Vacuum coating equipment for kitchen supplies

Abstract

The invention relates to the technical field of vacuum coating equipment, and discloses vacuum coating equipment for kitchen supplies, which comprises a vacuum chamber system and further comprises a pump set pipeline system connected with the vacuum chamber system, the vacuum chamber system comprises a vacuum chamber body, a pick-and-place opening is formed in the side edge of the vacuum chamber body, a sealing door is hinged to the pick-and-place opening, and the sealing door is connected with the vacuum chamber system. A plurality of multi-arc ion sources and magnetron sputtering sources are respectively mounted on the vacuum chamber body, and a workpiece frame for placing workpieces is mounted in the vacuum chamber body. According to the multi-arc ion magnetron sputtering coating equipment, the mode that the multi-arc ion source and the magnetron sputtering source are combined is adopted, and the coating efficiency and the film layer quality are improved. The equipment is simple in structure, convenient to operate and low in maintenance cost, and has a wide application prospect.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to vacuum coating equipment for kitchenware. Background Art

[0002] In modern industry, coating technology is widely used in various fields, such as optics, electronics, and machinery. Vacuum coating equipment plays an important role in the manufacture of kitchenware, especially in improving the appearance and durability of products. During the coating process, adding precious metals such as gold and platinum can improve the flexibility of the coating, making the coating more durable and non-sticky. Coating the surface of tableware can not only improve the glossiness, but also increase the anti-fouling ability and facilitate cleaning. Traditional coating equipment has problems such as low coating efficiency, unstable film quality, and complex equipment structure. Summary of the invention

[0003] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a vacuum coating device for kitchenware.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A vacuum coating device for kitchenware includes a vacuum chamber system and a pump group pipeline system connected to the vacuum chamber system. The vacuum chamber system includes a vacuum chamber body. A take-in and put-out port is provided on the side of the vacuum chamber body. A sealing door is hinged at the take-in and put-out port. A plurality of multi-arc ion sources and magnetron sputtering sources are respectively installed on the vacuum chamber body. A workpiece rack for placing workpieces is installed inside the vacuum chamber body.

[0006] As a further solution of the present invention, the multi-arc ion source includes a wire pack seat and a flange, a wire pack is installed inside the wire pack seat, an arc-starting seat is installed inside the wire pack, an arc-starting rod and an arc-starting seat insulating pad are installed at one end of the arc-starting seat, a spring is installed on the arc-starting rod, a wire pack cover is installed at the end of the wire pack seat, the wire pack seat is installed on the vacuum chamber body through the flange, a flange insulating pad, a flange fixing plate and a flange fixing plate connecting flange are installed between the flange and the vacuum chamber body, a flange fixing plate insulating pad is installed between the flange insulating pad and the flange fixing plate, a water jacket is installed on the flange, a copper seat is installed between the water jacket and the flange, a water jacket insulating pad is installed on the water jacket, and a magnet disk is installed on the water jacket.

[0007] As a further solution of the present invention, the magnetron sputtering source includes a target material and a water pipe assembly, the water pipe assembly is installed on the inner side of the target material, and a magnetic core is installed between the water pipe assembly and the target material, the two end portions of the target material are respectively installed with a clamping nut and a target head, the two end portions of the water pipe assembly are respectively installed with a water pipe sleeve and a gasket, and the target head is installed with an insulating sleeve.

[0008] As a further solution of the present invention, the water pipe assembly includes a water pipe sleeve and a gasket, and the water pipe sleeve and the gasket are respectively installed at both end portions of the water pipe assembly.

[0009] As a further solution of the present invention, the workpiece rack includes an external tooth fixed gear ring, on which a plurality of support columns are evenly installed, the external tooth fixed gear ring is installed to the top of the vacuum chamber body through the plurality of support columns, a rotatable revolving internal tooth ring is installed at the top of the external tooth fixed gear ring, a plurality of rotation shafts are equidistantly installed in the circumferential direction of the revolving internal tooth ring, each of the rotation shafts is installed with a rotation gear that rotates synchronously therewith, and a hanger rod is installed at the bottom end of the rotation shaft.

[0010] As a further solution of the present invention, the workpiece rack further comprises a power seat assembly, a driving gear is mounted on the power seat assembly, and the driving gear is meshed with the revolving internal gear ring.

[0011] As a further solution of the present invention, the pump group pipeline system includes a vacuum pump, a Roots pump, a maintenance pump and a molecular pump, and the vacuum pump, the Roots pump, the maintenance pump and the molecular pump are connected through a pipeline.

