Micro-seismic structure of clean workshop

Abstract

The invention relates to the technical field of building structures, and discloses a micro-seismic structure of a clean workshop, which comprises a structural frame, an equipment body and a base plate fixedly mounted at the bottom of the structural frame, a rubber shock pad is laid on the inner bottom surface of the base plate, and a lower plate is fixedly mounted at the top of the rubber shock pad; a mounting plate is fixedly connected to the top of the lower plate through a connecting rod, a mounting frame is fixedly mounted at the top of the mounting plate through stand columns, a top frame is fixedly connected to the top of the mounting frame, a protection assembly is arranged in the mounting plate, and a mounting assembly is arranged in the mounting frame; and the protection assembly comprises a square groove formed in the mounting plate, a fixing plate is slidably connected to the interior of the square groove, and the problems that when the workshop body is vibrated or equipment resonates to generate vibration, displacement of the working equipment is likely to be unstable, the production and machining process of the working equipment is affected, and the product percent of pass is reduced are solved.

Description

Technical Field

[0001] The invention relates to the technical field of building structures, in particular to a micro-seismic structure of a clean workshop. Background Art

[0002] Due to the particularity of electronic products, high-tech electronic industrial plants have high requirements for micro-vibration. Micro-vibration design is an important part of electronic high-tech clean plants. When the main structure of the plant is vibrated, it may affect the equipment working inside the plant, and even reduce the product qualification rate and affect the production process.

[0003] For example, a semiconductor plant anti-microseismic structure with publication number CN116065870A includes a base layer and a structural frame arranged on the base layer, a support plate is arranged on the base layer, a limiting block is arranged on the side wall of the support plate close to the base layer, a limiting groove for cooperating with the limiting block is arranged on the base layer, a sand layer is arranged between the support plate and the base layer, and a supporting assembly for supporting equipment is arranged on the support plate, which has the effect of reducing the impact of vibration in the plant on semiconductor production. However, the device does not limit the working equipment. When the main body of the plant is vibrated or the equipment resonates and generates vibration, it may cause the working equipment to shift unsteadily, thereby affecting the production and processing progress of the working equipment and reducing the qualified rate of the product. There are certain defects.

[0004] Therefore, a micro-seismic structure of a clean workshop is proposed to solve the above-mentioned problems. Summary of the invention

[0005] The purpose of the present invention is to provide a micro-seismic structure for a clean workshop to solve the problem that when the main body of the workshop is vibrated or the equipment resonates and vibrates, the working equipment may be shifted unsteadily, thereby affecting the production and processing progress of the working equipment and reducing the qualified rate of the product.

[0006] To achieve the above object, the present invention provides the following technical solution: a micro-seismic structure of a clean workshop, comprising a structural frame, an equipment body and a base plate fixedly installed at the bottom of the structural frame, wherein the inner bottom surface of the base plate is paved with a rubber shock-absorbing pad, a lower plate is fixedly installed on the top of the rubber shock-absorbing pad, and the top of the lower plate is fixedly connected to a mounting plate through a connecting rod;

[0007] Also includes:

[0008] A mounting frame is fixedly mounted on the top of the mounting plate through a column, a top frame is fixedly connected to the top of the mounting frame, a protective component is arranged inside the mounting plate, and a mounting component is arranged inside the mounting frame;

[0009] The protection component includes a square groove opened inside the mounting plate, the square grooves are not less than four, a fixing plate is slidably connected inside the square groove, a buffer pad is fixedly connected to the top of the fixing plate, the device body is mounted on the top of the buffer pad, a shock absorbing plate is symmetrically fixedly connected to the bottom of the fixing plate, mounting sleeves are symmetrically installed on both sides of the bottom of the shock absorbing plate, and a damping spring is fixedly installed between the inner wall of the mounting sleeve and the shock absorbing plate;

