Single crystal furnace shutdown heat dissipation device, application method thereof and single crystal furnace

Abstract

The invention relates to the technical field of single crystal furnaces, in particular to a single crystal furnace shut-down heat dissipation device, a using method thereof and a single crystal furnace, the single crystal furnace shut-down heat dissipation device is used for being placed in the single crystal furnace to accelerate heat dissipation when the single crystal furnace is shut down, the single crystal furnace shut-down heat dissipation device comprises a tank body, a plurality of heat dissipation fins are evenly arranged on the outer wall of the tank body, and the length direction of the heat dissipation fins is consistent with the axial direction of the tank body. A gap between every two adjacent heat dissipation fins is used for circulation of inert gas introduced into the single crystal furnace. The heat dissipation device can be placed in the single crystal furnace, the heat dissipation time after the single crystal furnace is shut down is shortened, and the heat dissipation efficiency after the single crystal furnace is shut down is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnaces, and in particular to a single crystal furnace shutdown heat dissipation device and a use method thereof, and a single crystal furnace. Background Art

[0002] A single crystal furnace is a special device used to prepare semiconductor materials (such as silicon) or optical materials (such as quartz, sapphire, etc.). It produces single crystals by gradually cooling the molten material while rotating to form a single crystal structure. This process is called "growth" and is the basis for manufacturing high-performance electronic devices and optical components.

[0003] During the single crystal pulling process, the entire cycle can be roughly divided into the steps of furnace assembling - adding materials - melt - temperature adjustment - welding - seeding - shoulder release - shoulder rotation - equal diameter - finishing - furnace stopping - disassembly and cleaning. Excluding the single crystal pulling process, furnace stopping accounts for more than 80% of the time for disassembling the furnace. Compared with natural cooling by argon blowing, this patent can greatly reduce the furnace stopping time and is safe and reliable. Similar related explorations by other companies have not yet been retrieved.

[0004] Existing technology:

[0005] The heat is removed by blowing argon gas, and the furnace body is naturally cooled by water circulation.

[0006] Disadvantages of the existing technology:

[0007] (1) Long time and low efficiency: The specific heat capacity of argon is low, and the heat taken away by blowing is very limited. Even if the argon flow rate is opened to the maximum, it cannot take away considerable heat, thereby reducing the shutdown time.

[0008] (2) The heat dissipation method is single: the existing thermal field has good thermal insulation, and the temperature inside the single crystal furnace cannot be effectively dissipated through other channels, so there is a lot of room for related exploration. Summary of the invention

[0009] The object of the present invention is to provide a single crystal furnace shutdown heat dissipation device, which can be placed in the single crystal furnace, reduce the heat dissipation time after the single crystal furnace is shut down, and improve the heat dissipation efficiency after the single crystal furnace is shut down.

[0010] Another object of the present invention is to provide a single crystal furnace, which can reduce the heat dissipation time after the single crystal furnace is shut down and improve the heat dissipation efficiency after the single crystal furnace is shut down.

[0011] Another object of the present invention is to provide a method for using a single crystal furnace shutdown heat dissipation device, which can reduce the heat dissipation time after the single crystal furnace is shut down and improve the heat dissipation efficiency after the single crystal furnace is shut down.

[0012] The technical solution of the present invention is achieved in this way:

[0013] A heat dissipation device for a single crystal furnace when it is shut down is used to be placed therein to accelerate heat dissipation when the single crystal furnace is shut down. The device comprises a tank body, the outer wall of which is evenly provided with a plurality of heat dissipation fins, the length direction of the heat dissipation fins is consistent with the axial direction of the tank body, and the gaps between adjacent heat dissipation fins are used for the circulation of inert gas introduced into the single crystal furnace.

[0014] Furthermore, the heat dissipation fins are divided into main heat dissipation fins and auxiliary heat dissipation fins, and the thickness of the main heat dissipation fins is greater than the thickness of the auxiliary heat dissipation fins;

[0015] The outer wall of the tank body is evenly provided with a plurality of the main heat dissipation fins, and the outer wall of the tank body is evenly provided with a plurality of auxiliary heat dissipation fins between adjacent main heat dissipation fins.

[0016] Furthermore, the portion of the main heat dissipation fin extending into the interior of the tank body and located inside the tank body is a main extension portion, and the portion of the auxiliary heat dissipation fin extending into the interior of the tank body and located inside the tank body is a auxiliary extension portion.

