Red phosphorus dopant quartz flow guide cover
By designing a red phosphorus dopant quartz flow shield, the uniform introduction of red phosphorus dopant is achieved using the flow hole and the lead pipe, which solves the problem of uneven dopant under the traditional method and ensures uniform doping of crystal rods Miscellaneous ingredients and cost savings.
Patent Information
- Application Number
- CN202411276172.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-12
- Publication Date
- 2025-01-17
AI Technical Summary
During the semiconductor crystal drawing process, the red phosphorus dopant is easily vaporized in the melting soup under the traditional method, resulting in uneven distribution of the dopant during the crystal drawing process, affecting the quality of the crystal rod, and lacking the uniform addition of the red phosphorus dopant. device.
A red phosphorus dopant quartz flow shield is designed, including a funnel, a guide tube, a guide cover plate and a flow shield body. The red phosphorus dopant is uniformly introduced through the guide hole, and the guide tube and fixture are used to ensure that The granular red phosphorus falls in and fixes evenly, the deflection cover prevents overflow, and the size of the deflection hole can be adjusted according to the process.
The uniform distribution of red phosphorus dopant on the surface of the crystal rod is achieved, ensuring the uniformity of the doping components of the crystal rod, avoiding the uneven influence of dopant, and using quartz material can be directly installed on the inner screen of the graphite hot screen, saving The cost.
Smart Images
Figure CN119320983A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of semiconductor crystal pulling equipment, and in particular to a flow guide cover. Background Art
[0002] During the semiconductor crystal pulling process, semiconductor crystal dopants can be added evenly according to the set amount requirements, thereby ensuring the quality of the semiconductor crystal rod and making the dopants contained in the crystal rod uniform, thus ensuring the quality requirements of the crystal rod for crystal pulling.
[0003] The traditional method of adding dopants is to add red phosphorus dopants after the silicon liquid is melted. All the red phosphorus dopants are melted into the silicon liquid. Because red phosphorus is easy to vaporize, the longer the crystal pulling time, the less red phosphorus dopant in the melt will be. This causes the dopant content in the crystal rod to be uneven at different crystal pulling times. At the beginning, there is more dopant, and at the end of the crystal pulling, the dopant content is less, which affects the quality of the entire crystal rod.
[0004] Currently, there is a lack of a device for uniformly adding red phosphorus dopants. Summary of the invention
[0005] In view of the problems existing in the prior art, the present invention provides a red phosphorus doped quartz flow guide cover, which has solved at least one of the above technical problems.
[0006] The technical solution of the present invention is: a red phosphorus dopant quartz flow guide cover, characterized in that it comprises a funnel, a material guide pipe, a flow guide cover plate and a flow guide cover body connected in sequence from top to bottom;
[0007] The bottom opening of the funnel is connected to the top opening of the material guide pipe;
[0008] The bottom opening of the material guide pipe is connected to the feed port of the guide cover plate;
[0009] The flow guide cover body comprises an annular groove body with an opening at the upper end, the annular groove body is connected with the flow guide cover plate to form an annular hollow cavity, the outer wall of the annular groove body is provided with a flow guide hole for guiding out the red phosphorus dopant, and the flow guide hole is connected with the inner cavity of the annular hollow cavity;
[0010] The guide cover body also includes a guide tube, the bottom of the annular groove body is connected to the guide tube, and the outer diameter of the guide tube decreases from top to bottom;
[0011] The top of the material guiding pipe is detachably connected with a clamp for installation.
[0012] The present invention realizes uniform introduction of red phosphorus dopant into the surface of the crystal rod through the guide holes.
[0013] Further preferably, the outer diameter of the annular groove body decreases from top to bottom.
[0014] Further preferably, at least three pore layers arranged from top to bottom are provided on the outer side wall of the annular groove body, and each pore layer is provided with at least ten circumferentially arranged flow guide holes.
[0015] Further preferably, the clamp comprises a first clamping member and a second clamping member which are detachably connected, the first clamping member and the second clamping member are both provided with a semicircular notch, and the semicircular notches of the first clamping member and the second clamping member are combined to form a limiting hole for clamping the material guide tube;
[0016] The first clamping member and the second clamping member are bent in a Z shape;
[0017] The semicircular notch is formed on the top of the first clamping member and the second clamping member;
[0018] The tops of the first clamping member and the second clamping member are connected via a connecting member;
[0019] The bottoms of the first clamping member and the second clamping member are provided with mounting holes.
[0020] Further preferably, the funnel comprises a cylindrical upper part and a conical lower part arranged up and down, and the outer diameter of the conical lower part decreases from top to bottom;
[0021] The conical lower portion abuts against an upper side of the clamp.
[0022] Further preferably, the material guiding pipe comprises a first pipe portion, a second pipe portion and a third pipe portion which are sequentially connected from top to bottom;
[0023] The first tube portion is arranged vertically, the second tube portion is arranged obliquely, and the third tube portion is arranged obliquely;
[0024] The length of the first tube portion and the length of the second tube portion are both shorter than the length of the third tube portion;
[0025] The slope of the third tube portion is smaller than the slope of the second tube portion.
