A pressure sensor core testing system with a high-frequency response structure

Abstract

The present invention discloses a pressure sensor core testing system with a high-frequency response structure, which relates to the technical field of sensor core testing and improves the pressure sensor core testing efficiency. The present invention obtains the deviation-prepared relationship equation of the pressure sensor under each cycle test under different test pressure values ​​according to the static test signal set, and establishes the deviation numerical curve of each cycle test through the dynamic test signal set, and then the relationship equation between the detection time point and the corresponding deviation numerical value in the deviation numerical curve under each cycle test period, inputs the static detection difference curve and the test error numerical curve into the corresponding deviation-prepared relationship equation and the relationship equation to obtain the static boundary error curve and the dynamic boundary error curve, and judges whether the test pressure sensor is qualified by comparing the static boundary error curve and the dynamic boundary error curve with the static detection difference curve and the test error numerical value.

Description

Technical Field

[0001] The invention relates to the technical field of sensor core testing, in particular to a pressure sensor core testing system with a high-frequency response structure. Background Art

[0002] With the rapid development of modern industrial automation and intelligent manufacturing technology, pressure sensors play a vital role in various industrial applications. Especially in application scenarios with high frequency response, high precision and high stability, such as aerospace, automotive industry, medical equipment and precision instruments, the performance requirements for pressure sensors are getting higher and higher.

[0003] The existing pressure sensor core testing technology has the following defects:

[0004] Limited measurement accuracy and stability: Traditional test systems are prone to drift and error accumulation when running for a long time or facing extreme working conditions, resulting in reduced accuracy and stability of measurement results.

[0005] Single test method: Traditional test systems generally only set a single test state, which cannot take into account both the sensitivity of intermittent pressure tests encountered by test pressure sensors in actual applications, and the durability issues during continuous pressure testing.

[0006] Therefore, how to improve the pressure sensor core test efficiency while achieving parallel testing of the sensitivity and durability of the pressure sensor core is a difficulty in the prior art. To this end, a pressure sensor core test system with a high-frequency response structure is provided. Summary of the invention

[0007] In order to solve the above technical problems, an object of the present invention is to provide a pressure sensor core testing system with a high-frequency response structure.

[0008] In order to achieve the above object, the present invention provides the following technical solutions:

[0009] A pressure sensor core testing system with a high-frequency response structure includes a cloud computing platform, wherein the cloud computing platform is communicatively connected with a test data acquisition module, a dynamic and static error analysis module, and a core state judgment module;

[0010] The test data acquisition module is used to set up a static pressure test environment and a dynamic pressure test environment, place the pressure sensor in the static pressure test environment and the dynamic pressure test environment, perform a number of cyclic tests or cyclic cycles under different test pressure values ​​or test pressure change curves, and then generate a static test signal set and a dynamic test signal set;

[0011] The dynamic and static error analysis module is used to obtain the deviation of the pressure sensor under different test pressure values ​​in each cycle test according to the static test signal set, and to establish the deviation value curve of each cycle test through the dynamic test signal set, and then the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve in each cycle test period;

[0012] The core state judgment module is used to obtain the static test signal set and the dynamic test signal set of the test pressure sensor, and then generate the corresponding static detection difference curve and the test error value curve, and input the static detection difference curve and the test error value curve into the corresponding deviation proposed relationship equation and the relationship equation to obtain the static boundary error curve and the dynamic boundary error curve, and judge whether the test pressure sensor is qualified by comparing the static boundary error curve and the dynamic boundary error curve with the static detection difference curve and the test error value.

[0013] Further, the static pressure test environment is provided with a plurality of static pressure test points with a trigger time of 5-50ms, and the dynamic pressure test environment is provided with a plurality of dynamic pressure test points with pressure values ​​changing according to a pressure change cycle;

[0014] Furthermore, the generation process of the static test signal set and the dynamic test signal set includes:

[0015] Obtain the service life number num of the pressure sensor of the test model through the Internet, install n target model pressure sensors with normal functions in each static pressure test environment and dynamic pressure test environment respectively, and set a high-speed signal amplifier for each pressure sensor, where n is a natural number greater than 0;

[0016] For the static pressure test environment, each pressure sensor is subjected to num cycles of testing. For the dynamic pressure test environment, the pressure sensor is subjected to num cycles of pressure testing according to the pressure change cycle of each dynamic pressure test point, where num is a natural number greater than 50.