[0010] Four mounting sleeves are provided, and the centers of the four mounting sleeves are fixedly connected to the same middle plate, the bottom of the middle plate is fixedly connected to a transverse plate, the transverse plate is slidably connected to the lower plate, two damping springs are symmetrically fixedly installed on both sides of the transverse plate, the side of the mounting sleeve away from the middle plate is fixedly connected to a side plate, and the top of the side plate is fixedly connected to a sleeve;

[0011] The sleeve is slidably connected to a slide rod inside, the slide rod is slidably connected to the mounting plate, a damping spring three is fixedly installed on the inner bottom surface of the sleeve, an extrusion block is fixedly connected to the top of the slide rod, an L-shaped rod is symmetrically fixedly connected to the top of the mounting plate, a sliding sleeve is lateraly slidably connected to one side of the L-shaped rod, a damping spring four is lateraly fixedly installed inside the sliding sleeve, and a positioning plate is fixedly connected to one end of the sliding sleeve;

[0012] A concave block is fixedly connected to the lower part of one side of the positioning plate close to the sliding sleeve, the extrusion block abuts against the inclined surface of the concave block, a lower rod is fixedly connected to the middle of the bottom of the fixed plate, a pressure plate is fixedly connected to the bottom end of the lower rod, and a damping spring five is fixedly installed on the top of the middle plate.

[0013] Preferably, the damping springs are evenly arranged, there are no less than four damping springs, the shock absorbing plate can only move horizontally inside the mounting sleeve, the fixed plate is fixedly connected to the shock absorbing plate through a connecting rod, the connecting rod is fixedly connected to the sliding rod, and the number of the connecting rod is the same as the sliding rod.

[0014] By adopting the above technical solution, when the lower plate and the mounting plate are subjected to vertical vibration, the two positioning plates better position and clamp the equipment body, reducing the slippage of the equipment body, and the damping spring five further weakens the vertical vibration of the lower plate and the mounting plate.

[0015] Preferably, a lower groove is opened on the top of the lower plate, the number of the lower grooves is the same as the square grooves, the bottom surface of the middle plate is fitted with the top surface of the lower plate, the cross plate is slidably connected to the lower grooves, the number of damping springs 2 is not less than four, and the end of the damping spring 2 away from the cross plate is fixedly connected to the inner wall of the lower groove.

[0016] By adopting the above technical solution, when the lower plate and the mounting plate are subjected to horizontal longitudinal vibration, the fixed plate and the middle plate will vibrate, the middle plate drives the cross plate to vibrate inside the lower groove, the cross plate acts on the damping springs 2 on both sides, and the damping springs 2 assist in reducing the vibration.

[0017] Preferably, two side plates are symmetrically arranged, the number of sleeves is no less than two, and the top end of the damping spring three is fixedly connected to the bottom end of the slide rod.

[0018] By adopting the above technical solution, when the lower plate and the mounting plate are subjected to vertical vibration, the fixed plate drives the slide bar to slide up and down, and the slide bar compresses or stretches the damping spring three, and the damping spring three mitigates the influence of the vibration.

[0019] Preferably, one end of the damping spring four is fixedly connected to the L-shaped rod, the sliding sleeve is located above the concave block, and there are no less than two positioning plates.

[0020] By adopting the above technical solution, the sliding rod drives the extrusion block to rise and fall, and the extrusion block will squeeze the inclined surface of the concave block when it rises and falls. The concave block drives the positioning plate to approach the equipment body, which facilitates the positioning of the equipment body.

[0021] Preferably, the top end of the damping spring five is fixedly connected to the pressure plate, the top of the middle plate is symmetrically fixedly connected to side rods, the inner sides of the two side rods are fixedly connected to connecting sleeves, and the connecting sleeves are slidably connected to the lower rod.

[0022] By adopting the above technical solution, when the fixed plate vibrates, it will also drive the lower rod and the pressure plate to act on the damping spring five, so that the damping spring five further weakens the vertical vibration of the lower plate and the mounting plate.

