Detector focal plane alignment method and device based on microscope
The focal plane alignment of the detector assembly through a microscope solves the problem of limited imaging width caused by the large scale of the detector pixels, and enables low-cost wide-format imaging.
Patent Information
- Application Number
- CN202411385592.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-30
- Publication Date
- 2025-01-24
AI Technical Summary
In the existing infrared remote sensing technology, the large cell size of the detector leads to limited ground imaging width, and the cost of using splicing detectors is high.
Using a microscope-based detector focal plane alignment method, multiple detectors are installed in combination, and the microscope is used to adjust the stage position so that the edge features of the detector are clearly imaged, and the stage height values are recorded, and based on these values Correct the detector to the confocal plane position.
It achieves precise alignment of the focal plane of the spliced detector, reduces the cost of using the detector, expands the imaging width, and ensures the performance of the optical system.
Smart Images
Figure CN119364153A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of infrared remote sensing technology, and in particular to a detector focal plane alignment method based on a microscope and a detector focal plane alignment device based on a microscope. Background Art
[0002] The satellite achieves imaging through push-scanning. The satellite's flight direction is the along-track direction, and the direction perpendicular to the flight direction is the through-track direction. The length of the ground strip in the through-track direction is the ground swath width, referred to as swath width (i.e., satellite scanning coverage width). The ground strip is imaged on the detector through the infrared camera payload. Through push-scanning in the along-track direction, two-dimensional ground area coverage is achieved.
[0003] The width is limited by the size of the detector's pixels. The larger the size, the larger the width. In order to expand the width, on the one hand, a single large-scale pixel array detector can be used, and on the other hand, a well-jointed detector array provided by the detector manufacturer can be used. Both methods can achieve a large width. However, these two methods are relatively expensive. Summary of the invention
[0004] In order to solve one of the above technical problems, the present invention proposes the following technical solution.
[0005] The first aspect of the present invention provides a microscope-based detector focal plane alignment method, which is applied to an alignment system. The alignment system includes a light source and a microscope. The method includes the following steps: Assembling and installing a plurality of detectors to obtain a detector assembly, and fixing the detector assembly horizontally on the microscope stage so that the light source illuminates the detector assembly; The position of the stage is adjusted in sequence so that the edge features of each detector are imaged on the image plane of the microscope respectively, and the height value of the stage is recorded when the clarity of the image meets the requirement; Each of the detectors is corrected to a confocal plane position based on the height value of the stage to obtain a corrected detector assembly.
[0006] In addition, the microscope-based detector focal plane alignment method according to the above embodiment of the present invention may also have the following additional technical features.
[0007] According to one embodiment of the present invention, the microscope-based detector focal plane alignment method further includes: fixing the modified detector assembly horizontally on the microscope stage; and adjusting the modified detector assembly via the stage.
[0008] According to one embodiment of the present invention, the position of the stage is adjusted, including: adjusting the horizontal position of the stage so that the corresponding detector is in the field of view of the microscope objective; adjusting the axial position of the stage until the clarity of the imaging image of the edge features of the corresponding detector meets the requirements.
[0009] According to one embodiment of the present invention, the corrected detector assembly is adjusted by the stage, including: adjusting the position of the stage until the clarity of the imaging image of the edge feature of the first detector in the corrected detector assembly meets the requirements, and fixing the height of the stage; adjusting the horizontal position of the stage so that the next detector is in the field of view of the microscope objective, and judging whether the clarity of the imaging image of the edge feature of the next detector meets the requirements; if the clarity of the imaging image meets the requirements, the adjustment is completed; if the clarity of the imaging image does not meet the requirements, adjusting the axial position of the stage until the clarity of the imaging image of the edge feature of the corresponding detector meets the requirements, recording the height value of the stage, and returning to the step of correcting each of the detectors to the confocal plane position based on the height value of the stage.
