Device and method for detecting amplification factor of out-of-focus beam expanding system

Abstract

The invention relates to an out-of-focus beam expanding system amplification factor detection device and method, and belongs to the field of precision optical measurement. The device mainly comprises an optical vibration isolation platform, a multi-tooth indexing table, a reflector adjusting seat, a reflector, an out-of-focus beam expanding system, an autocollimator and an autocollimator adjusting platform. According to the invention, precise rotation angle motion of the multi-tooth indexing table is controlled, the autocollimator is used for measuring angle change after passing through the defocusing beam expanding system, and the amplification factor of the defocusing beam expanding system is obtained by calculating the angle ratio. The device is simplified in structure, and can achieve the precise measurement of the amplification factor of the out-of-focus beam expanding system.

Description

Technical Field

[0001] The present invention belongs to the field of precision optical measurement, and in particular relates to a device and method for detecting the magnification of a defocusing beam expanding system. Background Art

[0002] With the rapid development of optical technology, the application of defocus beam expansion systems is becoming more and more extensive. As its key core technical indicator, magnification needs to be precisely measured to guide the installation and debugging of the entire optical system.

[0003] At present, the commonly used optical system magnification detection methods mainly include: standard aperture method, collimator and front mirror method.

[0004] The standard aperture method mainly uses the principle of vertical axis magnification measurement for measurement. The collimator and front mirror method mainly calculates the magnification by measuring the viewing angle. The standard aperture has the advantages of simple structure and convenient measurement, but due to the influence of aperture aberration, the accuracy is low. The collimator and front mirror method has the characteristics of high measurement accuracy, but the structure is complex and difficult to adjust. Summary of the invention

[0005] The technical problem to be solved by the present invention is: to provide a device and method for detecting the magnification of a defocusing beam expanding system in response to the demand for detecting the magnification of the defocusing beam expanding system.

[0006] The technical solution of the present invention is: by controlling the precise angular motion of the multi-tooth indexing table and reading the rotation angle α of the multi-tooth indexing table, using an autocollimator to measure the angle change β after passing through the defocus beam expansion system, and by calculating the angle ratio β / α, the magnification of the defocus beam expansion system is obtained. The detection device includes: an optical vibration isolation platform, a multi-tooth indexing table, a reflector adjustment seat, a reflector, a defocus beam expansion system, an autocollimator, and an autocollimator adjustment platform. Among them: The optical vibration isolation platform is used to install the entire detection device and achieve external environment vibration isolation.

[0007] The multi-tooth indexing table is used to fix the reflector adjustment seat and drive the reflector to rotate to produce angular rotation, thereby realizing precise angular movement.

[0008] The reflector adjustment seat is fixed on the multi-tooth dividing table and is used to adjust the reflector posture. It has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0009] The reflector is fixed to the reflector adjustment seat and is used to realize the measurement light reflection of the autocollimator.

[0010] The defocus beam expansion system belongs to the system to be tested and is installed on an optical vibration isolation platform.

[0011] The autocollimator is fixed on the autocollimator adjustment platform and is used to measure the angle change after passing through the defocusing beam expansion system.

[0012] The autocollimator adjustment platform is fixed on the optical vibration isolation platform and is used to realize the posture adjustment of the autocollimator. It has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0013] Compared with the prior art, the present invention has the following advantages: (1) The detection device has a simple structure and is easy to adjust; (2) The detection method of the present invention has high accuracy by utilizing the precise rotation angle of the multi-tooth indexing table and the high measurement accuracy of the autocollimator. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The present invention is a schematic diagram of the structure of a magnification detection device for a defocusing beam expanding system.

[0015] In the figure, the reference numerals are: Optical vibration isolation platform 1, multi-tooth indexing table 2, reflector adjustment seat 3, reflector 4, defocusing beam expansion system 5, autocollimator 6, autocollimator adjustment platform 7. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical scheme and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in each embodiment of the present invention described below can be combined with each other as long as they do not conflict with each other. To achieve the above-mentioned purpose, the present invention adopts the following technical scheme.

[0017] The present invention is further described below with reference to the accompanying drawings and specific embodiments.

[0018] A defocus beam expansion system magnification detection device of the present invention is as follows Figure 1 As shown, the following components are included: an optical vibration isolation platform 1, a multi-tooth indexing table 2, a reflector adjustment seat 3, a reflector 4, a defocusing beam expansion system 5, an autocollimator 6, and an autocollimator adjustment platform 7.

[0019] The optical vibration isolation platform 1 is used to install the entire detection device and achieve external environment vibration isolation.

[0020] The multi-tooth indexing table 2 is used to fix the reflector adjustment seat 3 and drive the reflector 4 to rotate to generate an angle rotation.

[0021] The reflector adjustment seat 3 is fixed to the multi-tooth dividing table 2, and is used to realize the posture adjustment of the reflector 4, and has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0022] The reflector 4 is fixed to the reflector adjustment seat 3 and is used to realize the reflection of the measuring light of the autocollimator 6 .

[0023] The defocusing beam expansion system 5 belongs to the system to be tested and is installed on the optical vibration isolation platform 1 .