[0023] Preferably, the mounting assembly includes a cross bar and a vertical bar, a rotating sleeve is rotatably mounted in the middle of the cross bar, a double-headed screw is laterally fixedly connected to the inside of the rotating sleeve, the double-headed screw is located inside the cross bar, clamping sleeves are externally sleeved on both sides of the double-headed screw, and slots are symmetrically opened on the inner side of the mounting frame.

[0024] By adopting the above technical solution, the bottom of the vertical rod and the top of the horizontal rod are plugged and fixed, while the positions of the clamping sleeve and the slot are kept corresponding, which facilitates the subsequent positioning of the clamping sleeve.

[0025] Preferably, the clamping sleeve is engaged with the slot, a limiting groove is symmetrically provided inside the cross bar, a limiting block is symmetrically fixedly connected to the outside of the clamping sleeve on one side close to the double-headed screw rod, and the limiting groove is slidably connected to the limiting block.

[0026] By adopting the above technical solution, the rotating sleeve is rotated, and the rotating sleeve drives the double-headed screw to rotate. The limit block slides inside the limit groove to limit the clamping sleeve. The rotation of the double-headed screw causes the clamping sleeve to slide out from the inside of the cross bar, thereby facilitating the clamping sleeve to be clamped into the slot.

[0027] Preferably, an elastic block is slidably installed inside the clamping sleeve, the elastic block is engaged with the slot, positioning bolts are symmetrically fixedly installed on the bottom of the cross bar, and the top of the vertical bar is plugged into the inner top surface of the top frame.

[0028] By adopting the above technical solution, when the clamping sleeve is completely inserted into the slot, the elastic clamping block will pop out to assist in limiting, and finally the cross bar is fixed to the installation frame by the positioning bolt, so that the damaged cross bar and vertical bar can be easily replaced.

[0029] Compared with the prior art, the beneficial effects of the present invention are as follows: a protective component is provided, the damping spring 1 weakens the horizontal lateral vibration of the shock absorbing plate, and the damping spring 2 weakens the horizontal longitudinal vibration of the shock absorbing plate, thereby reducing the impact of the vibration on the equipment body; when the lower plate and the mounting plate are subjected to vertical vibration, the two positioning plates better position and clamp the equipment body, thereby reducing the slippage of the equipment body, and the damping spring 5 further weakens the vertical vibration of the lower plate and the mounting plate, thereby being able to fully damp the factory building and improve the product production quality;

[0030] 1. A protective component is provided. When the base plate is vibrated, the vibration is transmitted to the rubber shock-absorbing pad, which reduces the impact of the vibration on the mounting plate and the equipment body. When the lower plate and the mounting plate are subjected to horizontal lateral vibration, the fixed plate drives the shock-absorbing plate to move laterally, and the shock-absorbing plate acts on the damping spring 1 on both sides, which assists in reducing the vibration of the shock-absorbing plate. When the lower plate and the mounting plate are subjected to horizontal longitudinal vibration, the fixed plate and the middle plate will vibrate, and the middle plate drives the cross plate to vibrate inside the lower groove, and the cross plate acts on the damping spring 2 on both sides, which assists in reducing the vibration, thereby reducing the impact of the vibration on the equipment body; when the lower plate and the mounting plate are subjected to vertical vibration, the fixed plate drives the slide bar to slide up and down, and the slide bar is compressed or stretched The damping spring three, and the sliding rod drives the extrusion block to rise and fall, and the extrusion block rises and falls and squeezes the inclined surface of the concave block, and the concave block drives the positioning plate to approach the equipment body, and the positioning plate drives the sliding sleeve to move, and the sliding sleeve stretches the damping spring four, so that the two positioning plates can better position and clamp the equipment body, reducing the slippage of the equipment body, and when the fixed plate vibrates, it will also drive the lower rod and the pressure plate to act on the damping spring five, so that the damping spring five further weakens the vertical vibration of the lower plate and the mounting plate, so as to reduce the shock of the factory building in all directions, improve the production quality of products, and solve the problem that when the main body of the factory building is vibrated or the equipment resonates and vibrates, the working equipment may be shifted unsteadily, thereby affecting the production and processing process of the working equipment and reducing the qualified rate of products;