[0010] According to one embodiment of the present invention, each of the detectors is corrected to a confocal plane position based on the height value of the stage, including: separating each detector from a corresponding fixed base plate; grinding the fixed base plate of each detector based on the height value of the stage; and reassembling and installing each detector after grinding to obtain a corrected detector assembly.
[0011] According to one embodiment of the present invention, the fixed base plate of each of the detectors is ground based on the height value of the stage, including: selecting a minimum height value from all the height values of the stage as a reference value, and selecting all the height values of the stage except the minimum height value as values to be corrected; respectively calculating the difference between each of the values to be corrected and the reference value to obtain a difference corresponding to each value to be corrected, wherein each of the values to be corrected and its corresponding difference has a corresponding detector; obtaining a defocus amount of the focal plane of the corresponding detector according to the difference between each of the values to be corrected, and grinding the fixed base plate of the detector according to the defocus amount so that the defocus amount is zero.
[0012] According to an embodiment of the present invention, the fixed base plate of the detector is ground by means of a three-coordinate measuring machine.
[0013] The second aspect of the present invention provides a detector focal plane alignment device based on a microscope, which is applied to an alignment system. The alignment system includes a light source and a microscope. The device includes: An installation module is used to assemble a plurality of detectors to obtain a detector assembly, and to fix the detector assembly horizontally on the microscope stage so that the light source illuminates the detector assembly; A first adjustment module is used to adjust the position of the stage in sequence so that the edge features of each detector are imaged on the microscope image plane respectively, and record the height value of the stage when the clarity of the imaged image meets the requirement; The correction module is used to correct each of the detectors to a confocal plane position based on the height value of the stage to obtain a corrected detector assembly.
[0014] According to one embodiment of the present invention, the microscope-based detector focal plane alignment device further includes: a fixing module for horizontally fixing the modified detector assembly on the microscope stage; and a second adjustment module for adjusting the modified detector assembly through the stage.
[0015] According to one embodiment of the present invention, when adjusting the position of the stage, the first adjustment module is specifically used to: adjust the horizontal position of the stage so that the corresponding detector is in the field of view of the microscope objective; adjust the axial position of the stage until the clarity of the imaging image of the edge features of the corresponding detector meets the requirements.
[0016] The technical solution of the embodiment of the present invention adopts a light source, a slit, a collimator and an infrared camera lens to image the slit on the focal plane of the detector, and makes corresponding adjustments to correct the position of the detector. This can achieve precise alignment of the focal plane of the spliced detector and is simple to operate. It can reduce the cost of using the spliced detector while achieving wide-width imaging. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 Schematic diagram of the structure of an alignment system according to an embodiment of the present invention.
[0018] Figure 2 The figure is a schematic structural diagram of a detector assembly according to an embodiment of the present invention.
[0019] Figure 3 The flowchart is a method for aligning a detector focal plane based on a microscope according to an embodiment of the present invention.
[0020] Figure 4 It is a structural block diagram of a detector focal plane alignment device based on a microscope according to an embodiment of the present invention. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0022] In order to reduce costs and realize wide-band detection, the present invention proposes a microscope-based detector focal plane alignment method for an alignment system, and performs detector focal plane alignment on a preliminarily assembled detector assembly. Low-cost small-scale detectors are used for splicing and focal plane alignment to realize wide-band imaging.
[0023] The method is applied to the alignment system, Figure 1 Schematic diagram of the structure of an alignment system according to an embodiment of the present invention.
[0024] like Figure 1 As shown, the alignment system includes a light source 1 and a microscope 2. The microscope 2 includes a microscope objective 21 and a microscope stage 22. The microscope stage 22 is located below the objective 21. The microscope 2 is used to image an object (a detector in the embodiment of the present invention) on the microscope stage 22 onto an image plane of the microscope 2 under the action of the light source 1.