[0024] The autocollimator 6 is fixed on the autocollimator adjustment platform 7 and is used to measure the angle change after passing through the defocusing beam expansion system 5 .

[0025] The autocollimator adjustment platform 7 is fixed to the optical vibration isolation platform 1, and is used to realize the posture adjustment of the autocollimator 6, and has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

[0026] The present invention also proposes a detection method based on the above device, which comprises the following specific steps: Step (1) assembling and adjusting the detection device; The optical axes of the autocollimator 6 and the defocusing beam expansion system 5 are adjusted to be coaxial, and the measuring light of the autocollimator 6 passing through the reflector 4 is reflected back to the autocollimator 6 through the defocusing beam expansion system 5 by adjusting the reflector adjustment seat 3. In order to ensure that the autocollimator 6 has a larger measuring range, the measuring light reflected back to the autocollimator 6 should be adjusted to the center of the autocollimator 6 as much as possible.

[0027] Step (2) measuring by a detection device; By controlling the precise angular motion of the multi-tooth indexing table 2 and reading the rotation angle α of the multi-tooth indexing table, the autocollimator 6 is used to measure the angle change β after passing through the defocus beam expansion system 5, and the angle ratio β / α is calculated to obtain the magnification of the defocus beam expansion system 5. The average value of multiple measurements is taken as the final result of the magnification of the defocus beam expansion system 5.

[0028] The above description is only a specific implementation of the present invention, but the protection scope of the present invention is not limited thereto. Any person familiar with the technology can understand and think of any changes or substitutions within the technical scope disclosed by the present invention, which should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A magnification detection device for a defocus beam expansion system, characterized in that: include: Optical vibration isolation platform, multi-tooth indexing table, reflector adjustment seat, reflector, defocus beam expansion system, autocollimator, autocollimator adjustment platform; including: Optical vibration isolation platform, used to install the entire detection device and achieve external environmental vibration isolation; The multi-tooth indexing table is used to fix the reflector adjustment seat and drive the reflector to rotate to produce angle rotation, thus realizing precise angular movement; The reflector adjustment seat is fixed on the multi-tooth indexing table and is used to adjust the reflector posture. It has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ. A reflector, fixed to a reflector adjustment seat, for realizing the reflection of the measuring light of the autocollimator; The defocus beam expansion system belongs to the system to be tested and is installed on the optical vibration isolation platform; An autocollimator, fixed to the autocollimator adjustment platform, is used to measure the angle change after passing through the defocus beam expansion system; The autocollimator adjustment platform is fixed on the optical vibration isolation platform and is used to realize the posture adjustment of the autocollimator. It has the functions of two-dimensional angle adjustment around Y and Z and three-dimensional translation adjustment around XYZ.

2. A defocus beam expansion system magnification detection device according to claim 1, characterized in that: The reflector adjustment seat can at least realize X, Y, Z three-dimensional translation movement and θ x ,θ z The resolution of 2D tilt adjustment and 3D translation movement is less than 1μm, and the adjustment range is ≥10mm; the resolution of 2D tilt adjustment is 0.001°, and the adjustment range is ≥3°.

3. A defocus beam expansion system magnification detection device according to claim 1, characterized in that: The table size of the multi-tooth indexing table shall not be less than 100mm, the accuracy, i.e. the peak-to-peak value, shall not exceed 0.3″, the repeatability measurement accuracy shall not exceed 0.08″, and the load-bearing capacity shall not be less than 10kg.

4. A defocus beam expansion system magnification detection device according to claim 1, characterized in that: The autocollimator adjustment platform can at least achieve X, Y, Z three-dimensional translation and θ x ,θ z The resolution of 2D tilt adjustment and 3D translation movement is less than 1μm, and the adjustment range is ≥10mm; the resolution of 2D tilt adjustment is 0.001°, and the adjustment range is ≥3°.

5. A defocus beam expansion system magnification detection device according to claim 1, characterized in that: The autocollimator itself has two-dimensional angle adjustment function and two-dimensional angle measurement function. The measurement range is not less than 1000″×1000″, and the full-range measurement accuracy does not exceed 0.5″.

6. A detection method for the magnification detection device of the defocus beam expansion system according to any one of claims 1 to 5, characterized in that: The method comprises the following: Step (1) assembling and adjusting the detection device; including: adjusting the optical axes of the autocollimator and the defocusing beam expanding system to be coaxial, adjusting the reflector adjustment seat to reflect the autocollimator measurement light passing through the reflector through the defocusing beam expanding system back to the autocollimator, and adjusting the measurement light reflected back to the autocollimator to the center of the autocollimator; Step (2) measuring by a detection device; comprising: controlling the precise angular movement of a multi-tooth indexing table and reading out the rotation angle α of the multi-tooth indexing table, using an autocollimator to measure the angle change β after passing through the defocus beam expanding system, calculating the angle ratio β / α, obtaining the magnification of the defocus beam expanding system, and taking an average value of multiple measurements as the final result of the magnification of the defocus beam expanding system.

Images