[0012] As a further solution of the present invention, the vacuum chamber body and the sealing door are both made of stainless steel, and the vacuum chamber body is provided with an air inlet and an air outlet for introducing and exhausting gas, respectively.

[0013] The beneficial effects of the present invention are:

[0014] The present invention adopts a combination of a multi-arc ion source and a magnetron sputtering source to improve the coating efficiency and film quality; the high-energy ion beam generated by the multi-arc ion source can bombard the surface of the workpiece to improve the bonding force and density of the film; the sputtering particles generated by the magnetron sputtering source can be deposited on the surface of the workpiece to form a uniform film layer; the workpiece holder that can rotate and move ensures the uniformity of the coating;

[0015] The multi-arc ion magnetron sputtering coating equipment of the present invention adopts a combination of a multi-arc ion source and a magnetron sputtering source to improve coating efficiency and film quality. The equipment has a simple structure, convenient operation, low maintenance cost, and broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1This is a left-side structural schematic diagram of a vacuum coating device for kitchenware proposed by the present invention;

[0017] Figure 2 This is a right side structural schematic diagram of a vacuum coating device for kitchenware proposed by the present invention;

[0018] Figure 3 This is a schematic diagram of the overall structure of a multi-arc ion source of a vacuum coating device for kitchenware proposed by the present invention;

[0019] Figure 4 A schematic diagram of the split structure of a multi-arc ion source of a vacuum coating device for kitchenware proposed by the present invention;

[0020] Figure 5 This is a schematic diagram of the overall structure of a magnetron sputtering source of a vacuum coating device for kitchenware proposed by the present invention;

[0021] Figure 6 A schematic diagram of the split structure of a magnetron sputtering source of a vacuum coating device for kitchenware proposed by the present invention;

[0022] Figure 7 A schematic diagram of the workpiece frame structure of a vacuum coating device for kitchenware proposed by the present invention;

[0023] Figure 8 This is a schematic diagram of the structure of an external tooth fixed tooth ring of a vacuum coating device for kitchenware proposed by the present invention.

[0024] In the figure: 1. vacuum chamber system; 101. vacuum chamber body; 102. sealing door; 2. multi-arc ion source; 201. wire package cover; 202. wire package seat; 203. wire package; 204. arc starter seat; 205. spring; 206. arc starter rod; 207. arc starter seat insulation pad; 208. magnet disk; 209. water jacket; 210. copper seat; 211. flange; 212. flange insulation pad; 213. flange fixing plate insulation pad; 214. flange fixing plate; 215. flange fixing plate connecting flange; 216. water jacket insulation pad; 3. magnetron sputtering source; 301, target material; 302, magnetic core; 303, water pipe sleeve; 304, compression nut; 305, water pipe assembly; 306, insulation sleeve; 307, target head; 308, gasket; 4, workpiece rack; 401, support column; 402, external tooth fixed gear ring; 403, revolving internal tooth gear ring; 404, rotating gear; 405, rotating shaft; 406, hanger rod; 407, power seat assembly; 408, driving gear; 5, pump group pipeline system; 501, vacuum pump; 502, Roots pump; 503, maintenance pump; 504, molecular pump; 505, pipeline. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0026] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0027] See attached Figure 1 -Attached Figure 8 A vacuum coating device for kitchenware includes a vacuum chamber system 1 and a pump group pipeline system 5 connected to the vacuum chamber system 1. The vacuum chamber system 1 includes a vacuum chamber body 101. A take-in and put-out port is provided on the side of the vacuum chamber body 101. A sealing door 102 is hinged at the take-in and put-out port. A plurality of multi-arc ion sources 2 and a magnetron sputtering source 3 are respectively installed on the vacuum chamber body 101. A workpiece rack 4 for placing workpieces is installed inside the vacuum chamber body 101.

[0028] In this embodiment, the multi-arc ion source 2 includes a wire package seat 202 and a flange 211. The wire package 203 is installed inside the wire package seat 202, and the arc-starting seat 204 is installed inside the wire package 203. An arc-starting rod 206 and an arc-starting seat insulating pad 207 are installed at one end of the arc-starting seat 204. A spring 205 is installed on the arc-starting rod 206. A wire package cover 201 is installed at the end of the wire package seat 202. The wire package seat 202 is installed on the vacuum chamber body 101 through the flange 211. The flange A flange insulating gasket 212, a flange fixing plate 214 and a flange fixing plate connecting flange 215 are installed between the disk 211 and the vacuum chamber body 101, a flange fixing plate insulating gasket 213 is installed between the flange insulating gasket 212 and the flange fixing plate 214, a water jacket 209 is installed on the flange 211, a copper seat 210 is installed between the water jacket 209 and the flange 211, a water jacket insulating gasket 216 is installed on the water jacket 209, and a magnet disk 208 is installed on the water jacket 209.

