guide pipe 141 includes a straight pipe section 144 and a curved pipe section 145. The straight pipe section 144 is sleeved on the outside of the first scraper connecting rod 121, and one end of the straight pipe section 144 is used to connect with the pipeline. The curved pipe section 145 is formed at the other end of the straight pipe section 144; the curved pipe section 145 is sleeved on the outside of the first flexible connector 122; one end of the curved pipe section 145 away from the straight pipe section 144 is detachably connected to the fixed pipe 142. Specifically, one end of the straight pipe section 144 is used for welding connection with the pipeline, the other end of the straight pipe section 144 is integrally formed with the curved pipe section 145, and the other end of the curved pipe section 145 is detachably connected to the fixed pipe 142 through a straight-through ferrule 143. The linear cylinder drives the second scraper link 123 to move relative to the fixed tube 142, and the second scraper link 123 pushes the first flexible connector 122, that is, the tension spring is deformed. At this time, the tension spring moves relative to the curved pipe section 145; the tension spring drives the first scraper link 121 to move in the straight pipe section 144, and at the same time drives the scraper plate 111 to move axially along the pipe, thereby scraping off the dust on the inner wall of the pipe.

[0079] Specifically, the curved pipe section 145 is flexible, that is, the shape of the curved pipe section 145 can be changed, ensuring that the deformation of the first flexible connector 122 will not be interfered by the curved pipe section 145 .

[0080] like Figure 1 , Figure 4 and Figure 7As shown, in some embodiments, the air intake device also includes a negative pressure detection tube 800 and a negative pressure detection port scraper 200; a negative pressure detection port is provided on the wall of the sub-intake pipe 720; the negative pressure detection tube 800 is installed at the negative pressure detection port and connected to the sub-intake pipe 720. The negative pressure detection port scraper 200 is installed at the other end of the negative pressure detection tube 800, and is used to enter and exit the negative pressure detection port to scrape off the dust at the negative pressure detection port. By setting the negative pressure detection port scraper 200, dust can be prevented from clogging the negative pressure detection port, ensuring smooth gas flow in the negative pressure detection tube 800. By opening the negative pressure detection tube 800 on the side of the sub-intake pipe 720, it can be used to install a pressure detection element, such as a pressure sensor, and the pressure sensor detects the pressure to reflect the blockage inside the air intake structure 700, thereby adjusting the number and frequency of use of each scraper. It is also possible to start the scraper at a certain value by setting the negative pressure size, and stop the scraper after the value is restored. Some process exhaust gases cool down during the flow in the pipeline, resulting in the generation of dust particles, or some process exhaust gases themselves contain dust particles. The long-term accumulation of dust in the negative pressure detection port will cause the detection port to be blocked, affecting the negative pressure detection. At this time, a scraper can be installed at the negative pressure detection port to remove dust in conjunction with the negative pressure.

[0081] like Fig. 9 , Fig.10 and Fig.11 As shown, further, the negative pressure detection port scraper 200 includes a flexible scraper 220 and a second scraper drive assembly 230. The negative pressure detection tube 800 is sleeved on the outside of the flexible scraper 220, and forms a ventilation flow channel between the flexible scraper 220. The second scraper drive assembly 230 is connected to the flexible scraper 220, and is used to drive the flexible connector flexible scraper 220 to enter and exit the negative pressure detection port.

[0082] In this embodiment, a flexible scraper 220 is provided in the negative pressure detection tube 800, and a second scraper driving assembly 230 is provided to drive the flexible scraper 220 to enter the negative pressure detection port. The flexible scraper 220 can be driven to move by operating the second scraper driving assembly 230 to scrape off the dust in the negative pressure detection port to prevent the dust from clogging the negative pressure detection port.

[0083] like Figures 9 to 11 As shown, in some embodiments, the negative pressure detection port scraper 200 further includes a guide assembly 210. The guide assembly 210 is sleeved on the outside of the flexible scraper 220, one end of the guide assembly 210 is connected to the negative pressure detection tube 800, and the other end is connected to the mounting end of the second scraper drive assembly 230. By providing the guide assembly 210, the flexible scraper 220 can be protected and a guiding function can be provided for the movement of the flexible scraper 220.