[0025] The detector is a linear detector, and multiple detectors are assembled and installed on a base to obtain a detector assembly 3, wherein each detector corresponds to a fixed base plate and is located on the corresponding fixed base plate, for example, Figure 2 As shown, eight detectors (31-38) can be assembled and installed on a base 39 to obtain a detector assembly 3. That is, the detector assembly 3 is a detector assembly that has only been preliminarily assembled and installed, and has not been corrected or aligned.
[0026] The focal plane alignment of the detector assembly (also called stitched detector) has an important impact on the imaging performance of the optical system. The focal plane deviation between the detectors will cause the imaging system to be unable to image clearly in the entire field of view, which will in turn affect the transfer function of the optical system and reduce the contrast and resolution of the imaging. In order to ensure the performance of the optical system, the focal plane alignment needs to be strictly controlled.
[0027] In order to align the focal planes of each detector using an alignment system, the present invention proposes a detector focal plane alignment method based on a microscope. The scheme is easy to operate and can achieve the alignment of the detector focal planes.
[0028] Figure 3 The flowchart is a method for aligning a detector focal plane based on a microscope according to an embodiment of the present invention.
[0029] like Figure 3 As shown, the microscope-based detector focal plane alignment method includes the following steps S1 to S3 (alignment steps).
[0030] S1, assembling and installing a plurality of detectors to obtain a detector assembly, and fixing the detector assembly horizontally on a microscope stage so that a light source illuminates the detector assembly.
[0031] Specifically, refer to Figure 2 , the eight detectors (31-38) can be assembled and installed on a base to obtain a detector assembly 3 (also called a spliced detector). Then, refer to Figure 1 , the detector assembly 3 is fixed horizontally on the microscope stage 22, the light source 1 is incident on the detector assembly 3, and is reflected to the microscope objective 21, forming an image on the image plane of the microscope 2 (the relative positions of the light source 1 and the microscope 2 only need to meet this condition).
[0032] S2, sequentially adjusting the position of the stage so that the edge features of each detector are imaged on the microscope image plane, until the clarity of the image meets the requirements, and recording the height value of the stage.
[0033] The definition of the image meets the requirement, which means that the image is clear. The definition at this time meets the requirement, and the requirement can be set manually according to specific needs. When imaging, the definition can be obtained by detecting the definition of the image, and it can be judged whether the definition meets the requirement. It can also be done without setting, and a microscope with an autofocus function is used. When the microscope automatically focuses during imaging, the image is clear and meets the requirement.
[0034] Specifically, by adjusting the position of the stage 22, the edge features of each detector are imaged on the microscope image plane in sequence to obtain an image. In each imaging, the position of the stage 22 is adjusted so that when the image of the edge features of the detector meets the requirements, the height value of the stage 22 at this time is recorded. The specific steps may be: S11: adjusting the position of the stage until the image clarity of the edge feature of the first detector 31 (on the microscope image plane) meets the requirement, and recording the height value of the stage at this time; S12: Adjust the position of the stage until the image clarity of the edge feature of the next detector focal plane (on the microscope image plane) meets the requirements, and record the height value of the stage at this time; return to step S12 until the height value of the stage at the last imaging is obtained.
[0035] After completing the imaging of the eight detectors in sequence according to the above steps, the height value of the stage corresponding to each imaging can be obtained, that is, the eight height values of the stage corresponding to the eight detectors one by one.
[0036] S3, correcting each detector to the confocal plane position based on the height value of the stage to obtain a corrected detector assembly.
[0037] Specifically, after obtaining the stage height value corresponding to the detector at each imaging, the difference between these values is the position difference of the focal planes of different detectors. The position of the corresponding detector on the assembly can be corrected according to the difference, that is, each detector is accurately arranged on the basis of the preliminary arrangement to obtain the corrected spliced detector, thereby realizing the alignment of the detector focal planes of the detector assembly.