[0031] 2. An installation component is provided. The top of the vertical rod is inserted into the inner top surface of the top frame, and the bottom of the vertical rod is inserted and fixed with the top of the cross rod. At the same time, the position of the clamping sleeve is kept corresponding to the slot. By rotating the rotating sleeve, the rotating sleeve drives the double-headed screw to rotate, and the limit block slides inside the limit slot to limit the clamping sleeve. The double-headed screw rotates to make the clamping sleeve slide out from the inside of the cross rod, thereby clamping the clamping sleeve into the slot, and when the clamping sleeve is completely inserted into the slot, the elastic clamping block will pop out the auxiliary limit, and finally the cross rod is fixed to the installation frame by the positioning bolt, which is convenient for the replacement of the damaged cross rod and the vertical rod, and the installation is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the first three-dimensional overall structure of the present invention;

[0033] Figure 2 It is a schematic diagram of a second three-dimensional overall structure of the present invention;

[0034] Figure 3 For the present invention Figure 2 The enlarged structural diagram at A in the middle;

[0035] Figure 4 This is a schematic diagram of the installation structure of the buffer cushion layer of the present invention;

[0036] Figure 5 For the present invention Figure 4 The enlarged structural diagram at B in the middle;

[0037] Figure 6 For the present invention Figure 4 The enlarged structural diagram at C in the middle;

[0038] Figure 7 For the present invention Figure 4 The enlarged structural diagram at D in the middle;

[0039] Figure 8 It is a schematic diagram of the cross-sectional structure of the sleeve of the present invention;

[0040] Fig. 9 This is a schematic diagram of the installation structure of the horizontal plate of the present invention;

[0041] Fig.10 It is a schematic diagram of the cross-sectional structure of the top frame of the present invention;

[0042] Fig.11 For the present invention Fig.10 Enlarged structural diagram at E in the middle.

[0043] In the figure: 1, structural frame; 2, base plate; 3, rubber shock-absorbing pad; 4, lower plate; 5, mounting plate; 6, protective assembly; 61, square groove; 62, fixing plate; 63, buffer pad layer; 64, shock-absorbing plate; 65, mounting sleeve; 66, damping spring 1; 67, middle plate; 68, lower groove; 69, horizontal plate; 610, damping spring 2; 611, side plate; 612, sleeve; 613, sliding rod; 614, damping spring 3; 615, extrusion block; 616, L-shaped rod; 617, Sliding sleeve; 618, damping spring four; 619, positioning plate; 620, concave block; 621, lower rod; 622, pressure plate; 623, damping spring five; 624, side rod; 625, connecting sleeve; 7, mounting frame; 8, top frame; 9, mounting assembly; 91, cross bar; 92, rotating sleeve; 93, double-headed screw; 94, clamping sleeve; 95, limit groove; 96, limit block; 97, slot; 98, elastic clamp block; 99, vertical rod; 910, positioning bolt; 10, equipment body. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] See also Figure 1-Figure 11 The present invention provides a technical solution: a micro-seismic structure of a clean workshop, comprising a structural frame 1, an equipment body 10 and a base plate 2 fixedly installed at the bottom of the structural frame 1, a rubber shock-absorbing pad 3 is laid on the inner bottom surface of the base plate 2, a lower plate 4 is fixedly installed on the top of the rubber shock-absorbing pad 3, and a mounting plate 5 is fixedly connected to the top of the lower plate 4 through a connecting rod.

[0046] A mounting frame 7 is fixedly mounted on the top of the mounting plate 5 through a column, and a top frame 8 is fixedly connected to the top of the mounting frame 7;

[0047] A protective component 6 is provided inside the mounting plate 5, and the protective component 6 includes a square groove 61 opened inside the mounting plate 5, and the square groove 61 has no less than four parts. A fixing plate 62 is slidably connected inside the square groove 61, and a buffer pad layer 63 is fixedly connected to the top of the fixing plate 62. The equipment body 10 is installed on the top of the buffer pad layer 63, and a shock absorbing plate 64 is symmetrically fixedly connected to the bottom of the fixing plate 62. Mounting sleeves 65 are symmetrically installed on both sides of the bottom of the shock absorbing plate 64, and a damping spring 66 is fixedly installed between the inner wall of the mounting sleeve 65 and the shock absorbing plate 64.