[0084] Exemplarily, the second scraper drive assembly 230 drives the flexible scraper 220 to move toward the negative pressure detection port to move to the first position, at which time the flexible scraper 220 extends into the negative pressure detection port and pushes away the blockage at the negative pressure detection port; the second scraper drive assembly 230 drives the flexible scraper 220 to move away from the negative pressure detection port to move to the second position, at which time the flexible scraper 220 is away from the negative pressure detection port, so that the second scraper drive assembly 230 drives the flexible scraper 220 to switch between the first position and the second position, in the first position, the flexible scraper 220 extends into the negative pressure detection port and pushes the blockage to move; in the second position, the flexible scraper 220 is away from the negative pressure detection port.

[0085] It should be noted that during the normal operation of the exhaust gas treatment equipment, the flexible scraper 220 is in the second position; when the blocked negative pressure detection port needs to be cleaned, the flexible scraper 220 is switched from the second position to the first position, and in the process of the flexible scraper 220 moving from the second position to the first position, the blockage in the negative pressure detection port is cleared.

[0086] It can be understood that the flexible scraper 220 is connected to the negative pressure detection port of the pipeline through the guide component 210, and is inserted into the guide component 210 and moves along the extension direction of the guide component 210 to realize reciprocating movement between the first position and the second position; in the first position, the flexible scraper 220 extends into the negative pressure detection port and pushes the blockage to move, so that the blocked negative pressure detection port can be cleaned during the normal operation of the equipment, avoiding shutdown for cleaning, thereby improving the processing efficiency; in the second position, the flexible scraper 220 is away from the negative pressure detection port and does not affect the normal use of the equipment; thereby, the blocked negative pressure detection port of the equipment is regularly cleaned by the scraper mechanism to avoid blockage and extend the maintenance cycle.

[0087] The scraper mechanism provided in the embodiment of the present invention connects the guide assembly 210 to the negative pressure detection port of the pipeline, inserts the flexible scraper 220 into the guide assembly 210, and drives the flexible scraper 220 to move close to or away from the negative pressure detection port through the second scraper drive assembly 230. The flexible scraper 220 moves close to the negative pressure detection port to push away the blockage at the negative pressure detection port, thereby cleaning the blocked negative pressure detection port and avoiding shutdown caused by blockage, thereby improving the efficiency of equipment use. In addition, by using the flexible scraper 220 to clean the negative pressure detection port, the installation direction and position of the second scraper drive assembly 230 can be adjusted, thereby reducing the installation space, and can be suitable for installation environments with limited space.

[0088] In one embodiment of the present invention, the guide assembly 210 includes a guide tube, and the flexible scraper 220 is inserted into the guide tube, and the guide tube provides a guide function for the movement of the flexible scraper 220 .

[0089] Optional, such as Figure 4As shown, the guide tube includes a first guide tube 211 and a second guide tube 212 connected to each other, the first guide tube 211 and the second guide tube 212 have a preset angle, the first guide tube 211 is connected to the negative pressure detection port, the flexible scraper 220 is passed through the first guide tube 211 and the second guide tube 212, one end of the flexible scraper 220 is close to the negative pressure detection port, and the other end of the flexible scraper 220 is connected to the second scraper drive assembly 230.

[0090] It should be noted that due to the limited floor space of the waste gas treatment equipment, the installation space of the scraper mechanism is limited and the traditional scraper cannot be installed. The present invention realizes the bending design of the guide tube by providing an angle between the first guide tube 211 and the second guide tube 212 to reduce the installation space, which can be suitable for installation in the limited space of the waste gas treatment equipment.

[0091] Furthermore, the first guide tube 211 and the second guide tube 212 are connected by a bent tube 213, and the first guide tube 211 and the second guide tube 212 are connected with a smooth transition, so that the flexible scraper 220 is arranged in a smooth transition at the connection position between the first guide tube 211 and the second guide tube 212, thereby avoiding the flexible scraper 220 from getting stuck or damaged at the connection position between the first guide tube 211 and the second guide tube 212 due to the bending transition.

[0092] Optionally, the guide pipe can be a flexible pipe, and the guide pipe can be bent according to the installation space of the exhaust gas treatment device so that the guide pipe is composed of multiple sections. Optionally, the guide pipe includes the first guide pipe 211, the bent pipe 213 and the second guide pipe 212 after being bent.

[0093] It should be noted that when the guide tube is designed to be bent, the inside of the guide tube should be guaranteed to be free of deformation to ensure the stability of the flexible scraper 220 during movement.

[0094] In this embodiment, the guide assembly 210 includes a second guide tube 212, a bent tube 213 and a first guide tube 211 connected in sequence, and the first guide tube 211 and the second guide tube 212 are arranged vertically; of course, in other embodiments, the angle between the first guide tube 211 and the second guide tube 212 can be designed to be 0°~180° according to the actual installation space, preferably 45°~135°.

