Vacuum coating machine heat energy exchange system and exchange method thereof

Abstract

The invention discloses a vacuum coating machine heat energy exchange system and an exchange method, and relates to the field of vacuum coating, the system comprises a vacuum coating machine body, a reaction box body is installed on the vacuum coating machine body, a reaction cover is hinged to the top of the reaction box body, and an air inlet pipeline is connected to the top of the reaction cover; a gas guide pipeline inserted into the reaction cover is arranged on one side of the gas inlet pipeline, the end, away from the reaction cover, of the gas guide pipeline is connected with a heat collection pipeline and a gas recovery pipeline, the end, away from the gas guide pipeline, of the heat collection pipeline is connected with a first heat utilization piece and a second heat utilization piece, and the first heat utilization piece is used for drying a workpiece to be coated. By arranging the two heat utilization pieces, heat is fully divided and utilized and is used for auxiliary heating or sample surface drying, then electric energy loss in the reaction process is effectively reduced, and energy conservation and environmental protection are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a heat energy exchange system of a vacuum coating machine and an exchange method thereof. Background Art

[0002] Coating refers to the formation of a material layer ranging from several nanometers to several microns on a substrate. The material can be a metal material, a semiconductor material, or a compound material such as oxides and fluorides. The coating process can be simply divided into chemical process and physical process.

[0003] Usually, a liquid or gaseous precursor material undergoes a chemical reaction on the solid surface to deposit a layer of solid material. The following common coating processes are all chemical processes: Electroplating: The process of plating a thin layer of other metals or alloys on certain metal surfaces using the principle of electrolysis. It is a process that uses electrolysis to attach a layer of metal film to the surface of metal or other material parts. Chemical solution deposition (CSD): It is a chemical reduction process that uses a suitable reducing agent to reduce the metal ions in the plating solution and deposit them on the surface of the substrate. Unlike electrochemical deposition, chemical deposition does not require a rectifier power supply and an anode. Sol-Gel technology is a chemical solution deposition method.

[0004] Spin-coating: dripping various types of glue on a high-speed rotating substrate, using centrifugal force to evenly coat the glue dripped on the substrate. The thickness varies depending on the viscosity coefficient between the glue and the substrate, and is also related to the rotation speed and time. Usually, heat treatment after glue coating is also required to crystallize the colloidal coating. It is more effective for thin film coating of polymers and is widely used in photosensitive mask coating of semiconductors.

[0005] Chemical vapor deposition (CVD) is a process technology that deposits a solid thin film on the surface of a substrate by introducing one or more compounds or simple gases containing thin film elements into a reaction chamber where a substrate is placed, using a spatial gas phase chemical reaction.

[0006] Among them, a vacuum coating machine is often required for chemical vapor deposition coating. During the reaction, the interior of the reaction chamber needs to be heated and a single gas needs to be introduced at the same time. Therefore, after the reaction is completed, the internal gas contains a large amount of heat energy. In the prior art, after the reaction is completed, the gas is extracted and the temperature drops, and then the reaction cover is opened to take out the sample. However, the heat energy in the process cannot be collected and utilized, thus resulting in energy waste. Summary of the invention

[0007] The purpose of the present invention is to solve the problem of heat energy waste after the reaction of the vacuum coating machine. By setting two heat utilization parts, the heat can be fully diverted and utilized for auxiliary heating or sample surface drying, thereby effectively reducing the power loss during the reaction and saving energy and protecting the environment.

[0008] To achieve the above object, the present invention provides the following technical solutions: A heat exchange system for a vacuum coating machine, the system includes a vacuum coating machine body, a reaction box body is installed on the vacuum coating machine body, the top of the reaction box body is hingedly connected to a reaction cover, the top of the reaction cover is connected to an air intake pipe, an air guide pipe inserted into the reaction cover is provided on one side of the air intake pipe, the end of the air guide pipe away from the reaction cover is connected to a heat collection pipe and a gas recovery pipe, the end of the heat collection pipe away from the air guide pipe is connected to a first heat utilization component and a second heat utilization component, the first heat utilization component is used for drying the workpiece to be coated, and the second heat utilization component is used for heating the side of the reaction box body, and the gas recovery pipe is connected to the side of the air intake pipe away from the air guide pipe.