[0017] Furthermore, the main extension portion and the secondary extension portion have the same extension dimensions in their respective extension directions.

[0018] Furthermore, a plurality of layers of guide plates are arranged in the tank body, and the plurality of layers of guide plates are arranged at intervals along the central axis of the tank body, and the guide plates are used to guide the inert gas introduced into the single crystal furnace to be discharged.

[0019] Furthermore, the distance between the guide plates of each two adjacent layers is different, and the distance between the guide plates of each two adjacent layers tends to gradually increase from the bottom to the top of the tank body.

[0020] Furthermore, the tank body comprises a hollow truncated cone portion, a hollow cylindrical portion and a hollow conical portion arranged in sequence from top to bottom;

[0021] Wherein, the hollow truncated cone portion is a structure that is narrow at the top and thick at the bottom.

[0022] Furthermore, a hanging portion is provided on the top of the tank body for hanging on a single crystal furnace weight.

[0023] A single crystal furnace comprises a furnace body and a single crystal furnace weight, and also comprises the single crystal furnace shutdown heat dissipation device. After the single crystal furnace is shut down, the single crystal furnace shutdown heat dissipation device is placed in the furnace body through the single crystal furnace weight.

[0024] The method for using the single crystal furnace shutdown heat dissipation device comprises the following steps:

[0025] After the single crystal furnace is shut down and the shutdown rod is taken out of the furnace body of the single crystal furnace, the single crystal furnace shutdown heat dissipation device is hung on the single crystal furnace weight and placed in the furnace body of the single crystal furnace through the single crystal furnace weight to accelerate the cooling of the single crystal furnace.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The present application designs a heat dissipation device for a single crystal furnace when it is shut down, which can be placed in the device when the single crystal furnace is shut down to accelerate the heat dissipation of the single crystal furnace. A plurality of heat dissipation fins are arranged on the outer wall of the tank body to accelerate the heat dissipation. The heat dissipation fins at the bottom of the tank body can contact the bottom of the single crystal furnace, which helps to distribute the heat from the bottom of the single crystal furnace more evenly to the entire tank body for heat dissipation. The gaps between the heat dissipation fins can also be used for the smooth flow of inert gas, while increasing the contact area with the inert gas, thereby improving the heat exchange efficiency and the heat dissipation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 It is a front view of the heat dissipation device for stopping a single crystal furnace according to the present invention;

[0030] Figure 2 For the present invention Figure 1 Cross-section at JJ;

[0031] Figure 3 For the present invention Figure 2 Sectional view at LL;

[0032] Figure 4 For the present invention Figure 2 Sectional view at NN in the middle;

[0033] Figure 5 For the present invention Figure 4 A magnified view of the local structure at center A;

[0034] Figure 6 For the present invention Figure 4 A magnified view of the local structure at B in the middle;

[0035] Figure 7 It is a top view of the suspension part of the present invention.

[0036] In the figure:

[0037] 1-tank body; 101-hollow frustum portion; 102-hollow cylinder portion; 103-hollow cone portion;

[0038] 2- cooling fins; 201- sickle handle structure; 202- sickle blade structure;

[0039] 3-guide vane;

[0040] 4- Suspension part. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0044] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0045] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0046] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0048] Example 1

[0049] Reference Figure 1-Figure 7 The present embodiment provides a single crystal furnace shutdown heat dissipation device, which is placed in the single crystal furnace when it is shut down to accelerate the heat dissipation of the single crystal furnace. The device comprises a tank body 1, and a plurality of heat dissipation fins 2 are evenly arranged on the outer wall of the tank body 1. The length direction of the heat dissipation fins 2 is consistent with the axial direction of the tank body 1. The gaps between adjacent heat dissipation fins 2 are used for the circulation of the inert gas introduced into the single crystal furnace.

[0050] In fact, the tank body 1 is placed vertically in the single crystal furnace and is in contact with the bottom of the single crystal furnace through the heat dissipation fins 2 at its bottom. The temperature at the bottom of the single crystal furnace is conducted and dissipated through the heat dissipation fins 2. The heat dissipation fins 2 are arranged on the tank body 1 from top to bottom.