[0029] When in use, the multi-arc ion source 2 is composed of multiple arc discharge cathodes, each of which is equipped with an arc-starting electrode and a target. When a high voltage is applied between the arc-starting electrode and the target, an arc discharge is generated, causing the material on the surface of the target to evaporate and ionize, forming a high-energy ion beam.

[0030] In this embodiment, the magnetron sputtering source 3 includes a target material 301 and a water pipe assembly 305. The water pipe assembly 305 is installed on the inner side of the target material 301, and a magnetic core 302 is installed between the water pipe assembly 305 and the target material 301. The two end portions of the target material 301 are respectively installed with a clamping nut 304 and a target head 307. The two end portions of the water pipe assembly 305 are respectively installed with a water pipe sleeve 303 and a gasket 308. The target head 307 is installed with an insulating sleeve 306. The water pipe assembly 305 includes a water pipe sleeve 303 and a gasket 308. The water pipe sleeve 303 and the gasket 308 are respectively installed at the two end portions of the water pipe assembly 305.

[0031] When in use, since the magnetron sputtering source 3 is composed of a magnetic core 302 and a target material 301, when the magnetic field generated by the magnetic core 302 is parallel to the surface of the target material 301, a closed magnetic field region will be formed on the surface of the target material 301. The electrons will perform spiral motion in this region, increasing the probability of collision with the working gas molecules, thereby generating more sputtered particles.

[0032] In this embodiment, the workpiece rack 4 includes an external tooth fixed gear ring 402, on which a plurality of support columns 401 are evenly installed, and the external tooth fixed gear ring 402 is installed on the top of the vacuum chamber body 101 through the plurality of support columns 401, and a rotatable revolving internal gear ring 403 is installed on the top of the external tooth fixed gear ring 402, and a plurality of rotation shafts 405 are equidistantly installed in the circumferential direction of the revolving internal gear ring 403, and each rotation shaft 405 is installed with a rotation gear 404 that rotates synchronously therewith, and the rotation gear 404 is meshed with the external tooth fixed gear ring 402, and a hanger rod 406 is installed at the bottom end of the rotation shaft 405, and the workpiece rack 4 also includes a power seat assembly 407, which is installed on the top of the vacuum chamber body 101, and a driving gear 408 is installed on the power seat assembly 407, and the driving gear 408 is meshed with the revolving internal gear ring 403, and a shielding cover is also installed on the outside of the workpiece rack 4.

[0033] When in use, the driving gear 408 is driven to rotate through the power seat assembly 407, so that the driving gear 408 drives the revolving internal gear ring 403 to rotate, and the revolving internal gear ring 403 drives the rotation shaft 405 to rotate, and the rotation shaft 405 drives the hanger rod 406 to rotate synchronously with the workpiece. At the same time, the rotation gear 404 installed on the rotation shaft 405 will rotate on the outer periphery of the external gear fixed gear ring 402, so that the workpiece can rotate while revolving, so as to ensure the uniformity of the coating.

[0034] In this embodiment, the pump group pipeline system 5 includes a vacuum pump 501, a Roots pump 502, a maintenance pump 503 and a molecular pump 504. The vacuum pump 501, the Roots pump 502, the maintenance pump 503 and the molecular pump 504 are connected by a pipeline 505. The vacuum degree in the vacuum chamber body 101 can be maintained through the pump group pipeline system 5.

[0035] In this embodiment, the vacuum chamber body 101 and the sealing door 102 are both made of stainless steel, so that the vacuum chamber body 101 and the sealing door 102 have good sealing and corrosion resistance, and the vacuum chamber body 101 is respectively provided with an air inlet and an air outlet for introducing and exhausting gas.

[0036] From the above description, it can be seen that the above-mentioned embodiments of the present invention achieve the following technical effects: when in use, first place the workpiece on the hanger rod 406, then evacuate the vacuum chamber body 101 to the required vacuum degree, then introduce an appropriate amount of working gas (preferably argon, nitrogen, etc.), and then turn on the multi-arc ion source 2 and the magnetron sputtering source 3 to make the multi-arc ion source 2 and the magnetron sputtering source 3 generate high-energy ion beams and sputtered particles, the ion beams bombard the surface of the workpiece to improve the bonding strength and density of the film layer; the sputtered particles are deposited on the surface of the workpiece to form a film layer.