[0017] The corresponding static test signal set and dynamic test signal set are integrated and generated, and the corresponding pressure sensor number and test pressure value or test pressure change curve are marked.

[0018] Furthermore, the process of establishing the deviation proposed relationship equation includes:

[0019] The test data acquisition module sends all static test signal sets and dynamic test signal sets to the dynamic and static error analysis module after passing through filters;

[0020] A two-dimensional coordinate system is established, and a detection pressure value detected by each pressure sensor in each cycle test is generated according to the static test signal in the static test signal set;

[0021] According to the test pressure value of each static test pressure point, the x-axis in the two-dimensional coordinate system is initially set to the test pressure value, and then the detection pressure values ​​of each pressure sensor under different cycle tests are mapped to both sides of the y-axis;

[0022] Obtain the distance value from each test pressure value to the y-axis, and record the distance value as the deviation value T, and then under different test pressure values, obtain the deviation coordinate point mapped on the two-dimensional coordinate according to the number of cycles and the deviation value coordinate value, and set a straight line so that it passes through each deviation coordinate point as much as possible, and record the relationship equation of the straight line as the deviation proposed relationship equation;

[0023] Substitute each deviation coordinate point into the deviation proposed relationship equation for multiple iterations, and correct α and β according to the iteration results.

[0024] Furthermore, the process of establishing the deviation value curve includes:

[0025] A corresponding detection pressure change curve is generated according to the dynamic test electrical signal generated at each dynamic test pressure point, and num detection time points are set according to the cyclic test period, so as to obtain the distance value between the detection pressure change curve and the test pressure change curve at each detection time point, and the distance value of each detection time point is connected in sequence to obtain the corresponding dynamic test pressure point and the deviation value curve in the corresponding cyclic test period.

[0026] Furthermore, the process of establishing the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve includes:

[0027] The deviation proposed relationship equation under each test pressure value is retrieved, and the expected static deviation value under each cycle number is obtained in sequence, and then each expected static deviation value is sequentially mapped to the two-dimensional coordinate system where each deviation value curve is located under the same cycle test in the order of the test pressure value from small to large under the same cycle test;

[0028] Obtaining the error value between the value of each difference value curve and the corresponding estimated static deviation value at each detection time point, and then the covariance between the error values ​​corresponding to different pressure sensors at the same detection time point;

[0029] According to the process of establishing the deviation proposed relationship equation, a measurement model f(c, θ) between the deviation value and the detection time point is obtained, and the measurement model f(c, θ) represents a linear or nonlinear model;

[0030] Set the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve to a=f(c,θ)+γ, where a represents the deviation value, c represents the cth detection time point, θ represents the relationship parameter, γ represents the constant error term, and f(c,θ) represents the measurement model between c and a;

[0031] According to the covariance ρ between the deviation values ​​at each detection time point 2 Establishing a covariance matrix A and a Jacobian matrix J, wherein the Jacobian matrix J represents a partial derivative matrix of a model function with respect to an input quantity;

[0032] The error covariance matrix Y is obtained by establishing the Jacobian matrix J and the covariance matrix A. The calculation formula of the error covariance matrix Y is: Y=JAJ T ; Input the values ​​of each item in the error covariance matrix Y into a=f(c,θ)+γ to obtain the values ​​of γ and θ.