[0048] Four mounting sleeves 65 are provided, and the centers of the four mounting sleeves 65 are fixedly connected to the same middle plate 67, the bottom of the middle plate 67 is fixedly connected to a cross plate 69, the cross plate 69 is slidably connected to the lower plate 4, and damping springs 610 are symmetrically fixedly installed on both sides of the cross plate 69, and the side of the mounting sleeve 65 away from the middle plate 67 is fixedly connected to a side plate 611, and the top of the side plate 611 is fixedly connected to a sleeve 612.

[0049] A lower groove 68 is opened at the top of the lower plate 4, and the number of the lower grooves 68 is the same as the square grooves 61. The bottom surface of the middle plate 67 is in contact with the top surface of the lower plate 4. The cross plate 69 is slidably connected to the lower groove 68. There are no less than four damping springs 610. The end of the damping spring 610 away from the cross plate 69 is fixedly connected to the inner wall of the lower groove 68.

[0050] The sleeve 612 is internally slidably connected to a slide rod 613, which is slidably connected to the mounting plate 5, a damping spring three 614 is fixedly installed on the inner bottom surface of the sleeve 612, an extrusion block 615 is fixedly connected to the top of the slide rod 613, an L-shaped rod 616 is symmetrically fixedly connected to the top of the mounting plate 5, a sliding sleeve 617 is laterally slidably connected to one side of the L-shaped rod 616, a damping spring four 618 is laterally fixedly installed inside the sliding sleeve 617, and a positioning plate 619 is fixedly connected to one end of the sliding sleeve 617.

[0051] The damping springs 66 are evenly arranged, and there are no less than four damping springs 66. The shock absorbing plate 64 can only move horizontally inside the mounting sleeve 65. The fixed plate 62 is fixedly connected to the shock absorbing plate 64 through a connecting rod, and the connecting rod is fixedly connected to the sliding rod 613. The number of the connecting rod is the same as the sliding rod 613.

[0052] Two side plates 611 are symmetrically arranged, there are no less than two sleeves 612, and the top end of the damping spring three 614 is fixedly connected to the bottom end of the sliding rod 613.

[0053] A concave block 620 is fixedly connected to the lower part of one side of the positioning plate 619 close to the sliding sleeve 617, and the extrusion block 615 abuts against the inclined surface of the concave block 620. A lower rod 621 is fixedly connected to the middle of the bottom of the fixed plate 62, and a pressure plate 622 is fixedly connected to the bottom end of the lower rod 621. A damping spring 623 is fixedly installed on the top of the middle plate 67.

[0054] One end of the damping spring 618 is fixedly connected to the L-shaped rod 616, the sliding sleeve 617 is located above the concave block 620, and there are no less than two positioning plates 619.

[0055] The top of the damping spring 5 623 is fixedly connected to the pressure plate 622 , the top of the middle plate 67 is symmetrically fixedly connected to the side rods 624 , the inner sides of the two side rods 624 are fixedly connected to the connecting sleeves 625 , and the connecting sleeves 625 are slidably connected to the lower rod 621 .

[0056] Embodiment 1: Figure 1-Figure 9 As shown, when the base plate 2 is vibrated, the vibration is transmitted to the rubber shock-absorbing pad 3, and the rubber shock-absorbing pad 3 reduces the impact of the vibration on the mounting plate 5 and the equipment body 10. When the lower plate 4 and the mounting plate 5 are subjected to horizontal lateral vibration, the fixed plate 62 drives the shock-absorbing plate 64 to move laterally, and the shock-absorbing plate 64 acts on the damping springs 66 on both sides, and the damping springs 66 assist in reducing the vibration of the shock-absorbing plate 64.