[0026] Further preferably, the second tube portion is arranged to be inclined from outside to inside. The third tube portion is arranged to be inclined from outside to inside.
[0027] Further preferably, the vertical projection area of the funnel is located at the periphery of the vertical projection area of the deflector body.
[0028] Further preferably, the clamp is detachably connected to the inner side of the inner shield of the graphite heat shield.
[0029] Further preferably, the funnel, the material guiding tube, the flow guiding cover plate and the flow guiding cover body are all made of quartz.
[0030] Further preferably, the size of the guide hole is adjusted according to the doping amount of the doping process;
[0031] When the red phosphorus doping dose is 0.5 g / min, the aperture size of the guide hole is 1 mm, and the number of the guide holes is 66; three pore layers arranged from top to bottom are provided on the outer wall of the annular groove body, and each pore layer is provided with 22 circumferentially arranged guide holes;
[0032] When the red phosphorus doping dose is 1.5g / min, the aperture size of the guide hole is 2mm, and the number of the guide holes is 66; three layers of pore layers arranged from top to bottom are provided on the outer wall of the annular groove body, and each pore layer is provided with twenty-two circumferentially arranged guide holes.
[0033] Compared with the prior art, the present invention has the following beneficial effects:
[0034] 1) The guide cover has uniform guide holes distributed around it to ensure that the red phosphorus is evenly heated. The red phosphorus atmosphere is introduced into the surface of the crystal rod through the guide holes to ensure the uniformity of the red phosphorus doped in the crystal rod.
[0035] 2) A guide pipe is used to ensure that the granular red phosphorus falls evenly into the guide cover.
[0036] 3) Use high temperature resistant molybdenum rod fixture to reliably fix the material guide tube to ensure that the red phosphorus dopant will not shake and pop out.
[0037] 4) The guide cover is used to ensure that the dopant does not overflow and affect the change of the dopant dosage of the silicon liquid.
[0038] 5) This quartz tube guide cover can be directly installed in the inner screen of the graphite heat shield, without the need to redesign a new supporting mechanism, thus saving costs.
[0039] 6) The size of the guide hole of the quartz guide cover can be adjusted according to different doping processes. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] Figure 1 A cross-sectional view of a specific embodiment 1 of the present invention;
[0041] Figure 2 It is a structural schematic diagram of a specific embodiment 1 of the present invention;
[0042] Figure 3 This is a structural schematic diagram of a specific embodiment 1 of the present invention.
[0043] In the figure, 1 is a flow guide cover, 2 is a flow guide cover plate, 3 is a material guide pipe, 4 is a funnel, and 5 is a clamp. DETAILED DESCRIPTION
[0044] See also Figures 1 to 3 , Specific embodiment 1, a red phosphorus dopant quartz flow guide cover, comprising a funnel 4, a guide tube 3, a guide cover plate 2 and a guide cover body 1 connected in sequence from top to bottom; the bottom opening of the funnel 4 is connected to the top opening of the guide tube 3; the bottom opening of the guide tube 3 is connected to the feed port of the guide cover plate 2; the guide cover body 1 comprises an annular groove body with an upper end opening, the annular groove body is connected to the guide cover plate 2 to form an annular hollow cavity, the outer wall of the annular groove body is provided with a guide hole for leading out the red phosphorus dopant, and the guide hole is connected to the inner cavity of the annular hollow cavity; the guide cover body 1 also includes a guide tube, the bottom of the annular groove body is connected to the guide tube, and the outer diameter of the guide tube decreases from top to bottom; the top of the guide tube 3 is detachably connected with a fixture 5 for installation. The present invention realizes the uniform introduction of red phosphorus dopant into the surface of the crystal rod through the guide hole. The guide cover plate 2 is provided with a feed port. The feed port is connected to the annular hollow cavity.
[0045] The outer diameter of the annular groove body decreases from top to bottom.
[0046] At least three pore layers arranged from top to bottom are provided on the outer side wall of the annular groove body, and each pore layer is provided with at least ten guide holes arranged circumferentially.
[0047] The clamp 5 includes a first clamping member and a second clamping member that are detachably connected, and the first clamping member and the second clamping member are both provided with semicircular notches, and the semicircular notches of the first clamping member and the second clamping member are combined to form a limiting hole for clamping the material guide tube 3; the first clamping member and the second clamping member are bent in a Z shape; the tops of the first clamping member and the second clamping member are provided with semicircular notches; the tops of the first clamping member and the second clamping member are connected by a connecting member; and the bottoms of the first clamping member and the second clamping member are provided with mounting holes.
[0048] The funnel 4 includes a cylindrical upper portion and a conical lower portion which are arranged up and down. The outer diameter of the conical lower portion decreases from top to bottom. The conical lower portion abuts against the upper side of the fixture 5 .
