Mask plate

Abstract

The invention provides a mask plate. The mask plate comprises a plurality of shading lines, a plurality of conductive wires and a connecting part, wherein the shading lines are arranged at intervals; the conductive wire is connected with the plurality of shading lines, so that the plurality of shading lines are equipotential; the connecting part is located at the joint of the shading line and the conductive wire, and the end of the conductive wire penetrates through the connecting part to be connected with the shading line. According to the invention, the structure of the connection part of the shading line and the conductive wire is optimized, and the connection part is arranged, so that burrs on the exposed screen body can be reduced, the risk of tip electrostatic discharge can be reduced, and the probability that the shading line is damaged by ESD can be avoided.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a mask plate. Background Art

[0002] At present, mask plates are widely used in the electronics industry and the display industry. Exposure equipment is used to project the shading lines on the mask plate onto the device to be exposed that is coated with a photosensitive material (such as photoresist). A patterned film layer can be formed on the device to be exposed through development, etching and other processes.

[0003] Static electricity is easily generated during the production, transportation and storage of the mask plate. Since the frame area of ​​the mask plate has many mutually isolated shading lines (also called metal lines), when the static electricity accumulated in one or several of the shading lines reaches a certain value, it will release static electricity to the adjacent metal lines, causing static electricity damage to the lines. Therefore, it is necessary to improve the existing mask plate. Summary of the invention

[0004] In view of this, the purpose of the present disclosure is to propose a mask plate, which can reduce the impact of the design on the appearance of burrs on the screen after exposure, reduce the risk of static electricity, and at the same time reduce the probability of ESD damage to the shading lines by setting a connecting part at the junction of the shading lines and the conductive traces.

[0005] Based on the above purpose, the present disclosure discloses a mask plate, which includes:

[0006] A plurality of shading lines, wherein the plurality of shading lines are arranged at intervals;

[0007] A plurality of conductive traces, wherein the conductive traces are equipotentially connected to the plurality of light shielding lines;

[0008] The connecting portion is located at the intersection of the light-shielding line and the conductive line, and the end of the conductive line passes through the connecting portion and is connected to the light-shielding line.

[0009] In a specific embodiment, the connecting portion includes at least one first notch portion, and the first notch portion is located on the side of the light-shielding line;

[0010] Preferably, the end surface of the first notch is in an arc, rectangular, conical or polygonal shape.

[0011] In a specific embodiment, along the length direction of the conductive trace, the depth of the first notch portion is greater than or equal to the width of the conductive trace;

[0012] Preferably, along the length direction of the conductive trace, the depth of the first notch is 0.5-1 um;

[0013] Preferably, along the width direction of the conductive trace, the width of the first notch portion is greater than the width of the conductive trace;

[0014] Preferably, along the length direction of the conductive trace, the width of the first notch is 1-2 um;

[0015] Preferably, along the width direction of the conductive trace, two adjacent first notch portions are arranged in parallel, or two adjacent first notch portions are arranged alternately.

[0016] In a specific embodiment, the connecting portion includes a second notch portion, and the second notch portion is located on the side of the light-shielding line.

[0017] The second notch portion includes a first groove and a second groove; the first groove is connected to the second groove, and the second groove is arranged on a side of the first groove away from the light shielding line;

[0018] Preferably, along the width direction of the conductive trace, the width of the first groove on a side close to the second groove is less than or equal to the width of the second groove on a side close to the first groove;

[0019] Preferably, along the width direction of the conductive trace, two adjacent second notches are arranged alternately.

[0020] In a specific implementation, along the length direction of the conductive trace, the depth of the second notch is 1-2 um.

[0021] Preferably, along the width direction of the conductive trace, the width of the first groove is 1-2 um, and the width of the second groove is 2-4 um.

[0022] In a specific embodiment, the connecting portion includes at least one extension portion, the extension portion is located at an end of the conductive trace, and the extension portion includes a plurality of radial lines;

[0023] Preferably, the plurality of radial lines diverge from the ends of the conductive traces in a direction away from the light shielding lines, and the diverged plurality of radial lines are in an arc shape.

[0024] Preferably, the length of each radiation line is the same, and the length of each radiation line is 0.5-1 um.