[0051] In this embodiment, the tank body 1 includes a hollow truncated cone portion 101, a hollow cylindrical portion 102, and a hollow conical portion 103, which are arranged in sequence from top to bottom; the hollow truncated cone portion 101 is a structure that is narrow at the top and thick at the bottom. The heat dissipation fins 2 are arranged along the outer wall of the tank body 1 from top to bottom, and each heat dissipation fin 2 is distributed on the outer side of the hollow cylindrical portion 102 and the hollow conical portion 103. Each heat dissipation fin 2 is in an inverted sickle shape as a whole, and the sickle-shaped heat dissipation fin 2 has a straight sickle handle structure 201 on the outer wall of the hollow cylindrical portion 102, and a curved sickle blade structure 202 on the outer wall of the hollow conical portion 103. The inner wall of the sickle blade structure 202 is a sloped structure and fits with the outer wall of the hollow conical portion 103, and the outer wall is a circular arc surface structure, such as Figure 1As shown. The distance between the outer wall and the inner wall of the sickle handle structure 201 is its width. The sickle handle structures 201 in all the heat dissipation fins 2 extend a certain dimension toward the inside of the tank body 1 along the width direction thereof, so as to increase the width of the heat dissipation fins 2 and the heat dissipation area. Moreover, the sickle blade structures 202 in all the heat dissipation fins 2 can also extend a certain dimension toward the inside of the tank body 1. Preferably, the dimension inwardly extending the sickle blade structure 202 is the same as the dimension inwardly extending the sickle handle structure 201, that is, the heat dissipation fins 2 as a whole extend inwardly a certain dimension.

[0052] In this embodiment, the heat dissipation fins 2 are divided into main heat dissipation fins and auxiliary heat dissipation fins. The main heat dissipation fins and the auxiliary heat dissipation fins have the same shape, and the difference is that the thickness of the main heat dissipation fins is greater than the thickness of the auxiliary heat dissipation fins.

[0053] Among them, the part where the main heat dissipation fins extend to the inside of the tank body 1 and are located inside the tank body 1 is the main extension part, and the part where the auxiliary heat dissipation fins extend to the inside of the tank body 1 and are located inside the tank body 1 is the auxiliary extension part. The main extension part and the auxiliary extension part have the same extension size in their extension directions, respectively. The main extension part and the auxiliary extension part have the same width, but different thicknesses.

[0054] The outer wall of the tank body 1 is evenly provided with a plurality of the main cooling fins, and the outer wall of the tank body 1 is evenly provided with a plurality of auxiliary cooling fins between adjacent main cooling fins. Preferably, the outer wall of the tank body 1 is evenly provided with 48 cooling fins 2 (such as Figure 2 ), wherein 6 main heat sink fins are evenly arranged on the outer wall of the tank body 1, 7 auxiliary heat sink fins are evenly arranged between every two adjacent main heat sink fins, and a large number of heat sink fins 2 are arranged to fully improve the heat conduction and heat dissipation effects.

[0055] Preferably, the entire device (all parts) is designed with stainless steel, wherein the hollow cylinder is 13 cm in diameter (outer diameter), 1 cm in thickness, and 2 meters in height, the hollow cone portion 103 is 12 cm in height, the hollow truncated cone portion 101 is 16 cm in height, and the width of the main extension portion and the secondary extension portion is designed to be 5 mm. Since (such as argon) will be introduced into the single crystal furnace for heat dissipation after the single crystal furnace is shut down, and the water cooling system is turned on to achieve natural cooling by water circulation, a certain gap is maintained between the heat dissipation fins 2 so that the inert gas can flow smoothly, while increasing the contact area with the inert gas, improving the heat exchange efficiency, and improving the heat dissipation effect of the single crystal furnace. Due to the high temperature at the bottom of the single crystal furnace, the sickle blade structure 202 at the bottom of the tank body 1 can adopt a circular fin design and contact with the bottom of the furnace (the circular fin refers to the outer wall of the sickle blade structure 202 at the bottom of the heat dissipation fin 2 is arc-shaped, so that it can fit and fully contact with the bottom of the furnace, such as Figure 2-Figure 4 , Figure 6), these circular fins not only increase the contact area between the bottom of the tank body 1 and the heat, but also help to distribute the heat more evenly to the entire tank body 1, thereby achieving rapid heat dissipation. The design of the circular fins can also reduce dead corners at the bottom of the furnace and avoid heat accumulation.