[0057] When the lower plate 4 and the mounting plate 5 are subjected to horizontal longitudinal vibration, the fixed plate 62 and the middle plate 67 will vibrate, and the middle plate 67 drives the cross plate 69 to vibrate inside the lower groove 68. The cross plate 69 acts on the damping springs 610 on both sides, and the damping springs 610 assist in reducing the vibration, thereby reducing the impact of the vibration on the equipment body 10.

[0058] When the lower plate 4 and the mounting plate 5 are subjected to vertical vibration, the fixed plate 62 drives the slide bar 613 to slide up and down, the slide bar 613 compresses or stretches the damping spring three 614, and the slide bar 613 drives the extrusion block 615 to rise and fall, the extrusion block 615 rises and falls will squeeze the inclined surface of the concave block 620, the concave block 620 drives the positioning plate 619 to approach the equipment body 10, the positioning plate 619 drives the sliding sleeve 617 to move, and the sliding sleeve 617 stretches the damping spring four 618, so that the two positioning plates 619 can better position and clamp the equipment body 10, thereby reducing the slippage of the equipment body 10.

[0059] When the fixed plate 62 vibrates, it will also drive the lower rod 621 and the pressure plate 622 to act on the damping spring five 623, so that the damping spring five 623 further weakens the vertical vibration of the lower plate 4 and the mounting plate 5, thereby being able to reduce shock to the factory building in all directions, improve product production quality, and solve the problem that when the main body of the factory building is vibrated or the equipment resonates and vibrates, it may cause the working equipment to shift unsteadily, thereby affecting the production and processing progress of the working equipment and reducing the qualified rate of the product.

[0060] An installation component 9 is arranged inside the installation frame 7, and the installation component 9 includes a horizontal rod 91 and a vertical rod 99. A rotating sleeve 92 is rotatably installed in the middle of the horizontal rod 91, and a double-headed screw rod 93 is laterally fixedly connected inside the rotating sleeve 92. The double-headed screw rod 93 is located inside the horizontal rod 91, and clamping sleeves 94 are externally sleeved on both sides of the double-headed screw rod 93. Slots 97 are symmetrically opened on the inner side of the installation frame 7.

[0061] The clamping sleeve 94 is engaged with the slot 97, and a limiting groove 95 is symmetrically provided inside the cross bar 91. A limiting block 96 is symmetrically fixedly connected to the outside of the clamping sleeve 94 on one side close to the double-headed screw rod 93, and the limiting groove 95 is slidably connected to the limiting block 96.

[0062] An elastic block 98 is slidably installed inside the clamping sleeve 94, and the elastic block 98 is engaged with the slot 97. Positioning bolts 910 are symmetrically fixedly installed at the bottom of the cross bar 91, and the top of the vertical rod 99 is plugged into the inner top surface of the top frame 8.

[0063] Embodiment 2: Figure 10-11 As shown, by inserting the top of the vertical rod 99 into the inner top surface of the top frame 8, and then inserting and fixing the bottom of the vertical rod 99 with the top of the cross rod 91, while keeping the position of the clamping sleeve 94 corresponding to the slot 97, by rotating the rotating sleeve 92, the rotating sleeve 92 drives the double-headed screw 93 to rotate, and the limit block 96 slides inside the limit groove 95 to limit the clamping sleeve 94, and the double-headed screw 93 rotates to make the clamping sleeve 94 slide out from the inside of the cross rod 91, thereby clamping the clamping sleeve 94 into the slot 97, and when the clamping sleeve 94 is completely inserted into the slot 97, the elastic clamping block 98 will pop out to assist in limiting, and finally the cross rod 91 is fixed to the installation frame 7 by the positioning bolt 910, which is convenient for the replacement of the damaged cross rod 91 and the vertical rod 99, and the installation is convenient.