[0038] By adopting the above scheme, the embodiment of the present invention does not need to use the aligned spliced detectors provided by the manufacturer, but rather preliminarily combines multiple low-cost small-scale detectors on the user side to obtain a detector assembly, and further performs focal plane alignment on the detector assembly through the above steps S1 to S3, thereby achieving precise arrangement of each detector, thereby ensuring the performance of the optical system. Compared with the use of the finished product provided by the manufacturer, the embodiment of the present invention combines and aligns the spliced detectors, which not only reduces the purchase cost, but also can achieve wide-width imaging, while ensuring the imaging effect. At the same time, the equipment is simple, and only a microscope is needed to achieve precise alignment of the focal plane of the spliced detector; the operation is simple, and it is only necessary to adjust the image plane imaging to a clear position, record the height value of the stage at the same time, and correct the detector position according to the height value.
[0039] Therefore, the microscope-based detector focal plane alignment method of the embodiment of the present invention can achieve detector focal plane alignment by correcting the detector, thereby achieving wide-area imaging while reducing the use cost.
[0040] In one embodiment, the adjustment of the position of the stage in the above step S2 may include: adjusting the horizontal position of the stage so that the corresponding detector is in the field of view of the microscope objective; adjusting the axial position of the stage until the clarity of the imaging image of the edge features of the corresponding detector meets the requirements.
[0041] Specifically, at each imaging, the horizontal position of the stage 22 is first adjusted to place the corresponding detector in the field of view of the microscope objective lens. Then the axial position of the stage 22 is adjusted until the edge feature of the corresponding detector meets the imaging requirements on the image plane of the microscope, i.e., the image is clear, and the height value of the stage 22 at this time is recorded. For example, when observing a corner of the detector, when the gold wire of the detector can be distinguished, it is used as a criterion for clear imaging.
[0042] After the imaging of the edge feature of the previous detector is completed, the stage 22 is adjusted horizontally so that the focal plane of the next detector appears in the field of view of the microscope. At this time, the edge feature of the next detector may not be clearly imaged on the image plane of the microscope. The stage height is adjusted axially so that the edge feature of the focal plane of the next detector is clearly imaged, and the height value of the stage 22 is recorded at this time. In this way, the height value of the stage 22 when the edge feature of each detector is clearly imaged on the image plane of the microscope can be obtained.
[0043] The difference between the height values of each stage can be equivalent to the position difference (specifically, height difference) between the focal planes of the corresponding detectors. Therefore, the position of the corresponding detector can be corrected according to the stage height value so that each detector meets the confocal plane requirements.
[0044] Therefore, by adjusting the horizontal and axial positions of the stage, each detector focal plane is imaged clearly on the microscope image plane in turn, and the height value of the stage when the image is clear is recorded. The detector position is corrected according to these height values to achieve the alignment of the detector focal planes.
[0045] In one embodiment, in the above step S3, correcting each detector to the confocal plane position based on the height value of the stage may include: Separate each detector from the corresponding fixed bottom plate; grind the fixed bottom plate of each detector based on the height value of the stage; and reassemble and install each detector after grinding to obtain a corrected detector assembly.
[0046] Furthermore, grinding the fixed base plate of each detector based on the height value of the stage may include: selecting the minimum height value from all the height values of the stage as a reference value, and using the height values of all the height values of the stage except the minimum height value as values to be corrected; respectively calculating the difference between each value to be corrected and the reference value to obtain the difference corresponding to each value to be corrected, wherein each value to be corrected and its difference has a corresponding detector; obtaining the defocus amount of the focal plane of the corresponding detector according to the difference between each value to be corrected, and grinding the fixed base plate of the detector according to the defocus amount so that the defocus amount is zero.
[0047] Among them, the fixed base plate of the detector is ground by means of a three-coordinate measuring machine.
[0048] Specifically, the minimum height value can be selected from all the stage height values as the reference value (the corresponding detector is called the reference detector), and the other height values are used as the values to be corrected. The difference between each value to be corrected and the reference value is calculated respectively. One correction value corresponds to one detector, so one detector corresponds to one difference, which is the position difference (specifically the height difference) between the focal plane of the detector and the focal plane of the reference detector, that is, the defocus amount. Therefore, the detector is disassembled from the corresponding fixed base plate, and the fixed base plate is ground by a three-coordinate measuring machine until the value to be corrected is consistent with the reference value. The correction is completed and the purpose of coplanarity of the focal planes of each detector is achieved.