[0056] In this embodiment, the top of the tank body 1 is also provided with a hanging portion 4 (such as Figure 5 , Figure 7 ), used to be suspended on the single crystal furnace weight and placed in the single crystal furnace together with the single crystal furnace weight.

[0057] A plurality of layers of guide plates 3 are arranged inside the tank body 1, and the plurality of layers of the guide plates 3 are arranged at intervals along the central axis of the tank body 1. The guide plates 3 are used to guide the inert gas introduced into the single crystal furnace to be discharged. The guide plates 3 are trumpet-shaped, and the inner wall surface of the guide plates 3 is a guide surface to guide the inert gas to be discharged. 48 linear grooves are evenly arranged on the guide plates 3 so that the 48 heat sink fins 2 can pass through them respectively.

[0058] From bottom to top along the tank body 1, the spacing between the guide vanes 3 of each adjacent layer is different, and the spacing between the guide vanes 3 of the adjacent layers gradually increases from the bottom to the top of the tank body 1. The guide vanes 3 are distributed from dense to sparse from the bottom to the top of the tank body 1, that is, the distribution of the guide vanes 3 at the bottom of the tank body 1 is relatively dense, and the distribution of the guide vanes 3 at the top of the tank body 1 is relatively sparse.

[0059] In this embodiment, seven guide vanes 3 are designed inside the tank body 1 from bottom to top, and these guide vanes 3 are distributed from dense to sparse from bottom to top, which helps to quickly guide the high-temperature water at the bottom upward, reduce temperature stratification, and make the water temperature in the tank more uniform. As the height increases, the guide vanes 3 gradually become sparse to reduce water flow resistance and promote natural convection of water. At the same time, the high-temperature water mixes with the colder water on the upper part during the rising process, further improving the uniformity and heat absorption efficiency of the overall water temperature and improving the heat dissipation effect.

[0060] The single crystal furnace shutdown heat dissipation device in this embodiment can be used alone to dissipate heat from the single crystal furnace after the single crystal furnace is shut down, or it can be used in conjunction with heat dissipation treatment methods such as argon blowing and furnace body water circulation heat dissipation to accelerate the heat dissipation and improve the heat dissipation effect.

[0061] This application mainly solves the problems of long shutdown time, single heat dissipation method and low efficiency in the existing solution. It makes changes based on the original argon blowing and furnace water circulation heat dissipation treatment, and introduces it into the furnace as a new heat dissipation component. On the basis of ensuring safety and convenience, it improves the shutdown efficiency, saves costs and increases monthly output. The single crystal furnace shutdown heat dissipation device has the advantages of convenience, safety, high heat dissipation efficiency and low cost.

[0062] Example 2

[0063] A single crystal furnace comprises a furnace body and a single crystal furnace weight, and also comprises the single crystal furnace shutdown heat dissipation device. After the single crystal furnace is shut down, the single crystal furnace shutdown heat dissipation device is placed in the furnace body through the single crystal furnace weight.

[0064] When in use, after the furnace is stopped and before the shutdown rod is taken out, the single crystal furnace shutdown heat dissipation device is prepared. After the shutdown rod is taken out, the single crystal furnace shutdown heat dissipation device is immediately hung on the single crystal furnace weight through the connecting nut, and then placed into the furnace body of the single crystal furnace through the weight to complete the installation.

[0065] Based on the original argon blowing and furnace water circulation heat dissipation treatment, changes are made to introduce it into the furnace as a new heat dissipation component. The heat conduction and heat dissipation efficiency are improved through the design of the heat dissipation fins 2 on the tank body 1. On the basis of ensuring safety and convenience, the shutdown efficiency is improved, costs are saved, and monthly output is increased.

[0066] Example 3

[0067] The method for using the single crystal furnace shutdown heat dissipation device comprises the following steps:

[0068] After the furnace is shut down and before the shutdown rod is taken out, the single crystal furnace shutdown heat dissipation device is ready;

[0069] After the single crystal furnace is shut down and the shutdown rod is taken out of the furnace body of the single crystal furnace, the single crystal furnace shutdown heat dissipation device is hung on the single crystal furnace weight and placed in the furnace body of the single crystal furnace through the single crystal furnace weight to accelerate the cooling of the single crystal furnace.