[0064] Working principle: When using the device, first, Figure 1-Figure 11 As shown, when the base plate 2 is vibrated, the rubber shock-absorbing pad 3 reduces the impact of the vibration on the mounting plate 5 and the equipment body 10; when the lower plate 4 and the mounting plate 5 are subjected to horizontal lateral vibration, the damping spring 1 66 assists in reducing the vibration of the shock-absorbing plate 64; when the lower plate 4 and the mounting plate 5 are subjected to horizontal longitudinal vibration, the damping spring 2 610 assists in reducing the vibration, thereby reducing the impact of the vibration on the equipment body 10.

[0065] When the lower plate 4 and the mounting plate 5 are subjected to vertical vibration, the fixed plate 62 drives the slide bar 613 to slide up and down, and the slide bar 613 drives the extrusion block 615 to rise and fall. The rising and falling of the extrusion block 615 will squeeze the inclined surface of the concave block 620, and the concave block 620 drives the positioning plate 619 to approach the equipment body 10, and the positioning plate 619 drives the sliding sleeve 617 to move, and the sliding sleeve 617 stretches the damping spring four 618, so that the two positioning plates 619 can better position and clamp the equipment body 10, reduce the slippage of the equipment body 10, and improve the production quality.

[0066] Insert the top of the vertical rod 99 into the inner top surface of the top frame 8, and then insert and fix the bottom of the vertical rod 99 into the top of the cross bar 91. By rotating the rotating sleeve 92, the rotating sleeve 92 drives the double-headed screw 93 to rotate. The rotation of the double-headed screw 93 causes the clamping sleeve 94 to slide out from the inside of the cross bar 91, so that the clamping sleeve 94 is clamped into the slot 97, and the elastic clamping block 98 pops out to assist in limiting. The cross bar 91 is fixed to the installation frame 7 by the positioning bolts 910, and the installation of the cross bar 91 and the vertical rod 99 is completed.

[0067] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0068] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A microseismic structure for a clean room, comprising a structural frame (1), an equipment body (10) and a base plate (2) fixedly mounted on the bottom of the structural frame (1), wherein a rubber shock-absorbing pad (3) is laid on the inner bottom surface of the base plate (2), a lower plate (4) is fixedly mounted on the top of the rubber shock-absorbing pad (3), and a mounting plate (5) is fixedly connected to the top of the lower plate (4) via a connecting rod; It is characterized in that Also includes: A mounting frame (7) is fixedly mounted on the top of the mounting plate (5) via a column, a top frame (8) is fixedly connected to the top of the mounting frame (7), a protection component (6) is arranged inside the mounting plate (5), and a mounting component (9) is arranged inside the mounting frame (7); The protection component (6) comprises a square groove (61) provided inside the mounting plate (5), the number of the square grooves (61) being no less than four, a fixing plate (62) being slidably connected inside the square groove (61), a buffering pad layer (63) being fixedly connected to the top of the fixing plate (62), the device body (10) being mounted on the top of the buffering pad layer (63), a shock absorbing plate (64) being symmetrically fixedly connected to the bottom of the fixing plate (62), mounting sleeves (65) being symmetrically mounted on both sides of the bottom of the shock absorbing plate (64), and a damping spring (66) being fixedly mounted between the inner wall of the mounting sleeve (65) and the shock absorbing plate (64); Four mounting sleeves (65) are provided, and the centers of the four mounting sleeves (65) are fixedly connected to the same middle plate (67), the bottom of the middle plate (67) is fixedly connected to a transverse plate (69), the transverse plate (69) is slidably connected to the lower plate (4), damping springs (610) are symmetrically fixedly installed on both sides of the transverse plate (69), the side of the mounting sleeve (65) away from the middle plate (67) is fixedly connected to a side plate (611), and the top of the side plate (611) is fixedly connected to a sleeve (612); The sleeve (612) is internally slidably connected to a slide bar (613), the slide bar (613) is slidably connected to the mounting plate (5), a damping spring three (614) is fixedly installed on the inner bottom surface of the sleeve (612), the top of the slide bar (613) is fixedly connected to an extrusion block (615), the top of the mounting plate (5) is symmetrically fixedly connected to an L-shaped rod (616), one side of the L-shaped rod (616) is laterally slidably connected to a sliding sleeve (617), a damping spring four (618) is laterally fixedly installed inside the sliding sleeve (617), and one end of the sliding sleeve (617) is fixedly connected to a positioning plate (619); A concave block (620) is fixedly connected to the lower part of one side of the positioning plate (619) close to the sliding sleeve (617), and the extrusion block (615) abuts against the inclined surface of the concave block (620). A lower rod (621) is fixedly connected to the middle of the bottom of the fixed plate (62), and a pressure plate (622) is fixedly connected to the bottom end of the lower rod (621). A damping spring five (623) is fixedly installed on the top of the middle plate (67).