[0037] During the coating process, the quality and thickness of the film layer can be controlled by adjusting the parameters of the multi-arc ion source 2 and the magnetron sputtering source 3, such as current, voltage, power, etc. At the same time, the uniformity of the coating can be ensured by adjusting the rotation and movement speed of the workpiece holder 4.

[0038] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A vacuum coating device for kitchenware, comprising a vacuum chamber system (1), characterized in that: The invention also comprises a pump group pipeline system (5) connected to the vacuum chamber system (1), wherein the vacuum chamber system (1) comprises a vacuum chamber body (101), a side of the vacuum chamber body (101) is provided with a take-in and put-out opening, a sealing door (102) is hinged at the take-in and put-out opening, a plurality of multi-arc ion sources (2) and a magnetron sputtering source (3) are respectively installed on the vacuum chamber body (101), and a workpiece rack (4) for placing workpieces is installed inside the vacuum chamber body (101).

2. The vacuum coating equipment for kitchenware according to claim 1, characterized in that: The multi-arc ion source (2) comprises a coil seat (202) and a flange (211); a coil (203) is installed inside the coil seat (202); an arc-starting seat (204) is installed inside the coil seat (203); an arc-starting rod (206) and an arc-starting seat insulating pad (207) are installed at one end of the arc-starting seat (204); a spring (205) is installed on the arc-starting rod (206); a coil cover (201) is installed at the end of the coil seat (202); the coil seat (202) is installed on the vacuum chamber body (101) via the flange (211); and the flange A flange insulating gasket (212), a flange fixing plate (214) and a flange fixing plate connecting flange (215) are installed between the plate (211) and the vacuum chamber body (101); a flange fixing plate insulating gasket (213) is installed between the flange insulating gasket (212) and the flange fixing plate (214); a water jacket (209) is installed on the flange (211); a copper seat (210) is installed between the water jacket (209) and the flange (211); a water jacket insulating gasket (216) is installed on the water jacket (209); and a magnet plate (208) is installed on the water jacket (209).

3. The vacuum coating equipment for kitchenware according to claim 1, characterized in that: The magnetron sputtering source (3) comprises a target material (301) and a water pipe assembly (305); the water pipe assembly (305) is installed inside the target material (301), and a magnetic core (302) is installed between the water pipe assembly (305) and the target material (301); the two end portions of the target material (301) are respectively installed with a clamping nut (304) and a target head (307); the two end portions of the water pipe assembly (305) are respectively installed with a water pipe shaft sleeve (303) and a gasket (308); and the target head (307) is installed with an insulating sleeve (306).

4. The vacuum coating equipment for kitchenware according to claim 3, characterized in that: The water pipe assembly (305) comprises a water pipe shaft sleeve (303) and a gasket (308), and the water pipe shaft sleeve (303) and the gasket (308) are respectively installed at both end portions of the water pipe assembly (305).

5. The vacuum coating equipment for kitchenware according to claim 1, characterized in that: The workpiece rack (4) comprises an external tooth fixed gear ring (402), on which a plurality of support columns (401) are evenly mounted, the external tooth fixed gear ring (402) is mounted on the top of the vacuum chamber body (101) via the plurality of support columns (401), a rotatable revolving internal tooth ring (403) is mounted on the top of the external tooth fixed gear ring (402), a plurality of self-rotating shafts (405) are equidistantly mounted on the circumferential direction of the revolving internal tooth ring (403), each of the self-rotating shafts (405) is mounted with a self-rotating gear (404) that rotates synchronously therewith, and a hanger rod (406) is mounted on the bottom end of the self-rotating shaft (405).

6. The vacuum coating equipment for kitchenware according to claim 5, characterized in that: The workpiece rack (4) further comprises a power seat assembly (407), a driving gear (408) being mounted on the power seat assembly (407), and the driving gear (408) being meshed with the revolving internal gear ring (403).

7. The vacuum coating equipment for kitchenware according to claim 1, characterized in that: The pump group pipeline system (5) comprises a vacuum pump (501), a Roots pump (502), a maintenance pump (503) and a molecular pump (504), and the vacuum pump (501), the Roots pump (502), the maintenance pump (503) and the molecular pump (504) are connected through a pipeline (505).

8. The vacuum coating equipment for kitchenware according to claim 1, characterized in that: The vacuum chamber body (101) and the sealing door (102) are both made of stainless steel, and the vacuum chamber body (101) is provided with an air inlet and an air outlet for introducing and exhausting gas, respectively.

Images