[0009] As a preferred solution of the present invention, a first solenoid valve is fixed outside the air guide duct.

[0010] As a preferred solution of the present invention, a connector is fixed to the end of the gas guide pipe away from the reaction cover, the gas recovery pipe is threadedly connected to the connector, a one-way membrane is embedded inside the gas recovery pipe, and a second solenoid valve is fixed outside the gas recovery pipe.

[0011] As a preferred solution of the present invention, the outside of the heat collection pipe is covered with a thermal insulation cotton tube.

[0012] As a preferred solution of the present invention, the first heat utilization component includes a first metal heat-conducting tube fixed at both ends of the heat collection tube, a metal plate is installed at the end of the first metal heat-conducting tube away from the heat collection tube, a sample placement box is clamped on the top of the metal plate, a clamping groove that fits the first metal heat-conducting tube is provided at the bottom of the metal plate, and the outside of the first metal heat-conducting tube is covered with a thermal insulation cotton tube.

[0013] As a preferred solution of the present invention, the sample placement box is rotatably connected to a rotating shaft inside, one end of the rotating shaft is connected to a motor, the motor screws are installed on the side of the sample placement box, a number of connecting rods are fixed to the outside of the rotating shaft, a number of sample carriers are hingedly connected to the side of the connecting rods, a cover plate is hingedly connected to the top of the sample placement box, and a sealing tape is bonded to the cover plate facing the end of the sample placement box.

[0014] As a preferred solution of the present invention, the second heat utilization component includes a second metal heat conducting tube fixed at the bottom of the heat collection pipe, a metal heat collecting net is fixed to the end of the second metal heat conducting tube away from the heat collection pipe, the outside of the metal heat collecting net is covered with a heat insulation cover, the bottom of the heat insulation cover is fixed to the top of the vacuum coating machine body, and the heat insulation cover is arc-shaped and surrounds the outside of the reaction cover.

[0015] As a preferred solution of the present invention, the heat insulation cover is provided with a through groove toward the reaction cover side, a cotton baffle sliding inside the heat insulation cover is provided inside the through groove, the cotton baffle slides out along one end of the heat insulation cover, a push rod is fixed on the top of the cotton baffle, a slide groove for the push rod to move is provided on the top of the heat insulation cover, a sealing rubber plate is embedded in the slide groove, and a gap is provided in the middle of the sealing rubber plate for the push rod to move.

[0016] The present invention also provides a heat exchange method for a vacuum coating machine, which uses the heat exchange system for the vacuum coating machine and includes the following steps: ①. Install an air guide pipe on the top of the reaction hood. The air guide pipe controls the passage of internal gas through the first solenoid valve. After the reaction is completed, open the first solenoid valve to guide the internal gas containing heat out along the air guide pipe; ② After the gas containing heat enters the heat collection pipe, the second solenoid valve is opened, and the gas re-enters the air intake pipe along the gas recovery pipe; the heat is absorbed by the heat collection pipe; ③. Divert the heat; ④. A part of the heat enters the metal plate along the first metal heat conducting pipe, thereby increasing the energy inside the metal plate and heating and drying the sample inside the sample placement box; ⑤. Another part of the heat enters the metal heat collecting net inside the heat insulation cover along the second metal heat conduction pipe. When not in use, the cotton baffle on the side of the heat insulation cover is inside the through groove. When in use, push the cotton baffle open, and the heat is radiated to the side of the reaction cover to provide auxiliary heating for the reaction cover.