[0095] like Fig.10 As shown, in an optional embodiment of the present invention, the scraper 220 includes a detection port scraper segment 221, a flexible segment 222 and a connecting segment 223 which are connected in sequence, the detection port scraper segment 221 is located in the first guide tube 211, the connecting segment 223 is located in the second guide tube 212, and the flexible segment 222 is at least partially located in the bend tube 213.

[0096] It can be understood that the detection port scraper segment 221 is located in the first guide tube 211, and the connecting segment 223 is located in the second guide tube 212. The first guide tube 211 and the second guide tube 212 are both straight tubes, and the detection port scraper segment 221 and the connecting segment 223 are both straight segments; during the movement of the flexible scraper 220 driven by the second scraper drive assembly 230, the detection port scraper segment 221 is always located in the first guide tube 211, and the connecting segment 223 is always located in the second guide tube 212, then the length of the flexible segment 222 is greater than the length of the curved tube 213. During the movement of the flexible scraper 220, the flexible segment 222 is at least partially located in the curved tube 213 to ensure the stability of the detection port scraper segment 221 along the axial movement of the first guide tube 211, thereby improving the cleaning effect.

[0097] Optionally, the cross-section of the flexible scraper 220 may be any shape such as rectangular, triangular, elliptical, etc., to adapt to negative pressure detection ports of different shapes. The present application does not specifically limit the outer contour shape of the flexible scraper 220.

[0098] like Fig. 9 , Fig.10 and Fig.11 As shown, in one embodiment of the present invention, the scraper mechanism also includes a first connecting sleeve 250, the first connecting sleeve 250 has three connecting ports, namely a first connecting port, a second connecting port and a third connecting port, the first connecting port is connected to the negative pressure detection port, the second connecting port is connected to the first guide tube 211 of the guide assembly 210, and the third connecting port serves as a pressure detection port 251.

[0099] For example, the first connecting ferrule 250 adopts a three-way ferrule, the first connecting port and the second connecting port are arranged oppositely, respectively connected to the first guide tube 211 and the negative pressure detection port, and the middle connecting port of the three-way ferrule is used as the pressure detection port 251 for connecting the negative pressure detection component. It should be noted that the negative pressure detection port and the guide assembly 210 are connected by the first connecting ferrule 250, which is convenient for maintenance and assembly.

[0100] In one embodiment of the present invention, the scraper mechanism further includes a second connecting sleeve 240 , a first end of the second connecting sleeve 240 is sleeved on the second guide tube 212 , and the second scraper drive assembly 230 is connected to the second end of the second connecting sleeve 240 .

[0101] For example, the upper end of the second connecting sleeve 240 is connected to the lower end of the second guide tube 212 , and the second scraper driving assembly 230 is fixed to the lower end of the second connecting sleeve 240 .

[0102] In this embodiment, the second connection ferrule 240 adopts a straight-through ferrule, and the lower part of the second guide tube 212 is connected to the straight-through ferrule. According to the size of the second guide tube 212, the second connection ferrule 240 can select a straight-through reducer ferrule. It should be noted that in this embodiment, the second scraper drive assembly 230 and the guide assembly 210 are assembled using the second connection slot, which is convenient for maintenance and assembly.

[0103] Furthermore, the second scraper drive assembly 230 includes a drive cylinder 231 and a cylinder connecting sleeve 232. The drive cylinder 231 is connected to the lower end of the second connecting sleeve 240 through the cylinder connecting sleeve 232. The drive cylinder 231 and the cylinder connecting sleeve 232 are threadedly connected, and a sealing gasket is arranged between the drive cylinder 231 and the cylinder connecting sleeve 232. The sealing gasket includes but is not limited to a Teflon sealing gasket.

[0104] like Fig.11 As shown, it can be understood that the piston rod 2311 of the driving cylinder 231 is located inside the cylinder connecting sleeve 232, and the cylinder connecting sleeve 232 ensures that the piston rod 2311 can move freely. It should be noted here that the length of the cylinder connecting sleeve 232 changes adaptively with the driving stroke to ensure that the piston rod 2311 is free and does not interfere with the cylinder stroke).

[0105] In a preferred embodiment of the present invention, a scraper connecting rod 241 is provided in the second connecting sleeve 240, and the scraper connecting rod 241 connects the flexible scraper 220 and the output of the second scraper driving assembly 230; specifically, the scraper connecting rod 241 connects the connecting section 223 of the flexible scraper 220 and the piston rod 2311.