[0025] Preferably, the spacing between the plurality of radial lines is equal;

[0026] Preferably, the width of each radiation line is less than or equal to the width of the conductive trace.

[0027] In a specific embodiment, preferably, along the width direction of the conductive trace, two adjacent extension portions are arranged in parallel, or two adjacent extension portions are arranged alternately.

[0028] In a specific embodiment, the connecting portion includes a third notch portion, the third notch portion is located at a side of the light-shielding line, and the first extension portion is located in the third notch portion;

[0029] Preferably, along the width direction of the conductive trace, two adjacent third notches are arranged alternately;

[0030] Preferably, along the length direction of the conductive trace, the depth of each third notch portion is greater than the length of the radiation line.

[0031] In a specific embodiment, the width of the conductive trace is smaller than the width of the light shielding line;

[0032] Preferably, the width of the conductive trace is 0.5-1um;

[0033] Preferably, the conductive trace is a horizontal line, an oblique line or a folded line.

[0034] The present disclosure also discloses an evaporation device: the evaporation device cooperates with any of the mask plates described above to perform evaporation operations.

[0035] Compared with the prior art, the mask plate provided by the present invention reduces the risk of burrs on the screen after exposure and static electricity by setting a connecting portion at the junction of the shading line and the conductive trace, while also reducing the probability of ESD damage to the shading line. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the present disclosure or related technologies, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 It is a schematic diagram of a mask plate in the prior art;

[0038] Figure 2 A schematic diagram of the burrs formed at the junction of the shading lines and the conductive traces;

[0039] Figure 3 A schematic diagram of a mask provided in an embodiment of the present disclosure;

[0040] Figure 4 for Figure 3 The enlarged schematic diagram of part A in the middle;

[0041] Figure 5 This is a schematic diagram showing that the end surface of the first notch portion in the present disclosure is in an arc shape;

[0042] Figure 6 A schematic diagram of a mask plate provided for implementation 2 of the present disclosure;

[0043] Figure 7 for Figure 6 The enlarged schematic diagram of part B in the middle;

[0044] Figure 8 A schematic diagram of a mask provided for implementation three of the present disclosure;

[0045] Fig. 9 for Figure 8 The enlarged schematic diagram of part C in the middle;

[0046] Fig.10 A schematic diagram of a mask plate provided for implementation of the fourth embodiment of the present disclosure;

[0047] Fig.11 for Fig.10 Enlarged schematic diagram of part D in the middle. DETAILED DESCRIPTION

[0048] In order to make the objectives, technical solutions and advantages of the present disclosure more clearly understood, the present disclosure is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0049] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the embodiments of the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Including" or "comprising" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0050] During the production, transportation and storage of the mask, the light shielding lines 100 (metal material) in the frame area of ​​the mask are prone to pressure differences due to the accumulation of different charges, and at the same time, static electricity is released to the adjacent light shielding lines 100, thereby causing static electricity damage to the circuit.

[0051] To this end, the applicant conducted further research on the mask, please refer to Figure 1-Figure 2 , Figure 1 is a schematic diagram of the mask plate. Figure 2The schematic diagram of the burr formed at the junction of the shading line and the conductive trace (shortbar). In order to solve the static electricity problem of the mask during production, transportation and storage, many mutually isolated shading lines 100 can be connected together on the mask with a conductive trace (shortbar) 200, so that all the shading lines 100 reach the same potential level (i.e., equipotential), and there will be no voltage difference between the shading lines 100, thereby avoiding mutual release of static electricity. In practice, because the conductive trace 200 is relatively thin, under normal exposure, a fine line pattern will not be formed on the display panel, but a burr P will be formed at the junction / connection of the shading line 100 and the conductive trace 200, and the burr P is prone to tip discharge, which is easy to cause electrostatic (ESD) damage, and weakens the anti-ESD ability of the shading line.

[0052] Based on the above reasons, the present disclosure provides a mask plate, which can avoid the generation of sharp burrs at the intersection / connection between the conductive traces and the light-shielding lines, thereby avoiding the risk of electrostatic discharge (ESD).