[0033] Further, the process of determining whether the test pressure sensor passes the static pressure test includes:

[0034] Generate corresponding static detection pressure values ​​and dynamic detection pressure curves according to the detection static test signal set and the detection dynamic test signal set of the test pressure sensor, and obtain the test pressure value used in the cyclic test and the test pressure change curve used in the cyclic test period;

[0035] A straight line is set according to the test pressure value, and the static detection pressure value and the straight line under each cycle test are mapped in the same two-dimensional coordinate system, and then a corresponding static detection difference curve is generated according to the difference between each static detection pressure value and the straight line;

[0036] The corresponding deviation proposed relationship equation is retrieved according to the test pressure value, and the static detection pressure value generated by each cycle test is sequentially input into the deviation proposed relationship equation to obtain the static boundary error curve;

[0037] The static detection difference curve and the boundary error curve are mapped on the same two-dimensional coordinate system, and a static error threshold is set, so as to obtain the calculus value of the static detection difference curve and the static boundary error curve, and the calculus value is recorded as the static error value;

[0038] By comparing the magnitude relationship between the static error value and the static error threshold, it is determined whether the test pressure sensor passes the static pressure detection.

[0039] Further, the process of determining whether the test pressure sensor passes the dynamic pressure test includes:

[0040] The dynamic detection pressure curve and the test pressure change curve under each cycle test period are mapped into the same two-dimensional coordinate system, and then the corresponding test error numerical curve is generated;

[0041] Input the test error value curve into the corresponding relationship equation at each detection time point in turn to obtain the corresponding dynamic boundary error curve, and set the dynamic error threshold and the error cycle number threshold;

[0042] The dynamic error value between the dynamic boundary error curve and the test error value curve under each cyclic test period is obtained. If the dynamic error value of a cyclic test period that exceeds the error cycle number threshold is greater than or equal to the dynamic error threshold, it is judged that the test pressure sensor has not passed the dynamic pressure test, and then the test pressure sensor core is judged to be unqualified. Otherwise, it is judged that the test pressure sensor core has passed the dynamic pressure test. When the test pressure sensor passes both the dynamic pressure test and the static pressure test, it is judged that the corresponding test pressure sensor core is qualified.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] 1. The present invention adopts dynamic / static pressure separate testing, and respectively collects the detection pressure values ​​and the detection pressure change curves under the two test states, and then establishes a relationship equation between the number of tests and the error value according to the detection pressure values ​​and the detection pressure change curve, which provides a data basis for the subsequent evaluation of whether the pressure sensor core is qualified. In addition, since the dynamic / static pressure tests are started separately, the efficiency of the test process is effectively improved.

[0045] 2. The present invention performs intermittent pressure testing on the pressure sensor core by setting up a static pressure test environment test, thereby improving the accuracy of executing the sensitivity test of the pressure sensor core, and then performs auxiliary evaluation on the dynamic pressure test environment test results based on the test results of the static pressure test environment, thereby improving the accuracy of the durability test of the pressure sensor core. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 It is a schematic diagram of the present invention. DETAILED DESCRIPTION

[0047] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0048] like Figure 1 As shown, a pressure sensor core testing system with a high-frequency response structure includes a cloud computing platform, wherein the cloud computing platform is communicatively connected with a test data acquisition module, a dynamic and static error analysis module, and a core state judgment module;

[0049] The test data acquisition module is used to set up a static pressure test environment and a dynamic pressure test environment, place the pressure sensor in the static pressure test environment and the dynamic pressure test environment, perform a number of cyclic tests or cyclic cycles under different test pressure values ​​or test pressure change curves, and then generate a static test signal set and a dynamic test signal set;

[0050] The dynamic and static error analysis module is used to obtain the deviation of the pressure sensor under different test pressure values ​​in each cycle test according to the static test signal set, and to establish the deviation value curve of each cycle test through the dynamic test signal set, and then the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve in each cycle test period;

[0051] The core state judgment module is used to obtain the static test signal set and the dynamic test signal set of the test pressure sensor, and then generate the corresponding static detection difference curve and the test error value curve, and input the static detection difference curve and the test error value curve into the corresponding deviation proposed relationship equation and the relationship equation to obtain the static boundary error curve and the dynamic boundary error curve, and judge whether the test pressure sensor is qualified by comparing the static boundary error curve and the dynamic boundary error curve with the static detection difference curve and the test error value.