[0049] After grinding, the detectors are reassembled and installed on the corresponding fixed base plate according to the number or original position and order to obtain a corrected detector assembly, in which the detector focal plane is at the confocal plane position to achieve alignment of the detector focal plane.
[0050] That is, after disassembling the detector, use the minimum height value as the reference, and use a three-coordinate measuring machine to grind the detector fixing base plate corresponding to each value to be corrected, so that the defocus amount of the focal plane of the detector relative to the focal plane of the reference detector is zero. Then install the detector to obtain an aligned detector assembly.
[0051] Therefore, the detector focal plane alignment can be achieved by grinding the detector fixing base plate according to the height value of the stage, which is simple and reliable to operate.
[0052] It should be noted that after obtaining the corrected detector assembly, in order to further ensure that the focal planes are coplanar, it can be tested and adjusted to see if they are coplanar.
[0053] That is, in one embodiment, the microscope-based detector focal plane alignment method further includes the following detection steps: horizontally fixing the corrected detector assembly on the microscope stage; and adjusting the corrected detector assembly via the stage.
[0054] Specifically, after obtaining the corrected detector assembly, it needs to be further tested. The corrected detector assembly is fixed horizontally on the microscope stage 22, and the imaging clarity of the edge features of all detectors on the microscope image plane is judged in turn to see whether it meets the requirements. If yes, it means that the corrected detector assembly meets the requirements and the test is exited; if not, the position of the stage 22 is adjusted, and the position of the detector is corrected again accordingly, until the imaging clarity of the detector meets the requirements and the test is exited.
[0055] In one example, in the above-mentioned detection step, adjusting the corrected detector assembly through the stage may include: adjusting the position of the stage until the clarity of the imaging image of the edge feature of the first detector in the corrected detector assembly meets the requirements, and fixing the height of the stage; adjusting the horizontal position of the stage so that the next detector is in the field of view of the microscope objective, and judging whether the clarity of the imaging image of the edge feature of the next detector meets the requirements; if the clarity of the imaging image meets the requirements, the adjustment is completed; if the clarity of the imaging image does not meet the requirements, adjusting the axial position of the stage until the clarity of the imaging image of the edge feature of the corresponding detector meets the requirements, recording the height value of the stage, and returning to the step of correcting each detector to the confocal plane position based on the height value of the stage.
[0056] Furthermore, adjusting the position of the stage may include: adjusting the horizontal position of the stage so that the first detector in the corrected detector assembly is in the field of view of the microscope objective; and adjusting the axial position of the stage until the clarity of the imaging image of the edge features of the first detector in the corrected detector assembly meets the requirements.
[0057] Specifically, after obtaining the corrected spliced detector and fixing it horizontally on the stage 22, the stage 22 is adjusted horizontally to allow the first detector 31 to appear in the field of view of the microscope, and the height of the stage 22 is adjusted to allow the edge features of the first detector 31 to be clearly imaged. Then the height of the stage 22 is fixed, even if the stage 22 maintains the current height, and the stage 22 is adjusted horizontally to allow the second detector 32 to the eighth detector 38 to appear in the field of view of the microscope respectively, and to check whether the edge features of the detectors 32-38 are clearly imaged. If the image is clear, the adjustment is completed. If not, the axial position of the stage 22 is adjusted until the clarity of the image of the edge features of the corresponding detector meets the requirements, the height value of the stage is recorded, and the step S3 is returned to grind the fixed bottom plate again.