[0053] Embodiment 1,

[0054] See also Figure 3 , Figure 3 The present disclosure provides a schematic diagram of a mask plate, which includes a plurality of shading lines 10, a plurality of conductive traces 20 and a connecting portion, wherein the plurality of shading lines 10 are arranged at intervals; the conductive traces 20 are connected to the plurality of shading lines 10 at the same potential; the connecting portion is located at the junction 50 of the shading lines 10 and the conductive traces 20, and the end of the conductive trace 20 passes through the connecting portion and is connected to the shading lines 10. In the present disclosure, by providing the connecting portion at the junction 50 of the shading lines 10 and the conductive traces 20, the effect of the design on the appearance of burrs on the screen after exposure can be reduced, the risk of static electricity can be reduced, and the probability of the shading lines 40 being damaged by static electricity can also be reduced. Preferably, the shading lines 10 and the conductive traces 20 are made of the same material, and when making the mask plate, the conductive traces 20 can be obtained by a patterning process.

[0055] Among them, the medium potential connection in the present disclosure refers to electrically connecting multiple spaced shading lines with conductive traces to reduce the potential difference between them, so that multiple spaced shading lines have equal potentials. Specifically, each conductive trace 20 connects two adjacent shading lines 10, that is, the two ends of each conductive trace 20 are respectively connected to two adjacent shading lines. Further, the conductive trace 20 is a horizontal line, an oblique line or a folded line. By setting multiple conductive traces 20 to connect multiple shading lines 10, a large line voltage difference between multiple shading lines 10 is avoided, thereby avoiding electrostatic discharge injuries. Preferably, the conductive trace is electrically connected to (such as connected to) the ground terminal.

[0056] It should be noted that in this embodiment, the shading lines 10 are configured to block light. The shading lines 10 are mainly made of metal materials. The gap between two adjacent shading lines 10 is a light-transmitting portion, so that the photoresist is exposed using light passing through the light-transmitting portion in the pattern exposure process.

[0057] Continue reading Figure 3 In a specific embodiment, the mask plate further includes a substrate 40, and a plurality of light shielding lines and conductive traces 20 are disposed on the substrate 40. Preferably, the material of the conductive traces is the same as that of the light shielding lines, such as the material of the light shielding lines is invar (also known as invar steel).

[0058] Continue reading Figure 3 In a specific embodiment, the width e of the conductive trace 20 is smaller than the width f of the light-shielding line 10; further, the width e of the conductive trace 20 is 0.5-1 um; such a design ensures that the mask plate will not form a fine line pattern on the display panel under normal exposure.

[0059] Continue reading Figure 3 In a specific embodiment, the connecting portion includes at least one first notch portion 30a, and the first notch portion 30a is arranged on the side of the shading line 10. It should be noted that in this embodiment, since each conductive trace 20 has at least two intersections 50 with two adjacent shading strips 10, and the two intersections 50 are respectively located on both sides of the shading line 10, the first notch portions 30a are respectively arranged on both sides of the shading line 10, and the two ends of the conductive trace 20 are respectively inserted into the first notch portions 30a and connected with the shading line 10.

[0060] In this embodiment, by setting a first notch portion 30a at the intersection 50 of the shading line 10 and the conductive trace 20, the burrs generated at the intersection 50 of the shading line 10 and the conductive trace 20 are located in the corresponding first notch portion 30a. Therefore, by setting the first notch portion 30a, the outward protrusion of the burrs can be offset to a certain extent.

[0061] See also Figure 4-Figure 5 , Figure 4 for Figure 3 The enlarged schematic diagram of part A in the middle; Figure 5 3 is a schematic diagram of the arc-shaped end surface shape of the first notch portion in the present disclosure; it should be pointed out that in the present embodiment, the specific size and specific shape of the first notch portion 30a are not particularly limited, as long as the tip can be moved back and the burrs can be eliminated. For example, the end surface shape of the first notch portion can be arc-shaped, rectangular, conical or polygonal. As a preferred embodiment, the end surface shape of the first notch portion 30a can be arc-shaped or rectangular (such as Figure 4 shown).

[0062] Continue reading Figure 4 In a specific embodiment, along the length direction (X) of the conductive trace 20, the depth g of the first notch portion 30a is greater than or equal to the width e of the conductive trace 20; along the width direction (Y) of the conductive trace 20, the width h of the first notch portion 30a is greater than the width e of the conductive trace 20; specifically, the width h of the first notch portion is 1-2um, and the depth g of the first notch portion 30a is 0.5-1um. For the first notch portion 30a within this range, in the width direction of the conductive trace 20, two adjacent first notch portions 30a are arranged in parallel, or two adjacent first notch portions 30a are arranged alternately.