[0052] Further, the working principle of the present invention is specifically described below through embodiments:

[0053] The test data acquisition module sets a static pressure test environment and a dynamic pressure test environment with periodic changes in pressure value, and obtains the service life number num of the pressure sensor of the test model through the Internet;

[0054] The static stress test environment is provided with a plurality of static stress test points with a trigger time of 5-50ms;

[0055] The dynamic pressure test environment is provided with a plurality of dynamic pressure test points whose pressure values ​​change according to a pressure change cycle;

[0056] Install n target model pressure sensors with normal functions in each static pressure test environment and dynamic pressure test environment respectively, and set a high-speed signal amplifier for each pressure sensor, where n is a natural number greater than 0;

[0057] Each pressure sensor is connected to the test data acquisition module for communication, and then the test data acquisition module sets a number a1, a2, ..., a2 for each pressure sensor according to the communication connection result. n , b1, b2, ..., b n , an and b n Respectively represent the number of the nth pressure sensor in the static pressure test environment and the dynamic pressure test environment;

[0058] For the static pressure test environment, according to the trigger time of each static pressure test point, each pressure sensor is tested for num cycles at the same time, and at the end of each cycle test, the static test electrical signal generated by each pressure sensor is amplified by a high-speed signal amplifier, where num is a natural number greater than 50. It should be noted that in each cycle test, the test pressure value of each static pressure test point is set in sequence according to the pressure value in the dynamic pressure test point;

[0059] That is, the pressure change curve around the dynamic pressure test point is divided into num pressure value points, and the test pressure value is set for the static pressure test point in the static pressure test environment under each cycle test in turn, but the test pressure value of the same static pressure test point under different cycle tests is the same;

[0060] For the dynamic pressure test environment, a cyclic test cycle is set according to the pressure change cycle of each dynamic pressure test point. Then, at the end of each cyclic test cycle, the dynamic test electrical signal generated by each pressure sensor is amplified by a high-speed signal amplifier. After num cyclic test cycles, each dynamic test pressure point stops working;

[0061] It should be noted that at the end of each cyclic test or cyclic test period, 5 ms to 50 ms will pass before the next cyclic test or cyclic test period;

[0062] The test data acquisition module collects the amplified static test electrical signals and dynamic test electrical signals of each pressure sensor after the cyclic test, and integrates them to generate the corresponding static test signal set and dynamic test signal set, while marking the corresponding pressure sensor number and test pressure value or test pressure change curve.

[0063] Furthermore, the test data acquisition module sends all static test signal sets and dynamic test signal sets to the dynamic and static error analysis module after passing through filters;

[0064] The dynamic and static error analysis module establishes num two-dimensional coordinate systems, and first generates the detection pressure value detected by each pressure sensor in each cycle test according to the static test signal in the static test signal set;

[0065] According to the test pressure value of each static test pressure point, the x-axis in the two-dimensional coordinate system is initially set to the test pressure value, and then the detection pressure values ​​of each pressure sensor under different cycle tests are mapped to both sides of the y-axis;

[0066] The distance value from each detection pressure value to the y-axis is obtained, and the distance value is recorded as the deviation value T. Then, under different test pressure values, the deviation coordinate points are mapped on the two-dimensional coordinates according to the number of cycles and the deviation value coordinate values, and a straight line is set to pass through as many deviation coordinate points as possible, and the relationship equation of the straight line is recorded as the deviation proposed relationship equation, where the deviation proposed relationship equation is expressed as: ;

[0067] Where α represents the coefficient of deviation, β represents the relationship parameter, and q represents the number of cycles;

[0068] Substitute each deviation coordinate point into the deviation proposed relationship equation for multiple iterations, and calibrate α and β according to the iteration results;

[0069] Repeat the above process of establishing the deviation proposed relationship equation to obtain the deviation proposed relationship equation under different test pressure values.