[0017] In summary, the beneficial technical effects of the present invention are: 1. The present invention can recycle and reuse excess elemental gas, and the compound stays inside the gas duct, which can be disassembled and cleaned later; 2. Directly utilize the residual high-temperature gas after vacuum coating to collect heat, and the collected heat is directly used for sample drying. At the same time, during drying, in order to increase the number of samples placed, a sample placement box is inserted above the metal plate. A rotating shaft driven by a motor is arranged inside the sample placement box. A number of sample carriers are hinged on the connecting rod on the side of the rotating shaft, and then the sample is placed on the sample carrier. The sample can be driven by the motor to rotate continuously, evenly heated, and improve the drying efficiency. At the same time, when the sample carrier follows the rotation, the sample carrier automatically droops under the action of gravity to prevent the sample from falling; 3. Through the second heat utilization component, heat is introduced into the metal heat collecting network inside the heat insulation cover through the second metal heat conduction pipe. When not in use, the cotton baffle on the side of the heat insulation cover is inside the through groove. When in use, the cotton baffle is pushed open, and the heat is radiated to the side of the reaction cover to provide auxiliary heating for the reaction cover, thereby improving heating efficiency and reducing power loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification, but do not constitute a limitation of the present invention. In the accompanying drawings: Figure 1 It is a structural schematic diagram of a heat exchange system of a vacuum coating machine in this embodiment; Figure 2 This embodiment is a vacuum coating machine heat exchange system Figure 1 Schematic diagram of the second perspective; Figure 3 This is a schematic diagram of the structure of a second heat utilization component of a heat energy exchange system of a vacuum coating machine in this embodiment; Figure 4 This embodiment is a vacuum coating machine heat exchange system Figure 2 Enlarged schematic diagram at point A in the middle.

[0019] In the figure, 1. vacuum coating machine body; 2. reaction box body; 3. reaction cover; 4. air inlet duct; 5. air guide duct; 6. heat collection duct; 7. gas recovery duct; 8. first solenoid valve; 9. connector; 10. second solenoid valve; 11. insulation cotton tube; 12. first metal heat pipe; 13. metal plate; 14. sample placement box; 15. card slot; 16. rotating shaft; 17. motor; 18. connecting rod; 19. sample carrier; 20. cover plate; 21. sealing belt; 22. second metal heat pipe; 23. metal heat collection net; 24. heat insulation cover; 25. through groove; 26. cotton baffle; 27. slide groove; 28. push rod. DETAILED DESCRIPTION

[0020] The present invention is further described in detail below in conjunction with the accompanying drawings.

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] See also Figure 1-4The present invention provides a technical solution: a heat exchange system for a vacuum coating machine, the system comprising a vacuum coating machine body 1, a reaction box body 2 is installed on the vacuum coating machine body 1, a reaction cover 3 is hingedly connected to the top of the reaction box body 2, an air intake pipe 4 is connected to the top of the reaction cover 3, an air guide pipe 5 is provided on one side of the air intake pipe 4 and is plugged into the reaction cover 3, a heat collection pipe 6 and a gas recovery pipe 7 are connected to the end of the air guide pipe 5 away from the reaction cover 3, a first heat utilization component and a second heat utilization component are connected to the end of the heat collection pipe 6 away from the air guide pipe 5, the first heat utilization component is used for drying the workpiece to be coated, and the second heat utilization component is used for heating the side of the reaction box body 2, and the gas recovery pipe 7 is connected to the side of the air intake pipe 4 away from the air guide pipe 5.

[0023] A first electromagnetic valve 8 is fixed outside the gas guide pipe 5 . After the vacuum coating is completed, the first electromagnetic valve 8 is opened. After opening, the high-temperature gas inside the reaction cover 3 is discharged along the gas guide pipe 5 .