[0063] Embodiment 2:

[0064] See also Figure 6-Figure 7 , Figure 6 A schematic diagram of a mask plate provided for implementation 2 of the present disclosure, Figure 7 for Figure 6 The enlarged schematic diagram of part B in the figure; this embodiment improves the structure of the connecting portion on the basis of the first embodiment, and the other parts of the mask plate are similar to those in the first embodiment and have been described in detail in the first embodiment, so they will not be repeated here in this embodiment.

[0065] In this embodiment, the connecting portion includes a second notch portion 30b, the second notch portion 30b is located on the side of the light-shielding line 10, and the second notch portion 30b includes a first groove 31b and a second groove 32b; the first groove 31b is connected to the second groove 32b, and the second groove 32b is arranged on the side of the first groove 31b away from the light-shielding line 10; along the width direction (Y) of the conductive trace 20, the width of the side of the first groove 31b close to the second groove 32b is less than or equal to the width of the side of the second groove 32b close to the first groove 31, and the first groove 31b and the second groove 32b in this embodiment are The end face shapes can be the same, such as the end face shapes of the first groove 31b and the second groove 32b can both be arc-shaped or rectangular, or the end face shapes of the first groove 31b and the second groove 32b can be different, such as the end face shape of the first groove 31b is rectangular and the end face shape of the second groove 32b is arc-shaped, or the end face shape of the first groove 31b is arc-shaped and the end face shape of the second groove 32b is rectangular. In this embodiment, the first groove 31b is accommodated in the second groove 30b, which can further reduce the risk of sharp burrs at the junction of the shading line and the conductive trace, thereby reducing the risk of electrostatic discharge (ESD).

[0066] It should be noted that each conductive trace 20 has at least two intersections 50 with two adjacent shading lines 10, and the two intersections 50 are respectively arranged on both sides of the shading line 10, and a second notch portion 30b is provided on both sides of the shading line 10. The two ends of the conductive trace 20 respectively pass through the second groove 32b and extend into the first groove 31b to connect with the shading line 10.

[0067] In the present embodiment, by setting a second notch portion 30b at the intersection of the shading line 10 and the conductive trace 20, and the second notch portion 30b includes a connected first groove 31b and a second groove 32b, the burrs generated at the intersection of the shading line 10 and the conductive trace 20 are located in the corresponding first groove 31b. Since a second groove 32b is also provided outside the first groove 31b, even if the tip of the burr protrudes from the first groove 31b, it will be located in the corresponding second groove 32b. Therefore, by setting the connected first groove 31b and the second groove 32b, the outward protrusion of the burr can be further offset, thereby further reducing the risk of static electricity.

[0068] See also Figure 7 In a specific embodiment, along the length direction (X) of the conductive trace, the total depth i of the second notch portion 30b is 1-2um, and along the width direction (Y) of the conductive trace, the width k of the first groove 31b is 1-2um; the width j of the second groove 32b is 2-4um. Further, along the width direction (Y) of the conductive trace, two adjacent second notches are arranged alternately. This design makes the connecting portions on each shading line 10 not on the same horizontal line, avoiding the width of the shading line 10 at the intersection from becoming smaller, which affects the reliability of the shading line 10. Further, the conductive trace 20 is a diagonal line or a fold line. Preferably, the conductive trace is a fold line.

[0069] Embodiment 3,

[0070] See also Figure 8-Figure 9 , Figure 8 A schematic diagram of a mask plate provided for implementation three of the present disclosure, Fig. 9 for Figure 8 An enlarged schematic diagram of part C in the figure; the difference between the embodiment and the first and second embodiments lies in the connecting portion. The connecting portion in the present embodiment mainly protrudes outward along the width direction of the shading line 10, while the connecting portions in the first and second embodiments are mainly recessed inward along the width direction of the shading line 10. The connecting portion in the present embodiment is mainly arranged on the conductive trace 20, while the connecting portions in the first and second embodiments are mainly arranged on the shading line 10. The other parts of the mask plate are similar to those in the first embodiment and have been described in detail in the first embodiment, and will not be repeated here in this embodiment.