[0070] Further, a corresponding detection pressure change curve is generated according to the dynamic test electrical signal generated by each dynamic test pressure point, and then the detection pressure change curve of each dynamic test pressure point under the same cycle test period is mapped on the same two-dimensional coordinate system, and the test pressure change curve is mapped on each two-dimensional coordinate system at the same time;

[0071] According to the cyclic test period, num detection time points are set, and then the distance value between the detection pressure change curve and the test pressure change curve at each detection time point is obtained, and the distance values ​​of each detection time point are sequentially connected to obtain the deviation value curve of the corresponding dynamic test pressure point in the corresponding cyclic test period;

[0072] At the same time, the deviation proposed relationship equation under each test pressure value is retrieved, and the expected static deviation value under each cycle number is obtained in turn, and then the expected static deviation values ​​are mapped in turn to the two-dimensional coordinate system where each deviation value curve is located under the same cycle test in the order of the test pressure value from small to large under the same cycle test;

[0073] Obtain the error value between the value of each difference value curve and the corresponding expected static deviation value at each detection time point, and then the covariance ρ between the error values ​​corresponding to different pressure sensors at the same detection time point 2 ;

[0074] According to the process of establishing the deviation proposed relationship equation, a measurement model f(c, θ) between the deviation value and the detection time point is obtained, and the measurement model f(c, θ) represents a linear or nonlinear model;

[0075] For example, f(c, θ) can be expressed as a=θ1+cθ2, where θ1 and θ2 are relationship parameters;

[0076] Assume that under dynamic pressure changes and each cyclic test period, the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve is a=f(c,θ)+γ, where a represents the deviation value, c represents the cth detection time point, θ represents the relationship parameter, γ represents the constant error term, and f(c,θ) represents the measurement model between c and a;

[0077] According to the covariance ρ between the deviation values ​​at each detection time point 2 Establish the covariance matrix A, which can be expressed as: , represents the covariance between the deviation values ​​at the kth detection time point, where k is a natural number greater than 0;

[0078] Establishing a Jacobian matrix J, wherein the Jacobian matrix J represents a partial derivative matrix of a model function with respect to an input quantity;

[0079] When the measurement model f(c, θ) is a linear model, the Jacobian matrix J is expressed as

[0080] ;

[0081] When the measurement model f(c, θ) is a nonlinear model, the Jacobian matrix J is expressed as

[0082] ;

[0083] The error covariance matrix Y is obtained by establishing the Jacobian matrix J and the covariance matrix A. The calculation formula of the error covariance matrix Y is: Y=JAJ T ; Input the values ​​of each item in the error covariance matrix Y into a=f(c,θ)+γ, and then obtain the values ​​of γ and θ;

[0084] The above process of obtaining the values ​​of γ and θ is repeated to establish a relationship equation between the detection time point and the corresponding deviation value in the deviation value curve in each cyclic test period.

[0085] Further, the core state judgment module obtains from the test data acquisition module a detection static test signal set and a detection dynamic test signal set generated by the test pressure sensor in the static pressure test environment and the dynamic pressure test environment for num cycles of testing and cycle detection cycles;

[0086] Generate corresponding static detection pressure values ​​and dynamic detection pressure curves according to the detection static test signal set and the detection dynamic test signal set, and obtain the test pressure value used in the cyclic test and the test pressure change curve used in the cyclic test period;

[0087] A straight line is set according to the test pressure value, and the static detection pressure value and the straight line under each cycle test are mapped in the same two-dimensional coordinate system, and then a corresponding static detection difference curve is generated according to the difference between each static detection pressure value and the straight line;

[0088] According to the test pressure value, the corresponding deviation proposed relationship equation is retrieved, and the static detection pressure value generated by each cycle test is sequentially input into the deviation proposed relationship equation, and the corresponding static boundary error curve is established according to the output result of the deviation proposed relationship equation;

[0089] The static detection difference curve and the boundary error curve are mapped on the same two-dimensional coordinate system, and a static error threshold is set, so as to obtain the calculus value of the static detection difference curve and the static boundary error curve, and the calculus value is recorded as the static error value;

[0090] If the static error value is less than or equal to the static error threshold, it is determined that the test pressure sensor core has passed the static pressure test;

[0091] If the static error value is greater than the static error threshold, it is determined that the test pressure sensor has not passed the static pressure test, and further the test pressure sensor core is determined to be unqualified;