[0058] Based on the above description, it can be seen that the alignment principle of the embodiment of the present invention is: Reference Figure 1 , place the combined detector focal plane array 31-38 on the stage 22 of the microscope, adjust the stage 22 in the horizontal direction so that the corresponding detector focal plane is within the microscope field of view, and adjust the height of the stage 22 in the axial direction so that the characteristic points (edge position characteristics) of the corresponding detector focal plane are clearly imaged on the microscope, and record the corresponding stage height value at this time. Then switch different detector focal planes to obtain different stage height values. The difference between these values is the position difference of different detector focal planes. According to the difference, each detector is polished to the confocal plane.
[0059] The following is a description of the specific alignment and detection process of the present invention through a specific example: (1) Eight detectors are mounted on the structure to form a detector assembly, and the detector assembly is fixed on the microscope stage 22. The stage 22 is adjusted horizontally so that the detector 31 (linear detector) is within the microscope field of view. The height of the stage 22 is then adjusted so that the edge features of the detector 31 are clearly imaged on the microscope image plane, and the corresponding stage height value is recorded at the same time. (2) After the adjustment of the first linear detector 31 is completed, the stage 22 is adjusted horizontally so that the detector 32 appears in the field of view of the microscope. At this time, the edge features of the detector 32 may not be clearly imaged on the image plane of the microscope. The image plane is clear by axially adjusting the height of the stage 22, and the height value of the stage at this time is recorded; (3) After completing the adjustment of the second linear detector 32, adjust the stage 22 horizontally so that the detector 33 appears in the field of view of the microscope. The edge feature imaging on the detector 33 may not be in the optimal position. By adjusting the height of the stage 22, the edge feature of the linear detector of the detector 3 can be clearly imaged on the image plane of the microscope. Record the height value of the stage when the detector 33 is clearly imaged. (4) Complete the corresponding tests of the focal planes of the eight detectors in sequence according to steps (2) and (3), and obtain the height values of the stage when the image is clear; (5) According to the height values recorded in step (4), the difference is calculated, and the difference corresponds to the defocus amount of each detector focal plane. The corresponding linear detector is ground to the position of the confocal plane, and the detector is reinstalled in the detector assembly according to the corresponding number to obtain a corrected detector assembly; (6) Fix the corrected detector assembly on the stage 22, adjust the stage 22 horizontally, make the detector 31 appear in the microscope field of view, and adjust the height of the stage 22 so that the edge features of the detector 31 are clearly imaged. Then fix the stage height and adjust the stage 22 horizontally so that the detectors 32-38 appear in the microscope field of view respectively, and check whether the feature positions of the detectors 32-38 are clearly imaged. If the image is clear, the adjustment is complete. If not, repeat the above steps and continue the adjustment.
[0060] In summary, the embodiment of the present invention has simple equipment, and only needs a microscope to achieve precise alignment of the focal plane of the spliced detector; the operation is simple, and only needs to adjust the image plane to a clear position, record the axial movement of the stage, and grind the detector accordingly. Using low-cost small-scale detectors for splicing to achieve wide-width imaging not only reduces the cost of use, but also enables wide-width detection.
[0061] Corresponding to the microscope-based detector focal plane alignment method of the above embodiment, the present invention further proposes a microscope-based detector focal plane alignment device.
[0062] The device is used in alignment systems such as Figure 1 As shown, the alignment system includes a light source 1 and a microscope 2. The microscope 2 includes a microscope objective 21 and a microscope stage 22. The microscope stage 22 is located below the objective 21. The microscope 2 is used to image an object (a detector in the embodiment of the present invention) on the microscope stage 22 onto an image plane of the microscope 2 under the action of the light source 1.
[0063] The detector is a linear detector, and multiple detectors are assembled and installed on a base to obtain a detector assembly 3, wherein each detector corresponds to a fixed base plate and is located on the corresponding fixed base plate, for example, Figure 2 As shown, eight detectors (31-38) can be assembled and installed on a base 39 to obtain a detector assembly 3. That is, the detector assembly 3 is a detector assembly that has only been preliminarily assembled and installed, and has not been corrected or aligned.