[0071] In this embodiment, the connecting portion includes at least one extension portion 30c, and the extension portion 30c is located at the end of the conductive trace 20. The extension portion includes a plurality of radial lines 31c. It should be noted that each conductive trace 20 has at least two intersections with two adjacent shading lines 10, and the two intersections are respectively located at the two ends of the conductive trace 20, so the two ends of the conductive trace 20 are provided with extension portions 30c, and the two ends of the conductive trace respectively pass through the extension portions 30c and are connected to the corresponding shading lines 10.

[0072] In this embodiment, an extension portion 30c is provided at the intersection of the shading line 10 and the conductive trace 20. Since the extension portion 30c blocks the intersection of the shading line 10 and the conductive trace 20, to a certain extent, tip discharge will not occur at the intersection of the shading line 10 and the conductive trace 20.

[0073] refer to Fig. 9 In a specific embodiment, a plurality of radial lines 31c diverge from the end of the conductive trace 20 in a direction away from the shading line 10, and after divergence, the plurality of radial lines 31c are in an arc shape; further, the length L of each radial line 31c is the same, and the length L of each radial line 31c is 0.5-1um; and the spacing between the plurality of radial lines 31c is equal, and the width of each radial line 31c is less than or equal to the width e of the conductive trace 20. This design avoids the appearance of radial fine lines on the screen after the mask is normally exposed, thereby affecting the exposure effect of the mask. Furthermore, in this embodiment, along the width direction of the conductive trace, two adjacent extensions are arranged in parallel, or two adjacent extensions are arranged alternately.

[0074] Embodiment 4:

[0075] See also Fig.10 , Fig.10 This is a schematic diagram of a mask plate provided for implementation of the fourth embodiment of the present disclosure. This embodiment improves the connecting portion based on implementation of the third embodiment. The other parts of the mask plate are similar to those of implementation of the first embodiment and have been described in detail in implementation of the first embodiment, so they will not be repeated here in this implementation.

[0076] In this embodiment, the connecting portion includes a third notch portion 30d and an extension portion 30c, the third notch portion 30d is arranged on the side of the shading line 10, and the extension portion 30c is located in the third notch portion 30d; it should be noted that each conductive trace 20 has at least two intersections with two adjacent shading lines 10, and the two intersections are respectively located at the two ends of the conductive trace, so both ends of the conductive trace 20 are provided with a number of radial lines 30c, and at the same time, both sides of the shading line 10 are provided with a third notch portion 30d, and each end of the conductive trace 20 passes through a number of radial lines 30c and extends into the third notch portion 30d to be connected with the corresponding shading line 10.

[0077] In the present embodiment, the extension portion 30c is similar to the structure of the third embodiment and has been described in detail in the third embodiment, which will not be repeated here. In the present embodiment, the extension portion 30c and the third notch portion 30d are provided at the intersection of the shading line 10 and the conductive trace 20. Since a number of radial lines 30c block the intersection of the shading line 10 and the conductive trace 20, to a certain extent, no tip discharge phenomenon will occur at the intersection of the shading line 10 and the conductive trace 20. At the same time, the several radial lines 30c are located in the third notch portion 30d, which further reduces the probability that no tip discharge phenomenon will occur at the intersection of the shading line 10 and the conductive trace 20.

[0078] refer to Fig.11 , Fig.11 for Fig.10 The enlarged schematic diagram of part D in the figure, specifically, the end face shape of the third notch portion 30d in the present embodiment is arc-shaped, rectangular, conical or polygonal. Preferably, the end face shape of the third notch portion 30d is arc-shaped or rectangular. Furthermore, along the length direction (X) of the conductive trace, the depth m of each third notch portion 30d is greater than the length L of the radiation line 30c, and the depth m of the third notch portion 30d is 1-2um. Along the width direction (Y) of the conductive trace, the width of the third notch portion n is 2-4um. This design can better accommodate several radiation lines in the third notch portion, thereby further reducing the risk of static electricity.