[0092] Collect and judge whether the test pressure sensor has passed the static pressure test, map the dynamic test pressure curve and the test pressure change curve under each cycle test period into the same two-dimensional coordinate system, and then generate the corresponding test error value curve;

[0093] Input the test error value curve into the corresponding relationship equation at each detection time point in turn to obtain the corresponding dynamic boundary error curve, and set the dynamic error threshold and the error cycle number threshold;

[0094] Obtain the dynamic error value between the dynamic boundary error curve and the test error value curve under each cyclic test period. If the dynamic error value of the cyclic test period that exceeds the error cycle number threshold is greater than or equal to the dynamic error threshold, it is judged that the test pressure sensor has not passed the dynamic pressure test, and then the test pressure sensor core is judged to be unqualified. Otherwise, it is judged that the test pressure sensor core has passed the dynamic pressure test.

[0095] When the test pressure sensor passes both the dynamic pressure test and the static pressure test, it is determined that the corresponding test pressure sensor core is qualified.

[0096] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A high-frequency response structure pressure sensor core testing system, including a cloud computing platform, characterized in that: The cloud computing platform is communicatively connected with a test data acquisition module, a dynamic and static error analysis module, and a core state judgment module; The test data acquisition module is used to set up a static pressure test environment and a dynamic pressure test environment, place the pressure sensor in the static pressure test environment and the dynamic pressure test environment, perform a number of cyclic tests or cyclic cycles under different test pressure values ​​or test pressure change curves, and then generate a static test signal set and a dynamic test signal set; The dynamic and static error analysis module is used to obtain the deviation of the pressure sensor under different test pressure values ​​in each cycle test according to the static test signal set, and to establish the deviation value curve of each cycle test through the dynamic test signal set, and then the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve in each cycle test period; The core state judgment module is used to obtain the static test signal set and the dynamic test signal set of the test pressure sensor, and then generate the corresponding static detection difference curve and the test error value curve, input the static detection difference curve and the test error value curve into the corresponding deviation proposed relationship equation and the relationship equation to obtain the static boundary error curve and the dynamic boundary error curve, and judge whether the test pressure sensor is qualified by comparing the static boundary error curve and the dynamic boundary error curve with the static detection difference curve and the test error value; The static pressure test environment is provided with a plurality of static pressure test points with a trigger time of 5-50ms, and the dynamic pressure test environment is provided with a plurality of dynamic pressure test points with pressure values ​​changing according to a pressure change cycle; The generation process of the static test signal set and the dynamic test signal set includes: Obtain the service life number num of the pressure sensor of the test model through the Internet, install n target model pressure sensors with normal functions in each static pressure test environment and dynamic pressure test environment respectively, and set a high-speed signal amplifier for each pressure sensor, where n is a natural number greater than 0; For the static pressure test environment, each pressure sensor is subjected to num cycles of testing. For the dynamic pressure test environment, the pressure sensor is subjected to num cycles of pressure testing according to the pressure change cycle of each dynamic pressure test point, where num is a natural number greater than 50. The corresponding static test signal set and dynamic test signal set are integrated and generated, and the corresponding pressure sensor number and test pressure value or test pressure change curve are marked.

2. A pressure sensor core testing system with a high-frequency response structure according to claim 1, characterized in that: The process of establishing the deviation proposed relationship equation includes: The test data acquisition module sends all static test signal sets and dynamic test signal sets to the dynamic and static error analysis module after passing through filters; A two-dimensional coordinate system is established, and a detection pressure value detected by each pressure sensor in each cycle test is generated according to the static test signal in the static test signal set; According to the test pressure value of each static test pressure point, the x-axis in the two-dimensional coordinate system is initially set to the test pressure value, and then the detection pressure values ​​of each pressure sensor under different cycle tests are mapped to both sides of the y-axis; Obtain the distance value from each detection pressure value to the y-axis, and record the distance value as the deviation value T. Then, under different test pressure values, use the number of cycles and the deviation value coordinate value to obtain the deviation coordinate point mapped on the two-dimensional coordinate, and set a straight line so that it passes through the largest number of deviation coordinate points, and record the relationship equation of the straight line as the deviation proposed relationship equation.