[0024] Among them, a connector 9 is fixed at the end of the gas guide pipe 5 away from the reaction cover 3, the gas recovery pipe 7 is threadedly connected to the connector 9, a one-way membrane is embedded in the gas recovery pipe 7, and a second solenoid valve 10 is fixed on the outside of the gas recovery pipe 7, so that the gas recovery pipe 7 can be detachably connected and fixed to the side of the gas guide pipe 5 after being threadedly connected to the connector 9. The second solenoid valve 10 controls whether the gas enters the gas recovery pipe 7. At the same time, after the gas enters the gas recovery pipe 7, the one-way membrane is set to prevent the gas from flowing back to the inside of the gas guide pipe 5 when the internal pressure of the gas recovery pipe 7 is high.

[0025] Since the gases used in the vacuum coating machine are all elemental gases, the aperture of the one-way membrane can be designed according to the type of elemental gas to prevent the compounds used for coating from passing through. Further, the excess elemental gas can be recycled and reused. At the same time, the compounds remain inside the gas duct 5, and the gas duct 5 can be disassembled for cleaning later.

[0026] The gas containing heat is continuously discharged from the gas guide pipe 5, and its heat comes into contact with the heat collection pipe 6 and is absorbed and collected by the heat collection pipe 6. At the same time, the outside of the heat collection pipe 6 is covered with a heat preservation cotton tube 11 to reduce the heat loss rate.

[0027] The heat absorbed by the heat collection pipe 6 can be utilized in two ways, one part of which is utilized by the first heat utilization element, and the other part is utilized by the second heat utilization element, specifically: The first heat utilization component includes a first metal heat-conducting tube 12 fixed at both ends of the heat collection pipe 6, a metal plate 13 is installed at the end of the first metal heat-conducting tube 12 away from the heat collection pipe 6, a sample placement box 14 is clamped on the top of the metal plate 13, and a clamping groove 15 is provided at the bottom of the metal plate 13 to fit the first metal heat-conducting tube 12. The outside of the first metal heat-conducting tube 12 is covered with a thermal insulation cotton tube 11. In this embodiment, the metal plate 13 is fixed to the vacuum coating machine body 1 by screws, and the metal plate 13 and the vacuum coating machine body 1 are connected by a wooden material with low thermal conductivity efficiency.

[0028] The sample placement box 14 is rotatably connected with a rotating shaft 16 inside, and one end of the rotating shaft 16 is connected with a motor 17, and the motor 17 is screwed on the side of the sample placement box 14. A plurality of connecting rods 18 are fixed outside the rotating shaft 16, and a plurality of sample carriers 19 are hingedly connected to the side of the connecting rod 18. A cover plate 20 is hingedly connected to the top of the sample placement box 14, and a sealing tape 21 is bonded to the end of the cover plate 20 facing the sample placement box 14. The sample can be placed or taken out by opening and closing the cover plate 20. Because the sample surface will be pickled before vacuum coating, the sample needs to be dried during vacuum coating to ensure the success rate of vacuum coating, thereby In this embodiment, the residual high-temperature gas after the vacuum coating is completed is directly used for heat collection, and the collected heat is directly used for sample drying. At the same time, during drying, in order to increase the number of samples placed, a sample placement box 14 is inserted above the metal plate 13, and a rotating shaft 16 driven by a motor 17 is arranged inside the sample placement box 14. A plurality of sample carriers 19 are hinged on the connecting rod 18 on the side of the rotating shaft 16, and then the sample is placed on the sample carrier 19. The sample can be driven by the motor 17 to rotate continuously, be heated evenly, and improve the drying efficiency. At the same time, when the sample carrier 19 follows the rotation, the sample carrier 19 automatically droops under the action of gravity to prevent the sample from falling.

[0029] Among them, the second heat utilization component includes a second metal heat conducting pipe 22 fixed at the bottom of the heat collection pipe 6, and a metal heat collecting net 23 is fixed at the end of the second metal heat conducting pipe 22 away from the heat collection pipe 6. The outside of the metal heat collecting net 23 is covered with a heat insulation cover 24. The bottom of the heat insulation cover 24 is fixed on the top of the vacuum coating machine body 1, and the heat insulation cover 24 is arc-shaped and surrounds the outside of the reaction cover 3.