[0106] It is understandable that the scraper connecting rod 241 in the second connecting sleeve 240 is used to connect the flexible scraper 220 and the driving cylinder 231 on the one hand, and to provide a guide for the movement of the flexible scraper 220 on the other hand. It should be noted here that the piston rod 2311 needs space to move, so there will be a large space in the front when the cylinder is pulled back. The large space is not conducive to the movement of the flexible scraper 220 (the large space makes the flexible scraper 220 twisted without guidance), so the scraper connecting rod 241 provides a guide for the movement of the flexible scraper 220 in the large space.

[0107] In this embodiment, the driving cylinder 231 adopts a double driving cylinder, and the double driving cylinder adopts two specifications of air pipes to prevent the air pipes from being installed incorrectly during the installation process.

[0108] like Figure 1 , Figure 4 and Figure 6As shown, in some embodiments, the air intake device further includes an overflow flange 900; the overflow flange 900 is located below the lower cover body 500 and is connected to the lower cover body 500; the overflow flange 900 has an annular main flow channel inside, and the overflow flange 900 is provided with a second water inlet 940 and an annular water outlet, the second water inlet 940 is located outside the annular main flow channel and is connected to the annular main flow channel; the annular water outlet is located inside the annular main flow channel and is connected to the annular main flow channel. Specifically, the overflow flange 900 is fixed to the lower cover body 500 by screws and sealed by an O-ring. The overflow flange 900 can evenly overflow the liquid medium introduced into the annular main flow channel to form a water curtain, where the water curtain can scrape off the retreated dust and the dust generated by the exhaust gas reaction, so that the dust is dissolved in the water to prevent the dust from accumulating in the subsequent pipeline.

[0109] like Figure 4 , Figure 6 , Figures 12 to 15 As shown, further, the overflow flange 900 includes a flange body 910 and a flange cover plate 920; the flange body 910 has a second water inlet 940, and the side of the flange body 910 facing the lower cover body 500 has a guide groove 913, the second water inlet 940 is connected to the guide groove 913, the flange cover plate 920 is covered on the guide groove 913 to form an annular main channel, and the flange cover plate 920 and the inner edge of the guide groove 913 form an annular water outlet.

[0110] Further, the flange body 910 and the flange cover plate 920 are both annular, the thickness of the flange body 910 is greater than the thickness of the flange cover plate 920, the inner diameter of the flange body 910 is greater than the outer diameter of the flange cover plate 920, and the flange body 910 is located at the outer periphery of the flange cover plate 920. Preferably, an annular groove is provided on the outer peripheral surface of the flange cover plate 920, a sealing ring is provided in the annular groove, and the inner side of the flange body 910 and the outer side of the flange cover plate 920 are sealed by the sealing ring. An annular groove is provided on the side of the upper surface of the flange cover plate 920 away from the flange body 910, a sealing ring is provided in the annular groove, and the upper surface of the flange cover plate 920 and the lower surface of the lower cover body 500 are sealed by the sealing ring. An annular groove is provided on the upper surface of the flange body 910, a sealing ring is provided in the annular groove, and the upper surface of the flange body 910 and the lower surface of the lower cover body 500 are sealed by the sealing ring.

[0111] Furthermore, a first convex ring 912 extending radially inward is provided on the inner side of the flange body 910. The width of the first convex ring 912 is smaller than the width of the flange cover plate 920. The first convex ring 912 is located below the flange cover plate 920. A guide groove 913 is formed on the upper surface of the first convex ring 912. The guide groove 913 is annular. The side wall of the guide groove 913 away from the flange body 910 is an inclined surface. The inclined surface can reduce the resistance of the medium flowing from the guide groove 913 to the annular flow channel 915, and allow more medium to flow to the arc surface 916 of the second convex ring 914.

[0112] The outer side of the flange body 910 is provided with a second water inlet 940 connected to the guide groove 913. There are multiple second water inlets 940, which are evenly spaced along the circumference. Liquid can be input from different directions by setting multiple second water inlets 940. In this embodiment, there are four second water inlets 940. Of course, the number of second water inlets 940 is not limited to this, and is determined according to actual needs. The outer side of the flange body 910 is provided with an inlet pipe connected to the second water inlet 940. The normal of the connection between the inlet pipe and the second water inlet 940 of the flange body 910 is 53.4 degrees. This second water inlet 940 is just tangent to the guide groove 913. After the circulating water is introduced into the four second water inlets 940, it rotates and flows in the guide groove 913. The rotating flow can make the circulating water evenly distributed in the guide groove 913, and finally flows out from the eagle mouth between the flange cover plate 920 and the flange body 910.