2. The microseismic structure of a clean workshop according to claim 1, characterized in that: The damping springs (66) are evenly arranged, and there are no less than four damping springs (66). The shock absorbing plate (64) can only move horizontally inside the mounting sleeve (65). The fixed plate (62) is fixedly connected to the shock absorbing plate (64) through a connecting rod, and the connecting rod is fixedly connected to the sliding rod (613). The number of the connecting rod is the same as that of the sliding rod (613).

3. The microseismic structure of a clean workshop according to claim 1, characterized in that: A lower groove (68) is provided on the top of the lower plate (4), and the number of the lower grooves (68) is the same as the square grooves (61). The bottom surface of the middle plate (67) is in contact with the top surface of the lower plate (4). The transverse plate (69) is slidably connected to the lower groove (68). There are no less than four damping springs (610) 2, and one end of the damping spring (610) away from the transverse plate (69) is fixedly connected to the inner wall of the lower groove (68).

4. The microseismic structure of a clean workshop according to claim 1, characterized in that: The side plates (611) are symmetrically arranged with two, the sleeves (612) are not less than two, and the top end of the damping spring (614) is fixedly connected to the bottom end of the sliding rod (613).

5. The microseismic structure of a clean workshop according to claim 1, characterized in that: One end of the damping spring (618) is fixedly connected to the L-shaped rod (616), the sliding sleeve (617) is located above the concave block (620), and there are no less than two positioning plates (619).

6. The microseismic structure of a clean workshop according to claim 1, characterized in that: The top end of the damping spring five (623) is fixedly connected to the pressure plate (622), the top of the middle plate (67) is symmetrically fixedly connected to the side rods (624), the inner sides of the two side rods (624) are fixedly connected to the connecting sleeves (625), and the connecting sleeves (625) are slidably connected to the lower rod (621).

7. The microseismic structure of a clean workshop according to claim 1, characterized in that: The mounting assembly (9) comprises a cross bar (91) and a vertical bar (99); a rotating sleeve (92) is rotatably mounted in the middle of the cross bar (91); a double-headed screw rod (93) is transversely fixedly connected to the interior of the rotating sleeve (92); the double-headed screw rod (93) is located inside the cross bar (91); clamping sleeves (94) are sleeved on the outside of both sides of the double-headed screw rod (93); and slots (97) are symmetrically provided on the inner side of the mounting frame (7).

8. The microseismic structure of a clean workshop according to claim 7, characterized in that: The clamping sleeve (94) is snap-fitted with the slot (97), a limit slot (95) is symmetrically provided inside the cross bar (91), a limit block (96) is symmetrically fixedly connected to the outside of one side of the clamping sleeve (94) close to the double-headed screw rod (93), and the limit slot (95) is slidably connected to the limit block (96).

9. The microseismic structure of a clean workshop according to claim 8, characterized in that: An elastic block (98) is slidably mounted inside the clamping sleeve (94), and the elastic block (98) is engaged with the slot (97). Positioning bolts (910) are symmetrically fixedly mounted on the bottom of the cross bar (91), and the top end of the vertical bar (99) is plugged into the inner top surface of the top frame (8).

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