[0049] The material guide pipe 3 includes a first pipe part, a second pipe part and a third pipe part connected in sequence from top to bottom; the first pipe part is vertically arranged, the second pipe part is inclined, and the third pipe part is inclined; the length of the first pipe part and the length of the second pipe part are both smaller than the length of the third pipe part; the slope of the third pipe part is smaller than the slope of the second pipe part. The second pipe part is inclined from outside to inside. The third pipe part is inclined from outside to inside.
[0050] The vertical projection area of the funnel 4 is located at the periphery of the vertical projection area of the air guide cover 1 .
[0051] The clamp 5 is detachably connected to the inner side of the inner shield of the graphite heat shield.
[0052] The funnel 4, the material guiding tube 3, the flow guiding cover plate 2 and the flow guiding cover body 1 are all made of quartz.
[0053] The size of the guide hole is adjusted according to the doping amount of the doping agent process; when the red phosphorus doping amount is 0.5g / min, the aperture size of the guide hole is 1mm, and the number of the guide holes is 66; three layers of pore layers arranged from top to bottom are opened on the outer wall of the annular groove body, and each pore layer is provided with twenty-two circumferentially arranged guide holes; when the red phosphorus doping amount is 1.5g / min, the aperture size of the guide hole is 2mm, and the number of the guide holes is 66; three layers of pore layers arranged from top to bottom are opened on the outer wall of the annular groove body, and each pore layer is provided with twenty-two circumferentially arranged guide holes.
[0054] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.
Claims
1. A red phosphorus doped quartz flow guide cover, characterized in that: It includes a funnel, a material guide pipe, a flow guide cover plate and a flow guide cover body which are sequentially connected from top to bottom; The bottom opening of the funnel is connected to the top opening of the material guide pipe; The bottom opening of the material guide pipe is connected to the feed port of the guide cover plate; The flow guide cover body comprises an annular groove body with an opening at the upper end, the annular groove body is connected with the flow guide cover plate to form an annular hollow cavity, the outer wall of the annular groove body is provided with a flow guide hole for guiding out the red phosphorus dopant, and the flow guide hole is connected with the inner cavity of the annular hollow cavity; The guide cover body also includes a guide tube, the bottom of the annular groove body is connected to the guide tube, and the outer diameter of the guide tube decreases from top to bottom; The top of the material guiding pipe is detachably connected with a clamp for installation.
2. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The outer diameter of the annular groove body decreases from top to bottom.
3. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: At least three pore layers arranged from top to bottom are provided on the outer side wall of the annular groove body, and each pore layer is provided with at least ten guide holes arranged circumferentially.
4. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The clamp comprises a first clamping member and a second clamping member which are detachably connected, the first clamping member and the second clamping member are both provided with a semicircular notch, and the semicircular notches of the first clamping member and the second clamping member are combined to form a limiting hole for clamping the material guide tube; The first clamping member and the second clamping member are bent in a Z shape; The semicircular notch is formed on the top of the first clamping member and the second clamping member; The tops of the first clamping member and the second clamping member are connected via a connecting member; The bottoms of the first clamping member and the second clamping member are provided with mounting holes.
5. The red phosphorus doped quartz flow guide cover according to claim 4, characterized in that: The funnel comprises a cylindrical upper part and a conical lower part arranged up and down, and the outer diameter of the conical lower part decreases from top to bottom; The conical lower portion abuts against an upper side of the clamp.
6. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The material guide pipe comprises a first pipe portion, a second pipe portion and a third pipe portion which are sequentially connected from top to bottom; The first tube portion is arranged vertically, the second tube portion is arranged obliquely, and the third tube portion is arranged obliquely; The length of the first tube portion and the length of the second tube portion are both shorter than the length of the third tube portion; The slope of the third tube portion is smaller than the slope of the second tube portion.
7. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The vertical projection area of the funnel is located at the periphery of the vertical projection area of the deflector cover.
8. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The clamp is detachably connected to the inner side of the graphite heat shield inner shield.
9. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The funnel, the material guiding tube, the flow guiding cover plate and the flow guiding cover body are all made of quartz.
10. The red phosphorus doped quartz flow guide cover according to claim 1, characterized in that: The size of the guide hole is adjusted according to the doping amount of the doping process; When the red phosphorus doping dose is 0.5 g / min, the aperture size of the guide hole is 1 mm, and the number of the guide holes is 66; three pore layers arranged from top to bottom are provided on the outer wall of the annular groove body, and each pore layer is provided with 22 circumferentially arranged guide holes; When the red phosphorus doping dose is 1.5g / min, the aperture size of the guide hole is 2mm, and the number of the guide holes is 66; three layers of pore layers arranged from top to bottom are provided on the outer wall of the annular groove body, and each pore layer is provided with twenty-two circumferentially arranged guide holes.