[0113] A second convex ring 914 is formed on the side of the lower surface of the flange cover 920 away from the flange body 910. The second convex ring 914 is annular and protrudes downward relative to the upper surface of the flange body 910. The second convex ring 914 is located on the side of the first convex ring 912 away from the flange body 910. The second convex ring 914 and the side of the first convex ring 912 away from the flange body 910 cooperate to form an annular flow channel 915 connected to the guide groove 913. The thickness of the annular flow channel 915 is less than the thickness of the guide groove 913. The annular flow channel 915 has an annular water outlet, so that the guide groove 913 plays a certain temporary storage role for the circulating water, improves the stability of the circulating water in the annular flow channel 915, and the annular water outlet of the annular flow channel 915 is downward.

[0114] In one embodiment of the present invention, Figure 6As shown, the side of the second convex ring 914 facing the first convex ring 912 is an arc surface 916, and the arc surface 916 forms an annular water outlet similar to an eagle's beak between the second convex ring 914 and the first convex ring 912. The circulating water first flows into the guide groove 913 from the inlet pipe to rotate, and then flows from the guide groove 913 to the annular flow channel 915. At this time, the flow rate of the circulating water is accelerated, and then the circulating water is ejected through the annular water outlet to the side of the first convex ring 912 away from the flange body 910, so that the annular water curtain flows downward along the side of the first convex ring 912 away from the flange body 910, thereby washing away the dust on the inner wall (the lower part of the flange body 910 is connected to the reaction chamber, so that the dust on the inner wall of the reaction chamber can also be washed away).

[0115] Specifically, a flip fixing plate is also provided on the side of the overflow flange 900 and the air inlet cavity 350. The flip fixing plate can flip the air inlet cavity 350 and the overflow flange 900 together when the machine is shut down for maintenance, so that the maintenance effect can be achieved quickly.

[0116] Furthermore, in an embodiment of the present invention, the intake pipe of the entire intake device is a KF flange that can be quickly disassembled, and the overflow flange 900 is connected to the components below by a caliper 106 and can also be quickly removed. Therefore, the design here can be quickly maintained, solving the pain point of long maintenance time due to heavy and difficult to carry components during on-site maintenance.

[0117] like Figure 7 As shown, in some embodiments, the air intake structure 700 includes a plurality of branch air intake pipes 720; a plurality of branch air intake ports are provided on the side of the main air intake pipe 710, and the plurality of branch air intake ports are arranged at intervals, and the plurality of branch air intake ports correspond to the plurality of branch air intake pipes 720 one by one. By providing a plurality of branch air intake pipes 720 on the main air intake pipe 710, the Venturi effect can be utilized to allow the exhaust gas to quickly enter the air intake chamber 350 from the branch air intake pipes 720 through the main air intake pipe 710, and dust is not easily accumulated in the air intake structure 700. In addition, by increasing the number of branch air intake pipes 720, the air intake device can also correspond to a variety of host machines, effectively reducing the types of equipment and enhancing the stability of the equipment.

[0118] It should be noted that the number of sub-intake pipes 720 can be increased according to actual needs.

[0119] Specifically, a plurality of sub-intake pipes 720 are arranged at intervals along the circumference of the main intake pipe 710. The included angle between the central axis of the sub-intake pipe 720 and the central axis of the main intake pipe 710 is 45°, which can further increase the speed of the exhaust gas entering the intake cavity 350 and further increase the difficulty of dust accumulation in the intake structure 700.

[0120] A specific embodiment of the second aspect of the present invention provides an exhaust gas treatment device, which includes an air intake device according to any of the above embodiments.

[0121] The exhaust gas treatment device of the present invention includes the air intake device of any of the above embodiments, and therefore has at least the above advantages, which will not be described in detail here.