[0030] A through groove 25 is provided on the side of the heat insulation cover 24 facing the reaction cover 3, and a cotton baffle 26 is provided inside the through groove 25 for sliding inside the heat insulation cover 24. The cotton baffle 26 slides out along one end of the heat insulation cover 24, and a push rod 28 is fixed on the top of the cotton baffle 26. A slide groove 27 for the push rod 28 to move is provided on the top of the heat insulation cover 24. A sealing rubber plate is embedded in the slide groove 27, and a gap is provided in the middle of the sealing rubber plate for the push rod 28 to move. Heat is stored in the metal heat collecting net 23. When auxiliary heating is needed, the push rod 28 is pushed during auxiliary heating to slide the cotton baffle 26 out along one end of the heat insulation cover 24, so that the metal heat collecting net 23 is exposed to the side of the reaction cover 3. At the same time, when moving, due to the gap in the middle of the sealing rubber plate, the movement of the push rod 28 is not affected, and after the push rod 28 moves, due to the good ductility of the sealing rubber plate, the gap is automatically closed, which can reduce the efficiency of internal heat dissipation (in the attached drawings, the sealing rubber plate is not shown).

[0031] In the present invention, the heat exchange system of the vacuum coating machine provided in this embodiment is used to perform heat exchange. The specific method includes the following steps: ①, an air guide pipe 5 is installed on the top of the reaction cover 3, and the air guide pipe 5 controls the passage of internal gas through the first solenoid valve 8. After the reaction is completed, the first solenoid valve 8 is opened to guide the internal gas containing heat along the air guide pipe 5; ② After the gas containing heat enters the heat collection pipe 6, the second solenoid valve 10 is opened, and the gas re-enters the air intake pipe along the gas recovery pipe 7; the heat is absorbed by the heat collection pipe 6; ③. Divert the heat. The heat is automatically diverted, and the first metal heat-conducting pipe 12 and the second metal heat-conducting pipe 22 conduct heat synchronously; ④. A part of the heat enters the metal plate 13 along the first metal heat conducting pipe 12, thereby increasing the energy inside the metal plate 13 and heating and drying the sample inside the sample placement box 14; ⑤. Another part of the heat enters the metal heat collecting net 23 inside the heat insulation cover 24 along the second metal heat conducting pipe 22. When not in use, the cotton baffle 26 on the side of the heat insulation cover 24 is inside the through groove 25. When in use, the cotton baffle 26 is pushed open, and the heat is radiated to the side of the reaction cover 3 to provide auxiliary heating for the reaction cover 3.

[0032] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0033] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A heat exchange system for a vacuum coating machine, characterized in that: The system comprises a vacuum coating machine body (1), a reaction box body (2) is mounted on the vacuum coating machine body (1), a reaction cover (3) is hingedly connected to the top of the reaction box body (2), an air intake pipe (4) is connected to the top of the reaction cover (3), an air guide pipe (5) inserted into the reaction cover (3) is arranged on one side of the air intake pipe (4), the end of the air guide pipe (5) away from the reaction cover (3) is connected to a heat collection pipe (6) and a gas recovery pipe (7), the end of the heat collection pipe (6) away from the air guide pipe (5) is connected to a first heat utilization component and a second heat utilization component, the first heat utilization component is used for drying a workpiece to be coated, and the second heat utilization component is used for heating the side of the reaction box body (2), and the gas recovery pipe (7) is connected to the side of the air intake pipe (4) away from the air guide pipe (5).

2. A heat exchange system for a vacuum coating machine according to claim 1, characterized in that: A first solenoid valve (8) is fixed outside the air guide pipe (5).

3. The heat exchange system of a vacuum coating machine according to claim 1, characterized in that: A connector (9) is fixed to the end of the gas guide pipe (5) away from the reaction cover (3); the gas recovery pipe (7) is threadedly connected to the connector (9); a one-way membrane is embedded in the gas recovery pipe (7); and a second solenoid valve (10) is fixed to the outside of the gas recovery pipe (7).