[0064] Figure 4 It is a structural block diagram of a detector focal plane alignment device based on a microscope according to an embodiment of the present invention.
[0065] like Figure 4 As shown, the microscope-based detector focal plane alignment device includes a mounting module 10 , a first adjustment module 20 and a correction module 30 .
[0066] Among them, the installation module 10 is used to combine and install multiple detectors to obtain a detector assembly, and horizontally fix the detector assembly on the microscope stage so that the light source illuminates the detector assembly; the first adjustment module 20 is used to adjust the position of the stage in turn so that the edge features of each detector are imaged on the microscope image plane respectively, until the clarity of the image meets the requirements, and the height value of the stage is recorded; the correction module 30 is used to correct each of the detectors to the confocal plane position based on the height value of the stage to obtain a corrected detector assembly.
[0067] In one embodiment of the present invention, the microscope-based detector focal plane alignment device further includes a fixing module and a second adjustment module.
[0068] A fixing module is used to fix the modified detector assembly horizontally on the microscope stage; and a second adjustment module is used to adjust the modified detector assembly through the stage.
[0069] In one embodiment of the present invention, when adjusting the position of the stage, the first adjustment module 20 is specifically used to: adjust the horizontal position of the stage so that the corresponding detector is in the field of view of the microscope objective; adjust the axial position of the stage until the clarity of the imaging image of the edge features of the corresponding detector meets the requirements.
[0070] In one embodiment of the present invention, the second adjustment module is specifically used to: The position of the stage is adjusted until the clarity of the imaging image of the edge feature of the first detector in the corrected detector assembly meets the requirements, and the height of the stage is fixed; the horizontal position of the stage is adjusted so that the next detector is in the field of view of the microscope objective, and it is determined whether the clarity of the imaging image of the edge feature of the next detector meets the requirements; if the clarity of the imaging image meets the requirements, the adjustment is completed; if the clarity of the imaging image does not meet the requirements, the axial position of the stage is adjusted until the clarity of the imaging image of the edge feature of the corresponding detector meets the requirements, the height value of the stage is recorded, and the step of correcting each of the detectors to the confocal plane position based on the height value of the stage is returned.
[0071] In one embodiment of the present invention, the correction module 30 is specifically used to: separate each detector from the corresponding fixed base plate; grind the fixed base plate of each detector based on the height value of the stage; and reassemble and install each detector after grinding to obtain a corrected detector assembly.
[0072] The correction module 30, when grinding the fixed base plate of each of the detectors based on the height value of the stage, is specifically used to: select a minimum height value from all the height values of the stage as a reference value, and use all the height values of the stage except the minimum height value as values to be corrected; respectively calculate the difference between each of the values to be corrected and the reference value to obtain a difference corresponding to each value to be corrected, wherein each of the values to be corrected and its corresponding difference has a corresponding detector; obtain the defocus amount of the focal plane of the corresponding detector according to the difference between each of the values to be corrected, and grind the fixed base plate of the detector according to the defocus amount so that the defocus amount is zero.
[0073] It should be noted that the specific implementation of the microscope-based detector focal plane alignment device can refer to the specific implementation of the microscope-based detector focal plane alignment method mentioned above, and to avoid redundancy, it will not be described in detail here.
[0074] The microscope-based detector focal plane alignment device of the embodiment of the present invention can achieve detector focal plane alignment by correcting the detector, thereby achieving wide-area imaging while reducing the use cost.
[0075] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be construed as limitations on the present invention, and those of ordinary skill in the art can change, modify, replace and modify the above embodiments within the scope of the present invention.
Claims
1. A detector focal plane alignment method based on a microscope, characterized in that: Applied to an alignment system, the alignment system comprises a light source and a microscope, and the method comprises the following steps: Assembling and installing a plurality of detectors to obtain a detector assembly, and fixing the detector assembly horizontally on the microscope stage so that the light source illuminates the detector assembly; The position of the stage is adjusted in sequence so that the edge features of each detector are imaged on the image plane of the microscope respectively, and the height value of the stage is recorded when the clarity of the image meets the requirement; Each of the detectors is corrected to a confocal plane position based on the height value of the stage to obtain a corrected detector assembly.