[0122] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An air intake device, characterized in that: include: An air intake cavity (300), the air intake cavity (300) comprising an air intake outer tube (310) and an air intake inner tube (320); the air intake outer tube (310) is sleeved on the outside of the air intake inner tube (320), and an annular gap (330) is formed between the air intake outer tube (310) and the air intake inner tube (320); a first water inlet (360) is provided on the tube wall of the air intake outer tube (310), and the first water inlet (360) is communicated with the annular gap (330); An upper cover body (400) is located at the upper end of the annular gap (330), the upper cover body (400) is sealed and assembled with the upper end of the air intake outer tube (310), the upper cover body (400) and the upper end of the air intake inner tube (320) are spaced apart to form a flow gap (340), and the flow gap (340) is communicated with the annular gap (330); along the axial direction of the air intake outer tube (310), the upper cover body (400) is provided with a main air intake port, and the main air intake port is communicated with the air intake cavity (350) of the air intake cavity (300); The lower cover body (500) is located at the lower end of the annular gap (330), and the lower cover body (500) is connected to the lower end of the air intake outer tube (310) and the lower end of the air intake inner tube (320) to close the lower end of the annular gap (330).

2. The air intake device according to claim 1, characterized in that: Also includes: An overflow pipe (600) is provided on the lower cover body (500) along the axial direction of the air intake outer pipe (310) and is connected to the air intake cavity (350); the overflow pipe (600) is located in the air intake cavity (350); the lower end of the overflow pipe (600) is mounted on the overflow port and is connected to the lower cover body (500); the upper end of the overflow pipe (600) is spaced apart from the upper cover body (400).

3. The air intake device according to claim 1, characterized in that: Also includes: An air intake structure (700), the air intake structure (700) comprising a main air intake pipe (710) and a branch air intake pipe (720); the air outlet end of the main air intake pipe (710) is mounted on the main air intake port, a branch air intake port is provided on a side of the main air intake pipe (710); the branch air intake pipe (720) is mounted on the branch air intake port; An air inlet scraper (100) is installed on the main air inlet pipe (710) and is used to scrape dust off the inner wall of the main air inlet pipe (710).

4. The air intake device according to claim 3, characterized in that: The air intake structure (700) comprises a plurality of branch air intake pipes (720); a plurality of branch air intake ports are provided on the side of the main air intake pipe (710); the plurality of branch air intake ports are arranged at intervals, and the plurality of branch air intake ports correspond one to one with the plurality of branch air intake pipes (720).

5. The air intake device according to claim 3, characterized in that: The air inlet scraper (100) comprises: A scraper assembly (110) is arranged in the main air intake pipe (710), and a side surface of the scraper assembly (110) abuts against an inner wall of the main air intake pipe (710); A scraper connecting assembly (120) is installed on the main air intake pipe (710), and one end of the scraper connecting assembly (120) is connected to the scraper assembly (110); The first scraper driving assembly (130) is connected to the other end of the scraper connecting assembly (120), and the first scraper driving assembly (130) drives the scraper assembly (110) to move via the scraper connecting assembly (120).

6. The air intake device according to claim 5, characterized in that: The scraper assembly (110) comprises: A scraper bar (114), wherein the upper end of the scraper bar (114) is connected to the scraper connecting assembly (120), the lower end of the scraper bar (114) extends axially along the main air intake pipe (710), and the side surface of the scraper bar (114) abuts against the inner wall of the main air intake pipe (710); the first scraper driving assembly (130) drives the scraper bar (114) to rotate via the scraper connecting assembly (120).

7. The air intake device according to claim 3, characterized in that: Also includes: A negative pressure detection tube (800), wherein the wall of the branch air intake pipe (720) is provided with a negative pressure detection port; the negative pressure detection tube (800) is installed at the negative pressure detection port and is connected to the branch air intake pipe (720); A negative pressure detection port scraper (200) is mounted on the other end of the negative pressure detection tube (800) and is used to enter and exit the negative pressure detection port to scrape away dust at the negative pressure detection port.

8. The air intake device according to claim 7, characterized in that: The negative pressure detection port scraper (200) comprises: A flexible scraper (220), wherein the negative pressure detection tube (800) is sleeved on the outside of the flexible scraper (220) and forms a ventilation channel between the negative pressure detection tube and the flexible scraper (220); A second scraper driving assembly (230) is connected to the flexible scraper (220) and is used to drive the flexible scraper (220) to enter and exit the negative pressure detection port.

9. The air intake device according to any one of claims 1 to 8, characterized in that: Also includes: The overflow flange (900) is located below the lower cover body (500) and is connected to the lower cover body (500); the overflow flange (900) has an annular main flow channel inside, and the overflow flange (900) is provided with a second water inlet (940) and an annular water outlet, the second water inlet (940) is located on the outside of the annular main flow channel and is connected to the annular main flow channel; the annular water outlet is located on the inside of the annular main flow channel and is connected to the annular main flow channel.

10. A waste gas treatment device, characterized in that: An air intake device comprising any one of claims 1 to 9.

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