3. The pressure sensor core testing system with a high-frequency response structure according to claim 2, characterized in that: The process of establishing the deviation value curve includes: A corresponding detection pressure change curve is generated according to the dynamic test electrical signal generated at each dynamic test pressure point, and num detection time points are set according to the cyclic test period, so as to obtain the distance value between the detection pressure change curve and the test pressure change curve at each detection time point, and the distance value of each detection time point is connected in sequence to obtain the corresponding dynamic test pressure point and the deviation value curve in the corresponding cyclic test period.

4. The high-frequency response structure pressure sensor core testing system according to claim 3, characterized in that: The process of establishing the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve includes: The deviation proposed relationship equation under each test pressure value is retrieved, and the expected static deviation value under each cycle number is obtained in sequence. Under the same cycle test, in the order of the test pressure value from small to large, each expected static deviation value is sequentially mapped to the two-dimensional coordinate system where each deviation value curve is located under the same cycle test; Obtaining the error value between the value of each difference value curve and the corresponding estimated static deviation value at each detection time point, and then the covariance between the error values ​​corresponding to different pressure sensors at the same detection time point; According to the process of establishing the deviation proposed relationship equation, a measurement model f(c, θ) between the deviation value and the detection time point is obtained, and the measurement model f(c, θ) represents a linear or nonlinear model; Set the relationship equation between the detection time point and the corresponding deviation value in the deviation value curve to a=f(c,θ)+γ, where a represents the deviation value, c represents the cth detection time point, θ represents the relationship parameter, γ represents the constant error term, and f(c,θ) represents the measurement model between c and a; A covariance matrix A is established according to the covariance ρ2 between the deviation values ​​at each detection time point, and a Jacobian matrix J is established, wherein the Jacobian matrix J represents the partial derivative matrix of the model function with respect to the input quantity; The error covariance matrix Y is obtained by establishing the Jacobian matrix J and the covariance matrix A, and the values ​​of each item in the error covariance matrix Y are input into a=f(c, θ)+γ to obtain the values ​​of γ and θ.

5. The pressure sensor core testing system with a high-frequency response structure according to claim 4, characterized in that: The process of determining whether the test pressure sensor passes the static pressure test includes: Generate a static detection pressure value and a dynamic detection pressure curve according to the detection static test signal set and the detection dynamic test signal set of the test pressure sensor, and obtain the test pressure value used in the cyclic test and the test pressure change curve used in the cyclic test period; A straight line is set according to the test pressure value, and the static detection pressure value and the straight line under each cycle test are mapped in the same two-dimensional coordinate system, and then a static detection difference curve is generated according to the difference between each static detection pressure value and the straight line; The static detection pressure values ​​generated by each cycle test are sequentially input into the deviation proposed relationship equation to obtain the static boundary error curve, and the static error threshold is set to obtain the calculus value of the static detection difference curve and the static boundary error curve, and the calculus value is recorded as the static error value; By comparing the magnitude relationship between the static error value and the static error threshold, it is determined whether the test pressure sensor core has passed the static pressure test.

6. The pressure sensor core testing system with a high-frequency response structure according to claim 5, characterized in that: The process of determining whether the test pressure sensor passes the dynamic pressure test includes: The dynamic detection pressure curve and the test pressure change curve under each cycle test period are mapped into the same two-dimensional coordinate system, and then the corresponding test error numerical curve is generated; Input the test error value curve into the corresponding relationship equation at each detection time point in turn to obtain the corresponding dynamic boundary error curve, and set the dynamic error threshold and the error cycle number threshold; The dynamic error value between the dynamic boundary error curve and the test error value curve under each cyclic test period is obtained. If the dynamic error value of a cyclic test period that exceeds the error cycle number threshold is greater than or equal to the dynamic error threshold, it is judged that the test pressure sensor has not passed the dynamic pressure test, and then the test pressure sensor core is judged to be unqualified. Otherwise, it is judged that the test pressure sensor core has passed the dynamic pressure test. When the test pressure sensor passes both the dynamic pressure test and the static pressure test, it is judged that the corresponding test pressure sensor core is qualified.

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