4. The heat exchange system of a vacuum coating machine according to claim 1, characterized in that: The exterior of the heat collection pipe (6) is covered with a heat-insulating cotton tube (11).

5. A heat exchange system for a vacuum coating machine according to claim 4, characterized in that: The first heat utilization component comprises a first metal heat-conducting tube (12) fixed at both ends of the heat collection tube (6); a metal plate (13) is installed at the end of the first metal heat-conducting tube (12) away from the heat collection tube (6); a sample placement box (14) is clamped on the top of the metal plate (13); a clamping groove (15) that fits the first metal heat-conducting tube (12) is provided at the bottom of the metal plate (13); and the outside of the first metal heat-conducting tube (12) is covered with a heat-insulating cotton tube (11).

6. A heat exchange system for a vacuum coating machine according to claim 5, characterized in that: The sample placement box (14) is rotatably connected to a rotating shaft (16) at one end of which is connected to a motor (17). The motor (17) is screwed onto a side surface of the sample placement box (14). A plurality of connecting rods (18) are fixed to the outside of the rotating shaft (16). A plurality of sample carriers (19) are hingedly connected to the side surfaces of the connecting rods (18). A cover plate (20) is hingedly connected to the top of the sample placement box (14). A sealing tape (21) is bonded to the end of the cover plate (20) facing the sample placement box (14).

7. The heat exchange system of a vacuum coating machine according to claim 4, characterized in that: The second heat utilization component comprises a second metal heat conducting pipe (22) fixed at the bottom of the heat collecting pipe (6); a metal heat collecting net (23) is fixed at the end of the second metal heat conducting pipe (22) away from the heat collecting pipe (6); the outside of the metal heat collecting net (23) is covered with a heat insulating cover (24); the bottom of the heat insulating cover (24) is fixed to the top of the vacuum coating machine body (1); and the heat insulating cover (24) is in an arc shape and surrounds the outside of the reaction cover (3).

8. The heat exchange system of a vacuum coating machine according to claim 7, characterized in that: The heat insulation cover (24) is provided with a through groove (25) on the side facing the reaction cover (3), and a cotton baffle (26) is provided inside the through groove (25) and slides inside the heat insulation cover (24). The cotton baffle (26) slides out along one end of the heat insulation cover (24), and a push rod (28) is fixed on the top of the cotton baffle (26). The top of the heat insulation cover (24) is provided with a slide groove (27) for the push rod (28) to move, and a sealing rubber plate is embedded inside the slide groove (27), and a gap is provided in the middle of the sealing rubber plate for the push rod (28) to move.

9. A heat exchange method for a vacuum coating machine, using the heat exchange system for a vacuum coating machine according to claim 1, characterized in that: The following steps are involved: ①, installing an air guide pipe (5) on the top of the reaction cover (3), and controlling the passage of internal gas through the air guide pipe (5) via a first electromagnetic valve (8). After the reaction is completed, the first electromagnetic valve (8) is opened to guide the internal gas containing heat out along the air guide pipe (5); ② After the gas containing heat enters the heat collection pipe (6), the second solenoid valve (10) is opened, and the gas re-enters the air intake pipe along the gas recovery pipe (7); the heat is absorbed by the heat collection pipe (6); ③. Divert the heat; ④, a portion of the heat enters the interior of the metal plate (13) along the first metal heat conducting pipe (12), thereby increasing the energy inside the metal plate (13) and heating and drying the sample inside the sample placement box (14); ⑤. Another part of the heat enters the metal heat collecting net (23) inside the heat insulation cover (24) along the second metal heat conducting pipe (22). When not in use, the cotton baffle (26) on the side of the heat insulation cover (24) is located inside the through groove (25). When in use, the cotton baffle (26) is pushed open, and the heat is radiated to the side of the reaction cover (3), thereby providing auxiliary heating to the reaction cover (3).

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