[0070] The single crystal furnace is modified on the basis of the original argon blowing and furnace water circulation heat dissipation treatment, and is introduced into the furnace as a new heat dissipation component. The heat conduction and heat dissipation efficiency are improved through the design of the heat dissipation fins 2 on the tank body 1. On the basis of ensuring safety and convenience, the furnace shutdown efficiency is improved, costs are saved, and monthly output is increased.

[0071] The beneficial effects of the technical solution of the present invention are:

[0072] 1. Large heat absorption: Compared with argon, water has a larger specific heat capacity than other liquids. The device is preliminarily calculated to contain 1m 3 Water rising by 50°C can contain 220,000KJ of energy, while 200kg of graphite in a furnace dropping by 1,000°C only contains 144,000KJ of energy.

[0073] 2. Safety: The thermal expansion coefficient of water is very small. For one cubic meter of water, the volume expands by about 2.5x10 -4 Cubic meters, leave enough space of 20cm at the top 3 It can ensure safe use.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

[0075] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A heat dissipation device for a single crystal furnace when it is stopped, which is used to accelerate the heat dissipation when the single crystal furnace is stopped, characterized in that: It comprises a tank body (1), the outer wall of the tank body (1) is evenly provided with a plurality of heat dissipation fins (2), the length direction of the heat dissipation fins (2) is consistent with the axial direction of the tank body (1), and the gaps between adjacent heat dissipation fins (2) are used for the circulation of inert gas introduced into the single crystal furnace.

2. The heat dissipation device for a single crystal furnace when it is shut down according to claim 1, characterized in that: The heat dissipation fins (2) are divided into main heat dissipation fins and auxiliary heat dissipation fins, and the thickness of the main heat dissipation fins is greater than the thickness of the auxiliary heat dissipation fins; The outer wall of the tank body (1) is evenly provided with a plurality of the main heat dissipation fins, and the outer wall of the tank body (1) is evenly provided with a plurality of auxiliary heat dissipation fins between adjacent main heat dissipation fins.

3. The heat dissipation device for a single crystal furnace when it is shut down according to claim 2, characterized in that: The portion of the main heat dissipation fin extending into the interior of the tank body (1) and located inside the tank body (1) is the main extension portion, and the portion of the auxiliary heat dissipation fin extending into the interior of the tank body (1) and located inside the tank body (1) is the auxiliary extension portion.

4. The heat dissipation device for a single crystal furnace when it is shut down according to claim 3, characterized in that: The main extension portion and the secondary extension portion have the same extension dimensions in their respective extension directions.

5. The single crystal furnace shutdown heat dissipation device according to claim 1, characterized in that: A plurality of guide plates (3) are arranged in the tank body (1), and the plurality of guide plates (3) are arranged at intervals along the central axis of the tank body (1). The guide plates (3) are used to guide the inert gas introduced into the single crystal furnace to be discharged.

6. The heat dissipation device for a single crystal furnace when it is shut down according to claim 5, characterized in that: The distance between the guide plates (3) of each two adjacent layers is different, and the distance between the guide plates (3) of each two adjacent layers tends to gradually increase from the bottom to the top of the tank body (1).

7. The heat dissipation device for a single crystal furnace when it is shut down according to claim 1, characterized in that: The tank body (1) comprises a hollow truncated cone portion (101), a hollow cylindrical portion (102) and a hollow conical portion (103) which are arranged in sequence from top to bottom; Wherein, the hollow truncated cone portion (101) is a structure that is narrow at the top and thick at the bottom.

8. The heat dissipation device for a single crystal furnace when it is shut down according to claim 7, characterized in that: The top of the tank body (1) is also provided with a hanging portion (4) for hanging on a single crystal furnace weight.

9. A single crystal furnace, comprising a furnace body and a single crystal furnace weight, characterized in that: It also includes the single crystal furnace shutdown heat dissipation device according to any one of claims 1 to 8, and after the single crystal furnace is shut down, the single crystal furnace shutdown heat dissipation device is placed in the furnace body through the single crystal furnace weight.

10. A method for using the heat dissipation device for a single crystal furnace according to any one of claims 1 to 8, characterized in that: The following steps are involved: After the single crystal furnace is shut down and the shutdown rod is taken out of the furnace body of the single crystal furnace, the single crystal furnace shutdown heat dissipation device is hung on the single crystal furnace weight and placed in the furnace body of the single crystal furnace through the single crystal furnace weight to accelerate the cooling of the single crystal furnace.

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