[0079] refer to Fig.10 In a specific embodiment, along the width direction (Y) of the conductive trace, two adjacent connecting portions are arranged alternately. The connecting portion of the third notch portion and a plurality of radial lines in this embodiment are designed so that the connecting portions on each shading line 10 are not on the same horizontal line, thereby avoiding the width of the shading line 10 becoming smaller at the intersection, which affects the reliability of the shading line 10. Furthermore, the conductive trace 20 is a diagonal line or a fold line. Preferably, the conductive trace is a fold line.

[0080] The present disclosure also proposes an evaporation device, which cooperates with the mask plate in any of the above embodiments to perform evaporation operations.

[0081] It should be noted that the above describes some embodiments of the present disclosure. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the above embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0082] The embodiments of the present disclosure are intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present disclosure should be included in the scope of protection of the present disclosure.

Claims

1. A mask plate, characterized in that: include: A plurality of shading lines, wherein the plurality of shading lines are arranged at intervals; A plurality of conductive traces, wherein the plurality of conductive traces are connected to the plurality of light-shielding lines so that the plurality of light-shielding lines have the same potential; The connecting portion is located at the intersection of the light-shielding line and the conductive line, and the end of the conductive line passes through the connecting portion and is connected to the light-shielding line.

2. The mask plate according to claim 1, characterized in that: The connecting portion includes at least one first notch portion, and the first notch portion is located on the side of the light-shielding line; Preferably, the end surface of the first notch is in an arc, rectangular, conical or polygonal shape.

3. The mask plate according to claim 2, characterized in that: Along the length direction of the conductive trace, the depth of the first notch is greater than or equal to the width of the conductive trace; Preferably, along the length direction of the conductive trace, the depth of the first notch is 0.5-1 um; Preferably, along the width direction of the conductive trace, the width of the first notch portion is greater than the width of the conductive trace; Preferably, along the length direction of the conductive trace, the width of the first notch is 1-2 um; Preferably, along the width direction of the conductive trace, two adjacent first notch portions are arranged in parallel, or two adjacent first notch portions are arranged alternately.

4. The mask plate according to claim 2, characterized in that: The connecting portion includes a second notch portion, and the second notch portion is located on the side of the light-shielding line. The second notch portion includes a first groove and a second groove; the first groove is connected to the second groove, and the second groove is arranged on a side of the first groove away from the light shielding line; Preferably, along the width direction of the conductive trace, the width of a side of the first groove close to the second groove is less than or equal to the width of a side of the second groove close to the first groove; Preferably, along the width direction of the conductive trace, two adjacent second notches are arranged alternately.

5. The mask plate according to claim 4, characterized in that: Along the length direction of the conductive trace, the depth of the second notch is 1-2 um; Preferably, along the width direction of the conductive trace, the width of the first groove is 1-2 um, and the width of the second groove is 2-4 um.

6. The mask plate according to claim 1, characterized in that: The connecting portion includes at least one extending portion, the extending portion is located at the end of the conductive trace, and the extending portion includes a plurality of radial lines; Preferably, the plurality of radial lines diverge from the end of the conductive trace in a direction away from the light shielding line, and the divergent plurality of radial lines are in an arc shape; Preferably, the length of each of the radiation lines is the same, and the length of each of the radiation lines is 0.5-1 um; Preferably, the spacing between the plurality of said radial lines is equal; Preferably, the width of each of the radiation lines is less than or equal to the width of the conductive trace.

7. The mask plate according to claim 6, characterized in that: Preferably, along the width direction of the conductive trace, two adjacent extension portions are arranged in parallel, or two adjacent extension portions are arranged alternately.

8. The mask plate according to claim 6, characterized in that: The connecting portion includes a third notch portion, the third notch portion is located at the side of the light shielding line, and the first extension portion is located in the third notch portion; Preferably, along the width direction of the conductive trace, two adjacent third notches are arranged alternately; Preferably, along the length direction of the conductive trace, the depth of each of the third notches is greater than the length of the radiation line.

9. The mask plate according to claim 1, characterized in that: The width of the conductive trace is smaller than the width of the light shielding line; Preferably, the width of the conductive trace is 0.5-1 um.

10. The mask plate according to claim 9, characterized in that: The conductive trace is a horizontal line, a diagonal line or a folded line. Preferably, the material of the conductive traces is the same as that of the light-shielding lines. Preferably, the material of the light-shielding lines includes indium tile.

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