2. The microscope-based detector focal plane alignment method according to claim 1, characterized in that: Also includes: Fixing the modified detector assembly horizontally on the microscope stage; The corrected detector assembly is adjusted via the stage.
3. The microscope-based detector focal plane alignment method according to claim 1, characterized in that: The position of the stage is adjusted, including: Adjusting the horizontal position of the stage so that the corresponding detector is in the field of view of the microscope objective lens; The axial position of the stage is adjusted until the clarity of the imaging image of the edge feature of the corresponding detector meets the requirement.
4. The microscope-based detector focal plane alignment method according to claim 2, characterized in that: The modified detector assembly is adjusted by the stage, including: The position of the stage is adjusted until the clarity of the image of the edge feature of the first detector in the corrected detector assembly meets the requirement, and the height of the stage is fixed; Adjusting the horizontal position of the stage so that the next detector is in the field of view of the microscope objective lens, and determining whether the clarity of the image of the edge feature of the next detector meets the requirements; If the definition of the image meets the requirement, the adjustment is completed; If the clarity of the imaging image does not meet the requirements, the axial position of the stage is adjusted until the clarity of the imaging image of the corresponding detector edge feature meets the requirements, the height value of the stage is recorded, and the step of correcting each detector to the confocal plane position based on the height value of the stage is returned.
5. The microscope-based detector focal plane alignment method according to any one of claims 1 to 4, characterized in that: Correcting each of the detectors to a confocal plane position based on the height value of the stage includes: Separate each detector from the corresponding fixed base plate; Grinding the fixed bottom plate of each detector based on the height value of the stage; After grinding, the detectors are reassembled and installed to obtain a corrected detector assembly.
6. The microscope-based detector focal plane alignment method according to claim 5, characterized in that: Grinding the fixed bottom plate of each detector based on the height value of the stage includes: Selecting a minimum height value from all the height values of the loading platform as a reference value, and selecting all the height values of the loading platform except the minimum height value as the values to be corrected; Calculating the difference between each of the values to be corrected and the reference value respectively to obtain the difference corresponding to each value to be corrected, wherein each of the values to be corrected and its corresponding difference has a corresponding detector; The defocus amount of the focal plane of the corresponding detector is obtained according to the difference between the values to be corrected, and the fixed bottom plate of the detector is ground according to the defocus amount to make the defocus amount zero.
7. The microscope-based detector focal plane alignment method according to claim 6, characterized in that: The fixed bottom plate of the detector is ground by means of a three-coordinate measuring machine.
8. A detector focal plane alignment device based on a microscope, characterized in that: Applied to an alignment system, the alignment system includes a light source and a microscope, and the device includes: An installation module is used to assemble a plurality of detectors to obtain a detector assembly, and to fix the detector assembly horizontally on the microscope stage so that the light source illuminates the detector assembly; A first adjustment module is used to adjust the position of the stage in sequence so that the edge features of each detector are imaged on the microscope image plane respectively, and record the height value of the stage when the clarity of the imaged image meets the requirement; The correction module is used to correct each of the detectors to a confocal plane position based on the height value of the stage to obtain a corrected detector assembly.
9. The microscope-based detector focal plane alignment device according to claim 8, characterized in that: Also includes: A fixing module, used for fixing the modified detector assembly horizontally on the microscope stage; The second adjustment module is used to adjust the corrected detector assembly through the stage.
10. The microscope-based detector focal plane alignment device according to claim 8, characterized in that: The first adjustment module, when adjusting the position of the stage, is specifically used to: Adjusting the horizontal position of the stage so that the corresponding detector is in the field of view of the microscope objective lens; The axial position of the stage is adjusted until the clarity of the imaging image of the edge feature of the corresponding detector meets the requirement.